JP2002510059A - Optical microswitch having electrostatic microactuator and method of using the same - Google Patents

Abstract

(57) Abstract: For use with a laser beam extending along a path, comprising a body (213) having an inlet port (150) and a plurality of outlet ports (151) adapted to receive a laser beam. Optical microswitch (104). A plurality of mirrors (103) coupled to the plurality of micromotors (180a, 180b) are provided on the body. The micromotor selectively moves the mirror from a first position out of the path of the laser beam to a second position in the path of the laser beam to direct the laser beam to one of the exit ports. Each micromotor has at least one electrostatically driven comb assembly therein for moving each mirror to one of the first and second positions. A controller is electrically coupled to the micromotor and provides control signals to the micromotor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[Scope of the Invention]

The present invention relates generally to optical switches, and more particularly, to optical switches having a plurality of movable mirrors.

[0002]

BACKGROUND OF THE INVENTION

There is great interest in switches for switching light from one optical fiber to another, or for switching light beams in free space to one or more optical fibers, especially for telecommunications and digital data networks. 1 × 2, 1 × n, and n × n
Various switch configurations are of interest, including where n is a number from 2 to about 64. Conventional switches utilize a variety of principles, including the opto-electric effect and electromechanical actuators, and actuation switches using these techniques are now commercially available. These conventional switches are very expensive and quite large.

In prior art 1 × n electromechanical fiber optic switches, the input fiber is typically moved to communicate with the desired output fiber, or one mirror is moved to provide the desired input light. Or the reflective optical element is moved until the desired coupling is obtained. Typically, a collimating lens is placed on each optical fiber and the collimated light beam is switched by an electromechanical actuator. One example of such a switch is described in U.S. Pat. No. 4,322,126 to Minowa et al., In which a prism-like structure is moved between input and output optical fibers. Another prior art approach to translate one mirror and deflect a collimated beam into a plurality of output fibers is described in US Pat. No. 5,208,880 to Riza et al. As described in U.S. Pat. No. 5,647,030, various approaches use a single rotating mirror to couple light to a plurality of output fibers.

Because prior art electromechanical actuators are large and expensive, most prior art approaches use a single electromechanical actuator (linear or angular) to deflect the input beam. . This one electromechanical actuator typically has a mechanism to precisely control the position of the mirror to accurately couple the light to the output fiber. This precise positioning of the mirror also increases the size and cost of prior art actuators, especially when the number of output fibers is greater than two, in which case the simplest approach to achieve the required position resolution is achieved. The method is not readily available.

[0005] Most of the prior art optical switches are designed for use in telecommunications applications where the wavelength of light used is typically in the infrared region of 1.5 or 1.3 microns. Also, many of the prior art switches are designed for use with so-called multimode optical fibers, which have a relatively large central core carrying light, especially for use in the infrared region. . The positional accuracy required to achieve high optical coupling is on the order of one-fifth of the diameter of the central core of the optical fiber. Most multi-mode fibers for use in the infrared region have a size of about 50 microns, so that the positional accuracy required for coupling is only within about 10 microns that can be achieved using conventional techniques. It has a core diameter.

In many optical systems, it is desirable to use so-called single mode optical fibers that can achieve a larger optical bandwidth. The core diameter of these fibers is about 8 microns for use with infrared light and about 4μ for use with red light. Thus, the required positional accuracy in these systems is reduced to less than 1 micron, which is about 10 times less than in prior art multimode optical switches.

[0007] Microstructures manufactured using silicon integrated circuit process technology have been developed for various sensing and driving applications. Compared to prior art implementations in these and other ways, microstructures offer advantages in cost, reliability and properties. Integrated actuators, ie microstructures in which the actuator is manufactured simultaneously with the mechanical structure, are advantageous from a cost, reliability and assembly point of view.

[0008] Various driving methods have been used as integrated actuators for microstructures, including electrostatic, electromagnetic, thermal and thermopneumatic methods. Thermal techniques provide great power, but response times tend to be relatively slow. Electromagnetic technology is complicated by the difficulty of providing an integrated coil with sufficient turns in a planar structure and the high power dissipation caused by the high currents required to produce the desired magnetic field. Electrostatic drive is attractive on small size scales as the force increases as the gap between the electrodes decreases. The power dissipated by electrostatic elements tends to decrease, and the speed of operation is usually limited only by the mechanical responsiveness of the structure.

[0009] The drive force in prior art electrostatic actuators is typically formed using only one of two types of drive electrodes (so-called comb drive fingers or parallel plates). Parallel plate capacitors produce a force that is proportional to the square of the drive voltage and inversely proportional to the square of the gap between the plates. If the gap is too large, the electrostatic force cannot overcome the returning spring force of the actuator support, and if the electrostatic force exceeds the linear return force, the actuator will not work if the gap is less than about 2/3 of the initial gap. This behavior limits the useful range of motion of such an actuator, since it becomes unstable. For practical microstructured devices, the useful range of motion of the parallel plate actuator is less than 10 microns. The comb drive actuator described in U.S. Pat. No. 5,025,346 to Tang et al. Features a series of interdigitated electrodes whose capacitance is used to provide a range of motion approximately equal to the length of the comb fingers. (Which can be greater than 100 microns) to provide a relatively constant motor force. Since the force available from each finger is relatively small, a real comb drive actuator will typically have 10-20 fingers to produce sufficient force for the microstructure device.

A significant difficulty of conventional comb drives is that the maximum movement of the device is limited by so-called electromechanical lateral instability. In the ideal case, this lateral force on each finger would be exactly balanced, but unless these fingers were constrained to move down the center of the gap exactly, the lateral forces would be applied by these electrodes. Will occur. The forward moving force is substantially constrained by the increasing deflection, while the lateral force increases rapidly with the lateral deflection. Instability occurs when the lateral force derivative with respect to lateral displacement is greater than the lateral mechanical spring constant. When this derivative exceeds the lateral spring constant of the motor support structure, the comb drive snaps laterally, shorting out the drive electrodes and interrupting the forward movement of the actuator. This behavior of prior art devices is described in J. Micromech. Microeng.
11996), pp. 320-329, in a paper by Legenberg, Grocneveld and Elwenspoek entitled "Comb Drive Actuator for Large Displacements".
Those designs have a maximum displacement of about 40 microns. This design technique in Legtenberg's paper describes the maximum displacement for a conventional comb drive actuator, but does not describe a design with substantially greater deflection.

[0011] Early comb drive actuators used a polycrystalline silicon layer provided by a so-called surface micromachining process to produce comb fingers and movable laterally driven elements. The polycrystalline silicon was typically 1-2 microns thick. Since the size of the lateral structures of these devices was comparable to the thickness of the material, the stiffness of the parts against out-of-plane deflection was very low. With the advent of deep reactive ion etching (DRIE), it has been possible to fabricate similar structures in single-crystal silicon with a typical thickness of 100 microns. DRIE, Klassen, Pet
A paper entitled "Silicon Fusion Bonding and Deep Reactive Ion Etching: New Technologies for Microstructures" by Ersen, Noworolski, Logan, Maluf, Brown, Storment, McCullly and Kovacs (Proceedings Of Transducers, '95 (1995) ,
pp. 556-559). These thicker structures can provide greater vertical electrode area and substantially higher stiffness against out-of-plane deflection. Recently, thicker surface micromachined polycrystalline silicon or plated metal structures made in photolithographically formed molds to increase the thickness of the comb drive structure and increase out-of-plane stiffness Other manufacturing techniques have been used, including These manufacturing techniques themselves have not yet been used to improve the prior art comb drive structures.

In general, it is an object of the present invention to provide an optical microswitch that overcomes the above disadvantages.

Another object of the present invention is to provide an optical microswitch of the above character, utilizing at least one electrostatic microactuator having at least one comb drive assembly therein.

It is another object of the present invention to provide an optical microswitch of the above character which minimizes lateral force instability in the comb drive assembly of the electrostatic microactuator.

[0015] Another object of the present invention is to provide an optical microswitch of the above characteristics, provided with means for attaching or coupling the electrostatic microswitch to an external device.

Another object of the present invention is to provide an optical microswitch of the above-described feature, which achieves large deflection by utilizing the resonance characteristics of a comb drive assembly in an electrostatic microactuator.

[0017] Another object of the present invention is to provide an optical microswitch having the above characteristics, in which a plurality of electrostatic microactuators are arranged along at least half of the microswitch.

It is another object of the present invention to provide an optical microswitch of the above character for use in a magneto-optical data storage system.

[0019]

Summary of the Invention

The present invention provides an optical switch and the like using a high-speed microactuator having large deflection. The optical switch can be used in various systems such as a magneto-optical data storage system, a telecommunications system or a data transmission system. The microactuator provides improvements in the design of suspension, comb drive elements, dynamic electric drive control, aggressive position stopping, and position sensing. The microactuator can be used in various designs or various other applications, such as in lateral resonators, force-balanced vibration acceleration systems, or miniature gripper optical switches. High out-of-plane stiffness and / or large electrode area can be used to create microstructures that generate large forces and displacements.

Referring now to the drawings, FIG. 1 is a plan view showing some of the basic elements of a magneto-optical (MO) data recording and storage device and search system. Few specific details are set forth in this figure and FIGS. 2-4 because they are intended to illustrate some of the basic elements of a functional system in which the present invention is useful. The present invention is not limited to use in only one particular MO data storage system, and as described below, is not limited to MO data storage systems, but is used in telecommunications or other systems. Can be done.

Referring to FIG. 1, a system 95 is described in detail below and includes a plurality of “N
"Set of flying heads adapted for use with the MO disk 107"
) 106. In a preferred embodiment, N is equal to six, and a plurality of six disks 107 are supplied in a stack (not shown). Disk 10
Each of the seven is bilateral and comprises first and second opposite planes 108. One floating head 106 is provided for each MO disk surface 108. Head 1
06 is coupled to a rotary actuator magnet and a coil assembly 120 by a suspension 130 and an actuator arm 105 located on the surface of the MO disk 107. In operation, the MO disk 107 includes a spindle motor for generating aerodynamic lift between the floating head 106 and the rotating disk.
tor) (not shown). This keeps each floating MO head 106 floating above the data recording surface of each MO disk. Lift is
Countered by equal and opposite spring forces provided by suspension 130. During non-operation, each floating MO head is maintained in a static storage state away from the surface of the MO disk 107, typically at a ramp (not shown) adjacent to the disk surface. It is of course possible for the head to land on the surface of the disk in the non-data storage area; however, such an approach would not be the optimal approach.

The system 95 further includes a laser optics assembly 96, an optical switch or microswitch 104 coupled to the assembly 96 by at least one input light carrying element or optical fiber 98, and a plurality of sets of single mode Polarization maintenance
(PM) optical fiber 97 is included. In an exemplary embodiment, each set of single-mode PM optical fibers or elements 97 carrying output light is passed through a separate one of the set of actuator arms 105 and suspension 130 to the set of floating MO heads 106. Are combined into a separate one. Therefore, at least six sets of two PM optical fibers 97 are each provided at one end with the optical switch 10.
4 optically coupled. Each of the sets of PM optical fibers 97 is coupled to a set of two floating MO heads 106 at the other end. It will be appreciated that only a typical number of PM optical fibers are shown in the figures. Controller 11
1 is electrically coupled to the optical switch 104 by means of wires 112 for providing an electrical command signal to the optical switch. The controller 111 may be of any conventional type, and include a series of amplifiers and voltage generators for each of the inputs, actuators and comb drive assemblies described below, for receiving one or more control signals, Includes an optional mechanism for sensing the position of the comb drive assembly and an output for transferring the output signal.

FIG. 2 is a diagram illustrating the laser optical assembly 96 of the magneto-optical data storage and retrieval system of FIG. Reading and recording information on the surface of each disk 107, as will now be described with respect to FIGS. 2 and 3, requires the output of the laser to be optical fiber To generate a magnetic field using the coils supported by the floating head 106 near the disk surface. FIG.
And 3 briefly summarize the reasons for providing a light source and a magnetic field to selectively access data on the disk surface. In FIG. 2, the laser optical assembly 9
6 operates in the visible or near-ultraviolet frequency range, and the set of MO disks 1
07 using a linearly polarized diode laser source that emits sufficient optical power to read and write
source) 231 is described. In a first embodiment, the laser diode light source may be an RF modulated laser source. In the second embodiment, the linearly polarized laser light source 231 may be a distributed feed-back (DFB) laser light source. In an exemplary embodiment, linearly polarized laser light source 231 is selected to operate in the range of 635-685 nanometers; however, laser light sources of other wavelengths can be used. The laser optics assembly 96 further includes: a collimating lens 234, a low chromatic dispersion leaky beam splitter (lo).
w wavelength dispersion leaky beam splitter) 232 and a coupling lens 233. Laser optics assembly 96 directs linearly polarized laser beam 191 (shown in FIG. 1) to optical switch 104 (from linearly polarized laser light source 231). The laser optics assembly 96 further includes: a quarter wave plate 238, a mirror 235, a polarizing beam splitter 239, and a set of photodiodes or detectors 236. In the first embodiment, the linearly polarized laser beam 192 (described in FIG. 1) reflected by the surface 108 of the MO disk 107 is directed to the coupling lens 233 by the optical switch 104 and by the leaky beam splitter 232: The light is forwarded to a differential detector comprising a half-wave plate 238, a mirror 235, and a polarizing beam splitter 239. In a second embodiment, an optical insulator 297 is included between the laser light source 231 and the collimating lens 234. As is well established in the art, this type of differential detection method measures the optical power in the two orthogonal polarization components of the reflected laser beam 192, and the differential signal is A sensitive measure of the polarization rotation induced by the Kerr effect on one surface of 107. In both embodiments, after conversion by detector 236, the differential signal is processed by differential modulator 237 for output as signal 294. As other techniques for directing the outgoing laser beam 191 and detecting the reflected laser beam 192 are known in the art, the present invention is not limited to the above arrangement of optical elements and light sources. Absent.

FIG. 3 is a diagram illustrating an exemplary optical path including the use of a DFB laser light source. In a preferred embodiment, an exemplary optical path is described in FIG. 3 to include: an optical switch 104, one of the set of single-mode PM optical fibers 97, and one of the set of floating MO heads 106. I have. Optical switch 104 directs outgoing laser beam 191 (see laser beam 231) to enter an individual adjacent end of individual single-mode PM optical fiber 97, as described more fully below. Provides a sufficient degree of selectivity to guide. The outgoing laser beam 191 further passes through the floating MO head 106 to separate recording / storage layers 349 underneath each surface 108 of the individual MO disk 107 to provide a separate distal beam. Guided by a single mode PM optical fiber 97 to exit the end.

The outgoing laser beam 191 is provided by any suitable laser light source, and is preferably provided by a linearly polarized laser light source 231, which is preferably a distributed feedback (DFB) laser light source. While writing information, the outgoing laser beam 191 is used to reduce the coercivity of the recording / storage layer 349 by heating the selected location of interest to approximately the Curie temperature of the recording / storage layer 349. , The optical switch 104 is selectively guided to the MO disk 107. Preferably,
In order to define a pattern of “up” or “down” magnetic regions perpendicular to the MO disk 107, while the light intensity of the outgoing laser beam 191 is kept constant,
An aging vertical bias field is used. This technology uses magnetic field modulation (magnetic fie
ld modulation, MFM). Thereafter, as the selected location of interest 340 cools, the information is encoded in the recording / storage layer 349 of the individual spinning disc 107.

During the reading of information, the outgoing laser beam 191 (of lower intensity compared to writing)
Indicates that at any given target location 340, the reflected laser beam 192 (in the reflection of the outgoing laser beam 191 from the recording / storage device layer 349) depends on the magnetic field polarity of the target location 340 It has a rotated polarization of either clockwise or counterclockwise 363.

The optical paths described above are bidirectional in nature. Therefore, the reflected laser beam 192 is
It is received through the floating MO head 106 and enters the distal end of the single mode PM optical fiber 97. The reflected laser beam 192 travels along the single-mode PM optical fiber 97 to exit at its distal end, and is switched by the optical switch 104 for transmission by the laser optics for subsequent conversion to a signal 294. It is selectively guided to an assembly 96.

FIGS. 4 a to 4 g show a floating magneto-optical head of the magneto-optical data storage device in a perspective view, a cross-sectional view, an expanded cross-sectional view, a side view, a front view, a bottom view, and a rear view, respectively. In FIG. 4a, the floating MO head 106 is shown for use on one recording / storage layer 349 of the set of MO disks 107. The floating MO head 106 includes: a slider body 444, an air-bearing surface 447, a quarter wave plate (not shown), a reflective substrate 400, and an objective optical system (not shown). objective optics 446, magnetic coil 460, and yoke 462. The slider body 444 includes an objective optical system 446.
And the single-mode PM optical fiber 97 and the reflecting substrate 400. The reflective substrate 400 may include a reflective surface tuned to direct the outgoing laser beams 191 and 192 to and from the recording / storage layer 349. The slider body 444 is an industry standard "mini"
, "Micro", "nano", or "pico" sliders, but alternative sized slider bodies 444 may also be used (determined by the aforementioned dimensional constraints of the elements used with the floating MO head 106). May be used). Thus, in a preferred embodiment, the slider body 444 has a planar top surface area corresponding to a mini-slider height (889 micrometers) and a nano-slider (1600 x 2032 micrometers).

The single mode PM optical fiber 97 is coupled to the slider body 444 along an axial cutout 443, and the objective 446 is along a vertical corner cutout 411. Slider body 444
Is combined with In a preferred embodiment, the axis cutout 443 is located around the slider body and the vertical cutout 411 is located at the corner of the slider body 444, but the axis cutout 443 and the vertical cutout 41 are located at the corners of the slider body 444.
1 may be located at other locations on the floating MO head 106, for example, between the periphery and the central axis, or alternatively along the central axis itself. Arranging the optical fiber 97 and the objective optical system 446 other than along the central axis requires a large amount of the magneto-optical head 10.
6 may function to affect the center and its lift. Therefore, the connection point of the floating MO head 106 to the suspension is
May need to be adjusted to compensate for off-center changes in the center of the. Preferably, cutouts 443 and 411 are designed as channels, V-grooves, or any other suitable means for coupling and adjusting single mode optical fiber 97 and objective optics 446 to floating MO head 106. May be done. In a preferred embodiment, the laser beams 191 and 192 are: To layer 349 and MO disk 1
07 recording / storage layer 349). In a preferred embodiment, the single-mode PM optical fiber 97 and objective 446 focus the outgoing laser beam 191 in the target location 340 (see FIG. 3) to a focused optic spot.
(spot) 448 are placed in their individual cutouts. The single-mode PM optical fiber 97 and objective optics 446 may then be secured in place by using an ultraviolet-cured epoxy or similar adhesive.

