CA2633667C - Radiation image conversion panel, scintillator panel, and radiation image sensor - Google Patents
Radiation image conversion panel, scintillator panel, and radiation image sensor Download PDFInfo
- Publication number
- CA2633667C CA2633667C CA2633667A CA2633667A CA2633667C CA 2633667 C CA2633667 C CA 2633667C CA 2633667 A CA2633667 A CA 2633667A CA 2633667 A CA2633667 A CA 2633667A CA 2633667 C CA2633667 C CA 2633667C
- Authority
- CA
- Canada
- Prior art keywords
- oxide layer
- film
- aluminum oxide
- scintillator
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000005855 radiation Effects 0.000 title claims abstract description 105
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 107
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 105
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 104
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 98
- 229910052751 metal Inorganic materials 0.000 claims abstract description 96
- 239000002184 metal Substances 0.000 claims abstract description 95
- 230000001681 protective effect Effects 0.000 claims abstract description 64
- 238000001579 optical reflectometry Methods 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 21
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 21
- 230000002787 reinforcement Effects 0.000 claims description 13
- 229910052681 coesite Inorganic materials 0.000 claims description 11
- 229910052906 cristobalite Inorganic materials 0.000 claims description 11
- 229910052682 stishovite Inorganic materials 0.000 claims description 11
- 229910052905 tridymite Inorganic materials 0.000 claims description 11
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims description 9
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- -1 stimulable phosphor Chemical compound 0.000 description 12
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 10
- 229910052786 argon Inorganic materials 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 238000000992 sputter etching Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- NJXPYZHXZZCTNI-UHFFFAOYSA-N 3-aminobenzonitrile Chemical compound NC1=CC=CC(C#N)=C1 NJXPYZHXZZCTNI-UHFFFAOYSA-N 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229920002396 Polyurea Polymers 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000010000 carbonizing Methods 0.000 description 1
- 238000001444 catalytic combustion detection Methods 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 210000002777 columnar cell Anatomy 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Inorganic materials [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 125000006839 xylylene group Chemical group 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/29—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to radiation having very short wavelengths, e.g. X-rays, gamma-rays or corpuscular radiation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Conversion Of X-Rays Into Visible Images (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/812,233 US7468514B1 (en) | 2007-06-15 | 2007-06-15 | Radiation image conversion panel, scintillator panel, and radiation image sensor |
| US11/812,233 | 2007-06-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2633667A1 CA2633667A1 (en) | 2008-12-15 |
| CA2633667C true CA2633667C (en) | 2012-03-13 |
Family
