CN101271175B - 光波导器件及其制造方法 - Google Patents

光波导器件及其制造方法 Download PDF

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Publication number
CN101271175B
CN101271175B CN2008100872508A CN200810087250A CN101271175B CN 101271175 B CN101271175 B CN 101271175B CN 2008100872508 A CN2008100872508 A CN 2008100872508A CN 200810087250 A CN200810087250 A CN 200810087250A CN 101271175 B CN101271175 B CN 101271175B
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CN
China
Prior art keywords
substrate
optical device
waveguide
reference mark
optical
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Expired - Fee Related
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CN2008100872508A
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English (en)
Chinese (zh)
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CN101271175A (zh
Inventor
渡边真也
栗原充
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NEC Corp
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NEC Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
    • G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4227—Active alignment methods, e.g. procedures and algorithms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
CN2008100872508A 2007-03-23 2008-03-24 光波导器件及其制造方法 Expired - Fee Related CN101271175B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007077566A JP5186785B2 (ja) 2007-03-23 2007-03-23 光導波路デバイス、光導波路デバイス用光素子実装システム、光素子実装方法、及びそのプログラム
JP2007-077566 2007-03-23

Publications (2)

Publication Number Publication Date
CN101271175A CN101271175A (zh) 2008-09-24
CN101271175B true CN101271175B (zh) 2013-01-30

Family

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CN2008100872508A Expired - Fee Related CN101271175B (zh) 2007-03-23 2008-03-24 光波导器件及其制造方法

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US (1) US7881580B2 (enExample)
EP (1) EP1972975B1 (enExample)
JP (1) JP5186785B2 (enExample)
KR (1) KR100935740B1 (enExample)
CN (1) CN101271175B (enExample)
CA (1) CA2622272A1 (enExample)
TW (1) TW200907443A (enExample)

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JP2015038601A (ja) * 2013-07-18 2015-02-26 シチズンホールディングス株式会社 接合装置および接合方法
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JP7645857B2 (ja) * 2020-02-14 2025-03-14 古河電気工業株式会社 半導体光デバイスおよび半導体光デバイスの製造方法
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CN112693947B (zh) * 2020-12-21 2022-09-27 江苏迪盛智能科技有限公司 拉料偏差处理方法、装置、电子设备和存储介质
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Also Published As

Publication number Publication date
US20080304802A1 (en) 2008-12-11
TW200907443A (en) 2009-02-16
EP1972975B1 (en) 2011-07-06
KR100935740B1 (ko) 2010-01-06
JP2008241732A (ja) 2008-10-09
EP1972975A1 (en) 2008-09-24
CA2622272A1 (en) 2008-09-23
JP5186785B2 (ja) 2013-04-24
CN101271175A (zh) 2008-09-24
KR20080086831A (ko) 2008-09-26
US7881580B2 (en) 2011-02-01

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Termination date: 20170324