CN100588543C - 膜形成方法及制造电子源基板的方法 - Google Patents

膜形成方法及制造电子源基板的方法 Download PDF

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Publication number
CN100588543C
CN100588543C CN200610071674A CN200610071674A CN100588543C CN 100588543 C CN100588543 C CN 100588543C CN 200610071674 A CN200610071674 A CN 200610071674A CN 200610071674 A CN200610071674 A CN 200610071674A CN 100588543 C CN100588543 C CN 100588543C
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CN
China
Prior art keywords
substrate
drop
ink gun
electron source
source base
Prior art date
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Expired - Fee Related
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CN200610071674A
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English (en)
Chinese (zh)
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CN1865003A (zh
Inventor
三岛诚治
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN1865003A publication Critical patent/CN1865003A/zh
Application granted granted Critical
Publication of CN100588543C publication Critical patent/CN100588543C/zh
Expired - Fee Related legal-status Critical Current
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/36Blanking or long feeds; Feeding to a particular line, e.g. by rotation of platen or feed roller
    • B41J11/42Controlling printing material conveyance for accurate alignment of the printing material with the printhead; Print registering
    • B41J11/46Controlling printing material conveyance for accurate alignment of the printing material with the printhead; Print registering by marks or formations on the paper being fed
    • AHUMAN NECESSITIES
    • A63SPORTS; GAMES; AMUSEMENTS
    • A63HTOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
    • A63H33/00Other toys
    • A63H33/18Throwing or slinging toys, e.g. flying disc toys
    • AHUMAN NECESSITIES
    • A63SPORTS; GAMES; AMUSEMENTS
    • A63HTOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
    • A63H33/00Other toys
    • A63H33/22Optical, colour, or shadow toys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/28Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for printing downwardly on flat surfaces, e.g. of books, drawings, boxes, envelopes, e.g. flat-bed ink-jet printers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/316Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165Surface conduction emission type cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
CN200610071674A 2005-03-28 2006-03-28 膜形成方法及制造电子源基板的方法 Expired - Fee Related CN100588543C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005090663 2005-03-28
JP2005090663A JP2006272035A (ja) 2005-03-28 2005-03-28 膜の形成方法及び電子源基板の製造方法

Publications (2)

Publication Number Publication Date
CN1865003A CN1865003A (zh) 2006-11-22
CN100588543C true CN100588543C (zh) 2010-02-10

Family

ID=37035511

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200610071674A Expired - Fee Related CN100588543C (zh) 2005-03-28 2006-03-28 膜形成方法及制造电子源基板的方法

Country Status (4)

Country Link
US (1) US8075944B2 (enExample)
JP (1) JP2006272035A (enExample)
KR (1) KR100812834B1 (enExample)
CN (1) CN100588543C (enExample)

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KR101345927B1 (ko) 2008-02-19 2013-12-27 하이디스 테크놀로지 주식회사 액상물질 디스펜스 장치 및 방법
US8308264B2 (en) * 2009-12-02 2012-11-13 Pitney Bowes Inc. Printing assembly calibration
JP5797277B2 (ja) * 2011-12-14 2015-10-21 住友重機械工業株式会社 タッチパネルの製造方法、及び基板製造装置
CN104553311A (zh) * 2013-10-14 2015-04-29 研能科技股份有限公司 喷墨头及其非定向排列的喷墨元件组的喷墨头
JP6805028B2 (ja) * 2017-03-07 2020-12-23 東京エレクトロン株式会社 液滴吐出装置、液滴吐出方法、プログラム及びコンピュータ記憶媒体
JP6846238B2 (ja) * 2017-03-07 2021-03-24 東京エレクトロン株式会社 液滴吐出装置、液滴吐出方法、プログラム及びコンピュータ記憶媒体
US10818840B2 (en) * 2017-05-05 2020-10-27 Universal Display Corporation Segmented print bar for large-area OVJP deposition
CN107344151A (zh) * 2017-06-19 2017-11-14 武汉华星光电技术有限公司 一种喷墨涂胶方法及设备
US10998531B2 (en) 2017-12-12 2021-05-04 Universal Display Corporation Segmented OVJP print bar
CN110450542B (zh) * 2019-09-12 2020-12-22 昆山国显光电有限公司 一种喷墨打印装置
JP7557833B2 (ja) 2019-09-26 2024-09-30 パナソニックIpマネジメント株式会社 インクジェット装置
KR20210089291A (ko) * 2020-01-07 2021-07-16 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
KR102869161B1 (ko) * 2021-10-07 2025-10-10 세메스 주식회사 기판 처리 장치 및 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1358626A (zh) * 2000-11-21 2002-07-17 精工爱普生株式会社 滤色片、液晶装置和el装置的制造方法及制造装置
US6579139B1 (en) * 1998-02-13 2003-06-17 Canon Kabushiki Kaisha Film formation method, method for fabricating electron emitting element employing the same film, and method for manufacturing image forming apparatus employing the same element
EP0717428B1 (en) * 1994-12-16 2004-03-10 Canon Kabushiki Kaisha Method of producing a surface conduction type electron emitting device

