CN100347611C - 感光树脂组合物以及利用该组合物制作图案的方法和电子元件 - Google Patents

感光树脂组合物以及利用该组合物制作图案的方法和电子元件 Download PDF

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Publication number
CN100347611C
CN100347611C CNB028133242A CN02813324A CN100347611C CN 100347611 C CN100347611 C CN 100347611C CN B028133242 A CNB028133242 A CN B028133242A CN 02813324 A CN02813324 A CN 02813324A CN 100347611 C CN100347611 C CN 100347611C
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CN
China
Prior art keywords
photosensitive resin
resin composition
general formula
polyamide
composition according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB028133242A
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English (en)
Chinese (zh)
Other versions
CN1522388A (zh
Inventor
名儿耶友宏
松浦秀一
清水健博
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Resonac Corp
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Hitachi Chemical Co Ltd
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Priority claimed from JP2001202459A external-priority patent/JP4716073B2/ja
Priority claimed from JP2001202458A external-priority patent/JP4711100B2/ja
Priority claimed from JP2002085768A external-priority patent/JP3941556B2/ja
Priority claimed from JP2002085769A external-priority patent/JP3941557B2/ja
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of CN1522388A publication Critical patent/CN1522388A/zh
Application granted granted Critical
Publication of CN100347611C publication Critical patent/CN100347611C/zh
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G03F7/0758—Macromolecular compounds containing Si-O, Si-C or Si-N bonds with silicon- containing groups in the side chains
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L77/00—Compositions of polyamides obtained by reactions forming a carboxylic amide link in the main chain; Compositions of derivatives of such polymers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387—Polyamides or polyimides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/107—Polyamide or polyurethane

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Graft Or Block Polymers (AREA)
CNB028133242A 2001-07-03 2002-07-03 感光树脂组合物以及利用该组合物制作图案的方法和电子元件 Expired - Fee Related CN100347611C (zh)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2001202459A JP4716073B2 (ja) 2001-07-03 2001-07-03 感光性樹脂組成物、これを用いたパターン製造法及び電子部品
JP202458/2001 2001-07-03
JP202459/2001 2001-07-03
JP2001202458A JP4711100B2 (ja) 2001-07-03 2001-07-03 感光性樹脂組成物、パターン製造方法及び電子部品
JP085768/2002 2002-03-26
JP2002085768A JP3941556B2 (ja) 2002-03-26 2002-03-26 感光性ポリアミドイミド樹脂組成物、パターン製造法及び電子部品
JP085769/2002 2002-03-26
JP2002085769A JP3941557B2 (ja) 2002-03-26 2002-03-26 感光性ポリアミドイミド樹脂組成物、パターン製造法及び電子部品

Publications (2)

Publication Number Publication Date
CN1522388A CN1522388A (zh) 2004-08-18
CN100347611C true CN100347611C (zh) 2007-11-07

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CNB028133242A Expired - Fee Related CN100347611C (zh) 2001-07-03 2002-07-03 感光树脂组合物以及利用该组合物制作图案的方法和电子元件

Country Status (5)

