CA2340192A1 - Micromachined members coupled for relative rotation by torsional flexure hinges - Google Patents
Micromachined members coupled for relative rotation by torsional flexure hinges Download PDFInfo
- Publication number
- CA2340192A1 CA2340192A1 CA002340192A CA2340192A CA2340192A1 CA 2340192 A1 CA2340192 A1 CA 2340192A1 CA 002340192 A CA002340192 A CA 002340192A CA 2340192 A CA2340192 A CA 2340192A CA 2340192 A1 CA2340192 A1 CA 2340192A1
- Authority
- CA
- Canada
- Prior art keywords
- torsional flexure
- pair
- reference member
- dynamic
- flexure hinges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
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Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
- G02B6/327—Optical coupling means having lens focusing means positioned between opposed fibre ends with angled interfaces to reduce reflections
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/058—Rotation out of a plane parallel to the substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
- H04Q2011/0007—Construction
- H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
- H04Q2011/003—Construction using free space propagation (e.g. lenses, mirrors) using switches based on microelectro-mechanical systems [MEMS]
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
- H04Q2011/0037—Operation
- H04Q2011/0039—Electrical control
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
- H04Q2011/0037—Operation
- H04Q2011/0043—Fault tolerance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9888198P | 1998-09-02 | 1998-09-02 | |
| US14495399P | 1999-07-21 | 1999-07-21 | |
| US60/144,953 | 1999-07-21 | ||
| US60/098,881 | 1999-07-21 | ||
| PCT/US1999/020218 WO2000013210A2 (en) | 1998-09-02 | 1999-09-02 | Micromachined members coupled for relative rotation by torsional flexure hinges |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2340192A1 true CA2340192A1 (en) | 2000-03-09 |
Family
ID=26795224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002340192A Abandoned CA2340192A1 (en) | 1998-09-02 | 1999-09-02 | Micromachined members coupled for relative rotation by torsional flexure hinges |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6392220B1 (enExample) |
| EP (1) | EP1119792A2 (enExample) |
| JP (4) | JP4776779B2 (enExample) |
| KR (1) | KR100620341B1 (enExample) |
| CA (1) | CA2340192A1 (enExample) |
| WO (1) | WO2000013210A2 (enExample) |
Families Citing this family (124)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU6254999A (en) * | 1998-09-18 | 2000-04-10 | Seagate Technology Llc | Micromachined mirror with stretchable restoring force member |
| US6803755B2 (en) | 1999-09-21 | 2004-10-12 | Rockwell Automation Technologies, Inc. | Microelectromechanical system (MEMS) with improved beam suspension |
| US6636819B1 (en) * | 1999-10-05 | 2003-10-21 | L-3 Communications Corporation | Method for improving the performance of micromachined devices |
| US6545809B1 (en) | 1999-10-20 | 2003-04-08 | Flex Products, Inc. | Color shifting carbon-containing interference pigments |
| US6650803B1 (en) | 1999-11-02 | 2003-11-18 | Xros, Inc. | Method and apparatus for optical to electrical to optical conversion in an optical cross-connect switch |
| US6571030B1 (en) | 1999-11-02 | 2003-05-27 | Xros, Inc. | Optical cross-connect switching system |
| US6792174B1 (en) | 1999-11-02 | 2004-09-14 | Nortel Networks Limited | Method and apparatus for signaling between an optical cross-connect switch and attached network equipment |
| US6597826B1 (en) | 1999-11-02 | 2003-07-22 | Xros, Inc. | Optical cross-connect switching system with bridging, test access and redundancy |
| US6882765B1 (en) | 1999-11-02 | 2005-04-19 | Xros, Inc. | Connection protection between clients and optical cross-connect switches |
| US6356689B1 (en) * | 2000-03-25 | 2002-03-12 | Lucent Technologies, Inc. | Article comprising an optical cavity |
| US6647164B1 (en) | 2000-10-31 | 2003-11-11 | 3M Innovative Properties Company | Gimbaled micro-mirror positionable by thermal actuators |
| US6711318B2 (en) | 2001-01-29 | 2004-03-23 | 3M Innovative Properties Company | Optical switch based on rotating vertical micro-mirror |
| US6527965B1 (en) | 2001-02-09 | 2003-03-04 | Nayna Networks, Inc. | Method for fabricating improved mirror arrays for physical separation |
