TWI297175B - Slit nozzle, substrate processing apparatus, and substrate processing method - Google Patents

Slit nozzle, substrate processing apparatus, and substrate processing method Download PDF

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Publication number
TWI297175B
TWI297175B TW095104391A TW95104391A TWI297175B TW I297175 B TWI297175 B TW I297175B TW 095104391 A TW095104391 A TW 095104391A TW 95104391 A TW95104391 A TW 95104391A TW I297175 B TWI297175 B TW I297175B
Authority
TW
Taiwan
Prior art keywords
side plate
end portion
nozzle
slit
nozzle body
Prior art date
Application number
TW095104391A
Other languages
English (en)
Chinese (zh)
Other versions
TW200703454A (en
Inventor
Fumihiko Ikeda
Itsuki Kajino
Akihiro Hosokawa
Junichi Yoshida
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200703454A publication Critical patent/TW200703454A/zh
Application granted granted Critical
Publication of TWI297175B publication Critical patent/TWI297175B/zh

Links

Classifications

    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J37/00—Baking; Roasting; Grilling; Frying
    • A47J37/10—Frying pans, e.g. frying pans with integrated lids or basting devices
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
    • A47J36/00—Parts, details or accessories of cooking-vessels
    • A47J36/06—Lids or covers for cooking-vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Food Science & Technology (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Materials For Photolithography (AREA)
TW095104391A 2005-03-16 2006-02-09 Slit nozzle, substrate processing apparatus, and substrate processing method TWI297175B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005075402A JP4549905B2 (ja) 2005-03-16 2005-03-16 スリットノズル，基板処理装置，および基板処理方法

Publications (2)

Publication Number Publication Date
TW200703454A TW200703454A (en) 2007-01-16
TWI297175B true TWI297175B (en) 2008-05-21

Family

ID=37001757

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095104391A TWI297175B (en) 2005-03-16 2006-02-09 Slit nozzle, substrate processing apparatus, and substrate processing method

Country Status (4)

Country Link
JP (1) JP4549905B2 (ja)
KR (1) KR100701865B1 (ja)
CN (1) CN100581657C (ja)
TW (1) TWI297175B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4749224B2 (ja) * 2006-05-08 2011-08-17 日東電工株式会社 ダイ、ダイ方式塗布装置及び塗布方法
JP4785609B2 (ja) * 2006-05-08 2011-10-05 日東電工株式会社 ダイ方式塗布装置及び塗布方法
JP4937784B2 (ja) * 2007-02-20 2012-05-23 大日本スクリーン製造株式会社 基板処理装置
KR101847219B1 (ko) * 2011-03-16 2018-04-09 도쿄엘렉트론가부시키가이샤 도포막 형성방법, 도포막 형성장치 및 기억 매체
JP6069014B2 (ja) * 2013-02-18 2017-01-25 株式会社Ｓｃｒｅｅｎホールディングス スリットノズルおよび基板処理装置
CN103331232B (zh) * 2013-05-30 2016-02-03 深圳市华星光电技术有限公司 涂布喷头、具有该涂布喷头的涂布装置及其涂布方法
CN104437975B (zh) * 2013-09-22 2017-04-26 宸美（厦门）光电有限公司 涂布装置以及涂布方法
JP6251062B2 (ja) * 2014-01-30 2017-12-20 タツモ株式会社 スリットノズル洗浄装置及びワーク用塗布装置
CN108554669B (zh) * 2018-01-03 2020-04-03 京东方科技集团股份有限公司 一种喷嘴、涂布机及涂布方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4830887A (en) * 1988-04-22 1989-05-16 Eastman Kodak Company Curtain coating method and apparatus
JPH09164357A (ja) * 1995-12-18 1997-06-24 Dainippon Screen Mfg Co Ltd 液体塗布装置
JPH10235260A (ja) * 1996-12-26 1998-09-08 Konica Corp 塗布装置及び写真感光材料
JP2002066420A (ja) * 2000-08-31 2002-03-05 Toppan Printing Co Ltd 品種切替えに容易なスロットダイヘッド
JP4831447B2 (ja) * 2001-02-07 2011-12-07 大日本印刷株式会社 塗布ヘッド及びこの塗布ヘッドを用いた塗布装置
JP2003260398A (ja) * 2002-03-08 2003-09-16 Canon Inc 塗布装置および塗布方法
JP4184124B2 (ja) * 2003-03-14 2008-11-19 大日本スクリーン製造株式会社 基板処理装置

Also Published As

Publication number Publication date
TW200703454A (en) 2007-01-16
KR100701865B1 (ko) 2007-03-30
JP4549905B2 (ja) 2010-09-22
KR20060100282A (ko) 2006-09-20
JP2006261326A (ja) 2006-09-28
CN1833779A (zh) 2006-09-20
CN100581657C (zh) 2010-01-20

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