Country Link
US (1) US6849385B2 (enExample)
KR (1) KR100805134B1 (enExample)
CN (1) CN100347611C (enExample)
TW (1) TWI307822B (enExample)
WO (1) WO2003005127A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005268730A (ja) * 2004-03-22 2005-09-29 Toshiba Corp 半導体装置
TWI392962B (zh) * 2005-02-14 2013-04-11 Shinetsu Chemical Co Photosensitive resin composition and method for producing the same
JPWO2006134744A1 (ja) * 2005-06-17 2009-01-08 株式会社村田製作所 電子部品の製造方法
TWI383251B (zh) * 2008-01-16 2013-01-21 Eternal Chemical Co Ltd 感光型聚醯亞胺
US9217921B2 (en) * 2009-06-02 2015-12-22 Nissan Chemical Industries, Ltd. Resist underlayer film forming composition containing silicon having sulfide bond
KR101010036B1 (ko) * 2009-08-28 2011-01-21 주식회사 엘지화학 신규한 폴리아믹산, 이를 포함하는 감광성 수지 조성물 및 이로부터 제조된 드라이 필름
US9751986B2 (en) 2011-12-15 2017-09-05 Fujifilm Hunt Chemicals Us, Inc. Low toxicity solvent system for polyamideimide resins and solvent system manufacture
EP2821447B1 (en) * 2012-02-06 2018-10-31 Dnp Fine Chemicals Co., Ltd. Pigment dispersion liquid for inkjet inks, active energy beam-curable inkjet ink, and print
EP2690124B1 (en) * 2012-07-27 2015-09-16 Samsung Electronics Co., Ltd Composition Comprising Polyimide Block Copolymer And Inorganic Particles, Method Of Preparing The Same, Article Including The Same, And Display Device Including The Article
US9815941B2 (en) * 2014-04-17 2017-11-14 Cymer-Dayton, Llc Low toxicity solvent system for polyamdieimide and polyamide amic acid resin manufacture
US9725617B2 (en) * 2014-04-17 2017-08-08 Fujifilm Hunt Chemicals U.S.A., Inc. Low toxicity solvent system for polyamideimide and polyamide amic acid resin coating
JP6813565B2 (ja) * 2015-07-22 2021-01-13 サン ケミカル コーポレイション プリント回路基板用インク
US11086219B2 (en) 2016-03-30 2021-08-10 Toray Industries, Inc. Negative-type photosensitive resin composition, cured film, display device that includes the cured film, and production method therefor
KR102412726B1 (ko) * 2020-11-12 2022-06-27 한국재료연구원 운모를 포함하는 광중합용 혼합물의 제조방법 및 이를 이용한 운모를 포함하는 조형물의 제조방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09146274A (ja) * 1995-11-27 1997-06-06 Sumitomo Bakelite Co Ltd 感光性樹脂組成物及びそのパターン形成方法
JPH1152572A (ja) * 1997-08-08 1999-02-26 Fujitsu Ltd 感光性樹脂組成物及びそれを用いたパターン形成方法
CN1227638A (zh) * 1996-08-16 1999-09-01 克拉里安特国际有限公司 感光树脂组合物用抗反射涂料
JP2001060005A (ja) * 1999-06-15 2001-03-06 Hitachi Chemical Dupont Microsystems Ltd 感光性ポリイミド前駆体組成物及びそれを用いたパターンの製造法並びに電子部品

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JPH0646302B2 (ja) * 1987-06-22 1994-06-15 株式会社日立製作所 耐熱感光性重合体組成物
JP2542041B2 (ja) 1988-04-27 1996-10-09 セントラル硝子株式会社 芳香族ポリアミド樹脂およびその製造法およびこれを用いた耐熱性感光材料
IT1228515B (it) * 1988-03-03 1991-06-20 Central Glass Co Ltd Resine poliammidi aromatiche resistenti al calore e fotosensibili e metodo per la loro preparazione
JP2626696B2 (ja) * 1988-04-11 1997-07-02 チッソ株式会社 感光性重合体
JPH0749481B2 (ja) 1989-01-18 1995-05-31 チッソ株式会社 感光性耐熱重合体の製造方法
JP2862627B2 (ja) 1990-03-26 1999-03-03 住友ベークライト株式会社 感光性樹脂組成物及びパターン形成方法
JP3342299B2 (ja) 1996-06-10 2002-11-05 住友ベークライト株式会社 感光性樹脂組成物
JPH1020499A (ja) 1996-07-05 1998-01-23 Sumitomo Bakelite Co Ltd 感光性樹脂組成物及びそのパターン形成方法
EP1021479B1 (en) * 1997-09-25 2002-07-17 Rolic AG Photocrosslinkable polyimides
JP2000273172A (ja) * 1999-03-19 2000-10-03 Hitachi Chemical Dupont Microsystems Ltd ポリアミド酸エステル、その製造法、感光性樹脂組成物、それを用いたパターン製造法及び電子部品

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09146274A (ja) * 1995-11-27 1997-06-06 Sumitomo Bakelite Co Ltd 感光性樹脂組成物及びそのパターン形成方法
CN1227638A (zh) * 1996-08-16 1999-09-01 克拉里安特国际有限公司 感光树脂组合物用抗反射涂料
JPH1152572A (ja) * 1997-08-08 1999-02-26 Fujitsu Ltd 感光性樹脂組成物及びそれを用いたパターン形成方法
JP2001060005A (ja) * 1999-06-15 2001-03-06 Hitachi Chemical Dupont Microsystems Ltd 感光性ポリイミド前駆体組成物及びそれを用いたパターンの製造法並びに電子部品

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Publication number Publication date
KR100805134B1 (ko) 2008-02-21
TWI307822B (enExample) 2009-03-21
WO2003005127A1 (en) 2003-01-16
US20040180286A1 (en) 2004-09-16
US6849385B2 (en) 2005-02-01
KR20040004370A (ko) 2004-01-13
CN1522388A (zh) 2004-08-18

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