TW419602B - Optical microswitch having electrostatic microactuator and method for use thereof - Google Patents

Abstract

An optical microswitch (104) for use with a laser beam that extends along a path comprising a body (213) having an inlet port (150) adapted to receive the laser beam and a plurality of outlet ports (151). A plurality of mirrors (103) coupled to a plurality of micromotors (180) are carried by the bosy. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostarically-driven comb drive assembly (208) therein for moving the respective mirror to one of the first and second positions. A controller (111) is electrically coupled to the micromotors for providing control signals to the micromotors.

Description

419602 A7 B7 Printed by the Central Industrial and Commercial Standards Bureau, Ministry of Economic Affairs, M Industrial Consumer Cooperative, V. Description of the Invention (ii) Scope of the Invention The present invention relates generally to optical switches, and particularly to optical switches having multiple movable mirrors. BACKGROUND OF THE INVENTION Switches for switching light from one fiber to another or from free-space beams to one or more fibers have always been of great interest, especially for telecommunications and digital networks. A variety of switching configurations are useful, including 1x2, lxn, and ηχη, where η is a number from 2 to about 64. Various principles have been used for conventional switches, including effect and electromechanical actuators, and working switches using these technologies are now commercially available. The conventional switches are very expensive and quite large. Conventional 1 X η electromechanical fiber switches are typically mobile input fibers so that they will communicate with the desired output fiber, move a single lens so that the input light will be coupled with the required output fiber, or move refractive optical elements Until the required coupling is achieved. Typically, a collimating lens is placed at each fiber so that the collimated light is switched by an electromechanical actuator. An example of such a switch is disclosed in U.S. Patent No. 4,322,126 to Minowa et al., In which the 稜鏡 -shaped structure moves between input and output fibers. Another conventional approach is disclosed in U.S. Patent No. 5,208,880 to Riza et al., Where a single lens is translated to deflect collimated light into multiple output fibers. A different approach is to use a single rotating mirror to couple light into multiple output fibers, as shown in, for example, U.S. Patent No. 5,647,300. -IT -------- install-(Please read the "+" on the back side first "" write this page) Binding book paper scale standard free use in difficult countries (CNS) A4 specification (210X297 mm ) -4- 41 9602 A7 B7 Printed by the Central Government Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives. V. Description of the invention (2) Since the conventional electromechanical actuators are quite large and expensive, most of the conventional methods A single electromechanical actuator * linear or angular actuator is used to deflect the input beam. A single electromechanical actuator typically has a mechanism that accurately controls the position of the mirror to accurately couple light into the output fiber. This accurate mirror positioning also increases the size and cost of conventional actuators, especially when the number of output fibers is greater than two. In addition, there is no simple method to obtain the required positioning resolution. Most of the conventional optical opening relationships are designed for telecommunication applications, where the wavelength of light used is typically 1.5 microns or 1.3 microns in the infrared range. Also, many conventional opening relationships are designed for The so-called multi-mode fiber has a large central core, which carries light, especially for infrared light. The positioning accuracy required to achieve high optical coupling is one-fifth of the diameter of the central core of the fiber. Most of the multi-mode optical fibers used for infrared have a core diameter of about 50 microns, so that the positioning accuracy during coupling only needs to be within about 10 microns. This accuracy can be achieved using traditional techniques. In many optical systems, it is desirable to use a single-mode fiber that can achieve a larger optical bandwidth. The core diameter of these fibers is about 8 micrometers when used for infrared and about four micrometers when used for red light. So | for these systems, the required positioning accuracy is reduced to less than 1 micron, which is about one-tenth that of conventional multi-mode optical switches. Miniature structures fabricated using silicon integrated circuit process technology have developed different sensing and actuation applications. Compared to traditional and conventional implementations in these and other applications, microstructures are more cost-effective, reliable, and better than the Chinese paper standard (CNS) A4 (210 X 297 mm). 5 --------- Install ------- IT ------ M (Please read the precautions on the back and write this page first) Printed by the Central Ministry of Economy 413GC, A7 _ B7_ V. Description of the invention (3) Benefits. Integrated actuators, that is, microstructures in which the actuator and the mechanical structure are manufactured at the same time, are advantageous from the viewpoints of cost, reliability, and ease of assembly. Different actuation methods have been used for integrated actuators of microstructures, which include electrostatic, electromagnetic, thermal, and thermo-pneumatic types. Thermal technology provides great power with a fairly low response time. Electric field technology is complicated due to the difficulty of providing integrated coils with a sufficient number of turns in a planar structure and the high power consumption caused by the high current required to generate a magnetic field. The force increases as the gap between the elements decreases, so 葶 electric actuation becomes quite attractive in terms of small size. Electrostatic components consume low power and operating speed is usually limited only by the mechanism's structural response. The driving force of the conventional electrostatic actuator is typically generated by using only one of the two types of driving electrodes. These two types of driving electrodes are the required comb drive fingers or parallel plates, respectively. Parallel plate capacitors produce forces proportional to the square of the driving voltage and inversely proportional to the square of the gap between the plates. This mechanism limits the useful range of action of such actuators. When there is a large gap, the electrostatic force cannot overcome the restoring elastic force of the actuator support, and when the gap is less than about 2/3 of the initial gap, The actuator becomes unstable when rectilinear force is applied. "For practical micro-structural components, the useful range of action of a parallel plate actuator is less than 10 microns. Comb drive actuators, such as those described in U.S. Patent No. 5,025,346 to Tang, are characterized by a series of finger combination electrodes * whose capacitance can be used within an action range approximately equal to the length of the comb finger Provides a fairly constant force. The paper size of this action template applies the Chinese national standard {CNS) A4 * UM 210X 297 mm) · 6 _ I-^ -------- ^ ------ 1T ------. ^ (Please read the precautions on the back ^^ write this page) 419602 A7 __B7_ V. Description of the invention (4) / The range can be greater than 100 microns. The force that can be obtained from each finger member is so small that an actual comb drive actuator typically has a number of finger members between 10 and 200 to produce a suitable force for a microstructure device. The serious difficulty of the conventional comb drive device is that the maximum movement of the device is limited by the so-called instability of the electromechanical side. In an ideal situation, the lateral force on each finger member will be exactly balanced. However, if the finger member If the precise center of the gap is not forced down, a side force will be generated by the electrode. When the forward force is almost constant when the deflection is increased, the side force increases rapidly with the side deflection. • When the differential of the side force with respect to the side displacement is greater than the lateral mechanical elasticity coefficient, instability occurs. If this differential exceeds the side elastic coefficient of the motor support structure, the comb drive will move quickly to the side, short the drive electrode and interrupt the forward movement of the actuator. The performance of this conventional device is explained in J. Micromech. 320 in Microeng. 6 (1996)-M * in the Ministry of Economic Affairs * printed by the Industrial and Consumer Cooperatives (please read the precautions on the back page) ___________ i 〆-3 2 9 Legtenberg, Groeneveld, and "C.omb-drive actuators for large displacements" by Elwenspoek et al. They are designed to have a maximum displacement of about 40 microns. The design technique in the Legtenberg paper describes the maximum displacement of conventional comb-driven actuators, but Unspecified design with substantial deflection. Early drive actuators used thin polycrystalline silicon layers provided by so-called surface micromechanical processing to make finger members and movable, lateral drive elements. Polycrystalline silicon is typically 1 to 2 Micron thick. Since the lateral feature size of these devices can be compared to the thickness of the material, the stiffness of the component to off-plane deflection is very low. Depth Ion-etching (DR i Ε) can produce similar structures in monocrystalline silicon with a thickness of 100 micrometers. DR 1 E says that the paper size is in accordance with China National Standard (CNS) A4 (210 × 297 mm) ' 4 Printed oxygen 9602 A7 _B7_ of the Industrial and Consumer Cooperatives of the Central Bureau of Standards and Assistance of the Ministry of Economic Affairs V. The description of the invention (5) is shown in Proceedings Of Transducer'9 5 (1 9 9 5) * 556-559 pages, Klassen, Petersen, Noworolski, "Silicon Fusion Bonding And Deep Reactive Ion Etching; A New Technology For Microstructures ·" by Logan, Maluf, Brown, Storment, McCully, and Kovacs. These thicker structures can provide larger vertical electrode area and higher off-plane deflection rigidity. Recently, other manufacturing techniques, including thicker surface micro-machined polycrystalline silicon or photolithographic etched flat mold metal structures, have been used to increase the thickness and thus the off-plane stiffness of the comb drive structure. None of these manufacturing techniques can be used alone to improve the ultimate deflection of the conventional comb drive structure. Generally speaking, the object of the present invention is to provide an optical microswitch which overcomes the above disadvantages. Another object of the present invention is to provide an optical micro switch having the above-mentioned features, which uses at least one electrostatic micro-actuator having at least one comb-type drive assembly in the electrostatic micro-actuator. A characteristic optical micro-switch in which the lateral instability force in the comb-type drive assembly of the electrostatic micro-actuator is minimized. Another object of the invention is to provide an optical micro-switch having the above-mentioned features, wherein a mechanism is provided for attaching or coupling an electrostatic micro-actuator to an external f. Device. Another object of the present invention is to provide an optical micro-switch having the above-mentioned features, in which a comb-type driving assembly in an electrostatic micro-actuator is used, & «. 里 1 ^ -------- ¾ --- --- ΪΤ ------ 0 (Please read and read the notes on the back to write this page) The paper size is far away from China National Liang Liang (CNS) A4 Zhuge (2 丨 0X297 mm) ~~ 4196 Lithium Ministry of Technology t'yang sample rate bureau W? Industrial Consumer Cooperatives printed A7 B7 V. Description of the invention (6) to obtain a large deflection "Another object of the invention is to provide an optical micro switch with the above characteristics, in which a plurality of The electrostatic microactuator is aligned along at least one channel of the microswitch. Another object of the present invention is to provide an optical micro switch 1 having the above characteristics for use in a magneto-optical data storage system. SUMMARY OF THE INVENTION The present invention provides an optical switch using a large deflection high-speed micro actuator and the like. Optical switches can be used in different systems, such as magneto-optical data storage systems, telecommunications systems or data transfer systems. Miniature actuators can be modified for suspension design, comb drive elements, dynamic electric drive control, positive position stop and position sensing. Micro-actuators can be used in different designs of optical switches or other different applications, for example: horizontal.quotient.resonators, balanced force accelerometers, or pocket grippers. High off-plane rigidity and / or large electrode area can be used to create microstructures that can generate large forces and displacements. Brief Description of the Drawings The drawings are a bit sketchy in many embodiments and are incorporated in this specification as part of the drawings. The drawings illustrate several embodiments of the invention and cooperate with the explanations to explain the principles of the invention. . Fig. 1 is a magneto-optical data storage and retrieval system having the optical micro-opening of the present invention. Figure 2 is the laser component of the magneto-optical data storage and retrieval system of Figure 1. The ft scale of this paper applies to the national solid standard {CNS) A4 specification (2 丨 0X297 mm) · g C, please read the precautions on the back first'-rr write this page} Packing. Line 419602 Α7 Β7 Central Ministry of Economic Affairs, Ministry of Economic Affairs Du Yinxian, Coordination of Consumers and Consumers. V. Explanation of the Invention (7) Figure 3 is a view showing the representative optical channels used for the magneto-optical data and the retrieval system of Figure 1, including the use of a radio source. Figs. 4a-4g show the flying magneto-optical data of the magneto-optical data storage and retrieval system of Fig. 1 in a perspective view, a side sectional view, an unfolded sectional view, a side view, a front view, a bottom view, and a rear view, respectively. Read-write head. Fig. 5 is an enlarged plan view of an embodiment of an electrostatic actuator used in the optical microswitch of the present invention. Fig. 6 is a plan view of the electrostatic microactuator of Fig. 5, in which the mirror system is in a retracted condition. Fig. 7 is a plan view of the electrostatic microactuator of Fig. 5 in which the mirror system is in an extended condition. Fig. 8 is a plan view of another embodiment of the electrostatic microactuator used in the optical microswitch of the present invention. Fig. 9 is a sectional view of the electrostatic microactuator of Fig. 8 viewed along line 9-9 of Fig. 8 "Fig. 10 is a view of the electrostatic microactuator of Fig. 8 viewed along line 10-10 of Fig. 8 Section view. Fig. 11 is a plan view of still another embodiment of an electrostatic microactuator used in the optical microswitch of the present invention "Fig. 12 is a plan view of the optical microswitch of the present invention under conditions at the time of manufacture or before operation β FIG. 13 is a plan view of the optical micro-switch of FIG. 12 with a mirror extended and other mirrors retracted. 'FIG. 14 is a plane of another embodiment of the optical micro switch of the present invention —--------- installation— (Please read the precautions on the back first') W Write this page> CNS Standard A4 (210 × 297mm) -1〇 ^ T 3 6Ό 2 A7 B7 V. Description of the invention (8) Figure 15 is another embodiment of the optical micro switch of the present invention Plan view 11 of FIG. 16 is a plan view of still another embodiment of the optical micro switch of the present invention. FIG. 17 is a plan view of still another embodiment of the optical micro switch of the present invention. FIG. 18 is an optical micro switch of the present invention. Plane view of still another embodiment 8 Fig. 19 is a plan view of still another embodiment of the optical micro switch of the present invention. Fig. 20 is another of the electrostatic micro actuator used in the optical micro switch of the present invention. Plan view of the embodiment "Fig. 21 is a graph showing the relationship between the position of the shuttle of the electrostatic microactuator of Fig. 20 and a specific driving voltage. Fig. 2 2 is an electrostatic microactuator used in the optical microswitch of the present invention. A plan view of another embodiment of the actuator. The central government of the Ministry of Justice of the People's Republic of China cooperated with the printing of male workers (Please read the “Notes on the back”, transcript 苋) Figure 2 3 is the lateral rigid safety boundary of the electrostatic miniature actuator used in Figure 2 2 Figure of deflection. Figure 24 is a plan view of another embodiment of an electrostatic microactuator used in the optical microswitch of the present invention. "Figure 25 is a lateral view of the electrostatic microactuator used in Figure 24. The graph of the rigid safety boundary relative to the deflection. '' Figure 26 is the clamping force of the electrostatic micro-actuator used in Figure 24 relative to the paper size. Applicable to the Chinese standard (CNS> Α4 Zhuge (210X297 mm) ) -11-Ministry of Economic Affairs 4-Central Bureau led the bureau's negative labor * · Cooperative Du Yin *. Α7 Β7 V. Description of the invention (9) The figure of the clamp electrode separation. Figure 2 7 is an optical micro switch used in the present invention A plan view of another embodiment of the electrostatic microactuator in FIG. 2 is a plan view of another embodiment of the electrostatic microactuator for the optical microswitch of the present invention without a mirror. FIG. 2 9 Plane view of the electrostatic microactuator of Fig. 28 attached with a mirror "Fig. 30 is used for A plan view of another embodiment of the electrostatic microactuator in the optical microswitch of the present invention. Fig. 31 is a plan view of still another embodiment of the electrostatic microactuator for the optical microswitch of the present invention. Fig. 3 2 is a plan view of still another embodiment of the electrostatic microactuator used in the optical microswitch of the present invention. Fig. 3 3 is another embodiment of the electrostatic microactuator used in the optical microswitch of the present invention. Plan view. Figure 34 is a plan view of still another embodiment of an electrostatic microactuator used in the optical microswitch of the present invention. * Figure 35 is a plan of another embodiment of the optical microswitch of the present invention. ----------- Installation ------ Order ------ line (please read the note on the back first to write this page) View β Main components comparison table 9 5 Magneto-optical data Storage and retrieval system 9 6 Laser light components' 9 7 Single-mode polarization-maintaining optical fiber This paper size is free from the Chinese national standard (CNS M4 specification (210X297 cm) _ 12. A 7 B7 Co-operative printing V. Description of invention (10) 9 8 Optical fiber 10 0 Microcrystalline Sheet 10 1 Actuator 10 2 Collimating lens 10 3 Mirror 10 3 a Mirror 10 3 b Mirror 10 4 Optical switch X 0 5 Actuator arm 10 6 Flight read / write head 10 7 Magneto-optical disk 10 8 Magneto-optical disk surface 10 9 Shuttle 11 1 Controller 11 2 Wiring 11 3 Longitudinal axis. 12 0 Rotary actuator magnet and coil assembly 1 3 0 Suspension 13 1 Support 15 0 Inlet port 15 1 Outlet port 15 6 Inlet groove 15 7 Channel ' 16 1 Exit groove {Please read the notes on the back first and write this page) The paper scale is far from the Chinese national standard (CNS > A4 size (210 X 297 mm) _ 3 -4 ί θ 60 2, ^ ι | Α7 Β7 V. Description of the invention (11) Ministry of Economic Affairs t Central Prototype Bureau Shellfish Consumer Cooperative Seal 1 7 0 Module 1 7 1 Silicon dioxide layer 1 7 4 Metal layer 1 7 5 Air gap 1 8 0 Actuation 1 8 0 a actuator 1 8 0 b actuator 1 8 0 c actuator 1 8 0 d actuator 1 9 1 linearly polarized external laser light 1 9 2 linearly polarized laser light 2 0 8 first Movable assembly 2 0 8 a first comb drive member 2 0 8 b second comb drive member 2 0 8 c third comb drive Moving member 2 0 9 Second movable assembly 2 0 9 a First comb drive member 2 0 9 b Second comb drive member 2 0 9 c Third comb drive member 2 0 9 d Comb drive member 2 1 0 1st fixed assembly 2 1 0 a 1st comb drive member 2 1 0 b 2nd comb drive partner 2 1 0 c 3rd comb drive member I-^ -------- ^- ---- IT ------ ^ {Please read the notes on the back first 'write this page) This paper size is free to use China National Sample (CNS) A4 specification (210X297 mm) _ _ 4 1 9 6 〇 2 η A7 B7 V. Description of the invention (12) Central sample bureau of the Ministry of Economic Affairs, Bei Gong Xiao #Cooperative society seal * 2 1 1 Comb drive finger member 2 1 2 Comb drive finger member 2 1 3 Base 2 1 4 Spring 2 1 6 Connection bar 2 1 7 Spring 2 1 8 Extension 2 1 8 a Extension 2 1 9 Bracket 2 1 9 a Bracket 2 1 9 b Bracket 2 2 1 Beam 2 2 2 Strip 2 2 4 Spring part 2 2 5 Spring part 2 2 6 Side surface 2 2 7 Side surface 2 3 0 2nd fixed assembly 2 3 0 a 1st comb drive member 2 3 0 b 2nd comb drive member 2 3 0 c 3rd comb 2 3 1 Linear Polarization Diode Laser Source 2 3 2 Beamsplitters • 2 3 3 Coupling Lens ------------ Installation-(Please read the precautions on the back ', η copy (Page)-General Chinese National Standards (CNS) for paper scales A4 (210X297 mm) 4 19 6 0 Α7 Β7 Central Government Standards Bureau of the Ministry of Economic Affairs—Industrial and Consumer Cooperatives ’Seals of Five Inventions (13) 2 3 4 Standards Straight lens 2 3 5 Mirror 2 3 6 Detector 2 3 7 Differential amplifier 2 3 8 Quarter wave plate 2 3 9 Polarizing beam splitter 2 4 0 Electrical pad 2 4 1 Electrical pad 2 4 2 Electrical pad 2 4 3 First end 2 4 4 Second end 2 4 5 Folding part 2 4 6 First disposable strip 2 4 7 Second disposable strip 2 4 8 Slot 2 4 9 Recording / storage layer 2 6 1 Stop Item 2 6 2 Limiter 2 6 3 Limiter 2 6 4 Electrical pad 2 7 1 Conductor 2 7 2 Conductor 2 7 3 Conductor 2 7 4 Conductor (Please read the precautions on the back first '" write this page) Paper size Free use of China's National Standard (CNS) A4 specification (210X297 mm) · Bo-419602 A7 B7 V. Description of the invention (14) Ministry of Economic Affairs Central Bureau of Standards Printed by the employee consumer cooperative 2 9 2 Stopper 2 9 3 Stopper 2 9 7 Optical isolator 2 9 8 Electrical pad 2 9 9 Electrical pad 3 0 1 Actuator_ 3 0 2 Wire 3 0 3 Wire 3 4 9 Recording / storage layer 4 0 0 Reflective substrate 4 1 1 Vertical cutter 4 2 0 Clamp electrode 4 2 1 Clamp electrode 4 2 2 Finger extension 4 4 3 Axial cutter 4 4 4 Slider body 4 4 6 Light receiving parts 4 4 7 Air bearing surface 4 6 0 Shallow magnetic coil 4 6 1 Support structure 4 6 2 Yoke 4 9 3 Quarter wave plate 5 0 1 Actuator 5 6 1 Spring I I! U {Please read the notes on the back first " " Write this page) This paper size is quickly used in China S family (CNS) A4 wash grid (210X297 mm) .- J7. 419602 '4 A7 B7 5 、 Explanation of invention (15) Seal 5 6 2 Spring 5 6 3 First end 5 6 4 Second end 5 6 6 Spring part 5 6 7 Spring part 5 6 8 Folding part 5 5 9 Support 5 7 1 Limiter 5 7 2 Limiter * 5 7 3 Stopper 6 0 1 Actuator 6 0 1 a Actuator 6 0 1 b Second actuator 6 0 1 c Third actuator 6 0 1 d Fourth actuator 6 0 2 Actuator 6 0 3 Actuator 6 0 6 Suspended hard support 6 0 7 Shuttle 6 8 0 Stopper 6 8 1 Limiter 6 8 2 Stopper 6 8 6 Wire 6 8 7 Electrical pad — ^ -------- 1 ------ ΪΤ-- ---- 0 (Please read the precautions on the back to write this page first) This paper size is free to use the Chinese national standard (CNS > A4 size (210X297mm) -18- Α7 Β7 Central Ministry of Economic Affairs Ministry of Economy Printing by Consumer Cooperatives V. Description of Invention (16) 6 8 8 6 9 1 6 9 2 6 9 3 6 9 6 6 9 7 6 9 8 7 0 1 7 1 1 7 1 2 7 7 6 7 7 7 7 7 8 7 7 9 8 0 1 8 0 2 8 0 3. 8 0 4 8 0 5 8 0 6 8 3 0 8 3 1 8 3 2 8 3 3 (Please read the precautions on the back first-write this page) _________ \ Adhesive mechanism Sand wafer Reflective layer Adhesive layer Multiple dielectrics Layers with a relatively high refractive index Layers with a very low rate of release Container upright shoulder post Wafer part of the neck optical switch microchip inlet port * exit port The paper size is free from the Chinese National Standard (CNS) / U specification (210 × 297 mm) _ 19 _ A7 B7 Printed by the Central Standard of the Ministry of Economic Affairs Five, 8 3 Description of the invention (17) 6 Central longitudinal axis 8 3 7 Channel 8 3 8 Groove 8 4 1 Actuator 8 4 2 Actuator 8 4 3 Actuator 8 4 4 Actuator 8 5 1 Optical micro switch 8 5 2 microchip 8 5 3 inlet port 8 5 4 outlet port 8 5 6 vertical axis 8 5 7 channel 8 5 8 groove 9 0 1 optical switch 9 0 2 microchip 9 0 3 inlet port 9 0 4 Exit port 9 0 6 groove 9 0 7 first directional mirror 9 0 8 second directional mirror 9 1 1 channel 9 1 2 channel 9 1 3 vertical axis I order IH line (please read the notes on the back first ^ 萼 4 write (This page) This paper size is applicable to the Chinese National Standard (CNS ί A4 size < 210X297 mm) _ 2〇 · 419602 A7 B7 Central Government Standards Bureau, Ministry of Economic Affairs, Shellfish Consumption Cooperation, Du Yin 11 5 'Description of invention (18) 9 1 4 vertical axis 9 1 6 horizontal axis 9 1 7 bracket 9 2 7 groove 9 3 1 mirror 9 3 2 bracket 9 4 3 mirror 9 4 4 bracket 9 5 1 Actuator 9 5 2 Secondary motor 9 5 6 Shuttle 9 5 7 Movable electrode assembly 9 5 8 Comb drive member 9 6 1 Extended frame part 9 6 2 Comb drive bar 9 6 3 Comb drive finger Component 9 6 6 Fixed electrode assembly 9 6 7 Comb drive member 9 6 8 Comb drive bar 9 6 9 Comb drive finger member 9 7 6 Spring 9 7 7 Spring 9 7 8 Hard support 9 8 1 Extension- ------ Installation ------ ΐτ ------ ^ (Please read the precautions on the back '4 to write this page) ......--1 ____________ This paper size applies to China National prototype (CNS) Α4 grid (210X297 mm) _ 21-A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (19) 1 | 9 8 2 Pin 1 I 9 8 3 First stop Actuator 1 9 8 4 Please refer to the second stopper 1 J 1 0 0 1 Actuator first read 1 I Read 1 I 1 0 0 2 Extended comb drive finger back I | 1 1 0 0 2 a near Note on the end part 1 I Matter 1 1 0 0 2 b Free end part I 1 0 0 4 Comb drive finger component book 1 1 1 0 0 4 a Proximal part page 1 1 1 0 0 4 b Free end part 1 1 1 0 2 1 Actuator 1 I 1 0 2 2 Comb drive finger member 1 1 0 5 1 Optical micro switch 1 1 1 1 0 5 2 Microchip 1 1 1 0 5 3 Inlet port 1 1 1 0 5 4 Outlet port line | 1 0 5 6 Groove 1 1 0 6 1 Central axis 1 1 1 1 0 6 2 Channel 1 1 0 6 7 Mirror 1 1 1 0 6 8 Bracket 1 1 1 0 7 1 Laser micro optics II 1 0 7 2 Collimating lens * 1 I 1 0 3 Beamsplitters 1 1 1 This paper size applies to China National Standard (CNS) A4 (2H) X 297 mm ) -22 ^ Α7 Β7 V. Description of the invention (20) Printed by the Bayer Consumer Cooperative of the Central Sample Rate Bureau of the Ministry of Economic Affairs 1 0 8 3 Quarter wave plate 1 0 8 4 Half wave plate 1 0 8 6 Spectroscope 1 0 8 7 Photodetector 1 0 8 8 Container 1 0 8 9 Spring 1 0 9 1 Groove 1 0 9 6 Optical Micro Switch 1 0 9 7 Microchip 1 1 0 1 Optical Micro Open 1 1 0 2 Microchip 1 1 0 6 First direction mirror 1 1 0 7 Second direction mirror 1 1 1 1 Channel 1 1 1 2 Channel 1 1 1 3 Vertical axis 1 1 1 4 Vertical axis 1 1 1 6 Horizontal axis 1 1 1 7 Bracket 1 1 2 3 actuation 1 1 2 3 a 1st actuator 1 1 2 3 b 2nd actuator 1 1 2 6 Channel 1 1 2 7 Output port This paper size is in accordance with Chinese national standard (CNS > A4 size (210X297 Mm) 23-41 9602 Jii Α7 Β7 V. Description of the invention (21) 1 1 3 1 Mirror 1 1 3 2 Bracket 1 1 4 3 Mirror 1 1 4 4 Bracket 1 2 0 2 Drive bar 1 3 0 1 Optical Micro switch 1 3 0 2 Microchip 1 3 0 3 Inlet port 1 3 0 4 Outlet port 1 3 0 7 Groove 1 3 0 8 Groove 1 3 1 2 Channel 1 3 1 6 Mirror 1 3 1 7 Bracket invention description --- * -------- Installation-(Please read the precautions on the back first '4 Write this page) Fig. 1 is a plan view illustrating some basic elements of the magneto-optical (mo) data storage and retrieval system. Some specific details are indicated here and in Figs. 2 to 4 to illustrate some basic elements of the operable system in which the present invention can be used. The invention is not limited to being used only for a specific M0 data storage system, and is not limited to being used in an MO data storage system, as described below, but may also be used in telecommunications or other systems. Referring to FIG. 1, the system 95 includes a flying read-write head group 106 suitable for a plurality of 'MO discs 107', details of which will be described below. In this paper size, the Chinese National Kneading Rate (CNS) A4 specification (210X 297 mm) is applicable. 〇4- A7 B7 41 9602 -4 V. Description of the Invention (22) In the preferred embodiment, N is equal to six. Stacking method (not shown) provides multiple six-disc 1 0 7. Each disc 107 is double-sided and has first and second back-facing planes 108. A flying read / write head 106 is provided for each MO disc surface 108. The read / write head 1 〇6 is coupled to the rotating actuator magnet and coil assembly 1 through the suspension 1 30 and the actuator arm 1 0 5 to be positioned on the surface of the MIMO disc 10 7. 0. In operation, the ΜΟ Disc 1 07 will be rotated by a spindle motor (not shown) to generate a pneumatic lifting force between the flying head 106 and the rotating disc. This will make each flying MIMO read / write head 1 〇6 Maintained in flight conditions above the data recording surface of each MO disc. The holding force is counteracted by the equal and opposite spring force provided by the suspension 130. During the non-operation period, each flying ΜΟ read / write head will be statically maintained in the storage condition away from the surface of the M0 disc 1 07, which is typically located on the slope of the surface of the adjacent disc (not shown). The write head may of course land on the surface of the disc in a non-data storage area: however, this method will not be the best method. System 9 5 further includes a laser optical component 9 6. It carries at least one input optical carrier element or The optical fiber 98 is coupled to the optical switch or optical microswitch 104 of the component 96, and a plurality of sets of single-mode polarization maintaining (PM) optical fibers 97. In the illustrated embodiment, each group of single-mode PM optical fibers or output optical carrying elements 97 is coupled to the individual actuator arms and suspensions 130 in the actuator arm group 105. Flying ΜΟ read / write heads in individual 106 groups of individual read heads "Therefore, at least two PM optical fibers 9 7 are in a group of six groups of PM optical fibers 9 7 will be optically combined at one end to the optical switch 1 0 4 β Each of this group of PM fiber 9 7 will be coupled to two wires at the other end as -------- ^ ------? τ ------. (Please read the note on the back first The matter is also written on this page.) The Ministry of Economic Affairs of the Central Government Bureau of Vehicles is responsible for industrial and consumer cooperation. The printed paper size meets the standards of Chinese families (CNS) A4 (2 丨 0XM7 mm) -25- 9 60 2Ί橾 Junzhuan Consumer Cooperative Co., Ltd. Seal A7 B7 V. Description of the Invention (23) One group of flying M0 read / write heads 106 group "It should be understood that only the number of PM fiber is shown in the figure. The controller 111 is electrically coupled to the optical switch 104 by wiring 1 12 to provide an electrical command signal to the optical switch. The controller 1 1 1 may be a conventional type and include an input for receiving one or more control signals, and a series of amplifiers and voltage generators for each actuator and comb drive assembly, which will be described below. Selection mechanism for sensing position of comb drive assembly and output for transmitting output signal. Fig. 2 shows the laser optical components 96 of the magneto-optical data storage and retrieval system of Fig. 1. Referring to Figures 2 and 3 for illustration, reading and storing information on the surface of each disc 107 requires the laser output to be transferred to the flying read / write head via optical fiber so that the light output will be accurately imaged on the disc The magnetic field is generated on the surface of the disc and the coil is supported on the flying read / write head 106 near the surface of the disc. The explanations of Figs. 2 and 3 explain the reason for providing a light source and a magnetic field to selectively access data on the surface of the disc. In FIG. 2 * it is shown that the laser light emitting component 9 6 includes a linearly polarized diode laser source 2 3 1, which operates in the visible light or near-ultraviolet frequency region and emits sufficient light to read and write the MO 0 disc group 107. Power> In the first embodiment, the laser diode source may be an RF modulated laser source. In the second embodiment, the linearly polarized laser source 2 3 1 may be a distributed feedback (DFB) laser source. In the illustrated embodiment, a linearly polarized laser source of 2 3 1 is selected to operate in the range of 6 3 5.-6 8 5 nm; however, laser sources of other wavelengths can also be used "laser optics 9 6 also includes: a collimating lens 2 3 4, a low-wavelength dispersive leakage beam splitter 2 3 2, and a friendly coupling lens 2 3 3. Laser optics 9 6 will linearly polarize the laser light out of the laser ------------ ^ ------. Η ------ ^ (Please read the precautions on the back 5 , / Write this page) This paper size is applicable to China's national kneading rate (CNS > A4 «L grid (210X297mm > -26-) V. Description of the invention (24) Α7 Β7. Consumer cooperation Du printed 1 9 1 (shown in the figure to the optical switch 1 0 4 plate 2 3 8 and mirror 2 detector group 2 3 6. The surface 1 0 8 is reflecting) will leak the beam splitter 2 3 by the optical switch 2 Infrared wave plate 2 3 8 In the second embodiment, 2 3 1 is like a collimator lens, and this type of differential detection is used to measure the polarization in the disc 1 0 7 group. These two real differential signals will be produced by the differential. "There are also other well-known laser beams in the unrestricted area of the present invention. Fig. 3 shows the generation. In the preferred embodiment, it includes: optical switch 1 flying M 0 reading Write head 1 As a complete description, the optically separated laser light 19 1) is guided (from a linearly polarized laser source 2 3 1). The laser light component 9 6 further includes: quarter wave 3 5 and polarization beam splitter 2 3 9 and photodiode or in the first embodiment The linearly polarized laser light 1 9 2 from the M0 disc 10 7 (illustrated in Figure 1 0 4 is guided to the coupling lens 2 3 3, and is guided to the differential detector for differential detection. The device includes: four, a mirror 235, and a polarizing beam splitter 239. The optical isolator 2 9 7 is included between the laser sources 2 3 4. As this technique has been well established, the design will measure the reflected laser light 1 9 2 In the sensitive embodiment of polarization rotation induced by the Kerr effect at the surface of an M 0 disc, after being converted by the detector 2 3 6, the amplifier 2 3 7 processes to The signal 2 9 4 is input to the configuration of the above-mentioned optical components and light sources, and is used here to guide the external laser light 191 and the detection of the reverse technology. The apparent optical path, including the use of the DF Β laser source, represents The optical channel system is shown in Fig. 3, 04, one optical fiber in the PM fiber group 97, and one read / write head in the 06 group. As will be described below, more switches 1 0 4 will provide sufficient selectivity. Use Guide 1 (relative to laser source 231) to enter the individual. Please read and read the back of the book. The paper size is the same as that of China B. S > Grid (210 × 297 mm) _27 419602 Α7 Β7 V. Individual near-end of single-mode PM fiber 9 7 of the invention description (25). The external laser light 1 9 1 will be further composed of single-mode PM fiber 9 7 Guide to leave the individual distal end * so as to reach each individual M 0 disc 1 0 7 by flying the M 0 read / write head 1 0 6 and the recording / storage layer 3 4 9 ^ with any suitable laser source The externally emitted laser light 1 9 1 is preferably provided by a linearly polarized laser source 2 3 1 of a distributed feedback (DF Β) laser source. During the writing of information, the external laser light 1 9 1 is selectively guided by the optical switch 10 4 to the M0 disc 1 07 to heat the useful selection point 3 4 0 to approximate the recording / storage layer. The Curie point of 3 4 9 decreases the coercivity of the recording / storage layer 3 4 9. Preferably, the light intensity of the outgoing laser light 1 9 1 remains fixed, and the time-varying vertical offset magnetic field will be used to define the '^ 上 # or " ^ 下 # magnetic perpendicular to the M0 disc 1 0 7 The style of the field. This technique is called magnetic field modulation (MFM). Then, when the useful selection point 3 4 0 cools down, the information will be encoded within the recording / storage layer 3 4 9 of the individual rotating disc 1 7 ° Printed by the Ministry of Economic Affairs and Consumer Cooperatives (Please Read the precautions on the back first and fill in this page) During reading out information, the external laser light 1 9 1 (lower intensity compared to writing) will be selectively guided to the M0 disc 1 0 7 ' So that at a given useful point 3, the Kerr effect will cause (when the external laser light 1 9 1 reflects from the recording / storage layer 3 4 9) the reflected laser light 1 9 2 has clockwise or counterclockwise induction The rotation polarization of 3 6 3 'clockwise or counterclockwise induction depends on the magnetic domain polarity at the useful point 3 4 0. The above-mentioned optical path is essentially a two-way β. Therefore, it will receive the reflected laser light 1 9 2 and the reflected laser light 1 9 2 will enter the far side of the single-mode PM fiber 9 7 via the flying M 0 read-write head 1 0 6. end. Reflected laser This paper size is applicable to China National Standard (CNS) Α4 washer (210 × 297 mm). 28- Central sample rate of the Ministry of Economic Affairs, cooperation of shellfish consumption *.