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JP3234730B2 (ja) 1994-12-16 2001-12-04 キヤノン株式会社 電子放出素子および電子源基板の製造方法
JPH09192864A (ja) * 1996-01-11 1997-07-29 Canon Inc レーザ光を用いる表面伝導型電子放出素子の製造装置及び製造方法
JP3428802B2 (ja) * 1996-02-06 2003-07-22 キヤノン株式会社 電子源基板および画像形成装置の製造方法
JPH1125851A (ja) * 1997-05-09 1999-01-29 Canon Inc 電子源、その製造方法及び製造装置並びに画像形成装置及びその製造方法
US6220912B1 (en) * 1997-05-09 2001-04-24 Canon Kabushiki Kaisha Method and apparatus for producing electron source using dispenser to produce electron emitting portions
JPH1144811A (ja) * 1997-07-24 1999-02-16 Asahi Glass Co Ltd カラーフィルタ製造装置
US6815001B1 (en) * 1999-02-08 2004-11-09 Canon Kabushiki Kaisha Electronic device, method for producing electron source and image forming device, and apparatus for producing electronic device
JP2001319567A (ja) * 2000-02-28 2001-11-16 Ricoh Co Ltd 電子源基板および該電子源基板を用いた画像表示装置
JP3880289B2 (ja) * 2000-05-23 2007-02-14 キヤノン株式会社 ヘッドユニット、当該ヘッドユニットを用いるカラーフィルタの製造装置、カラーフィルタの製造方法、カラーフィルタを備えた液晶パネルの製造方法および液晶パネルを備えた情報処理装置の製造方法
US6673386B2 (en) * 2000-06-29 2004-01-06 Matsushita Electric Industrial Co., Ltd. Method and apparatus for forming pattern onto panel substrate
JP3953776B2 (ja) * 2001-01-15 2007-08-08 セイコーエプソン株式会社 材料の吐出装置、及び吐出方法、カラーフィルタの製造装置及び製造方法、液晶装置の製造装置及び製造方法、el装置の製造装置及び製造方法
JP2003265997A (ja) * 2002-03-14 2003-09-24 Seiko Epson Corp 薄膜形成装置と薄膜形成方法、回路パターンの製造装置と電子機器の製造方法と電子機器、及びレジストパターンの製造装置とレジストパターンの製造方法
JP3966034B2 (ja) * 2002-03-14 2007-08-29 セイコーエプソン株式会社 吐出パターンデータ生成方法および吐出パターンデータ生成装置
JP2004144849A (ja) * 2002-10-22 2004-05-20 Sekisui Chem Co Ltd 液晶表示装置の製造方法
JP4168728B2 (ja) * 2002-10-23 2008-10-22 セイコーエプソン株式会社 液滴吐出装置のドット位置補正方法、液滴吐出方法および電気光学装置の製造方法
KR100615173B1 (ko) 2003-02-11 2006-08-25 삼성에스디아이 주식회사 다중 잉크젯 헤드를 이용한 발광 용액 주입 방법
JP2004255335A (ja) * 2003-02-27 2004-09-16 Seiko Epson Corp 液状物の吐出方法、液状物の吐出装置、カラーフィルタの製造方法およびカラーフィルタ、液晶表示装置、エレクトロルミネッセンス装置の製造方法およびエレクトロルミネッセンス装置、プラズマディスプレイパネルの製造方法およびプラズマディスプレイ、並びに電子機器
JP4148021B2 (ja) * 2003-05-20 2008-09-10 セイコーエプソン株式会社 配向膜の液滴吐出方法、電気光学パネルの製造方法、電子機器の製造方法、プログラム及び配向膜の液滴吐出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0717428B1 (en) * 1994-12-16 2004-03-10 Canon Kabushiki Kaisha Method of producing a surface conduction type electron emitting device
US6579139B1 (en) * 1998-02-13 2003-06-17 Canon Kabushiki Kaisha Film formation method, method for fabricating electron emitting element employing the same film, and method for manufacturing image forming apparatus employing the same element
CN1358626A (zh) * 2000-11-21 2002-07-17 精工爱普生株式会社 滤色片、液晶装置和el装置的制造方法及制造装置

Also Published As

Publication number Publication date
US8075944B2 (en) 2011-12-13
US20060216409A1 (en) 2006-09-28
KR100812834B1 (ko) 2008-03-11
CN1865003A (zh) 2006-11-22
JP2006272035A (ja) 2006-10-12
KR20060103859A (ko) 2006-10-04

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Granted publication date: 20100210

Termination date: 20140328