CN101039742A - 用于氢分离的钯合金复合膜的制备方法 - Google Patents
用于氢分离的钯合金复合膜的制备方法 Download PDFInfo
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- CN101039742A CN101039742A CNA2005800350733A CN200580035073A CN101039742A CN 101039742 A CN101039742 A CN 101039742A CN A2005800350733 A CNA2005800350733 A CN A2005800350733A CN 200580035073 A CN200580035073 A CN 200580035073A CN 101039742 A CN101039742 A CN 101039742A
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- palladium
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- copper
- metal
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 51
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 51
- 239000002131 composite material Substances 0.000 title claims abstract description 45
- 239000012528 membrane Substances 0.000 title claims abstract description 39
- 229910001252 Pd alloy Inorganic materials 0.000 title claims abstract description 19
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title claims abstract 4
- 238000000926 separation method Methods 0.000 title abstract description 22
- 238000002360 preparation method Methods 0.000 title description 19
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 116
- 229910052751 metal Inorganic materials 0.000 claims abstract description 64
- 239000002184 metal Substances 0.000 claims abstract description 64
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 59
- 238000000034 method Methods 0.000 claims abstract description 51
- 230000008569 process Effects 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims description 82
- 238000000576 coating method Methods 0.000 claims description 82
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 59
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 35
- 229910052802 copper Inorganic materials 0.000 claims description 34
- 239000010949 copper Substances 0.000 claims description 34
- 229910052759 nickel Inorganic materials 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 6
- 238000011282 treatment Methods 0.000 claims description 6
- 230000001413 cellular effect Effects 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 34
- 239000000956 alloy Substances 0.000 abstract description 34
- 238000009713 electroplating Methods 0.000 abstract description 9
- 238000007747 plating Methods 0.000 abstract description 8
- 239000011247 coating layer Substances 0.000 abstract 4
- 239000010410 layer Substances 0.000 abstract 1
- 150000002431 hydrogen Chemical class 0.000 description 28
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 19
- 238000009792 diffusion process Methods 0.000 description 17
- 229910000881 Cu alloy Inorganic materials 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 230000004888 barrier function Effects 0.000 description 12
- 238000001878 scanning electron micrograph Methods 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 229910000570 Cupronickel Inorganic materials 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 238000010992 reflux Methods 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 229910000597 tin-copper alloy Inorganic materials 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- -1 for example Substances 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000005864 Sulphur Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 2
- 150000002940 palladium Chemical class 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 238000012797 qualification Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N hydrochloric acid Substances Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910002058 ternary alloy Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
- B01D71/0223—Group 8, 9 or 10 metals
- B01D71/02231—Palladium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0069—Inorganic membrane manufacture by deposition from the liquid phase, e.g. electrochemical deposition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0083—Thermal after-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
- B01D69/108—Inorganic support material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