SC 2: V A7 _ B7 V. Description of the invention (26) The light 1 9 2 will propagate along the single-mode PM fiber 9 7 to leave at its proximal end and is selectively guided by the optical switch 104 to transmit to The laser optics 9 6 is then converted into a signal 2 9 4. Figures 4a-4g show the flying magneto-optical read / write heads for storing magneto-optical data in side cross-sectional views, unfolded cross-sectional views, side views, front views, bottom views, and rear views, respectively. In Fig. 4a, the flying M0 read / write head 106 is used for the recording / storage layer of one of the discs of the M0 disc group 1 07. The flying M0 read / write head 1 0 6 contains: The body 4 4 4, the air bearing surface 4 4 7, the quarter wave plate (not shown), the reflective base 400, the light receiving member 446, the magnetic coil 460, and the yoke 4 6 2. The size of the slider body 4 4 4 can accommodate the working distance between the light receiving member 446, the single-mode PM fiber 97, and the reflective substrate 400. The reflective substrate 4 0 0 may include a reflective surface that is aligned to direct the external laser light 1 9 1 and 1 9 2 to and from the recording / storage layer 3 4 9. Although the slider body 444 may contain industry-standard 'mm' micron nanometer Λ, or 'micron " sliders, other sizes of slider body 4 4 4 (read and written by the above-mentioned flight Μ0 The size limit of the first 106 components is determined). Therefore, in a preferred embodiment, the slider body 4 4 4 includes a millimeter slider height (8 8 9 ^ m) and a planar area equivalent to the area of a nano-scale slider (1600 × 2032 / ίπι) »Single-mode PM fiber 9 7 is coupled to the slider body 4 4 4 along the axial cutter 4 4 3 and the light receiving member 4 4 6 is coupled to the vertical corner cutter 4 1 1 to the slider body 4 4 4. Although, in the preferred embodiment----. A national standard (CNS > A4 size (210X297 mm)) _ 29 _ --------- suppress clothing --- ---. 玎 ------ 0 {Please read the note on the back 14 to write this page first) A7 B7 printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. In the description of the invention (27), The cutter 4 4 3 is installed along the periphery of the slider body, and the vertical cutter 4 1 1 is installed at the corner of the cutter body 4 4 4. However, the shaft cutter 4 4 3 and the vertical cutter The device 4 1 1 may also be disposed at other positions on the flying M0 read / write head 10 6, for example, between the periphery and the central axis, or extending along the central axis itself. Positioning the optical fiber 97 and the light-receiving member 4 4 6 at other positions not extending along the central axis may affect the center of mass of the magneto-optical read / write head 106 and thus affect its flight dynamics. Therefore, the point at which the flying M0 head 106 is attached to the suspension may need to be adjusted to compensate for the centrifugal change in the center of the magneto-optical head 106. Preferably, the cutters 443 and 411 can be designed as channels, V-grooves, or any other suitable mechanism to couple and align the single-mode optical fiber 9 7 and the object light receiving member 4 4 6 to the flying M0. Write head 1 0 6. In the preferred embodiment, the laser light 191 and 192 pass through the optical path (to and from the recording / storage layer 349 of the M0 disc 1 07). The optical path system includes: single-mode PM fiber 9 7. Reflection The base 400, the quarter-wave plate 493, and the light receiving member 4 4 6. In the preferred embodiment, the single-mode PM fiber 9 7 and the light-receiving member 4 4 6 are positioned in their individual cutters to obtain external lightning within a useful point 3 4 0 (refer to FIG. 3). The focus of the incident light 1 9 1 is taken as the focused light spot 4 4 8. Next, by using an ultraviolet curable resin or a similar adhesive, the single-mode PM optical fiber 97 and the object light-receiving member 4 4 6 are fixed in place β. With regard to the present invention, special attention should be paid to FIGS. 4 c and 4 b. These two figures show the object-receiving light members 4 4 6 which are used to focus the light spot on the size 448 defined on the surface 349 of the disc. The light spot will pass through the yoke 462 and the standard of this paper. The country standard (CNS > A4 size (210X297 mm). 30 ---------- Private clothing — {Please read the back Notes 3) 炅) .TΓ line 419602 A7 B7 V. Description of the invention (28) The shallow magnetic coil 4 6 0 is focused, and the yoke 4 6 2 and the shallow magnetic coil 4 6 0 are incorporated into the supporting structure 4 6 1 It can be installed on the bottom of the flying M0 read-write head or on or near the surface of the light receiving member 4 4 6 without disturbing the aerodynamic quality of the flying M0 read-write head 1 0 6. The optical switch or micro-opening relationship of the present invention uses a micro-actuator to move the light mirror. Each microactuator in this microswitch or other application includes at least a pair of opposing comb-shaped drive members to provide motive power for the actuator. Fig. 5 shows a slightly simplified lateral drive actuator or microactuator 1 0 1 used in an optical micro switch such as micro switch 104, and Fig. 5 shows an upper plan view of the actuator 101. The shuttle 109 of the actuator 101 includes first and second movable electrode assemblies 208 and 209, and the first and second movable electrode assemblies 208 and 209 are connected to the Central Industrial and Commercial Cooperation Cooperative of the Ministry of Economic Affairs. Printing < Please read the “Notes on the back page” on this page first)---/ /-to move together completely and completely. The actuator 101 further comprises first and second separate fixing assemblies 210, 230. These components will extend vertically to and center on the longitudinal centerline of the actuator 101. The first movable component 208 includes first, second, and third comb-shaped driving members 208a, 208b, and 208c, and each comb-shaped driving member extends vertically to the moving direction of the components 208, 209 The two movable assemblies 209 include first, second, and third comb drive members 209a, 209b, and 209c, and each comb drive member extends vertically to the moving direction of the components 208, 209. The actuator 101 and its movable components 209, 209 and the fixed components 2 1 0, 2 3 0 are all made of silicon wafers by any suitable method such as DRIE. * In DR IE, an These areas are fused to the basic paper size and used in China National Standards (CNS) Α4 specifications (210X297 mm) _ 31 _ Central Samples Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives, India Α7 Β7_ V. Description of the invention (29) Bottom 2 13 thin monocrystalline silicon layers to form movable components 208, 209 and fixed components 210, 230. The single crystal silicon layer is electrically isolated from the substrate 2 1 3 by a thick silicon dioxide layer. In this way, the movable electrode components 208, 209 will be electrically insulated from the fixed electrode components 2 10, 2 3 0. Other manufacturing techniques include high-type-ratio electroplating of metal structures on insulating substrates over regional discardable layers. This process is disclosed in U.S. Pat. No. 5,450 * 751 " Microstructure For Vibration Gyroscope "by Putty and Eddy. The resulting structure includes a relatively narrow and high suspension spring structure, a fixed attachment point to the substrate, and the ability to form an electrical connection to the structure. Or 'for example' by deposition, patterning, and etching a relatively thick warp Polycrystalline silicon on doped silicon dioxide regionalized waste layer ° An example of this process is illustrated in SPIE Proceedings, Volume 2 6 4 2 titled "Micromachined Devices and Components" 8 October 1995 — “4 Thick Polysilicon Based Surface Micromachined Capacitive Accelermeter with Force Feedback Operation” by B. Wenk et al. In item 9 * a movable electrode assembly 208, 209 will be a rigid, elongated frame member that extends longitudinally in the direction of movement Or the connector bar 216 is connected. The first movable electrode assembly 208 will be joined at a plurality of longitudinally spaced positions. One end portion of the connector strip 2 1 6 and the second movable component 20 9 are joined to the other end portion of the connector strip 2 1 6 at a plurality of longitudinally spaced positions. The extension portion 2 1 8 and the bracket structure The k-bracket 2 1 9 is included in the attachment mechanism of the actuator 101 to secure the mirror 10 3. -. ii (Please read the notes on the back first '> written book) The paper size is in accordance with Chinese National Standards (CNS) A4 wash (210X297 mm) -32- 419602 Co-operation Du printed A7 B7 V. Description of the invention (30) Attached to shuttle 1 109 and thus firmly attached to the movable electrode assembly 208, 209. The bracket 219 and the mirror 103 will be inclined at an angle to the shuttle 109 And the moving direction of the movable electrode assembly 208, 209. The comb-shaped driving members 208a, 208b, 208c, 209a, 209b, and 209c each have a bar or beam 221, and the beam 2 2 1 is joined to the connecting bar 2 1 6 at one end and from The strips extend vertically across the actuator. The length of each strip 221 ranges from 200 to 2000 microns, preferably from 700 to 12 microns, and even closer to defining individual combs. 800 yards length of the drive member. A plurality of comb-shaped members or finger-shaped members 211 series of equal lengths extending in the direction of parallel movement will be fixed to each 2 21. The finger members 2 1 1 are evenly spaced along the length of each comb drive strip 2 2 1 and the length ranges from 5 to 200 microns, preferably 60 to 130 microns, and more preferably 90 microns. The finger-like members 2 1 1 are spaced at a distance of 3 to 25 micrometers, preferably 6 to 15 micrometers, and more preferably about 10 micrometers. The comb fingers 211 of the comb drive members 208a, 208b, and 208c extend toward the mirror 1 0 3 coupled to the actuator, and the comb fingers 211 of the comb drive members 2 0 9 a, 209b, and 209c extend away from the mirror. A fixed electrode assembly 2 1 0 includes first, second, and third comb-type driving members 210a, 210b, 210c and a second fixed electrode assembly 2 3 0 includes first, second, and third comb-type driving members. 230a, 230b, 230c, each comb drive member extends in the direction of movement of the vertically movable electrode assemblies 208, 209 ° Each comb drive member 21〇a, 210b, 21〇c, this paper size applies to the country of China Sample rate (CNS > A4 Grid (2! 〇X 2machi mm) _ 33 J -------- ^ ------ tT ------ ^ (Please read the back first (Notes on this page are written on this page) 4 Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Consumer Work Cooperatives' Α7 _Β7 V. Description of the Invention (31) 230a, 230b, 230c all have actuators mounted on the base 213 and extending across Strip or beam 2 2 2. The length of each strip 2 2 2 is similar to the length of strip 2 2 1 which defines the length of the individual comb drive member. • Size and shape In fact, the plurality or series of comb-like or finger-like members 2 1 2 which are the same as the comb-like driving finger 211 are fixed to the comb-like driving bar 2 2 2 at a plurality of spaced positions along the length of the strip 2 2 2. The comb fingers 212 of the comb drive members 210a, 210b, 210c extend away from the mirror 103 and oppose the comb drive finger members 2 1 1 of the comb drive members 208a, 208b, 2 0 8c, and the comb drive members 230a, 230b. 230c will extend toward the mirror and oppose the comb drive finger members 2 1 1 of the comb drive members 209 a, 209b, 209 c. The comb drive finger members 2 1 1 are arranged on the fingers in a spaced manner. Inside the shape-like member 2 1 2. The comb-shaped drive member group of each opposing actuator 1 0 1 forms an electrostatically-driven comb-shaped drive mechanism or assembly. The comb-shaped drive members 208a, 208b, 208c of each comb-shaped drive assembly , 209a, 209b, and 209c can move between the first position, the second position, and the third position relative to the individual comb-shaped driving members 210a, 210b, 210c, 230a, 2 3 b, and 2 3 0 c. The first position is relative to the comb drive members 208a, 2 as shown in FIG. 10a, 208b, 210b, and 208c, 210c, where the individual comb-shaped driving finger members are spaced from each other, and the second position is as shown in FIG. 5, relative to the comb-shaped driving members 208a, 210a, 208b, 210b, And JJ -------- ^ ------. 1T ------ '^ (Please read the notes on the back first and write this page) This paper size applies to Chinese National Standard (CNS)规 4 rules _ grid (210X297 mm) -34- Lost rate in the Ministry of Economic Affairs 扃 Industrial and consumer cooperation Du printed 4 丨 9602 A7 __B7_ V. Description of the invention (32) 208c, 210c, 209a, 2 3 0a, 209b, 230b, and 209c. 230c, where 'when a voltage is applied between the comb-shaped driving finger members 211, 212', they are not a combination of fingers but are electrostatically engaged. The third position is as shown in FIG. In the comb-shaped driving members 208a, 210a, 208b, 210b and 2 0c, 2 1 0c, the individual comb-shaped driving finger members are combined with each other in a finger shape and are in electrostatic meshing. When in the second position with respect to the comb drive member, the comb drive finger members 211, 212 actually end along a line extending perpendicular to the moving direction of the shuttle 109. The interval between the finger members 211 and 212 will be selected to ensure the lateral stability within the full deflection range under the maximum allowable driving voltage for the actuator 101. The fixed components 210 and 230 will both Fixedly attached to the base 213 and for driving the first and second movable electrode assemblies 208, 209 between the first or retracted position shown in FIG. 6 and the second or extended position shown in FIG. 7, in FIG. 6 The first comb-shaped drive members 208, 2 0 are in a spaced position and the second comb-shaped drive members 209, 2 3 0 are in a finger combination. In FIG. 7, the first comb-shaped drive members 208, 210 are It is in the finger combination position and the second comb drive members 209 and 230 are in the spaced position. The shuttle 109 and the movable electrode assemblies 208 and 209 are suspended from the base 13 by a spring group or a collapsible cantilever beam group 214 and 217 arranged at each end of the electrode assemblies 208 and 209. The spring 214 and the first comb-shaped driving member at the end of the actuator 101 sheet paper size applicable + country sample rate (〇 «> 8 4 specifications (210 parent 29 ^ mm): 35_ ~ --- ----- ¾ ------ ir ------ ii (Please read the notes on the back to write this page first) Employees' Cooperatives of the Central Economic and Technical Bureau of the Ministry of Economic Affairs Seal A7 B7 V. Description of the invention ( 33) 2 0 8 a is spaced apart and the spring 2 1 7 is spaced apart from the second comb drive member 2 0 9 c at the other end opposite the actuator 1 0 1. Each set of springs 214, 217 includes a first And second spaced spring portions 224, 225, the first and second spaced spring portions 224, 225, when in the released position, extend perpendicular to the direction of movement and engage at one end with a foldable portion 245 (see FIG. 5) ) »The spring sections or beams 224, 225 extend along the entire length of the comb drive bars 221, 222 in a spaced relationship and are parallel to the comb drive bars. The spring sections 2 2 4, 2 2 5 all have the same cross section. The cross section is actually rectangular. One end of the rigid support or extension support 131 will be joined to the folded portion 245 of each spring 214, 217. Each spring 214, 2 1 The first end 243 of 7 will be joined to the base 2 1 3, and the second end 244 of the springs 214, 217 will be joined to the comb-shaped drive members 208a, 209b for facing the connector bar 216 2 2 Individual ends of 1. The suspension part of the actuator 101 is designed using high aspect ratio technology and includes movable electrode assemblies 208, 209, shuttle 109, springs 214, 217, and a rigid support 131. The height of the substrate 2 1 3 plane is in the range of 20 to 300 microns, preferably from 60 to 150 microns and more preferably about 80 microns. The electrical connector mechanism is included in the actuation The controller 101 allows the controller 1 1 1 to be electrically coupled to the movable electrode assembly 208, 209 and the fixed electrode assembly 210, 230. In particular, an electrical connection in the form of a side power supply air cushion 240, 241, 242 Device mechanism. Electrical pad paper size Standards National Standards (CNS) A4 specifications (210X297 mm) _〇6-ij -------- 苏 ------ t ---- --- Wire (please read the precautions on the back first &'; write this page) 419602 A7 B7 V. Description of the invention (34) 2 4 2 The wire mechanism in the form of a wire track 2 7 1 is electrically coupled to the first-and- Two movable electrode assembly 208, 209. The electrical pads 240, 241 will track the wire 272, the wire 273 in the form of individual bodies is electrically bonded to said first stationary electrode assembly 210 and the second stationary electrode assembly 230. -In the present invention, the spring preferably exhibits a high ratio of lateral to forward elastic coefficient ratios. In the conventional art, this is achieved by using four opposing springs or folded cantilever beams arranged at the four corners of the symmetrical movable electrode portion (refer to US Patent No. 5,025,346). Figure 1) »However, in this conventional design, the movable electrode part is deflected, and the lateral stiffness of the spring is greatly reduced. 9 The present invention can eliminate the need for the two-way symmetry and four of the conventional actuator design. spring. In contrast, the present invention only includes two springs or folded cantilever beams 214, 217, which are coupled to the base 213 at the first end 243 and to the movable electrode assembly 2 4 4 at the second end 2 4 4 9. The springs will be connected to them by the rigid support of the suspension extending between them, printed by the K-Consumer Cooperative Department of the Central Ministry of Standards and Commerce (please read the notes on the back first, write this page) 1 3 1 Fold part 2 4 5. The above structures are designed to be manufactured using high aspect ratio techniques such as DR I E to allow them to be designed to have a higher height or profile than conventional techniques. The significantly larger heights and rectangular cross sections of the spring portions 224 and 225 enable the springs 2 1 4 and 2 1 7 to exhibit more out-of-plane rigidity * than the conventional technique, that is, the out-of-plane rigidity of the base 213. Although the movable electrode assembly is fixed to the bottom 2 1 3 only at the end 243 of the springs 214 and 217, this out-of-plane rigidity can still be used to suppress the movable electrode assembly 208. This paper is in accordance with the Chinese national standard ( CNS > Α4ίΙΙ grid (210X297mm) -37- Printed by the Central Samples Bureau of the Ministry of Economy, Shellfish Consumer Cooperative, 419602 A7 _B7__ V. Description of the invention (35) 209 Unnecessarily bend away from the plane of the fixed electrode assembly 210, 230 The actuator 101 has a mechanism for restricting the forward and backward movement of the shuttle and for allowing the controller 1 1 to monitor the position of the shuttle 10 9 and to specifically monitor whether the shuttle is in its fully retracted position as shown in FIG. 6 or In the fully extended position shown in Figure 7. The mechanical stops 2 6 1 are rigidly formed on the base and arranged on the first or forward limiter 262 and the second or rearward direction provided on the extension 218 Between the limiters 263. The forward movement of the shuttle 109 is restricted by the engagement of the stopper 2 6 1 and the backward movement of the shuttle 1 0 9 is restricted by the stopper and the rear limiter 2 6 The engagement of 3 is restricted. The stopper 2 6 1 is formed on the base 2 1 3 The conductor tracks 2 7 4 are electrically connected to an electrical pad 264 also formed on the substrate 2 1 3. The pad 264 allows the stopper 26 1 to be electrically coupled to the controller 111. The stopper 261 and the limiter 262 or 263 An engagement will engage the circuit between pad 2 6 4 and pad 2 4 2. In one method of operating the actuator 1 0 1 of the present invention, the voltage relative to the potential applied to the electrical pad 2 4 2 is controlled by 1 1 1 Via individual electrical pads in actuator 1 0 1 2 4 0 or 2 4 1 set of comb-shaped finger members 2 1 9 or 2 3 0 selectively applied to a stationary electrode assembly 2 1 2 The deflection of the movable electrode assembly 2 0 8, 2 9 and thus deflection of the actuator 2 1 8 between the retracted position shown in FIG. 6 and the extended position shown in FIG. 7 and Associated mirror 1 0. 3. The electrostatic attractive force between the meshing comb-shaped drive members remains almost fixed in the finger combination. This paper is scaled with the Chinese National Kneading Rate (CNS) A4 Washer (210 X 297 male)漦) _ 38 _ — Λ ^ iT ^ {Please read the notes on the back first and write this page) 419602 ^ ή The Central Government Bureau of the Ministry of Economic Affairs Printed A7 B7 printed by the Cooperative Consumer Cooperative Fifth, Description of the invention (36) By releasing the fixed voltage on the fixed electrode assembly 230, an extension condition is obtained in the actuator 101, so that the mirror 103 rotates toward the extended position facing the limiter 26.2. Then, by applying a fixed voltage to another fixed electrode assembly 2 1 0, the mirror 103 is held in the extended position 2 93. Then, the mirror 103 can be retracted by removing the fixed voltage on the fixed electrode assembly 210 and applying a fixed voltage to the fixed electrode assembly 230 again. During each half stroke of the shuttle 10, the shuttle is first pulled back from its deflected position by the springs 214, 217 to its released position shown in FIG. 5, and then, by the electrode assembly 208, 210 or 209, 2 3 0 The coordinated electrostatic engagement pulls to its other deflected position. The performance of the lateral comb-type actuator 101 will depend on a number of factors, including the forward and lateral rigidity of the springs 214, 217 and the relative dimensions of the comb-shaped drive finger members 211, 212. The performance exchange price lies between the operating voltage and size allowed by the actuator 101 and between the position of the mirror 103 and the switching speed. The traditional method of obtaining large deflections at low operating voltages is to minimize the spacing between the electrodes to generate maximum forward force and use a spring with low forward rigidity to generate large forward displacements. This method is commonly used for thin Polycrystalline silicon actuators in which low off-plane rigidity prevents the use of large operating voltages a. However, these designs are not optimal when using relatively thick structures. Although, as the interval between the electrodes decreases, the forward force of each finger member increases, but the lateral force increases faster. When designing high-speed actuators with high deflection or high force, the preferred design method is to determine the maximum voltage that the structure can support. < CNS) A4 washing grid (210X297mm) 1.1 -------- installation-- (Please read the precautions on the back ^ Take a photo of this page first) Ordering line-39- 419602 Central Bureau of Economic Affairs, Ministry of Economic Affairs Cooperate with Du Du printed A7 B7 V. Description of Invention (37) Then, choose the electrode interval that will cause the minimum lateral instability at this maximum voltage. Then • Define the maximum position and speed of the actuator based on the rigidity of the spring and the mass of the moving element. "When minimizing the size of the actuator and thus the space occupied by the actuator on the optical microswitch 104 The invention also reaffirms the above-mentioned relationship * In the conventional art, the comb-shaped finger member is not sufficiently restricted to prevent parallel movement with respect to the center axis of the micro switch 104 that is perpendicular to the direction of movement of the actuator 101, So that the sufficient lateral force generated between the finger members will cause the movable electrode assembly to move quickly to the side instead of continuing to extend or retract the position. This instability occurs when the differential is greater than the transverse mechanical elastic coefficient of the spring. The spring portions or beam-like members 224, 225 may be longer or shorter than the comb drive bars 221, 222. More specifically, the spring portions 224, 225 have a length in the range of 200 to 2000 m, preferably 800 to 2100 m, and a width in the range of 3.5 to 5.5 m, preferably 3.75 to 4.25 m. Each of the spring portions 224, 225 shown in FIG. 5 has a length at least equal to the length of the comb-shaped driving bars 221, 222 of the actuator 101. The actuator 101 has a length of about 800 micrometers, a width of about 250 micrometers, and a height of about 80 micrometers. The beams or springs 214, 217 are shown in the undeflected or released position in FIG. 5, where each beam-like member or beam 2 2 4, 2. 25 will extend linearly in a direction perpendicular to the direction of movement of the shuttle 10 9 》 When the individual mirrors are in the retracted position, the beams 224, 225 can be used in the electrode assembly -------- ^-1 ^ ------ ΐτ ----- II (Please read first Note on the back: write this page) This paper size is in accordance with Chinese Standards (CNS) A4 specifications (210X297 mm) _ 4〇41 96u Central Ministry of Economic Affairs stamped by the staff consumer cooperative 11 A7 B7 V. Description of the invention (Station) 2 0 9 moves in a moving direction to the first deflection position shown in FIG. 6. When the individual mirror 103 series is in the extended position, the beams 2 1 4 and 2 1 7 can also be moved to the second deflection position shown in FIG. 7 in another relative moving direction of the electrode assembly 20 9. When the beams 2 14, 2 17 are in their respective first and second deflection positions, the beams 2, 14, 2 17 are in a non-linear or curved position. More specifically, when the individual springs 2 1 4, 2 1 7 are moved from a straight or released position to a deflected or curved position, the opposite ends of each beam 224, 225 will move in opposite directions, each in this direction It is parallel to the moving direction of shuttle 1 0 9 "The maximum lateral rigidity of the beam or spring 2 14, 2 1 7 ， that is, the rigidity in the direction perpendicular to the moving direction of shuttle 1 0 9 occurs in Figure 5. The springs shown in the undeflected or released position are halfway between the retracted and extended positions shown in Figs. 2 and 3, respectively. As shown, when not deflected as shown in Figure 5 • The springs 214, 217 are in a straight condition. The shuttle 1 0 9 composed of the component frame 2 1 6 also includes an actuator 1 0 1 that resists the entire rigidity of lateral load and bending and reduces the overall mass of the shuttle 1 9. The inherent rigidity of the present invention may not require actuation The actuator 1 0 1 is designed as a two-way symmetry used in conventional arts * allowing the width of the actuator 1 0 1 to be halved. As the width is reduced, the actuator group 1 01 can be packed closer together in the micro switch 104 to allow more actuators in the micro switch to be on the laser light 191 of a given length. A further embodiment of the actuator of the present invention is shown in Fig. 8, which includes added features to improve the performance of the actuator. Similar reference numerals are used to describe similar elements in actuator 101 as in actuator 180 of FIG. 8. This paper size applies to the Chinese National Standard {CNS) A Zhong L grid (210X297 mm) αλ. -------- ^ ------ ir ------ ^ (Please read the note on the back \ ^-write this page first) 4 1 S b Printed by Bei Gong Consumer Cooperative ¾ A7 _B7 _ V. Description of Invention (39). The actuator 1 8 0 includes first and second disposable strips 2 4 6 and 2 4 7, as shown in FIGS. 4 and 5, extending relative to the spring 2 1 4 and extending each spring or beam portion 224, The 225 is set to ensure uniform etching and thus the required rectangular cross section of the beam portion. The height of each disposable strip approximates the height of the beam section and provides narrow slots 2 4 8 extending along each side of the beam section. The separation between the beam portion and the individual disposable strips, that is, the width of each slot 2 4 8, can be compared to the smallest etched feature in the device. The distance between the * beam portion of the actuator 180 and each disposable bar is close to eight microns. By restricting the reverse etching of the side surfaces 226, 227, the disposable strips 246, 247 can facilitate the formation of parallel, planar side surfaces 226, 227. More specifically, the narrow width of the groove 248 inhibits ions traveling non-parallel to the groove direction from entering the groove and thus inhibits their participation in the etching of the side surfaces 2 2 7 and 2 2 7. In the illustrated method of operating the actuator 180, the first and second movable electrode assemblies 208, 209 of the actuator 101 are initially stationary and located in the extension and retraction shown in FIG. Halfway between the locations. In the extended position, the extension 2 1 8 will abut against the forward limiter 262 and the first and second movable electrode assemblies 208, 209 will abut against at least one of the three first fixed stoppers 2 9 3 One and a plurality of three first fixed stoppers 2 9 3 as shown in FIG. 8, the first fixed stoppers 293 are attached to the base 213. A stopper 293 is used for each of the comb-type driving members 208a, 208b, and 208c. The stopper 2 6 1 will engage the limiter 2 6 1 before attaching to the extension 2 1 8. In the retracted position, the extension 2 1 8 will be close to the back limiter (L -------- ^ ------ 1T ------. ^ (Please read first Note on the back; ^: write this page) I-—— / 1__I____ This paper "standard uses Chinese National Standard (CNS) A4 specification (210X297 mm) -42- 4 19 6 0 2 at Central Standard of the Ministry of Economic Affairs 扃A7 is printed by a consumer cooperative. ___B7_V. Description of the invention (40) 263 and the first and second movable electrode assemblies 208, 209 will be closely attached to the three second fixed stoppers 2 1 3 2 9 At least one of 2 and a plurality of three second fixed stoppers 2 9 2 attached to the base 213 as shown in Fig. 8. The stoppers 2 9 2 are used for each of the comb drive members 209a, 209b, 209c. The stopper 261 engages and attaches to the extension member 2 1 8 and then moves to the limiter 2 6 3. The stopper 2 9 2, 2 9 3 makes the mirror 103 of the optical micro switch 104 easily reproducible. Klassen, Petersen, Noworolski, Logan, Maluf, Brown, Storment, McCully, and Kovacs, can be used similar to Proceedings Of Transducers' 9 5 (1 9 9 5), pages 556-559. Onding And Deep Reactive Ion Etching; A New Technology For Microstructures " process described in the thesis, manufacturing actuators 101 and 180, in this process, the bottom silicon wafer or the shallow hole in the substrate 2 1.3 Allows the creation of suspended or movable springs 2 1 4, 2 1 7, comb drive members 208, 209, etc. As shown in Figure 9, in the area where the structure needs to be moved, the bottom wafer or substrate 2 1 The etch depth in 3 is between 5 and 50 microns and more preferably a depression of 10 microns. Silicon dioxide with a thickness between 0.1 and 2.0 microns and preferably close to 1.0 microns is used Layer 1 71, the second or upper wafer 1 7 3 is fused to the substrate 213, and then the upper wafer 173 is honed and polished to a desired thickness. Gold 臛 is produced on the upper surface 1 7 6 of the upper wafer Layers 1 to 4 are used for electrical pads 240, 241, 242, 264, visual indicators, etc. (Please read the notes on the back first to write this page) Gutter This paper size is applicable to China National Standard (CNS) A4 Specifications (210 X 297 mm) _ 43.4 Ministry of Economy Central Standards shoulders industrial and consumer cooperation Du Yin 簟 J 6 G 2 .. β A7 _B7___ _ 5. Description of the invention (41). Finally, using the deep reactive ion etching technology, the upper crystal ring 1 3 is etched to obtain the required high form ratio structure β. The final DRIE silicon etching will stop where the silicon dioxide layer 171 exists and continue to etch to the layer. 171 does not exist in the base 2 1 3. This process results in a movable single crystal silicon structure with an air gap having a shallow hole thickness of 170, suspended on the substrate 213 and electrically insulated from the substrate. For example, the spring 2 14, 2 17, movable, The electrode assemblies 208 and 209, the rigid support 131 and the connector frame 216. Other structures such as the wire mechanism 286, 287 and the stoppers 292, 293 will be fixedly attached to the substrate 213 but electrically insulated from the substrate with a silicon dioxide layer 171 and electrically insulated from surrounding features with an air gap 175. In some applications, such as switching, independent confirmation of the position of the mirror 103 is important. When the mirror 1 0 3 in the actuator 1 0 0 is in the extended position, the movable electrode portion 2 0 8 forwardly engages the stopper 2 6 2 and engages and makes electrical contact with the stopper 2 6 1. The stopper 2 6 1 is electrically coupled to the electrical pad 2 6 4 by a wire 2 7 4, and the electrical pad 2 6 4 can be electrically coupled to the controller 1 1 1. Likewise, when the mirror 1 0 3 is held in the retracted position, the backward limiter 2 6 3 will engage and make electrical contact with the stopper 2 6 1 and thus be electrically coupled to the electrical pad 2 6 4 with a wire 2 7 4 »Therefore, the part of the movable electrode assembly 208, the shuttle 109, and the mirror 103 can be electrically sensed by the controller 111 to confirm and / or monitor the state of the micro switch 104 'limiter 262, 263 and stoppers 261, 292, and 293 are #movement stopper mechanisms included in actuator 180. This paper size applies to China National Standards (CNS) Α4 specifications (210X297 mm) _Private. _ * I, I ± III Pack I order IIIII line (Notes on the back of the poem first read the 'This page') 4 Central Industry Bureau of the Ministry of Economic Affairs, monthly consumer cooperation Du printed 9 602 ^ A7 _B7__ V. Description of the invention (42) The actuator of the invention is provided with other mechanisms for monitoring the shuttle 10 and the movable electrode assembly 208 and 209. For example, 1 controller 111 can determine the position of movable comb drive members 208a, 208b, 208c and 209a, 209b, 209c by the traditional deduction method included in the controller to measure the movable comb type. The capacitance between the driving finger member 211 and the comb-shaped driving finger members 2 1 2 of the comb-shaped driving members 210 a, 210 b, 210 c, 23 a, 230 b, and 2 3 0 c is fixed by meshing with each other. For example, a signal separated from the driving signal of the comb drive member may be transmitted from the controller 111 to the actuator to measure the capacitance. This method does not require physical contact between the electrodes *, for example, a moving stop mechanism as described above. Alternatively, during the formation of the actuator, a second and second opposite, vertical side silicon material extending along one or more spring portions or suspensions 224, 225 may be doped in the spring portion. Create a piezo resistor. The resistance change of the piezoelectric resistor corresponding to the strain change of the suspension members 224 and 225 during the deflection of the springs 214 and 217 can be measured by the traditional deduction method provided in the controller 111 to determine the shuttle 1 0 9 and the mirror 1 0 3 Position with respect to the base 213 and the fixed electrode assemblies 210 and 230》 Actuator 6 0 1 * Another embodiment of the actuator of the present invention shown in FIG. 1 is actually similar to the actuator 1 0 1 and similar reference numerals are used to describe similar elements of the actuators 10 1 and 6 0 1. As in the actuator 101, the actuator 601 includes first and second movable electrode assemblies 208, 209 and first and second detachable fixed electrode assemblies 210, 230. Mobile electrode assembly This paper is suitable for the standard of the countries with difficulty (CNS) A4 washing grid (2〗 0X 297 mm). 45 _- JJ * ~ [Install tl ni wire (Please read the precautions on the back first, write 4 (This page) Printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs 4 19 6 0 2 .4 'A7 _B7___ V. Description of the Invention (43) 208, 209 are joined together to move the beta electrode assembly 208, 209 together uniformly , 210, 230 extend perpendicular to the longitudinal centerline of the actuator and are concentrated on this centerline. The actuator 6 0 1 differs from the actuator 1 0 1 in that the first movable component 2 0 8 includes only the first comb-shaped driving member 208 a, and the first comb-shaped driving member 208 a is perpendicular to the component 208, The moving direction of 209 extends. The second movable component 2 0 9 includes only the first comb-shaped driving member 2 9 a * The first comb-shaped driving member 2 9 a extends perpendicularly to the moving directions of the components 2 08 and 2 0 9. Since the actuator 601 contains only a single comb-type drive member 208a, 209a, and the actuator 101 contains comb-type drive members 208a, 208b, 208c, 209a, 209b, 209c, the motive force provided by the actuator 101 is almost Three times the actuator 6 0 1. The suspension design of the actuator 60 1 must take this force reduction into account to achieve the required deflection. The use of a single pair of comb drive assemblies 208, 209 reduces the overall length of the actuator 601, while allowing for smaller optical micro-switches as described below. Fig. 12 is a top plan view showing a first embodiment of the optical switch 104 manufactured according to the present invention. The switch 104 contains a practically planar component or device in the form of a microchip 100, which includes less than one of twelve lateral comb drive actuators 180 and a series as shown One or more, twelve lateral comb drive actuators 180 are carried by a silicon wafer or substrate 2 1 3 with a thickness of about 500 microns. Each of the electrostatically driven actuators or motors 180 has a shuttle mechanism or shuttle 10 9 coupled to a mirror 103, and the mirror 103 is vertically arranged with respect to the base or the body 2 1 3 China National Standard (CMS) A4 grid (210X297 mm). 4g. --------;-I ^ ------ 1T ------ 0 (Please read the first Note '4 written on this page) I 6 u 2 printed by the Ministry of Economic Affairs Bureau Standards Bureau C Consumers Cooperatives A7 ______B7_ V. Description of the invention (44). The laser light 1 9 1 carried by the input optical fiber 9 8 is guided through the input of the switch 1 0 4 or the entrance port 1 5 0 before proceeding in the channel that passes the central longitudinal axis 1 1 3 of the switch 1 0 4. And through the collimating lens 1 02. Typical laser light 1 9 1, 192 used with the optical switch 10 4 may have a diameter in the range of about 100 to 200 microns. As shown in FIG. 12, the sheath of the input fiber 98 is removed at the input port 105, and then the cladding fiber 98 extends along the entrance groove 156 formed in the microchip 100 and extends into the microchip. 100. The collimating lens 102 is arranged near the trailing end of the optical fiber 98 in the preferred embodiment shown in Fig. 12 * The lens 102 is a conventional micro-gradient refractive index collimating lens. Alternatively, the lens 102 may be a conventional micro-molded lens or a conventional spherical lens and is within the scope of the present invention. The trailing end of the optical fiber 98 is tied in the switch 104 so as to be at the focal point of the collimator lens 102. The lens 10 2 is used to align the light 191 before the light enters the main channel 1 5 7 of the microchip 100. It should be understood that an optical switch without a lens 102 can be provided at the entrance of the channel 157. In addition, the aligned input laser light 1 9 1 can be guided through free space and into the input port 1 50, that is, the entrance fiber 98 is not used, and is within the scope of the present invention. In Fig. 12, the actuator or micromotor 180 is shown halfway between the rest or home position, the extended and retracted positions, as in the case of manufacture. The actuator 1 80 is divided into a first group or a plurality of six actuators 18 0 a and a second group or a plurality of six actuators 1 8 0 b. These actuators 1 8 〇a extend from the first A dashed line is spaced apart. The first dashed line is spaced from and parallel to the central longitudinal axis 1 1 3 of the microchip '1 0 0. These actuators 1 8 0 b are aligned along the scale of the paper. (CNS) Α4 size (210 X 297 mm) _ 47

