CN100581657C - 狭缝喷嘴、基板处理装置以及基板处理方法 - Google Patents

狭缝喷嘴、基板处理装置以及基板处理方法 Download PDF

Info

Publication number
CN100581657C
CN100581657C CN200610054724A CN200610054724A CN100581657C CN 100581657 C CN100581657 C CN 100581657C CN 200610054724 A CN200610054724 A CN 200610054724A CN 200610054724 A CN200610054724 A CN 200610054724A CN 100581657 C CN100581657 C CN 100581657C
Authority
CN
China
Prior art keywords
mentioned
side plate
nozzle
discharge opening
length direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200610054724A
Other languages
English (en)
Chinese (zh)
Other versions
CN1833779A (zh
Inventor
池田文彦
楫野一树
细川章宏
吉田顺一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Skilling Group
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of CN1833779A publication Critical patent/CN1833779A/zh
Application granted granted Critical
Publication of CN100581657C publication Critical patent/CN100581657C/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/10—Frying pans, e.g. frying pans with integrated lids or basting devices
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J36/00—Parts, details or accessories of cooking-vessels
    • A47J36/06—Lids or covers for cooking-vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Materials For Photolithography (AREA)
CN200610054724A 2005-03-16 2006-03-02 狭缝喷嘴、基板处理装置以及基板处理方法 Active CN100581657C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005075402 2005-03-16
JP2005075402A JP4549905B2 (ja) 2005-03-16 2005-03-16 スリットノズル，基板処理装置，および基板処理方法

Publications (2)

Publication Number Publication Date
CN1833779A CN1833779A (zh) 2006-09-20
CN100581657C true CN100581657C (zh) 2010-01-20

Family

ID=37001757

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200610054724A Active CN100581657C (zh) 2005-03-16 2006-03-02 狭缝喷嘴、基板处理装置以及基板处理方法

Country Status (4)

Country Link
JP (1) JP4549905B2 (ja)
KR (1) KR100701865B1 (ja)
CN (1) CN100581657C (ja)
TW (1) TWI297175B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103331232A (zh) * 2013-05-30 2013-10-02 深圳市华星光电技术有限公司 涂布喷头、具有该涂布喷头的涂布装置及其涂布方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4749224B2 (ja) * 2006-05-08 2011-08-17 日東電工株式会社 ダイ、ダイ方式塗布装置及び塗布方法
JP4785609B2 (ja) * 2006-05-08 2011-10-05 日東電工株式会社 ダイ方式塗布装置及び塗布方法
JP4937784B2 (ja) * 2007-02-20 2012-05-23 大日本スクリーン製造株式会社 基板処理装置
KR101847219B1 (ko) * 2011-03-16 2018-04-09 도쿄엘렉트론가부시키가이샤 도포막 형성방법, 도포막 형성장치 및 기억 매체
JP6069014B2 (ja) * 2013-02-18 2017-01-25 株式会社Ｓｃｒｅｅｎホールディングス スリットノズルおよび基板処理装置
CN104437975B (zh) * 2013-09-22 2017-04-26 宸美（厦门）光电有限公司 涂布装置以及涂布方法
JP6251062B2 (ja) * 2014-01-30 2017-12-20 タツモ株式会社 スリットノズル洗浄装置及びワーク用塗布装置
CN108554669B (zh) * 2018-01-03 2020-04-03 京东方科技集团股份有限公司 一种喷嘴、涂布机及涂布方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4830887A (en) * 1988-04-22 1989-05-16 Eastman Kodak Company Curtain coating method and apparatus
JPH09164357A (ja) * 1995-12-18 1997-06-24 Dainippon Screen Mfg Co Ltd 液体塗布装置
JPH10235260A (ja) * 1996-12-26 1998-09-08 Konica Corp 塗布装置及び写真感光材料
JP2002066420A (ja) * 2000-08-31 2002-03-05 Toppan Printing Co Ltd 品種切替えに容易なスロットダイヘッド
JP4831447B2 (ja) * 2001-02-07 2011-12-07 大日本印刷株式会社 塗布ヘッド及びこの塗布ヘッドを用いた塗布装置
JP2003260398A (ja) * 2002-03-08 2003-09-16 Canon Inc 塗布装置および塗布方法
JP4184124B2 (ja) * 2003-03-14 2008-11-19 大日本スクリーン製造株式会社 基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103331232A (zh) * 2013-05-30 2013-10-02 深圳市华星光电技术有限公司 涂布喷头、具有该涂布喷头的涂布装置及其涂布方法
CN103331232B (zh) * 2013-05-30 2016-02-03 深圳市华星光电技术有限公司 涂布喷头、具有该涂布喷头的涂布装置及其涂布方法

Also Published As

Publication number Publication date
TW200703454A (en) 2007-01-16
KR100701865B1 (ko) 2007-03-30
JP4549905B2 (ja) 2010-09-22
KR20060100282A (ko) 2006-09-20
TWI297175B (en) 2008-05-21
JP2006261326A (ja) 2006-09-28
CN1833779A (zh) 2006-09-20

Similar Documents

Publication Publication Date Title
CN100581657C (zh) 狭缝喷嘴、基板处理装置以及基板处理方法
CN1321748C (zh) 基板处理装置
CN101276148B (zh) 基板处理装置
US7169229B2 (en) Moving head, coating apparatus
KR100379104B1 (ko) 코팅다이에의해기판을도포하는방법및장치와,도료를코팅다이에공급하는장치
CN101003041B (zh) 涂敷方法、涂敷装置以及涂敷处理程序
US7963631B2 (en) Printhead maintenance station
CN107433240B (zh) 喷嘴清扫装置、涂覆装置及喷嘴清扫方法
JP2008238144A (ja) 塗布装置及び塗布方法
KR100722642B1 (ko) 기판 처리 장치 및 기판 처리 방법
KR20070079346A (ko) 도포장치
JP4184124B2 (ja) 基板処理装置
JP4524580B2 (ja) 枚葉塗布装置、およびダイ位置決め方法
CN100423852C (zh) 涂布装置以及光掩模件的制造方法
KR100675643B1 (ko) 슬릿코터
JP2006156655A (ja) 基板処理装置および送液システム
WO2023042740A1 (ja) 基板塗布装置および基板塗布方法
JP2008182268A (ja) 送液装置
JP5089228B2 (ja) 塗布装置
WO2023042741A1 (ja) 基板塗布装置および基板塗布方法
JP5044332B2 (ja) 処理装置
JPH11165113A (ja) 塗布装置およびその成形材料
KR100796425B1 (ko) 도포장치
JP2012119353A (ja) 基板移送装置およびそれを用いた塗布装置
JP2002361142A (ja) ディッピング制御方法とその装置、及びロール部材

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee

Owner name: DAINIPPON SCREEN MFG. CO., LTD.

Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD.

Owner name: SCREEN GROUP CO., LTD.

Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD.

CP01 Change in the name or title of a patent holder

Address after: Kyoto Japan

Patentee after: Skilling Group

Address before: Kyoto Japan

Patentee before: DAINIPPON SCREEN MFG Co.,Ltd.

Address after: Kyoto Japan

Patentee after: DAINIPPON SCREEN MFG Co.,Ltd.

Address before: Kyoto Japan

Patentee before: Dainippon Screen Mfg. Co.,Ltd.