CN100341116C - 多孔基板及其制造方法、GaN系半导体叠层基板及其制造方法 - Google Patents
多孔基板及其制造方法、GaN系半导体叠层基板及其制造方法 Download PDFInfo
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- CN100341116C CN100341116C CNB038152967A CN03815296A CN100341116C CN 100341116 C CN100341116 C CN 100341116C CN B038152967 A CNB038152967 A CN B038152967A CN 03815296 A CN03815296 A CN 03815296A CN 100341116 C CN100341116 C CN 100341116C
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/38—Nitrides
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02491—Conductive materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02502—Layer structure consisting of two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02513—Microstructure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002190270A JP4088111B2 (ja) | 2002-06-28 | 2002-06-28 | 多孔質基板とその製造方法、GaN系半導体積層基板とその製造方法 |
JP190270/2002 | 2002-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1665969A CN1665969A (zh) | 2005-09-07 |
CN100341116C true CN100341116C (zh) | 2007-10-03 |
Family
ID=27655665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038152967A Expired - Fee Related CN100341116C (zh) | 2002-06-28 | 2003-06-26 | 多孔基板及其制造方法、GaN系半导体叠层基板及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7829913B2 (zh) |
JP (1) | JP4088111B2 (zh) |
KR (1) | KR100680670B1 (zh) |
CN (1) | CN100341116C (zh) |
WO (1) | WO2004003266A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103187493A (zh) * | 2009-06-10 | 2013-07-03 | 首尔Opto仪器股份有限公司 | 制造发光二极管的方法 |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3821232B2 (ja) * | 2003-04-15 | 2006-09-13 | 日立電線株式会社 | エピタキシャル成長用多孔質基板およびその製造方法ならびにiii族窒化物半導体基板の製造方法 |
JP2006080481A (ja) * | 2004-08-11 | 2006-03-23 | Canon Inc | 半導体基板及びその製造方法 |
JP2006073578A (ja) * | 2004-08-31 | 2006-03-16 | Nokodai Tlo Kk | AlGaNの気相成長方法及び気相成長装置 |
KR100682879B1 (ko) | 2005-01-07 | 2007-02-15 | 삼성코닝 주식회사 | 결정 성장 방법 |
KR100682881B1 (ko) | 2005-01-19 | 2007-02-15 | 삼성코닝 주식회사 | 결정 성장 방법 |
US7646027B2 (en) | 2005-05-06 | 2010-01-12 | Showa Denko K.K. | Group III nitride semiconductor stacked structure |
KR100695118B1 (ko) * | 2005-12-27 | 2007-03-14 | 삼성코닝 주식회사 | 다중-프리스탠딩 GaN 웨이퍼의 제조방법 |
TWI334164B (en) * | 2006-06-07 | 2010-12-01 | Ind Tech Res Inst | Method of manufacturing nitride semiconductor substrate and composite material substrate |
JP2009123718A (ja) * | 2007-01-16 | 2009-06-04 | Showa Denko Kk | Iii族窒化物化合物半導体素子及びその製造方法、iii族窒化物化合物半導体発光素子及びその製造方法、並びにランプ |
JP4259591B2 (ja) * | 2007-01-16 | 2009-04-30 | 住友電気工業株式会社 | Iii族窒化物結晶の製造方法、iii族窒化物結晶基板およびiii族窒化物半導体デバイス |
KR100878512B1 (ko) * | 2007-05-14 | 2009-01-13 | 나이넥스 주식회사 | GaN 반도체 기판 제조 방법 |
US7928448B2 (en) | 2007-12-04 | 2011-04-19 | Philips Lumileds Lighting Company, Llc | III-nitride light emitting device including porous semiconductor layer |
JP5196403B2 (ja) * | 2009-03-23 | 2013-05-15 | 国立大学法人山口大学 | サファイア基板の製造方法、および半導体装置 |
JP5647497B2 (ja) * | 2010-02-10 | 2014-12-24 | ソウル バイオシス カンパニー リミテッドSeoul Viosys Co.,Ltd. | 半導体基板、その製造方法、半導体デバイス及びその製造方法 |
US8481411B2 (en) | 2009-06-10 | 2013-07-09 | Seoul Opto Device Co., Ltd. | Method of manufacturing a semiconductor substrate having a cavity |