--------- ^ ------ ^ ------ 1 ^ (Please read the notes on the back-write this page first) _______I 419602 Staff Consumption of the Central Government Bureau of the Ministry of Economic Affairs Cooperative Du printed equipment A7 B7 V. Description of the invention (45) The two dotted lines are spaced apart, and the first dotted line is spaced from and parallel to the central longitudinal axis 1 1 3 of the microchip 100. The actuators 180a and 180b are arranged on opposite sides of the central shaft 113 and thus face each other. The mirrors 103 of the actuator 180 are all inclined to the shaft 113 at an angle of 45 degrees and generally face the input port 150. The mirror 103 of the first actuator 180a can be used to guide the light 191 through a 90 degree angle so that the light 191 will extend on the first square meat perpendicular to the central axis and face the right side of the device. The mirror 103 of the second actuator 180b can be used to guide the light 191 through a 90 degree angle so that the light 191 will extend in a second direction perpendicular to the central axis and toward the left side of the device. Therefore • the mirror 1 0 3 of the first actuator 1 8 0 a will guide the light 1 9 1 to the direction of the mirror relative to the second actuator 1 8 0 b and the first actuator 1 8 0 The first number of six output or exit ports 1 5 1 aligned with the mirror 1 a of a are arranged on the right side of the microchip 100 and the first aligned with the mirror 1 0 3 of the second actuator 1 8 0 a Two, many and six outputs are installed on the left side of the microchip 100. The outlet groove 1 6 1 will extend from each port 1 5 1 to the channel 1 5 7 to separate the individual output fibers 9 7 Carrying to the point close to the mirror 103> The sheath (not shown) for each optical fiber 9 7 starts at the output port 1 51. It should be understood that mirrors may be provided at other inclination to each other or at other inclination angles with respect to the axis of the optical switch. The lens 10 2 is disposed between the mirror 103 and the entrance surface of the individual output fiber 97 to focus the light 1 9 1 into the fiber 97. Although the optical switch 104 is shown to be coupled to a single mode + M fiber 9 7, the switch 104 can be coupled to any suitable fiber and used in the paper standard of the present invention (CNS) A4 Zhuge (210X297 public benefit) _48 — ^ il · ϋ ^ — tif— Bn EH (Please read the precautions on the back to write this page)

