US6744953B2 - Planar optical waveguide with alignment structure - Google Patents
Planar optical waveguide with alignment structure Download PDFInfo
- Publication number
- US6744953B2 US6744953B2 US09/949,395 US94939501A US6744953B2 US 6744953 B2 US6744953 B2 US 6744953B2 US 94939501 A US94939501 A US 94939501A US 6744953 B2 US6744953 B2 US 6744953B2
- Authority
- US
- United States
- Prior art keywords
- optical waveguide
- alignment structure
- waveguide
- layer
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related, expires
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
- G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
Claims (7)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/949,395 US6744953B2 (en) | 2001-09-07 | 2001-09-07 | Planar optical waveguide with alignment structure |
EP02010067A EP1291692A1 (en) | 2001-09-07 | 2002-05-06 | Planar optical waveguide apparatus |
JP2002256290A JP2003084156A (en) | 2001-09-07 | 2002-09-02 | Planar optical waveguide apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/949,395 US6744953B2 (en) | 2001-09-07 | 2001-09-07 | Planar optical waveguide with alignment structure |
Publications (2)
Publication Number | Publication Date |
---|---|
US20030048994A1 US20030048994A1 (en) | 2003-03-13 |
US6744953B2 true US6744953B2 (en) | 2004-06-01 |
Family
ID=25489014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/949,395 Expired - Fee Related US6744953B2 (en) | 2001-09-07 | 2001-09-07 | Planar optical waveguide with alignment structure |
Country Status (3)
Country | Link |
---|---|
US (1) | US6744953B2 (en) |
EP (1) | EP1291692A1 (en) |
JP (1) | JP2003084156A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030235369A1 (en) * | 2001-11-23 | 2003-12-25 | Grosjean Charles I. | Alignment apparatus and methods for transverse optical coupling |
US20040022499A1 (en) * | 2002-08-01 | 2004-02-05 | Fuji Xerox Co., Ltd. | Method for producing a polymer optical waveguide and laminated polymer optical waveguide with an alignment mark |
US20040052467A1 (en) * | 2002-07-05 | 2004-03-18 | Blauvelt Henry A. | Waveguides assembled for transverse-transfer of optical power |
US7164838B2 (en) | 2005-02-15 | 2007-01-16 | Xponent Photonics Inc | Multiple-core planar optical waveguides and methods of fabrication and use thereof |
US7184643B2 (en) | 2003-04-29 | 2007-02-27 | Xponent Photonics Inc | Multiple-core planar optical waveguides and methods of fabrication and use thereof |
US20100074585A1 (en) * | 2008-09-19 | 2010-03-25 | Fuji Xerox Co., Ltd. | Optical waveguide film with mark for positioning and method for producing the same |
US20120039576A1 (en) * | 2009-04-08 | 2012-02-16 | International Business Machines Corporation | Optical waveguide with embedded light-reflecting feature and method for fabricating the same |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6865321B2 (en) * | 2002-07-31 | 2005-03-08 | Agilent Technologies, Inc. | Optical systems and methods using coupling fixtures for aligning optical elements with planar waveguides |
US7006746B2 (en) * | 2002-08-29 | 2006-02-28 | Micron Technology, Inc. | Waveguide for thermo optic device |
US7120336B2 (en) | 2002-08-29 | 2006-10-10 | Micron Technology, Inc. | Resonator for thermo optic device |
JP2007148457A (en) * | 2002-09-20 | 2007-06-14 | Toppan Printing Co Ltd | Optical waveguide |
JP5186785B2 (en) | 2007-03-23 | 2013-04-24 | 日本電気株式会社 | Optical waveguide device, optical element mounting system for optical waveguide device, optical element mounting method, and program thereof |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5218663A (en) * | 1991-03-19 | 1993-06-08 | Fujitsu Limited | Optical waveguide device and method for connecting optical waveguide and optical fiber using the optical waveguide device |
US5297228A (en) * | 1992-05-29 | 1994-03-22 | The Furukawa Electric Co., Ltd. | Method of connecting an optical fiber to an optical waveguide |
