KR100701865B1 - 슬릿 노즐, 기판 처리 장치 및 기판 처리 방법 - Google Patents

슬릿 노즐, 기판 처리 장치 및 기판 처리 방법 Download PDF

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Publication number
KR100701865B1
KR100701865B1 KR1020060024254A KR20060024254A KR100701865B1 KR 100701865 B1 KR100701865 B1 KR 100701865B1 KR 1020060024254 A KR1020060024254 A KR 1020060024254A KR 20060024254 A KR20060024254 A KR 20060024254A KR 100701865 B1 KR100701865 B1 KR 100701865B1
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KR
South Korea
Prior art keywords
side plate
nozzle
slit nozzle
discharge port
slit
Prior art date
Application number
KR1020060024254A
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English (en)
Korean (ko)
Other versions
KR20060100282A (ko
Inventor
후미히코 이케다
이츠키 가지노
아키히로 호소카와
준이치 요시다
Original Assignee
다이니폰 스크린 세이조우 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR20060100282A publication Critical patent/KR20060100282A/ko
Application granted granted Critical
Publication of KR100701865B1 publication Critical patent/KR100701865B1/ko

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    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/10—Frying pans, e.g. frying pans with integrated lids or basting devices
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J36/00—Parts, details or accessories of cooking-vessels
    • A47J36/06—Lids or covers for cooking-vessels

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  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Materials For Photolithography (AREA)
KR1020060024254A 2005-03-16 2006-03-16 슬릿 노즐, 기판 처리 장치 및 기판 처리 방법 KR100701865B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005075402A JP4549905B2 (ja) 2005-03-16 2005-03-16 スリットノズル，基板処理装置，および基板処理方法
JPJP-P-2005-00075402 2005-03-16

Publications (2)

Publication Number Publication Date
KR20060100282A KR20060100282A (ko) 2006-09-20
KR100701865B1 true KR100701865B1 (ko) 2007-03-30

Family

ID=37001757

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060024254A KR100701865B1 (ko) 2005-03-16 2006-03-16 슬릿 노즐, 기판 처리 장치 및 기판 처리 방법

Country Status (4)

Country Link
JP (1) JP4549905B2 (ja)
KR (1) KR100701865B1 (ja)
CN (1) CN100581657C (ja)
TW (1) TWI297175B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4749224B2 (ja) * 2006-05-08 2011-08-17 日東電工株式会社 ダイ、ダイ方式塗布装置及び塗布方法
JP4785609B2 (ja) * 2006-05-08 2011-10-05 日東電工株式会社 ダイ方式塗布装置及び塗布方法
JP4937784B2 (ja) * 2007-02-20 2012-05-23 大日本スクリーン製造株式会社 基板処理装置
KR101847219B1 (ko) * 2011-03-16 2018-04-09 도쿄엘렉트론가부시키가이샤 도포막 형성방법, 도포막 형성장치 및 기억 매체
JP6069014B2 (ja) * 2013-02-18 2017-01-25 株式会社Ｓｃｒｅｅｎホールディングス スリットノズルおよび基板処理装置
CN103331232B (zh) * 2013-05-30 2016-02-03 深圳市华星光电技术有限公司 涂布喷头、具有该涂布喷头的涂布装置及其涂布方法
CN104437975B (zh) * 2013-09-22 2017-04-26 宸美（厦门）光电有限公司 涂布装置以及涂布方法
JP6251062B2 (ja) * 2014-01-30 2017-12-20 タツモ株式会社 スリットノズル洗浄装置及びワーク用塗布装置
CN108554669B (zh) * 2018-01-03 2020-04-03 京东方科技集团股份有限公司 一种喷嘴、涂布机及涂布方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004281640A (ja) * 2003-03-14 2004-10-07 Dainippon Screen Mfg Co Ltd 基板処理装置および送液装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4830887A (en) * 1988-04-22 1989-05-16 Eastman Kodak Company Curtain coating method and apparatus
JPH09164357A (ja) * 1995-12-18 1997-06-24 Dainippon Screen Mfg Co Ltd 液体塗布装置
JPH10235260A (ja) * 1996-12-26 1998-09-08 Konica Corp 塗布装置及び写真感光材料
JP2002066420A (ja) * 2000-08-31 2002-03-05 Toppan Printing Co Ltd 品種切替えに容易なスロットダイヘッド
JP4831447B2 (ja) * 2001-02-07 2011-12-07 大日本印刷株式会社 塗布ヘッド及びこの塗布ヘッドを用いた塗布装置
JP2003260398A (ja) * 2002-03-08 2003-09-16 Canon Inc 塗布装置および塗布方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004281640A (ja) * 2003-03-14 2004-10-07 Dainippon Screen Mfg Co Ltd 基板処理装置および送液装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
16281640

Also Published As

Publication number Publication date
JP2006261326A (ja) 2006-09-28
KR20060100282A (ko) 2006-09-20
JP4549905B2 (ja) 2010-09-22
TW200703454A (en) 2007-01-16
TWI297175B (en) 2008-05-21
CN100581657C (zh) 2010-01-20
CN1833779A (zh) 2006-09-20

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