ID=40131434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2633667A Active CA2633667C (en) | 2007-06-15 | 2008-06-05 | Radiation image conversion panel, scintillator panel, and radiation image sensor |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7468514B1 (enExample) |
| JP (1) | JP4317251B2 (enExample) |
| KR (3) | KR101042065B1 (enExample) |
| CN (2) | CN101324671B (enExample) |
| CA (1) | CA2633667C (enExample) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1645671B2 (de) * | 2004-10-08 | 2019-10-23 | SGL Carbon SE | Polymergebundene fasergelege |
| CN101604118B (zh) * | 2008-12-31 | 2012-07-04 | 中国工程物理研究院流体物理研究所 | 一种将高能x射线图像转换为可见光图像的装置 |
| JPWO2010103917A1 (ja) | 2009-03-13 | 2012-09-13 | コニカミノルタエムジー株式会社 | 放射線検出装置 |
| US8957380B2 (en) * | 2009-06-30 | 2015-02-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Infrared attenuating or blocking layer in optical proximity sensor |
| JP5577644B2 (ja) * | 2009-08-05 | 2014-08-27 | コニカミノルタ株式会社 | 放射線画像検出装置およびその製造方法 |
| JP2011137665A (ja) * | 2009-12-26 | 2011-07-14 | Canon Inc | シンチレータパネル及び放射線撮像装置とその製造方法、ならびに放射線撮像システム |
| GB2477346B (en) * | 2010-02-01 | 2016-03-23 | Scintacor Ltd | Scintillator assembly for use in digital x-ray imaging |
| WO2012016198A2 (en) | 2010-07-30 | 2012-02-02 | Pulsetor, Llc | Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and x-ray detector employing same |
| JP6215202B2 (ja) * | 2011-08-05 | 2017-10-18 | パルセータ, エルエルシーPulsetor, Llc | 密接に結合したシンチレータ−光電子増倍管の１又は複数の組合体を含む電子検出器及びそれを使用した電子顕微鏡 |
| US8829454B2 (en) | 2012-02-27 | 2014-09-09 | Analog Devices, Inc. | Compact sensor module |
| JP5922518B2 (ja) * | 2012-07-20 | 2016-05-24 | 浜松ホトニクス株式会社 | シンチレータパネル及び放射線検出器 |
| US9116022B2 (en) | 2012-12-07 | 2015-08-25 | Analog Devices, Inc. | Compact sensor module |
| KR101455382B1 (ko) * | 2012-12-26 | 2014-10-27 | 한국전기연구원 | 휘진성 형광체를 이용한 하이브리드 엑스-선 검출 장치 |
| JP6739423B2 (ja) | 2014-09-25 | 2020-08-12 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 光を発生させるセラミック材料 |
| KR101601530B1 (ko) * | 2014-11-06 | 2016-03-09 | 현대자동차주식회사 | 전파 투과형 다층 광학막 |
| CN109121430A (zh) * | 2015-03-20 | 2019-01-01 | 万睿视影像有限公司 | 闪烁体 |
| WO2016167334A1 (ja) * | 2015-04-16 | 2016-10-20 | 三菱化学株式会社 | 放射線像変換スクリーン、フラットパネルディテクタ、放射線検出装置、及びシンチレータ |
| US10074624B2 (en) | 2015-08-07 | 2018-09-11 | Analog Devices, Inc. | Bond pads with differently sized openings |
| JP6504997B2 (ja) * | 2015-11-05 | 2019-04-24 | 浜松ホトニクス株式会社 | 放射線像変換パネル、放射線像変換パネルの製造方法、放射線イメージセンサ及び放射線イメージセンサの製造方法 |
| JP6676372B2 (ja) * | 2015-12-28 | 2020-04-08 | 株式会社Ｓ−Ｎａｎｏｔｅｃｈ Ｃｏ−Ｃｒｅａｔｉｏｎ | シンチレータ及び電子検出器 |
| JP6499381B2 (ja) | 2016-06-16 | 2019-04-10 | 日本碍子株式会社 | 蛍光体素子および照明装置 |
| JP6534497B2 (ja) * | 2017-03-22 | 2019-06-26 | 富士フイルム株式会社 | 放射線検出器及び放射線画像撮影装置 |
| JP6707130B2 (ja) * | 2017-03-22 | 2020-06-10 | 富士フイルム株式会社 | 放射線検出器及び放射線画像撮影装置 |
| US11056455B2 (en) | 2017-08-01 | 2021-07-06 | Analog Devices, Inc. | Negative fillet for mounting an integrated device die to a carrier |
| JP6433561B1 (ja) * | 2017-09-27 | 2018-12-05 | 浜松ホトニクス株式会社 | シンチレータパネル及び放射線検出器 |
| JP6433560B1 (ja) | 2017-09-27 | 2018-12-05 | 浜松ホトニクス株式会社 | シンチレータパネル及び放射線検出器 |
| WO2020118031A1 (en) | 2018-12-06 | 2020-06-11 | Analog Devices, Inc. | Integrated device packages with passive device assemblies |
| US12002838B2 (en) | 2018-12-06 | 2024-06-04 | Analog Devices, Inc. | Shielded integrated device packages |
| JP7057299B2 (ja) | 2019-02-21 | 2022-04-19 | ニチバン株式会社 | 伸縮性パッドを用いた医療用貼付材 |