KR101220433B1 (ko) * | 2009-06-10 | 2013-02-04 | 서울옵토디바이스주식회사 | 반도체 기판, 그 제조 방법, 반도체 소자 및 그 제조 방법 |
WO2011025149A2 (ko) * | 2009-08-26 | 2011-03-03 | 서울옵토디바이스주식회사 | 반도체 기판 제조 방법 및 발광 소자 제조 방법 |
JP5570838B2 (ja) * | 2010-02-10 | 2014-08-13 | ソウル バイオシス カンパニー リミテッド | 半導体基板、その製造方法、半導体デバイス及びその製造方法 |
JP5277270B2 (ja) | 2010-07-08 | 2013-08-28 | 学校法人立命館 | 結晶成長方法および半導体素子 |
CN102122691B (zh) * | 2011-01-18 | 2015-06-10 | 王楚雯 | Led外延片、led结构及led结构的形成方法 |
WO2012065536A1 (en) * | 2010-11-15 | 2012-05-24 | Chuwen Wang | Semiconductor structure and method for forming the same |
JP5603812B2 (ja) | 2011-03-11 | 2014-10-08 | スタンレー電気株式会社 | 半導体素子の製造方法 |
JP5612516B2 (ja) * | 2011-03-11 | 2014-10-22 | スタンレー電気株式会社 | 半導体素子の製造方法 |
CN103959439B (zh) | 2011-11-21 | 2017-08-01 | 圣戈班晶体及检测公司 | 半导体衬底以及形成方法 |
CN103456852B (zh) * | 2012-05-30 | 2016-09-07 | 比亚迪股份有限公司 | 一种led外延片及制备方法 |
CN102719615B (zh) * | 2012-06-26 | 2013-11-20 | 山西太钢不锈钢股份有限公司 | 一种原料纯铁用钢的冶炼方法 |
US8940616B2 (en) | 2012-07-27 | 2015-01-27 | Globalfoundries Singapore Pte. Ltd. | Bonding method using porosified surfaces for making stacked structures |
JP6144630B2 (ja) * | 2012-08-30 | 2017-06-07 | 日本碍子株式会社 | 複合基板の製造方法、13族元素窒化物からなる機能層の製造方法 |
JP5629870B2 (ja) * | 2012-10-26 | 2014-11-26 | 農工大ティー・エル・オー株式会社 | AlGaNの気相成長方法及びAlGaNの気相成長方法で製造されたAlGaN結晶の厚膜基板 |
CN103035585B (zh) * | 2012-12-12 | 2015-07-15 | 武汉铂岩科技有限公司 | 一种金属铝基氮化铝封装基板及其制备方法 |
US9012912B2 (en) | 2013-03-13 | 2015-04-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafers, panels, semiconductor devices, and glass treatment methods |
KR102122366B1 (ko) | 2013-06-14 | 2020-06-12 | 삼성전자주식회사 | 질화물 반도체 박막 제조방법 및 이를 이용한 질화물 반도체 소자 제조방법 |
KR20170033118A (ko) | 2015-09-16 | 2017-03-24 | 주식회사 루미스탈 | 표면 가공을 통해 휨을 제어하는 질화물 반도체 기판 제조 방법 |
KR101951902B1 (ko) | 2016-04-12 | 2019-02-26 | 주식회사 루미스탈 | 복수의 공극을 포함한 질화물 반도체 기판 및 그 제조 방법 |
JP7055595B2 (ja) * | 2017-03-29 | 2022-04-18 | 古河機械金属株式会社 | Iii族窒化物半導体基板、及び、iii族窒化物半導体基板の製造方法 |
KR101967716B1 (ko) | 2018-02-05 | 2019-04-10 | 주식회사 루미스탈 | 질화갈륨 웨이퍼의 제조방법 |
KR102517784B1 (ko) * | 2018-05-16 | 2023-04-04 | (주)포인트엔지니어링 | 마이크로 led 흡착체 |
CN115398044A (zh) * | 2020-04-14 | 2022-11-25 | 学校法人关西学院 | 半导体衬底的制造方法、半导体衬底以及抑制生长层裂纹产生的方法 |
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JPH02484A (ja) * | 1987-10-22 | 1990-01-05 | Merck & Co Inc | 突然変異体の酸性繊維芽細胞成長因子 |
JPH0412092A (ja) * | 1990-04-27 | 1992-01-16 | Sumitomo Electric Ind Ltd | 化合物半導体及びその成長方法 |
US5656832A (en) * | 1994-03-09 | 1997-08-12 | Kabushiki Kaisha Toshiba | Semiconductor heterojunction device with ALN buffer layer of 3nm-10nm average film thickness |
GB2317053A (en) * | 1996-09-06 | 1998-03-11 | Hewlett Packard Co | Nitride LED |
US5798537A (en) * | 1995-08-31 | 1998-08-25 | Kabushiki Kaisha Toshiba | Blue light-emitting device |
GB2338107A (en) * | 1998-06-05 | 1999-12-08 | Hewlett Packard Co | Buffer layers for semiconductor devices |
GB2344461A (en) * | 1998-12-02 | 2000-06-07 | Arima Optoelectronics Corp | Semiconductor light emitting devices |