• tT line 4 19 6 0 2 A7 _B7 V. The scope of the invention description (46). A pair of lenses 102 are arranged in series along the longitudinal axis 1 1 3 at the center or middle of the channel 1 5 7. The first or upper lens 102 is disposed about 4 mm below the lens 102 adjacent to the output fiber 97, and is used to refocus the laser light 191. The second or lower lens 1 0 2 in the middle of the channel 1 5 7 will be separated by the light 1 9 1 from the focal point of the upper lens 1 2 and spaced twice and used to re-align the laser light to extend the channel 1 5 The longitudinal axis 1 1 3 in the lower half of 7 travels. Printed by the Shell Sample Consumer Cooperative of the Central Sample Rate Bureau of the Ministry of Economic Affairs (read the precautions on the back and read the 4% on this page). As shown in Figure 13, during operation, the controller 1 1 1 under the instruction-specific mirror 1 0 3 a will be completely extended by the individual actuator 1 8 0 b into the position in the channel of light 191, and the remaining mirrors 1 0 3 b will be completely retracted to leave the light 1 9 under the instruction of the controller 111 In the position of the channel of "1", the light 1 9 1 will be reflected from the specific extension mirror 1 0 3 a and thus selectively guided by the mirror 1 0 3 a to the individual output port 1 5 1 and the output fiber 97 coupled thereto. . The light 19 1 leaves the output port 15 1 and may be guided through free space or by a second fiber and / or lens 9 7 to a destination. It is also possible to direct light 192 from any output port 1 51 to input port 1 50. In the above embodiments, it is known that each mirror χ 03 should be able to be displaced by at least the width of light 191 between its fully retracted and fully extended positions. The typical laser light 1 9 1 used in the optical switch 104 has a diameter in the range of 100 to 2000 micrometers. At least this more linear displacement of the mirror 1 0 3 is obtained by the actuator 1 8 0. As mentioned previously, conventional actuators typically only provide a displacement of about 40 microns at reasonable switching speeds. This paper size is applicable to the Chinese National Standard (CNS) A4 Zhuge (210X297 mm) [49-~~ 4 1960 2 .-4 Α7 Β7 V. Description of the invention (47) Printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Install I— -------—- Install-I (please read the note on the back first '^ Writing tile) Because the present invention uses a mirror 1 0 3 for input port 1 50 and special output port 1 5 1 The light is coupled between 191, so the quality of the mirror used is important. In order to minimize the loss of light due to absorption, scattering, and defocusing, the surface of the mirror 1.0 3 must be reflective, smooth, and flat. For less important applications, mirrors 103 can be formed in place as vertical walls of the etched surface during device fabrication. Mirrors 1 0 3 can be made separately from very thin silicon wafers. • Then, as shown in Figure 10 for actuator 6 0 1 * Aligned and attached with any suitable adhesive 6 8 8 The bracket 2 1 on the extension 2 1 8, for example, a suitable adhesive 6 8 8 may be Norland ΝΑ 123M sold by Norland Produc ts of New Brunswick, NJ., Which is a UV-initiated adhesive . The mirror 10 3 may be made of a thin silicon wafer 6 9 1 having a layer 6 9 2. The layer 6 9 2 is provided with any suitable reflective gold foil, such as gold, which is fixed to the wafer 691 with a thin adhesive layer 693, which is adhered. The layer 693 is made of metal or any other suitable material. Other suitable reflective materials for layer 6 9 2 include aluminum and silver, and other suitable materials for adhesive layer 6 9 3 include titanium β-silicon. The thickness of the pattern 691 is in the range of 20 to 300 microns and is preferably about 80 microns, and the thickness of the reflective layer ranges from 0.05 to 0.30 and is preferably about 0.15 microns. The adhesive layer has a thickness of about 0.005 microns. The metal layer is deposited in such a way that the internal stress remaining at room temperature is minimal. The large ratio of silicon thickness to the thickness of gold tin also minimizes the bending of the mirror caused by the different thermal expansion rates of the coating layer and silicon. The mirror caused by β is characterized by the reflectivity of gold or other reflective metals and polished silicon Low surface roughness and high flatness. This paper uses the standard of the solid state of China (CNS > A4Λ1 (210 × 297 mm) · 50- 419602 A7 B7 V. Description of the invention Us) Other layers or coating layers can be optionally deposited on the reflective layer 6 9 2 In order to increase the reflectivity of the mirror 103, in the mirror 10 shown in Fig. 10, multiple dielectric pairs 6 9 6 have been deposited on top of the reflective layer. Each pair of 6 9 6 series Consists of a layer 6 9 7 having a relatively high reflectance deposited on a layer 6 9 8 having a relatively low reflectance. In the case where the mirror 1 0 3 is used for an optical micro switch such as a micro switch 1 8 0, the layer The thicknesses of 6 9 7 and 698 are equal to one-fourth of the wavelengths of the electro-optic light 191 and 192. Suitable materials for layer 6 97 include cerium oxide and titanium oxide, and suitable materials for layer 6 98 include magnesium fluoride and silicon dioxide. The optical switch of the present invention with other micro-actuator configurations can be used to selectively guide the laser light 1 9 1 redirected into the switch by the input fiber 9 8. The optical micro-switch 8 shown in FIG. 1 4 30 is formed from microchip 831, and microchip 831 is made from any suitable mechanism such as the switch 104 described above. Similar reference numerals are used to describe similar components of the miniature switches 104 and 830. The optical switch 8 3 0 includes an inlet port 8 3 2 and a plurality of external or exit ports 8 3 3 coupled to the inlet fiber 9 8. The outlet port 8 3 3 is spaced along one side of the switch 8 3 0 and is coupled to an individual Output fiber 9 7. The central longitudinal axis 8 3 6 extends along the central channel 8 3 7 of the switch 8 3 0 in a manner parallel to the inlet port 8 3 2 and perpendicular to the outlet port 8 3 3 '• The first numerous eight actuators or miniature actuators The actuator 1 8 0 a is longitudinally spaced along the first dotted line, and the first dotted line will extend parallel to and spaced from the central axis 8 3 6 of the optical switch 8 3 0. The second plurality of four actuators or micro-actuators 1 8 0 b will be longitudinally spaced along the second dashed line, and the second dashed line will be parallel to and spaced from the axis 8 3 6 in the paper standard. (CNS > 8 4 specifications (210X297 mm) -51 — Book II-I —I —]-^^ 1 I {Please read the precautions on the back first 't write this page) Central Sample Rate Bureau, Ministry of Economic Affairs Printed by Pui Gong Consumer Cooperatives *. Printed by the Ministry of Economic Affairs and printed by the negative consumer co-operative cooperatives 419602 A7 B7 V. Description of the invention (49) The method is extended. The longitudinal axis 8 3 6 will extend between the first group of actuators 1 0 0 a and the second group of actuators 1 8 0 b. In this way * the actuator or micromotor 1 8 0 a will actuate Or micro motors 1 0 0 b opposite. The actuator 180a includes a mirror 103a mounted on the bracket 2 1a, and the actuator 180b includes a mirror 103b mounted on the bracket 219b. The motors 103a, 103b are practically similar to those described above. Motor 103. The mirrors 103a, 1.0 3b generally face the input port 8 3 2. The lens is arranged between each mirror and the groove 8 3 8 for carrying the optical fiber 97 to a separate exit port 833. The mirrors 103a and 10 3 b are inclined at an angle of 45 degrees with respect to the longitudinal axis 8 3 6 so as to guide the laser light impinging on it 1 9 1 through an angle of 90 degrees. The bracket 2 1 9 a in each actuator 10 8 a is formed as a mirror 1 0 3 a mounted thereon, which deflects the laser light 191 in a forward direction with respect to the actuator 1 8 a. The bracket 219b in each actuator 108b is shaped as a mirror 1 0 3 b mounted thereon, which deflects the laser light 19 1 in a direction toward the actuator 1 8 0 b. In this way, the mirrors 103a, 103b each deflect the laser light 191 in a plurality of parallel directions, and thus are in a single direction, so that the laser light always leaves from one side of the optical switch 830. The micro-actuators 1 8 0 a are arranged along the first dotted line of the micro-chip 8 3 1 in four groups of back-to-back pairs. In this way, the extension 218a, the bracket 219a, and the mirror 103a of each adjacent pair of actuators 180a are disposed along the joint side of these actuators 180a. This configuration of the actuator 1 8 0 a in the microchip 8 31 allows two end mirrors 1 0 3 a to be placed close to the center of the micro switch 8 3 0 to reduce the micro paper size. Furniture standard (CNS > A4 specifications < 210X297 mm) ~~. «-'L ------- ^-^ ------ 1T ------ line (please first «Read the note on the back, and _.v write this page) Seal 19602 ^ A7 __B7_____ of the invention description (50) type of laser light channels in the switch (50) type switch length. As a result, the input collimator lens 102 can be disposed further inside the micro switch 830. The back-to-back configuration of the actuator 180a also allows the two center lenses 102 to be placed at the most central front of the two actuators 180a. * Allows further reduction of the channel length of the laser light 191, 192. The light 191 travels from the input port 832 along the central longitudinal axis 8 3 6 until it engages the mirrors 103a, 103b selected by the controller 1 11 and the mirror 103a of the first actuator 180a and the shuttle 1 0 9 It can be moved from the 1st or the retracted position of the mirror 1 0 3 to the path of the laser light 1 9 1 to the mirror's reflective surface to the second or extended position of the laser light path | in order to guide the laser light through the individual Exit port 833 The mirror 103b and shuttle 109 of the second actuator 180b can be moved from the first or retracted position of the path of the mirror 1 0 3 b to the laser light 1 9 1 to the reflecting surface of the mirror and placed on the laser light 191 The second or extended position in the path. The extension 2 1 8 and the bracket 2 1 9 series of each actuator 1 0 0 b are configured to leave the path of the laser light 1 9 1 when the mirror 1 0 3 b is in its retracted or off-path position. Since the mirror 1 0 3b and the bracket 2 19b are aligned with respect to the incoming laser light 1 9 1, the actuator 1 8 0 b requires more movement or deflection than the actuator 1 8 0 a to move the mirror 1 0 3 b and the bracket 2 1 9 retract the path of the laser light 1 9 1. For example, actuator 180b in Figure 13 requires an additional 50 micron deflection compared to actuator 1.80a. Therefore, the comb-shaped driving finger members 211, 212 in the comb-shaped driving assembly for actuating the helmet 180b are faster than the actuator. This paper scale uses the Chinese National Standard (CNS) A4 specification (210X297 mm) _ 53- -------- ^ ------ tr ------ ^ (Please read the notes on the back, write this page first) Printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs 419602 A7 B7 V. Description of the invention (51) The corresponding components in 1 8 0 a are longer. The increase in size makes the actuator 1 8 0 b require a larger driving voltage β. In many parallel directions, the optical switch 8 3 0 The direction of the laser light 1 9 1 outward, and thus a single direction, will reduce the complexity of the optical data storage system 9 5 with the switch 8 3 ◦ placed therein. Fig. 15 shows another optical switch, which selectively guides the input laser light 191 from one side of the optical switch in a single direction outward. Among them, the optical micro switch 8 51 is similar to the optical micro switches 104 and 8 30 and similar reference numerals are used to describe similar components of the micro switch 104, 8 3 0, and 8 51. The elongated optical switch 8 5 1 is formed by a microchip 8 5 2 which has an inlet port 8 5 3 at one end and a plurality of twelve output ports 8 5 4 at one side * 5 The axis 8 5 6 extends along the channel 8 5 7 of the optical switch 8 5 1 parallel to the inlet port 8 5 3 and perpendicular to the outlet port 8 5 4. The switch 8 5 1 has two sets of lens pairs 1 0 2 arranged in the channel 8 5 7 so that when the light 1 9 1 travels upward through the channel 8 5 7, the laser light 1 9 1 is refocused and re-aligned. The group lens pair 102 divides the channel into three sections each having a length of about four millimeters. A plurality of twelve actuators 180 are arranged in a longitudinally spaced manner along the dotted line, and the dotted line extends parallel to and spaced from the longitudinal axis 8 56. The actuators 180 each have a mirror 103 'which is tilted at an angle of 45 degrees relative to the longitudinal axis 8 56 to redirect the laser light through an angle of 90 degrees. Each mirror 1 8 0 of the actuator 1 0 3 is mounted on the bracket 2 1 9 and thus guides the laser light 1 9 1 through a position adjacent to the paper. The Chinese national standard (CNS > Λ4 spider grid (2 丨 0X297 mm) ^ 54- '--------- install -------- order ------ line (please read the note on the back first' t copybook Page) ____. 41 9602 «ΐ Central Government Bureau of the Ministry of Economic Affairs of the Central Bureau of Shellfish Consumer Cooperatives 辇 Α7 Β7 V. Description of the invention (52 > Individual exit port 8 5 4 at the rear end of the actuator 1 8 0 and return to actuation器 180。 The entrance optical beam 98 is coupled to the entrance port 853, and the exit fiber 9 7 is coupled to each exit port 8 5 4 »The lens 1 〇2 is arranged between each mirror and the groove 8 5 8 The optical fiber 97 is carried to the individual exit port 854. The mirror 103 can be moved between the first or retracted position and the second or extended position by the shuttle 10 of the individual actuator 180, and the first or retracted position In position, the mirror 1 0 3 is the path away from the laser light 1 9 1 * In the second or extended position, the mirror 1 0 3 is in the position of the laser light 1 9 1. It should be understood that the optical switch 8 3 0 can be set There are actuators 180 to direct the laser light 191 to the The front of the device is within the scope of the present invention. The design of the optical switch 8 5 1 can efficiently use the surface area of the substrate 2 1 3 "FIG. 16 shows another embodiment of the optical switch of the present invention, wherein The separated laser light 1 9 1 only exits from a single side of the optical switch. The optical switch 9 0 1 is formed by a microchip 902. The microchip 902 has a single input port 903. The input port 903 is coupled to the microchip. The input fiber 9 8 »groove 9 0 6 on one side of the 902 is provided in the microchip 9 0 2 to carry the input optical weave 9 8 from the inlet port 9 0 3. Many twelve 12 coupled to the PM fiber 9 7 Port 904 will be spaced on the same microchip 902 side as input port 903. Actually, the first and second direction motors 907 and 908 of the mirror 103 are included in the optical switch 901. Within the mechanism to guide the laser light staggered 1 9 1 downwardly extending channel 9 1 1 or upwardly extending channel 9 1 2 respectively extending along the microchip 0 0 2 1. Channels of this paper are selected from China Standard (CNS > A4 * t (210X297 mm) · Station · —--------- Installation— (Please read the precautions on the back / Λ- This page)

1ST Line Ministry of Economy 4-Central Bureau Quasi Bureau Yigong Consumer Cooperative Co., Ltd. ¾ 4 1 b 6 Ο 2 '^ A7 ____B7_ _ V. Description of the invention (53) 9 12 will extend along the individual vertical axis 9 13, 9 14 The longitudinal axes 9 1 3 and 9 1 4 extend spaced apart from each other and parallel to each other and extend spaced apart from and parallel to the sides of the microchip 90 2. The mirrors 907, 908 are inclined at a 45-degree angle with respect to the axes 913, 914, and both face the entrance port 903. The horizontal axis 9 16 will extend from the entrance port 903 across the microchip 902β perpendicular to the axes 913 and 914. The first direction motor 9 0 7 is attached to the actuator 6 0 1 and can be the first or The retracted position moves up and down between the second or extended position. In the first or retracted position, the mirror 907 is in an upward position away from the path of the laser light 191 extending along the horizontal axis 916. In the second or extended position, the mirror 9 0 7 is in a downward position within the path of the laser light 1 9 1 and is thus used to deflect the laser light by a 90 degree angle so that the light 1 9 1 will extend along the first A path extends downward, and the first path extends along the first longitudinal axis 913 of the switch. The second direction motor 9 0 8 is disposed behind the first mirror 9 0 7 and is firmly mounted to the micro chip 9 0 2 by a bracket 9 1 7 etched from the micro chip 9 0 2. When the first mirror 9 07 series is in its retracted position, the input laser light 1 9 1 will engage the mirror 908. The second mirror 908 is used to guide the light 191 upward through an angle of 90 degrees, so that the light travels along the second channel, which extends along the second longitudinal axis of the microchip 902. The plurality of first actuators 18 0 a are longitudinally spaced along a first dashed line, and the first dashed line extends parallel to the first longitudinal axis 913 'at least one second actuator and a single actuator 1 8 as shown 0 b will match Zhan to the second dotted line. The second dotted line will also extend parallel to the longitudinal axis 9 1 3. Four actuators 1 8 0 a This paper size applies to China National Standard (CNS) A4 (210X 297 mm) 56 _ -------------- tr ----- -^ (Please read the note on the back "write this page" '.. / Printed by the Consumer Affairs Cooperative of the Central Government Bureau of the Ministry of Economic Affairs 419602 4 A7 £ 7__ 5. Description of the invention (54) is actually relative to the second The actuator 1 8 〇b and the longitudinal axis 9 1 3 extend between the actuators 180a and 180b. The first actuator 180a includes four actuators 84 1, 8 42, 843, and 844. They are dependent on Sequentially, the first dotted line extends longitudinally from above to the bottom of the lower channel 8 3 7. The actuators 8 4 1 and 8 4 2 are arranged side by side along the first dotted line so that the extension 2 18 thereof is extended. Adjacent sides of the actuators 8 4 1 and 8 4 2 extend parallel to each other. The actuators 8 4.3 and 8 4 4 are similarly arranged along the first dashed side so that their extensions 2 1 8 will The adjacent sides of the actuators 843 and 844 extend parallel to each other. The plurality of third actuators 1 8 0 c are longitudinally spaced along a third dotted line, and the third dotted line extends parallel to the second longitudinal axis 914. At least one fourth actuator and as The single actuator 1 80 d shown is arranged above the fourth dotted line, which also extends parallel to the second longitudinal axis 9 1 4. Generally speaking, the first and second actuators or micro-actuations The actuators 180 a and 180 b are arranged on one side of the horizontal axis 9 1 6 so that the third and fourth actuators or micro-actuators 1 8 0 c and 1 8 0 are on half of the microchip 9 0 2. d is disposed on the other side of the horizontal axis 9 1 6 so as to be on the other half of the microchip 9 0 2. More specifically, the configuration of the actuator centered on the vertical axis 9 1 4 is the lower vertical axis 913 The mirror image of the configuration of the central actuator. Thus, the four actuators 18 0 c are actually relative to the fourth actuator 18 0 d and the vertical axis 9 1 4 is at the actuator 1 8 0 c and actuator 1 8 0 d. The third actuator 1 8 0 c has four actuators 8 4 1 — 8 4 4 which extend sequentially from the bottom of the upper channel 9 1 2 to the top. It is spaced longitudinally along the third dashed line. This paper size is applicable to countries and countries (CNS > Α 相 t 格 (210X297 公 漦) .g7 _

Jr -------- ^ ------ 1T ------ line (please read the note on the back first 1-4 nests on this page) Shellfish Consumer Cooperative of Central Bureau of Ministry of Economic Affairs Printed A7 __Β7_ 5. Description of the invention (M) The actuators 180a-180d all have a mirror 103, and the mirror 103 series can be moved between the first or retracted position and the second or extended position. The retracted position is no longer laser light 1 9 1 redirected or deflected by the first directional mirror 9 0 7 to the third and fourth actuators 1 0 0 c, 1 8 0 d or by the second directional mirror 9 0 8 Redirected and deflected to the path of the first and second actuators 180a, 180b, in the second or extended position, the reflective surface of the mirror 103 is arranged in the path of the laser light 191. These mirrors 103 generally face the directional mirrors 907, 908 and are all inclined at an angle of 45 degrees relative to their respective first longitudinal axis 9 1 3 or second longitudinal axis 9 1 4 to reflect relative to This vertical axis guides the laser light 191 through a 90 degree angle. More specifically, each mirror is angled to selectively guide the laser light 191 in a single direction through a separate exit port 9 0 4 on one side of the optical micro switch 9 0 1. The deflected laser light is received by the collimator lens 102. The collimator lens 102 then transmits the laser light to one of the output fibers 97. The groove 9 2 7 is provided in the microchip 902 to carry the optical fiber to the individual outlet port 904. As described above, the micro-actuators 1 8 0 a and 1 8 are arranged in two sets of back-to-back pairs along the individual walkways 911 and 912 in the same manner as the micro-actuators 180 a of the optical micro-switches 830. 0 c. This configuration of the actuators 180a, 180c in the microchip 902 allows the mirrors of the actuators 8 4 4 in the lower and upper channels to be located closer to the individual directional mirrors 907, 908 to reduce the number of micro switches 901. The path lengths of the laser lights 191 and 192 are zero and increase the coupling efficiency of the switch 901. The back-to-back paper scales of the actuators 180a and 180c use the Chinese S-standard (CNS) A4 size (210X297 mm) ~~ _58: ------- ^-I 私 衣 ------ ΐτ ----- (Please read the precautions on the back., f write this page} -----.-^ l · _____ 41 9602 A7 B7 Central Ministry of Economics, Prospective Employees ’Cooperation on Consumer Goods Description of the invention (56) 1 1 The configuration also allows the actuator 6 0 1 to be located in front of the actuator 8 4 1 »Allows 1 1 to further reduce the laser light 1 9 1, 1 9 2 in the micro switch 9 0 1 Path length 〇 I 1 Mirror 9 3 1 will be firmly mounted to the microchip 9 0 2 Q by mounting the bracket formed by etching from the microchip 1 1 9 0 2 at the lower end of the lower channel 9 1 1 first. I 1 mirror 9 3 1 is arranged at the first and second actuators 1 8 0 a, 1 8 0 b Note 1 1 below the mirror 1 0 3 and at the lowest actuator 1 8 0 a Before. Mirror 9 3 1 Item 1 I is tilted at an angle of 45 degrees with respect to the longitudinal axis 9 1 3. Seta First and Second Actuating Notebooks I 1 0 0 a% 1 8 0 b The mirrors 1 0 3 are in the retracted position. The light sheet I 1 shoots light 1 9 1 and will be deflected by the mirror 9 3 1 at an angle of 9 0 degrees to leave the first-actuate 1 1 The direction of 1 8 0 a goes up through the collimating lens 1 2 and enters the lion out fiber 9 7 extending through the mt 1 output port 9 0 4. The upper channel 9 before I is ordered by the three actuators 1 8 0 c 1 2 The top bracket 9 4 4 Similar mirror 1 1 I 9 4 3 can be firmly mounted to the microchip 9 0 2. The mirror 9 4 3 operates in the same way as the mirror 9 3 1 in actual 1 1 1 And when the mirrors 1 0 3 of the first and second actuators 1 1 1 0 0 C, 1 8 0 d are in the retracted position, f is used to deflect the laser light 1 9 1 through the individual output ports 9 0 4 ° The mirrors I 1 0 3, 9 3 1 and 9 4 3 deflect the laser light in many parallel directions 1 1 and are therefore unidirectional-so that the laser light 1 9 1 is always switched from the optical micro 1 J switch 9 0 1 of — Side leave 0 Use fixed mount mirror 9 3 1 1 1 9 4 3 In place of — micro-actuators and attached movable mirrors, you can go — I step to reduce the length of the channel 9 1 1 9 1 2 and thus reduce the laser light 1 I 1 9 1% 1 9 2 The path length is as you see. Y Use optical switch 1 1 9 0 1 to selectively guide the laser light 1 9 1 to twelve output fibers 1 1 1 This paper size applies to China National Standard (CNS) A4 Xiege (210X 297mm). = 9- Printed by A7 _B7_, the Shellfish Consumer Cooperative of the Central Bureau of Economic Affairs of the Ministry of Economic Affairs. 5. One of the invention description (57) 9 7. The optical micro switch 9 0 1 is beneficial to reduce the laser light 1 9 1 or the laser light 1 9 2 must travel the maximum path of the optical switch. The directional mirrors 9 0 7, 908 deflect the laser light 19 1 through one of the channels 9 11 and 9 12. The channels 911 and 912 are all longer in length than the channel 157 of the switch 104, the channel 837 of the switch 830 and the channel of the switch 85 1. 8 5 7 short. This reduced path length increases the coupling efficiency of the switch 901. It should be understood that * other embodiments of the optical switch of the present invention may have further subdivided portions of the actuator to minimize the maximum path of laser light 191, 192. An optical micro-switch similar to any of the above-mentioned switches may have an optical component similar to the laser optical component 96 integrated on the microchip of the optical switch described above. The optical microswitch 1051 shown in FIG. 17 is formed of a microchip 1052, and the microchip 1052 is made of any appropriate mechanism such as the switch 104 described above. The micro switch 1 0 5 1 is similar to the above-mentioned switches 104 and 8 30 and uses similar reference numerals to describe similar components of the switches 104, 830, and 1051. The micro switch 1051 includes an inlet port 1053 and a plurality of outlet ports 1054 extending on both sides of the switch 1051. The exit port 1054 will be coupled to a separate output fiber 9 7, a part of which is shown in FIG. 17 * each output fiber 9 7 will extend through the individual exit port 1 0 5 4 to the microchip 1 0 5 Channel or groove in 2 1 0 5 6. The central vertical axis 1 0 6 1 extends from the entrance port 1 0 5 3 and extends along the central channel 1 0 6 2, and the central channel 1 0 6 2 extends longitudinally through the microchip 1 0 5 2橾 牟 （CNS > A4 Washing (210X297mm) _ g〇IJ ~, Yi Yi I, 1T- ^ (Please read the notes on the back first '^ Write this page) 419602 A7 B7 is printed on the center of the industrial and consumer cooperatives. 5. The center of the invention description (58). The first numerous actuators or microactuators 1 8 0 a will be longitudinally spaced along the first dotted line, which is connected to the central axis. 1 0 6 1 parallel and spaced extension. The second plurality of actuators or micro-actuators 1 8 0 b are longitudinally spaced along a second dotted line, and the second dotted line is parallel to the axis 10 6 1 Extended in a spaced manner. The central longitudinal axis 1 0 6 1 will extend between the first actuator 1 8 0 a and the second actuator 1 8. 0 b. 'The first actuator 1 8 0 a and The second actuators 18 0 b are opposed to each other with respect to the longitudinal axis 10 6 1. Although six second actuators 180 b are provided in the switch 1 0 5 1, a single or any plurality of actuators may be provided. Actuator 180. The first plurality of actuators 18 0 a and the second plurality of actuators 1 8 0 b each include a mirror 1 0 3 mounted on a bracket 2 19. The mirrors 1 0 3 are at 45 degrees. The angle is inclined with respect to the longitudinal axis 1 0 6 1 so as to substantially face the entrance port 1 0 5 3 and guide the laser light 1 9 1 with respect to the axis 1 06 1 through an angle of 90 degrees. The redirected laser light 1 9 1 will reflect from each mirror 1 0 3 and leave the individual exit port 1 0 5 along the path extending in front of the actuator 1 0 0. The mirror 1 0 3 can be shuttled by the individual actuator 1 8 0 1 0 9 is driven to move between the first or retracted position and the second or extended position. In the first or retracted position, the mirror is a path away from the laser light 191, and in the second or extended position, The mirror is arranged in the laser light path extending from the entrance port 105. The mirror 106 is fixedly mounted to the microchip 1102 by a bracket 106 at the top of the channel 1062. When the mirror and paper sizes of the first and second actuators 180a and 180b are in accordance with the Chinese National Standard (CNS > A4 size (210 × 297 mm) „61-丨 | IIII II II order — II —1 I line ( Please read it first Note on the side-, V write this page) Printed by the Consumers' Cooperatives of the Ministry of Economic Affairs of the People's Republic of China 11 4 19602, ^ ® A7 B7 V. Description of the invention (59) 1 0 3 0 6 7 is used to deflect the laser light 19 1 through the individual output port 1054. Mirror 1 0 6 7 eliminates the need to use an actuator in optical switch 1 0 51, and by doing so, it can reduce the complexity of switch 1 0 5 1 and reduce the accuracy of laser light passing through switch 1 0 5 1 Straight path. The laser micro-optical mechanism containing the laser micro-optical component 1 0 7 1 will be mounted on the base 2 1 3 at the bottom of the micro-chip 1 0 5 2 before the inlet port 10 5 3. A miniature optical component 1 0 7 1 such as a laser optical component 9 6 includes a collimating optical lens 1 0 7 2 which is practically similar to a collimated light member 2 3 4 from a linearly polarized laser source 2 3 1 and a focusing lens (Not shown) Receives laser light. The module 1 0 7 1 further includes a low-wavelength dispersion leak splitter 1 0 7 3 which is actually similar to the above-mentioned splitter 2 3 2. The module 17 0 1 has a quarter wave plate 1083, an optional half wave plate 1084, a polarization beam splitter 1086, and a light detector 1 087, which are actually similar to the quarter wave plate 2 3 8 described above. The light detector 1087 converts the received light signal into an electric signal. Each element of the miniature optical module 1 0 7 1 can be mounted to the substrate 2 1 3 by an appropriate mechanism. For example, a recessed wall or socket such as socket 1 0 8 8 for aligning the optical lens 1 7 2 • Can be provided in the base 2 1 3 to accommodate each component of the component 1 70 1 It is fixed in the individual concave wall by a suitable mechanism such as an adhesive and / or a spring 1089. A plurality of grooves 1 0 9 1 are provided in the micro wafer 1 0 5 2 so that the laser light passes through the micro optical module 1 0 71. As is known in this art, different designs of wave fel 0 8 3, 1084, polarizing beam splitter 1086 and detector 1087 will be installed by I ^-{Please read the precautions on the back first '' 4Write this page )