- B01D69/1216—Three or more layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
- B01D71/0223—Group 8, 9 or 10 metals
- B01D71/02232—Nickel
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
- C01B3/503—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion characterised by the membrane
- C01B3/505—Membranes containing palladium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/16—Hydrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/40—Details relating to membrane preparation in-situ membrane formation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Combustion & Propulsion (AREA)
- Thermal Sciences (AREA)
- Plasma & Fusion (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Electroplating Methods And Accessories (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
ΔP(KPa) | 温度(K) | 渗透性(ml/cm2.min) | 选择性(H2/N2) | 厚度(μm) | 气体 | |
实施例 | 100 | 773 | 9 | ∞ | 3±0.1 | 包括H2和N2的气体混合物 |
11) | 689.5 | 723 | 6.45 | 14 | 27.6±8.5 | 各自分离的H2和N2气体 |
21) | 344.7 | 973 | 47 | 70 | 11.0±1.0 | .. |
31) | 344.7 | 773 | 69.9 | 170 | 11.6±1.0 | .. |
41) | 344.7 | 723 | 24 | 270 | 12.5±1.5 | .. |
51) | 344.7 | 723 | 107 | 1400 | 12±1.0 | .. |
61) | 344.7 | 723 | 88 | 47 | 1.5±0.2 | .. |
Claims (8)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040073902A KR100679341B1 (ko) | 2004-09-15 | 2004-09-15 | 수소기체분리용 팔라듐 합금복합막의 제조방법 |
KR1020040073902 | 2004-09-15 | ||
PCT/KR2005/003078 WO2006031080A1 (en) | 2004-09-15 | 2005-09-15 | Preparation method of palladium alloy composite membrane for hydrogen separation |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101039742A true CN101039742A (zh) | 2007-09-19 |
CN100594055C CN100594055C (zh) | 2010-03-17 |
Family
ID=36060282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200580035073A Active CN100594055C (zh) | 2004-09-15 | 2005-09-15 | 用于氢分离的钯合金复合膜的制备方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7875154B2 (zh) |
EP (1) | EP1807185B1 (zh) |
JP (2) | JP2008513196A (zh) |
KR (1) | KR100679341B1 (zh) |
CN (1) | CN100594055C (zh) |
WO (1) | WO2006031080A1 (zh) |
Cited By (7)
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CN103007361A (zh) * | 2012-12-21 | 2013-04-03 | 先健科技(深圳)有限公司 | 一种医疗器械涂层及其制备方法与含有该涂层的医疗器械 |
CN104307382A (zh) * | 2014-11-04 | 2015-01-28 | 华文蔚 | 一种制造氢分离膜的方法 |
CN105195030A (zh) * | 2015-10-25 | 2015-12-30 | 天津工业大学 | 镍合金中空纤维膜及其制备方法和应用 |
CN106555212A (zh) * | 2015-09-25 | 2017-04-05 | 中国科学院大连化学物理研究所 | 一种厚度可控的超薄钯膜的制备方法 |
CN108097065A (zh) * | 2018-01-02 | 2018-06-01 | 兰州理工大学 | 一种低成本抗硫钯合金复合膜的制备方法 |
CN109477233A (zh) * | 2016-06-06 | 2019-03-15 | 联邦科学和工业研究组织 | 在基材上形成Pd-Au合金层的方法 |
CN109957772A (zh) * | 2017-12-26 | 2019-07-02 | 北京有色金属研究总院 | 一种钯/陶瓷复合薄膜 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
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US8101243B2 (en) * | 2002-04-03 | 2012-01-24 | Colorado School Of Mines | Method of making sulfur-resistant composite metal membranes |
KR100679341B1 (ko) * | 2004-09-15 | 2007-02-07 | 한국에너지기술연구원 | 수소기체분리용 팔라듐 합금복합막의 제조방법 |
KR100832302B1 (ko) | 2006-12-21 | 2008-05-26 | 한국에너지기술연구원 | 인-시투 건식 진공 방식을 사용한 수소기체분리용 팔라듐합금분리막의 제조방법 |
US8048199B2 (en) | 2007-02-20 | 2011-11-01 | Shell Oil Company | Method of making a leak stable gas separation membrane system |
TWI354716B (en) * | 2007-04-13 | 2011-12-21 | Green Hydrotec Inc | Palladium-containing plating solution and its uses |
EP3034155A1 (en) * | 2007-06-11 | 2016-06-22 | NGK Insulators, Ltd. | Hydrogen separation membrane and selectively permeable membrane reactor |
US9044715B2 (en) | 2007-08-22 | 2015-06-02 | Colorado School Of Mines | Unsupported palladium alloy membranes and methods of making same |
DE102009039149A1 (de) * | 2009-08-31 | 2011-03-03 | Uhde Gmbh | Katalytische Membranmaterial-Beschichtung |
US8778058B2 (en) | 2010-07-16 | 2014-07-15 | Colorado School Of Mines | Multilayer sulfur-resistant composite metal membranes and methods of making and repairing the same |
US9156007B2 (en) * | 2010-08-30 | 2015-10-13 | Stichting Energieonderzoek Centrum Nederland | Seeding method for deposit of thin selective membrane layers |