| JP2021032817A (ja) * | 2019-08-28 | 2021-03-01 | キヤノン電子管デバイス株式会社 | シンチレータパネル、および放射線検出器 |
| US11664340B2 (en) | 2020-07-13 | 2023-05-30 | Analog Devices, Inc. | Negative fillet for mounting an integrated device die to a carrier |
| CN115107135A (zh) * | 2021-03-22 | 2022-09-27 | 云南传承木业有限公司 | 一种无醛强化木地板的制作方法 |
Family Cites Families (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5689702A (en) | 1979-12-21 | 1981-07-21 | Sumitomo Electric Ind Ltd | Laser beam reflecting mirror |
| JPS5889702A (ja) | 1981-11-20 | 1983-05-28 | 松下電器産業株式会社 | 導電性ペ−スト |
| JPS6173901A (ja) | 1984-09-19 | 1986-04-16 | Fujitsu Ltd | 赤外線検知装置用金属鏡の製造方法 |
| DE3578359D1 (de) | 1984-12-17 | 1990-07-26 | Konishiroku Photo Ind | Schirm zum speichern eines strahlungsbildes. |
| US4873708A (en) | 1987-05-11 | 1989-10-10 | General Electric Company | Digital radiographic imaging system and method therefor |
| JP2677818B2 (ja) | 1987-08-17 | 1997-11-17 | コニカ株式会社 | 放射線画像変換パネル |
| JPH04118599A (ja) | 1990-09-10 | 1992-04-20 | Fujitsu Ltd | Ｘ線画像変換シートおよびそのシートを用いる装置 |
| US5949848A (en) | 1996-07-19 | 1999-09-07 | Varian Assocaites, Inc. | X-ray imaging apparatus and method using a flat amorphous silicon imaging panel |
| DE69926769T2 (de) | 1998-06-18 | 2006-06-29 | Hamamatsu Photonics K.K., Hamamatsu | Szintillatorpanel, strahlungsbildsensor und verfahren zu deren herstellung |
| AU4168499A (en) | 1998-06-18 | 2000-01-05 | Hamamatsu Photonics K.K. | Scintillator panel, radiation image sensor, and method for manufacturing the same |
| US7034306B2 (en) | 1998-06-18 | 2006-04-25 | Hamamatsu Photonics K.K. | Scintillator panel and radiation image sensor |
| EP1505410B1 (en) * | 1998-06-18 | 2012-05-09 | Hamamatsu Photonics K.K. | Scintillator panel and radiation image sensor |
| KR100697493B1 (ko) | 1998-06-18 | 2007-03-20 | 하마마츠 포토닉스 가부시키가이샤 | 신틸레이터 패널 |
| DE69937125T2 (de) | 1999-04-09 | 2008-06-19 | Hamamatsu Photonics K.K., Hamamatsu | Szintillatorplatte und strahlungsbildsensor |
| AU3678300A (en) | 1999-04-16 | 2000-11-02 | Hamamatsu Photonics K.K. | Scintillator panel and radiation image sensor |
| JP3126715B2 (ja) * | 1999-04-16 | 2001-01-22 | 浜松ホトニクス株式会社 | シンチレータパネル及び放射線イメージセンサ |
| JP5031172B2 (ja) | 2000-09-11 | 2012-09-19 | 浜松ホトニクス株式会社 | シンチレータパネル、放射線イメージセンサおよびそれらの製造方法 |
| US7087908B2 (en) | 2000-09-11 | 2006-08-08 | Hamamatsu Photonics K.K. | Scintillator panel, radiation image sensor and methods of producing them |
| DE20021657U1 (de) | 2000-12-20 | 2002-05-02 | Alanod Aluminium Veredlung Gmb | Abdeckteil für eine Lichtquelle |
| DE20021660U1 (de) | 2000-12-20 | 2002-05-02 | Alanod Aluminium Veredlung Gmb | Verbundmaterial |
| EP1365261B1 (en) * | 2001-01-30 | 2016-12-14 | Hamamatsu Photonics K. K. | Scintillator panel and radiation image sensor |
| US6835936B2 (en) | 2001-02-07 | 2004-12-28 | Canon Kabushiki Kaisha | Scintillator panel, method of manufacturing scintillator panel, radiation detection device, and radiation detection system |
| US6652996B2 (en) | 2002-01-31 | 2003-11-25 | Eastman Kodak Company | Radiographic phosphor panel having improved speed and sharpness |
| JP2003262700A (ja) * | 2002-03-08 | 2003-09-19 | Konica Corp | 放射線画像変換パネル及び放射線画像変換パネルの作製方法 |
| JP4118599B2 (ja) | 2002-05-20 | 2008-07-16 | 三菱電機株式会社 | ダイバーシチ受信機および受信方法 |
| US7618511B2 (en) | 2003-03-07 | 2009-11-17 | Hamamatsu Photonics K.K. | Scintillator panel and method of manufacturing radiation image sensor |
| JP2004294137A (ja) * | 2003-03-26 | 2004-10-21 | Konica Minolta Holdings Inc | 放射線像変換パネル及びその製造方法 |
| JP2004325126A (ja) * | 2003-04-22 | 2004-11-18 | Canon Inc | 放射線検出装置 |
| JP3848288B2 (ja) * | 2003-04-25 | 2006-11-22 | キヤノン株式会社 | 放射線画像撮影装置 |
| JP2005029895A (ja) | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | 蒸着装置 |
| JP2005091221A (ja) | 2003-09-18 | 2005-04-07 | Fuji Photo Film Co Ltd | 放射線像変換器 |
| JP2005172511A (ja) * | 2003-12-09 | 2005-06-30 | Canon Inc | 放射線検出装置、その製造方法、および放射線撮像システム |
| JP2005181220A (ja) | 2003-12-22 | 2005-07-07 | Fuji Photo Film Co Ltd | 放射線像変換パネル |
| JP4594188B2 (ja) * | 2004-08-10 | 2010-12-08 | キヤノン株式会社 | 放射線検出装置及び放射線検出システム |
| JP2006119124A (ja) | 2004-09-22 | 2006-05-11 | Fuji Photo Film Co Ltd | 放射線像変換パネルおよびその製造方法 |
| US20060060792A1 (en) | 2004-09-22 | 2006-03-23 | Fuji Photo Film Co., Ltd. | Radiographic image conversion panel and method of manufacturing the same |
| JP2006113007A (ja) | 2004-10-18 | 2006-04-27 | Konica Minolta Medical & Graphic Inc | 放射線画像変換パネル |
| WO2006049183A1 (ja) * | 2004-11-01 | 2006-05-11 | Mach Technology Co., Ltd. | 放射線画像撮像装置 |
| JP2006189377A (ja) * | 2005-01-07 | 2006-07-20 | Canon Inc | シンチレータパネル、放射線検出装置、及び放射線検出システム |
| JP2006220439A (ja) * | 2005-02-08 | 2006-08-24 | Canon Inc | シンチレータパネル、放射線検出装置及びその製造方法 |
| JP2006267013A (ja) * | 2005-03-25 | 2006-10-05 | Fuji Photo Film Co Ltd | 輝尽性蛍光体パネル及び輝尽性蛍光体パネルの製造方法 |
| JP2007040836A (ja) * | 2005-08-03 | 2007-02-15 | Fujifilm Corp | 放射線像変換パネル |
| RU2298813C1 (ru) | 2005-12-26 | 2007-05-10 | Федеральное государственное унитарное предприятие "Научно-исследовательский институт импульсной техники" (ФГУП НИИИТ) | Волоконно-оптическое устройство для визуализации распределения плотности потока импульсного ионизирующего излучения |
| KR100745991B1 (ko) | 2006-08-11 | 2007-08-06 | 삼성전자주식회사 | 이미지 센서 및 그 제조 방법 |
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2007
- 2007-06-15 US US11/812,233 patent/US7468514B1/en active Active
- 2007-12-19 JP JP2007327665A patent/JP4317251B2/ja active Active
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2008
- 2008-06-05 CA CA2633667A patent/CA2633667C/en active Active
- 2008-06-12 KR KR1020080055234A patent/KR101042065B1/ko active Active
- 2008-06-16 CN CN2008101099979A patent/CN101324671B/zh active Active
- 2008-06-16 CN CN201210285454.9A patent/CN102819032B/zh active Active
- 2008-11-10 US US12/268,080 patent/US7812315B2/en active Active
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2011
- 2011-02-07 KR KR1020110010623A patent/KR101294870B1/ko active Active
-
2012
- 2012-05-23 KR KR1020120054990A patent/KR101294880B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US7812315B2 (en) | 2010-10-12 |
| KR101294880B1 (ko) | 2013-08-08 |
| JP2008309770A (ja) | 2008-12-25 |
| CN101324671A (zh) | 2008-12-17 |
| US7468514B1 (en) | 2008-12-23 |
| KR20110031442A (ko) | 2011-03-28 |
| JP4317251B2 (ja) | 2009-08-19 |
| CN102819032A (zh) | 2012-12-12 |
| US20090072160A1 (en) | 2009-03-19 |
| CN101324671B (zh) | 2012-10-03 |
| KR20120081045A (ko) | 2012-07-18 |
| CA2633667A1 (en) | 2008-12-15 |
| CN102819032B (zh) | 2015-11-25 |
| US20080308736A1 (en) | 2008-12-18 |
| KR101294870B1 (ko) | 2013-08-08 |
| KR101042065B1 (ko) | 2011-06-16 |
| KR20080110507A (ko) | 2008-12-18 |
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