CN101589472B - 形成用于太阳能电池的吸收层的多层结构及方法 - Google Patents
形成用于太阳能电池的吸收层的多层结构及方法 Download PDFInfo
- Publication number
- CN101589472B CN101589472B CN2007800502716A CN200780050271A CN101589472B CN 101589472 B CN101589472 B CN 101589472B CN 2007800502716 A CN2007800502716 A CN 2007800502716A CN 200780050271 A CN200780050271 A CN 200780050271A CN 101589472 B CN101589472 B CN 101589472B
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- CN
- China
- Prior art keywords
- dopant
- layer
- group
- containing film
- precursor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/126—Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
- H10F10/167—Photovoltaic cells having only PN heterojunction potential barriers comprising Group I-III-VI materials, e.g. CdS/CuInSe2 [CIS] heterojunction photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/126—Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
- H10F77/1265—Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS] characterised by the dopants
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US86927606P | 2006-12-08 | 2006-12-08 | |
| US60/869,276 | 2006-12-08 | ||
| US87082706P | 2006-12-19 | 2006-12-19 | |
| US60/870,827 | 2006-12-19 | ||
| US11/852,980 | 2007-09-10 | ||
| US11/852,980 US20080169025A1 (en) | 2006-12-08 | 2007-09-10 | Doping techniques for group ibiiiavia compound layers |
| PCT/US2007/086300 WO2008127449A2 (en) | 2006-12-08 | 2007-12-03 | Doping techniques for group ibiiiavia compound layers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101589472A CN101589472A (zh) | 2009-11-25 |
| CN101589472B true CN101589472B (zh) | 2012-09-05 |
Family
ID=39616847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800502716A Expired - Fee Related CN101589472B (zh) | 2006-12-08 | 2007-12-03 | 形成用于太阳能电池的吸收层的多层结构及方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20080169025A1 (enExample) |
| EP (1) | EP2097930A2 (enExample) |
| JP (1) | JP2010512647A (enExample) |
| KR (1) | KR20090106513A (enExample) |
| CN (1) | CN101589472B (enExample) |
| TW (1) | TW200834944A (enExample) |
| WO (1) | WO2008127449A2 (enExample) |
Families Citing this family (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070163640A1 (en) * | 2004-02-19 | 2007-07-19 | Nanosolar, Inc. | High-throughput printing of semiconductor precursor layer by use of chalcogen-rich chalcogenides |
| US7892413B2 (en) * | 2006-09-27 | 2011-02-22 | Solopower, Inc. | Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films |
| US8066865B2 (en) * | 2008-05-19 | 2011-11-29 | Solopower, Inc. | Electroplating methods and chemistries for deposition of group IIIA-group via thin films |
| US20100140098A1 (en) * | 2008-05-15 | 2010-06-10 | Solopower, Inc. | Selenium containing electrodeposition solution and methods |
| US8409418B2 (en) * | 2009-02-06 | 2013-04-02 | Solopower, Inc. | Enhanced plating chemistries and methods for preparation of group IBIIIAVIA thin film solar cell absorbers |
| US8425753B2 (en) * | 2008-05-19 | 2013-04-23 | Solopower, Inc. | Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films |
