CA2991933C - Integrated device package comprising bridge in litho-etchable layer - Google Patents
Integrated device package comprising bridge in litho-etchable layer Download PDFInfo
- Publication number
- CA2991933C CA2991933C CA2991933A CA2991933A CA2991933C CA 2991933 C CA2991933 C CA 2991933C CA 2991933 A CA2991933 A CA 2991933A CA 2991933 A CA2991933 A CA 2991933A CA 2991933 C CA2991933 C CA 2991933C
- Authority
- CA
- Canada
- Prior art keywords
- die
- integrated device
- device package
- bridge
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H10W70/611—
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- H10W20/20—
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- H10W70/618—
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- H10W72/20—
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- H10W72/30—
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- H10W90/00—
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- H10W90/401—
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- H10W99/00—
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- H10W70/63—
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- H10W70/635—
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- H10W70/685—
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- H10W72/072—
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- H10W72/073—
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- H10W72/252—
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- H10W74/117—
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- H10W74/15—
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- H10W90/724—
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- H10W90/734—
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Geometry (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/832,363 | 2015-08-21 | ||
| US14/832,363 US9368450B1 (en) | 2015-08-21 | 2015-08-21 | Integrated device package comprising bridge in litho-etchable layer |
| PCT/US2016/035895 WO2017034641A1 (en) | 2015-08-21 | 2016-06-03 | Integrated device package comprising bridge in litho-etchable layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2991933A1 CA2991933A1 (en) | 2017-03-02 |
| CA2991933C true CA2991933C (en) | 2024-05-21 |
Family
ID=56100638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2991933A Active CA2991933C (en) | 2015-08-21 | 2016-06-03 | Integrated device package comprising bridge in litho-etchable layer |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9368450B1 (enExample) |
| EP (1) | EP3338303B1 (enExample) |
| JP (1) | JP6748186B2 (enExample) |
| KR (1) | KR102541861B1 (enExample) |
| CN (1) | CN107924905B (enExample) |
| BR (1) | BR112018003233B1 (enExample) |
| CA (1) | CA2991933C (enExample) |
| WO (1) | WO2017034641A1 (enExample) |
Families Citing this family (84)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9583426B2 (en) | 2014-11-05 | 2017-02-28 | Invensas Corporation | Multi-layer substrates suitable for interconnection between circuit modules |
| US10283492B2 (en) | 2015-06-23 | 2019-05-07 | Invensas Corporation | Laminated interposers and packages with embedded trace interconnects |
| US10438881B2 (en) * | 2015-10-29 | 2019-10-08 | Marvell World Trade Ltd. | Packaging arrangements including high density interconnect bridge |
| US10163856B2 (en) * | 2015-10-30 | 2018-12-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Stacked integrated circuit structure and method of forming |