With respect to the present invention, attention is specifically directed to FIGS. 4c and 4b. These two figures show the objective 446 used to focus a spot of light 448 of defined size onto the surface 349 of the disk. The location is incorporated into the support structure 461 without interfering with the aerodynamic flying qualities of the floating MO head 106 and mounted on or near the bottom of the floating MO head or the surface of the objective. Through a yoke 462 and a low profile magnetic coil 460.

The optical switch or microswitch of the present invention converts an optical mirror (translat
e) Use a microactuator for: Each of the microactuators in the microswitch or other application includes at least one pair of opposing comb drive members to power the actuator. A somewhat simplified transverse comb drive actuator or microactuator 101 for use in an optical microswitch, such as microswitch 104, comprises:
FIG. 5 shows a top view of the actuator 101. Actuator 1
01 shuttle 109 includes first and second movable electrode assemblies 208, 209 operatively connected to each other. The actuator 101 further comprises a first and a second individual locking assembly 21.
0, 230. The assembly extends perpendicular to the longitudinal centerline of the actuator 101 and is centered at the centerline. The first movable assembly 208 includes first, second, and third comb drive members 208a, 208b, 208c, each of which extends perpendicular to the direction of movement of the assembly 208, 209. I do. The second movable assemblies 209 include first, second, and third comb-shaped driving members 209a, 209b, 209 each extending perpendicular to the direction of movement of the assemblies 208, 209.
c. The actuator 101 and the movable assemblies 208, 209 and their fixed assemblies 210, 230 have a thin, monocrystalline silicon layer fused to the substrate 2123 in a certain area, and the movable assemblies 208, 209 and the fixed It is made from a silicon wafer by any suitable means, such as DRIE, which has been etched to form the assemblies 210, 230. The single crystal silicon layer is electrically isolated from the substrate 213 by a thick silicon dioxide layer. As such, the movable electrode assemblies 208, 209 are electrically isolated from the fixed electrode assemblies 210, 230. Other fabrication techniques include localized sacrifice layers.
Includes high aspect ratio plating of metal structures on insulating substrates for icial layers). Such a process is described in U.S. Pat. No. 5,450,751, "Microstructures for Vibrating Gyroscopes," by Petty and Eddy. The resulting structure includes relatively narrow and long hanging spring structures, fixed connection points to the substrate, and the ability to make electrical connections to the structure. Alternatively, the desired structure can be fabricated by depositing, patterning, and etching a relatively thick layer of, for example, polysilicon on a localized sacrificial layer of, for example, implanted silicon dioxide. An example of the processing is described in the October 1995 SPIE Bulletin (Proceedi
ngs) Vol. 2642 "Micromachining Equipment and Components (Micromachin)
ed Devices and Components, pp. 84-94, B. Wenk et al., "Thick Polysilicon Based Surface Micromacs with Thick Polysilicon-Based Surfaces with Force Feedback Manipulation.
hined Capacitive Accelerometer with Force Feedback Operation).

The movable electrode assemblies 208, 209 are interconnected by rigid, elongated frame members or connector bars 216 that extend longitudinally in the direction of movement. The first movable electrode assembly 208 is connected to one end of the connector bar 216 at a vertically spaced position, and the second movable electrode assembly 209 is connected to the connector bar 216 at a vertically spaced position. To the opposite or other end. Extension unit 21
8 and the bracket member or bracket 219 connect the mirror 103 to the shuttle 1
09 and thus included in the connection means of the actuator 101 for fixed connection to the movable electrode assemblies 208, 209. The bracket 219 and thus the mirror 103 is inclined in the direction of movement of the shuttle 109 and the movable electrode assemblies 208,209.

The comb-shaped driving members 208a, 208b, 208c, 209a, 209b, 209c
Have a bar or beam 221 connected at one end to the connector bar 216 and extending vertically from the bar across the actuator. Each bar 221
Has a length in the range of 200 to 2000 microns, preferably in the range of 700 to 1200 microns, and more preferably around 800 microns, defining the length of the individual comb drive members. A plurality or series of comb members or fingers 211 of the same length extending parallel to the direction of movement are fixed to each bar 221. The fingers 211 are evenly spaced along the length of each comb drive bar 221 and each has a range of 5 to 200 microns, preferably 60 to 130 microns, and more preferably approximately It has a length of 90 microns. The fingers 211 are spaced apart in the range of 3 to 25 microns, preferably in the range of 6 to 15 microns, and more preferably in the range of approximately 10 microns. The comb fingers 211 of the comb drive members 208a, 208b, 208c extend toward the mirror 103 coupled to the actuator, while the comb drive members 209a, 209 extend.
The comb fingers 211 of 9b and 209c extend away from the mirror.

The first fixed electrode assembly 210 includes first, second, and third comb drive members 210a, 210b, 210c, and a second fixed electrode assembly. 230 is the first, second, and third comb-shaped driving members 230a, 230b, 23
0c, and each of the comb-shaped driving members extends in a direction perpendicular to the moving direction of the movable electrode assemblies 208, 209. Comb driving members 210a, 210b, 210c, 2
Each of 30a, 230b, 230c has a bar or beam 222 mounted on the substrate 213 and extending across the actuator 101. Each bar 22
2 has a length similar to the length of the bar 221 which defines the length of the individual comb drive members. A plurality or series of comb members or fingers 212 that are substantially identical in size and shape to the comb drive fingers 211 are secured to the comb drive bar 222 at intervals along the length of the bar 222. Is done. Comb-shaped driving members 210a, 210
b, 210c extend away from the mirror 103 and face the comb drive fingers 211 of the comb drive members 208a, 208b, 208c while the comb drive member members 230a, 230b, 230c Comb finger 2
12 extend toward the mirror and comb drive members 209a, 209b, 20
Facing the comb-shaped driving finger 211 of 9c.

The comb-shaped driving fingers 211 can be arranged alternately in the fingers 212. The opposing set of comb-shaped driving members of the actuator 101 is an electrostatically driven (
forming an electrostatically-driven comb drive means or assembly. The comb drive members 208a, 208b, 208c, 209a, 209b,
And 209c includes a first position in which the individual comb drive fingers are spaced apart from each other as described in FIG. 6 for the comb drive members 208a, 210a, 208b, 210b, and 208c, 210c. Comb driving members 208a, 210a
, 208b, 210b, 208c, 210c, 209a, 230a, 209b,
As described in FIG. 5 with respect to 230b and 209c, 230c, when voltage potentials are applied therebetween, the comb drive fingers 211, 212 are not meshed with each other but are in electrostatic contact Second position and comb drive member 208
a, 210a, 208b, 210b, and 208c, 210c, as shown in FIG. 7, the individual comb drive fingers are in mesh with each other and with the third position in electrostatic contact. Between the individual comb drive members 210a, 210
b, 210c, 230a, 230b, and 230c. The free ends of the comb drive fingers 211, 212 substantially correspond to lines extending perpendicular to the direction of movement of the shuttle 109 when the opposing comb drive members are in the second position. Ends along the line. The spacing between the fingers 211, 212 is selected to ensure maximum lateral stability to maximum deflection at the maximum allowable drive voltage for the actuator 101.

The fixed assemblies 210, 230 are fixedly connected to the substrate 213, respectively, and the first comb-shaped driving members 208, 210 are arranged at separate positions, and the second comb-shaped driving members 209 are formed. , 230 in the intermeshing position, and the first or retracted position described in FIG. 6, and the first comb drive members 208, 210 in the intermeshing position and the second comb drive The members 209, 230 are used to move the first and second movable electrode assemblies 208, 209 between the remote or second or extended positions described in FIG. .

The shuttle 109 and the movable electrode assemblies 208, 209
09, a set of springs or folded cantilever beams 2 located at each end of
14 and 217, it is suspended above the substrate 213. Spring 214 is located away from first comb drive member 208a at one end of actuator 101, and spring 217 is located away from second comb drive member 209c at the opposite end of actuator 101. Be placed. Each set of springs 214, 217 includes first and second spaced apart spring portions 224, 225 that extend perpendicular to the direction of movement when in the relaxed position, and the folded portion 245 (see FIG. 5) at one end. The spring portions or beams 224, 225
In spaced relation, they extend along substantially the full length of the comb drive bars 221, 222 and are parallel to the comb drive bars. The spring portions 224, 225 each have the same cross-section, which is substantially rectangular. One end of the rigid support or extension support bar 131 is connected to a fold 245 of each of the springs 214,217. A first end 342 of each of the springs 214, 217 is connected to the substrate 213, while a second end 244 of the springs 214, 217 is connected to the connector bar 21.
The comb-shaped driving bars 22a and 209b facing the comb-shaped driving bar 22
Connected to one individual end.

The suspended portion of the actuator 101 is designed using high aspect ratio technology, and the movable electrode assemblies 208, 209, shuttle 109, spring 21
4, 217, and a rigid support 131, and has a height measured from the plane of the substrate 213 in the range of 20 to 300 microns, preferably in the range of 60 to 150 microns, and more preferably about 80 microns.

An electrical connector means for enabling the controller 111 to be electrically coupled to the movable electrode assemblies 208, 209 and the fixed electrode assemblies 210, 230 is included in the actuator 101. Specifically, the electrical pads 240, 24
Electrical connector means in the form of 1,242 are provided. The electric pad 242 is
Electrically coupled to the first and second movable electrode assemblies 208, 209 by lead means in the form of leads or traces 271. Electric pads 240, 241
Are electrically coupled to the first fixed electrode assembly 210 and the second fixed electrode assembly 230 by separate lead means in the form of leads or traces 272,273.

In the present invention, the spring preferably has a high ratio of lateral to forward spring constant (a high r).
ratio of lateral to forward spring constant). In the prior art, this is a symmetric movable electrode section (FIG. 1 of US Pat. No. 5,025,346).
This is accomplished by using four opposed springs, or folded cantilever beams, located at the four corners of the beam. However, in this prior art, when the movable electrode section deflects, the lateral stiffness of the spring decreases dramatically.

The present invention specifies that bidirectional symmetry and four springs in prior art actuator designs are not required. Conversely, the present invention includes only two springs or folded cantilever beams 214, 217, which are coupled to a substrate 213 at a first end 243 and a movable electrode set at a second end 244. 3D
08, 209. The springs are connected at their folds 245 by suspended rigid supports 131 extending between them. The foregoing structures are designed to be manufactured using high aspect ratio techniques such as DRIE, allowing them to be designed at a higher height or profile than the prior art. . The apparent high height and rectangular cross section of the spring portions 224, 225 allow the springs 214, 217 to exhibit increased out-of-plane stiffness, i.e., stiffness out of the plane of the substrate 213, as compared to that of the prior art. The out-of-plane stiffness is such that the movable electrode assembly can only
Despite being fixed to the movable electrode assembly 210, 230, the movable electrode assembly 208, 209 functions to prevent undesired bending of the movable electrode assembly 208, 209.

Actuators 101 are provided to constrain the forward and backward movement of the shuttle, and to allow controller 111 to monitor the position of shuttle 109, and specifically, to allow the shuttle to fully retract as described in FIG. In the position shown in FIG.
Means for monitoring whether or not it is in the fully extended position described in (1). A mechanical stop 261 is fixedly formed on the substrate and is disposed between a first or front limiter 262 and a second or rear limiter 263 provided on an extension 218. . The forward movement of the shuttle 109 is limited by the stop 261 engaging the front limiter 262, and the backward movement of the shuttle 109 is limited by the stop 261 engaging the front limiter 262.
Limited by engaging with 3. Stop 261 is electrically coupled to electrical pads 264 also formed on substrate 213 by means of leads or traces 274 formed on substrate 213. With the pad 264, the stop 261 can be electrically connected to the controller 111. Stop 2
The engagement of one of the 61 limiters 262 or 263 closes the electrical circuit between pad 264 and pad 242.

In one method of operating the actuator 101 of the present invention, the movable electrode assemblies 208, 209 and therefore between the retracted position shown in FIG. 6 and the extended position shown in FIG. To statically deflect the extension 218 of the actuator 101 and the associated mirror 103, the voltage compared to the potential applied to the electrical pad 242 is controlled by the controller 111 to a set of individual electrical pads 240 or 241 through the fixed electrode assembly 219 or 2
The 30 comb fingers 212 may be selectively applied. The electrostatic attraction between the interlocking comb drive members is substantially constant through each other.

The extended state is achieved at the actuator 101 by emitting a constant voltage on the fixed electrode assembly 230 such that the mirror 103 oscillates toward the extended portion relative to the front limiter 262. May be done. Mirror 103
Is then held in the extended position 293 by applying a constant voltage to the other fixed electrode assembly 210. Thereafter, the mirror 103 is moved to the fixed electrode assembly 210.
It may be drawn in by removing a constant voltage from above and by re-applying a fixed voltage to the fixed electrode assembly 230.

During each half-stroke of the shuttle 109, the shuttle first engages the springs 214, 21
7, from its deflected position to its relaxed position as described in FIG. To its deflected position.

The operation of the horizontal comb actuator 101 depends on a number of factors, including: the stiffness of the front and side of the springs 214, 217 and the relative dimensions of the comb drive fingers 211, 212. There is a motion adjustment between the allowed drive voltage and magnitude of the actuator 101 and the resulting movement and switching speed of the mirror 103. Conventional methods for achieving large deflections at low drive voltages include minimizing the spacing between the electrodes to create maximum forward force, and springs with low forward stiffness to create large forward movements. Was to use. This approach is typically used for thin polysilicon actuators where low out-of-plane stiffness prevents the use of large drive voltages. However, these designs are not optimal when relatively thick structures are used. The forward force of each finger increases as the spacing between the electrodes is reduced, but the lateral force increases more quickly. When designing high speed actuators for either large deflections or high forces, a preferred design approach determines the maximum voltage that can be supported by the structure, and then at the maximum voltage, Is to select the electrode spacing that results in instability of the electrodes. The maximum movement and speed of the actuator is defined by the spring stiffness and the set of moving elements.

The present invention, while taking into account the aforementioned problems, also minimizes the size of the actuator and the space occupied by the actuator on the optical microswitch 104. In the prior art, the comb fingers are not sufficiently suppressed to prevent movement parallel to the central axis of the microswitch 104, ie, movement perpendicular to the direction of movement of the actuator 101. Due to the sufficient lateral (surface) force generated during, the movable electrode assembly snaps laterally rather than continuing toward the extended or retracted position. This instability is due to the fact that the derivative of the lateral force on the lateral movement is that the lateral mechanical spring constant of the spring
Occurs when it is larger than the spring constant of the springs).

The spring or beam members 224, 225 may be longer or shorter than the comb drive bars 221, 222. More specifically, the spring portions 224, 225 have a length in the range of 200-2000 microns, preferably in the range of 800-1200 microns, and in the range of 3.5-5.5 microns, preferably in the range of 3.75-200 microns. And a width in the range of 4.25 microns. The spring portions 224, 225 shown in FIG. The actuator 101 is approximately 800 microns long, approximately 2500
It has a width of microns and a height of approximately 80 microns.

In FIG. 5, each of the beam or springs 214 is shown in an undeflected or relaxed state in which each of the beam members and beams 224, 225 extend linearly in a direction perpendicular to the direction of movement of the shuttle 109. , 217 are described. Beams 224, 225
Can move in one direction of movement of the electrode assembly 209 to the first deflected position described in FIG. 6 when the individual mirrors 103 are in the retracted position. Beams 214, 217 are also directed in the opposite direction of movement of electrode assembly 209 when the individual mirror 103 is in the extended state, FIG.
To a second deflected position. Beams 214 and 217 are
When each is in a separate first and second deflected position, it is in a non-linear or collapsed position. More specifically, the opposite end of each beam 224, 225 is moved in the opposite direction, when individual springs 214, 217 are moved from a straight or relaxed position to a deflected or curved position. , Each direction is the shuttle 10
9 is parallel to the moving direction. The maximum lateral stiffness of the beams or springs 214, 217, ie, the stiffness perpendicular to the direction of movement of the shuttle 109, is between the retracted and extended positions described in FIGS. 2 and 3, respectively. Occurs with springs in their undeflected or relaxed positions as described in FIG.

The shuttle 190 with the trussed frame 216 further increases the overall stiffness of the actuator 101 against lateral loads and bends, and reduces the total shuttle 109. The inherent stiffness of the present invention eliminates the need for the actuator 101 to be designed with bi-directional symmetry as used in the prior art, allowing the width of the actuator 101 to be reduced by approximately half. . With a reduced width, the set of actuators 101 packs closer together at the microswitch 104 to allow more actuators to be enabled at the microswitch for the laser beam 191 of any length.
be packed).

A further embodiment of the actuator of the present invention, including additional features for improving the operation of the actuator, is described in FIG. Similar reference numbers have been used to describe similar components in actuator 101 and actuator 108 shown in FIG. Actuator 180 is described in FIGS. 4 and 5 with respect to spring 214, and is provided along each spring or beam portion 224, 225 to ensure etching of the beam portion and even the desired rectangular cross-section. Second sacrificial bars 246 and 247 are included. Each of the sacrificial bars has a height near the height of the adjacent beam portion and provides a narrow slot 248 along each side of the beam portion. The spacing between the beam portions and the individual sacrificial bars, ie, the width of each slot 248, is comparable to a minimally corroded feature in the device. In the actuator 180, the spacing between the beam portion and each of the sacrificial bars is approximately 8 microns. The sacrificial bars 246 and 247 are formed by the reverse etching (re
By limiting trograde etching, the parallel and planar sides 226, 22
Promote the formation of 7. More specifically, the narrow width of the slot 248 is such that ions other than traveling in a direction parallel to the slot, enter the slot and
27 is prevented from participating in the etching.

In a typical method of operation of actuator 180, actuator 101
The first and second movable electrode assemblies 208, 209 of FIG.
Between the extended position and the retracted position. In the extended position, the extension 218 is adjacent to the front limiter 262, and the first and second movable electrode assemblies 208, 209 are connected to at least one and the substrate 213 as described in FIG. Adjacent to a plurality of three first fixed stops 293.
A stop 293 is provided for each of the comb drive members 208a, 208b, and 208c. Stop 261 is connected to front limiter 2 connected to extension 218.
Engage with 61. In the retracted position, the extension 218 is connected to the rear limiter 2.
Adjacent to the first and second movable electrode assemblies 208, 209, at least one and a plurality of three second fixed stops connected to the substrate 213 as described in FIG. 292. The stop 292 is connected to the comb-shaped driving member 209.
a, 209b, and 209c. Stop 261 engages a rear limiter 263 connected to extension 218. Stops 292, 293 promote repeatability at the position of mirror 103 in optical microswitch 104.