| US20090283411A1 (en) * | 2008-05-15 | 2009-11-19 | Serdar Aksu | Selenium electroplating chemistries and methods |
| IT1391802B1 (it) * | 2008-11-21 | 2012-01-27 | Consiglio Nazionale Ricerche | Metodo di realizzazione di celle solari multistrato a film sottile |
| EP2399295B1 (en) * | 2009-02-20 | 2019-04-10 | Beijing Apollo Ding rong Solar Technology Co., Ltd. | Protective layer for large-scale production of thin-film solar cells |
| US8709856B2 (en) * | 2009-03-09 | 2014-04-29 | Zetta Research and Development LLC—AQT Series | Enhancement of semiconducting photovoltaic absorbers by the addition of alkali salts through solution coating techniques |
| DE102009013903A1 (de) * | 2009-03-19 | 2010-09-23 | Clariant International Limited | Solarzellen mit einer Barriereschicht auf Basis von Polysilazan |
| US7897020B2 (en) * | 2009-04-13 | 2011-03-01 | Miasole | Method for alkali doping of thin film photovoltaic materials |
| WO2010126699A2 (en) | 2009-04-29 | 2010-11-04 | Hunter Douglas Industries B.V. | Architectural panels with organic photovoltaic interlayers and methods of forming the same |
| US8277894B2 (en) * | 2009-07-16 | 2012-10-02 | Rohm And Haas Electronic Materials Llc | Selenium ink and methods of making and using same |
| US20110048493A1 (en) * | 2009-09-02 | 2011-03-03 | Electronics And Telecommunications Research Institute | Solar cell |
| KR101306913B1 (ko) * | 2009-09-02 | 2013-09-10 | 한국전자통신연구원 | 태양 전지 |
| US20110067998A1 (en) * | 2009-09-20 | 2011-03-24 | Miasole | Method of making an electrically conductive cadmium sulfide sputtering target for photovoltaic manufacturing |
| TW201124544A (en) * | 2009-11-24 | 2011-07-16 | Applied Quantum Technology Llc | Chalcogenide absorber layers for photovoltaic applications and methods of manufacturing the same |
| CN102656701B (zh) * | 2009-12-15 | 2016-05-04 | 第一太阳能有限公司 | 光伏窗口层 |
| CN102859046A (zh) * | 2009-12-18 | 2013-01-02 | 索罗能源公司 | Ib/iiia/via族薄膜太阳能吸收器的镀覆化学物 |
| TWI520367B (zh) * | 2010-02-09 | 2016-02-01 | 陶氏全球科技公司 | 具透明導電阻擋層之光伏打裝置 |
| TWI405347B (zh) * | 2010-07-02 | 2013-08-11 | Gcsol Tech Co Ltd | Cigs太陽能電池 |
| US8048707B1 (en) | 2010-10-19 | 2011-11-01 | Miasole | Sulfur salt containing CIG targets, methods of making and methods of use thereof |
| US7935558B1 (en) | 2010-10-19 | 2011-05-03 | Miasole | Sodium salt containing CIG targets, methods of making and methods of use thereof |
| US9169548B1 (en) | 2010-10-19 | 2015-10-27 | Apollo Precision Fujian Limited | Photovoltaic cell with copper poor CIGS absorber layer and method of making thereof |
| US20120132281A1 (en) * | 2010-11-26 | 2012-05-31 | Nexpower Technology Corporation | Thin-film solar cell and manufacturing method thereof |
| US8404512B1 (en) * | 2011-03-04 | 2013-03-26 | Solopower, Inc. | Crystallization methods for preparing group IBIIIAVIA thin film solar absorbers |
| TWI538235B (zh) | 2011-04-19 | 2016-06-11 | 弗里松股份有限公司 | 薄膜光伏打裝置及製造方法 |
| FR2977078B1 (fr) | 2011-06-27 | 2013-06-28 | Saint Gobain | Substrat conducteur pour cellule photovoltaique |
| US8436445B2 (en) * | 2011-08-15 | 2013-05-07 | Stion Corporation | Method of manufacture of sodium doped CIGS/CIGSS absorber layers for high efficiency photovoltaic devices |