| US9852994B2 (en) * | 2015-12-14 | 2017-12-26 | Invensas Corporation | Embedded vialess bridges |
| WO2017171884A1 (en) * | 2016-04-02 | 2017-10-05 | Intel Corporation | Fine feature formation techniques for printed circuit boards |
| US20170287838A1 (en) | 2016-04-02 | 2017-10-05 | Intel Corporation | Electrical interconnect bridge |
| US11508662B2 (en) | 2016-09-30 | 2022-11-22 | Intel Corporation | Device and method of very high density routing used with embedded multi-die interconnect bridge |
| US11277922B2 (en) * | 2016-10-06 | 2022-03-15 | Advanced Micro Devices, Inc. | Circuit board with bridge chiplets |
| KR102666151B1 (ko) * | 2016-12-16 | 2024-05-17 | 삼성전자주식회사 | 반도체 패키지 |
| US11004824B2 (en) | 2016-12-22 | 2021-05-11 | Intel Corporation | Scalable embedded silicon bridge via pillars in lithographically defined vias, and methods of making same |
| US20180240778A1 (en) * | 2017-02-22 | 2018-08-23 | Intel Corporation | Embedded multi-die interconnect bridge with improved power delivery |
| US10468374B2 (en) | 2017-03-31 | 2019-11-05 | Intel Corporation | Die interconnect substrates, a semiconductor device and a method for forming a die interconnect substrate |
| WO2018182755A1 (en) * | 2017-04-01 | 2018-10-04 | Intel Corporation | Innovative way to design silicon to overcome reticle limit |
| US10593563B2 (en) * | 2017-04-13 | 2020-03-17 | Invensas Corporation | Fan-out wafer level package with resist vias |
| US10403599B2 (en) | 2017-04-27 | 2019-09-03 | Invensas Corporation | Embedded organic interposers for high bandwidth |
| US11233025B2 (en) * | 2017-05-31 | 2022-01-25 | Futurewei Technologies, Inc. | Merged power pad for improving integrated circuit power delivery |
| US10943869B2 (en) | 2017-06-09 | 2021-03-09 | Apple Inc. | High density interconnection using fanout interposer chiplet |
| US10727198B2 (en) * | 2017-06-30 | 2020-07-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor package and method manufacturing the same |
| US10373893B2 (en) * | 2017-06-30 | 2019-08-06 | Intel Corporation | Embedded bridge with through-silicon vias |
| US10622311B2 (en) * | 2017-08-10 | 2020-04-14 | International Business Machines Corporation | High-density interconnecting adhesive tape |
| KR102069659B1 (ko) | 2017-08-31 | 2020-01-23 | 해성디에스 주식회사 | 반도체 패키지 기판 제조방법 및 이를 이용하여 제조된 반도체 패키지 기판 |
| US10658281B2 (en) * | 2017-09-29 | 2020-05-19 | Intel Corporation | Integrated circuit substrate and method of making |
| US10867954B2 (en) | 2017-11-15 | 2020-12-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect chips |
| US10784202B2 (en) * | 2017-12-01 | 2020-09-22 | International Business Machines Corporation | High-density chip-to-chip interconnection with silicon bridge |
| US10651126B2 (en) * | 2017-12-08 | 2020-05-12 | Applied Materials, Inc. | Methods and apparatus for wafer-level die bridge |
| DE112017008336T5 (de) * | 2017-12-29 | 2020-09-17 | Intel Corporation | Mikroelektronische Anordnungen |
| US11508663B2 (en) * | 2018-02-02 | 2022-11-22 | Marvell Israel (M.I.S.L) Ltd. | PCB module on package |
| KR102101712B1 (ko) * | 2018-03-21 | 2020-04-21 | (주)심텍 | 브릿지 기판을 포함하는 인쇄회로기판 |
| US10742217B2 (en) | 2018-04-12 | 2020-08-11 | Apple Inc. | Systems and methods for implementing a scalable system |
