CN100526996C - 曝光装置及曝光方法 - Google Patents
曝光装置及曝光方法 Download PDFInfo
- Publication number
- CN100526996C CN100526996C CNB2007100868917A CN200710086891A CN100526996C CN 100526996 C CN100526996 C CN 100526996C CN B2007100868917 A CNB2007100868917 A CN B2007100868917A CN 200710086891 A CN200710086891 A CN 200710086891A CN 100526996 C CN100526996 C CN 100526996C
- Authority
- CN
- China
- Prior art keywords
- substrate
- exposure
- loading stage
- substrate loading
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
Abstract
Description
Claims (4)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006119412A JP2007294594A (ja) | 2006-04-24 | 2006-04-24 | 露光装置及び露光方法 |
JP2006119412 | 2006-04-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101063824A CN101063824A (zh) | 2007-10-31 |
CN100526996C true CN100526996C (zh) | 2009-08-12 |
Family
ID=38764931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007100868917A Active CN100526996C (zh) | 2006-04-24 | 2007-04-02 | 曝光装置及曝光方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2007294594A (zh) |
KR (1) | KR100839398B1 (zh) |
CN (1) | CN100526996C (zh) |
TW (1) | TW200745790A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112015054A (zh) * | 2019-05-31 | 2020-12-01 | 上海微电子装备(集团)股份有限公司 | 传输装置、传输方法及光刻机 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4726814B2 (ja) * | 2007-01-16 | 2011-07-20 | 株式会社日立ハイテクノロジーズ | 基板の位置決め装置及び位置決め方法 |
KR101005582B1 (ko) * | 2009-07-13 | 2011-01-05 | 한국기계연구원 | 기판 정렬 모듈 및 이를 구비하는 리소그래피 장치 |
US8379186B2 (en) * | 2009-07-17 | 2013-02-19 | Nikon Corporation | Pattern formation apparatus, pattern formation method, and device manufacturing method |
TWI398639B (zh) * | 2010-01-08 | 2013-06-11 | Nat Univ Kaohsiung | The carrier of the package |
WO2011111327A1 (ja) * | 2010-03-12 | 2011-09-15 | パナソニック株式会社 | アライメント方法およびフラットパネルディスプレイの製造方法 |
JP5843161B2 (ja) * | 2011-05-13 | 2016-01-13 | 株式会社ニコン | 露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 |
TWI499872B (zh) | 2013-06-18 | 2015-09-11 | Innolux Corp | 曝光系統與曝光製程 |
CN104238272B (zh) * | 2013-06-18 | 2017-02-01 | 群创光电股份有限公司 | 曝光系统与曝光方法 |
TWI596449B (zh) * | 2016-05-30 | 2017-08-21 | 志聖工業股份有限公司 | 工件曝光方法、曝光設備及其置件機構 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3203719B2 (ja) * | 1991-12-26 | 2001-08-27 | 株式会社ニコン | 露光装置、その露光装置により製造されるデバイス、露光方法、およびその露光方法を用いたデバイス製造方法 |
CN1517796A (zh) * | 2003-01-14 | 2004-08-04 | 佳能株式会社 | 曝光装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308003A (ja) * | 2000-02-15 | 2001-11-02 | Nikon Corp | 露光方法及び装置、並びにデバイス製造方法 |
JP2002305140A (ja) * | 2001-04-06 | 2002-10-18 | Nikon Corp | 露光装置及び基板処理システム |
-
2006
- 2006-04-24 JP JP2006119412A patent/JP2007294594A/ja active Pending
-
2007
- 2007-03-23 KR KR1020070028681A patent/KR100839398B1/ko active IP Right Grant
- 2007-03-29 TW TW096111046A patent/TW200745790A/zh unknown
- 2007-04-02 CN CNB2007100868917A patent/CN100526996C/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3203719B2 (ja) * | 1991-12-26 | 2001-08-27 | 株式会社ニコン | 露光装置、その露光装置により製造されるデバイス、露光方法、およびその露光方法を用いたデバイス製造方法 |
CN1517796A (zh) * | 2003-01-14 | 2004-08-04 | 佳能株式会社 | 曝光装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112015054A (zh) * | 2019-05-31 | 2020-12-01 | 上海微电子装备(集团)股份有限公司 | 传输装置、传输方法及光刻机 |
CN112015054B (zh) * | 2019-05-31 | 2021-10-01 | 上海微电子装备(集团)股份有限公司 | 传输装置、传输方法及光刻机 |
Also Published As
Publication number | Publication date |
---|---|
KR20070104827A (ko) | 2007-10-29 |
KR100839398B1 (ko) | 2008-06-20 |
CN101063824A (zh) | 2007-10-31 |
JP2007294594A (ja) | 2007-11-08 |
TW200745790A (en) | 2007-12-16 |
TWI338201B (zh) | 2011-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: NSK TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: NSK LTD. Effective date: 20120411 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20120411 Address after: Tokyo, Japan Patentee after: NSK Technology Co.,Ltd. Address before: Tokyo, Japan Patentee before: NSK Ltd. |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP03 | Change of name, title or address |
Address after: Kanagawa, Japan Patentee after: VN Systems Ltd. Address before: Tokyo, Japan Patentee before: NSK Technology Co.,Ltd. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20151228 Address after: Kanagawa, Japan Patentee after: V TECHNOLOGY Co.,Ltd. Address before: Kanagawa, Japan Patentee before: VN Systems Ltd. |