Actuators 101 and 180 are described in the paper “Silicon Fusion Connections and Deep Reactive Ion Etching; New Technologies for Microstructures” by Klassen, Petersen, Nowowski, Logan, Miff, Brown, Storment, McCrees, and Kovacs. , (1995) Transducer Bulletin '95 -5
Manufactured using a process similar to that described on pages 56-559, whereby suspended or movable springs 214, 217, comb drive members are provided by shallow recesses in the bottom silicon wafer or substrate 213. 208, 209, etc. can be generated. As shown in FIG. 9, 5 to 50 microns, more preferably 1 to 50 microns
A shallow depression 170 having a depth of 0 microns is etched into the bottom wafer or substrate 213 in the area where the moving structure is preferred. Second or top wafer 1
73 is fused to substrate 213 using a layer of silicon dioxide having a thickness between 0.1 and 2.0 microns, more preferably around 1.0 micron. Upper wafer 173 may be stacked and polished to a desired thickness. The metal layer 174 is provided on the upper surface 1 of the upper wafer for use in electrical pads 240, 241, 242, 264, visual indicators, and the like.
76 is generated. Finally, top wafer 173 is etched using a deep reactive ion etching technique to achieve the desired high aspect ratio structure. The final DRIE silicon etch ends with a layer 171 of silicon dioxide present and continues etching to substrate 213 where layer 171 is not present. The process includes a spring 2 suspended above the substrate 213 and electrically isolated from the substrate by a space 172 having a thickness of the shallow recess 170.
14, 217, movable electrode assemblies 208, 209, rigid supports 131, and movable single crystal silicon structures such as connector truss 216. Additional structures such as lead means 286, 287 and stops 292, 292
It is fixedly connected to the substrate 213, but from the substrate by the silicon dioxide layer 171:
And the space 175 is electrically isolated from peripheral functions.

In some applications, such as switches, independent verification of the position of the mirror 103 is important. When the mirror 103 in the actuator 180 is in the extended position, the front limiter 262 of the movable electrode unit 208
61 and makes electrical contact. Stop 261 is electrically coupled to electrical pad 264 by lead 274 and electrical pad 264 is connected to controller 11.
1 can be electrically coupled. Similarly, when the mirror 103 is held in the retracted position, the rear limiter 263 is in mesh and electrical contact with the stop 261, and is thus electrically coupled to the electrical pad 264 by the lead 274. In this way, the positions of the movable electrode assembly 208, the shuttle 109, and the mirror 103 can be electrically sensed by the controller 111 to confirm and / or monitor the status of the microswitch 104. The limiters 262, 263 and the stops 261, 292, 293 are connected to the actuator 1
80 are included in the movement inhibiting means.

Other means for monitoring the position of the shuttle 109 and the movable electrode assemblies 208, 209 can be provided to the actuator of the present invention. For example, the controller 111 controls the movable comb driving members 208a, 208b, 208c, and 209a.
, 209b, 209c, the fixed comb drive members 210a, 210b, 210c, 230a, 230b, cooperating with each other with the movable comb drive members.
This can be determined by means of conventional algorithms included in the controller to measure the capacitance between the 230c and the comb drive finger 212. For example, the signal separated from the drive signal to the comb drive member can be transferred by the controller 111 to an actuator for measuring the capacitance. Such a method does not require physical contact between the electrodes, such as the above-described movement inhibiting means. Alternatively, one or more springs or suspensions 224,
Silicon material along the first and second opposite vertical sides of 225 can be injected during the formation of the actuator to create a piezoresistor at the spring portion. The change in the electrical resistance of the piezoresistor is
Shuttle 109 compared to substrate 213 and fixed electrode assemblies 210, 230 in response to changes in the strain of suspensions 224, 225 during deflection of 14, 217.
And can be measured by a conventional algorithm supplied to controller 111 to determine the position of mirror 103.

Actuator 601 is a further embodiment of the actuator of the present invention described in FIG. 11, and is substantially similar to actuator 101, with like reference numbers identifying similar components of actuators 101 and 601. It has been used to describe. Actuator 6 as in actuator 101
01 includes first and second movable electrode assemblies 208, 209 and first and second individual fixed electrode assemblies 210, 230 connected together to move in unison.
including. The electrode assemblies 208, 209, 210, 230 extend perpendicular to the longitudinal centerline of the actuator and are centered at said centerline. The actuator 601 differs from the actuator 101 in that the first movable assembly 208 includes only a first comb-shaped driving member 208a that extends perpendicular to the moving direction of the assemblies 208 and 209. The second movable assembly 209 includes only the first comb-shaped driving member 209a extending perpendicularly to the moving direction of the assemblies 208 and 209.
Actuator 601 includes only single comb drive members 208a, 209a, while actuator 101 includes comb drive members 208a, 208b, 208
c, 209a, 209b, 209c, the actuator 101 supplies approximately three times as much power as the actuator 601. The design of the suspension for actuator 601 must account for this reduction in power to achieve the desired deflection. The use of a single set of comb drive assemblies 208, 209 reduces the total length of the actuator 601 that will allow for a more compact optical microswitch, as described below.

A top view of a first embodiment of an optical switch 104 made according to the present invention is shown in FIG. The switch 104 is a microchip 100 comprising at least one and a series or plurality of twelve transverse comb drive actuators 180 as shown, carried by a silicon wafer or substrate 213 having a thickness of approximately 500 microns. A substantially planar assembly or device in form. Each of the electrostatically driven actuators or motors 180 has a shuttle means or shuttle 109 coupled to the mirror 103 which is disposed vertically relative to the substrate or body 213. The laser beam 191 carried by the input fiber 98 is
04 through the input or input port 150 and the collimating lens 102
Through the switch 104 before staying in the optical path down the central longitudinal axis 113 of the switch 104. Typical laser beams 191, 19 for use with optical switch 104
2 can have a diameter in the range of approximately 100 to 200 microns. As described in FIG. 12, the sheath of the input fiber 98 is removed at the input port 150, and the coated fiber 98 is then removed from the inflow channel 15 formed therein.
It extends to the microchip 100 along 6. Collimating lens 10
2 is located near the end of the fiber 98. In the preferred embodiment shown in FIG. 12, lens 102 is a conventional miniature graded index collimating lens. Alternatively, lens 102 may be a conventional miniature molded lens or a conventional ball lens (
ball lens) and are within the scope of the present invention. The end of the fiber 98 is located on the switch 104 so as to be focused on the collimating lens 102. The lens 102 is provided in the main passage or hall 1 of the microchip 100.
Before the beam enters 57, it functions to collimate beam 191. It should be understood that an optical switch 104 without the lens 102 can be provided at the entrance to the hole 157. Further, the collimated input laser beam 191 can be directed to the input port 150 through the open space, ie, without using the input fiber 98, and is within the scope of the present invention.

In FIG. 12, the actuator or micromotor 180 is in a rest position or home position, intermediate between the extended and retracted positions.
osition). Actuator 180 comprises a first set or plurality of six actuators 180a spaced apart from a central longitudinal axis 113 of microchip 100 and spaced along a parallel first imaginary line; It is divided into a second set or plurality of six actuators 180b located away from the central axis 113 of the chip 100 and spaced along a parallel second imaginary line. The actuators 180a and 180b are arranged on opposite sides of the central axis 113 and face each other. The mirrors 103 of the actuators 180 are each inclined at an angle of 45 degrees relative to the axis 113 and typically face the input port 150. The mirror 103 of the first actuator 180a functions to steer the beam 191 to a 90 degree angle so that the beam 191 extends in a first direction perpendicular to the central axis and toward the right side of the device. . The mirror 103 of the second actuator 180b is arranged such that the beam 191 extends in a second direction perpendicular to the central axis and towards the left side of the device.
It functions to steer the beam 191 at an angle of 90 degrees. As described above, the mirror 103 of the first actuator 180a transmits the beam 191 to the second actuator 18a.
Guide in the opposite direction from mirror 0b.

A first plurality of six output or outflow ports 151 coordinated with the mirror 103 of the first actuator 180 a are supplied to the right side of the microchip 100 and coordinated with the mirror 103 of the second actuator 180 a. The second plurality of six output ports 151 are supplied to the left side surface of the microchip 100. Outflow ditch 1
61 is for transporting the individual output fiber 97 to a position close to the mirror 103,
Each port 151 extends inward to a hole 157. Each fiber 97
(Not shown) starts at the outflow port 151. It should be understood that mirrors having other inclinations relative to each other and / or to the axis of the optical switch can be provided. The lens 102 is located between the mirror 103 and the entry surface of a separate output fiber 97 for focusing the beam 191 onto the fiber 97. The optical switch 104 is a single mode PM optical fiber 97
Although shown as coupled to, the switch 104 can be coupled to any suitable optical fiber and is within the scope of the invention.

The set of lenses 102 is arranged in series along the longitudinal axis 113 at the center or middle of the hole 157. The first or top lens 102 is located approximately 4 mm below the lens 102 adjacent the output fiber 97 and serves to refocus the laser beam 19. Second or lower lens 1 in the middle of hole 157
02 is spaced at twice the focal point of the beam 191 exiting the lens 102 upwards and to re-parallelize the laser beam 191 to travel along the longitudinal axis 113 in the lower half of the hole 157 Function.

As shown in FIG. 13, during operation, one particular mirror 103 a under the control of the controller 111 is completely extended by the individual actuator 180 b to the position of the optical path of the beam 191 while the controller The remaining mirror 103b under the control of 111 is completely retracted to a position off the optical path of the beam 191. Beam 191 reflects from a particular elongated mirror 103a and is optionally directed by mirror 103a to a separate output port 151 and output fiber 97 coupled thereto. Beam 191 passes through output port 151,
And through an open space or, alternatively, by a second optical fiber and / or lens 97 to the destination. Beam 192 may be directed from any one of output ports 151 to input port 150. In the foregoing embodiment, it is understood that each of the mirrors 103 should be moved by at least the width of the beam 191 between its fully retracted position and the fully extended position. Would. A typical laser beam 191 for use with the optical switch 104 can have a diameter in the range of approximately 100-200 microns, requiring at least this large linear movement of the mirror 103 by the actuator 180. As mentioned above, prior art actuators can typically provide only 40 microns of travel at the appropriate switch speed.

Since the present invention uses mirror 103 to couple beam 191 between input port 150 and a particular output port 151, the quality of the mirror used is important.
To minimize optical loss due to absorption, diffusion and defocus, the mirror 10
The surface of 3 must be reflective, smooth and flat. For less critical applications, the mirror 103 can be formed in place as a vertical wall on an etched surface during device fabrication. Mirror 103 is manufactured independently from a very thin silicon wafer, adjusted later as described in FIG. 10 for actuator 601, and sold by Norland Products, Inc. of New Brunswick, NJ Norland NEA123M, a UV-curing initiation adhesive
Etc. may be adhered to bracket 219 on extension 218 by any suitable adhesive 688. Mirror 103 is a thin silicon wafer 69 having a layer 692 of any suitable reflective metal, such as gold, connected to wafer 691 by a thin adhesive layer 693 made of chrome or any other suitable material.
It may be made from one. Other suitable reflective materials for layer 692 include aluminum and silver, and other suitable materials for adhesive layer 693 include titanium. The silicon wafer 691 has a thickness in the range of 20-300 microns, preferably around 80 microns, and the reflective layer has a thickness in the range of 0.05-0.30 microns, preferably around 0-300 microns. .15 microns thick. The adhesive layer has a thickness of approximately 0.005 microns. The metal layers may be disposed in a manner that minimizes their residual internal stress at room temperature. The large ratio of silicon thickness to metal thickness also minimizes the curvature of the mirror caused by the different thermal expansion coefficients of the coating layer and silicon. The resulting mirror is characterized by high reflectivity of gold or other reflective metals and low surface roughness of polished silicon and high flatness.

Other layers or coatings may be used to improve the reflectivity of the mirror 103.
May be arbitrarily arranged on the top. In the mirror 103 shown in FIG. 10, a plurality of dielectric pairs 696 are disposed on the reflective layer. Each pair 69
6 is a relatively high refractive index layer 69 disposed over a relatively low refractive index layer 698.
7 is provided. If mirror 103 is used in an optical microswitch, such as microswitch 180, layers 697 and 698 each include laser beam 19
It has a thickness equivalent to one quarter of the 1,192 wavelength. Suitable materials for layer 697 include:
Suitable materials for layer 698, while including cerium oxide and titanium oxide, include magnesium fluoride and silicon dioxide.

An optical switch of the present invention having another arrangement of microactuators can be provided to selectively redirect the laser beam 191 guided by the input fiber 98 to the switch. The optical microswitch 83 shown in FIG.
The 0 is formed from a microchip 831 made by any suitable means as described above for switch 104. Using similar reference numbers,
Similar components of microswitches 104 and 830 have been described. The optical switch 830 includes an input port 832 coupled to the input fiber 98 and a plurality of output or output ports 833 spaced along one side of the switch 830 and coupled to individual output fibers 97. The central longitudinal axis 836 is the inflow port 8
32 and perpendicular to the outflow port 833 along the central passage or hole 837 of the switch 830. The first plurality of eight actuators or microactuators 180a extend parallel to the central axis 836 of the optical switch 830 and are longitudinally spaced along a first imaginary line spaced therefrom. Is done. A second plurality of four actuators or microactuators 18
Ob is spaced longitudinally along a second imaginary line extending parallel to and spaced from axis 836. The longitudinal axis 836 extends between the first set of actuators 180a and the second set of actuators 180b. In this manner, the actuator or micromotor 180a faces the actuator or microactuator 180b.

The actuator 180a includes a mirror 103a mounted on a bracket 219a.
And the actuator 180b includes a mirror 103b mounted on a bracket 219b, each of the mirrors 103a, 103b being substantially similar to the mirror 103 described above. Each of the mirrors 103a, 103b typically faces an input port 832. The lens 102 is located between each mirror and a groove 838 for transporting the optical fiber 97 to a separate outflow port 833. Mirror 103a
, 103b are each inclined at an angle of 45 degrees relative to the longitudinal axis 836 so as to redirect the laser beam 191 impinging thereon at an angle of 90 degrees. The bracket 219a in each of the actuators 180a is formed such that the mirror 103a mounted thereon deflects the laser beam 191 in a forward direction compared to the actuator 180a. The bracket 219b in each of the actuators 180b has a mirror 103b mounted on the bracket 219b.
It is formed to deflect the laser beam 191 in the direction toward 80b. As such, the mirrors 103a, 103b all deflect the laser beam 191 in a plurality of parallel directions, and thus in a single direction, such that the laser beam 191 always exits one side of the optical switch 830.

The microactuators 180 a are arranged in four back-to-back pairs along a first imaginary line of the microchip 831. As such, the actuator 18
0a of each adjacent pair of extensions 218a, brackets 219a, and mirror 103
a is supplied along the adjacent surface of the actuator 180a. With this arrangement of the actuator 180a in the microchip 831, the two last mirrors 103a are positioned closer to the center of the microswitch 830 so as to reduce the optical path length of the laser beams 191 and 192 in the microswitch. Can be. As a result, the input collimating lens 102 can be located further inside the microswitch 830. Due to the back-to-back arrangement of the actuators 180a, the two center lenses 102 can also be arranged in front of the two center actuators 180a, further reducing the optical path length of the laser beams 191 and 192.

The input laser beam 191 is transmitted to the mirror 10 selected by the controller 111.
It moves from the inflow port 832 along the central longitudinal axis 836 until it engages 3a, 103b. Mirror 103a of first actuator 180a and shuttle 109
The reflective surface of the mirror is such that the mirror 103 is guided through a separate outflow port 833 from a first or retracted position where the mirror 103 is offset from the optical path of the laser beam 191. Can be moved to a second or extended position located at Mirror 103b of second actuator 180b
And the shuttle 109 moves from a first or retracted position where the mirror 103b is out of the optical path of the laser beam 191 to a second or extended position where the reflective surface of the mirror is located in the optical path of the laser beam 191. Can move to

The extension 218 and the bracket 219 of each actuator 180 b
It is constructed so that when 03b is in its retracted position or out of the way, it deviates from the path of the laser beam 191. Actuator 180b requires longer movement or deflection than actuator 180a in order to retract mirror 103b and bracket 219 out of the optical path of laser beam 191 by adjusting mirror 103b and bracket 219b relative to input laser beam 191. I do. For example, the actuator 180b illustrated in FIG. 13 requires an additional deflection of 50 microns as compared to the actuator 180a. in this way,
Comb driving fingers 211, 2 in the comb driving assembly of actuator 180b
12 is longer than the corresponding component in actuator 180a.
Increasing the dimensions requires a greater drive voltage for actuator 180b. Laser beam 1 in a plurality of parallel directions outward from optical switch 830
The direction 91, a single direction, reduces the complexity of the optical data storage system 95 in which the switch 830 is located.

Another optical switch that selectively directs the incoming laser beam 191 outward in a single direction from the location side of the optical switch is illustrated in FIG. The optical microswitch 851 described therein includes the optical microswitches 104 and 83.
0, and using similar reference numbers, the microswitch 10
4, 830 and 851 similar components have been described. The extended optical switch 851 is formed from a microchip 852 having an inflow port 853 at one end and a plurality of twelve outflow ports 854 spaced apart on one side. The longitudinal axis 856 extends parallel to the inflow port 853 and along the path or hole 857 of the optical switch 851 and perpendicular to the outflow port 854. The switch 851 has two lens pairs 102 disposed in the hole 857 for refocusing and recollimating the laser beam 191 as the beam 191 moves upward through the hole 857. The two lens pairs 102 divide the hole into three portions, each approximately 4 millimeters in length.

