CN100588543C - 膜形成方法及制造电子源基板的方法 - Google Patents
膜形成方法及制造电子源基板的方法 Download PDFInfo
- Publication number
- CN100588543C CN100588543C CN200610071674A CN200610071674A CN100588543C CN 100588543 C CN100588543 C CN 100588543C CN 200610071674 A CN200610071674 A CN 200610071674A CN 200610071674 A CN200610071674 A CN 200610071674A CN 100588543 C CN100588543 C CN 100588543C
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
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- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 3
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
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- 229910052709 silver Inorganic materials 0.000 description 2
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- PMUNIMVZCACZBB-UHFFFAOYSA-N 2-hydroxyethylazanium;chloride Chemical compound Cl.NCCO PMUNIMVZCACZBB-UHFFFAOYSA-N 0.000 description 1
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- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- 229920006606 PA-ME Polymers 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- -1 acid chloride butyl alcohol amine Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
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- LRHPLDYGYMQRHN-UHFFFAOYSA-N butyl alcohol Substances CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/36—Blanking or long feeds; Feeding to a particular line, e.g. by rotation of platen or feed roller
- B41J11/42—Controlling printing material conveyance for accurate alignment of the printing material with the printhead; Print registering
- B41J11/46—Controlling printing material conveyance for accurate alignment of the printing material with the printhead; Print registering by marks or formations on the paper being fed
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
- A63H33/00—Other toys
- A63H33/18—Throwing or slinging toys, e.g. flying disc toys
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63H—TOYS, e.g. TOPS, DOLLS, HOOPS OR BUILDING BLOCKS
- A63H33/00—Other toys
- A63H33/22—Optical, colour, or shadow toys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/027—Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/28—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for printing downwardly on flat surfaces, e.g. of books, drawings, boxes, envelopes, e.g. flat-bed ink-jet printers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
- H01J2201/3165—Surface conduction emission type cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005090663 | 2005-03-28 | ||
| JP2005090663A JP2006272035A (ja) | 2005-03-28 | 2005-03-28 | 膜の形成方法及び電子源基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1865003A CN1865003A (zh) | 2006-11-22 |
| CN100588543C true CN100588543C (zh) | 2010-02-10 |
Family
ID=37035511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200610071674A Expired - Fee Related CN100588543C (zh) | 2005-03-28 | 2006-03-28 | 膜形成方法及制造电子源基板的方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8075944B2 (enExample) |
| JP (1) | JP2006272035A (enExample) |
| KR (1) | KR100812834B1 (enExample) |
| CN (1) | CN100588543C (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101345927B1 (ko) | 2008-02-19 | 2013-12-27 | 하이디스 테크놀로지 주식회사 | 액상물질 디스펜스 장치 및 방법 |
| US8308264B2 (en) * | 2009-12-02 | 2012-11-13 | Pitney Bowes Inc. | Printing assembly calibration |
| JP5797277B2 (ja) * | 2011-12-14 | 2015-10-21 | 住友重機械工業株式会社 | タッチパネルの製造方法、及び基板製造装置 |
| CN104553311A (zh) * | 2013-10-14 | 2015-04-29 | 研能科技股份有限公司 | 喷墨头及其非定向排列的喷墨元件组的喷墨头 |
| JP6805028B2 (ja) * | 2017-03-07 | 2020-12-23 | 東京エレクトロン株式会社 | 液滴吐出装置、液滴吐出方法、プログラム及びコンピュータ記憶媒体 |
| JP6846238B2 (ja) * | 2017-03-07 | 2021-03-24 | 東京エレクトロン株式会社 | 液滴吐出装置、液滴吐出方法、プログラム及びコンピュータ記憶媒体 |
| US10818840B2 (en) * | 2017-05-05 | 2020-10-27 | Universal Display Corporation | Segmented print bar for large-area OVJP deposition |
| CN107344151A (zh) * | 2017-06-19 | 2017-11-14 | 武汉华星光电技术有限公司 | 一种喷墨涂胶方法及设备 |
| US10998531B2 (en) | 2017-12-12 | 2021-05-04 | Universal Display Corporation | Segmented OVJP print bar |
| CN110450542B (zh) * | 2019-09-12 | 2020-12-22 | 昆山国显光电有限公司 | 一种喷墨打印装置 |