| KR101896951B1 (ko) * | 2011-10-13 | 2018-09-12 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
| TWI500170B (zh) * | 2011-11-22 | 2015-09-11 | Lu Chung Hsin | 製造摻雜Bi之IB-IIIA-VIA化合物之光吸收層的方法與包含其之太陽能電池 |
| US10043921B1 (en) | 2011-12-21 | 2018-08-07 | Beijing Apollo Ding Rong Solar Technology Co., Ltd. | Photovoltaic cell with high efficiency cigs absorber layer with low minority carrier lifetime and method of making thereof |
| CN103258899A (zh) * | 2012-02-17 | 2013-08-21 | 任丘市永基光电太阳能有限公司 | 一种柔性不锈钢衬底上cigs吸收层制备方法 |
| US20130213478A1 (en) * | 2012-02-21 | 2013-08-22 | Aqt Solar, Inc. | Enhancing the Photovoltaic Response of CZTS Thin-Films |
| CN103296130A (zh) * | 2012-03-05 | 2013-09-11 | 任丘市永基光电太阳能有限公司 | 一种柔性不锈钢衬底上CIGS吸收层的Na掺杂方法 |
| KR20130105325A (ko) * | 2012-03-12 | 2013-09-25 | 한국에너지기술연구원 | Na 무함유 기판을 이용한 CIGS계 박막 태양전지의 제조방법 및 이에 따라 제조된 태양전지 |
| JP5878416B2 (ja) * | 2012-03-30 | 2016-03-08 | 本田技研工業株式会社 | カルコパイライト型太陽電池及びその製造方法 |
| US20140090710A1 (en) * | 2012-09-29 | 2014-04-03 | Precursor Energetics, Inc. | Ink deposition processes for thin film cigs absorbers |
| TWI463685B (zh) * | 2012-12-17 | 2014-12-01 | Ind Tech Res Inst | 多層堆疊的光吸收薄膜與其製造方法及太陽能電池 |
| CN104704617B (zh) | 2012-12-21 | 2018-03-20 | 弗立泽姆公司 | 制造添加有钾的薄膜光电装置 |
| KR101450426B1 (ko) * | 2013-01-09 | 2014-10-14 | 연세대학교 산학협력단 | 칼코겐화물 흡수층용 나트륨 도핑 용액 및 이를 이용한 박막태양전지 제조방법 |
| KR101458427B1 (ko) * | 2013-03-12 | 2014-11-10 | 한국에너지기술연구원 | 성능이 향상된 ci(g)s 박막 제조 방법과 이를 이용한 태양전지. |
| TWI559560B (zh) * | 2013-08-13 | 2016-11-21 | 呂宗昕 | 光吸收層、包含光吸收層的太陽能電池、用以製備光吸收層的前驅物溶液及製造光吸收層的方法 |
| CN103710674B (zh) * | 2013-11-26 | 2017-10-20 | 山东希格斯新能源有限责任公司 | 一种制备cigs薄膜太阳能电池工艺方法 |
| KR101485009B1 (ko) * | 2013-12-20 | 2015-01-26 | 한국생산기술연구원 | Cigs계 박막 태양 전지의 제조 방법 및 이에 따른 태양 전지 |
| TWI677105B (zh) | 2014-05-23 | 2019-11-11 | 瑞士商弗里松股份有限公司 | 製造薄膜光電子裝置之方法及可藉由該方法獲得的薄膜光電子裝置 |
| TWI661991B (zh) | 2014-09-18 | 2019-06-11 | 瑞士商弗里松股份有限公司 | 用於製造薄膜裝置之自組裝圖案化 |
| US10516069B2 (en) * | 2014-10-20 | 2019-12-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Absorber surface modification |
| WO2017137271A1 (en) | 2016-02-11 | 2017-08-17 | Flisom Ag | Self-Assembly Patterning for Fabricating Thin-Film Devices |
| EP3414780B1 (en) | 2016-02-11 | 2020-12-02 | Flisom AG | Fabricating thin-film optoelectronic devices with added rubidium and/or cesium |
| CN105742412A (zh) * | 2016-04-28 | 2016-07-06 | 中国科学院上海微系统与信息技术研究所 | 一种薄膜太阳能电池吸收层碱金属掺入方法 |
| EP3627564A1 (de) * | 2018-09-22 | 2020-03-25 | (CNBM) Bengbu Design & Research Institute for Glass Industry Co., Ltd. | Verfahren zur nachbehandlung einer absorberschicht |
| CN111326602A (zh) * | 2018-12-17 | 2020-06-23 | 北京铂阳顶荣光伏科技有限公司 | 一种铜铟镓硒太阳能薄膜的退火工艺、装置及制备方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4547622A (en) * | 1984-04-27 | 1985-10-15 | Massachusetts Institute Of Technology | Solar cells and photodetectors |
| US7064263B2 (en) * | 1998-02-26 | 2006-06-20 | Canon Kabushiki Kaisha | Stacked photovoltaic device |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4581108A (en) * | 1984-01-06 | 1986-04-08 | Atlantic Richfield Company | Process of forming a compound semiconductive material |