A plurality of twelve actuators 180 are spaced vertically along an imaginary line that extends parallel to and away from the longitudinal axis 859. Actuator 1
Each 80 has a vertical axis 8 to redirect the laser beam 191 at an angle of 90 degrees.
It has a mirror 103 inclined at an angle of 45 degrees compared to 56. The mirror 103 of each actuator 180 is mounted on a bracket 219 and thus directs the laser beam 191 back to the actuator 180 through a separate outflow port 854 located adjacent the rear end of the actuator 180. . Inflow optical fiber 98 is coupled to inflow port 853 and outflow optical fiber 97 is coupled to each outflow port 854. The lens 102 is disposed between each mirror and a groove 858 for transporting the optical fiber 97 to each outflow port 854. Mirror 103 moves between a first or retracted position where mirror 103 is out of the optical path of laser beam 191 and a second or extended position where mirror 103 is in the optical path of laser beam 191. , Each of which can be moved by a shuttle 109 of an individual actuator 180. The optical switch 830 can be provided with an actuator 180 for directing a laser beam 191 in front of the actuator, and is within the scope of the present invention. The design of the optical switch 851 is effective in using the surface area of the substrate 213.

A further embodiment of the optical switch of the present invention, where the outgoing laser beam 191 emerges from only a single side of the optical switch, is illustrated in FIG. The optical switch 901 described therein is formed from a microchip 902 having a single input port 903 coupled to an input fiber 98 on one side of the microchip 902. Groove 906 is provided to microchip 902 to carry input fiber 98 from inflow port 903. The twelve outflow ports 904 coupled to the PM optical fiber 97 are spaced apart on the same side of the microchip 902 as the input ports 903.

The first and second directional mirrors 907 and 908 are substantially similar to the mirror 103 described above, and each have a passage or hole 911 extending below or extending above the microchip 902. Along 912, is alternatively included in the means of the optical switch 901 for directing the laser beam 191. The holes 911, 912 extend along individual longitudinal axes 913, 914, they are spaced apart from each other and extend parallel to each other and to the sides of the microchip 902. The mirrors 907, 908 are tilted at an angle of 45 degrees compared to the axes 913, 914, respectively, and each typically faces the inlet port 903. The horizontal axis 916 is
From the inflow port 903, it extends across the microchip 902 and perpendicular to the axes 913, 914.

The first directional mirror 907 is connected to the actuator 601 and
A first or retracted position in which the laser beam 7 extends out of the optical path of the laser beam extending along the horizontal axis 916, and a second position in which the mirror 907 is in a lower position in the optical path of the laser beam 191. From the extended or extended position in the optical switch 901 can be moved up and down, and the beam 191 is moved to the first longitudinal axis 9 of the switch.
It functions to deflect the laser beam at an angle of 90 degrees so as to extend downward along a first optical path extending along 13.

The second directional mirror 908 is disposed behind the first mirror 907 and is fixedly mounted on the microchip 902 by a bracket 917 etched from the microchip 902. The input laser beam 191 is
When 07 is in its retracted position, it engages with the mirror 908. The second mirror 908 functions to direct the beam 191 upward at a 90 degree angle such that the beam travels along a second optical path along a second longitudinal axis of the microchip 902.

A plurality of first actuators 180 a are vertically spaced apart along a first imaginary line extending parallel to the first longitudinal axis 913, and at least one second actuator and the illustrated single One actuator 180b is located at a second imaginary line, which also extends parallel to the longitudinal axis 913. The four actuators 180a are substantially opposite the second actuator 180b, and the longitudinal axis 913 extends between the actuators 180a and 180b. The first actuator 180a includes four actuators 841, 842, 843, and 84, which are vertically separated from each other along the first imaginary line in order from the top to the bottom of the lower hole.
4 inclusive. The actuators 841, 842 are positioned side-by-side along a first imaginary line such that their extensions 218 extend parallel to one another along adjacent sides of the actuators 841, 842. Actuators 843, 844 are also arranged side by side along a first imaginary line such that their extensions 218 extend parallel to one another along adjacent sides of actuators 843, 844.

A plurality of third actuators 180 c are vertically spaced apart along a third imaginary line extending parallel to the second longitudinal axis 914, and at least one fourth actuator A single actuator 180d is positioned on a fourth imaginary line, which also extends parallel to the second longitudinal axis 914. Typically, the first and second actuators or microactuators 180a and 180b are located on one side of the abscissa 916 so as to rest on half of the microchip 902, and the third and fourth actuators Or microactuator 180c
And 180d are placed on the horizontal axis 91 so as to be placed on the other half of the microchip 902.
6 on the other side. More specifically, the actuator placement about the upper vertical axis 914 is a mirror image of the actuator placement about the lower vertical axis 913. As such, the four actuators 180c are substantially opposite the fourth actuator 180d, and the longitudinal axis 914 is
c and between the actuator 180d. Third actuator 180c
The fourth actuators 841 to 844 are arranged vertically in order from the bottom of the upper hole 912 and along the third imaginary line.

The actuators 180 a to 180 d are respectively connected to the first directional mirror 907
To the third and fourth actuators 180c, 180d, or by the second directional mirror 908 to the first and second actuators 180a, 180b.
A first or retracted position out of the path of the laser beam 191 such that it is redirected or deflected to the second position, and the reflecting surface of the mirror 103 is located in the path of the laser beam 191. It has a mirror 103 that can move between two or extended positions. Each of the mirrors 103 is normally opposed to a directional mirror 907, 908, and their respective first to direct by deflecting the laser beam 191 at an angle of 90 degrees compared to the longitudinal axis. In comparison with the one vertical axis 913 or the second vertical axis 914, they are inclined at an angle of 45 degrees. More specifically, each of the mirrors is angled at an angle to selectively direct laser beam 191 in a single direction through a separate outflow port 904 on one side of optical microswitch 901. ing. The deflected laser beam is received by a collimating lens 102 which then launches the laser beam onto one of the output fibers 97. Groove 927 is provided to microchip 902 for transporting optical fiber 97 to a separate outflow port 904.

As described above, the microactuators 180 a and 180 c are arranged in two sets of back-to-back pairs along individual holes 911 and 912, respectively, in the same manner as the microactuator 180 a of the optical microswitch 830. This arrangement of the actuators 180a, 180c in the microchip 902 reduces the optical path length of the laser beams 191 and 192 in the microswitch 901 so that the coupling efficiency of the switch 901 is improved so that the actuators 844 in the lower and upper holes are reduced. Mirror 103 is a separate directional mirror 907,
908 can be located closer. Actuators 180a, 180
The back-to-back arrangement of c also allows the actuator 601 to be placed in front of the actuator 841, and can also reduce the optical path length of the laser beams 191 and 192 in the microswitch 901.

The mirror 931 has a microchip 902 at the lower end of the lower hole 911.
Microchip 902 by means of bracket 932 etched from
It is fixed and mounted. The mirror 931 is connected to the first and second actuators 18.
0a, 180b under the mirror 103 and in front of the lowermost actuator 180a. The mirror 931 is inclined at an angle of 45 degrees compared to the vertical axis 913. When the mirrors 103 of the first and second actuators 180a, 180b are in the retracted positions, respectively, the laser beam 191 passes through the collimating lens 102 in a direction away from the first actuator 180a. It is deflected by mirror 931 at an angle of 90 degrees to travel to output fiber 97 extending through port 904. A similar mirror 943 is fixedly mounted on the microchip 902 by a bracket 944 at the top of the upper hole 912 in front of the third actuator 180c. Mirror 943 operates in substantially the same manner as mirror 931 and includes first and second actuators 180c
, 180d function to deflect the laser beam 191 through a separate output port 904 when each is in the retracted position. Mirror 1 so that laser beam 191 always exits one side of optical microswitch 901.
03, 931 and 943 deflect the laser beam in a plurality of parallel directions, ie in a single direction. In addition, the length of the holes 911, 912 and the optical path length of the laser beams 191, 192 are further reduced by using fixedly mounted mirrors 931, 943 instead of the actuator and its associated movable mirror. As will be appreciated, the optical switch 901 can be utilized to selectively direct the laser beam 191 to one of the twelve output fibers 97.

Optical microswitch 901 is effective in reducing the maximum optical path length that laser beam 191 or laser beam 192 must travel through the optical switch. The directional mirrors 907 and 908 are respectively provided with a hole 157 of the switch 104, a hole 837 of the switch 830, and a hole 8 of the switch 851.
The laser beam 191 is deflected through one of the holes 911 and 912 which is shorter in length than 57. The reduced optical path length improves the coupling efficiency of the switch 901. Other embodiments of the optical switch of the present invention can be provided with further subdivided actuators to minimize the maximum travel path of the laser beams 191 and 192.

An optical microswitch similar to any of the switches described above may be supplied with an optical assembly similar to the laser optics assembly 96 described above, integrated into the microchip of the optical switch. it can. Optical micro switch 1 shown in FIG.
051 is formed from a microchip 1052 made from any suitable method as described above for switch 104. The micro switch 1051 is
It has similarities to switches 104 and 830 described above, and similar reference numbers have been used to describe similar components of switches 104, 830, and 1051. The micro switch 1051 includes an inflow port 1053 and a switch 1051.
A plurality of outlets or outflow ports 1054 spaced apart along both sides. The outflow port 1054 is coupled to a separate output fiber 97, a portion of which is described in FIG. Each of the output fibers 97 has a separate outflow port 1054
Through to a passage or groove 1056 that is provided to the microchip 1052. The center vertical axis 1061 is connected to the microchip 105 from the inflow port 1053.
Along a central passage or hole 1062 that extends longitudinally through the center of the second.

A first plurality of actuators or microactuators 180a extend parallel to the central axis 1061 and along a first imaginary line located away therefrom,
They are arranged vertically apart. A second plurality of actuators or microactuators 180b are spaced longitudinally along a second imaginary line extending parallel to and spaced apart from axis 1061. Central longitudinal axis 1061 extends between first actuator 180a and second actuator 180b, such that first actuator 180a faces second actuator 180b as compared to longitudinal axis 1061. . Single or any plurality of actuators 180 can be provided, but five first actuators 180a and six second actuators 180b are provided to switch 1051.

The first group of actuators 180 a and the second group of actuators 180 b each include a mirror 103 mounted on a bracket 219. The mirror 103
Each is inclined at an angle of 45 degrees with respect to the longitudinal axis 1061 so as to substantially face the entrance 1053, and guides the laser beam 191 at an angle of 90 degrees with respect to the axis 1061. The re-directed laser beam 191 reflects from each mirror 103 along a path extending forward of the actuator 180 and a respective exit 105
Exit 4 The mirrors 103 are each moved by the shuttle 109 of the respective actuator 180 to a first or retracted position where the mirrors deviate from the path of the laser beam 191 and a second position where the mirrors are positioned in the path of the laser beam extending from the entrance 1053. It can be moved between a position, ie a projecting position. Mirror 1067
The microchip 11 by the bracket 1068 at the top of the hole 1062
02 is firmly attached. Mirrors 1067 operate to deflect laser beam 191 through respective outlets 1054 when each of mirrors 103 of first and second actuators 180a, 180b is in the retracted position. The mirror 1067 eliminates the need for a single actuator in the optical switch 1051, thereby reducing the complexity of the switch 1051 and the parallel path of the laser beam traveling therethrough.

A laser micro-optical element means including a laser micro-optical element assembly 1071 is mounted on the substrate 213 in front of the entrance 1053 and at the bottom of the microchip 1052. A micro-optics assembly 1071, similar to laser-optics assembly 96, receives a laser beam from a primary polarized laser source 231 and a focusing lens (not shown) and is substantially similar to collimating optics 234. And an element lens 1072. Assembly 1071 further includes a low chromatic dispersion leaky beam splitter 1073 substantially similar to beam splitter 232 described above. The assembly 1071 includes a quarter-wave plate 1083 substantially similar to the above-described quarter-wave plate 238, an optional half-wave plate 1084, a polarizing beam splitter 1086, and a photodetector 1087. Having. The photodetector 1087 converts the received optical signal into an electric signal. Each component of the micro optical element assembly 1071 may be attached to the substrate 213 by any appropriate means. For example,
A recess or receptacle, such as a receptacle 1088 for the collimating optics lens 1072, may be provided on the substrate 213 to receive each component of the assembly 1071, wherein the components may be provided by any suitable means ( For example, it is fixed in each recess by an adhesive and / or a spring 1089). A plurality of grooves 1091 are provided in the microchip 1052 to facilitate transmission of the laser beam through the micro-optical element assembly 1071.

As is well established in the art, wave plates 1083, 1084,
A difference detection mechanism comprising a polarizing beam splitter 1086 and a detector 1087 measures the optical power of the reflected laser beam 192 in two orthogonal polarization components with respect to the input beam 191. The difference signal is a polarization rotation measurement that is sensitive to the Kerr effect at each surface 108 of the MO disk 1074. This difference signal may be processed by the differential amplifier 237 for output as an electrical signal.

Providing the micro-optical element assembly 1071 on the microchip 1052 simplifies alignment of the assembly 1071 with the lens 102, mirror 103 and other optical components of the switch 1051. The depressions and other components of the substrate 213 provided for aligning the components of the micro-optical element assembly 1071 on the substrate 213 may be precisely DRIE-etched.

A micro-optical element assembly similar to the assembly 1071 may be provided on other switches, and is also within the scope of the present invention. For example, such an assembly may be provided on the microchip 902 of the optical microswitch 901 shown in FIG. An optical microswitch 1096, formed from microchip 1097, which is substantially identical to microswitch 901 is shown in FIG. Here, similar reference numerals are used in FIG.
8 and show similar components of optical microswitches 901 and 1096. The micro-optical element assembly 1071 is mounted on the microchip 1097 between the second and fourth actuators 180b, 180d and in front of the directional micro-actuator 601 connected to the first directional mirror 907.

The optical microswitch 1096 comprises output fibers 97 each exiting from the same side of the microchip 1097 and advantageously includes a micro-optical element assembly 1071 on the microchip 1097. The two-hole design of the microswitch 1096 and the close packing of the mirror 103 in each of the holes improves the coupling efficiency of the switch 1096.

Another optical microswitch having a micro-optical element assembly similar to assembly 1071 is shown in FIG. Optical microswitch 1101 is formed from microchip 1102 made from any suitable means as described above with respect to optical microswitch 104, and in many respects optical microswitches 901 and 901.
096. First and second directional mirrors 1106, 1107, similar to mirror 103 described above, are provided within the means or assembly of optical switch 1101, and pass laser beam 191 alternately down microchip 1102. That is, the passage along the hole 1111 or the passage extending upward, that is, the hole 1
It is sent along 112. Holes 1111 and 1112 are
Along each longitudinal axis 1113, 1114. These longitudinal axes extend parallel to each other and from the sides of the microchip 1102. The mirrors 1106, 1107 are each inclined at an angle of 45 degrees with respect to the respective axis 1113, 1114. The horizontal axis 1116 is
It extends at right angles to the axes 1113, 1114 across the center of 02. First
Directional mirror 1106 is attached to actuator 601 and operates in much the same way as first directional mirror 907 in actuator 901. When the first directional mirror 1106 is in the retracted position, the input laser beam 191 impinges on the second directional mirror 1107, much like the second directional mirror 908 of the actuator 901. The second directional mirror 1107 is mounted on the microchip 11 by a bracket 1117 etched from the microchip 1102.
02 and operates in the same manner as the second directional mirror 908 to direct the laser beam 191 at a 90 degree angle,
2 along a second path along the second longitudinal axis 1114.

A plurality of first actuators 601a are disposed along one side of the lower longitudinal axis 1113, and a plurality of second actuators 601b are disposed along this axis 1113.
The laser beam 191 deflected by the first directional mirror 1106 moves between the first and second actuators 601a and 601b. Therefore, the first and second actuators 601a, 60
1b is opposed across the longitudinal axis 1113. More specifically, first actuator 601a includes a plurality of actuators spaced longitudinally along axis 1113. As shown, the first actuator 601a has a longitudinal axis 111
First and second sets of actuators longitudinally spaced along three. Each actuator pair 1123 includes first and second actuators 1123a, 1123 arranged side by side along an imaginary line extending perpendicular to the longitudinal axis 1113.
b. The first actuator 1123a has a second
Is disposed after the actuator 1123b. In this state, the extension 218 of the second actuator 1123b extends forward of the actuator 1123b alongside the actuator 1123a and ends at a point substantially equal to the end point of the extension 218 of the first actuator 1123a.

The mirrors 103 of the first and second actuators 1123a and 1123b are arranged at positions separated from each other in the longitudinal direction along the axis 1113 in a state of being close to each other. The mirror 103 of each of the first and second actuators 1123a and 1123b is
The actuator allows the mirror 103 to move from a first position deviating from the path of the laser beam 191, ie, a retracted position, to a second position, ie, a protruding position, located on the path of the laser beam 191. The brackets 219 each have an axis 111
The laser beam 191 is inclined at an angle of 45 degrees with respect to 3 so as to guide the laser beam 191 at an angle of 90 degrees. The deflected laser beam travels forward of the actuator and is received by a collimating lens 102, which launches a laser beam 191 onto one of the output fibers 97. The passage 1126 is connected to the output fiber 9
7 is provided on the microchip 1102. Passageway 1126 is
It extends to an outlet 1127 provided on the side surface of the microchip 1102. The second actuator pair 1123 of the first actuator 601a is connected to the first actuator 6
01a is located below the first actuator pair 1123 of FIG.

[0092] The second actuator 601b includes a single actuator pair 1123,
This actuator pair is located between the collimating lens 102 for the upper actuator pair 1123 of the first actuator 601a and the collimating lens for the lower actuator pair 1123 of the first actuator 601a. The pair of collimating lenses 102 is a mirror 1 of the second actuator 601b.
The laser beam 191 is emitted to each output fiber 97 on the opposite side of the optical fiber. These fibers 97 extend from outlets 1127 corresponding to the first actuator 601a through respective passages 1126 to respective outlets 1117 provided on the opposite side of the microchip 1102. The mirror 1131 is firmly attached to the microchip 1102 by a bracket 1132 etched from the microchip 1102. The mirror 1131 is disposed below the mirror 103 of the first and second actuators 601a and 601b, in front of the lower actuator pair 1123 of the first actuator 601a, at the end of the lower hole 1111. The mirror 1131 is inclined at an angle of 45 degrees with respect to the longitudinal axis 1113. First and second actuators 601a, 60
When the mirrors 1b are in the retracted positions, the laser beam 191
The beam is deflected at an angle of 90 degrees by 131, moves away from the first actuator 601 a, passes through the collimating lens 102, and moves into the output fiber 97 passing through the outlet 1127.