| JP7557833B2 (ja) | 2019-09-26 | 2024-09-30 | パナソニックIpマネジメント株式会社 | インクジェット装置 |
| KR20210089291A (ko) * | 2020-01-07 | 2021-07-16 | 삼성디스플레이 주식회사 | 표시 장치의 제조장치 및 표시 장치의 제조방법 |
| KR102869161B1 (ko) * | 2021-10-07 | 2025-10-10 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1358626A (zh) * | 2000-11-21 | 2002-07-17 | 精工爱普生株式会社 | 滤色片、液晶装置和el装置的制造方法及制造装置 |
| US6579139B1 (en) * | 1998-02-13 | 2003-06-17 | Canon Kabushiki Kaisha | Film formation method, method for fabricating electron emitting element employing the same film, and method for manufacturing image forming apparatus employing the same element |
| EP0717428B1 (en) * | 1994-12-16 | 2004-03-10 | Canon Kabushiki Kaisha | Method of producing a surface conduction type electron emitting device |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3234730B2 (ja) | 1994-12-16 | 2001-12-04 | キヤノン株式会社 | 電子放出素子および電子源基板の製造方法 |
| JPH09192864A (ja) * | 1996-01-11 | 1997-07-29 | Canon Inc | レーザ光を用いる表面伝導型電子放出素子の製造装置及び製造方法 |
| JP3428802B2 (ja) * | 1996-02-06 | 2003-07-22 | キヤノン株式会社 | 電子源基板および画像形成装置の製造方法 |
| JPH1125851A (ja) * | 1997-05-09 | 1999-01-29 | Canon Inc | 電子源、その製造方法及び製造装置並びに画像形成装置及びその製造方法 |
| US6220912B1 (en) * | 1997-05-09 | 2001-04-24 | Canon Kabushiki Kaisha | Method and apparatus for producing electron source using dispenser to produce electron emitting portions |
| JPH1144811A (ja) * | 1997-07-24 | 1999-02-16 | Asahi Glass Co Ltd | カラーフィルタ製造装置 |
| US6815001B1 (en) * | 1999-02-08 | 2004-11-09 | Canon Kabushiki Kaisha | Electronic device, method for producing electron source and image forming device, and apparatus for producing electronic device |
| JP2001319567A (ja) * | 2000-02-28 | 2001-11-16 | Ricoh Co Ltd | 電子源基板および該電子源基板を用いた画像表示装置 |
| JP3880289B2 (ja) * | 2000-05-23 | 2007-02-14 | キヤノン株式会社 | ヘッドユニット、当該ヘッドユニットを用いるカラーフィルタの製造装置、カラーフィルタの製造方法、カラーフィルタを備えた液晶パネルの製造方法および液晶パネルを備えた情報処理装置の製造方法 |
| US6673386B2 (en) * | 2000-06-29 | 2004-01-06 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for forming pattern onto panel substrate |
| JP3953776B2 (ja) * | 2001-01-15 | 2007-08-08 | セイコーエプソン株式会社 | 材料の吐出装置、及び吐出方法、カラーフィルタの製造装置及び製造方法、液晶装置の製造装置及び製造方法、el装置の製造装置及び製造方法 |
| JP2003265997A (ja) * | 2002-03-14 | 2003-09-24 | Seiko Epson Corp | 薄膜形成装置と薄膜形成方法、回路パターンの製造装置と電子機器の製造方法と電子機器、及びレジストパターンの製造装置とレジストパターンの製造方法 |
| JP3966034B2 (ja) * | 2002-03-14 | 2007-08-29 | セイコーエプソン株式会社 | 吐出パターンデータ生成方法および吐出パターンデータ生成装置 |
| JP2004144849A (ja) * | 2002-10-22 | 2004-05-20 | Sekisui Chem Co Ltd | 液晶表示装置の製造方法 |
| JP4168728B2 (ja) * | 2002-10-23 | 2008-10-22 | セイコーエプソン株式会社 | 液滴吐出装置のドット位置補正方法、液滴吐出方法および電気光学装置の製造方法 |
| KR100615173B1 (ko) | 2003-02-11 | 2006-08-25 | 삼성에스디아이 주식회사 | 다중 잉크젯 헤드를 이용한 발광 용액 주입 방법 |
| JP2004255335A (ja) * | 2003-02-27 | 2004-09-16 | Seiko Epson Corp | 液状物の吐出方法、液状物の吐出装置、カラーフィルタの製造方法およびカラーフィルタ、液晶表示装置、エレクトロルミネッセンス装置の製造方法およびエレクトロルミネッセンス装置、プラズマディスプレイパネルの製造方法およびプラズマディスプレイ、並びに電子機器 |
| JP4148021B2 (ja) * | 2003-05-20 | 2008-09-10 | セイコーエプソン株式会社 | 配向膜の液滴吐出方法、電気光学パネルの製造方法、電子機器の製造方法、プログラム及び配向膜の液滴吐出装置 |
-
2005
- 2005-03-28 JP JP2005090663A patent/JP2006272035A/ja active Pending
-
2006
- 2006-02-16 US US11/354,811 patent/US8075944B2/en not_active Expired - Fee Related
- 2006-03-24 KR KR1020060026902A patent/KR100812834B1/ko not_active Expired - Fee Related
- 2006-03-28 CN CN200610071674A patent/CN100588543C/zh not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0717428B1 (en) * | 1994-12-16 | 2004-03-10 | Canon Kabushiki Kaisha | Method of producing a surface conduction type electron emitting device |
| US6579139B1 (en) * | 1998-02-13 | 2003-06-17 | Canon Kabushiki Kaisha | Film formation method, method for fabricating electron emitting element employing the same film, and method for manufacturing image forming apparatus employing the same element |
| CN1358626A (zh) * | 2000-11-21 | 2002-07-17 | 精工爱普生株式会社 | 滤色片、液晶装置和el装置的制造方法及制造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8075944B2 (en) | 2011-12-13 |
| US20060216409A1 (en) | 2006-09-28 |
| KR100812834B1 (ko) | 2008-03-11 |
| CN1865003A (zh) | 2006-11-22 |
| JP2006272035A (ja) | 2006-10-12 |
| KR20060103859A (ko) | 2006-10-04 |
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