CN102208423B - 固体摄像装置、制造固体摄像装置的方法和电子设备 - Google Patents

固体摄像装置、制造固体摄像装置的方法和电子设备 Download PDF

Info

Publication number
CN102208423B
CN102208423B CN201110075913.6A CN201110075913A CN102208423B CN 102208423 B CN102208423 B CN 102208423B CN 201110075913 A CN201110075913 A CN 201110075913A CN 102208423 B CN102208423 B CN 102208423B
Authority
CN
China
Prior art keywords
conductivity type
electric charge
impurity
region
charge holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110075913.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN102208423A (zh
Inventor
大理洋征龙
町田贵志
河村隆宏
十河康则
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of CN102208423A publication Critical patent/CN102208423A/zh
Application granted granted Critical
Publication of CN102208423B publication Critical patent/CN102208423B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8027Geometry of the photosensitive area
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/50Control of the SSIS exposure
    • H04N25/53Control of the integration time
    • H04N25/532Control of the integration time by controlling global shutters in CMOS SSIS
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/771Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising storage means other than floating diffusion
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/186Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors having arrangements for blooming suppression
    • H10F39/1865Overflow drain structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8033Photosensitive area
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80377Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the channel of the transistor, e.g. channel having a doping gradient

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
CN201110075913.6A 2010-03-31 2011-03-24 固体摄像装置、制造固体摄像装置的方法和电子设备 Expired - Fee Related CN102208423B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-083600 2010-03-31
JP2010083600A JP2011216673A (ja) 2010-03-31 2010-03-31 固体撮像装置、固体撮像装置の製造方法、および電子機器

Publications (2)

Publication Number Publication Date
CN102208423A CN102208423A (zh) 2011-10-05
CN102208423B true CN102208423B (zh) 2015-08-19

Family

ID=44697173

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110075913.6A Expired - Fee Related CN102208423B (zh) 2010-03-31 2011-03-24 固体摄像装置、制造固体摄像装置的方法和电子设备

Country Status (3)