* 1T paper size is applicable to China National Kung Fung (CNS) A4 specifications < 2 丨 0X297 mm) • 62- Shellfish consumer cooperation cooperation with Central Government Bureau of the Ministry of Economic Affairs, printed A7 B7 V. Description of invention (60) Poor The motion signal is used to measure the optical power of the reflected laser light 1 9 2 bis orthogonal polarization component relative to the input laser light 1 9 1. The differential signal is used to sensitively measure the MO disc 1 〇7 The rotation of the polarization induced by the Kerr effect at 108 points on the individual surface. This differential signal can be processed by a differential amplifier 2 3 7 and output as a telecommunication signal. Including a micro-optic component 1 0 7 1 on the microchip 10 5 2 can simplify the alignment of the component 1071 with other optical elements of the transflective lens 102, the mirror 103, and the switch 1051. In a precise manner, DR IE etches the concave walls or other features of the substrate 2 1 3 used to align the components of the miniature component 1 0 1 on the substrate. Micro-optical modules similar to module 1071 can be provided in other switches herein and are within the scope of the invention. For example, this component may be provided on the microchip 9 0 2 of the optical micro switch 9 0 1 shown in FIG. 16 »formed by the micro chip 1 0 9 7 and actually the same as the micro switch 9 0 1 The optical micro switch 10 0 6 is shown in FIG. 18. Similar reference numerals are used in FIG. 18 to illustrate similar components of the optical microswitches 9 0 1 and 10 9 6. The miniature optical module 1 0 7 1 is installed between the second and fourth actuators 18 Ob and 18 0 and in front of the miniature actuator 6 0 1 which is connected to the first directional mirror 9 0 7. Wafer 1 0 9 7. Optical micro switch 1 0 9 6 is beneficial to provide output optical fiber 9 7 and contains micro optical component 1 0 7 1 on the micro chip 1 0 9 7, each output fiber leaves on the same side of the micro chip 1 0 9 7 \ The two-channel design of the micro switch 1 0096 and the tightly packed paper size of the mirror 103 in each channel are in accordance with the Chinese national standard (CNS > A4 specification (210X297 mm) _ 1 .----- --- Packing-- (Please read the notes on the back first, and voicing this page) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, 41 9602., Α7 Β7 V. Description of the invention (61) Provides the increased coupling efficiency of the switch 1 0 9 6 ° Figure 19 shows an optical micro switch with another micro optical component similar to the component 1 107. Among them, the optical micro switch 1 1 0 1 is composed of a microchip 1 1 The optical microswitches 901 and 1096 'microchips 1102 formed and similar in many respects here are made of any suitable mechanism such as the reference optical microswitch 1 104 above. Actually similar to the mirror 1 0 described above. 3 of the first and second directional mirrors 1 1 06, 1 1 0 7 are included in the optical switch 1 1 〇1 The mechanism or component guides the laser light in a staggered manner 1 9 1 runs down the microchip 1 1 〇2 the channel 1 extending downward 1 1 1 1 or the channel 1 1 12 extending upward. Channel 1 1 1 1, 1112 will Extending along the individual longitudinal and longitudinal axes 1113, 1114, the individual longitudinal axes 1113, 1114 are spaced apart and extend parallel to each other and parallel to the sides of the microchip 1102. The mirrors 1106, 1107 are at an angle of 45 degrees relative to the individual The axes 1113, 1 1 1 4 are tilted. The horizontal axis 1 1 1 6 will extend across the center of the microchip 1102 perpendicular to the axes 1113, 1114. The first directional mirror 1 1 0 6 is attached to the actuator 6 0 1 and Operate in the same way as the directional mirror 9 0 7 in the first actuator 9 0 1. When the first directional mirror 1 1 0 6 is in its retracted position, the input laser light 1 9 1 will engage the first The two-way mirror 1 1 07, the second-way mirror 1 107 is actually the same as the second-way mirror 908 of the actuator 901. The second-way mirror 1 107 will use the bracket 1 etched from the microchip 1 1 2 1 1 7 and securely mounted to the microchip 1 1 02 and operated in the same manner as the second directional mirror 9 0 8 to guide the laser light 1 9 1 through a 90 degree angle so that Light will be extended to the size of this paper. Applicable to China National Standard (CNS) Α4 size (210X297 mm) · 64 _ ---------- ^ ¾ ------ tr ------- line {Please First read the note on the back ^ 1 write this page) Printed by the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 printed by the Consumer Cooperative V. Invention Description (62) The second path travels along the microchip 1 1 〇 The second vertical axis of 2 is 1 1 1 4. The many first actuators 6 0 1 are arranged along one side of the lower longitudinal axis 1 1 1 3 and the many second actuators 6 0 1 b are arranged along the opposite side of the shaft 1 1 丄 3, so that The laser light 191 deflected by the first directional mirror 1 106 may extend between the first and second actuators 601a and 601b. The first and second actuators 6 0 1 a, 6 0 1 b will therefore face each other with respect to the longitudinal 1 1 13. More specifically, the first actuator 6 0 1 a includes a plurality of actuators spaced longitudinally along the shaft 1 1 1 3. As shown, the first actuator 6 0 1 a includes first and second sets of actuator pairs 1 1 2 3 longitudinally spaced along the longitudinal axis 1 1 1 3. Each actuator pair 1 1 2 3 includes first and second actuators 1 1 2 3 a and 1 1 2 3 b arranged side by side along a dotted line. The dotted line is perpendicular to the longitudinal axis. 1 1 1 3 extended. With respect to the shaft 1 1 1 3, the first actuator 1 123a is disposed after the second actuator 1 123b. In this way, the second actuator 1 1 2 3 b extension 2 1 8 will extend along the actuator 1 1 23a toward the front of the actuator 1 1 23b, ending at almost equal to the first actuator 1 1 2 3 The point at which the extension of a extends 2 1 8. The mirrors 1 0 3 of the first and second actuators 1123a, 1123b are arranged in close proximity to each other at each longitudinally spaced position along the axis 1 1 1 3. Each of the first and second actuators 1 1 The mirror 103 of 2 3 a, 1 123b can be moved by the actuator from the first or retracted position to the second or extended position, and the first or retracted position is the path away from the laser light -------- ^ ------ ΐτ ------. ^ (Please read the note on the back τ ^ first write this page) The paper size is universal t country country kneading rate (CNS) Α4 size (210 × 297 mm) -65 -41 9602 "" a7 B7 5. Description of the invention (63), the second or extended position is arranged in the path of the laser light 191. The brackets 2 1 9 are inclined at an angle of 45 degrees with respect to the axis 1 1 1 3 to guide the laser light 1 9 1 through a 90 degree angle. The deflected laser light will extend toward the front of the actuator so that it is received by the collimating lens 10 2, which will then emit the laser light 1 9 1 to one of the output fibers 9 7. A channel 1 1 2 6 is set in the microchip 1 102 to receive the output optical fiber 9 7. The channel 1 1 2 6 will extend to the output port 1 1 27 provided on the side of the microchip 1 10 2. The second actuator pair 1 1 2 3 of the first actuator 60 1 a is arranged below the first actuator pair 1 1 2 3 of the first actuator 6 0 1 a. "Central Ministry of Economic Affairs The second actuator 601b printed by the local shellfish consumer cooperative includes a single actuator pair 1 123, and the single actuator pair 1 1 2 3 is an upper actuator 1 arranged on the first actuator 6 0 1 a. 1 2 3 between the collimating lens 1 2 and the collimating lens 1 1 2 3 associated with the lower actuator pair 1 1 2 3 of the first actuator 6 0 1 a. The collimating lens pair 1 0 2 is arranged relative to the mirror 1 0 3 of the second actuator 6 0 1 b to inject individual laser light 1 9 1 into individual output fibers 9 7. These fibers 9 7 will Extending through individual channels 1 1 2 6 to individual output ports 1 127 provided on the microchip 1 102 side opposite to the output port 1 1 2 7 corresponding to the first actuator 6 0 1 a. The mirror 1 13 1 is firmly mounted on the microchip 1 1 2 by a bracket 1 1 3 2 etched from the microchip 1 1 2. The mirror 1 1 3 1 is actuated at the tail end of the lower channel 1 1 1 1 under the mirror 103 of the first and second actuators 601a and 601b and below the first actuator 6 0 1 纟. Device in front of 1 1 2 3. Mirror 1 1 3 1 is at a 45 degree angle relative to the vertical -66- (Please read the precautions on the back to fill out this page) This paper size uses the Chinese sample rate (CNS > grid (210X297)) 9 B 0 A7 B7 V. Description of the invention (64) The axis I 1 1 3 is tilted. When the first and second actuators 6 ◦ 1 a and 6 0 1 b are in the retracted position, Lei The incident light 1 9 1 is deflected by the mirror 1 1 3 1 by a 90 degree angle so as to travel in a direction away from the first actuator 6 0 1 a and pass through the collimating lens 1 0 2 into the output port 97 extending through the output port 1127. A plurality of third actuators 6 0 1 c and a plurality of third actuators 6 0 1 c on the side of the upper vertical axis 1 1 1 4 are disposed above the first actuator 6 0 1 a. A plurality of fourth actuators 601d are arranged above the two actuators 6 0 1 b. The third and fourth actuators 601c and 601d each include a single actuator having first and second miniature actuators 1123a and 1123b. Or micro-actuator pair 1 1 2 3. The laser light 1 9 1 deflected by the second directional mirror 1 1 0 7 will extend between the third and fourth actuators 601c, 601d, and the third and fourth actuators. Actuators 601c, 601d are relative to the upper vertical Axis 1114 is opposite to each other, printed by the Central Bureau of Standards, Ministry of Economic Affairs, Shellfish Consumer Cooperatives (please read the precautions on the back first, write this page). The mirror 1 143 is firmly mounted to the microchip 1 102 by a bracket 1 1 4 4 at the top of the upper channel 1 1 1 2 in front of the third actuator 601 c. Mirror 1 143 will actually operate in the same manner as mirror 1 13 1 and will be used to deflect laser light 191 through individual output ports when the mirrors 103 of the first and second actuators 601c, 601d are in the retracted position. 1 1 27. As seen * Optical switch 1 101 can be used to selectively guide laser light 1 9 1 to one of twelve output fibers 9 7 0 micro-optical components 1 0 7 1 series mounted on the first three actuators 601a, 601c and connected to the first directional mirror 1106 This paper size uses the Chinese National Standard (CNS) A4 wash case (210 X 297 mm) _ 6 419 602 A7 _B7_ V. The description of the invention (65) Above the microchip 1 IO2 before the actuator 601. For the same reason as discussed above with respect to the optical switch 1051, it is advantageous to include a micro-optical component 1071 on the optical switch 1101. It should be understood that an optical micro-switch such as a micro-switch 110 may be provided without the micro-optical component 1071 and is within the scope of the present invention. The pair of actuators 1 1 0 1 of the optical micro switch 1 1 2 3 can allow the mirrors in the upper and lower channels 11 11, 11 12. The 103 can be placed longitudinally close together along individual axes 1113, 1114 to reduce thunder The alignment paths of the emitted light 191 and 192. Mirrors 1131 and 1143 that are sturdyly mounted at the rear ends of individual channels 1111 and 1112 can eliminate the need for two miniature actuators in the optical switch 1101. The mirrors 1131, 1143 thus also reduce the alignment path of the laser light passing through the switch 1 1 0 1. It should be understood that there are many different micro-actuators, as well as the micro-actuators 101, 180, and 601 described above, which can be used for the optical switches herein. For example, printed by the Zhengong Consumer Cooperative of the Central Bureau of Quasi-Ministry of Economic Affairs (please read the note on the back I4 to write this page). For example, FIG. 20 shows another embodiment of the miniature actuator of the present invention, which can be used for The optical micro switch of the present invention. The actuator 3 0 1 shown therein is actually similar to the actuator 1 0 0. The first movable electrode assembly 208 of the actuator 3 01 is provided with only the first and second comb-type driving members 208a, 208b, and the second movable electrode assembly 209 is provided with only the first and second comb Type driving members 209a, 209b. The first fixed electrode assembly 2 1 0 in the actuator 3 0 1 is provided only with the first and second comb-shaped driving members 2 1 0 a, 2 1 0 b, and the second fixed electrode assembly 2 3 0 is provided only with The first and second comb-shaped driving members 2 3 0 a, this paper size is free from the Chinese National Standard (CNS) A4 specification (2! 〇X2!) 7 (Dongguan) ~ ~~ • 〇〇-

A A Shellfish consumer cooperation of the Central Bureau of Standards of the Ministry of Economic Affairs Du Yinzhuang A7 B7 V. Description of the invention (66) 2 3 0 b. The actuator 3 0 1 further includes two sets of elongated capacitor clamping electrodes or clamps 4 2 0 and a set of opposite capacitor clamping electrodes or clamps 4 2 1, and the clamp 4 2 0 is coupled to a fixed comb-shaped driving member 2 1 0 a and 2 3 0 b are the vertical planes of the comb drive strips 2 2 2 and the pliers 4 2 1 are attached to the movable comb drive strips 2 0 8 b and 2 0 9 a. Vertical plane. Electrode or forceps on the back side of the comb drive member 2 1 0 a 4 2 0 and 2.0 8 b Comb drive electrode or sweet 4 2 1 series can be moved between spaced positions and another position The position of this interval occurs when the comb-shaped driving finger members 2 1 a and 2 0 8 b of the comb-shaped driving member 2 1 1 and the comb-shaped driving member 2 1 0 a, 2 1 0 b When the finger members 2 1 2 are in a combination of fingers, and in this other position, the pliers 420, 421 are in close proximity to each other 1 which is caused by the comb-shaped driving finger members 211 and combs of the comb-shaped driving members 208a, 208b When the comb-type driving finger members 210a, 210b of the comb-type driving finger members 2 1 2 are spaced apart from each other • Similarly, the electrodes or pliers 4 2 0 on the back side of the comb-type driving member 2 3 0 b and the comb-shaped driving member 2 0 9 a The electrodes or pliers 4 2 1 on the back side can be moved between a spaced position and another position, which occurs in the comb-shaped driving finger member 211 and comb-shaped driving member 230a of the comb-shaped driving members 209a, 209b. When the comb-shaped driving finger members 212 and 230b are in a finger-shaped combination, the pliers 420 and 421 are close to each other in another position. Recently, it is a comb-shaped driving finger member 2 1 1 and a comb-shaped driving finger member 2 1 1 and a comb-shaped driving finger member 2 3 0 a, 2 3 0 b of the comb-shaped driving finger member 2 1 9 2 When spaced from each other, β should be on each other—U ------- installation ------ order ------ line {锖 first read the precautions on the back, then _ r this page) this paper Standards apply to Chinese National Standards (CNS) A4 Zhuge (210X297 mm) -69- 419602 Printed by the Central Ministry of Economic Affairs and the Consumers and Consumers Cooperatives A7 B7 V. Description of the invention (67) When it is so close, the clamp 420, 421 series are preferably spaced about 5 microns apart. The stopper mechanism and the mirror monitoring mechanism of the actuator 301 do not include the stopper 261 and the limiters 262 and 263. In contrast, the actuator 301 is provided with a rear stopper 2 9 2, and the rear stopper 2 9 2 is engaged with the bracket 2 1 9 to restrict the forward movement of the shuttle 10 9. The rear stopper 2 9 2 is electrically coupled to the electrical pad 2 9 8 through a wire or rail 3 0 2 and the front stopper 2 9 3 is electrically coupled to the electrical pad through a wire or rail 3 0 3 Air cushion 2 9 9. The pads 2 9 8 and 2 9 9 may be electrically coupled to the controller 1 1 1 to allow monitoring of the shuttle 1 9 in the retracted and extended positions. The added rear stopper 2 9 2 and the front stopper 2 9 3 are used for each tail end of the second comb-type drive member 2 0 8 b and the first comb-type drive member 2 0 9 a. In the operation method of the actuator 301, during the activation of the actuator, a pulse voltage is staggeredly applied to the first and second fixed electrode assemblies 210, 230 by the controller 111 to make the first and second movable The electrode assemblies 208 and 209 of the magnetic resonance device obtain the maximum oscillation position of the shuttle 109. The controller 1 1 1 contains a conventional mechanism to apply these pulse voltages between the opposing comb-type drive members during the half-stroke of the electrode assembly 208. During the half-stroke of the electrode assembly 208, these opposing combs The type driving members are moved towards each other to drive the comb-shaped driving finger members 211, 212 of these opposing comb-shaped driving members to their third or fully finger-combined position. Under a better degree of resonance, a stable voltage is applied to the fixed first comb drive structure 2 1 0 a through the pad 2 4 0. The paper size of the clamp is applicable to the national standard (CNS) A4 specification ( 210X297 mm) .jq --I ------- install-- (锖 read the precautions on the back-Λ · write this page) Order 4 1 9 6 0 2-'νί A7 _B7_. V. Invention Explanation (68) Between 4 2 0 and the forceps 421 on the movable second comb drive member 208 b passing through the pad 2 4 2 to move the electrode assemblies 208, 209 to their retracted positions and to hold the mirror 1 0 3 In the retracted position. When the mirror 103 is to be held in the extended position, the voltage between the comb-shaped driving members 2 10 a and 2 0 8 b is first released, and the first and second movable electrode assemblies 208, 209 They will rotate towards their second position under the forward spring force of the spring 214, in which the mirror 103 series is in the extended position. Then, a voltage pulse may be applied to the comb drive finger members 2 1 2 of the first and second comb drive members 2 10 a, 2 10 b to separate the individual first and second comb drive members 208 a, 208 b. The comb-shaped driving finger members 211 are drawn closer to each other, and thus the movable electrode assemblies 208 and 209 are printed in a sample of the quasi-station male laborer's consumer cooperative (read the notes on the back, t-book (Page) I- * · + 421 moves toward the clamp electrode 420 of the fixed electrode assembly 210, 230 * Then, a stable voltage is applied to the clamp-shaped drive member 2 3 0 b passing through the pad 2 4 1 and the clamp 4 2 0 and Pass the movable comb-shaped driving member 2 0 2 of the pad 2 4 2 between the opposing pliers 4 2 1 to hold the movable electrode assembly 208, 209 and the mirror 103 in close proximity to the extension of the stopper 2 9 2 "Position" mechanical stoppers 2 9 2 and 2 9 3 preferably define extended and retracted positions and prevent the movable electrode assemblies 2 0 8, 209 from the clamps 421 on the fixed electrode assemblies 210, 230. Plier 4 2 0 * Now referring to the micro-actuator 3 0 1, another method for activating and operating the actuator of the present invention will be described.The input drive voltages shown in the two figures at the bottom of Figure 2 are provided by the controller 111 to select the eight Chinese standards (CNS) A4 grids (210X297 mm) in the paper method of the upper figure in Figure 21 ~~ ~ 7Λ Printed by the Consumers' Cooperative of the Central Government Bureau of the Ministry of Economic Affairs 4 19602 ^ A7 B7 V. Description of the invention (69) Causes the movement in shuttle 109 shown in the figure. At the beginning, five pulses of 45 volts will be applied by the controller 111 to the first and second returning comb drive members 230a, 230b through the electric pad 240 to cause an actuator or a micromotor 1 0 1 Vibrate with an amplitude increased to 100 microns. During this start-up procedure, the electrical mats 2 4 1 and 2 4 2 remain fixed at zero volts. Immediately after the last of these 45 volt pulses, 45 volts were applied to the first and second comb drive members 2 1 0 a, 2 1 0 b, so that the first comb drive member 2 1 0 a The electrostatic force between the tongs or tongs electrode 4 2 0 and the tongs or tongs electrode 4 2 1 on the second comb drive member 2 0 8 b can hold the shuttle 1 09 in its retracted position. At its resting position of 100 micrometers shown in Fig. 20, at the fully retracted position of the shuttle 109, the clamps 420, 421 are almost 5 micrometers apart, so that the applied voltage can hold the shuttle 109 here In the retracted position. Once 45 volts are applied to the first fixed electrode assembly 210, the comb-shaped driving finger member 21 of the movable electrode assembly 208 and the comb-shaped driving finger member 212 of the fixed electrode assembly 210 are approximately They are spaced 10◦ microns apart so that no attractive force is applied between them. As can be seen in Fig. 21, 45 volts applied to the fixed electrode assembly 21 0 to 50 will be released in about 11 milliseconds. Then, when the shuttle 10 started to rotate toward its extended position, a short pulse of 45 volts was applied to the fixed electrode assembly 210 > At this time, the clamp electrodes 420, 421 were sufficiently spaced so as not to suffer between them. Any electrostatic force "Conversely, the pulse voltage applied to the module 2 10 is used to drive the comb-shaped driving finger member 211 of the electrode assembly 208 toward the comb of the opposite electrode assembly 210! _------- --Batch --------- 1T ------ ^ (Please read the precautions on the back first 'A write this page) This paper size is applicable to China National Fengfeng (CNS) A4 * t grid (2丨 0 > < 297 mm) -72- 1 9 60Π 4 1 960 2 ″ 碥 a? B7 V. Description of the invention (70) type driving finger member 2 1 2. The pulsed voltage compensates for the energy loss incurred during the half-stroke and thus rotates the shuttle 109 to its fully extended position. At this time, a potential of 45 volts is applied to the second fixed electrode assembly 2 3 0 to clamp 4 2 0 provided on the back side of the second comb-type drive member 2 3 0 b and the second comb-type drive member 2 An electrostatic force is provided between the opposing pliers 4 2 1 on the back side of 0 9 b. These forces will hold shuttle 10 in its extended position. At approximately 12 milliseconds, the shuttle is released from its extended position and then a 45 volt pulse is applied to the second fixed electrode assembly 2 3 0 to drive the opposite second movable electrode assembly 2 0 9 and thus drive shuttle 1 0 9 to their retracted position, in which the shuttle will then be held by 4 5 volts applied to the first fixed electrode assembly 2 10 0. It should be understood that, during the start-up oscillation, the pulse voltage is sequentially applied to one or both of the first fixed electrode assembly 2 1 0 and / or the second fixed electrode assembly 2 3 0 in different configurations in order to shuttle 1 〇9 resonance was obtained. It should also be understood that a non-square driving voltage may be provided by the controller 1 1 1 to the actuator of the present invention to operate the actuator. In the Ministry of Economic Affairs, the Ministry of Economic Affairs, the Ministry of Economics and Industry, cooperation and cooperation (please read the note on the back of Jing—1; write this page) i V. As mentioned above, the actuator 301 is designed using DRIE technology, allowing different The structure is taller and thus has a larger vertical surface area than similar structures in the known art. The clamps 420, 421 thus include fixed electrode assemblies 210, 230 and movable electrode assemblies 2 08, 2 0 9 having a large vertical surface area. Therefore, for any given distance between the clamps, the relative clamp 420 , 42 1 can form a greater attraction than the know-how. ^ Suppose that the comb-shaped driving finger members 211 and 212 are used to mesh with each other. The paper size is used in 8 Chinese companies (CNS) A4 * t grid (210X297 mm). 73. Central Ministry of Economic Affairs f Cooperative prints A7 B7 V. Description of the invention (71) To hold fixed electrode assemblies in their fully deflected positions, the clamps 420, 42 1 are required to hold the movable electrode assemblies 208, 209 in their fully deflected positions The voltage applied to the fixed electrode assembly 210, 230 is about four times less than the voltage required to be applied to the fixed electrode assembly. Alternatively, a full voltage is applied to a smaller number of comb drive finger members or teeth 2 1 1, 2 1 2 to provide the same clamping force. In the actuator 3 01, the electrodes or clamp electrodes 4 2 0 and 4 2 1 each include a plurality of small finger extensions 4 2 2, and the plurality of small finger extensions 4 2 2 extend vertically to the comb drive. The length of the bar and the length of the comb drive bar. The extension piece 4 2 2 has a length of 3 to 25 micrometers. It is preferably in the range of 5 to 15 micrometers and more preferably about 13 micrometers. When the electrodes 4 2 0, 4 2 1 are in close proximity to each other and When increasing the surface area where the attractive force between the finger electrodes 4 2 0 and 4 2 1 is applied, the extension member or tooth 218 is at least partially toothed. The pliers 420, 421 may not have the extensions 4 2 2 and are therefore flat or have other shapes and are within the scope of the present invention. If the movable electrode assembly 2 0 8 b is released by the individual comb drive members 2 10 a and 208 b from the retracted position, when the actuator 101 Q is 14, the movable electrode assembly 208 and 209 will Half cycle reduces amplitude by 10% and rotates back and forth around the static stop position. Therefore, when the initial retracting distance of the electrode assemblies 208 and 209 is 100 micrometers from the static position, unless the electrostatic angle of the movable electrode assembly 209 and the fixed electrode assembly 230 is on the system, Perform the added work, otherwise, the opposite clamp electrodes 4 2 1, 4 2 0 must be used in accordance with the Chinese paper size (CNS) A4 specification U10 >: 297 mm). 74 -------- --Install-- (Please read the precautions on the back-.. f to write this page)