JPH06118256A (en) | 1992-10-09 | 1994-04-28 | Furukawa Electric Co Ltd:The | Quartz light guide path component and its manufacture |
EP0798576A2 (en) | 1996-03-26 | 1997-10-01 | Alcatel | Optical element with fiducial mark and fabrication process therefor |
US5790737A (en) | 1995-11-21 | 1998-08-04 | Mitsubishi Denki Kabushiki Kaisha | Optical semiconductor device |
WO2001029601A1 (en) | 1999-10-21 | 2001-04-26 | Nhk Spring Co., Ltd. | Optical component having positioning markers and method for making the same |
US6227722B1 (en) * | 1998-04-24 | 2001-05-08 | Siemens Aktiengesellschaft | Component module |
US20010009597A1 (en) * | 2000-01-25 | 2001-07-26 | Alibert Guilhem J.M. | Self-alignment hybridization process and component |
EP1122561A1 (en) | 2000-02-03 | 2001-08-08 | Corning Incorporated | High precision alignment of optical devices over a high thickness transparent layer |
US20020028046A1 (en) * | 2000-08-30 | 2002-03-07 | Daniel Delprat | Self aligned optical component in line connection |
US20030026577A1 (en) * | 2001-08-03 | 2003-02-06 | Photon-X, Inc. | Method of fabricating polymer optical channel waveguides with multiple types of waveguide core materials |
-
2001
- 2001-09-07 US US09/949,395 patent/US6744953B2/en not_active Expired - Fee Related
-
2002
- 2002-05-06 EP EP02010067A patent/EP1291692A1/en not_active Withdrawn
- 2002-09-02 JP JP2002256290A patent/JP2003084156A/en active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5218663A (en) * | 1991-03-19 | 1993-06-08 | Fujitsu Limited | Optical waveguide device and method for connecting optical waveguide and optical fiber using the optical waveguide device |
US5297228A (en) * | 1992-05-29 | 1994-03-22 | The Furukawa Electric Co., Ltd. | Method of connecting an optical fiber to an optical waveguide |
JPH06118256A (en) | 1992-10-09 | 1994-04-28 | Furukawa Electric Co Ltd:The | Quartz light guide path component and its manufacture |
US5790737A (en) | 1995-11-21 | 1998-08-04 | Mitsubishi Denki Kabushiki Kaisha | Optical semiconductor device |
EP0798576A2 (en) | 1996-03-26 | 1997-10-01 | Alcatel | Optical element with fiducial mark and fabrication process therefor |
US6227722B1 (en) * | 1998-04-24 | 2001-05-08 | Siemens Aktiengesellschaft | Component module |
WO2001029601A1 (en) | 1999-10-21 | 2001-04-26 | Nhk Spring Co., Ltd. | Optical component having positioning markers and method for making the same |
US20010009597A1 (en) * | 2000-01-25 | 2001-07-26 | Alibert Guilhem J.M. | Self-alignment hybridization process and component |
EP1122561A1 (en) | 2000-02-03 | 2001-08-08 | Corning Incorporated | High precision alignment of optical devices over a high thickness transparent layer |
US20020028046A1 (en) * | 2000-08-30 | 2002-03-07 | Daniel Delprat | Self aligned optical component in line connection |
US20030026577A1 (en) * | 2001-08-03 | 2003-02-06 | Photon-X, Inc. | Method of fabricating polymer optical channel waveguides with multiple types of waveguide core materials |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6870992B2 (en) * | 2001-11-23 | 2005-03-22 | Xponent Photonics Inc | Alignment apparatus and methods for transverse optical coupling |
US20030235369A1 (en) * | 2001-11-23 | 2003-12-25 | Grosjean Charles I. | Alignment apparatus and methods for transverse optical coupling |
US20070081781A1 (en) * | 2002-07-05 | 2007-04-12 | Xponent Photonics Inc | Transverse-transfer of optical power between assembled waveguides |
US6975798B2 (en) | 2002-07-05 | 2005-12-13 | Xponent Photonics Inc | Waveguides assembled for transverse-transfer of optical power |
US20060088266A1 (en) * | 2002-07-05 | 2006-04-27 | Blauvelt Henry A | Waveguides assembled for transverse-transfer of optical power |
US7136564B2 (en) | 2002-07-05 | 2006-11-14 | Xponent Photonics Inc | Waveguides assembled for transverse-transfer of optical power |