| US11088123B1 (en) * | 2018-05-15 | 2021-08-10 | Marvell Israel (M.I.S.L) Ltd. | Package system having laterally offset and ovelapping chip packages |
| US20200020634A1 (en) * | 2018-07-16 | 2020-01-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Package and method of manufacturing the same |
| KR102560697B1 (ko) | 2018-07-31 | 2023-07-27 | 삼성전자주식회사 | 인터포저를 가지는 반도체 패키지 |
| CN110896066B (zh) * | 2018-09-13 | 2022-08-30 | 欣兴电子股份有限公司 | 具有内埋基板的线路载板及其制作方法与芯片封装结构 |
| US10937762B2 (en) * | 2018-10-04 | 2021-03-02 | iCometrue Company Ltd. | Logic drive based on multichip package using interconnection bridge |
| US10916494B2 (en) * | 2019-01-02 | 2021-02-09 | Qualcomm Incorporated | Device comprising first solder interconnects aligned in a first direction and second solder interconnects aligned in a second direction |
| CN115547846A (zh) * | 2019-02-21 | 2022-12-30 | 奥特斯科技(重庆)有限公司 | 部件承载件及其制造方法和电气装置 |
| US12205877B2 (en) | 2019-02-21 | 2025-01-21 | AT&S(Chongqing) Company Limited | Ultra-thin component carrier having high stiffness and method of manufacturing the same |
| US11164818B2 (en) | 2019-03-25 | 2021-11-02 | Intel Corporation | Inorganic-based embedded-die layers for modular semiconductive devices |
| TWI707408B (zh) | 2019-04-10 | 2020-10-11 | 力成科技股份有限公司 | 天線整合式封裝結構及其製造方法 |
| US10998262B2 (en) * | 2019-04-15 | 2021-05-04 | Intel Corporation | Stripped redistrubution-layer fabrication for package-top embedded multi-die interconnect bridge |
| WO2020250162A1 (en) | 2019-06-10 | 2020-12-17 | Marvell Israel (M.I.S.L) Ltd. | Ic package with top-side memory module |
| US12341129B2 (en) * | 2019-06-13 | 2025-06-24 | Intel Corporation | Substrateless double-sided embedded multi-die interconnect bridge |
| TW202111907A (zh) | 2019-09-05 | 2021-03-16 | 力成科技股份有限公司 | 以矽中介層作為互連橋的封裝晶片結構 |
| US11393759B2 (en) * | 2019-10-04 | 2022-07-19 | International Business Machines Corporation | Alignment carrier for interconnect bridge assembly |
| DE102020119181A1 (de) * | 2019-10-29 | 2021-04-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Halbleiterpackages und verfahren zu deren herstellung |
| US11164817B2 (en) * | 2019-11-01 | 2021-11-02 | International Business Machines Corporation | Multi-chip package structures with discrete redistribution layers |
| CN110911384A (zh) * | 2019-12-19 | 2020-03-24 | 中国电子科技集团公司第五十八研究所 | 一种嵌入式无源桥接芯片及其应用 |
| US12261124B2 (en) * | 2019-12-23 | 2025-03-25 | Intel Corporation | Embedded die architecture and method of making |
| US11309246B2 (en) * | 2020-02-05 | 2022-04-19 | Apple Inc. | High density 3D interconnect configuration |
| US11605594B2 (en) * | 2020-03-23 | 2023-03-14 | Qualcomm Incorporated | Package comprising a substrate and a high-density interconnect integrated device coupled to the substrate |
| US11302643B2 (en) | 2020-03-25 | 2022-04-12 | Intel Corporation | Microelectronic component having molded regions with through-mold vias |
| KR102854175B1 (ko) | 2020-07-31 | 2025-09-03 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
| CN112435981B (zh) * | 2020-09-30 | 2024-12-10 | 日月光半导体制造股份有限公司 | 半导体封装装置及其制造方法 |
| US12355000B2 (en) | 2020-11-10 | 2025-07-08 | Qualcomm Incorporated | Package comprising a substrate and a high-density interconnect integrated device |
| US12327797B2 (en) | 2020-12-16 | 2025-06-10 | Intel Corporation | Microelectronic structures including glass cores |
| CN112736031A (zh) * | 2020-12-23 | 2021-04-30 | 海光信息技术股份有限公司 | 转接板及其制作方法,半导体器件及其制作方法 |
