CN101490837B - 非易失性半导体存储器及其驱动方法 - Google Patents
非易失性半导体存储器及其驱动方法 Download PDFInfo
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- CN101490837B CN101490837B CN2007800262290A CN200780026229A CN101490837B CN 101490837 B CN101490837 B CN 101490837B CN 2007800262290 A CN2007800262290 A CN 2007800262290A CN 200780026229 A CN200780026229 A CN 200780026229A CN 101490837 B CN101490837 B CN 101490837B
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- memory cell
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- nonvolatile semiconductor
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 84
- 238000000034 method Methods 0.000 title claims description 85
- 230000015654 memory Effects 0.000 claims abstract description 112
- 238000009825 accumulation Methods 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000002784 hot electron Substances 0.000 claims description 7
- 230000004888 barrier function Effects 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 abstract description 42
- 239000011159 matrix material Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 102
- 238000004519 manufacturing process Methods 0.000 description 58
- 238000005530 etching Methods 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0416—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/08—Address circuits; Decoders; Word-line control circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7889—Vertical transistors, i.e. transistors having source and drain not in the same horizontal plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
- H01L29/7926—Vertical transistors, i.e. transistors having source and drain not in the same horizontal plane
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7884—Programmable transistors with only two possible levels of programmation charging by hot carrier injection
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/10—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the top-view layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/10—EEPROM devices comprising charge-trapping gate insulators characterised by the top-view layout
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006191470A JP5088465B2 (ja) | 2006-07-12 | 2006-07-12 | 不揮発性半導体メモリ |
JP191470/2006 | 2006-07-12 | ||
PCT/JP2007/063889 WO2008007731A1 (en) | 2006-07-12 | 2007-07-12 | Nonvolatile semiconductor memory and its drive method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101490837A CN101490837A (zh) | 2009-07-22 |
CN101490837B true CN101490837B (zh) | 2010-09-29 |
Family
ID=38923287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007800262290A Active CN101490837B (zh) | 2006-07-12 | 2007-07-12 | 非易失性半导体存储器及其驱动方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7940574B2 (zh) |
EP (2) | EP2043145A4 (zh) |
JP (1) | JP5088465B2 (zh) |
KR (1) | KR101020846B1 (zh) |
CN (1) | CN101490837B (zh) |
TW (1) | TW200814068A (zh) |
WO (1) | WO2008007731A1 (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7906818B2 (en) | 2008-03-13 | 2011-03-15 | Micron Technology, Inc. | Memory array with a pair of memory-cell strings to a single conductive pillar |
JP5209674B2 (ja) * | 2010-07-27 | 2013-06-12 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッド | 不揮発性半導体メモリトランジスタ、および、不揮発性半導体メモリの製造方法 |
JP5209677B2 (ja) * | 2010-07-29 | 2013-06-12 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッド | 不揮発性半導体メモリトランジスタ、および、不揮発性半導体メモリの製造方法 |
US9041092B2 (en) * | 2012-09-07 | 2015-05-26 | Unisantis Electronics Singapore Pte. Ltd. | Semiconductor device and method for producing the same |
KR102054181B1 (ko) | 2013-02-26 | 2019-12-10 | 삼성전자주식회사 | 수직형 메모리 장치 및 그 제조 방법 |
JP5707003B1 (ja) * | 2013-11-07 | 2015-04-22 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 記憶装置、半導体装置、及び記憶装置、半導体装置の製造方法 |
WO2018182720A1 (en) * | 2017-03-31 | 2018-10-04 | Intel Corporation | Technique for contact formation in a vertical transistor |
CN109326604A (zh) * | 2017-08-01 | 2019-02-12 | 华邦电子股份有限公司 | 三维存储器及其操作方法 |
KR20230012697A (ko) * | 2021-07-16 | 2023-01-26 | 에스케이하이닉스 주식회사 | 비휘발성 메모리 장치에 데이터를 삭제하기 위한 장치 및 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6033957A (en) * | 1997-01-22 | 2000-03-07 | International Business Machines Corporation | 4F-square memory cell having vertical floating-gate transistors with self-aligned shallow trench isolation |
US6380032B1 (en) * | 2000-02-11 | 2002-04-30 | Samsung Electronics Co., Ltd. | Flash memory device and method of making same |