| US6577427B1 (en) * | 2001-02-20 | 2003-06-10 | Nayna Networks, Inc. | Process for manufacturing mirror devices using semiconductor technology |
| JP2002258174A (ja) * | 2001-03-02 | 2002-09-11 | Seiko Epson Corp | 光変調装置及びそれを有する電子機器 |
| US6618184B2 (en) * | 2001-04-03 | 2003-09-09 | Agere Systems Inc. | Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor |
| US6704475B2 (en) * | 2001-04-03 | 2004-03-09 | Agere Systems Inc. | Mirror for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor |
| JP4102037B2 (ja) * | 2001-04-26 | 2008-06-18 | 富士通株式会社 | マイクロミラー素子およびその製造方法 |
| US6529654B1 (en) | 2001-05-02 | 2003-03-04 | Nayna Networks, Inc. | Method for transparent switching and controlling optical signals using mirror designs |
| US6771851B1 (en) * | 2001-06-19 | 2004-08-03 | Nayna Networks | Fast switching method for a micro-mirror device for optical switching applications |
| US20040171226A1 (en) * | 2001-07-05 | 2004-09-02 | Burden Stephen J. | Isotopically pure silicon-on-insulator wafers and method of making same |
| US6867459B2 (en) * | 2001-07-05 | 2005-03-15 | Isonics Corporation | Isotopically pure silicon-on-insulator wafers and method of making same |
| US7119400B2 (en) * | 2001-07-05 | 2006-10-10 | Isonics Corporation | Isotopically pure silicon-on-insulator wafers and method of making same |
| US6477291B1 (en) | 2001-09-13 | 2002-11-05 | Nayna Networks, Inc. | Method and system for in-band connectivity for optical switching applications |
| US6813057B2 (en) | 2001-09-27 | 2004-11-02 | Memx, Inc. | Configurations for an optical crossconnect switch |
| US7088492B2 (en) * | 2001-10-11 | 2006-08-08 | Denso Corporation | Micro movable mechanism system and control method for the same |
| US6836353B1 (en) | 2001-11-20 | 2004-12-28 | Nayna Networks, Inc. | Redundant switch fabric methods and system for switching of telecommunication signals |
| US20040240034A1 (en) * | 2001-11-30 | 2004-12-02 | Scharf Bruce R. | Diffraction compensation using a patterned reflector |
| US7813634B2 (en) | 2005-02-28 | 2010-10-12 | Tessera MEMS Technologies, Inc. | Autofocus camera |
| US6935759B1 (en) * | 2002-02-19 | 2005-08-30 | Glimmerglass Networks, Inc. | Folded longitudinal torsional hinge for gimbaled MEMS mirror |
| US20030234994A1 (en) * | 2002-06-19 | 2003-12-25 | Pan Shaoher X. | Reflective spatial light modulator |
| US20040069742A1 (en) * | 2002-06-19 | 2004-04-15 | Pan Shaoher X. | Fabrication of a reflective spatial light modulator |
| JP4038208B2 (ja) * | 2002-06-21 | 2008-01-23 | 富士通株式会社 | マイクロミラーユニット及びその製造方法並びに該マイクロミラーユニットを用いた光スイッチ |
| JP2004039735A (ja) * | 2002-07-01 | 2004-02-05 | Fujitsu Ltd | 半導体基板及びその製造方法 |
| JP4307171B2 (ja) * | 2002-07-19 | 2009-08-05 | キヤノン株式会社 | マイクロ可動体 |
| JP2006515953A (ja) * | 2002-08-03 | 2006-06-08 | シヴァータ・インコーポレーテッド | 密閉された集積ｍｅｍｓスイッチ |
| JP4003063B2 (ja) * | 2002-09-04 | 2007-11-07 | セイコーエプソン株式会社 | ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法 |
| JP4025990B2 (ja) * | 2002-09-26 | 2007-12-26 | セイコーエプソン株式会社 | ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法 |
| WO2004051761A2 (en) * | 2002-12-02 | 2004-06-17 | Institute For Scientific Research, Inc. | Isotopically enriched piezoelectric devices and method for making the same |
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- 1999-09-02 KR KR1020017002445A patent/KR100620341B1/ko not_active Expired - Fee Related
- 1999-09-02 WO PCT/US1999/020218 patent/WO2000013210A2/en not_active Ceased
- 1999-09-02 US US09/388,772 patent/US6392220B1/en not_active Expired - Lifetime
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2010
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2014
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|---|---|
| EP1119792A2 (en) | 2001-08-01 |
| WO2000013210A9 (en) | 2000-08-31 |
| KR100620341B1 (ko) | 2006-09-13 |
| JP4776779B2 (ja) | 2011-09-21 |
| KR20010085627A (ko) | 2001-09-07 |
| WO2000013210A2 (en) | 2000-03-09 |
| JP2011104768A (ja) | 2011-06-02 |
| JP2013099843A (ja) | 2013-05-23 |
| JP5343062B2 (ja) | 2013-11-13 |
| WO2000013210A3 (en) | 2000-06-15 |
| JP2014176964A (ja) | 2014-09-25 |
| US6392220B1 (en) | 2002-05-21 |
| JP2002524271A (ja) | 2002-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |