CA2632233A1 - Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making - Google Patents

Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making Download PDF

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Publication number
CA2632233A1
CA2632233A1 CA002632233A CA2632233A CA2632233A1 CA 2632233 A1 CA2632233 A1 CA 2632233A1 CA 002632233 A CA002632233 A CA 002632233A CA 2632233 A CA2632233 A CA 2632233A CA 2632233 A1 CA2632233 A1 CA 2632233A1
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CA
Canada
Prior art keywords
layer
conductivity type
channel
source
semiconductor material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002632233A
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English (en)
French (fr)
Inventor
Joseph Neil Merrett
Igor Sankin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Power Integrations Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2632233A1 publication Critical patent/CA2632233A1/en
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/80—Heterojunction BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/01—Manufacture or treatment
    • H10D12/031—Manufacture or treatment of IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/40—Vertical BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes
    • H10D30/83—FETs having PN junction gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325—Silicon carbide

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Bipolar Transistors (AREA)
CA002632233A 2005-12-05 2006-12-04 Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making Abandoned CA2632233A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/293,261 US7314799B2 (en) 2005-12-05 2005-12-05 Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making
US11/293,261 2005-12-05
PCT/US2006/046180 WO2007067458A1 (en) 2005-12-05 2006-12-04 Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making

Publications (1)

Publication Number Publication Date
CA2632233A1 true CA2632233A1 (en) 2007-06-14

Family

ID=37897286

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002632233A Abandoned CA2632233A1 (en) 2005-12-05 2006-12-04 Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making

Country Status (9)

Country Link
US (3) US7314799B2 (https=)
EP (1) EP1969617B1 (https=)
JP (1) JP5424192B2 (https=)
KR (1) KR101318041B1 (https=)
CN (2) CN102751320B (https=)
AU (1) AU2006322108B2 (https=)
CA (1) CA2632233A1 (https=)
NZ (1) NZ568487A (https=)
WO (1) WO2007067458A1 (https=)

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US7553718B2 (en) * 2005-01-28 2009-06-30 Texas Instruments Incorporated Methods, systems and structures for forming semiconductor structures incorporating high-temperature processing steps
US7314799B2 (en) 2005-12-05 2008-01-01 Semisouth Laboratories, Inc. Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making
US7648898B2 (en) * 2008-02-19 2010-01-19 Dsm Solutions, Inc. Method to fabricate gate electrodes
JP5324157B2 (ja) * 2008-08-04 2013-10-23 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
CN101901767B (zh) * 2009-05-26 2011-12-14 上海华虹Nec电子有限公司 获得垂直型沟道高压超级结半导体器件的方法
KR20120032531A (ko) * 2009-06-19 2012-04-05 에스에스 에스시 아이피, 엘엘시 이온주입 없이 ｖｊｆｅｔ와 ｂｊｔ를 제조하는 방법 및 그 장치
JP2011119512A (ja) * 2009-12-04 2011-06-16 Denso Corp 半導体装置およびその製造方法
US8969912B2 (en) 2011-08-04 2015-03-03 Avogy, Inc. Method and system for a GaN vertical JFET utilizing a regrown channel
US9184305B2 (en) * 2011-08-04 2015-11-10 Avogy, Inc. Method and system for a GAN vertical JFET utilizing a regrown gate
US8716078B2 (en) * 2012-05-10 2014-05-06 Avogy, Inc. Method and system for a gallium nitride vertical JFET with self-aligned gate metallization
JP6138619B2 (ja) * 2013-07-30 2017-05-31 ルネサスエレクトロニクス株式会社 半導体装置の製造方法および半導体装置
JP2016032014A (ja) * 2014-07-29 2016-03-07 日本電信電話株式会社 窒化物半導体装置の製造方法
CN105070767B (zh) * 2015-08-05 2018-04-20 西安电子科技大学 一种基于碳基复合电极的高温SiC JFET器件
CN105097456B (zh) * 2015-08-24 2018-09-11 泰科天润半导体科技（北京）有限公司 一种用于碳化硅器件的自对准方法
WO2017058589A1 (en) * 2015-09-30 2017-04-06 Tokyo Electron Limited Method for patterning a substrate using extreme ultraviolet lithography
CN107681001B (zh) * 2017-07-24 2020-04-07 中国电子科技集团公司第五十五研究所 一种碳化硅开关器件及制作方法
CN116544282B (zh) * 2023-07-06 2024-04-09 深圳平创半导体有限公司 碳化硅结型栅双极型晶体管器件及其制作方法

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US4587712A (en) 1981-11-23 1986-05-13 General Electric Company Method for making vertical channel field controlled device employing a recessed gate structure
US4945394A (en) * 1987-10-26 1990-07-31 North Carolina State University Bipolar junction transistor on silicon carbide
JP3214868B2 (ja) 1991-07-19 2001-10-02 ローム株式会社 ヘテロ接合バイポーラトランジスタの製造方法
US5286996A (en) * 1991-12-31 1994-02-15 Purdue Research Foundation Triple self-aligned bipolar junction transistor
US5350669A (en) * 1994-01-19 1994-09-27 Minnesota Mining And Manufacturing Company Silver-carboxylate/1,2-diazine compounds as silver sources in photothermographic and thermographic elements
US5481126A (en) * 1994-09-27 1996-01-02 Purdue Research Foundation Semiconductor-on-insulator electronic devices having trench isolated monocrystalline active regions
JPH08306700A (ja) 1995-04-27 1996-11-22 Nec Corp 半導体装置及びその製造方法
JPH09172187A (ja) * 1995-12-19 1997-06-30 Hitachi Ltd 接合型電界効果半導体装置およびその製造方法
US5859447A (en) 1997-05-09 1999-01-12 Yang; Edward S. Heterojunction bipolar transistor having heterostructure ballasting emitter
EP1710842B1 (en) 1999-03-15 2008-11-12 Matsushita Electric Industrial Co., Ltd. Method for fabricating a bipolar transistor and a MISFET semiconductor device
GB9928285D0 (en) * 1999-11-30 2000-01-26 Koninkl Philips Electronics Nv Manufacture of trench-gate semiconductor devices
EP1128429A1 (de) 2000-02-22 2001-08-29 Infineon Technologies AG Verfahren zur Herstellung von bipolaren Transistoren im BiCMOS-Verfahren
US6861324B2 (en) 2001-06-15 2005-03-01 Maxim Integrated Products, Inc. Method of forming a super self-aligned hetero-junction bipolar transistor
AU2002367561A1 (en) * 2001-07-12 2003-09-16 Mississippi State University Self-aligned transistor and diode topologies
JP4288907B2 (ja) * 2001-08-29 2009-07-01 株式会社デンソー 炭化珪素半導体装置及びその製造方法
JP2003069039A (ja) * 2001-08-29 2003-03-07 Denso Corp 炭化珪素半導体装置およびその製造方法
JP4060580B2 (ja) 2001-11-29 2008-03-12 株式会社ルネサステクノロジ ヘテロ接合バイポーラトランジスタ
JP4110875B2 (ja) 2002-08-09 2008-07-02 株式会社デンソー 炭化珪素半導体装置
JP2004134547A (ja) * 2002-10-10 2004-04-30 Hitachi Ltd 半導体装置
JP4489446B2 (ja) * 2004-01-21 2010-06-23 独立行政法人科学技術振興機構 ガリウム含有窒化物単結晶の製造方法
SE527205C2 (sv) 2004-04-14 2006-01-17 Denso Corp Förfarande för tillverkning av halvledaranordning med kanal i halvledarsubstrat av kiselkarbid
US7314799B2 (en) 2005-12-05 2008-01-01 Semisouth Laboratories, Inc. Self-aligned trench field effect transistors with regrown gates and bipolar junction transistors with regrown base contact regions and methods of making

Also Published As

Publication number Publication date
JP5424192B2 (ja) 2014-02-26
KR101318041B1 (ko) 2013-10-14
CN102751320A (zh) 2012-10-24
KR20080075025A (ko) 2008-08-13
CN102751320B (zh) 2015-05-13
EP1969617B1 (en) 2015-02-25
NZ568487A (en) 2011-07-29
US20070275527A1 (en) 2007-11-29
US20080061362A1 (en) 2008-03-13
US20120305994A1 (en) 2012-12-06
US7314799B2 (en) 2008-01-01
CN101341579B (zh) 2012-03-21
AU2006322108A1 (en) 2007-06-14
CN101341579A (zh) 2009-01-07
WO2007067458A1 (en) 2007-06-14
AU2006322108B2 (en) 2011-04-14
JP2009518862A (ja) 2009-05-07
US8729628B2 (en) 2014-05-20
EP1969617A1 (en) 2008-09-17

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Effective date: 20150423