JP4302477B2 (ja) * | 2003-10-10 | 2009-07-29 | 株式会社パブコ | ドア枠材およびドア |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3046376B2 (ja) * | 1991-03-29 | 2000-05-29 | 株式会社東芝 | 不揮発性半導体メモリ装置 |
US5386132A (en) * | 1992-11-02 | 1995-01-31 | Wong; Chun C. D. | Multimedia storage system with highly compact memory device |
JP3743453B2 (ja) * | 1993-01-27 | 2006-02-08 | セイコーエプソン株式会社 | 不揮発性半導体記憶装置 |
JPH06296025A (ja) * | 1993-04-08 | 1994-10-21 | Nippon Steel Corp | 不揮発性半導体メモリ装置 |
JP3392547B2 (ja) * | 1994-11-21 | 2003-03-31 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JPH09259591A (ja) * | 1996-03-21 | 1997-10-03 | Ricoh Co Ltd | 不揮発性半導体記憶装置 |
US5998263A (en) * | 1996-05-16 | 1999-12-07 | Altera Corporation | High-density nonvolatile memory cell |
JP3743189B2 (ja) * | 1999-01-27 | 2006-02-08 | 富士通株式会社 | 不揮発性半導体記憶装置及びその製造方法 |
US6314026B1 (en) * | 1999-02-08 | 2001-11-06 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor device using local self boost technique |
US6240016B1 (en) * | 1999-12-17 | 2001-05-29 | Advanced Micro Devices, Inc. | Method to reduce read gate disturb for flash EEPROM application |
JP3963677B2 (ja) * | 2001-06-23 | 2007-08-22 | 富士雄 舛岡 | 半導体記憶装置の製造方法 |
DE10295303B4 (de) * | 2001-09-25 | 2017-07-13 | Sony Corporation | Nichtflüchtige Halbleiterspeichervorrichtung mit Ladungsspeicherfilm und Speicherperipherieschaltungen, Verfahren zu deren Betrieb und Verfahren zu deren Herstellung |
JP4102112B2 (ja) * | 2002-06-06 | 2008-06-18 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP2005012137A (ja) * | 2003-06-23 | 2005-01-13 | National Institute Of Advanced Industrial & Technology | 二重ゲート型不揮発性メモリ素子 |
DE10352785A1 (de) * | 2003-11-12 | 2005-06-02 | Infineon Technologies Ag | Speichertransistor und Speichereinheit mit asymmetrischem Kanaldotierbereich |
JP2005191489A (ja) * | 2003-12-26 | 2005-07-14 | Sharp Corp | 半導体記憶装置およびその製造方法 |
JP2005268418A (ja) * | 2004-03-17 | 2005-09-29 | Fujio Masuoka | 半導体記憶装置及びその製造方法 |
JP4331053B2 (ja) | 2004-05-27 | 2009-09-16 | 株式会社東芝 | 半導体記憶装置 |
JP2005260253A (ja) * | 2005-04-04 | 2005-09-22 | Renesas Technology Corp | 半導体集積回路装置およびその製造方法 |
US8159870B2 (en) * | 2008-04-04 | 2012-04-17 | Qualcomm Incorporated | Array structural design of magnetoresistive random access memory (MRAM) bit cells |
-
2006
- 2006-07-12 JP JP2006191470A patent/JP5088465B2/ja active Active
-
2007
- 2007-07-11 TW TW096125164A patent/TW200814068A/zh unknown
- 2007-07-12 CN CN2007800262290A patent/CN101490837B/zh active Active
- 2007-07-12 EP EP07790683A patent/EP2043145A4/en not_active Ceased
- 2007-07-12 KR KR1020097000601A patent/KR101020846B1/ko active IP Right Grant
- 2007-07-12 EP EP13170935.4A patent/EP2639825A3/en not_active Withdrawn
- 2007-07-12 WO PCT/JP2007/063889 patent/WO2008007731A1/ja active Search and Examination
-
2009
- 2009-01-12 US US12/319,782 patent/US7940574B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6033957A (en) * | 1997-01-22 | 2000-03-07 | International Business Machines Corporation | 4F-square memory cell having vertical floating-gate transistors with self-aligned shallow trench isolation |
US6380032B1 (en) * | 2000-02-11 | 2002-04-30 | Samsung Electronics Co., Ltd. | Flash memory device and method of making same |
JP4302477B2 (ja) * | 2003-10-10 | 2009-07-29 | 株式会社パブコ | ドア枠材およびドア |
Also Published As
Publication number | Publication date |
---|---|
EP2639825A2 (en) | 2013-09-18 |
KR20090031416A (ko) | 2009-03-25 |
CN101490837A (zh) | 2009-07-22 |
JP5088465B2 (ja) | 2012-12-05 |
EP2043145A1 (en) | 2009-04-01 |
EP2043145A4 (en) | 2010-11-10 |
US20090129171A1 (en) | 2009-05-21 |
JP2008021782A (ja) | 2008-01-31 |
WO2008007731A1 (en) | 2008-01-17 |
US7940574B2 (en) | 2011-05-10 |
TW200814068A (en) | 2008-03-16 |
KR101020846B1 (ko) | 2011-03-09 |
EP2639825A3 (en) | 2013-10-16 |
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Owner name: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD. Free format text: FORMER OWNER: UNISANTIS ELECTRONICS JAPAN LT Effective date: 20111014 |
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Effective date of registration: 20111014 Address after: Peninsular Plaza, Singapore Co-patentee after: Tokoku University of National University Corp. Patentee after: Unisantis Electronics Singapore Pte. Ltd. Address before: Tokyo, Japan, Japan Co-patentee before: Tokoku University of National University Corp. Patentee before: Unisantis Electronics Japan Lt |