Country Link
US (1) US8629484B2 (enExample)
JP (1) JP2011216673A (enExample)
CN (1) CN102208423B (enExample)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5671830B2 (ja) * 2010-03-31 2015-02-18 ソニー株式会社 固体撮像素子、固体撮像素子の製造方法、および電子機器
JP5709099B2 (ja) * 2010-05-24 2015-04-30 株式会社ブルックマンテクノロジ 固体撮像装置
JP5637384B2 (ja) * 2010-12-15 2014-12-10 ソニー株式会社 固体撮像素子および駆動方法、並びに電子機器
JP6012197B2 (ja) * 2012-02-17 2016-10-25 キヤノン株式会社 撮像装置及び撮像装置の駆動方法
JP6004665B2 (ja) * 2012-02-17 2016-10-12 キヤノン株式会社 撮像装置、および撮像システム。
KR20130106978A (ko) * 2012-03-21 2013-10-01 삼성전자주식회사 이미지 센서의 단위 픽셀 및 이를 포함하는 이미지 센서
JP2014011253A (ja) * 2012-06-28 2014-01-20 Sony Corp 固体撮像装置および電子機器
US9293500B2 (en) 2013-03-01 2016-03-22 Apple Inc. Exposure control for image sensors
US9276031B2 (en) 2013-03-04 2016-03-01 Apple Inc. Photodiode with different electric potential regions for image sensors
US9041837B2 (en) 2013-03-05 2015-05-26 Apple Inc. Image sensor with reduced blooming
US9741754B2 (en) * 2013-03-06 2017-08-22 Apple Inc. Charge transfer circuit with storage nodes in image sensors
US9549099B2 (en) 2013-03-12 2017-01-17 Apple Inc. Hybrid image sensor
US9319611B2 (en) 2013-03-14 2016-04-19 Apple Inc. Image sensor with flexible pixel summing
JP6159184B2 (ja) * 2013-07-25 2017-07-05 キヤノン株式会社 光電変換装置及び撮像システム
JP6141160B2 (ja) 2013-09-25 2017-06-07 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子およびその動作方法、並びに電子機器およびその動作方法
JP2015095468A (ja) * 2013-11-08 2015-05-18 ソニー株式会社 固体撮像素子および固体撮像素子の製造方法、並びに電子機器
US9596423B1 (en) 2013-11-21 2017-03-14 Apple Inc. Charge summing in an image sensor
US9596420B2 (en) 2013-12-05 2017-03-14 Apple Inc. Image sensor having pixels with different integration periods
US9473706B2 (en) 2013-12-09 2016-10-18 Apple Inc. Image sensor flicker detection
US10285626B1 (en) 2014-02-14 2019-05-14 Apple Inc. Activity identification using an optical heart rate monitor
US9277144B2 (en) 2014-03-12 2016-03-01 Apple Inc. System and method for estimating an ambient light condition using an image sensor and field-of-view compensation
US9232150B2 (en) 2014-03-12 2016-01-05 Apple Inc. System and method for estimating an ambient light condition using an image sensor
US9584743B1 (en) 2014-03-13 2017-02-28 Apple Inc. Image sensor with auto-focus and pixel cross-talk compensation
US9497397B1 (en) 2014-04-08 2016-11-15 Apple Inc. Image sensor with auto-focus and color ratio cross-talk comparison
US9538106B2 (en) 2014-04-25 2017-01-03 Apple Inc. Image sensor having a uniform digital power signature
JP6308864B2 (ja) * 2014-05-15 2018-04-11 キヤノン株式会社 撮像装置
US9686485B2 (en) 2014-05-30 2017-06-20 Apple Inc. Pixel binning in an image sensor
JP6547158B2 (ja) * 2014-12-08 2019-07-24 株式会社ブルックマンテクノロジ 光検出素子及び固体撮像装置
US10205893B2 (en) 2015-03-25 2019-02-12 Sony Corporation Solid-state imaging device and driving method of solid-state imaging device
JP2017054947A (ja) * 2015-09-10 2017-03-16 セイコーエプソン株式会社 固体撮像素子及びその製造方法、並びに、電子機器
JP6664175B2 (ja) * 2015-09-11 2020-03-13 キヤノン株式会社 撮像装置及び撮像装置の製造方法
JP2017143189A (ja) * 2016-02-10 2017-08-17 ルネサスエレクトロニクス株式会社 固体撮像素子
US9912883B1 (en) 2016-05-10 2018-03-06 Apple Inc. Image sensor with calibrated column analog-to-digital converters
US10658419B2 (en) 2016-09-23 2020-05-19 Apple Inc. Stacked backside illuminated SPAD array
US10777594B2 (en) * 2016-12-01 2020-09-15 Sony Semiconductor Solutions Corporation Solid-state imaging element, solid-state imaging element manufacturing method, and imaging device
US10656251B1 (en) 2017-01-25 2020-05-19 Apple Inc. Signal acquisition in a SPAD detector
JP6799690B2 (ja) 2017-01-25 2020-12-16 アップル インコーポレイテッドApple Inc. 変調感度を有するspad検出器
JP6957157B2 (ja) * 2017-01-26 2021-11-02 キヤノン株式会社 固体撮像装置、撮像システム、および固体撮像装置の製造方法
US10962628B1 (en) 2017-01-26 2021-03-30 Apple Inc. Spatial temporal weighting in a SPAD detector
WO2018193747A1 (en) * 2017-04-19 2018-10-25 Sony Semiconductor Solutions Corporation Semiconductor device, method of manufacturing the same, and electronic apparatus
JP6650909B2 (ja) * 2017-06-20 2020-02-19 キヤノン株式会社 撮像装置、撮像システム、移動体、および、撮像装置の製造方法
US10622538B2 (en) 2017-07-18 2020-04-14 Apple Inc. Techniques for providing a haptic output and sensing a haptic input using a piezoelectric body
US10440301B2 (en) 2017-09-08 2019-10-08 Apple Inc. Image capture device, pixel, and method providing improved phase detection auto-focus performance
CN110098203B (zh) * 2018-01-30 2024-09-24 维深半导体公司 背照式图像传感器及其制备
US10559614B2 (en) * 2018-03-09 2020-02-11 Semiconductor Components Industries, Llc Dual conversion gain circuitry with buried channels
US10848693B2 (en) 2018-07-18 2020-11-24 Apple Inc. Image flare detection using asymmetric pixels
US11019294B2 (en) 2018-07-18 2021-05-25 Apple Inc. Seamless readout mode transitions in image sensors
JP2020043413A (ja) * 2018-09-07 2020-03-19 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置および電子機器
US11233966B1 (en) 2018-11-29 2022-01-25 Apple Inc. Breakdown voltage monitoring for avalanche diodes
TWI685959B (zh) * 2019-01-07 2020-02-21 力晶積成電子製造股份有限公司 影像感測器及其製造方法
US11503234B2 (en) * 2019-02-27 2022-11-15 Canon Kabushiki Kaisha Photoelectric conversion device, imaging system, radioactive ray imaging system, and movable object
JP6818075B2 (ja) * 2019-04-08 2021-01-20 浜松ホトニクス株式会社 固体撮像装置
KR102791695B1 (ko) * 2020-04-29 2025-04-07 에스케이하이닉스 주식회사 이미지 센서
JP7652543B2 (ja) * 2020-07-29 2025-03-27 キヤノン株式会社 光電変換装置
US11563910B2 (en) 2020-08-04 2023-01-24 Apple Inc. Image capture devices having phase detection auto-focus pixels
US12356740B2 (en) 2020-09-25 2025-07-08 Apple Inc. Transistor integration with stacked single-photon avalanche diode (SPAD) pixel arrays
US11546532B1 (en) 2021-03-16 2023-01-03 Apple Inc. Dynamic correlated double sampling for noise rejection in image sensors
US12192644B2 (en) 2021-07-29 2025-01-07 Apple Inc. Pulse-width modulation pixel sensor
US12069384B2 (en) 2021-09-23 2024-08-20 Apple Inc. Image capture devices having phase detection auto-focus pixels