A plurality of third actuators 601c are located above the first actuator 601a on one side of the upper longitudinal axis 1114, and a plurality of fourth actuators 601d are located above the second actuator 601b on the opposite side of the upper longitudinal axis 1114. It is.
The third and fourth actuators 601c, 601d each include a single actuator pair or microactuator pair 1123 having first and second microactuators 1123a, 1123b. Second directional mirror 1107
The laser beam 191 deflected by the third and fourth actuators 601c
, 601d. In this state, the third and fourth actuators 601c and 601c
01d faces each other with the upper longitudinal axis 1114 interposed therebetween. The mirror 1143 is located at the top of the hole 1111 and in front of the third actuator 601c.
To the microchip 1102. Mirror 11
43 operates in substantially the same manner as the mirror 1131. When the mirrors 103 of the first and second actuators 601c and 601d are at the retracted positions, respectively, the laser beam 19
1 acts to deflect through respective outlets 1127. As will be appreciated, the optical switch 1101 may be used to selectively direct the laser beam 191 to one of the twelve output fibers 97.

The micro optical element assembly 1071 includes first and third actuators 601a,
It is mounted on the microchip 1102 in front of the actuator 601 connected to the first directional mirror 1106 between 601c. Providing the micro-optical element assembly 1071 on the optical switch 1101 is advantageous for the same reasons as described above with respect to the optical switch 1051. Here, it should be understood that an optical microswitch, such as microswitch 1101, can be provided without micro-optics assembly 1071 and still be within the scope of the present invention.

The mirrors 103 in each of the upper and lower holes 1111 and 1112 are moved to the respective axes 1113 by the actuator pair 1123 of the optical microswitch 1101.
, 1114 are arranged longitudinally close to one another and the laser beams 191, 1
92 parallel paths can be reduced. Mirrors 1131, 1143 mounted tightly at the end of each hole 1111, 1112 obviate the need for two micro-actuators in optical switch 1101. Therefore, mirror 11
31, 1143 will also reduce the parallel path of the laser beam traveling through switch 1101.

It should be understood that a wide variety of microactuators in addition to the microactuators 101, 180, 601 described above can be used with the optical switch of the present invention. For example, another embodiment of the microactuator of the present invention is shown in FIG.
0, which can be used with any of the optical microswitches of the present invention. The actuator 301 shown in this figure is almost the same as the actuator 180. The first movable electrode assembly 208 of the actuator 301 includes only the first and second comb-shaped driving members 208a and 208b, and the second movable electrode assembly 209 includes the first and second comb-shaped driving members. Only 209a and 209b are provided. The first fixed electrode assembly 210 in the actuator 301 includes only first and second comb-shaped driving members 210a and 210b, and the second fixed electrode assembly 230 includes the first and second comb-shaped driving members. Only the driving members 230a and 230b are provided. The actuator 301 further includes two sets of elongated capacitive clamping electrodes or clamps 420 coupled to the vertical flat surface of the comb drive bar 222 of the fixed comb drive members 210a, 230b, and a movable comb drive member 208b, 209a includes a set of opposing capacitive clamping electrodes or clamps 222 mounted on the vertical flat surface of the comb drive bar 221 of FIG. The electrode or clamp 420 on the back of the comb drive member 210a and the electrode or clamp 421 on the back of the comb drive member 208b are connected to the comb drive finger 2 of the comb drive members 208a and 208b.
11 and the fingers 212 of the comb-shaped driving members 210a and 210b are separated from each other when the fingers 212 of the comb-shaped driving members 210a and 210b are inserted into each other. Can be moved between positions where the clamps 420, 421 are close to each other, which occurs when the clamps are separated from each other. Similarly, the electrode or clamp 420 on the back of the comb drive member 230b and the electrode or clamp 421 on the back of the comb drive member 209a are connected to the comb drive fingers 211 of the comb drive members 208a and 208b.
When the fingers 212 of the comb-shaped driving members 210a and 210b are in the state of being inserted into each other, the separated position, and the fingers 212 of the comb-shaped driving members 211a and 210b The clamps 420, 421, which can occur when separated, can move between positions closer to each other. When approaching each other, the clamps 420, 4
Preferably, 21 are about 5 microns apart.

The movement stopping means and the mirror monitoring means of the actuator 301 do not include the stop 261 and the limiters 262 and 263. Instead, the actuator 301 includes a rear stop 292 that engages with the bracket 219 to limit the backward movement of the shuttle 109 and a front stop 293 that engages with the bracket 219 to limit the forward movement of the shuttle 109. I have. Rear stop 292 is electrically connected to electrical pad 298 by lead or trace 302 and front stop 293 is electrically connected to electrical pad 299 by lead or trace 303. The pads 298, 299 are electrically connected to the controller 111,
The shuttle 109 in the protruding position can be monitored. Additional rear stop 29
2 and a front stop 293 are provided at each end of the 209a, the second comb drive member 208b, and the first comb drive member.

In the method of operating the actuator 301, a pulsed voltage is applied to the first and second fixed electrode assemblies 210 and 230 by the controller 111 alternately at the start-up of the actuator, and the first and second movable electrodes are applied. Assemblies 208, 20
9 to resonate to achieve the maximum oscillatory displacement of shuttle 109. Controller 11
1 applies such a pulsed voltage potential between the opposing comb-shaped driving members during a half stroke of the electrode assembly 208, the opposing comb-shaped driving members move toward each other, and It includes the usual means of pressing the comb drive fingers 211, 212 of the mold drive members to their third, ie, completely interdigitated, position. At a preferred resonance level, the clamp 420 on the first fixed comb drive member 210a via the pad 240 and the second movable comb drive member 2 via the pad 242
08b with a stable voltage between the clamp 421 and the electrode assembly 208,
209 are moved to their retracted position, and the mirror 103 is held at the retracted position.

When the mirror 103 is to be held at the projecting position, the comb-shaped driving member 21
First, the voltage between 0a and 208b is released. Then, the first and second movable electrode assemblies 208 and 209 swing toward the second position where the mirror 103 is in the protruding position under the forward pressing force of the spring 214. Next, a voltage pulse is applied to the comb driving fingers 212 of the first and second comb driving members 210a and 210b, and the comb driving fingers 211 of the first and second comb driving members 208a and 208b are assembled. Are attracted toward each other, and the clamps 421 of the movable electrode assemblies 208 and 209 are attached to the fixed electrode assembly 21.
0, 230 towards the clamp 420. Next, the stable voltage is applied to the clamp 420 on the fixed comb driving member 230 b via the pad 241 and the pad 24.
The voltage is applied between the clamp 421 on the movable comb drive member 209 a through the movable electrode drive member 209 a to hold the movable electrode assemblies 208 and 209 and the mirror 103 in the protruding position in contact with the stopper 293. These mechanical stops 292, 293 define protruding and retracting positions, and clamps 421 on the movable electrode assemblies 208, 209 are fixed to the fixed electrode assembly 2.
It is preferable to prevent contact with clamp 420 on 10, 230.

In the following, an alternative method of starting and operating the actuator of the present invention will be described with respect to the microactuator 301. The input drive voltage shown at the bottom of the two graphs in FIG. 21 is provided by controller 111 to cause movement of shuttle 109 shown in the top graph of FIG. Initially, five pulses of 45 volts are applied by controller 111 to first and second return comb drive members 230a, 230b via electrical pads 240, causing the actuator or micromotor 101 to increase in amplitude to 100 microns. Vibrate. Electric pad 241,
242 is held constant at 0 volts during this startup operation. These four
Immediately after the last 5 volt pulse, 45 volts is applied to the first and second comb drive members 210a, 210b. As a result, the electrostatic force between the clamp or clamping electrode 420 on the first comb-shaped member 210a and the clamp or clamping electrode 421 on the second comb-shaped driving member 208b is reduced to the static position shown in FIG. Acts to hold shuttle 109 in a retracted position approximately 100 microns from the shuttle. The clamps 420, 421 are approximately 5 microns apart in the fully retracted position of the shuttle 109, and the applied voltage acts to hold the shuttle 109 in this retracted position. Once 45 volts are applied to the first fixed electrode assembly 210, the comb drive fingers 211 of the movable electrode assembly 208 and the comb drive fingers 212 of the fixed electrode assembly 210 are separated by approximately 100 microns. No suction force acts between them.

As can be seen in FIG. 21, 45 volts applied to fixed electrode assembly 210 is released in about 11 milliseconds. Thereafter, a short pulse of 45 volts is applied to the fixed electrode assembly 210 as the shuttle 109 begins to swing toward its extended position. At this time, the clamp electrodes 420 and 421 are sufficiently separated, and no electrostatic force acts between them. Instead, the pulsed voltage on the assembly 210 acts to press the comb drive fingers 211 of the electrode assembly 208 against the opposing comb drive fingers 212 of the electrode assembly 210. The pulsed voltage compensates for the energy loss that occurs during the half stroke, thus causing the shuttle 109 to swing to its fully extended position. At this time, a potential of 45 volts is applied to the second fixed electrode assembly 230, and the clamp 420 provided on the rear surface of the second comb-shaped driving member 230b is provided.
And an electrostatic force is applied between the opposed clamps 421 arranged on the back surface of the second comb-shaped driving member 209b. These forces hold the shuttle 109 in its extended position. At approximately 12 milliseconds, the shuttle is released from its extended position, after which a 45 volt pulse is applied to the second fixed electrode assembly 230 to retract the opposing second movable electrode assembly 209, and thus the shuttle 109. Press into position, and then the shuttle is held by 45 volts applied to the first fixed electrode assembly 210. Here, during a start-up oscillation, a pulsed voltage is sequentially applied to one or both of the first fixed electrode assembly 210 and / or the second fixed electrode assembly 230 in various configurations, causing the shuttle 109 to resonate. I understand that you can get it. Further, it should be appreciated that drive voltages other than square may be provided by the controller 111 to the actuators of the present invention to activate them.

As described above, the actuator 301 is designed using the DRIE technique. Thereby, various structures can be higher and the vertical surface area can be higher than similar structures in the prior art. Therefore, the clamps 420, 4
21 includes a larger vertical surface area fixed electrode assembly 210, 230 and a movable electrode assembly 208, 209, and thus, for any given distance between the clamps, between the opposing clamps 420, 421. It is possible to generate a larger suction force than the prior art.

The voltage that needs to be applied to the fixed electrode assemblies 210, 230 in order for the clamps 420, 421 to hold the movable electrode assemblies 208, 209 in their fully deflected position is a comb drive Approximately four times the voltage that would need to be applied to the fixed electrode assembly to hold the movable electrode assemblies 208, 209 in their fully deflected position using the interengagement of the fingers 211, 212. small. Or,
A full voltage may be applied to fewer comb drive fingers or teeth 211, 212 to obtain the same clamping force.

In the actuator 301, the electrodes or clamping electrodes 420, 421
Each include a plurality of small finger-like extensions 422 extending at right angles to the comb drive bar and spaced along the entire length of the comb drive bar. Extension 422 is 3
It has a length of up to ２５25 microns, preferably 5 to 15 microns, more preferably approximately 13 microns. When the electrodes 420, 421 are in close proximity to each other, the extensions or teeth 218 will at least partially engage each other and act to increase the surface area to which the suction between the finger-like electrodes 420, 421 is applied. Clamps 420, 421 do not have extensions 422 and may be flat. That is, it may have other forms, which are also within the scope of the present invention.

When the movable electrode assembly 208b is released from the retracted position by the clamps 420, 421 of the respective comb-shaped driving members 210a, 208b, the movable electrode assembly 2
08 and 209 oscillate before and after the rest position.
When 01 has a Q of 14, it decreases by 10% every half cycle. Thus, when the initial retraction distance of the electrode assemblies 208, 209 is 100 microns from the rest position, the opposing clamp electrodes 421, 420 provide sufficient attraction between them and additional work is required. Unless implemented on the system by the electrostatic interaction of the movable electrode assembly 209 and the fixed electrode assembly 230, the mobile electrode assembly 208, 209 must be captured at the peak of the 90 micron excursion towards the extended position.

In another microactuator embodiment shown in FIG. 22, the actuator 501 is formed from a silicon wafer. The actuator has springs 214, 217 designed to be non-linear, ie, "bent" when in a static, non-deflecting state. Actuator 501 is substantially the same as actuators 101, 180, 301, and like reference numerals are used to describe like components of actuators 101, 180, 301, 501. The spring portions 224, 225 of each spring 214, 217 in the actuator 501 bend toward each other when the shuttle 109 is in a static state intermediate the retracted and extended positions. In this embodiment, the shuttle 109 moves from its home position to its retracted position, and the second movable electrode assembly 209 and the second fixed electrode assembly 230
When the comb fingers 211, 212 of the first pair electrostatically engage and then overlap, the spring 217 straightens from its pre-curved home position to a linear position.
Similarly, when the shuttle moves from its home position to its extended position and the comb fingers 211, 212 of the first movable electrode assembly 208 and the first fixed electrode assembly 210 engage and subsequently overlap, the spring 214 Is straight from its pre-bent home position to a straight position. In each case, the spring portion 224 of each spring,
The lateral stiffness of 225 increases in a direction perpendicular to the respective comb drive fingers 211 as the spring portions are straight in such a direction. Thus, the lateral stiffness of each spring and these comb drive fingers 21
1, the lateral restoring force exerted by the spring on the comb drive fingers 211,
It increases as a function of the amount of overlap between 212. Thus, the springs 214, 2
17, the comb drive fingers 211, 212 of the active comb drive assembly as the comb drive fingers 211, 212 enter each other;
Acts to press to a stable position between them. The springs 214, 217 will straighten when deflected in one direction, but when the shuttle 109 moves in the opposite direction, the spring portions 224, 225 will be further bent from their static position toward each other. Become.

A second set of springs 561, 5, substantially similar in size and configuration to springs 214, 217
62 is provided on the actuator 501. Each of the springs 561, 562 is connected at its first end 563 to the substrate 213 and at its second end 564 to the movable electrode assembly 208, 209. Spring 561, 562 of each set
Includes first and second parallel spaced apart spring portions 566, 567 joined by a folded portion 568. The springs 561, 562 are connected at a bent portion 568 by a suspended rigid support 569 extending parallel to the rigid support 131. The supports 131, 569 are firmly connected to each other as shown in FIG. The springs 561, 562, when in the relaxed position, extend substantially perpendicular to the direction of movement of the electrode assemblies 208, 209. More specifically, when the shuttle 109 is in a static state intermediate the retracted position and its extended position, as shown in FIG. 22, the spring portions 566, 567 bend away from each other. Comb fingers 211 of first movable electrode assembly 208 and first fixed electrode assembly 210
, 212 are increased so that as the shuttle 109 moves to its extended position, the spring 562 is designed to straighten to a linear position. Similarly,
Comb fingers 21 of second movable electrode assembly 209 and second fixed electrode assembly 230
The spring 561 is designed to straighten to a linear position when the amount of overlap of 1,212 increases and the shuttle 109 moves to the retracted position. Spring 5
61 and 562 are straightened when deflected in one direction, but when shuttle 109 moves in the opposite direction, spring portions 566 and 567 will bend further away from their static position and away from each other. The springs 561 and 562 are
4,217 operate in the same manner as described above.

In this four-spring embodiment, one bent spring pair 214 or 561 and 217 or 562 at each end of the actuator 501 is preferably straight and the other bent spring pairs are movable electrode assemblies 208, 209. Is preferably bent at each of the bent ends. To maintain the same forward stiffness as the two bent spring actuators 101, the springs 214, 217, 561, 5
The length of 62 has been increased by 26%.

FIG. 23 shows the four springs 214, 217 of the actuator 501 for the deflection of the springs.
FIG. 7 is a graph showing the relationship between overall lateral stability for a four-spring design, such as the 561, 562, and 562 designs. The lateral stability shown in FIG. 23 refers to the ratio of the derivative of the total lateral stiffness to the derivative of the total lateral electrostatic force. In the graph of FIG. 23, lateral stability values less than 1 are unstable, and lateral stability values greater than 1 are stable. "Straight
The “beam” line indicates a beam such as the springs 214, 217 in the actuator 101 described above. The “pre-curved beam” line in FIG. 23 refers to a beam such as springs 214, 217, 561, 562 in the actuator 501. The springs 214, 217, 561, 562 are designed to be straight in all positions to maximize lateral stability. It is preferred that the lateral stability always has a value of at least 10. In the actuator 501, each individual spring 214, 217, 561, 562 has an initial bend of 43 microns.
That is, the movable end of each spring portion 224, 225, 566, 567 is 43 microns from the position where the spring portion is in a linear position perpendicular to the direction of movement, and as shown in the graph shown in FIG. Increase stability to 10. Actuator 5
01 requires 154 volts to deflect mirror 103 a distance of 100 microns from the home or relaxed position between the retracted and extended positions.
As can be seen in FIG. 23, the springs 214, 217, 561, 562
Provides approximately 100 lateral stability when the lens has moved approximately 90 microns from its home position, at which point the spring portions 243, 244, 566, 567 are straight.

The actuator 501 can operate in a manner similar to the operation of the actuators 101, 180, 301 described above. Springs 214, 217, 561, 562
The stabilizing lateral force provided by the comb drive fingers 2
It increases more rapidly due to the lateral deflection of the comb-shaped driving members 208 and 209 than the electrostatic lateral force generated between 11 and 212. In the example shown in FIG. 23, the stabilizing lateral force increases at least 10 times faster in lateral deflection than the electrostatic lateral force.

The preferred method of actuation of the actuator or motor 501 applies a pulsed voltage to the active comb drive assembly during any particular half-stroke. That is, the comb drive fingers 211, 212 of this comb drive assembly are in a second position where they are partially electrically engaged, as shown, for example, in FIG. When they are completely barely engaged with each other, they enter each other during this half stroke. Since the lateral instability between the comb drive fingers for a given voltage is proportional to the amount of engagement of the fingers, during the first engagement portion between the second and third positions of the comb drive fingers 211, 212 Preferably, the voltage is applied before the comb drive fingers are fully engaged in the third position, more preferably, while the comb drive fingers 211, 212 move to 0-25% engagement. Sometimes lateral instability can be minimized.

A forward or protruding movement restricting means or limiter 571 and a rear or retreating moving restricting means or limiter 572 are provided on the extension 218 of the movable electrode assemblies 208 and 209, and the electrode assemblies 208 and 209 are protruded from them. , Engages with the fixing stop 573 when in the retracted position. The stop 573 is electrically connected to the pad 264 and thus to the controller 111 so that the controller can monitor the position of the actuator 501 and thus the state of the switch 104. Here, the actuator 501 is the actuator 3
01, clamps 420 and 421 of the type disclosed
It should be understood that other features described above with respect to 1, 180, 301 may be provided and are also within the scope of the present invention.