.1T 19602 ^ A7 B7 V. Description of the invention (72) The Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, printed on them showed sufficient attractiveness to catch the 90% when it moved the peak of 90 microns towards the extended position. Moving electrode assembly 208, 209 g In another micro-actuator embodiment shown in FIG. 2, the actuator 5 0 1 is formed by a silicon wafer, and the silicon wafer has a spring 2 1 4, The 2 1 7 and 2 1 4 and 2 1 7 series are designed to be non-linear and therefore "bent" when in a static undeflected condition. Actuator 5 0 1 is actually similar to actuators 101, 180, and 301 and similar reference numerals are used to describe similar elements of actuators 101, 180, 301, and 501. When the shuttle 10 9 is in a static condition halfway between its retracted and extended positions, the spring portions 224, 225 of each of the springs 2 1 4, 217 in the actuator 50 1 will bend toward each other. In this embodiment, when the shuttle 1 10 moves from its starting position to its retracted position and the comb-shaped finger members 211, 212 of the second moving electrode assembly 2 0 9 and the second fixed electrode assembly 2 3 0 are electrostatically charged, When the ground engages and then overlaps, the spring 2 1 7 stretches from its pre-curved starting position to a linear position. Similarly, when the shuttle moves from its starting position to its extended position and the comb-shaped finger members 211, 212 of the first movable electrode assembly 2 0 8 and the first fixed electrode assembly 2 10 engage and then overlap • the spring 214 stretches from its pre-curved starting position to a linear position. In each case, when these spring position portions become linear in a direction perpendicular to the individual comb-shaped driving finger member 211, the lateral rigidity of the spring portions 224, 225 of the individual springs increases in this direction. In this way, the lateral rigidity of the spring and the lateral direction exerted by this spring on the comb-shaped driving finger member 211 should be read on the back side of the note | gutter. The paper size is common Chinese National Standard (CNS) A4 specification ( 210X297 mm) -75- Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economy 9 60 2 -4 A7 _B7_ V. Description of the invention (73) The restoring force will be driven by the overlap between the finger members 211 and 212 Function increases. Therefore, when these comb-shaped driving finger members 2 1 1, 212 become finger-shaped combinations, the springs 214, 217 drive the comb-shaped driving finger members 2 1 1 of the comb-shaped driving assembly to the adjacent comb-shaped driving finger members Stable position halfway between 2 1 2. Although the springs 2 1 4 and 2 1 7 straighten when deflected in one direction, the spring portions 224 and 225 become more bent toward each other from their rest positions when the shuttle 1 9 moves in the opposite direction 》 The second group of foldable cantilever beams or springs 561, 562 are similar in size and composition to the springs 2 1 4 and 2 1 7 and are located in the actuator 501. Each spring 561, 562 is coupled at its first end 563 to the substrate 2 1 3 and at its second end 5 6 4 to the movable electrode assembly 208, 209. Each set of springs 561, 562 includes first and second spaced parallel spring portions 566, 567, and the spring portions 566, 567 are joined by a foldable portion 568. The springs 561, 562 are connected to their foldable parts 5 6 8 via a suspended rigid support 569. The suspended rigid support 5 6 9 extends between the springs 561, 562 and is parallel to the rigid Support 131. The supporting members 131 and 569 are rigidly connected as shown in FIG. 22. When in the relaxed position, the springs 561, 562 actually extend perpendicular to the direction of movement of the electrode assemblies 208, 209. More specifically, as shown in FIG. 22, when the shuttle 109 is in a static condition halfway between its retracted and extended positions, the spring portions 5 and 6, 567 will bend away from each other. When the first movable electrode assembly 208 and the first fixed J .-------- ^ ------ 1T ------ ^ (Please read the precautions on the back first '-4 write this page) This paper size is applicable to the National Standards for Distressed Countries (CNS) Α4 Zhuge (210X297 mm) -76- 419602 Α7 Β7 Printed by the China Mabei Workers Consumer Cooperative of the Ministry of Economic Affairs 5. Description of the invention (74) When the overlapping of the comb-shaped finger members 2 1 1 and 2 1 2 of the electrode assembly 2 1 0 increases and the shuttle 1 9 moves to its extended position, the spring 5 6 2 is designed to stretch to the linear position β. When the overlap of the second movable electrode assembly 2 0 9 and the comb-shaped finger member 2 1 1, 2 1 2 of the second fixed electrode assembly 2 3 0 increases and the shuttle 1 9 moves to its retracted position The spring 5.6 1 is designed to stretch to a linear position. Although, when deflected in one direction, the springs 56 1, 562 will straighten, but when the shuttle 109 moves in the opposite direction, the spring portions 566, 567 will become more bent away from each other from their static positions. The springs 561, 562 operate in the same manner as described above with respect to the springs 214, 217. In this fourth example of the spring, the bending spring pair 2 1 4 or 5 6 1 and 2 1 7 or 5 6 2 at each end of the actuator 5 0 1 is preferably straight and the other The curved pair of springs will bend at each limit of the deflection of the movable electrode assemblies 2008, 209. In order to maintain the same forward rigidity as the two curved spring 2 actuators 1 0 1, the length of the springs 214, 217, 561, and 562 in the actuator 5 0 1 will increase by 26% » The relationship between collective lateral stability and spring deflection of four spring designs, such as the design of four springs 2 1 4, 217, 561, and 562 of the actuator 5 0 1. The lateral stability referred to in Figure 23 is the ratio of the differential of the collective lateral rigidity to the collective lateral electrostatic force. In the graph of Figure 23, the lateral stability of less than one is unstable, while the lateral stability of more than one is stable. The "" straight beam "line in Fig. 23 refers to springs 2 14, 2 17 in the actuator 101 such as described above. The paper scale is free to use Chinese National Standards (CNS) Α4 spider grid (210X297 mm) I installed I Thread (I read the precautions on the back first and then write this page) ____ _- -77- Central Standard of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperatives 41 9602 A7 B7 5. The “pre-curved beam” line in the description of the invention (75) 2 3 refers to beams such as the springs 214, 217, 561, and 562 in the actuator 501. The springs 214, 217, 561, and 562 are designed to be straight at a position where the lateral stability is maximized at all positions. Preferably, the lateral stability has at least ten degrees at any time. In actuator 51, each individual spring 214, 217, 561, 562 has an initial bend of 43 microns, that is, a movable end system of each spring portion 224, 225, 566, 5 67 The distance from the spring part in a linear position perpendicular to the direction of movement is 4 3 micrometers, as shown in the graph of FIG. 23, to increase the minimum lateral stability to 10. The actuator 501 would require 154 volts to offset the mirror 103 from the midway between its retracted and extended position by a distance of 100 microns. As shown in FIG. 23, when the mirror 103 moves about 90 microns from its starting position, the springs 214, 217, 561, and 562 can provide a lateral stability of about 100, and the spring portions 243, 244, and 566 , 567 is straight at this position on the mirror. The actuator 50 1 is operated in a similar manner to the above-mentioned actuators 10 1, 180, and 30 1. Compared with the electrostatic lateral force generated between the comb-shaped finger-like finger members 2 1 1 and 2 1 2, the stable lateral force provided by the springs 214, 217, 561, and 562 can follow the comb shape. The lateral deflection of the driving members 208, 209 increases more rapidly. In the embodiment shown in FIG. 23, the speed of the stable lateral force increasing with the lateral deflection is at least ten times faster than the electrostatic lateral force. Provide a better operating method of actuator or motor 501, in which I-^ ------- ^ ------ ίτ ------ ^ {Please read the note on the back first Matters > this page):.;-I /-. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -78- Printed oxygen by the Shell Standard Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs!- : Η ν 'w * — Α7 _Β7 V. Description of the invention (76), for example, as shown in FIG. 22, when the comb-shaped finger members 211, 2 1 2 are in the second position where they are partly electrically engaged And more preferably when just nakedly engaging, then during any particular half-stroke, a pulse voltage will be applied to the operating comb drive assembly, that is, the comb drive assembly. In the comb drive assembly, here During the half stroke, the comb-shaped driving finger members 2 11, 2 12 will enter the finger combination. Since the lateral instability forces between the comb drive finger members at a given voltage are proportional to the number of their engagement, so in the second and third parts of the comb drive finger members 2 1 1, 2 1 2 During the engagement of the first part between the parts, it is preferred that the comb drive finger member is fully engaged in the third part and more preferably that the comb drive finger member 2 11, 2 12 is moved from 0% During a time period of up to 25% engagement, the lateral instability force is minimized when a voltage is applied. The forward or extended movement restricting mechanism or limiter 5 7 1 and the backward or retracting movement restricting mechanism or limiter are provided on the extension members 218 of the movable electrode assembly 208 and 209 so that the electrode assembly 208 209 can engage the fixed stop 573 when in their extended and retracted positions. The stopper 573 is electrically coupled to the pad 264 and thus to the controller 1 1 1 so that the controller can monitor the position of the actuator 5 0 1 and thus the condition of the switch 104. It should be understood that the 'actuator 5 0 1 may be provided with pliers 4 2 0, 421 and / or related to the above-mentioned features of the actuators 101, 180, and 301 as disclosed in relation to the actuator 3 0 1 and Within range. Fig. 24 illustrates another embodiment of the actuator of the present invention. In this preferred embodiment, an actuator 602 is provided, which has a single fixed electrode l · -------- ^ ------ 1T ------ line (please first Read the note on the back 1-^ ¾ this page) ._K _ 'This paper is again applicable to the standard for the homeless (CNS) A4 (210XM7 mm> -79- Ministry of Economic Affairs) Industrial and consumer cooperative printing 1t U 9 60 2 · 4 Α7 Β7 V. Description of the invention (77) Component 2 1 0, single fixed electrode component 2 1 0 is used to attract a single movable electrode component 2 0 8. Actuator 6 0 2 is similar to the actuators 1 0 1 and 5 0 1 described above and uses similar reference numerals to describe similar elements of the actuators 101, 501, and 602. The movable electrode assembly 2 0 8 A comb-shaped drive member 2 0 8 a constitutes and fixes the electrode assembly 2 1 0 composed of only the first comb-shaped drive member 2 1 0 a. A spring shown in FIG. 2 2 corresponding to the actuator 5 0 1 is provided. 2 1 4, 562. The springs 214, 562 are connected to each other by a rigid supporting member 6 0 6 which is actually similar to the above-mentioned supporting members 1 3 1 and 5 6 9. Since only the electrode assembly 2 0 8 Move in this direction and comb When the driving finger members 2 1 1 and 2 1 2 become finger combinations, a buckling lateral force is generated between the fixed 2 10 and movable comb driving finger members 211 and 212 of the 208 electrode assembly. Therefore, the single fixed electrode design of the actuator 602 exhibits lateral instability only in the extended position of the mirror 103. As a result, it is necessary to straighten only when the movable electrode assembly 208 is in the extended position. Pre-bent spring 2 14, 5 6 2. The clamp electrode 4 2 0 will be placed on the comb drive member 2 1 0 a of the comb drive bar 2 2 2 and the opposing clamp 4 2 1 will be perpendicular to the electrode assembly 2 The moving direction of 0.8 extends and is rigidly connected to the comb drive member 208a by the frame frame portion 216. The movable member or shuttle 607 of the actuator 602 includes a first comb drive member 208a, a clamp electrode 421, and a frame 216, extension 218, and bracket 219. In the illustrated embodiment of the actuator 602 shown in Fig. 24, the springs 214, 562 are pre-bent by 46 microns. Between the comb teeth! ------- Installation ------ Order ------ line (please read the precautions on the reverse side and write this page) This paper size is applicable to the Chinese standard (CNS) A4 said grid (210X297 mm) -80-

Du printed by the Central Bureau of Standards and Technology, Ministry of Economic Affairs, Du Duxian, and V. Inventive Note (78) The interval is preferably 18 microns. The planes of the jaws 420, 421 are preferably 800 micrometers long and 80 micrometers high. When the jaw electrode 421 relies on the forward stopper 2 92 and the rearward stopper 6 80 and the stopper 6 8 2 are engaged, the jaws 420 and 421 are separated by 5 micrometers. Although the pliers 4 2 0, 4 2 1 shown in FIG. 24 are flat, it should be understood that they may also include an extension 4 2 2 as shown in FIG. 20. In contrast to the actuator 3 0 1 in FIG. 20, the actuator 6 0 2 in FIG. 2 uses an asymmetrical design, in which the * extended displacement is a little larger than the retracted displacement. For example, the actuator 602 shown in FIG. 24 will extend a distance of 112 micrometers and retract a distance of 100 micrometers. Initially, a voltage was applied to the fixed electrode 2 10 to deflect and hold the movable electrode portion 2 08 to the extended position under the electrostatic attraction of the comb-shaped driving finger member 2 1 2, 2 1 1. During the switching operation, the mirror 1 0 3 needs to be exited from the path of the laser light 1 9 1. The electrostatic voltage on the fixed electrode assembly 2 1 0 will be released and the movable electrode assembly 2 0 8 and shuttle 6 0 7 will rotate. Towards its retracted position held by the electrostatic force between the pliers 4 2 0, 4 2 1. The springs 214, 562 provide an initial mechanical retraction force on the shuttle 607 during its backward rotation from its extended position. In the illustrated embodiment of the actuator 6 0 2 shown in FIG. 24, the movable electrode assembly 2 0 9 is held at the extended position 1 1 2 1 μm from the rest position, and then When released, the module 209 will rotate 100 micrometers through its starting position toward the retracted position and be captured by the forceps 420. The graph shown in Figure 25 illustrates the toilet's lateral stability of the actuator 6 b 2 'The lateral stability is a function of deflection, while the graph shown in Figure 2 6] -------: -I ^ ------. Order ------. ^ (Please read the notes on the back first, write this page) This paper size is applicable to China National Standard (CNS) A4 spider grid (2Ϊ〇 × 297 mm) ) • 81 · I 960 2 4 Α7 Β7 5. The invention description (79) refers to the clamping force of the clamp electrodes 420, 42 1 in the actuator 602, and this clamping force is a function of the separation distance between the clamp electrodes. As shown in these figures, the actuator 602 is deflected backwards 1 12 microns at 196 volts and a minimum safety margin. Under a reasonable Q, for example, 14, even under the pull of the pliers 420, 421, the moving electrode part 208 can still be rotated all the way to the backward stopper 680. Therefore, without the need to input additional work to the actuator, the larger forward extension distance of the actuator 602 allows the shuttle 607 and the mirror 130 to rotate backward to a fully retracted position. As shown by the horizontal solid line labeled "Required Clamping Force" in Figure 26, in the retracted position, the suspension or spring 2 1 4, 5 6 2 will apply a tensile force of 9 7 u N to the movable The electrode part 2 0 8. This force can be overcome by the pliers 4 2 0, 4 2 1 when the pliers and the pliers are spaced 15 μm apart, as shown by the dashed line labeled “parallel wrench” in FIG. 26. As shown in Figure 2-6, when the distance between the pliers and the pliers is maintained at five micrometers by the stoppers 680 and 292, the pliers 420 and the central ministry of the Ministry of Economic Affairs are approved and printed by the Industrial and Commercial Cooperatives. (Notes on the reverse side of this page) 4 2 1 The true holding force is 9 00 uN. The stoppers 6 8 0 and 2 9 2 are used to prevent unnecessary contact between the clamp electrodes 4 2 0 and 4 2 1. The above-mentioned preferred embodiment uses a single-sided fixed electrode design, but may allow full movement from the starting or midway position of the movable electrode assembly 208 to a range of +/− 100 μm. In addition, the reduced area and mass of the preferred embodiment can reduce cost and switching speed. The shortening of the actuator 602. The length can allow two of the multiple actuators to Method configuration β This paper size uses China National Kneading Ratio (CNS) Α4 size < 2Ι0 × 297 mm) -82- 9 60 2 4 A7 B7_ V. Description of the invention (80) In the switching application, independently confirm the mirror 1 0 The position of 3 is important. In the micro-actuator 602, an additional electrode may be incorporated into the mechanical stop. When the mirror 103 in the actuator 6 02 is in the extended position, the forward limiter 6 8 1 of the movable electrode part 2 0 8 will be engaged with and electrically contact the stopper 6 8 2. The stopper 6 8 2 is electrically coupled to the .6 electric pad 6 8 7 through the wire 6 8 6, and the electric pad 6 8 7 can be electrically coupled to the controller 1 1 1. Similarly, when the mirror 103 is held in the retracted position and centered, the backward limiter 680 will engage and make electrical contact with the stopper. Therefore, the positions of the movable electrode assembly 208 and the mirror 10 3 can be electrically sensed by the controller 1 1 1 to confirm the state of the actuator 6 0 2 and any incorporated in the plurality of actuators 6 0 2 Any one or more of the switches or other devices. The limiters 680, 681 and the stopper 682 are included in the stopper mechanism of the actuator 602 " Printed by the Shellfish Consumer Cooperative of the Central Bureau of the Ministry of Economic Affairs, (谙 Please read the precautions on the back before filling this page) The actuator 602 shown in FIG. 24 is expandable to include more than one set of interengaging comb drive members 208a, 210a. For example, Fig. 27 shows an asymmetric actuator 603 which is actually similar to actuator 602. Similar reference numerals are used to describe similar elements of the actuators 602 and 603. The movable electrode assembly 208 of the actuator 603 has four longitudinally-spaced comb-shaped drive members 208a. The fixed electrode assembly 2 1 0 of the actuator 6 0 3 has four longitudinally-spaced comb-shaped driving members 2 1 0 a. The actuator 603 has four sets of cooperating clamp electrodes 420, 421. As the number of electrode assemblies 208, 210 increases, the width of each group of electrode assemblies 208, 2 Ί 0 can be reduced and thus actuation under any given force required to extend or retract the mirror 103 This paper size applies the Chinese National Standard (CNS) A4 specification (210X29? Mm). 83- 419602 4 A7 B7 5. Description of the invention (81) The width of the device 603. Therefore, when the laser light 191, 192 moves down to the center of the optical microswitch described here, the optical alignment distance that it must maintain can reduce s. Figure 28-29 series display actuators or microactuators 701 'It has some elements of the actuator 5 0 1 shown in Fig. 2' but only has a single fixed electrode assembly and a single movable electrode assembly * Actuator 6 0 2 as shown in Fig. 2 4 Like. Similar reference numbers are used to describe similar elements in actuators 701, 501, and 602. The movable electrode assembly 2 0 9 of the actuator 701 is composed only of the comb-shaped driving member 2 9 a and the fixed electrode assembly 2 3 0 is composed of only the comb-shaped driving member 2 3 0 a. The cantilever beam springs 561, 217 of the actuator 501 are provided in the actuator 70 1, and the springs 56 1, 2 1 7 are provided by a rigid support member suspended similarly to the support member 6 0 6 described above. 7 1 1 and each other. Like the actuator 602, the actuator 701 exhibits lateral instability only in one extreme position of the movable electrode assembly 209. In particular, only when the movable component 2 0 9 is moved to the comb-shaped driving finger member 2 1 1. Printed by the cooperative of the Ministry of Economic Affairs and the Central Government Bureau of the Ministry of Economic Affairs f Cooperatives (please read the precautions on the back before this page) 1 2 will be in the retracted position of the finger combination, then it will be in the movable electrode assembly 2 0 9 comb drive finger member 2 1 1 and the fixed electrode assembly 2 3 0 comb drive finger member 2 1 A lateral force is generated between two. When the movable electrode assembly 209 is in its retracted position, the individual spring portions 566, 567, and 224, 2 2 5 of the spring 5 6 1, 2 1 7 will stretch to the actuator 7 0 1 Linear position with maximum rigidity in the transverse direction. The tong electrode 4 2 0 is provided on a comb-shaped driving strip 2 2 2 of a fixed comb-shaped driving member 2 3 0 a. The relative pliers 4 2 1 will be vertical. The paper size is applicable to the Chinese households' poverty rate (CNS) 8 4 * 1 grid (210X297 mm) -84- 4 〇

D Printed by the Consumers ’Cooperative of the China ’s Husband and Quarantine Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (82) Extends in the moving direction and is rigidly connected to the comb drive member 2 0 a at one end by the frame 2 16. The second or free end 567 of the spring portion 5 6 4 is fixed to the other end of the forceps 42 1. The movable member or shuttle 7 1 2 of the actuator 70 1 includes a first comb drive member 209 a, a clamp electrode 421, a frame 216, an extension 218, and a bracket 219. In addition to using intermeshing comb-shaped drive members 2 0 a and 230 a to move the mirror 103 to the retracted position and using the opposite pliers 420 and 42 1 to move the mirror to the forward elastic force of the springs 56 1 and 2 17 to In the extended position, the movable electrode assembly 209 and the mirror 103 are held in the extended position, and the actuator 7 0 1 actually operates in a manner similar to the actuator 6 0 2. The asymmetrical design of the actuator 70 1 provides a retraction distance greater than the forward extension distance. Therefore, the shuttle 7 1 2 can be rotated from its retracted position to the extended position. This extended position is sufficient to engage the pliers 4 2 0, 4 2 1 without inputting new work to the system. As shown in Figure 2-8—2, the precise placement of the mirror 1 0 3 on the bracket 2 1 9 can be achieved by DR IE and by adding the part 7 7 8 to the mirror 103. DR IE The container 7 7 6 and the rectangular recessed wall or socket 7 7 7 will be etched in the bracket 2 1 9. Once the mirror part 7 7 8 is inserted into the socket 7 7 7, the mirror 1 0 3 is adhered to the appropriate place by any appropriate adhesive mechanism, such as an adhesive 6 8 8. The bracket optionally includes an etched spring portion 7 7 9 to keep the mirror 103 aligned before bonding. Figure 2 2 shows a mirror assembly without a spring part 7 7 9 and circle 2 9 shows a mirror assembly with a spring part 779. Other mechanisms can be provided to fix the mirror 1 03 to the bracket 2 1 Θ ° For example, this paper is based on the national standards of China (CNS > A4 size (210X 297 mm). G5 _----------- ^ ------, 1T ----- -· Φ (please read the precautions on the back '/ write this page)' ______ 'X. 419602 ^ Α7 £ 7_ 5. Description of the invention (83) For example, Figure 3 0 shows the actuator 8 0 1' It is formed from a silicon wafer similar to actuator 7 0 1 and has an electrode assembly configuration similar to actuator 6 3 0. Similar reference numbers are used to describe similar elements of actuators 7 0 1 and 801. The movable electrode assembly 2 of the actuator 801 has four longitudinally-spaced comb-shaped drive members 2 9 a. The fixed electrode assembly of the actuator 8 0 1 2 3 0 has four longitudinally-spaced comb-shaped drive members 2 3 0 a. Actuator 8 0 1 is provided with four sets of cooperating clamp electrodes 420, 421. Brackets 2 and 19 of actuator 801 are formed by DRIE etching and provided with a container 802, each of which has an upright Shoulder 8 0 3. Mirror 1 〇 3 will be held in the container 8 0 2 by any suitable adhesive mechanism such as an adhesive 6 8 8. The hanging nail-shaped post 8 0 4 formed by the DR IE of the wafer etching the actuator 8 0 1 The holding mechanism or component will be used to align and hold the lens during the bonding 1 0 3 within the container 8 2 • The post 8 0 4 is rigidly fixed to the part of the wafer 8 8 by the neck member 8 0 5 'and thus fixed to the base 2 1 3. The asymmetric actuator 8 0 1 has a retracted distance greater than the forward extension of the actuator-printed by the Shellfish Consumer Cooperative of the Central Samples Bureau of the Ministry of Economic Affairs (please first (Read the precautions on the back and write this page.) When operating and using the actuator 801, the shuttle 7 1 2 will retract against the restoring force of the spring 5 6 1, 2 1 7 to set the mirror 1 〇3. On the bracket 2 1 9. When the shuttle 7 1 2 is then released, the mirror 103 extends forward until the reflecting surface of the mirror engages the free end of the post 804. The restoring force of the springs 561 and 217 will apply approximately A force of 50βN to the mirror 103, this force is sufficient to align the mirror perpendicular to the surface of the substrate 2 1 3 and hold the mirror in place during the application and curing of the adhesive Set β in the mirror paper standard universal Chinese national standard (CNS > Α4 size U10XM7 mm) _ 86 _ Printed by the Central Consumers' Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives 4 1 9 6 0 2. Α7 Β7 V. Invention Explanation (84) After attaching to the bracket 2 1 9 in this way, the column 804 can be removed by breaking the neck member 806 provided on the column 804 with a reduced width. In another embodiment of the actuator or microactuator of the present invention, the actuator 9 5 1 is provided with an actuating mechanism or an actuator 9 5 2 to mechanically lock the mirror in its fully extended position And its fully retracted position (see Figure 31) »Actuator 951 is actually similar to actuator 60 and uses similar reference numerals to illustrate similar elements of actuators 9 5 1. and 6 0 2. The locking mechanism or secondary motor 9 5 2 is actually similar to the main motor of the actuator 9 5 1 and includes a first comb-type drive member 208a and a first comb-type drive member 210a. The secondary or yoke motor 9 5 2 is formed on a silicon wafer or substrate 2 1 3 by any suitable mechanism such as DRIE. The secondary or yoke motor 9 5 2 includes a shuttle 9 5 6 and a shuttle 9 5 6 can be moved between the first or retracted position and the second or extended position in a direction perpendicular to the moving direction of shuttle 6 0 7. The shuttle 9 5 6 includes a movable electrode assembly 9 5 7. The movable electrode assembly 9 5 7 is composed of a plurality of comb-shaped driving members 9 5 8 extending longitudinally and extending apart from the extended frame portion 9 6 1. . The frame part 9 6 1 will extend parallel to the moving direction of the shackle motor 9 5 2. Each comb drive member 9 5 8 has a comb drive bar 9 6 2 and the comb drive bar 9 6 2 will be fixed to the frame part. One end of portion 9 6 1 extends perpendicular to the frame portion. A plurality of comb-shaped driving finger members 9 6 3 extend from one side of the comb-shaped driving strip 9 6 2 and are longitudinally spaced on the strip 9 6 2. The comb-shaped drive assembly of the actuator 9 5 1 further includes a fixed electrode assembly 9 6 6. The fixed electrode assembly 9 6 6 and the moving electrode assembly 9 5 7 cooperate with each other. The fixed electrode assembly 9 6 6 Includes many papers "The standard is applicable to the Chinese National Standard (CNS) A4 specification (2Ϊ0Κ297 mm) ~~ _ 87: (Please read the precautions on the back first >> Write this page). Packing-, 1T- 419602 ^ A7 B7 Printed by the Central Ministry of Economic Affairs of the People's Republic of China, Coopers, Coopers, and Fifth, the description of the invention (85), more comb drive members' 9 6 7 mounted on the base 2 1 3 »each comb drive member 9 6 7 The gap between the adjacent comb-shaped driving member pair 9 6 2 is formed by a comb-shaped driving strip 9 6 8 arranged parallel to the comb-shaped driving strip 9 6 2. A plurality of comb-shaped driving finger members 9 6 9 are integrally formed with the comb-shaped driving finger members 9 6 8 and extend toward the comb-shaped driving finger members 9 6 3 so as to internally engage with the comb-shaped driving finger members 9 6 3. The movable and fixed electrode assemblies 9 5 7 and 966 are electrically connected to pads (not shown) similar to the pads 240-242 described above, which allow the shackle motor 952 to be electrically connected to the controller 111. The shuttle 9 5 6 is suspended on the base 2 1 3 by a spring 9 7 6 disposed at one end of the shuttle 9 5 6 and a spring member or spring 9 7 7 disposed at the opposite end of the shuttle. 6 and 9 7 7 are actually the same as the springs 2 1 4 and 5 6 2 respectively. Similar reference numbers are used to describe similar elements of springs 976, 977 and 214, 562. The rigid support member 9 7 8 is actually similar to the rigid support member 6 0 6, which will be suspended above the base 2 1 3 to extend between the folded ends of the springs 9 6 6 and 9 7 7. In addition to comb drive members 9 5 8, 9 6 7 which can be moved between the first or rest position and the second position, comb drive members 9 5 8 and 9 6 7 which work in concert with each other The assembly will operate in the same manner as the comb drive assembly described above, wherein, in the first or rest position, the comb drive finger members 9 6 3, 9 6 9 are spaced at a plurality of positions at these positions. , The end of the comb drive finger 9 6 3, ^ 6 9 is located on a line extending perpendicular to the moving direction of the shuttle 9 5 6 at the second position L * ------- ^^-(Please Please read the notes on the back, write this page), vs. the size of the paper. Applicable to the middle and poor countries (CNS > A4 size (210X297 mm) -88- A7 B7 Ministry of Economic Affairs, Central Standards Bureau, Industrial and Consumer Cooperation Printed 5. In the description of the invention (86), the comb-shaped driving finger members 963 and 969 are combined in a finger shape. The shuttle 9 5 6 is pulled backward by the electrostatic force between the comb-shaped driving members 9 5 8 and 9 6 7 The mechanical force of the springs 967, 977 pushes forward. The shackle motor is normally closed in its first position shown in Figure 31. The shuttle 9 5 6 has an extension 9 8 1. The extension 9 8 1 has a tip 9 8 2 that can be moved between an extended and retracted position. The tip 9 8 2 is usually in its extended position. The bracket 2.1 9 of the actuator 9 5 1 has a first and The stoppers 983 and 984 at the second interval, and the stoppers 983 and 984 will form a concave wall between them so as to accommodate the tip 9 8 2 when the shuttle 6 7 is in its relaxed position. * In operation and use, When it is necessary to move the mirror 103 to its retracted position, the yoke motor 9 5 2 will be activated so that the electrostatic force between the comb-shaped driving members 9 5 8 and 9 6 7 will cause the shuttle 9 5 6 to retract. And pull the tip 9 8 2 back. When the mirror 103 is retracted, the second stopper 9 8 4 can now pass through the tip 982. Then, the yoke motor 952 is not activated, so that the springs 976, 977 will shuttle the shuttle The 956 is driven to its normal closed position, in which the tip 9 8 2 engages the bottom end of the second stopper 9 8 4 to prevent the bracket from extending and thus the mirror 103 from extending. In a similar manner The tip 9 8 2 can be retracted by the yoke motor 9 5 2 to allow the mirror 1 0 3 to extend. When the yoke motor 9 5 2 is not actuated, the tip 9 8 2 will extend to engage the first stopper 9 8 The upper end of 3 engages and locks the mirror 103 in its extended position. When the shuttle 9 5 6 retracts, each of the springs 9 7 6 and 9 7 7 will move from its static bending position to a straight or straight position and thus Removable comb drive finger 9 9 3 and fixed comb LW -------- install-(Please read the precautions on the back first to write this page)

