CN101096245A - 基板搬运装置、基板搬运方法以及基板处理系统 - Google Patents

基板搬运装置、基板搬运方法以及基板处理系统 Download PDF

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Publication number
CN101096245A
CN101096245A CNA2006101732981A CN200610173298A CN101096245A CN 101096245 A CN101096245 A CN 101096245A CN A2006101732981 A CNA2006101732981 A CN A2006101732981A CN 200610173298 A CN200610173298 A CN 200610173298A CN 101096245 A CN101096245 A CN 101096245A
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China
Prior art keywords
substrate
mentioned
magnet
objective table
carrying
Prior art date
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Pending
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CNA2006101732981A
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English (en)
Chinese (zh)
Inventor
堀口贵弘
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Future Vision Inc
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Future Vision Inc
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Application filed by Future Vision Inc filed Critical Future Vision Inc
Publication of CN101096245A publication Critical patent/CN101096245A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67236—Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CNA2006101732981A 2006-06-26 2006-12-15 基板搬运装置、基板搬运方法以及基板处理系统 Pending CN101096245A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006175661 2006-06-26
JP2006175661A JP2008004898A (ja) 2006-06-26 2006-06-26 基板搬送装置、基板搬送方法および基板処理システム

Publications (1)

Publication Number Publication Date
CN101096245A true CN101096245A (zh) 2008-01-02

Family

ID=38872825

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006101732981A Pending CN101096245A (zh) 2006-06-26 2006-12-15 基板搬运装置、基板搬运方法以及基板处理系统

Country Status (5)

Country Link
US (1) US20070296134A1 (ko)
JP (1) JP2008004898A (ko)
KR (1) KR100778208B1 (ko)
CN (1) CN101096245A (ko)
TW (1) TW200804159A (ko)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102286725A (zh) * 2011-06-30 2011-12-21 东莞市华科制造工程研究院有限公司 一种新型可调基片输送辊装置
CN102530626A (zh) * 2010-11-23 2012-07-04 芬兰劳特公司 堆叠单板的装置
CN102826335A (zh) * 2012-08-23 2012-12-19 京东方科技集团股份有限公司 一种玻璃基板传送装置
CN101654199B (zh) * 2009-07-30 2013-01-09 江苏华宇印涂设备集团有限公司 连续式收料装置
CN101980935B (zh) * 2008-03-27 2013-07-24 格林策巴赫机械制造有限公司 用于在溅射涂膜系统中固定和运输对撞击敏感的片的方法及装置
CN103878835A (zh) * 2014-03-26 2014-06-25 泗阳县祥和木业有限公司 木刨片拼板机的收料装置
CN105752687A (zh) * 2016-04-26 2016-07-13 东旭（昆山）显示材料有限公司 传送装置和加工系统
CN114803281A (zh) * 2022-05-05 2022-07-29 深圳市创新特科技有限公司 一种对接无尘车间转换用的提升机

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5224612B2 (ja) * 2010-09-09 2013-07-03 東京エレクトロン株式会社 基板受渡装置及び基板受渡方法
DE102012103533A1 (de) * 2012-04-20 2013-10-24 Köra-Packmat Maschinenbau GmbH Vorrichtung zum Fördern eines Substrats und System zum Bedrucken eines Substrats
CN103419962B (zh) * 2013-08-06 2015-09-23 常州天合光能有限公司 防隐裂组件自动装箱设备
TWI676227B (zh) * 2015-01-23 2019-11-01 美商應用材料股份有限公司 半導體工藝設備
JP6456177B2 (ja) * 2015-02-12 2019-01-23 株式会社ディスコ ウェーハ処理システム
TWI602757B (zh) * 2016-04-11 2017-10-21 由田新技股份有限公司 傳送裝置
JP6704423B2 (ja) * 2018-01-17 2020-06-03 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法およびプログラム
FR3079507A1 (fr) * 2018-03-29 2019-10-04 Saint-Gobain Glass France Ensemble de convoyage ameliore
JP7097759B2 (ja) * 2018-06-22 2022-07-08 東京エレクトロン株式会社 基板処理装置および基板処理方法
DE102018217660B4 (de) * 2018-10-15 2020-10-08 Hegla Gmbh & Co. Kg Verbundglasschneidanlage und Verfahren zum Schneiden von Verbundglastafeln
JP7242414B2 (ja) * 2019-05-08 2023-03-20 株式会社アルバック 真空搬送装置及び成膜装置
CN115057236B (zh) * 2022-08-08 2023-06-30 河南工业职业技术学院 一种机械制造用送料装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2512782B2 (ja) * 1988-02-26 1996-07-03 東京エレクトロン株式会社 パンタグラフ式ウェハ―搬送装置
JP2808826B2 (ja) * 1990-05-25 1998-10-08 松下電器産業株式会社 基板の移し換え装置
JPH0492446A (ja) * 1990-08-07 1992-03-25 Plasma Syst:Kk 基板搬送ロボット
JPH06122642A (ja) * 1992-09-14 1994-05-06 Mitsubishi Kasei Corp 新規ホスファイト化合物及びそれを用いたアルデヒドの製造方法
JPH08172121A (ja) * 1994-12-20 1996-07-02 Hitachi Ltd 基板搬送装置

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101980935B (zh) * 2008-03-27 2013-07-24 格林策巴赫机械制造有限公司 用于在溅射涂膜系统中固定和运输对撞击敏感的片的方法及装置
CN101654199B (zh) * 2009-07-30 2013-01-09 江苏华宇印涂设备集团有限公司 连续式收料装置
CN102530626B (zh) * 2010-11-23 2015-07-08 芬兰劳特公司 堆叠单板的装置
CN102530626A (zh) * 2010-11-23 2012-07-04 芬兰劳特公司 堆叠单板的装置
CN102286725A (zh) * 2011-06-30 2011-12-21 东莞市华科制造工程研究院有限公司 一种新型可调基片输送辊装置
CN102286725B (zh) * 2011-06-30 2013-06-26 东莞市华科制造工程研究院有限公司 一种新型可调基片输送辊装置
CN102826335B (zh) * 2012-08-23 2016-05-11 京东方科技集团股份有限公司 一种玻璃基板传送装置
CN102826335A (zh) * 2012-08-23 2012-12-19 京东方科技集团股份有限公司 一种玻璃基板传送装置
CN103878835A (zh) * 2014-03-26 2014-06-25 泗阳县祥和木业有限公司 木刨片拼板机的收料装置
CN103878835B (zh) * 2014-03-26 2016-02-24 泗阳县祥和木业有限公司 木刨片拼板机的收料装置
CN105752687A (zh) * 2016-04-26 2016-07-13 东旭（昆山）显示材料有限公司 传送装置和加工系统
CN114803281A (zh) * 2022-05-05 2022-07-29 深圳市创新特科技有限公司 一种对接无尘车间转换用的提升机
CN114803281B (zh) * 2022-05-05 2024-03-29 深圳市创新特科技有限公司 一种对接无尘车间转换用的提升机

Also Published As

Publication number Publication date
KR100778208B1 (ko) 2007-11-22
US20070296134A1 (en) 2007-12-27
TW200804159A (en) 2008-01-16
JP2008004898A (ja) 2008-01-10

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Open date: 20080102