CN100535676C - 检查夹具及检查装置 - Google Patents

检查夹具及检查装置 Download PDF

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Publication number
CN100535676C
CN100535676C CNB2005101134540A CN200510113454A CN100535676C CN 100535676 C CN100535676 C CN 100535676C CN B2005101134540 A CNB2005101134540 A CN B2005101134540A CN 200510113454 A CN200510113454 A CN 200510113454A CN 100535676 C CN100535676 C CN 100535676C
Authority
CN
China
Prior art keywords
end side
probe
insertion hole
hole
side insertion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005101134540A
Other languages
English (en)
Chinese (zh)
Other versions
CN1854744A (zh
Inventor
土桥贤治
小泽浩二
伊藤光彦
两角和彦
饭野伸治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOYO TECHNOS CO Ltd
Original Assignee
KOYO TECHNOS CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005123162A external-priority patent/JP2005338065A/ja
Application filed by KOYO TECHNOS CO Ltd filed Critical KOYO TECHNOS CO Ltd
Publication of CN1854744A publication Critical patent/CN1854744A/zh
Application granted granted Critical
Publication of CN100535676C publication Critical patent/CN100535676C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
CNB2005101134540A 2005-04-21 2005-10-09 检查夹具及检查装置 Expired - Fee Related CN100535676C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005123162 2005-04-21
JP2005123162A JP2005338065A (ja) 2004-04-26 2005-04-21 検査冶具および検査装置

Publications (2)

Publication Number Publication Date
CN1854744A CN1854744A (zh) 2006-11-01
CN100535676C true CN100535676C (zh) 2009-09-02

Family

ID=37195047

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005101134540A Expired - Fee Related CN100535676C (zh) 2005-04-21 2005-10-09 检查夹具及检查装置

Country Status (3)

Country Link
KR (1) KR100824394B1 (OSRAM)
CN (1) CN100535676C (OSRAM)
TW (1) TW200638046A (OSRAM)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3849948B1 (ja) * 2005-11-16 2006-11-22 日本電産リード株式会社 基板検査用治具及び検査用プローブ
JP5651333B2 (ja) * 2007-07-17 2015-01-14 日本発條株式会社 プローブユニット
JP2009036532A (ja) * 2007-07-31 2009-02-19 Koyo Technos:Kk 検査冶具および検査装置
KR101037974B1 (ko) * 2009-05-20 2011-05-30 주식회사 메디오션 프로브 지지체 및 그 제조방법
KR101459667B1 (ko) * 2013-07-22 2014-11-12 바이옵트로 주식회사 지그 장치
CN103983816A (zh) * 2014-05-15 2014-08-13 珠海市运泰利自动化设备有限公司 高精度测试模组
JP6537315B2 (ja) * 2015-03-23 2019-07-03 オルガン針株式会社 ワイヤープローブ用治具
KR101656047B1 (ko) * 2016-03-23 2016-09-09 주식회사 나노시스 기판 검사용 지그
US11293976B1 (en) * 2020-09-25 2022-04-05 Essai, Inc. Integrated circuit device test tooling with dual angle cavities
KR102649845B1 (ko) * 2023-11-29 2024-03-21 주식회사 나노시스 반도체 소자 테스터 지그

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0635723B1 (en) * 1993-07-23 1999-09-29 International Business Machines Corporation Buckling beam test probe assembly
JPH09274054A (ja) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The プローバー
JP3505495B2 (ja) * 2000-09-13 2004-03-08 日本電産リード株式会社 基板検査用検査治具、該検査治具を備えた基板検査装置および基板検査用検査治具の組立方法
JP4242199B2 (ja) * 2003-04-25 2009-03-18 株式会社ヨコオ Ｉｃソケット
JP2004325306A (ja) * 2003-04-25 2004-11-18 Yokowo Co Ltd 検査用同軸プローブおよびそれを用いた検査ユニット

Also Published As

Publication number Publication date
TWI292826B (OSRAM) 2008-01-21
KR100824394B1 (ko) 2008-04-22
TW200638046A (en) 2006-11-01
KR20060111248A (ko) 2006-10-26
CN1854744A (zh) 2006-11-01

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090902