FIG. 24 shows another embodiment of the actuator of the present invention. In this preferred embodiment, an actuator 602 is provided, which has a single fixed electrode assembly 210 used to attract a single movable electrode assembly 208. The actuator 602 has similarities to the actuators 101, 501 described above, and the same reference numerals will be used to describe the same components of the actuators 101, 501, 602. The movable electrode assembly 208 includes only the first comb driving member 208a, and the fixed electrode assembly 210 includes only the first comb driving member 210a. For the actuator 501, only the springs 214 and 562 shown in FIG. 22 are provided. Spring 21
4 and 562 are interconnected by a suspended rigid support 606 substantially similar to the supports 131 and 569 described above. The single fixed electrode design of the actuator 602 exhibits lateral instability only at the projecting position of the mirror 103. The reason is that the buckling lateral force between the comb-shaped driving fingers 211 and 212 of the fixed and movable electrode assemblies 210 and 208 causes the electrode assembly 208 to move in this direction, and the comb-shaped driving fingers 211 and 212 This is because it occurs only when entering. as a result,
Pre-bend spring 2 that is straightened only when movable electrode assembly 208 is in the protruding position
14,562 are required. A clamp electrode 420 is provided on the comb drive bar 222 of the comb drive member 210a, and an opposing clamp 421 extends at right angles to the direction of movement of the electrode assembly 208, and the truss frame portion 216 It is firmly connected to the mold driving member 208a. The movable member of the actuator 602, that is, the shuttle 607 includes the first comb-shaped driving member 208a and the clamp electrode 421.
, Truss 216, extension 218 and bracket 219.

In the embodiment of the actuator 602 shown in FIG.
Are pre-bent by 46 microns. Preferably, the separation distance between the comb teeth is 18 microns. The flat surfaces of the clamps 420, 421 preferably have a length of 8 mm.
00 microns, 80 microns high. Clamping electrode 421 is back stop 2
92 and the rear stop 680 engages the stop 682 when the clamp 420,
421 are 5 microns apart. Although clamps 420, 421 are shown as flat in FIG. 24, it should be understood that extensions 422 may also be included, as shown in FIG.

In contrast to the actuator 301 of FIG. 20, the actuator 602 of FIG.
Uses an asymmetric design where the amount of protrusion displacement is somewhat greater than the amount of retraction displacement. For example, the actuator 602 shown in FIG.
Retreat a micron distance. First, a voltage is applied to the fixed electrode 210 to deflect and hold the movable electrode portion 208 to a protruding position under the electrostatic attraction of the comb drive fingers 212, 211 and hold it there. During the switching operation (when it is desired to retract mirror 103 out of the path of laser beam 191), the static voltage on fixed electrode assembly 210 is released, and movable electrode assembly 208 and shuttle 607 release clamp 420,
It swings toward the retracted position held by the electrostatic force between 421. Spring 21
4, 562 exerts an initial mechanical retraction on the shuttle 607 while swinging backward from its extended position. In the embodiment of the actuator 602 shown in FIG. 24 in which the movable electrode assembly 209 is held in a protruding position 112 microns from the rest position and then released, the assembly 209 moves past its home position toward the retracted position by one.
It will rock by 00 microns and be captured by the clamp 420.

The graph shown in FIG. 25 shows the lateral stability of the actuator 602 as a function of deflection, and the graph shown in FIG. 26 shows the clamp electrodes 420, 421 in the actuator 602 as a function of the separation distance between the clamp electrodes. Shows the tightening force. As shown in these graphs, actuator 602 deflects 112 microns backwards at 196 volts, with a minimum safety margin of 20. If a reasonable Q is, for example, 14, the movable electrode portion 208 will necessarily swing to the rear stop 680 even without the traction of the clamps 420, 421. Therefore, the forward projection distance of the actuator 602 is increased, and the shuttle 607 and the mirror 103 can be swung rearward to the fully retracted position without inputting additional work to the actuator. In the retracted position, the suspensions or springs 214, 562 apply a 97 μN pulling force to the movable electrode portion 208, as shown by the solid horizontal line represented in FIG. This force can be overcome by the clamps 420, 421 when the clamps are separated by a distance of 15 microns, as shown in FIG. 26 by the dashed line labeled "parallel plate clamp". As can be seen from FIG. 26, when the clamps are held 5 microns apart by stops 680, 292, the actual holding force of clamps 420, 421 is 900 μN. Stops 680, 292 serve to prevent undesirable contact between clamping electrodes 420, 421.

The preferred embodiment described above uses a one-sided fixed electrode design and still allows a full range of ± 100 microns of the movable electrode assembly 208 from its home or intermediate position. Furthermore, the reduction in area and mass in this preferred embodiment can reduce costs and reduce switching speed. As described below, by shortening the length of the actuator 602, two actuators can be arranged side by side.

In switching applications, it is important that the position of the mirror 103 can be confirmed independently. In microactuator 602, additional electrodes may be incorporated into the mechanical stop. When the mirror 103 in the actuator 602 is in the protruding position, the front limiter 681 of the movable electrode portion 208 engages with the stop 682,
Make electrical contact. Stop 682 is electrically connected to electrical pad 687 by lead 686, which can be electrically connected to controller 111. Similarly, when the mirror 103 is held in the retracted position, the rear limiter 680 engages the stop and makes electrical contact. Accordingly, the position of movable electrode assembly 208 and mirror 103 are electrically sensed by controller 111 to ascertain the status of actuator 602 and any switches or other devices incorporating one or more actuators 602. be able to. Limiters 680, 681 and stop 682 are included in the detent means of actuator 602.

The actuator 602 shown in FIG. 24 can be expanded to include two or more sets of comb drive members 208a, 210a that cooperate with each other.
For example, an asymmetric actuator 603 substantially similar to actuator 602 is shown in FIG. Like reference numerals are used to indicate like components of actuators 602, 603. The movable electrode assembly 208 of the actuator 603 includes four longitudinally spaced comb-shaped driving members 208a. Actuator 6
03 fixed electrode assembly 210 includes four longitudinally separated comb-shaped driving members 210.
a. The actuator 603 includes four sets of cooperating clamp electrodes 420, 4
21. As the number of electrode assemblies 208, 210 increases, mirror 103
The width of each set of electrode assemblies 208, 210, and thus the width of the actuator 603, can be reduced for any force required to project or retract. Thus, the distance that the laser beams 191 and 192 would have to remain optically parallel when traveling below the center of an optical microswitch of the type disclosed herein is reduced.

An actuator or micro that has some of the components of actuator 501 shown in FIG. 22, but has only a single fixed electrode assembly and a single movable electrode assembly similar to actuator 602 shown in FIG. Actuator 701
Are shown in FIGS. Actuators 701,
Similar components in 501 and 602 will be described. The movable electrode assembly 209 of the actuator 701 includes only the comb-shaped driving member 209a, and the fixed electrode assembly 2
Reference numeral 30 includes only the comb drive member 230a. The cantilever beam springs 561 and 217 of the actuator 501 are provided on the actuator 701, and the spring 5
61 and 217 are interconnected by a suspended rigid support 711 substantially similar to the support 606 described above. Like the actuator 602, the actuator 70
1 exhibits lateral instability at only one of the distal positions of the movable electrode assembly 209. Specifically, the movable electrode assembly 209 moves to the retracted position, and
The movable electrode assembly 20 is provided only when
9 comb drive fingers 211 and the comb drive fingers 212 of the fixed electrode assembly 230
And a lateral force is generated. When the movable electrode assembly 209 is in the retracted position,
The respective spring portions 566, 567 and 224, 225 of the springs 561, 217
Is straightened to a linear posture having the maximum rigidity in the lateral direction of the actuator 701. The clamp electrode 420 is provided on the comb drive bar 222 of the fixed comb drive member 230a. An opposing clamp 421 extends perpendicular to the direction of movement and is firmly connected at one end to the comb drive member 209a by the trust frame portion 216. A second or free end 567 of the spring portion 564 is secured to the other end of the clamp 421. The movable member or shuttle 712 of the actuator 701 includes a first comb-shaped driving member 209 a, a clamp electrode 421, a truss 216, and an extension 218.
And a bracket 219.

Actuator 701 operates in substantially the same manner as actuator 602, but utilizes comb-shaped driving members 209a, 230a that cooperate and interengage to move mirror 103 to the retracted position. The movable electrode assembly 209 and the mirror 10 move the mirror to the projecting position under the forward spring force of the springs 561 and 217.
3 in that opposed clamps 420, 421 are used to hold 3 in the extended position. Due to the asymmetric design of the actuator 701, a retreat distance greater than the forward protrusion distance can be obtained. Therefore, the shuttle 712 is fully swung from the retracted position to the extended position, and the clamps 420, 421 can be engaged without inputting additional work to the system.

As shown in FIGS. 28-29, precise placement of mirror 103 on bracket 219 involves DRIE etching receptacle 776 and rectangular recess or socket 777 into bracket 219 and adding peg portion 778 to mirror 103. Can be achieved. Once the mirror peg portion 778 has been inserted into the socket 777, the mirror 103 can be mounted using any suitable bonding means, such as an adhesive 688.
Thereby, it can be adhered to a predetermined position in the receptacle 776. The bracket may optionally include an etched spring portion 779 to hold the mirror 103 in alignment before bonding. A mirror assembly without spring portion 779 is shown in FIG. 22, and a mirror assembly with spring portion 779 is shown in FIG.

An alternative means for fixing the mirror 103 to the bracket 219 may be provided. For example, an actuator 801 formed from a silicon wafer similar to actuator 701 is shown in FIG. 30, which has an electrode assembly arrangement similar to actuator 603. The same components of the actuators 701 and 801 will be described using the same reference numerals. The movable electrode assembly 209 of the actuator 801 includes:
It has four longitudinally separated comb-shaped driving members 209a. Actuator 80
One fixed electrode assembly 230 has four longitudinally separated comb-shaped driving members 230a. Actuator 801 includes four sets of cooperating clamp electrodes 420,
421 is provided. The bracket 219 of the actuator 801 is formed by DRIE etching and has a receptacle 802 having an upright shoulder 303 at each end. Mirror 103 is held in receptacle 802 by any suitable bonding means, such as adhesive 688. DRIE from wafer of actuator 801
A retaining means or retaining member in the form of a hanging thumb post 804 formed by etching is provided to align and retain the mirror 103 within the receptacle 802 during bonding. The post 804 is firmly secured by the neck 806 to the wafer, and thus to the portion 805 of the substrate 231. The asymmetric actuator 801 has a retreat distance greater than the forward protrusion distance of the actuator.

In operating and using the actuator 801, the shuttle 712 is
The mirror 103 is retracted against the restoring force of 1, 217, and the mirror 103 is placed on the bracket 219. Thereafter, when the shuttle 712 relaxes, the mirror 103 projects forward, and the reflecting surface of the mirror engages with the free end of the post 804. The restoring force of the springs 561 and 217 applies a force of approximately 50 μN to the mirror 103. This force is sufficient to align the mirror at right angles to the surface of substrate 213 and hold the mirror in place during the application and curing of the adhesive. After such attachment of the mirror 103 to the bracket 219, the post 804 is removed by crushing the reduced width neck 806 provided on the post 804.

In another embodiment of the actuator or microactuator of the present invention, the actuator 951 includes an actuation means or actuator 952 that mechanically locks the mirror in both the fully extended position and the fully retracted position (FIG. See 31)
. Actuator 951 is substantially similar to actuator 602, and like reference numerals are used to describe like components of actuators 951, 602. The locking mechanism or secondary motor 952 is substantially similar to the primary motor of the actuator 951 and includes a first comb drive member 208a and a first comb drive member 210a. A secondary or latch motor 952 is formed on the silicon wafer or substrate 213 by any suitable means and moves the shuttle 607 between a first or retracted position and a second or extended position. Includes a shuttle 956 that can move in a direction perpendicular to the direction of movement. Shuttle 956 includes a plurality of comb drive members 958 longitudinally spaced along the entire length of elongated frame portion 961.
And a movable electrode assembly 957 formed from The frame portion 961 extends parallel to the direction of movement of the latch motor 952. Each comb drive member 958
Has a comb drive bar 962 secured at one end to the frame portion 961 and extending perpendicular to the frame portion. A plurality of comb-shaped driving fingers 963 protrude from one side of the comb-shaped driving bar 961 and are positioned on the bar 962 at a distance in the longitudinal direction.

The comb drive assembly of the actuator 951 further includes a fixed electrode assembly 966 that cooperates with the movable electrode assembly 957 to interengage. Fixed electrode assembly 966
Includes a plurality of comb-shaped driving members 967 attached to the substrate 213. Each comb driving member 967 is formed of a comb driving bar 968 interposed between a pair of adjacent comb driving members 962 and arranged in parallel with the comb driving bar 962. A plurality of comb drive fingers 969 are integrally formed with the comb drive bar 968 and extend toward the comb drive finger 963 for internal engagement therewith. The movable and fixed electrode assemblies 957 and 966 are electrically connected to pads (not shown) similar to the pads 240 to 242 described above. it can.

The shuttle 956 includes a spring member or spring 97 disposed at one end of the shuttle 956.
6 and a spring member or spring 977 located at the opposite end of the shuttle.
13 is suspended above. The springs 976 and 977 each include a spring 214
, 562. Springs 976, 977, 21 using similar reference numerals
4, 562 similar components will be described. A rigid support 978, substantially similar to rigid support 606, provides a substrate 21 against the extension between the folded ends of springs 976,977.
3 suspended above.

The comb drive assembly of the comb drive members 958, 967, which are cooperating and interengaging,
It operates in the same manner as the previously described comb drive assembly, except that the comb drive member 9
58, 967 are comb drive fingers 963, 9 at positions where the ends of the comb drive fingers 963, 969 are within a line extending perpendicular to the direction of movement of the shuttle 956.
69 are spaced apart from each other in a first or static position;
3 and 969 can move between the second positions where they enter each other. The shuttle 956 is pulled backward by the electrostatic force between the comb drive members 958 and 967, and is pushed forward by the mechanical force of the springs 967 and 977. Latch motor 952 is normally closed in its first position shown in FIG.

The shuttle 956 has an extension 981 with a pin 982 that can move between a projecting position and a retracted position. Pin 982 is typically in its extended position. The bracket 219 of the actuator 951 is provided with first and second spaced stops 983, 984, which, when the shuttle 607 is in its relaxed position,
A recess is formed for receiving 82.

In operation and use, when it is desired to move the mirror 103 to the retracted position, the latch motor 952 is activated, and as a result, the comb driving members 958, 967
The intervening electrostatic force causes the shuttle 956 to retreat and pull the pin 982 backward.
As the mirror 103 retracts, the second stop 984 can pass by the pin 982. The latch motor 952 is then stopped, whereby the springs 976, 977 push the shuttle 956 to its normally closed position, where the pin 982 engages the bottom end of the second stop 984 and 219, thus preventing the mirror 103 from protruding. In the same manner, latch pin 982
The mirror 103 can be retracted by the motor 952 to protrude. When the latch motor 952 is stopped, the pin 982 projects and engages the top end of the first stop 983 to lock the mirror 103 in its extended position. When the shuttle 956 retreats, the spring 9
76, 977 move from their static bending positions to their straight or straight positions, which move the movable comb drive fingers 963 into the fixed comb drive fingers 969, respectively. 963 to provide a lateral stabilizing force.

The latch motor 952 can lock the mirror 103 in its fully extended position or fully retracted position without having to apply a voltage to the actuator 951. This is advantageous when the actuator 951 is used in telecommunications or network systems. In the embodiment shown, the latch motor 9
52 has a 200 volt input signal and has a frequency of 8 kHz and deflects 4 microns. It should be understood that although the actuator 951 does not have any of the above types of electrostatic clamping electrodes, such a clamping electrode may include the actuator 951 and still be within the scope of the present invention. .

In another embodiment, an actuator is provided having a first set of electrostatic clamping electrodes that hold the mirror in a retracted position and a second set of electrostatic clamping electrodes that hold the mirror in its fully extended position. be able to. The actuator 1001 shown in FIG. 32 is almost the same as the actuator 701 described above, and the same reference numerals will be used to describe the same components of the actuators 701 and 1001. The actuator 1001 has a comb drive assembly that includes a movable comb drive member 209a and a fixed comb drive member 230a. The movable comb drive member 209a includes a comb drive bar 221 and a plurality of elongated comb drive fingers 1002 that are longitudinally separated along the entire length of the bar 221. The comb drive fingers 1002 each have a proximal end 1002a secured to the comb drive bar 221 and a distal or free end located away from the bar 221.

[0133] The proximal end 1002a of each comb drive finger 1002 is wider than the rest of the comb drive fingers, with the comb drive fingers tapering distally of the proximal end 1002a. More specifically, the proximal end 1002 of each comb drive finger 1002
a is 100% to 300%, preferably 130% of the width of the remaining comb drive finger
It has a width of ~ 190%, more preferably approximately 165%. The widened proximal end 1002a can be 1% to 30%, preferably 5% to 1% of the length of the comb drive finger.
It has a length of 15%, more preferably approximately 8%.

The fixed comb driving member 230a has substantially the same size and shape as the comb driving member 209a, and has a plurality of comb driving fingers 10 substantially similar to the comb driving finger 1002.
04 is formed. In particular, each of the comb drive fingers 1004 has a proximal end 100
2a has a wider proximal end 1004a and a free end 1002b that has a narrowed distal or free end 1004b.

A first clamp electrode 420 is provided on the back of the comb drive bar 222 on the opposite side of the comb drive finger 1004. A second clamp electrode 421 is mounted at right angles to the truss frame portion 216 and extends parallel to the comb drive bar 222. Each of the electrodes 420,421 has a finger-like extension 422 spaced longitudinally.

The comb-shaped driving members 209a and 230a have a first position where the comb-shaped driving fingers 1002 and 1004 are separated from each other and the clamp electrodes 420 and 421 are close to each other.
The comb drive fingers 1002, 1004 are beginning to initiate electrostatic interaction, the free end of which is located along a line extending perpendicular to the comb drive fingers, a second position shown in FIG. 1002, 1004 interdigitate to allow the distal end of one set of comb drive fingers to move between a third position proximate the wide or enlarged proximal end of the other set of comb drive fingers. More specifically, the free end of the comb drive finger extends to the enlarged proximal end can of the opposing set of comb drive fingers when the comb drive members 209a, 230a are in the third position. That is.