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1707804A (zh) * 2004-06-04 2005-12-14 三星电子株式会社 用于减小暗电流的图像传感器及其制造方法
CN101562707A (zh) * 2008-04-03 2009-10-21 索尼株式会社 固体摄像器件、固体摄像器件的驱动方法以及电子装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5294534B2 (ja) * 2004-06-04 2013-09-18 三星電子株式会社 Cmosイメージセンサー及びその製造方法
JP2008004692A (ja) * 2006-06-21 2008-01-10 Nikon Corp 固体撮像装置
JP4710017B2 (ja) * 2006-10-20 2011-06-29 国立大学法人静岡大学 Cmosイメージセンサ
JP5213501B2 (ja) * 2008-04-09 2013-06-19 キヤノン株式会社 固体撮像装置
JP5335271B2 (ja) * 2008-04-09 2013-11-06 キヤノン株式会社 光電変換装置及びそれを用いた撮像システム
JP5671830B2 (ja) * 2010-03-31 2015-02-18 ソニー株式会社 固体撮像素子、固体撮像素子の製造方法、および電子機器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1707804A (zh) * 2004-06-04 2005-12-14 三星电子株式会社 用于减小暗电流的图像传感器及其制造方法
CN101562707A (zh) * 2008-04-03 2009-10-21 索尼株式会社 固体摄像器件、固体摄像器件的驱动方法以及电子装置

Also Published As

Publication number Publication date
US20110241089A1 (en) 2011-10-06
JP2011216673A (ja) 2011-10-27
CN102208423A (zh) 2011-10-05
US8629484B2 (en) 2014-01-14

Similar Documents

Publication Publication Date Title
CN102208423B (zh) 固体摄像装置、制造固体摄像装置的方法和电子设备
US8716719B2 (en) Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus
JP5671830B2 (ja) 固体撮像素子、固体撮像素子の製造方法、および電子機器
JP5651976B2 (ja) 固体撮像素子およびその製造方法、並びに電子機器
US8884206B2 (en) Solid-state imaging element, driving method, and electronic apparatus
US8810703B2 (en) Solid-state image pickup device, driving method of solid-state image pickup device, and electronic device
JP4752926B2 (ja) 固体撮像装置、固体撮像装置の製造方法、固体撮像装置の駆動方法、電子機器
US8785993B2 (en) Solid-state imaging element, manufacturing method, and electronic device
US20180227517A1 (en) Solid-state imaging device, method of driving the same, and electronic apparatus
JP5531580B2 (ja) 固体撮像装置、および、その製造方法、電子機器
JP2011204878A (ja) 固体撮像デバイスおよび電子機器
US20110241080A1 (en) Solid-state imaging device, method for manufacturing the same, and electronic apparatus
JP2015053411A (ja) 固体撮像素子、固体撮像素子の製造方法、および電子機器
JP2009268083A (ja) 固体撮像装置、固体撮像装置の駆動方法および電子機器
CN107221543A (zh) 固态成像器件、用于驱动其的方法、用于制造其的方法
JP2015023250A (ja) 固体撮像素子及びその駆動方法、並びに電子機器
KR20160077055A (ko) 고체 촬상 소자 및 그 제조 방법, 및 전자 기기
KR20150002593A (ko) 고체 촬상 장치 및 전자 기기
WO2014141898A1 (ja) 固体撮像素子、製造方法、および電子機器
CN103179357A (zh) 固态摄像装置、固态摄像装置的制造方法以及电子装置
JP2011204991A (ja) 固体撮像素子およびその製造方法、並びに電子機器
JP2006086394A (ja) 固体撮像装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150819