CN100431714C - 喷嘴的洗净装置 - Google Patents

喷嘴的洗净装置 Download PDF

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Publication number
CN100431714C
CN100431714C CNB2006100958285A CN200610095828A CN100431714C CN 100431714 C CN100431714 C CN 100431714C CN B2006100958285 A CNB2006100958285 A CN B2006100958285A CN 200610095828 A CN200610095828 A CN 200610095828A CN 100431714 C CN100431714 C CN 100431714C
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CN
China
Prior art keywords
swing roller
nozzle
outer peripheral
peripheral face
coating fluid
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Active
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CNB2006100958285A
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English (en)
Chinese (zh)
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CN1970166A (zh
Inventor
甲田正纪
黑木贵史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Publication of CN1970166A publication Critical patent/CN1970166A/zh
Application granted granted Critical
Publication of CN100431714C publication Critical patent/CN100431714C/zh
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids

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  • Coating Apparatus (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
CNB2006100958285A 2005-11-24 2006-06-20 喷嘴的洗净装置 Active CN100431714C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005337940 2005-11-24
JP2005337940 2005-11-24
JP2005-337940 2005-11-24

Publications (2)

Publication Number Publication Date
CN1970166A CN1970166A (zh) 2007-05-30
CN100431714C true CN100431714C (zh) 2008-11-12

Family

ID=38111297

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006100958285A Active CN100431714C (zh) 2005-11-24 2006-06-20 喷嘴的洗净装置

Country Status (4)

Country Link
JP (1) JP4381407B2 (ja)
KR (1) KR100756811B1 (ja)
CN (1) CN100431714C (ja)
TW (1) TWI296943B (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100840528B1 (ko) * 2007-04-13 2008-06-23 주식회사 케이씨텍 슬릿 코터용 예비토출장치
KR101450031B1 (ko) * 2007-11-30 2014-10-14 주식회사 케이씨텍 슬릿코터용 예비토출장치
KR100933640B1 (ko) * 2007-12-27 2009-12-23 주식회사 성우하이텍 접착제 도포장치용 접착제 압착유닛
JP5121778B2 (ja) * 2009-06-26 2013-01-16 東京エレクトロン株式会社 プライミング処理方法及びプライミング処理装置
JP5562315B2 (ja) * 2011-10-27 2014-07-30 東京エレクトロン株式会社 プライミング処理方法及びプライミング処理装置
CN107486424A (zh) * 2017-08-25 2017-12-19 安徽信息工程学院 超白光伏玻璃压延机的洗刷辊装置
JP7018323B2 (ja) * 2018-01-22 2022-02-10 Towa株式会社 加工装置、及び製品の製造方法
CN108856113A (zh) * 2018-05-29 2018-11-23 武汉华星光电技术有限公司 涂布喷嘴清洗装置
CN109047075A (zh) * 2018-08-30 2018-12-21 浙江工业大学 一种法兰焊缝自动清洁机
CN109046849B (zh) * 2018-10-27 2020-10-13 临泉县荣兴木业有限公司 一种自清洗涂胶机用胶辊
DE102019103273A1 (de) * 2019-02-11 2020-08-13 Brillux Gmbh & Co. Kg Verfahren zur Vermeidung des mikrobiellen Befalls einer Reinigungsvorrichtung für eine Dosieranlage

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000005683A (ja) * 1998-06-22 2000-01-11 Toppan Printing Co Ltd スロット型塗布ヘッドクリーニング装置およびクリーニング方法
JP2000015165A (ja) * 1998-07-07 2000-01-18 Inoue Kinzoku Kogyo Co Ltd 塗工装置用清掃装置
JP2001310147A (ja) * 2000-05-02 2001-11-06 Tokyo Ohka Kogyo Co Ltd スリットコータの予備吐出装置および予備吐出方法
CN1419967A (zh) * 2001-11-21 2003-05-28 豪尼机械制造股份公司 一种涂胶机构的清洗装置
CN1481307A (zh) * 2000-12-22 2004-03-10 清洗辊子的方法和装置
CN1500558A (zh) * 2002-10-23 2004-06-02 凸版印刷株式会社 涂敷液供给装置及其狭缝涂敷式涂敷装置
JP2004167476A (ja) * 2002-11-07 2004-06-17 Tokyo Ohka Kogyo Co Ltd スリットコータの予備吐出装置
CN1672806A (zh) * 2004-03-25 2005-09-28 东京応化工业株式会社 狭缝喷嘴前端的调整装置和调整方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3245812B2 (ja) * 1996-08-30 2002-01-15 東京エレクトロン株式会社 液処理方法及びその装置
JP2004121980A (ja) * 2002-10-02 2004-04-22 Toppan Printing Co Ltd 予備吐出装置および方法
JP4455102B2 (ja) * 2004-03-10 2010-04-21 大日本スクリーン製造株式会社 基板処理装置
KR200441012Y1 (ko) * 2007-05-09 2008-07-17 양철수 고압 및 오수용 배력발생기

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000005683A (ja) * 1998-06-22 2000-01-11 Toppan Printing Co Ltd スロット型塗布ヘッドクリーニング装置およびクリーニング方法
JP2000015165A (ja) * 1998-07-07 2000-01-18 Inoue Kinzoku Kogyo Co Ltd 塗工装置用清掃装置
JP2001310147A (ja) * 2000-05-02 2001-11-06 Tokyo Ohka Kogyo Co Ltd スリットコータの予備吐出装置および予備吐出方法
CN1481307A (zh) * 2000-12-22 2004-03-10 清洗辊子的方法和装置
CN1419967A (zh) * 2001-11-21 2003-05-28 豪尼机械制造股份公司 一种涂胶机构的清洗装置
CN1500558A (zh) * 2002-10-23 2004-06-02 凸版印刷株式会社 涂敷液供给装置及其狭缝涂敷式涂敷装置
JP2004167476A (ja) * 2002-11-07 2004-06-17 Tokyo Ohka Kogyo Co Ltd スリットコータの予備吐出装置
CN1672806A (zh) * 2004-03-25 2005-09-28 东京応化工业株式会社 狭缝喷嘴前端的调整装置和调整方法

Also Published As

Publication number Publication date
JP2007167837A (ja) 2007-07-05
KR100756811B1 (ko) 2007-09-10
KR20070055308A (ko) 2007-05-30
JP4381407B2 (ja) 2009-12-09
TW200719978A (en) 2007-06-01
CN1970166A (zh) 2007-05-30
TWI296943B (en) 2008-05-21

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