In operation and use, the startup procedure for actuator 1002 is as described above. Generally, a pulsed voltage potential is applied across the comb drive members 209a, 230a by the controller 111, causing the shuttle 712 to vibrate at its resonant frequency. Preferably, a pulsed signal is applied when the comb drive member is at its second position to minimize the lateral instability force between the comb drive fingers 1002, 1004. The electrostatic comb drive members 209a, 230a cause the shuttle 712 to retract during its rear half stroke from its relaxed or intermediate position shown in FIG. The restoring force of springs 217, 561 causes shuttle 712 to protrude from the retracted position during the forward half-stroke. Once the shuttle has moved to its extended position beyond its relaxed position shown in FIG. 32, springs 217, 561 also act to retract the shuttle.

Once shuttle 712 has oscillated to its maximum amplitude, actuator 1
The first and second sets of electrostatic clamping electrodes of 001 can be used to hold the shuttle in either its fully retracted position or its fully extended position. When the shuttle is in its fully retracted position, a voltage potential is applied across the fully interdigitated comb drive fingers 1002, 1004, with the comb drive fingers 1002a, 1004a facing the enlarged proximal ends 1002a, 1004a. Free end of finger 1004
b, 1002b can act as a clamping electrode. When the shuttle 712 is at its fully extended position, the comb drive members 209a, 230
a can be applied across clamps 420 and 421 to apply a voltage potential across a and hold shuttle 712 and mirror 103 in their fully extended position. The voltage potential applied to the clamping electrode of the actuator 1001 when the shuttle 712 is near one of its end positions is preferably within 5 percent of its extreme value. Therefore, the shuttle 71 deflects 100 microns toward both the fully retracted position and the fully extended position, and has a total stroke length of 200 microns.
In case 2, the voltage potential is applied between the opposing clamping electrodes at the last 5 microns of the stroke movement.

Another embodiment of the actuator of the present invention may be provided wherein at least one of the comb drive members has a comb drive finger of varying length. An actuator 1021 in FIG. 33 illustrates this. Actuator 1021 is substantially similar to actuators 602, 1001, and like reference numerals are used to describe like components of actuators 602, 1001, 1021. The comb-shaped driving member 209a of the movable electrode assembly 209 of the actuator 1021 includes a plurality of elongated comb-shaped driving fingers 1 that are longitudinally separated along the entire length of the comb-shaped driving bar 221.
021. Finger 1022 is substantially similar to finger 212 described above, except that the length of the finger varies. In particular, fingers 1022 increase in length linearly across comb drive bar 221. Longest comb drive finger 102
Numeral 2 is substantially the same as the length of each comb-shaped driving finger 211 of the opposed fixed comb-shaped driving member 238. The shortest comb drive finger 1022 is slightly below 0% to 100% of the length of the longest comb drive finger 1022, preferably 5% to 50%,
More preferably it has a length of approximately 10%.

The shuttle 712 moves the comb-shaped driving member 211 and the longest comb-shaped driving finger 1022 from the first position where the comb-shaped driving members 209a and 230a are separated from each other and the clamps 420 and 421 are not in the electrostatically engaged state. Move along a line extending at right angles to the comb drive fingers to a second position shown in FIG. 33 and to a third position in which the comb drive fingers 211, 102 are fully interlocked with each other. be able to.

In operation and use, as the length of the comb-shaped driving finger 1022 changes, the electrostatic attraction force is reduced by the longest comb-shaped driving finger 1022.
From the point at which the cooperative electrostatic engagement with the
2 increases approximately linearly to the point where the cooperative electrostatic engagement with the comb drive finger 211 begins. As a result, the electrostatic attraction between the opposing comb-shaped driving fingers is increased by the spring 2.
After increasing to an amount greater than the opposing forward spring forces of
Further flexing of the 12 further increases the electrostatic attraction, causing the mirror 103 to move rapidly to its fully retracted position. Due to the greater electrostatic attraction allowed by the comb drive fingers 1022, the springs 217, 561 provide a greater forward spring force, thus increasing the frequency of retraction of the actuator 1021.

Although the length of the comb-shaped driving finger 1022 has been shown to increase linearly from one end to the opposite end of the comb-shaped driving member 209a, other types of comb-shaped driving fingers of various sizes may be provided. Please understand the good things. Further, the opposing comb-shaped driving member 230
It should be understood that the comb drive fingers 211 of FIG. a can also have various lengths and are also within the scope of the present invention.

[0143] The actuator of the present invention may be provided with a larger configuration for providing a larger force. This point is almost the same as the actuator 501, and the connector
A microactuator 1201 having a central stiffness drive bar 1202 substantially similar to the truss 216 is provided (see FIG. 34). The drive bar 1202 moves above the substrate 213 along the longitudinal center axis 1203 of the actuator 1201. The same components of the actuators 501 and 1201 will be described using the same reference numerals.
Four comb drive assemblies 208, 210 are provided in the actuator 1201 to retract the drive bar 1202 from the home or rest position of FIG. 34 to the retracted position, and four different combs. Mold drive assemblies 209, 23
0 is provided in the actuator 1201 to cause the drive bar 1202 to protrude from its rest position to the protruding position. The actuator 1201 moves downward in FIG. 34 toward the retracted position, and moves upward toward the projecting position.

The comb drive assemblies 208, 210 include the comb drive assembly 20 of the drive bar 1202.
9, 230 are located on the opposite side. The first movable assembly 208 has four comb drive members 208a, 208b, 208c, 208d, which are integrally formed with the moveable drive bar 1202 and which are at right angles thereto. Extending. The second movable electrode assembly 209 includes four comb-shaped driving members 209a, 209b,
09c, 209d, and these comb drive members are integrally formed with the drive bar and extend from the comb drive members 208a, 208b, 208c, 208d in opposite directions and at right angles to the drive bar. . The first fixed electrode assembly 210 has four comb drive members 210a, 210b, 210c, 210d mounted on the substrate 213 to cooperate with the comb drive members 208a, 208b, 208c, 208d. , The second electrode assembly 230 includes the respective comb-shaped driving members 209a, 209b, and 20.
There are four comb drive members 230a, 230b, 230c, 230d mounted on the substrate 213 for cooperative engagement with 9c, 209d.

The actuator 1201 is formed from a silicon wafer and includes first and second springs 214 and 217. These springs are designed to be non-linear and thus "bent" when in a static, undeflected state. Each of the springs 214, 217 is connected at its first end 243 to the substrate 213 and at its second end 244 to the shuttle 109. When the shuttle 109 is in the static state between the retracted position and the extended position, the spring portions 224, 225 of each spring 214, 217 in the actuator 1201 bend toward each other. In this embodiment, shuttle 109 moves from its home position to its protruding position, and comb fingers 211 of second movable electrode assembly 209 and second fixed electrode assembly 230.
, 212 electrostatically engage and then overlap, the spring 217 straightens from its pre-flexed home position to a linear position. Similarly, when shuttle 109 moves from its home position to its retracted position, and comb fingers 211, 212 of first movable electrode assembly 208 and first fixed electrode assembly 210 engage and subsequently overlap, the spring 109 214 straightens from its pre-bent home position to a linear position. In each case, the lateral stiffness of the spring portions 224, 225 of each spring increases in a direction perpendicular to the respective comb drive finger 211 as such spring portions become straight in such a direction. I do. The lateral stiffness of each spring and the lateral restoring force exerted by such springs on such comb drive fingers 211 increase as a function of the amount of overlap between the comb drive fingers 211, 212, respectively. Therefore, such a comb-shaped driving finger 2
The springs 214, 217 act to urge the comb drive fingers 211 of the active comb drive assembly into a stable position between adjacent comb drive fingers 212 as the 11, 11 enter each other. When biased in one direction, the spring 214
, 217 are straightened, but when the shuttle 109 moves in the opposite direction, the spring portions 224, 225 will bend further towards each other.

A second set of folded cantilever beams or springs 561, 562, similar in size and configuration to springs 214, 271, are provided on actuator 1201. Each of the springs 561, 562 is connected at its first end 563 to the substrate 213 and at its second end 564 to the shuttle 109. Each set of springs 561, 562 includes first and second parallel spaced apart spring portions 566, 567 joined by a folded portion 568. In the relaxed position, the springs 561,562 extend substantially perpendicular to the direction of movement of the electrode assemblies 208,209. More specifically,
As shown in FIG. 34, when the shuttle 109 is in a static state between the retracted position and its extended position, the spring portions 566, 567 bend away from each other.
Comb fingers 21 of first movable electrode assembly 208 and first fixed electrode assembly 210
The spring 562 is designed to straighten to the linear position when the amount of overlap of 1,212 increases and shuttle 109 moves to the retracted position. Similarly, when the amount of overlap between the comb fingers 211 and 212 of the second movable electrode assembly 209 and the second fixed electrode assembly 230 increases and the shuttle 109 moves to the protruding position, the spring 561 moves straight to the linear position. It is designed to be. When biased in one direction, the springs 561 and 562 straighten, but the shuttle 109
Move in the opposite direction, the spring portions 566, 567 will bend further away from each other. Springs 561 and 562 operate in the same manner as described above with respect to springs 214 and 217.

The springs 217, 561 have a comb drive assembly 209, 2 on one side of the drive bar 1202.
The springs 214, 562 are located at opposite ends of the comb drive assemblies 208, 210 opposite the drive bar 1202. Spring 214, 2
The first end portions 243, 563 of 17, 561, 562 are fixed to the substrate 213 in the vicinity of the central longitudinal axis 1203. The springs 217, 561 are substantially similar to the rigid support 131 extending therebetween at the respective bent portions 245, 568,
Connected by a suspended rigid support 1210 extending parallel to the drive bar 1202. The springs 214, 562 are connected at their respective bent portions 245, 568 by a suspended rigid support 1212 that is substantially similar to the rigid support 131 extending therebetween and extends parallel to the drive bar 1202. Actuator 12
01, one flexion spring pair 214 or 561 and 217 or 562 at each end of the actuator 501 is straightened, and the other flexion spring is moved to each of the movable electrode assemblies 208, 209 and the shuttle 109. Preferably, it is to be bent at the deflection end. Springs 214, 217, 561,
562 and shuttle 109 have high out-of-plane stiffness as described above.

The actuator 1201 can operate in the same manner as the operation of the actuator 501 described above. The front or top end of the drive bar 1202 is used to apply force or impart movement to a suitable object. Springs 214, 217, 561, 562
The stabilizing lateral force provided by the comb drive fingers 2
11 and 212, faster than the electrostatic lateral force generated between the
09 with a lateral deflection of 09. In the example shown in FIG. 34, the stabilizing lateral force is at least 10 times faster than the electrostatic lateral force and increases with lateral deflection. Drive bar 120
By arranging the comb drive assembly on both sides of the two, the force of the actuator 1201 can be increased without increasing the length of the actuator and the length of the drive bar 1202.

At the rear end of the drive bar 1202, a rearward or backward movement restricting means or limiter 1216 is provided.
It is adapted to engage with a fixed stop 1216 mounted thereon. It should be understood that the actuator 1201, with or without the clamps 420, 421, can have other features described with respect to the previous actuator, and still be within the scope of the present invention.

Another embodiment of an optical microswitch using the microactuator of the present invention is shown schematically in FIG. The optical microswitch 1301 is formed from a microchip 1302, which has a single input port 1303 coupled to at least one input light carrying element or optical fiber 98 thereon. A plurality of three outlets 1304 are provided along one side of the microchip 1302, each connected to a suitable optical element, such as a single mode polarization maintaining (PM) optical fiber 97. Only some of the fibers 97, 98 are shown in FIG. Microchip 1302 includes a channel or groove 1307 opening at input 1303 to receive input fiber 98, and each output fiber 9
A channel or groove 1308 opening at the outlet 1304 to the side of the microswitch 1301 to receive the 7. A longitudinal axis 1311 extends parallel to the entrance 1303 and perpendicular to the exit 1304 along the path or hole 1312 of the optical switch 1301.

A plurality of two actuators 1001 are arranged at positions separated in the longitudinal direction along an imaginary line extending parallel to and separated from the longitudinal axis 1311. The first and second actuators 1001 each tilt at an angle of 45 degrees with respect to the longitudinal axis 1311 and direct a suitable input laser beam, such as the primary polarized laser beam 191 provided by the entrance fiber 98, over a 90 degree angle. It has a mirror 103 for redirecting. The mirror 103 of each actuator 1001 is mounted on a bracket 219 and directs the laser beam forward of the actuator 1001 through a respective outlet 1304 located on the opposite side of the actuator 1001 with respect to the longitudinal axis 1311. The mirrors 103 are each moved by the shuttle 712 of the respective actuator 1001 so that the mirrors 103 are out of the path of the laser beam 191.
The mirror 103 can move between a position, ie, a retracted position, and a second position, ie, a projected position, in the path of the laser beam 191. The fixing stops 292 and 293 limit the movement of the shuttle 712 and determine the retracted position and the projected position of the mirror 103. It should be understood that the optical switch 830 may include an actuator 1001 and direct the laser beam 191 back toward the actuator, which is also within the scope of the present invention.

A mirror 1316 substantially similar to the mirror 103 is provided with the first and second actuators 1.
Behind the mirror 103, the top of the hole 1312 is firmly attached to the microchip 1302 by a bracket 1317. The mirror 1316 operates in substantially the same manner as the mirror 103, and the first and second actuators 1001
When each of the mirrors 103 is in the retracted position, it acts to deflect the laser beam 191 through the third outlet 1304. A suitable lens, such as an ordinary miniature graded index collimating lens, is located inside the entrance 1303, and the lens 102 is located between each mirror 103, 1316 and the entrance of the respective groove 1303. . Microswitch 1301 and its actuator 1001 are formed from a silicon wafer having a substrate 213 in the same manner as described above with respect to the actuator described herein.

The optical microswitch 1301 is connected to two electrostatic microactuators 1001
, But here one switch similar to microswitch 1301 or any other switch having one or more microactuators of the type described above It is to be understood that can be provided, which is also within the scope of the present invention.

As can be seen from the above description, there is provided an optical switch or microswitch that utilizes at least one electrostatic microactuator having at least one comb drive assembly. In one simple embodiment (not shown), the microswitch comprises a single electrostatic microactuator. Lateral instability in the comb drive assembly is minimized and a large deflection is achieved utilizing the resonance characteristics of the comb drive assembly. In some embodiments, a plurality of electrostatic microactuators are aligned along at least one hole of the microswitch. Optical switches can be used in magneto-optical data storage devices.

Although the invention has been described with respect to a particular embodiment of a comb drive microactuator and a particular embodiment of an optical microswitch utilizing a comb drive microactuator, the scope of the invention is broader than the foregoing disclosure. It is sufficient to include embodiments having a wide range of modifications, changes and substitutions. Features of a particular embodiment can be combined with other embodiments and still be within the scope of the invention. In addition, the clamping electrodes, stiffening springs, and other related components described above can be used individually or collectively outside the actuator. The microswitch disclosed herein may use an actuator without a comb drive assembly. In addition, any of the microswitches disclosed herein can be used with a wide range of other microactuators. All of the above can be used in magneto-optical data storage and retrieval systems or a wide variety of other systems, including telecommunications and network systems.

[Brief description of the drawings]

The accompanying drawings, which are a part of this specification, and which are somewhat schematic in many instances, illustrate some embodiments of the invention and, together with the detailed description, serve to explain the principles of the invention. Is a contributor.

FIG. 1 is a diagram of a magneto-optical data storage and retrieval system incorporating an optical microswitch of the present invention.

FIG. 2 is a diagram of a laser optical device assembly in the magneto-optical data storage and retrieval system of FIG. 1;

FIG. 3 is a diagram illustrating an exemplary optical path, including the use of a laser source for use with the magneto-optical data storage and retrieval system of FIG. 1;

4a to 4g are perspective views, side sectional views, enlarged sectional views, side views, front views, bottom views, and a floating type magneto-optical head of the magneto-optical data storage and retrieval system of FIG. 1, respectively. This is shown in a rear view.

FIG. 5 is an enlarged plan view showing an embodiment of an electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 6 is a plan view of the electrostatic microactuator of FIG. 5 with the mirror retracted (retracted).

FIG. 7 is a plan view of the electrostatic microactuator of FIG. 5 with the mirror extended.

FIG. 8 is a plan view of another embodiment of an electrostatic microactuator for use in the optical microswitch of the present invention.

FIG. 9 is a cross-sectional view of the electrostatic microactuator of FIG. 8, taken along line 9-9 in FIG.

FIG. 10 is a view of the electrostatic microactuator of FIG. 8 taken along line 10-10 in FIG. 8;
FIG.

FIG. 11 is a plan view showing a further embodiment of the electrostatic microswitch used for the optical microswitch of the present invention.

FIG. 12 is a plan view showing the optical microswitch of the present invention in a manufactured state or a state before operation.

FIG. 13 shows one mirror extended and the other mirror completely retracted.
3 is a plan view of the optical microswitch of FIG.

FIG. 14 is a plan view showing a further embodiment of the optical microswitch of the present invention.

FIG. 15 is a plan view showing another embodiment of the optical microswitch of the present invention.

FIG. 16 is a plan view showing still another embodiment of the optical microswitch of the present invention.

FIG. 17 is a plan view showing still another embodiment of the optical microswitch of the present invention.

FIG. 18 is a plan view showing a further embodiment of the optical microswitch of the present invention.

FIG. 19 is a plan view showing still another embodiment of the optical microswitch of the present invention.

FIG. 20 is a plan view showing another embodiment of the electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 21 includes a graph that correlates the position of the shuttle of the electrostatic microactuator of FIG. 20 with a particular drive voltage.

FIG. 22 is a plan view showing another embodiment of the electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 23 is a graph showing the stability margin of lateral rigidity vs. deflection for the electrostatic microactuator of FIG. 22.

FIG. 24 is a plan view showing still another embodiment of the electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 25 is a graph showing lateral rigidity stability margin vs. deflection for the electrostatic microactuator of FIG. 24.

FIG. 26 is a graph showing clamping force vs. clamping electrode gap for the electrostatic microactuator of FIG. 24.

FIG. 27 is a plan view showing another embodiment of the electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 28 is a plan view showing a further embodiment of the electrostatic microactuator used in the optical microswitch of the present invention without a mirror attached.

FIG. 29 is a plan view of the electrostatic microactuator of FIG. 28 with a mirror attached.

FIG. 30 is a plan view showing another embodiment of the electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 31 is a plan view showing a further embodiment of the electrostatic microactuator used in the optical microswitch of the present invention.