| KR20220134721A (ko) | 2021-03-26 | 2022-10-05 | 삼성전자주식회사 | 반도체 패키지 |
| US12469811B2 (en) | 2021-03-26 | 2025-11-11 | Qualcomm Incorporated | Package comprising wire bonds coupled to integrated devices |
| US11791270B2 (en) * | 2021-05-10 | 2023-10-17 | International Business Machines Corporation | Direct bonded heterogeneous integration silicon bridge |
| KR20230001574A (ko) | 2021-06-28 | 2023-01-05 | 삼성전자주식회사 | 반도체 패키지 |
| US20230035627A1 (en) * | 2021-07-27 | 2023-02-02 | Qualcomm Incorporated | Split die integrated circuit (ic) packages employing die-to-die (d2d) connections in die-substrate standoff cavity, and related fabrication methods |
| CN114050145A (zh) * | 2021-10-25 | 2022-02-15 | 日月光半导体制造股份有限公司 | 半导体封装结构及其制造方法 |
| US20230130354A1 (en) * | 2021-10-27 | 2023-04-27 | Advanced Micro Devices, Inc. | Three-dimensional semiconductor package having a stacked passive device |
| JP2024537478A (ja) * | 2021-11-05 | 2024-10-10 | アデイア セミコンダクター ボンディング テクノロジーズ インコーポレイテッド | マルチチャンネル型デバイス積層化 |
| US11848273B2 (en) | 2021-11-17 | 2023-12-19 | International Business Machines Corporation | Bridge chip with through via |
| CN114284242A (zh) * | 2021-11-30 | 2022-04-05 | 日月光半导体制造股份有限公司 | 半导体封装装置及其制造方法 |
| KR20230089156A (ko) * | 2021-12-13 | 2023-06-20 | 삼성전기주식회사 | 브리지를 포함하는 기판 및 전자 장치 |
| CN114203691B (zh) * | 2021-12-14 | 2025-09-02 | 华进半导体封装先导技术研发中心有限公司 | 一种多芯片高密度互连封装结构及其制作方法 |
| US12424560B2 (en) * | 2021-12-14 | 2025-09-23 | Advanced Micro Devices, Inc. | Semiconductor chip device |
| US20230317618A1 (en) * | 2022-03-29 | 2023-10-05 | Intel Corporation | Glass bridge for connecting dies |
| US12463178B2 (en) * | 2022-07-03 | 2025-11-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor die assembly having a polygonal linking die |
| KR102898555B1 (ko) * | 2022-07-05 | 2025-12-09 | 한병준 | 브릿지를 이용한 팬아웃 패키징 소자 및 브릿지를 이용한 팬아웃 패키징 소자의 제조방법 |
| CN115312497A (zh) * | 2022-07-20 | 2022-11-08 | 南通越亚半导体有限公司 | 多芯片互连封装结构及其制作方法 |
| US20240063094A1 (en) * | 2022-08-19 | 2024-02-22 | Micron Technology, Inc. | Semiconductor device assemblies with a cavity exposing through-silicon vias for controller attachment |
| CN115547843A (zh) * | 2022-09-28 | 2022-12-30 | 上海为旌科技有限公司 | 高密度互连转接板、封装结构及其制作方法 |
| CN117995806A (zh) * | 2022-10-31 | 2024-05-07 | 奥特斯奥地利科技与系统技术有限公司 | 封装件和制造封装件的方法 |
| US20240282729A1 (en) * | 2023-02-20 | 2024-08-22 | Qualcomm Incorporated | Package dies including vertical interconnects for signal and power distribution in a three-dimensional (3d) integrated circuit (ic) package |
| CN116504651A (zh) * | 2023-03-28 | 2023-07-28 | 华天科技(昆山)电子有限公司 | 硅桥嵌入三维互联封装结构的制造方法及其结构 |
| WO2024210478A1 (ko) * | 2023-04-04 | 2024-10-10 | 하나 마이크론(주) | 반도체 패키지 및 그 제조방법 |
| KR102898567B1 (ko) * | 2023-09-25 | 2025-12-09 | 실리콘박스 피티이 엘티디 | 반도체 패키지용 인터커넥션 모듈 기판과 이를 포함하는 반도체 패키지 소자 및 이들의 제조 방법 |
| JP2025088548A (ja) * | 2023-11-30 | 2025-06-11 | Rapidus株式会社 | 電子装置 |
| JP2025088549A (ja) * | 2023-11-30 | 2025-06-11 | Rapidus株式会社 | 電子装置 |
| WO2025262765A1 (ja) * | 2024-06-17 | 2025-12-26 | Astemo株式会社 | 半導体装置の製造方法、半導体装置 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4581768B2 (ja) | 2005-03-16 | 2010-11-17 | ソニー株式会社 | 半導体装置の製造方法 |
| US8064224B2 (en) * | 2008-03-31 | 2011-11-22 | Intel Corporation | Microelectronic package containing silicon patches for high density interconnects, and method of manufacturing same |