. • IT paper size Applicable to the national standard (CNS > A4 specification (210 >: 297mm) _ 〇〇A7 B7 V. Description of the invention (87) Drive finger 9 6 9 finger combination Provides lateral stabilizing force to the movable comb drive finger member 9 6 3 »Without the need to apply voltage to the actuator 9 5 1 | the yoke motor 9 5 2 allows the mirror 1 0 3 to be locked in its full In the extended or fully retracted position, this is advantageous when the actuator 95 1 1 1 is used in telecommunications or network systems. In the embodiment shown, when having an input of 200 volts When the signal and the resonance frequency of eight kH z, the yoke motor 9 5 2 has four micro deflections. Although the actuator 9 5 1 does not have any of the above types of electrostatic clamping electrodes, it should be understood that these clamping electrodes may have Actuator 951 is within the scope of the present invention. "Printed by the Ministry of Economic Affairs and Standards and Consumer Cooperatives (please read the notes on the back to write this page). In another embodiment, the actuator may have The first group of electrostatic clamping electrodes and the second group of electrostatic clamping electrodes. The first group of electrostatic clamping electrodes is used to fix the mirror. In its retracted position, a second set of electrostatically clamped electrodes is used to hold the mirror in its fully extended position. The actuator shown in Figure 32 is actually similar to the actuator 701 described above and uses a similar The reference numerals indicate similar elements of the actuators 70 1 and 1 0 0 1. The actuator 1 00 1 has a comb-shaped driving assembly including a movable comb-shaped driving member 2 0 9 a and a fixed comb. Type driving member 2 3 0 a. The movable comb-shaped driving member 2 0 9 a includes a comb-shaped driving bar 2 2 1 and a plurality of elongated comb-shaped driving finger members 10 extending along the length of the strip 2 2 1. 0 2. The comb drive means 1 0 0 2 has a proximal end portion 1 0 0 2 a fixed to the comb drive strip 2 2 1 and a distal or free end portion away from the strip 2 2 1. Proximity part of each comb drive finger 1 002 002 a This paper is again applicable to China National Standards (CNS > Grid < 210X297 mm) _ 90 Central Bureau of Economic Affairs Printed by Shelley Consumer Cooperative 4 1960 2 c A7 _B7__ V. Description of the invention (88) It is wider than the other parts of the comb drive finger member, so that the comb drive The moving finger member narrows downward at the distal end away from the proximal portion 1 0 2 a. More specifically, the proximal portion 1 0 0 2 a of each comb-shaped driving finger member 1 0 2 2 has The width ranges from 100% to 300% of the equilibrium width of the comb drive finger member, preferably from 130% to 90% and more preferably about 165%. The widened proximal portion 1 0 0 2 a has a length ranging from 1% to 30% of the length of the comb-type driving finger member, preferably from 5% to 15% and more preferably about 8% > fixed comb type The driving member 2 3 0 a has a size and shape similar to the comb-shaped driving member 2 0 9 a and is composed of many comb-shaped driving finger members 1 0 0 2 that are actually similar to the comb-shaped driving finger member 1 0 0 2 form. In particular, each comb-shaped driving finger member 1 0 0 4 has a widened proximal portion 1 0 0 4 a and a free end portion 1 0 0 2 that are the same as the proximal portion 1 0 0 2 a. b Same narrowed distal or free end portion 1 0 0 4 b. The first clamp electrode 4 2 0 is provided on the back side of the comb drive strip 2 2 2 opposite to the comb drive finger member. The second clamp electrodes 4 2 1 are vertically attached to the frame frame portion 2 1 6 and extend parallel to the comb-shaped driving strip 2 2 2. Each of the electrodes 4 2 0 and 4 2 1 has a longitudinal interval extending along them. Finger extension 4 2 2 »Comb drive members 209a, 230a are movable between a first position, a second position and a third position as shown in FIG. 32, and in the first position, the comb drive finger members 1 0 0 2, 1 0 0 4 series are separated and the clamping electrodes 420, 421 are close to each other. In the second position, the comb type—r -------- 装 ------ order ------ Line {Please read the notes on the back to write this page) -I --- j Λ _____ This paper size is suitable for Chinese B homes (cm M4 grid (210X297 mm) -91-Economy Printed by the Ministry of Industry and Commerce I Cooperative Co., Ltd. 419602, A7 B7 V. Description of the Invention (89) The driving finger member 1 0 2, 1 0 0 4 starts electrostatic interaction and its free end will extend perpendicular to the comb drive. The finger members extend in a straight line configuration. In the third position, the comb drive finger members 1002 and 1004 are finger-shaped combinations such that the distal end portions of a set of comb drive finger members are closely approached. A set of widened or lengthened proximal end portions of the comb drive finger member. More specifically, when the comb drive finger members 209a and 230a are in the third position, the free end portion of the comb drive finger member will Extending between the enlarged proximal end parts of the opposite comb-shaped driving fingers. In operation and use, the activation procedure of the actuator 102 is as described above. Generally, it will be controlled by the controller. 1 1 1 A pulsed voltage is applied across the comb drive members 209a, 230a to cause the shuttle 712 to oscillate at its resonant frequency. When the comb drive members are in their second position, a pulse signal is preferably applied to cause the comb drive The finger has the smallest lateral instability between 1 0 2 and 1 0 0. The electrostatic comb drive member 2 0 9 a, 2 3 0 a will cause shuttle 7 1 2 during the half-stroke backward from Figure 3 2 Shown in its loose or intermediate position. The restoring force of the spring 2 1 7, 5 6 1 causes the shuttle 712 to extend from its retracted position during the forward half-stroke.-Once the shuttle moves to the position shown in Figure 3 2 In its extended position other than its relaxed position, the springs 2 1 7 and 5 6 1 also help to retract the shuttle.-Once When 7 1 2 oscillates to its maximum amplitude, the first and second sets of electrostatic clamping electrodes of actuator 1 0 1 can be used to hold the shuttle in its fully retracted position or in its fully extended position. When When the shuttle is in its fully retracted position, a voltage can be applied across the comb-shaped drive finger members 1 0 2 and 1 0 4 which are completely combined with fingers to make the comb-shaped drive finger members suitable for the Chinese country. Standard (CNS) A4 specification (210X297mm). G2 I --------- installation ------ ΐτ ------ St (Please read the precautions on the back first to write this page ) Ministry of Economic Affairs, Central Government Bureau, Shellfish Consumer Cooperation, Du Yin «. 4 1 9 6 0 2 1 A7 B7 V. Description of the invention (90) Enlarged proximal part 1002a '1004a as a relative comb drive Refers to the clamped electrodes of the free end portions 100b and 1002b of the component. When shuttle 7 1 2 is in its fully extended position, 'appliable voltage can be applied across comb-shaped drive finger members 2 0 9 a, 2 3 0 a to provide electrostatic attraction between pliers 420, 421 and shuttle 712 and The mirrors 103 are held in their fully extended position. Preferably, the voltage is applied to the clamp electrode of the actuator 1001 when the shuttle 7 1 2 is close to one of its extreme positions and preferably within 5 percent of its extreme position. Therefore, for a shuttle 7 1 2 that is deflected by 100 micrometers towards its fully retracted and fully extended position to have a full stroke length of 200 micrometers, during the last five micrometers of the stroke, a voltage is applied to the opposite Clamp between electrodes. Other embodiments of the actuator of the present invention are provided, in which at least one comb-shaped driving member has comb-shaped driving finger members having different lengths. The actuator 10 2 1 in FIG. 3 is based on the above example. Actuator 1 02 1 is actually similar to actuators 602 and 10 01 and uses similar reference numerals to describe similar elements of actuators 602, 1001, and 1021. Comb-shaped driving finger member 2 0 9 of the movable electrode assembly 2 0 9 in the actuator 1 0 2 1 has a plurality of elongated comb-shaped driving finger members extending longitudinally along the length of the comb-shaped driving strip 2 2 1 1 0 2 1. The finger members 1 0 2 2 are actually similar to the finger members 212 described above except that the finger members have different lengths. In particular, the finger member 1022 linearly increases in length across the comb drive strip 2 2 1. The longest comb drive finger member 1 0 2 2 is actually opposite to the fixed comb drive finger member in length. The paper size is applicable to the Chinese National Standard (CNS) A4 washing grid (210X297 mm) _ 93-ί.- ------- Installation— (Please read the note on the back 4 to write this page first) Thread 4! 9602 Printed by A7 B7, Industrial and Consumer Cooperatives, Central Bureau of the Ministry of Economic Affairs V. Description of Invention (91) 2 3 8 Each of the comb-shaped driving finger members 2 1 1 is the same. The length of the shortest comb-shaped driving finger member 1 0 2 2 is in the range of 0% to slightly less than 100% of the length of the longest comb-shaped driving finger member 1 0 2 2, preferably from 5% to 5 A range of 0% * is more preferably about 10%. The shuttle 7 1 2 can be moved from the first position to the second position shown in FIG. 3 and to the third position. In the first position, the comb drive members 209 a and 230 a are spaced apart so that the forceps 4 2 0 and 4 2 1 are not in concerted electrostatic engagement. In the second position, the comb drive finger member 2 1 1 and the longest comb drive finger member 1 0 2 2 extend perpendicular to the comb drive finger member. In the third position, the comb-shaped driving finger members 2 1 1 and 10 2 2 are in a finger combination that is fully cooperative. In operation and use, different lengths of the comb drive finger member 1 0 2 2 can provide electrostatic attraction. From the point where the longest comb drive finger member 1 0 2 2 and the comb drive finger member 211 cooperate to electrostatically engage to The point at which the shortest comb-shaped driving finger member 1 0 2 2 began to electrostatically engage with the comb-shaped driving finger member 2 1 1, and this electrostatic attractive force increased almost linearly. As a result, after the electrostatic attractive force between the opposing comb-type driving finger members is increased to be greater than the relative forward elastic force of the springs 2 17, 56 1, further deflection of the shuttle 712 will cause the electrostatic attractive force to further increase and quickly move the mirror 1 0 3 Move to its fully retracted position. The larger electrostatic attractive force allowed by the comb drive finger member 1 0 2 2 can provide a spring 2 1 7, 5 6 1 with a larger forward elasticity and thus increase the retraction frequency of the actuator 1 0 2 1 " The length of the comb drive finger member 1 0 2 '2 shown increases linearly from one end to the other end of the comb drive member 2 0 9 a'. However, this paper standard uses the aa home standard (CNS) A4 Specifications (210 X 297 mm). ^ _ I ----------- install-(please read the precautions on the back to write this page), 1T. Ίί Α7 Β7 Central Bureau of Standards, Ministry of Economic Affairs Consumption cooperation of employees Du Yinzhuang 5. Description of the invention (92) It should be understood that comb-shaped drive members with other configurations such as comb-shaped drive finger members with different sizes can also be provided. In addition, it should be understood that the comb-shaped driving finger member 2 1 1 of the opposite comb-shaped driving member 2 3 0 a may also have different lengths and be within the scope of the present invention. The actuator of the present invention may be provided with a larger configuration to provide a larger force «In this regard, a central, sturdy, substantially similar actuator 501 and having a substantially similar connector frame 216 is provided. The microactuator 1201 of the drive bar 1202 (see FIG. 34). The driving bar 1202 moves along the longitudinal axis 1203 of the actuator 1201 above the substrate 2 1 3. Similar reference numerals are used to describe similar elements of the actuators 5 0 1 and 1 2 0 1. Four comb drive assemblies 208, 2 10 will be included in the actuator 1 2 0 1 to retract the drive bar 1 2 0 2 from its starting or rest position as shown in FIG. 3 4 In the return position, four different comb-shaped drive assemblies 209 and 2 30 are included in the actuator 1201 to extend the drive bar 1202 from its rest position to the extended position. Actuator 1 2 0 1 moves downwards to its retracted position and upwards to its extended position in FIG. 3 4. The comb drive assemblies 2 0 8 and 2 10 are arranged on the side of the drive bar 1202, opposite to the comb drive assemblies 209'230. The first movable electrode assembly 208 has four comb-shaped driving members 208a, 208b, 208c, 208d, four comb-shaped driving members 208a, 208b, 208c, 208d and a movable driving bar 1 2 0 2 Formed and extending in a manner that is perpendicular to it 'The second movable electrode assembly 209 has four comb-shaped drive members I .-------- t .-- (Please read the precautions on the back first t (Write this page), π-line paper scales are used in China (CNS > Α4 grid (210X297 mm) · 95-A7 B7 _ V. Description of the invention (93) 209a, 209b, 209c, 209d, four Comb drive members 209a, 209b, 209c, 209 (1 are integrally formed with the drive bar and extend perpendicular to the drive bar in a direction relative to the comb drive members 208a, 208b, 208c, 208d. * First fixed The electrode assembly 210 has four comb-shaped driving members 210a, 210b, 210c, and 210d. The four comb-shaped driving members 210a, 210b, 210c, and 210d are mounted on the substrate 21, and the individual driving members 208a, 208b, 208 c, 208d mesh together, the second fixed electrode assembly 230 has four comb drive mechanisms 230a, 230b, 230c, 230d, four comb drive members 230a, 230b, 230c, and 230d are mounted on the base 213 and mesh with individual drive members 209a, 209b, 209c, and 209d. Central Ministry of Economic Affairs Printed by the Office of the Consumer Cooperative (please read the notes on the back to write this page) Actuator 1 2 0 1 is formed from a silicon wafer and has first and second springs 214 and 217, and first springs 214 and 217 The system is designed to be non-linear and thus a "bent" condition under static undeflected conditions. The springs 2 1 4 and 2 1 7 are both coupled to the base 2 1 3 at their first end 2 4 and at their second end 2 4 4 Coupling to shuttle 1 0. When shuttle 10 9 is in a rest condition halfway between its retracted and extended positions, each spring 2 1 4, 2 1 7 of the actuator 1 20 1 Parts 224, 2 2 5 will bend towards each other. In this embodiment, when the shuttle 10 9 is moved from its starting position to its extended position and the second movable electrode assembly 2 0 9 is a comb-shaped finger member 2 1 1, 2 1 2 and the second fixed electrode group This paper size is suitable for H® home (CNS M4 specification (210XW7 mm) -96- 419602 A7 B7 Printed bags of the Ministry of Economic Affairs and the Central Bureau of Standards and Consumer Goods Co., Ltd. 5. Description of the Invention (94) Piece 2 3 0 When electrostatically meshed and then overlapped, the 'spring 2 1 7 will stretch from its pre-curved start position to linear position. Similarly, when shuttle 10 moves from its starting position to its retracted position and the first movable electrode assembly 2 0 8 is a comb-shaped finger member 2 1 1, 2 1 2 and the first fixed electrode assembly 2 When 10 engages and then overlaps, the spring 2 1 4 will stretch from its pre-curved starting position to a linear position. In each case, when the spring portions 2 2 4 and 2 2 5 of the individual springs are perpendicular to When the individual comb drive finger members 2 1 1 become linear in the direction, the lateral rigidity of the spring portions 2 2 4 and 2 2 5 of the individual springs will be perpendicular to the individual comb drive finger members 2 1 1 Increase in direction. In this way, the lateral rigidity of the individual springs and the lateral restoring force exerted by these springs on these comb drive finger members 2 1 1 will increase as a function of the amount of overlap between the comb drive finger members 211'212. When these comb-shaped driving finger members 2 1 1, 2 1 2 become finger combinations, the springs 2 1 4, 2 1 7 are thus used to drive the comb-shaped driving finger members 2 1 1 to the adjacent The comb-shaped drive means a stable position midway between the members 212. Although, when the springs 214, 2 1 7 are deflected in one direction, they will be straightened, but when the shuttle 1 9 is moved in the opposite direction, the spring portions 2 2 4 and 2 2 5 will be further from their rest positions. Bend towards each other. A second set of folded cantilever beams or springs 5 6 1 and 5 6 2 are set in the actuators 1 2 0 1. They are actually similar to the springs 214 and 217 in size and composition. Each spring 561, 562 is coupled at its first end 5 6 3 to the base 2 1 3 and at its second end 5 > 4 is coupled to the shuttle 1 09. Each group of springs 56 1, 562 includes bends made by fold-man ------------ install-{Please read the precautions on the back first to write this page) -4¾ Harness paper dimensions use China a Home Standard (CMS) A4 specification (210X297 mm). 97 ^ Printed by the Ministry of Economic Affairs of the Bureau of Work and Consumer Cooperation, Du Du, V. Description of the Invention (95) Part 5 6 8 The first and second sets of joints The parallel spring portions 566, 567 »When in the relaxed position, the springs 56 1, 5 6 2 actually extend perpendicular to the direction of movement of the electrode assemblies 2 0, 2 0 9. More specifically, as shown in the figure As shown in Figure 3, when the shuttle 10 is in a rest condition halfway between its retracted and extended positions, the spring portions 5 6 6 and 5 6 7 will bend apart from each other. When the first movable electrode When the overlap of the component 2 0 8 and the comb-shaped finger member 2 1 of the first fixed electrode component 2 0 increases and the shuttle 1 9 moves to its retracted position, the spring 5 6 2 is designed to stretch To the linear position. Similarly, when the comb-shaped finger members 2 1 1 and 2 1 2 of the second movable electrode assembly 2 9 and the second fixed electrode assembly 2 3 0 move to their extensions When set, the spring 5 6 1 is designed to stretch to a linear position. Although the springs 56 1 and 562 will straighten when deflected in one direction, when the shuttle 109 moves in the opposite direction, the spring portions 566, 567 will bend more away from each other from their rest position. Springs 5 6 1, 5 6 2 operate in the same manner as described above with respect to springs 2 1 4, 2 1 7. Springs 2 1 7, 56 1 is a comb-shaped drive assembly 2 0 9 and 2 3 0 disposed on one side of the drive bar 1 202, and springs 214 and 562 are comb-shaped drive disposed on the other side of the drive bar 1202 The opposite ends of the components 208, 2 1 0. The first end portions 243, 563 of the springs 2 14, 217, 561, 562 are fixed to the base 2 1 in a manner close to the central longitudinal axis 1 2 0 3 3. The spring 2 1 7, 5 6 1 is a hard support 1 2 1 0 (read the notes on the back before reading '^ write this page) !, I i · -l · _ This paper size GM China's 8 standard labels (〇 阳 > 八 4 祝 格 (2 丨 0 > < 297mm) -98- 4 1.9602 ： A7 B7 V. Description of the invention (96) connected to their individual discounts The parts 2 4 5 and 5 6 8 are actually similar to the hard support 1 3 1 and extend between the folded parts 245 and 568 and are parallel to the drive bar 1202. The spring 2 1 4, 5 6 2 are connected to their individual folding sections 245, 568 by hanging rigid support members 1 2 1 2. The support member 1210 is actually similar to the hard support member 1 3 1 at the folded portion. Parts 2 4 5 and 5 6 8 extend between and parallel to the driving bar 1 2 0 2. In an embodiment of the four springs of the actuator 1 2 0 1, one of the pair of springs bent at each end of the actuator 5 0 1 2 1 4 or 5 6 1 and 2 1 7 or 5 6 2 will Preferably straightened and another curved spring pair will bend at each deflection limit of the movable electrode assemblies 208, 209 and shuttle 109. The springs 214 '217, 561, 562 and shuttle 109 have high out-of-plane rigidity as described above. Printed by the Central Laboratories of the Ministry of Economic Affairs, Shellfish Consumer Cooperative (please read the note on the back, please write this page) Actuator 1 2 0 1 can be operated in a similar way to the actuator 5 0 1 described above . Use or drive the forward or upper end of the strip 1 2 0 2 to exert force or provide movement to the appropriate object. "As the lateral deflection of the comb drive members 208, 209 increases, the springs 214, 217, 5 6 1, 5 The stable lateral force provided by 62 increases faster than the electrostatic lateral force generated between the finger-shaped comb-shaped driving finger members 2 1 1 and 2 1 2. In the embodiment shown in Fig. 34, as the lateral deflection increases, the stable lateral force increases at least ten times faster than the electrostatic lateral force. The configuration of the comb drive assembly on the two sides of the drive bar 1 2 0 2 will increase the force of the actuator 1 2 0 1 but will not increase the length of the actuator and the length of the drive bar 1 2 0 2 Paper size adopts China National Standard (CNS > A4 specification (210X297mm) -99- 41 9 A7 B7 Printed by the Central Sample Rate Bureau of the Ministry of Economic Affairs, Industrial and Commercial Cooperative Cooperatives) V. Description of invention (97) Backward or shrinking The action limiting mechanism or limiter 1 2 1 6 will be set on the rear end of the drive bar 1 2 0 2. When the shuttle 1 9 is in its retracted position, it will be fixed on the base 2 1 3 by chewing. Piece 1 2 1 6. It should be understood that the actuator 1 2 0 1 may be provided with or without the pliers 4 2 0, 4 2 1 and / or other features described in relation to the actuators described above and in the present invention. Within range. Figure 35 shows another embodiment of the optical micro switch using the actuator of the present invention. Among them, the optical micro switch 1 3 0 1 is formed by a microchip 1 302 and has a single input port 1 303, a single input port 1 3 0 3 is coupled to at least one input optical carrier element or optical fiber 98 on the micro chip 1 3 02. One side of the micro chip 1 302 extends Individual suitable optical components such as single-mode polarization maintaining (PM) fiber 9 7 are provided. Only part of fiber 97, 98 shown in Fig. 35 * Microchip 1 3 0 2 has a channel opening at input port 1 3 0 3 Or groove 1 3 0 7 to receive the input fiber 9 8 and a channel or groove 1 3 0 8 having a micro switch 1 3 0 1 at the outlet port 1 3 0 1 to receive each output fiber 9 7. The vertical axis 1 3 1 1 extends along the channel 1312 of the optical switch 1301 and extends parallel to the inlet port 1303 and perpendicular to the outlet port 1304. * Many two actuators 1 0 0 1 will be arranged along the dotted line. In the longitudinally spaced position, the dotted line extends parallel to and spaced from the longitudinal axis 1311. Both the first and second actuators 1001 have a mirror 103, and the mirror 103 is at a 4 5 β angle with respect to the longitudinal axis 1 3 1 1 Tilt to guide the appropriate input such as the linearly polarized laser light 1 9 1 provided by the entrance fiber 9 8 --H ----------- (Please read the precautions on the back, -Λ · write (This page)