US7394954B2 (en) | 2002-07-05 | 2008-07-01 | Hoya Corporation Usa | Transverse-transfer of optical power between assembled waveguides |
US20040052467A1 (en) * | 2002-07-05 | 2004-03-18 | Blauvelt Henry A. | Waveguides assembled for transverse-transfer of optical power |
US20040022499A1 (en) * | 2002-08-01 | 2004-02-05 | Fuji Xerox Co., Ltd. | Method for producing a polymer optical waveguide and laminated polymer optical waveguide with an alignment mark |
US6929760B2 (en) * | 2002-08-01 | 2005-08-16 | Fuji Xerox Co., Ltd. | Method for producing a polymer optical waveguide and laminated polymer optical waveguide with an alignment mark |
US20070133934A1 (en) * | 2003-04-29 | 2007-06-14 | Xponent Photonics Inc | Multiple-core planar optical waveguides and methods of fabrication and use thereof |
US7184643B2 (en) | 2003-04-29 | 2007-02-27 | Xponent Photonics Inc | Multiple-core planar optical waveguides and methods of fabrication and use thereof |
US7397995B2 (en) | 2003-04-29 | 2008-07-08 | Hoya Corporation Usa | Multiple-core planar optical waveguides and methods of fabrication and use thereof |
US7164838B2 (en) | 2005-02-15 | 2007-01-16 | Xponent Photonics Inc | Multiple-core planar optical waveguides and methods of fabrication and use thereof |
US7646957B2 (en) | 2005-02-15 | 2010-01-12 | Hoya Corporation Usa | Multiple-core planar optical waveguides and methods of fabrication and use thereof |
US8260104B2 (en) | 2005-02-15 | 2012-09-04 | Hoya Corporation Usa | Multiple-core planar optical waveguides and methods of fabrication and use thereof |
US20100074585A1 (en) * | 2008-09-19 | 2010-03-25 | Fuji Xerox Co., Ltd. | Optical waveguide film with mark for positioning and method for producing the same |
US8023790B2 (en) * | 2008-09-19 | 2011-09-20 | Fuji Xerox Co., Ltd. | Optical waveguide film with mark for positioning and method for producing the same |
US20120039576A1 (en) * | 2009-04-08 | 2012-02-16 | International Business Machines Corporation | Optical waveguide with embedded light-reflecting feature and method for fabricating the same |
US8873912B2 (en) * | 2009-04-08 | 2014-10-28 | International Business Machines Corporation | Optical waveguide with embedded light-reflecting feature and method for fabricating the same |
Also Published As
Publication number | Publication date |
---|---|
EP1291692A1 (en) | 2003-03-12 |
US20030048994A1 (en) | 2003-03-13 |
JP2003084156A (en) | 2003-03-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: AGILENT TECHNOLOGIES, INC., COLORADO Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LEMOFF, BRIAN ELLIOT;GONG, WILLIAM;TELLA, RICHARD P.;AND OTHERS;REEL/FRAME:012422/0056;SIGNING DATES FROM 20010905 TO 20011017 |
|
AS | Assignment |
Owner name: AVAGO TECHNOLOGIES GENERAL IP PTE. LTD., SINGAPORE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:AGILENT TECHNOLOGIES, INC.;REEL/FRAME:017207/0020 Effective date: 20051201 |
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AS | Assignment |
Owner name: AVAGO TECHNOLOGIES FIBER IP (SINGAPORE) PTE. LTD., Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.;REEL/FRAME:017675/0199 Effective date: 20060127 |
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REMI | Maintenance fee reminder mailed | ||
FPAY | Fee payment |
Year of fee payment: 4 |
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SULP | Surcharge for late payment | ||
REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
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FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20120601 |
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AS | Assignment |
Owner name: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD Free format text: CORRECTIVE ASSIGNMENT TO CORRECT THE NAME OF THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 017207 FRAME 0020. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT;ASSIGNOR:AGILENT TECHNOLOGIES, INC.;REEL/FRAME:038633/0001 Effective date: 20051201 |