| US4798660A (en) * | 1985-07-16 | 1989-01-17 | Atlantic Richfield Company | Method for forming Cu In Se2 films |
| US5730852A (en) * | 1995-09-25 | 1998-03-24 | Davis, Joseph & Negley | Preparation of cuxinygazsen (X=0-2, Y=0-2, Z=0-2, N=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells |
| JP3249408B2 (ja) * | 1996-10-25 | 2002-01-21 | 昭和シェル石油株式会社 | 薄膜太陽電池の薄膜光吸収層の製造方法及び製造装置 |
| US6339013B1 (en) * | 1997-05-13 | 2002-01-15 | The Board Of Trustees Of The University Of Arkansas | Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells |
| JP2001044464A (ja) * | 1999-07-28 | 2001-02-16 | Asahi Chem Ind Co Ltd | Ib―IIIb―VIb2族化合物半導体層の形成方法、薄膜太陽電池の製造方法 |
| US6441301B1 (en) * | 2000-03-23 | 2002-08-27 | Matsushita Electric Industrial Co., Ltd. | Solar cell and method of manufacturing the same |
| US7842882B2 (en) * | 2004-03-01 | 2010-11-30 | Basol Bulent M | Low cost and high throughput deposition methods and apparatus for high density semiconductor film growth |
| AU2003207295A1 (en) * | 2002-02-14 | 2003-09-04 | Honda Giken Kogyo Kabushiki Kaisha | Light absorbing layer forming method |
| US20050056863A1 (en) * | 2003-09-17 | 2005-03-17 | Matsushita Electric Industrial Co., Ltd. | Semiconductor film, method for manufacturing the semiconductor film, solar cell using the semiconductor film and method for manufacturing the solar cell |
| US7374963B2 (en) * | 2004-03-15 | 2008-05-20 | Solopower, Inc. | Technique and apparatus for depositing thin layers of semiconductors for solar cell fabrication |
| CN100463230C (zh) * | 2004-05-11 | 2009-02-18 | 本田技研工业株式会社 | 黄铜矿型薄膜太阳能电池的制造方法 |
| WO2006053128A2 (en) * | 2004-11-10 | 2006-05-18 | Daystar Technologies, Inc. | Pallet based system for forming thin-film solar cells |
| JP4471855B2 (ja) * | 2005-01-25 | 2010-06-02 | 本田技研工業株式会社 | カルコパイライト型薄膜太陽電池の製造方法 |
-
2007
- 2007-09-10 US US11/852,980 patent/US20080169025A1/en not_active Abandoned
- 2007-12-03 CN CN2007800502716A patent/CN101589472B/zh not_active Expired - Fee Related
- 2007-12-03 JP JP2009540413A patent/JP2010512647A/ja active Pending
- 2007-12-03 EP EP07873652A patent/EP2097930A2/en not_active Withdrawn
- 2007-12-03 WO PCT/US2007/086300 patent/WO2008127449A2/en not_active Ceased
- 2007-12-03 KR KR1020097014297A patent/KR20090106513A/ko not_active Ceased
- 2007-12-07 TW TW096146909A patent/TW200834944A/zh unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4547622A (en) * | 1984-04-27 | 1985-10-15 | Massachusetts Institute Of Technology | Solar cells and photodetectors |
| US7064263B2 (en) * | 1998-02-26 | 2006-06-20 | Canon Kabushiki Kaisha | Stacked photovoltaic device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20090106513A (ko) | 2009-10-09 |
| JP2010512647A (ja) | 2010-04-22 |
| WO2008127449A2 (en) | 2008-10-23 |
| CN101589472A (zh) | 2009-11-25 |
| TW200834944A (en) | 2008-08-16 |
| EP2097930A2 (en) | 2009-09-09 |
| WO2008127449A3 (en) | 2009-01-15 |
| US20080169025A1 (en) | 2008-07-17 |
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