CN1387231A (zh) * | 2001-05-21 | 2002-12-25 | 日本电气株式会社 | 基于氮化物的化合物半导体晶体衬底结构及其制造方法 |
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US3690227A (en) * | 1970-07-14 | 1972-09-12 | Lloyd G Welty | Frictional self-draining structure |
JPH0281484A (ja) | 1988-09-16 | 1990-03-22 | Toyoda Gosei Co Ltd | 窒化ガリウム系化合物半導体発光素子 |
MY118019A (en) * | 1998-02-18 | 2004-08-30 | Canon Kk | Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof |
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2002
- 2002-06-28 JP JP2002190270A patent/JP4088111B2/ja not_active Expired - Fee Related
-
2003
- 2003-06-26 KR KR1020047021383A patent/KR100680670B1/ko not_active IP Right Cessation
- 2003-06-26 US US10/519,152 patent/US7829913B2/en not_active Expired - Fee Related
- 2003-06-26 WO PCT/JP2003/008173 patent/WO2004003266A1/ja active Application Filing
- 2003-06-26 CN CNB038152967A patent/CN100341116C/zh not_active Expired - Fee Related
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JPH02484A (ja) * | 1987-10-22 | 1990-01-05 | Merck & Co Inc | 突然変異体の酸性繊維芽細胞成長因子 |
JPH0412092A (ja) * | 1990-04-27 | 1992-01-16 | Sumitomo Electric Ind Ltd | 化合物半導体及びその成長方法 |
US5656832A (en) * | 1994-03-09 | 1997-08-12 | Kabushiki Kaisha Toshiba | Semiconductor heterojunction device with ALN buffer layer of 3nm-10nm average film thickness |
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GB2317053A (en) * | 1996-09-06 | 1998-03-11 | Hewlett Packard Co | Nitride LED |
GB2338107A (en) * | 1998-06-05 | 1999-12-08 | Hewlett Packard Co | Buffer layers for semiconductor devices |
GB2344461A (en) * | 1998-12-02 | 2000-06-07 | Arima Optoelectronics Corp | Semiconductor light emitting devices |
CN1387231A (zh) * | 2001-05-21 | 2002-12-25 | 日本电气株式会社 | 基于氮化物的化合物半导体晶体衬底结构及其制造方法 |
Non-Patent Citations (1)
Title |
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Relaxation of anisotropic domain tilting along vertical growthdirection in selectively lateral overgrown GaN by hydridevapor phase epitaxy Kim et al,Journal of Crystal Growth,Vol.208 2000 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103187493A (zh) * | 2009-06-10 | 2013-07-03 | 首尔Opto仪器股份有限公司 | 制造发光二极管的方法 |
CN103187493B (zh) * | 2009-06-10 | 2015-09-30 | 首尔伟傲世有限公司 | 制造发光二极管的方法 |
US9425347B2 (en) | 2009-06-10 | 2016-08-23 | Seoul Viosys Co., Ltd. | Semiconductor substrate, semiconductor device, and manufacturing methods thereof |
US9773940B2 (en) | 2009-06-10 | 2017-09-26 | Seoul Viosys Co., Ltd. | Semiconductor substrate, semiconductor device, and manufacturing methods thereof |
US10128403B2 (en) | 2009-06-10 | 2018-11-13 | Seoul Viosys Co., Ltd. | Semiconductor substrate, semiconductor device, and manufacturing methods thereof |
Also Published As
Publication number | Publication date |
---|---|
CN1665969A (zh) | 2005-09-07 |
US7829913B2 (en) | 2010-11-09 |
US20060046511A1 (en) | 2006-03-02 |
JP2004035275A (ja) | 2004-02-05 |
KR100680670B1 (ko) | 2007-02-09 |
JP4088111B2 (ja) | 2008-05-21 |
KR20050030626A (ko) | 2005-03-30 |
WO2004003266A1 (ja) | 2004-01-08 |
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