KR101336768B1 (ko) | 2011-07-22 | 2013-12-16 | 한국에너지기술연구원 | 수소 분리막 보호층 및 이의 코팅방법 |
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KR101775025B1 (ko) | 2013-02-28 | 2017-09-20 | 경기대학교 산학협력단 | 스퍼터에 의한 치밀 수소분리막의 제조방법 |
RU2555283C2 (ru) * | 2013-10-18 | 2015-07-10 | Общество с Ограниченной Ответственностью "Мембраны-НЦ" | Способ нанесения палладиевого покрытия на подложку |
KR101715875B1 (ko) | 2015-05-04 | 2017-03-15 | 경기대학교 산학협력단 | 지지체 일체화 수소분리막 및 이의 제조방법 |
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GB2602332B (en) * | 2020-12-23 | 2023-08-30 | Hydrogen Mem Tech As | Membrane attachment technique |
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WO2003084628A2 (en) * | 2002-04-03 | 2003-10-16 | Colorado School Of Mines | Process for preparing palladium alloy composite membranes for use in hydrogen separation, palladium alloy composite membranes and products incorporating or made from the membranes |
US7169704B2 (en) * | 2002-06-21 | 2007-01-30 | Samsung Electronics Co., Ltd. | Method of cleaning a surface of a water in connection with forming a barrier layer of a semiconductor device |
US7112287B2 (en) * | 2002-07-25 | 2006-09-26 | Dai Nippon Insatsu Kabushiki Kaisha | Thin film supporting substrate for used in filter for hydrogen production filter and method for manufacturing filter for hydrogen production |
JP2004174373A (ja) * | 2002-11-27 | 2004-06-24 | Sumitomo Metal Mining Co Ltd | 水素透過合金膜、水素透過用部材及びその製造方法 |
DE602004016470D1 (de) * | 2003-03-21 | 2008-10-23 | Worcester Polytech Inst | Verfahren zum beheben von defekten bei der herstellung eines verbundmembran-gastrennungsmoduls |
KR100531130B1 (ko) * | 2003-10-01 | 2005-11-29 | 한국화학연구원 | 금속염화물 처리에 의한 수소기체 분리용 팔라듐 복합막의제조방법 |
KR100679341B1 (ko) * | 2004-09-15 | 2007-02-07 | 한국에너지기술연구원 | 수소기체분리용 팔라듐 합금복합막의 제조방법 |
-
2004
- 2004-09-15 KR KR1020040073902A patent/KR100679341B1/ko active IP Right Grant
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2005
- 2005-09-15 US US11/662,432 patent/US7875154B2/en active Active
- 2005-09-15 JP JP2007532244A patent/JP2008513196A/ja active Pending
- 2005-09-15 EP EP05808799.0A patent/EP1807185B1/en active Active
- 2005-09-15 CN CN200580035073A patent/CN100594055C/zh active Active
- 2005-09-15 WO PCT/KR2005/003078 patent/WO2006031080A1/en active Application Filing
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2010
- 2010-12-03 US US12/960,034 patent/US20120055784A1/en not_active Abandoned
- 2010-12-15 JP JP2010278982A patent/JP5199332B2/ja active Active
Cited By (10)
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CN103007361A (zh) * | 2012-12-21 | 2013-04-03 | 先健科技(深圳)有限公司 | 一种医疗器械涂层及其制备方法与含有该涂层的医疗器械 |
CN103007361B (zh) * | 2012-12-21 | 2015-07-01 | 先健科技(深圳)有限公司 | 一种医疗器械涂层及其制备方法与含有该涂层的医疗器械 |
CN104307382A (zh) * | 2014-11-04 | 2015-01-28 | 华文蔚 | 一种制造氢分离膜的方法 |
CN106555212A (zh) * | 2015-09-25 | 2017-04-05 | 中国科学院大连化学物理研究所 | 一种厚度可控的超薄钯膜的制备方法 |
CN105195030A (zh) * | 2015-10-25 | 2015-12-30 | 天津工业大学 | 镍合金中空纤维膜及其制备方法和应用 |
CN105195030B (zh) * | 2015-10-25 | 2017-11-10 | 天津工业大学 | 镍合金中空纤维膜及其制备方法和应用 |
CN109477233A (zh) * | 2016-06-06 | 2019-03-15 | 联邦科学和工业研究组织 | 在基材上形成Pd-Au合金层的方法 |
CN109477233B (zh) * | 2016-06-06 | 2022-07-08 | 联邦科学和工业研究组织 | 在基材上形成Pd-Au合金层的方法 |
CN109957772A (zh) * | 2017-12-26 | 2019-07-02 | 北京有色金属研究总院 | 一种钯/陶瓷复合薄膜 |
CN108097065A (zh) * | 2018-01-02 | 2018-06-01 | 兰州理工大学 | 一种低成本抗硫钯合金复合膜的制备方法 |
Also Published As
Publication number | Publication date |
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WO2006031080A1 (en) | 2006-03-23 |
JP2008513196A (ja) | 2008-05-01 |
KR20060025010A (ko) | 2006-03-20 |
US20080116078A1 (en) | 2008-05-22 |
CN100594055C (zh) | 2010-03-17 |
US20120055784A1 (en) | 2012-03-08 |
EP1807185A1 (en) | 2007-07-18 |
JP2011062699A (ja) | 2011-03-31 |
JP5199332B2 (ja) | 2013-05-15 |
KR100679341B1 (ko) | 2007-02-07 |
US7875154B2 (en) | 2011-01-25 |
EP1807185B1 (en) | 2014-12-03 |
EP1807185A4 (en) | 2009-04-29 |
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