FIG. 32 is a plan view showing still another embodiment of the electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 33 is a plan view showing another embodiment of the electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 34 is a plan view showing still another embodiment of the electrostatic microactuator used for the optical microswitch of the present invention.

FIG. 35 is a plan view showing another embodiment of the optical microswitch of the present invention.

──────────────────────────────────────────────────続 き Continuation of front page (81) Designated country EP (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE ), OA (BF, BJ, CF, CG, CI, CM, GA, GN, GW, ML, MR, NE, SN, TD, TG), AP (GH, GM, KE, LS, MW, SD, SZ, UG, ZW), EA (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM), AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE , KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, US, UZ, VN, YU, ZW # 217 (72) Inventor Drake Joseph D. United States of America 94040 Mountain View Ootega Avenue 550- # B126 F-term (reference) 2H041 AA11 AA14 AA16 AB13 AC06 AZ01 AZ05 AZ08 5D090 AA01 BB05 CC02 DD03 FF50 LL02

Claims (46)

[Claims] An optical microswitch for use with a laser beam extending along a path, comprising: a body having an inlet port and a plurality of outlet ports adapted to receive the laser beam; A plurality of mirrors, a plurality of micromotors provided on the main body, and mounting means for coupling the plurality of mirrors to respective ones of the plurality of micromotors, wherein the micromotors control the mirrors with a laser. Selectively moving the laser beam from a first position outside the beam path to a second position in the laser beam path, and directing the laser beam to one of the exit ports, each of the micromotors directs each mirror. Having at least one electrostatically driven comb assembly therein for moving to one of the first and second positions and providing control signals to the micromotor; An optical microswitch, wherein a controller is electrically coupled to the micromotor to provide. 2. The optical microswitch of claim 1 in combination with a plurality of magneto-optical disk surfaces, a plurality of flying heads, and a plurality of output light transport elements:
An optical microswitch, wherein each of the floating heads is movable on one of the magneto-optical disk surfaces, and one of the output optical transport elements is coupled to each of the floating heads. 3. The magneto-optical switch of claim 2, wherein the plurality of magneto-optical disk surfaces include a stack of magneto-optical disks, each of the magneto-optical disks having at least one magneto-optical disk surface. An optical microswitch having a. 4. The optical microswitch of claim 2, wherein the laser beam is reflected by one of the magneto-optical disk surfaces to produce a reflected laser beam having a polarization rotation, and further comprising the reflected laser beam. An optical microswitch comprising an optical microassembly provided in the body for measuring polarization rotation of a light beam. 5. The optical microswitch of claim 1, wherein the plurality of mirrors and the plurality of micromotors are a first plurality of mirrors and a corresponding micromotor, and a second plurality of mirrors and a corresponding one. Including a micromotor that
The path of the laser beam is such that the first plurality of micromotors and the second plurality of micromotors are opposed to the second plurality of micromotors with respect to the path of the laser beam. Optical micro switch that can extend between micro motors. 6. The optical microswitch of claim 5, wherein: the first plurality of mirrors and the corresponding micromotor are arranged linearly along a first imaginary line, and wherein the second plurality of mirrors and the corresponding micromotor are linearly arranged along a first imaginary line. A plurality of mirrors and corresponding micromotors are linearly arranged along said first imaginary line and a second imaginary line extending parallel to the path of said laser beam. 7. The optical microswitch of claim 5, wherein the first plurality of micromotors are arranged side by side along a first imaginary line extending perpendicular to the path of the laser beam. And at least two micromotors arranged side by side along a second imaginary line extending at right angles to the path of the laser beam. Including optical microswitch. 8. The optical microswitch of claim 5, wherein: the first and second plurality of micromotors are each inclined to direct a laser beam in one direction. 9. The optical microswitch of claim 5, wherein: the plurality of mirrors and the plurality of micromotors are a third plurality of mirrors and a corresponding micromotor, and a fourth plurality of mirrors and a corresponding one. The third plurality of micromotors, such that the third plurality of micromotors are opposed to the fourth plurality of micromotors with respect to the laser beam path. A first path extending between the micromotor and the fourth plurality of micromotors; and a first path extending between the first and second plurality of micromotors; and the third and fourth plurality of micromotors. Additional mirrors and corresponding additional micromotors for selectively directing the laser beam along a second path extending between the micromotors. Optical microswitch including means including. 10. The optical microswitch of claim 9, wherein the first and second plurality of mirrors and the third and fourth plurality of mirrors direct the laser beam in one direction. Micro switches that are tilted as such. 11. The optical microswitch of claim 1, wherein the plurality of mirrors and the plurality of micromotors are at least one first mirror and a corresponding first micromotor, and at least one first micromotor. A second mirror and a corresponding second micromotor, wherein the path of the laser beam is such that at least one first micromotor faces at least one second micromotor with respect to the path of the laser beam; The plurality of mirrors and the plurality of micromotors can further extend between at least one first micromotor and at least one second micromotor; and the at least one third mirror and the corresponding first Three micromotors, and at least one fourth mirror and a corresponding fourth motor. And an at least one third micromotor and at least one third micromotor such that at least one third micromotor faces at least one fourth micromotor with respect to the path of the laser beam. A first path extending between the at least one first micromotor and the at least one second micromotor; and a first path extending between the at least one first micromotor and the at least one second micromotor. Means including an additional mirror and a corresponding additional micromotor for selectively directing the laser beam along a second path extending between a third micromotor and the at least one fourth micromotor. An optical microswitch that includes a. 12. The optical microswitch according to claim 1, wherein the plurality of micromotors are arranged side by side along an imaginary line extending perpendicular to the path of the laser beam. Optical micro switch including motor. 13. The optical microswitch of claim 1, wherein at least twelve mirrors and corresponding micromotors are provided to selectively direct the laser beam in a plurality of parallel directions. Optical micro switch. 14. The optical microswitch of claim 1, wherein each mirror comprises a layer of silicon and a layer of reflective material bonded to the silicon layer, wherein the layer of silicon has low roughness and Optical microswitch that gives high flatness. 15. The optical microswitch of claim 14, wherein: each mirror further comprises at least a pair of dielectric layers covering the layer of reflective material, wherein the at least one pair of dielectric layers comprises: An optical microswitch comprising a first layer of a low dielectric constant material and a second layer of a high dielectric constant material. 16. The optical microswitch of claim 1, wherein: at least one of the micromotors includes movement stop means for limiting movement of the corresponding mirror at the second position. The optical microswitch thereby facilitates repetition in the operation of the optical microswitch. 17. The optical microswitch of claim 16, further comprising:
A lead means for electrically connecting the movement stop means to the controller, whereby the movement stop means enables the controller to monitor when the mirror is in the second position. Light switch. 18. An optical microswitch for use with a laser beam extending along a path, comprising: a body having a plurality of exit ports, a plurality of mirrors provided on the body, and the mirror being coupled to the laser beam. Means coupled to each of the mirrors for selectively driving the first position out of the path to a second position in the path of the laser beam to direct the laser beam to one of the exit ports An optical microswitch comprising: a controller electrically coupled to the means for providing an electrical control signal to the means. 19. The optical microswitch according to claim 18, wherein said optical microswitch is combined with a plurality of magneto-optical disk surfaces, a plurality of floating heads, and a plurality of output light transport elements. An optical microswitch movable over the surface of the magneto-optical disk and one of the output optical transport elements is coupled to each of the floating heads. 20. A substrate, comprising: a first and a second comb driving member, each of the first and second comb driving members provided with a comb driving finger; The member is an electrostatic microactuator comprising at least one comb drive assembly mounted on the substrate; and first and second spaced beam spring members: the at least one comb drive. The assembly is disposed between the first and second beam spring members, the second comb drive member is on the substrate, and each of the first and second beam members is In order to suspend the second comb-shaped driving member on the substrate, the second comb-shaped driving member has an end fixed to the substrate and a second end fixed to the second comb-shaped driving member, The second comb-shaped driving member is a comb-shaped driving finger of the first and second comb-shaped driving members. A first position spaced apart, electrostatic microactuator is movable between a second position in which the comb drive fingers of the first and second comb drive member is interdigitated. 21. The electrostatic micro-actuator according to claim 20, wherein the first and second beam-shaped spring members are respectively orthogonal to the moving direction of the second comb-shaped driving member. Each of the first and second beam-shaped spring members has a stiffness when the beam-shaped spring member is in a non-linear arrangement and the second comb-shaped driving member is in a first position. And a second position generated when the beam-shaped spring member is in a linear arrangement extending perpendicular to the direction of movement and the second comb-shaped driving member is at a second position. And the stiffness of the first and second beam-like members in a direction orthogonal to the direction of the movement is such that the second comb drive member is in the second position. The largest electrostatic microactuator at one time. 22. The electrostatic microactuator according to claim 20, wherein the second comb-shaped driving member is fixed to the substrate only by the first and second beam spring members. Micro actuator. 23. The electrostatic microactuator according to claim 20, wherein the second comb drive member is moved from the second position under the force of the first and second beam spring members. The microactuator is movable to the first position, and the microactuator includes an additional comb drive assembly having first and second comb drive members with respective comb drive fingers, wherein the The second comb drive member of the additional comb drive assembly may include the additional comb drive assembly when the comb drive fingers of the first designated comb drive assembly are spaced apart. (Which can be moved to a position where the comb-shaped driving fingers are inserted into each other). 24. The electrostatic micro-actuator according to claim 20, further comprising: first and second electrostatic clamp electrodes extending orthogonally to a moving direction of the second comb-shaped driving member. The first and second clamp electrodes are arranged such that the first and second clamp electrodes are separated from each other, and the first position generated when the second comb-shaped driving member is at the second position; And the second comb-shaped driving member is movable between a second position generated when the second comb-shaped driving member is at the first position, and the clamp electrodes are close to each other at the second position. An electrostatic microactuator that facilitates maintaining the second comb drive member in the first position when a voltage is applied between the disposed clamp electrodes. 25. The electrostatic microactuator according to claim 20, further comprising: a first and a second comb-shaped driving member disposed between the first and the second beam spring members. Comprising one additional comb drive assembly, wherein the first and second comb drive members of said additional comb drive assembly are provided with comb drive fingers;
A first comb drive member of the additional comb drive assembly is mounted on the substrate, a second comb drive member of the additional comb drive assembly is disposed on the substrate and the The second comb drive member of the additional comb drive assembly is suspended above the substrate by first and second beam spring members, and the second comb drive member of the additional comb drive assembly is The first position where the comb drive fingers of the two comb drive members are spaced apart, and the comb drive fingers of the first and second comb drive members of the additional comb drive assembly interdigitate. A second comb drive member of the additional comb drive assembly, the second comb drive member of the additional comb drive assembly being located in the first position. The electrostatic micro-actuator in the second position when in the second position. 26. The electrostatic microactuator according to claim 25, further comprising: a first and a second set of electrostatic clamp electrodes extending orthogonally to a moving direction of the second comb-shaped driving member. And each of the first and second sets of the clamp electrodes is located between a first position where the clamp electrodes are spaced apart and a second position where the clamp electrodes are close together. The first set of clamp electrodes includes movable first and second clamp electrodes, wherein the first set of clamp electrodes includes a second comb drive member of the first designated comb drive assembly. And the second set of clamp electrodes are in mutual proximity when the second comb drive member of the additional comb drive assembly is in the first position. Close so that each set of clamp electrodes is synchronized at said second position. An electrostatic microactuator that facilitates maintaining the second comb drive members in their respective first positions when a voltage is applied between the clamp electrodes in close proximity to each other. 27. The electrostatic microactuator of claim 20, further comprising: locking the second drive member in its first and second positions.
An electrostatic microactuator with a normally closed micromotor. 28. The electrostatic microactuator of claim 20, wherein: the comb drive fingers of the first and second comb drive members have a proximal end and a distal end, each proximal end. An electrostatic microactuator wherein the portions have a width and each distal end has a width less than a width of each proximal end. 29. The electrostatic microactuator according to claim 20, wherein: at least one of the first and second comb-shaped driving members has a comb-shaped driving finger.
Electrostatic microactuator with varying length. 30. The electrostatic microactuator according to claim 20, further comprising: a controller; and lead means for electrically connecting the movement stopping means to the controller, whereby the movement is performed. The stopping means is an electrostatic microactuator that facilitates repeatability in the operation of the microactuator. 31. The electrostatic microactuator according to claim 30, further comprising: a controller; and lead means for electrically connecting the movement stopping means to the controller, whereby the movement is performed. Stop means is an electrostatic microactuator that enables the controller to monitor when the second comb drive member is in the second position. 32. The electrostatic microactuator according to claim 20, wherein: the comb drive fingers of the second comb drive member are the comb drive fingers of the first and second comb drive members. From the first position where are spaced apart to a second position where the comb drive fingers are partially interdigitated, and to a third position where the comb drive fingers are fully interdigitated. Moveable in a stroke; and the controller is adapted to urge the comb drive fingers of the second comb drive member to the third position during only a portion of the half stroke. And a means for applying a voltage between the second comb-shaped driving member and the second comb-shaped driving member. 33. The electrostatic microactuator according to claim 32, wherein the controller is configured to: when the comb drive fingers are partially engaged and before the comb drive fingers are fully engaged. An electrostatic microactuator including means for applying a voltage between said first and second comb drive members. 34. The electrostatic actuator according to claim 20, further comprising:
A mirror and mounting means for coupling the mirror to the at least one comb drive assembly, the mounting means including a bracket member having a recess;
An electrostatic actuator, wherein the mirror has a dowel portion for placement in the recess to facilitate alignment of the mirror on the bracket member. 35. The electrostatic actuator according to claim 20, further comprising:
A mirror member and a mounting means for coupling the mirror to the at least one comb drive assembly, the mounting means including a bracket member provided with a container for receiving the mirror, and Adhesive means for fixing in the container,
A holding member removably mounted on the substrate to hold the mirror in the container when fixed. 36. A first and second comb drive member having respective comb drive fingers, said second comb drive member comprising a first and a second comb drive member. Between the first position where the comb drive fingers are spaced apart and the second position where the comb fingers of the first and second comb drive members are interdigitated, A method for operating a comb drive assembly movable relative to a drive member, the method comprising: oscillating the second comb drive member at resonance to move the second comb drive member to the first drive member. Moving the second comb drive to the second position; and holding the second comb drive in the second position. 37. The method according to claim 36, wherein the step of holding comprises holding the second comb drive member in the second position by electrostatic force. 38. The method according to claim 37, wherein the holding step comprises holding the second comb drive member in the second position by mechanical force. 39. The method according to claim 38, further comprising: releasing the second comb drive member from the second position to move the second comb drive member to the first comb drive member. Moving to a position. 40. A substrate comprising: a substrate; first and second comb-shaped driving members, each of the first and second comb-shaped driving members provided with a comb-shaped driving finger; A drive member is mounted on the substrate, and a second comb drive member is at least one comb drive assembly overlaid on the substrate; a first end secured to the substrate and the second comb drive member. An at least one beam spring member having a second end secured to said comb-shaped drive member, wherein said second drive member comprises said first and second drive members. A first position in which the comb drive fingers of the comb drive member are not substantially completely interdigitated with each other, and a comb drive finger of the first and second comb drive members being substantially completely interdigitated with each other; Is movable in a direction between the second position The at least one beam-shaped spring member has a rigidity in a direction perpendicular to a moving direction of the second comb-shaped driving member, the at least one beam-shaped spring member is in a non-linear arrangement, and A first position generated when the second comb-shaped driving member is at the first position; and a linear arrangement in which the at least one beam-shaped spring member extends perpendicular to the direction of the movement and the second position. The comb drive member is movable to and from a second position that occurs when the comb drive member is in the second position, whereby the at least one beam spring member in a direction orthogonal to the direction of the movement. An electrostatic microactuator wherein the stiffness increases as said second comb drive member moves from said first position to said second position. 41. The electrostatic micro-actuator according to claim 41, wherein the second comb-shaped driving member is such that the comb-shaped driving fingers of the first and second comb-shaped driving members are separated. An electrostatic microactuator movable in a direction between a first position and a second position in which said first and second comb drive members are substantially completely integrated. 42. The electrostatic microactuator according to claim 41, further comprising: a first end fixed to the substrate and a second end fixed to the second comb drive member. Comprising an additional beam-shaped spring member having a rigidity in a direction perpendicular to the moving direction of the second comb-shaped driving member,
And a first position generated when the additional beam-shaped spring member is in a non-linear arrangement and the second comb-shaped driving member is at a first position; An electrostatic microactuator that is in a linear arrangement extending perpendicular to the direction and is movable between a second position created when the second comb drive member is in the second position. 43. The electrostatic microactuator according to claim 41, further comprising: first and second electrostatic clamp electrodes extending perpendicular to a moving direction of the second comb-shaped driving member. The first and second clamp electrodes are arranged such that a first position generated when the clamp electrodes are separated from each other and the second comb-shaped driving member is at a second position, and the clamp electrodes are close to each other. And the second comb drive member is movable between a second position that occurs when the second comb drive member is in the first position, so that the clamp electrodes are close to each other at the second position. An electrostatic micro-actuator that facilitates maintaining the second comb-shaped driving member in the first position when a voltage is applied between the clamp electrodes arranged in a horizontal direction. 44. At least one comb drive assembly having a substrate and first and second comb drive members, each of said first and second comb drive members having a comb drive. Fingers are provided, the first drive member is mounted on the substrate,
A first position in which the second comb drive member is overlaid on the substrate and the comb drive fingers of the first and second comb drive members are not substantially completely inserted into each other; And at least one comb drive that is movable in one direction between a second position where the comb drive fingers of the first and second comb drive members are substantially completely interdigitated. An assembly; and a spring member having a first end fixed to the substrate and a second end fixed to the second comb drive member,
The stiffness in a direction perpendicular to the direction of movement of the second comb drive member, which increases as the second comb drive member moves from its first position to its second position. An electrostatic micro-actuator comprising: 45. The electrostatic microactuator of claim 44, further comprising: electrostatically securing the second comb drive member to the first position.
An electrostatic microactuator comprising means spaced from said first and second comb drive members. 46. The electrostatic microactuator according to claim 45, wherein the means for electrostatically securing the second comb drive member to the first position comprises first and second means. A clamping electrode, wherein the clamping electrodes are spaced apart from each other and a first position occurs when the second comb drive member is in the second position; An electrostatic microactuator including first and second clamp electrodes proximate and movable between a second position that occurs when the second comb drive member is in the first position.