| KR101479506B1 (ko) | 2008-06-30 | 2015-01-07 | 삼성전자주식회사 | 임베디드 배선 기판, 이를 포함하는 반도체 패키지 및 그제조 방법 |
| US7969009B2 (en) | 2008-06-30 | 2011-06-28 | Qualcomm Incorporated | Through silicon via bridge interconnect |
| US8227904B2 (en) * | 2009-06-24 | 2012-07-24 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
| CN102742367B (zh) * | 2010-07-23 | 2015-04-22 | 欣兴电子股份有限公司 | 线路板及其制造方法 |
| US8097490B1 (en) | 2010-08-27 | 2012-01-17 | Stats Chippac, Ltd. | Semiconductor device and method of forming stepped interconnect layer for stacked semiconductor die |
| US8288209B1 (en) * | 2011-06-03 | 2012-10-16 | Stats Chippac, Ltd. | Semiconductor device and method of using leadframe bodies to form openings through encapsulant for vertical interconnect of semiconductor die |
| TWI476888B (zh) * | 2011-10-31 | 2015-03-11 | 欣興電子股份有限公司 | 嵌埋穿孔中介層之封裝基板及其製法 |
| TWI528876B (zh) * | 2012-03-22 | 2016-04-01 | 矽品精密工業股份有限公司 | 中介板及其電性測試方法 |
| US8653626B2 (en) * | 2012-07-18 | 2014-02-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package structures including a capacitor and methods of forming the same |
| US8872349B2 (en) * | 2012-09-11 | 2014-10-28 | Intel Corporation | Bridge interconnect with air gap in package assembly |
| US8866287B2 (en) * | 2012-09-29 | 2014-10-21 | Intel Corporation | Embedded structures for package-on-package architecture |
| US9190380B2 (en) * | 2012-12-06 | 2015-11-17 | Intel Corporation | High density substrate routing in BBUL package |
| US8901748B2 (en) * | 2013-03-14 | 2014-12-02 | Intel Corporation | Direct external interconnect for embedded interconnect bridge package |
| US9119313B2 (en) | 2013-04-25 | 2015-08-25 | Intel Corporation | Package substrate with high density interconnect design to capture conductive features on embedded die |
| JP2014236188A (ja) * | 2013-06-05 | 2014-12-15 | イビデン株式会社 | 配線板及びその製造方法 |
| US9147638B2 (en) * | 2013-07-25 | 2015-09-29 | Intel Corporation | Interconnect structures for embedded bridge |
| US9508636B2 (en) * | 2013-10-16 | 2016-11-29 | Intel Corporation | Integrated circuit package substrate |
| US9642259B2 (en) * | 2013-10-30 | 2017-05-02 | Qualcomm Incorporated | Embedded bridge structure in a substrate |
| KR101815489B1 (ko) * | 2014-02-26 | 2018-01-05 | 인텔 코포레이션 | 스루 브리지 도전성 비아 신호 접속에 의한 임베딩된 멀티디바이스 브리지 |
-
2015
- 2015-08-21 US US14/832,363 patent/US9368450B1/en active Active
-
2016
- 2016-06-03 JP JP2018506962A patent/JP6748186B2/ja active Active
- 2016-06-03 WO PCT/US2016/035895 patent/WO2017034641A1/en not_active Ceased
- 2016-06-03 BR BR112018003233-6A patent/BR112018003233B1/pt active IP Right Grant
- 2016-06-03 EP EP16730956.6A patent/EP3338303B1/en active Active
- 2016-06-03 CA CA2991933A patent/CA2991933C/en active Active
- 2016-06-03 KR KR1020187004859A patent/KR102541861B1/ko active Active
- 2016-06-03 CN CN201680047813.3A patent/CN107924905B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3338303B1 (en) | 2022-04-20 |
| WO2017034641A1 (en) | 2017-03-02 |
| US9368450B1 (en) | 2016-06-14 |
| KR20180044905A (ko) | 2018-05-03 |
| CA2991933A1 (en) | 2017-03-02 |
| KR102541861B1 (ko) | 2023-06-08 |
| CN107924905B (zh) | 2020-10-30 |
| EP3338303A1 (en) | 2018-06-27 |
| JP2018523925A (ja) | 2018-08-23 |
| CN107924905A (zh) | 2018-04-17 |
| JP6748186B2 (ja) | 2020-08-26 |
| BR112018003233A2 (en) | 2018-09-25 |
| BR112018003233B1 (pt) | 2023-01-31 |
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