.1T line paper size is applicable to Chinese national standard (CNS > A4 size (210X297mm). 100 printed by the Ministry of Economic Affairs, China ’s Bureau of Labor and Consumer Cooperatives 4 1 9 ι 1 'kl _B7_ Description of the invention (98) The laser light passes through an angle of 90 °. The mirror 103 of each actuator 10 01 is mounted on the bracket 2 1 9 and guides the laser light to the front of the actuator 1 0 0 1 through the individual exit port. 1 304 'Exit port 1 304 is configured to be opposed to the actuator 1 0 0 1 with respect to the longitudinal axis. The mirror 1 0 3 can be used by the individual actuator 1 0 0 1 shuttle 7 1 2 in the first or retracted position And the second or extended position, in the first or retracted position, the mirror 1 0 3 is the path away from the laser light 1 9 1, in the second or extended position, the 'mirror 1 0 3 is in the laser light 1 9 1 in the path. The fixed stopper 2 9 2, 2 9 3 will restrict the movement of the shuttle 7 1 2 to determine the retracted and extended position of the mirror 103. It should be understood that the optical switch 8 30 can be provided with a Actuator 1 00 1 to direct the laser light 191 back to the actuator and within the scope of the present invention is actually similar to the mirror 1 0 3 and the mirror 1 3 1 6 is actuated by the first and second Device 1 0 0 1 Mirror 1 0 3 Behind the top of the channel 1 3 1 2 The bracket 1 3 1 7 is rigidly mounted to the microchip 1 3 0 2 * Mirror 1 3 1 6 will be virtually the same as the mirror 1 0 3 mode operation and when the mirrors 1 0 3 of the first and second actuators 1 0 0 1 are both in the retracted position • used to deflect the laser light through the third output port 1 3 0 4. Appropriate lenses such as the traditional micro-steep refractive index collimating lens 1 0 2 will be placed inside the input port 1303 and the lens 102 will be placed in each mirror 103, 1 3 1 6 and an individual groove 1 3 0 3 Between the entrance of the 'micro switch 1 3 0 1 and its actuator 1 0 0 1 are made of a silicon wafer with a substrate 213 in the same manner as described above for the actuator. Although the optical micro switch 1 3 0 1 indicates that the size of two electrostatic micro-papers is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) · xian _ ~~ --------- ^ ------, * τ ------ 0 (please read the precautions on the back-ί: write this page) A7 B7 419602 V. Description of the invention (99) (please read the precautions on the back and fill in this page first) Actuation器 1 0 0 1 However, it should be understood that classes can be provided Any switch similar to a miniature switch 1 3 0 1 or any switch described herein and having less than two or more than two types or other types of micro actuators described herein and is within the scope of the present invention Inside. It can be known from the above that the provided optical switch or micro-opening relationship utilizes at least one electrostatic micro-actuator. The electrostatic micro-actuator has at least one comb-type driving assembly therein. In a simple embodiment (not shown) Its micro switch is equipped with a single electrostatic micro actuator. The lateral instability force in the comb drive assembly is minimized and the resonance characteristics of the comb drive assembly are used to obtain a large deflection. In several embodiments, many electrostatic microactuators will extend at least one of the microswitches. Channel alignment. Optical switches can be used in magneto-optical data storage systems. Although the reference of the specific embodiment of the comb drive micro-actuator and the specific embodiment of the optical micro switch using the comb drive micro-actuator, The invention, however, is an embodiment that is broad enough to encompass modifications, variations, and substitutions of the scope disclosed above. The features of some embodiments may be combined with other embodiments and are within the scope of the invention. In addition, the clamping electrodes, rigid electrodes and other related components described above can be used individually or collectively in other parts of the actuator. The microswitches disclosed here can be actuated without comb drive components. Device. In addition, any of the micro switches disclosed herein can be used with a variety of other micro actuators. The foregoing can be used in magneto-optical data storage and retrieval systems or in various other systems including telecommunication systems and network systems. ‘This paper is based on China ’s standards {CNS > Α4 size (210 × 297 mm) _ < | 〇2 _

Claims (1)

Printed by the Central Bureau of Standards of the Ministry of Economic Affairs and Consumer Cooperatives 4 1 9 6 Ο 2 ″ issued α _ D8 VI. Patent Application Scope 1. A type of optical micro M switch for laser light extending along the path, including The body of an inlet port and a plurality of outlet ports that receive laser light, a plurality of mirrors carried by the body, a plurality of micromotors carried by the skeleton, an attachment mechanism, and a controller, the attachment mechanism is used to connect the multiple The mirror is coupled to a plurality of individual micro motors. Therefore, the micro motor can selectively move the mirror from the first position leaving the laser light path to the second position entering the laser light Ψ path to guide the laser light. To one of the outlet ports, each micromotor has at least one electrostatically driven comb drive assembly to move the individual motor to one of the first and second positions. The controller is electrically coupled to the micromotor to provide The control signal is given to the micro-motor. 2. For example, the optical micro-switch of the first scope of the patent application, combining multiple magneto-optical disc surfaces, multiple flying read-write heads, and multiple output light-carrying elements, each Line head can be moved in the one surface of the magneto-optical disc contained in one of the optical element and the output will be coupled to each of the flying head. 3. The optical micro switch according to item 2 of the patent application, wherein the surfaces of the plurality of magneto-optical discs include a magneto-optical disc stack, and each magneto-optical disc has at least one magneto-optical disc surface. 4. The optical micro switch according to item 2 of the patent application scope, wherein the laser light is reflected by one of the surfaces of the magneto-optical disc to generate the reflected laser light with polarization rotation * further comprising an optical component carried by the body to measure the reflected laser The polarization of the incident light is rotated. 5. The optical micro switch according to item 1 of the patent application scope, wherein the plurality of mirrors and the plurality of micro actuators include a first plurality of mirrors and corresponding micro motors, and a second plurality of mirrors and corresponding micro motors, the Laser light --------------------------- 7-line order (please read the note on the back first, and then this page). This paper is used for countries with difficulty in measuring the edge.椹 准 {CNS) A4 wash grid (public) -103- 419602 A8 Ββ C8 D8 Printed by the Ministry of Economic Affairs Bureau βζ 工 consuming cooperatives 6. The scope of patent application can be in the first multiple micromotors and the second The plurality of micromotors extend between such that the first plurality of micromotors and the second plurality of micromotors face each other with respect to the path of the laser light. 6. The optical micro switch according to item 5 of the patent application park, wherein the first plurality of mirrors and corresponding micro motors are linearly arranged along the first dotted line and the second plurality of mirrors and corresponding micro motors are extended along the first Two dashed lines are arranged linearly, and the second dashed line extends parallel to the first dashed line and the laser light path. For example, the optical micro switch of item 5 of the patent application scope, wherein the first plurality of micro motors includes at least two micro motors, The two micro motors are arranged side by side along the first dotted line, the first dotted line extends perpendicular to the path of the laser light, and the second plurality of micro motors includes at least two micro motors. The second dashed line is arranged side by side, and the second dashed line extends perpendicular to the path of the laser light. ·--. 8. If the optical micro switch of the scope of the patent application No. 5, wherein the first and second plurality of mirrors are inclined to guide the laser light to one side "9. If the optics of the scope of the patent application No. 5 The micro switch, wherein the plurality of mirrors and the plurality of micro motors include a third plurality of mirrors and corresponding micro motors, and a fourth plurality of mirrors and corresponding micro motors. The laser light path may be between the third plurality of micro motors and the fourth micro motor. The plurality of micromotors extend between the third micromotors and the fourth micromotors so as to face each other with respect to the laser light path. The mechanism including an additional mirror and a corresponding additional micromotor is used for selection. The laser light is guided linearly along the i-th path and the second path. The first path extends between the first and second micro motors. The first-^-^ ----- install --- -.--; Order ------ line {zhuxian "Precautions for reading the back«. Nest page) ______ 1--. 'This paper size 逋 Λ Chinese national standard (CNS) A4 * l Grid (210X297 mm) -104- Λ8 BS C8 D8 419602 6. The scope of patent application is in the third and fourth paths Extending between the micro-motor. 10. The optical micro switch according to item 9 of the patent application scope, wherein the first and second plurality of mirrors and the third and fourth plurality of mirrors are inclined to guide the laser light in one direction. 1 1. The optical micro switch according to item 1 of the patent application, wherein the plurality of mirrors and the plurality of micro motors include at least a first mirror and a corresponding first micro motor, and at least a second mirror and a corresponding second Micro-motor, the path of laser light may extend between at least one first micro-motor and at least one second micro-motor, so that at least one first micro-motor and at least one second micro-motor will be mutually relative to the path of laser light Faced with the plurality of mirrors and the plurality of micromotors further including at least a third mirror and a corresponding third micromotor, and at least a fourth mirror and a corresponding fourth micromotor, the path of the laser light may be at least one first The three micro motors extend between at least one fourth micro motor, so that at least one third micro motor and at least one fourth micro motor face each other with respect to the path of the laser light, including an increased mirror and a correspondingly increased micro The mechanism of the motor is used to selectively guide the laser light along the first path and the second path, the first path is from to — the first micromotor and the Extending between a second micro-motor, the second path based at least extends between at least a third and a fourth micromotor micromotor. 1 2. The optical micro switch according to item 1 of the scope of patent application *, wherein the plurality of micro motors include a plurality of at least two micro motors arranged side by side along a dotted line that extends perpendicular to the path of the light β 1 3. If the optical micro switch of item 1 of the scope of patent application, where -l ·, -------- installation-(please read the precautions on the back first) This page is the center of the Ministry of Economics Printed by the Bureau of Work and Consumer Cooperatives, printed on paper scales and used in poor countries (CNS) A4 format (210XM7 mm) -105- 41 9602 A8 B8 C8 D8 Printed by the Consumer Affairs Cooperative of the Central Bureau of the Ministry of Economic Affairs The scope of the patent application is that at least twelve mirrors and corresponding micromotors are used to selectively guide the laser light to a plurality of parallel directions. 14. The optical micro switch according to item 1 of the patent application scope, wherein each mirror includes a silicon layer and a reflective material adhered to the silicon layer, so the silicon layer provides a surface with low roughness and high flatness. 15. The optical micro switch according to item 14 of the scope of patent application, wherein each mirror further includes at least one pair of dielectric layers covering the reflective material layer. The at least one pair of dielectric layers includes a first low-dielectric material layer and Second layer of high dielectric material. 16. According to the optical micro switch of the first patent application range, at least one of the micro motors includes a stopper mechanism to limit the movement of the corresponding mirror to the second position. Therefore, the stopper mechanism can facilitate the operation of the optical micro switch. Repeated from time to time. 17. The optical micro-switch according to item 16 of the patent application, further comprising a wire mechanism for electrically connecting the stopper to the controller. Therefore, the stopper mechanism may allow the controller to monitor when the mirror is in the second position. Position * 1 8 .—An optical micro switch for laser light extending along a path, including a body with numerous exit ports, a plurality of mirrors carried by the body, a coupling mechanism, and a controller, the coupling mechanism is coupled To each mirror to electrostatically drive the mirror between a first position leaving the laser light path and a second position entering the laser light path to selectively direct the laser light to one of the exits, the controller is electrically coupled To the coupling 'mechanism to provide electrical control signals to the mechanism. The scale of this paper is in Chinese «Home Standard (CMS M4 Specification (210X297 mm) _ 1〇6 1Ί 1 nnn I un —i ^ '-.-(Notes on the back of Shixian M reading this page) Π 9 60 2 Α8 Β8 C8 D8 Printed by the Central Government Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives 6. Application for patent Fangu 1 9. For example, the optical micro switch of the patent application No. 18, combined with multiple output light-carrying elements, multiple Flying read-write heads and multiple optical disc surfaces, the multiple output light-carrying elements are arranged at individual exits of the body to selectively receive laser light, and the multiple flying read-write heads can be mounted on individual optical discs 2 0. An electrostatic miniature actuator including a base, at least one comb-shaped drive assembly, and first and second spaced-apart beam-shaped spring members, the at least one comb-shaped drive assembly having a first and A second comb drive member, each of the first and second comb drive members is provided with a comb drive finger member, the first comb drive member is mounted on a base, and the at least one comb drive assembly is configured Between the first and second beam-shaped spring members, the Two comb-shaped driving members are covered on the base, and each of the first and second beam-shaped members has a first end portion fixed to the base and a second end portion fixed to the second comb-shaped driving member. The second comb-shaped driving member is suspended on the base, and the second comb-shaped driving member is movable between a first position and a second position. In the first position, the first and second The comb-shaped driving finger members of the two comb-shaped driving members are spaced apart, and in this second position, the comb-shaped driving finger members of the first and second comb-shaped driving members are finger-shaped combinations. 2 1. As patented The electrostatic micro-actuator of the range item 20, wherein the first and second split spring members are rigid in a direction perpendicular to the moving direction of the second comb-shaped driving member, and each of the first and second beam-shaped members is rigid. The spring member is movable between a first position and a second position, in which the beam-like spring member is in a non-linear configuration and occurs when the second comb drive member is in the first position, In the second place, please listen to the beam-like bullet first Item binding, clothing, binding, paper, China «家 # 准 （CNS） A4 wash grid (210XM7 mm). 1〇7_ Printed by the Central Bureau of the Ministry of Economic Affairs J. Industry and Consumer Cooperative«. 419602 i H C8 ____ D8 VI. Patent application scope The spring member will be in a linear configuration extending perpendicular to the moving direction and occurs when the second comb-type drive member is in the second position. Therefore, when the second comb-type drive member is in the second position The rigidity of the first and second beam-shaped spring members in the direction perpendicular to the moving direction will be the largest. 2 2. For example, the electrostatic micro-actuator of the scope of application for patent No. 20, wherein the second comb drive The members are individually fixed to the base by the first and second beam-like spring members. 2 3. The electrostatic micro-actuator according to item 20 of the patent application scope, wherein the second comb-shaped driving member is movable from the second position to the second force under the force of the first and second beam-shaped spring members. In the first position, the micro-plough actuator does not need to have an additional comb-type drive assembly, the additional comb-type drive assembly has first and second comb-type drive members, and the first and second comb-type drive members have individual Comb drive finger member, wherein the second comb drive member of the added comb drive assembly can be moved to a position in which the comb drive finger member of the first mentioned comb drive assembly When it is spaced apart, the comb-shaped driving finger member of the added comb-shaped driving assembly is a combination of fingers. 24. The electrostatic microactuator according to item 20 of the patent application, further comprising first and second electrostatic clamping electrodes, the first and second electrostatic clamping electrodes being perpendicular to the second comb-shaped driving member. Extending in the direction of movement 'The first and second clamp electrodes can be moved between a first position and a second position in which the clamp electrodes are spaced apart and occur when the second comb drive member is in In the second position, in the first soil position, the clamped electrodes are in close proximity to each other and occur at the second comb-shaped driving member. The paper wave standard is applicable in the SB home sample standard < CNS} Α4 size (210X297 male ^) ^ ~, 1〇g. — ^ -------- ^ ------, ΤΓ ------ ^---(Please read the notes on the back first ...- (Written on this page) The Central Government Bureau of the Ministry of Economic Affairs, Consumer Affairs Cooperation Du Yince The Central Government Bureau of the Ministry of Economic Affairs, Consumer Affairs Cooperatives printed A8 B8 C8 D8 6. When the scope of patent application is in this first position, therefore, when voltage is applied When the clamp electrodes are arranged between the clamp electrodes in the second position in close proximity to each other, the clamp electrodes can easily The two comb-type driving members are held in the first position. "2 5. If the electrostatic micro-actuator of item 20 of the patent application scope further includes an additional comb-type driving assembly, the additional comb-type driving assembly is arranged in the There are first and second comb-shaped drive members between the first and second beam-shaped spring members, and the first and second comb-drive members of the additional comb-shaped drive assembly are provided with comb-shaped drive finger members. The first comb-shaped driving member of the added comb-shaped driving group # is installed on the substrate, and the second comb-shaped driving member of the added comb-shaped driving assembly covers the substrate and passes through the first and second beams. The spring member is suspended on the base, and the second of the added comb drive assembly is movable between a first position and a second position. In the first position, the added comb drive assembly The comb drive finger members of the first and second comb drive members are spaced apart. In the second position, the comb drive fingers of the first and second comb drive members of the additional comb drive assembly are added. Component is a combination of fingers, when the first When the second comb drive member of the comb drive assembly mentioned at once is in the first position, the second comb drive member of the added comb drive assembly is in the second position. 26. The electrostatic miniature actuator according to item 25 of the patent application scope, further comprising first and second sets of electrostatic clamping electrodes extending perpendicular to the moving direction of the second comb drive member, each of the first and The second set of clamp electrodes each has a first and a second clamp electrode, and the first and second clamp electrodes are movable between a first position and a second position, in which the clamp electrodes are spaced apart from each other in the In this second position, the clamp electrodes are in close contact with each other on the paper scale. The Chinese national kneading rate (CNS) A4 specification (210X297 mm) _ 1〇g _ 4 9602 'ϋ C8 _. _ D8 VI. Patent application Fan Yuanjin 'When the first comb drive member of the comb drive assembly mentioned above is in the first position, the clamping electrodes of the first group are close to each other, and when the second comb drive assembly When the comb drive member is in the first position, the clamp electrodes of the second group are in close proximity to each other, so * when a voltage is applied between the clamp electrodes in the second position in close proximity to each other, each group of clamp electrodes is Easy to hold A second comb drive member to the respective first position thereof. 27. The electrostatic microactuator of claim 20, further comprising a microactuator that is normally closed to lock the second drive member in its first and second positions. 28. If the electrostatic miniature actuator of the scope of patent application No. 20, wherein each of the first and second comb-type driving members has a comb-shaped driving finger member having a proximal end and a distal end portion | each near The end portions have a width and each distal end has a width that is less than the width of the individual proximal portions. 2 9. The electrostatic miniature actuator according to the scope of patent application No. 20, wherein the comb-type driving finger members of at least one of the first and second comb-type driving members have different lengths β 3 0. Fanyuan's electrostatic microactuator of item 20 further includes a stopper member * to limit the movement of the second comb-type drive member to the second position, so the stopper member facilitates the operation of the microactuator. Repeatability. 31. If the electrostatic miniature actuator of the 30th scope of the patent application, further includes a controller and a wire mechanism | the wire mechanism is used to electrically connect the stop mechanism to the controller, so the stop Institutions can allow this control ----- r ----; --- install ------- ^ order -----: 1 line (please read the precautions on the back first and write this page) Central Standards Bureau of the Ministry of Economic Affairs 工 工 消 t-cooperative print $. This paper size is applicable to China National Standards (CNS) A4 wash (210X297) *. 11〇_ 419602 A8 B8 C8 D8 It is monitored when the second comb drive member is in the second position. 3 2 ♦ If the electrostatic miniature actuator of the scope of patent application No. 20, wherein the comb-shaped driving finger member of the second comb-shaped driving member can be moved from the first position to the second position and to the second Three positions. In the first position, the comb-shaped driving finger members of the first and second comb-shaped driving members are spaced apart. In the second position, the comb-shaped driving finger members are partially finger-shaped. Combination, in the third position, the comb drive finger member is a completely finger combination, and the controller includes a mechanism to provide a voltage between the first and second comb drive members during only a part of a half stroke To drive the comb-type driving finger member of the second comb-type driving member to the third position. 3 3. The electrostatic miniature 2 actuator according to item 32 of the patent application scope * wherein the controller includes a mechanism so that when the comb-type driving finger member is partially engaged but before the comb-type driving finger member is fully engaged , Providing a voltage between the first and second comb-type driving members. 34. The electrostatic miniature actuator according to claim 20, further comprising a mirror and an attachment mechanism. The attachment mechanism is used to couple the mirror to the at least one comb drive assembly, and the attachment mechanism includes a bracket member. The bracket member is provided with a concave wall therein, and the mirror has a pile portion provided thereon to be arranged in the concave wall to facilitate the alignment of the mirror on the bracket member. 35. The electrostatic miniature actuator according to claim 20 of the patent application scope, further comprising a mirror and an attachment mechanism, the attachment mechanism is used to couple the mirror to the at least one comb-type drive assembly, and the attachment machine tip includes a device. There is a bracket member with a container to accommodate the mirror, and the mirror is used to fix the mirror inside the container. The B a car (CNS > A4 size (210X 297 mm) _jj, — Bu -------- installed ------ order ------ line (please read the note on the back ^ item 4 " scold this page} Ministry of Economic Affairs central standard rate negative work «fees Cooperative seal $ L 419602 AS B8 Μ Central Consumers ’Bureau of the Ministry of Economic Affairs 工 Industrial Cooperative Cooperative Seal It 6. The patent-applied adhesive mechanism and movably mounted on the substrate to hold the mirror in the container during the fixed period 3 Θ · A method of operating a comb drive assembly, the comb drive assembly having first and second comb drive members, the first and second comb drive members having individual comb drive fingers Component, wherein the second comb-type drive member may be positioned relative to the first comb-type drive member at Move between a position and a second position, in which the comb drive finger members of the first and second comb drive members are spaced apart, in the second position, the first and second comb drive members The comb-shaped driving finger members of the two comb-shaped driving members are combined in a finger shape, and the method includes oscillating the second comb-shaped driving member in a resonant manner to move the second comb-shaped driving member to the second position and the first The two-comb driving member is held in the second position β 3 7. The method according to item 36 of the patent application scope, wherein the holding step includes holding the second comb-driving member in the second position by electrostatic force. Medium. 38. The method according to item 37 of the scope of patent application, wherein the holding step includes holding the second comb-type driving member in the second position by mechanical force. '39. The method of item 38, further comprising a releasing step for releasing the second comb-shaped driving member from the second position to allow the second comb-shaped driving member to move to the first position β 4 0. — Static electricity Miniature actuators including substrate, At least one comb-shaped drive assembly and at least one beam-like spring member 'The at least one comb-shaped drive assembly has first and second comb-shaped drive members, each of the first and second comb-shaped IK--1-- --Installation ------ Order ------ Line- (Please read the Precautions on the back ', write this page) This paper size is in use 8 «Home rubbing (": Yang ") 4 specifications (210 乂 297 male *) _112, A8 B8 C8 D8 41PB02 6. Scope of patent application (please read the precautions on the back first, and then ^^ this page) The driving members are provided with comb-shaped driving finger members, the first The comb-shaped driving member is mounted on the base, and the second comb-shaped driving member is covered on the base. The at least one beam-shaped spring member has a first end portion fixed to the base and fixed to the second comb. A second end portion of the driving member, the second comb-shaped driving member is movable in a direction between a first position and a second position, in which the first and second comb-shaped driving members are The comb drive finger members are not actually fully finger-shaped, and in this second position, the comb drives of the first and second comb drive members The members are actually completely finger-shaped combinations, the at least one beam-like spring member is rigid in a direction perpendicular to the moving direction of the second comb-shaped drive member and is movable between a first position and a second position * In the first position, the at least one beam-shaped spring member is in a non-linear configuration and occurs when the second comb-shaped drive member is in the first position, in the second position, the at least one beam-shaped spring member is in The flexible configuration extending perpendicular to the moving direction occurs when the second comb drive member is in the second position *. Therefore, the rigidity of the at least one beam-shaped spring member in the direction perpendicular to the moving direction will follow the The second comb-shaped drive member is increased when moving from its first position to its second position. Printed by the Central Cooperative Bureau of the Ministry of Economic Affairs of the People's Republic of China, such as the electrostatic micro-actuator of the patent application No. 40, wherein the second comb-shaped driving member can be between the first position and the second position. Movement • In the first position, the comb drive finger members of the first and second comb drive members are spaced apart. In the second position, the comb shapes of the first and second comb drive members are spaced apart. The drive finger members are actually completely finger-shaped. 4 2. The static micro-actuator according to item 41 of the patent application, further including an additional beam-shaped spring member, the paper beam size of the additional beam-shaped spring member is applicable to the Chinese National Standard (CNS) A4 specification ( (210X297 mm) -113- Printed A8 by I Industrial and Consumer Cooperatives of the Ministry of Economic Affairs Bureau of the Ministry of Economic Affairs. D8 6. The scope of patent application has a first end part fixed to the base and a second comb drive member. In the second end portion, the added beam-shaped spring member is rigid in a direction perpendicular to the moving direction of the second comb-shaped driving member and can be selected between the first position and the second position. In the first position, the added beam-shaped spring member is in a non-linear configuration and occurs when the second comb-shaped drive member is in the first position. In the second position, the added beam-shaped spring member is It is in a linear configuration extending perpendicular to the moving direction and occurs when the second comb drive member is in the second position. 43. The electrostatic miniature actuator according to item 41 of the scope of patent application, further comprising first and second electrostatic clamping electrodes extending perpendicular to the moving direction of the second comb-shaped driving member, the first and second clamping The electrode is movable between a first position and a second position, in which the clamped electrodes are spaced apart and occur when the second comb drive member is in the second position, and in the second position, the clamped The electrodes are in close proximity to each other and occur when the second comb-type driving member is in the first position. Therefore, when a voltage is applied between the clamp electrodes disposed in close proximity to each other in the second position, the clamp electrodes can be easily held. The second comb-shaped driving member is in the first position. 4 4 · An electrostatic micro-actuator comprising a base, at least one comb-type drive assembly, and a spring mechanism, the at least one comb-type drive assembly has first and second comb-type drive members, each of the first and second Each of the comb-shaped driving members is provided with a comb-shaped driving finger member. The first comb-shaped driving member is mounted on the base, and the second comb-shaped driving member is covered on the base and can be positioned between the first position and the second position. In the first position, the comb drive finger members of the first and second comb drive members are not actually pointed completely (please read the precautions on the back before filling this page) Paper size free use country national rate (CNS) A4 specifications < 210X297 mm) _ '' 4 «Printed by the Central Ministry of Economic Affairs of the Wuwu Employee Consumer Cooperative 19 60 2? 88 D8 In the second position, the comb-shaped driving finger members of the first and second comb-shaped driving members are actually completely finger-shaped combinations, and the spring mechanism has a first end portion fixed to the escape bottom and fixed to the Second end portion of second comb drive member To provide rigidity in a direction perpendicular to the moving direction of the second comb drive member, and the rigidity increases as the second comb drive member moves from its first position to its second position. 4 5. The electrostatic micro-actuator according to item 44 of the patent, further comprising a mechanism that leaves the first and second comb-type driving members for electrostatically fixing the second comb-type driving member. 0 4 6 in the first position. The electrostatic micro-actuator according to item 45 of the scope of patent application | wherein: the mechanism for electrostatically holding the second comb-type driving member in the first position includes the first First and second clamp electrodes, the first and second clamp electrodes are movable between a first position and a second position, in which the clamp electrodes are spaced apart from each other in the second comb type When the driving member is in the second position, in the second position, the clamp electrodes are close to each other and occur when the second comb-shaped driving member is in the first position ^ (铕 先 W # Note on the back side Cun Jing wrote this page) This paper is suitable for Chinese families Rate (CNS) Λ4 current grid (210X297 mm) -115-