MY133235A - Optical microswitch having electrostatic microactuator and method for use thereof - Google Patents

Optical microswitch having electrostatic microactuator and method for use thereof

Info

Publication number
MY133235A
MY133235A MYPI99000100A MYPI9900100A MY133235A MY 133235 A MY133235 A MY 133235A MY PI99000100 A MYPI99000100 A MY PI99000100A MY PI9900100 A MYPI9900100 A MY PI9900100A MY 133235 A MY133235 A MY 133235A
Authority
MY
Malaysia
Prior art keywords
micromotors
laser beam
path
optical microswitch
mirrors
Prior art date
Application number
MYPI99000100A
Inventor
John H Jerman
John D Grade
Joseph D Drake
Original Assignee
Iolon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iolon Inc filed Critical Iolon Inc
Publication of MY133235A publication Critical patent/MY133235A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4216—Packages, e.g. shape, construction, internal or external details incorporating polarisation-maintaining fibres
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10541—Heads for reproducing
    • G11B11/10543—Heads for reproducing using optical beam of radiation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1384—Fibre optics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Abstract

AN OPTICAL MICROSWITCH FOR USE WITH A LASER BEAM THAT EXTENDS ALONG A PATH COMPRISING A BODY (213) HAVING AN INLET PORT (150) ADAPTED TO RECEIVE THE LASER BEAM AND A PLURALITY OF OUTLET PORTS (151). A PLURALITY OF MIRRORS (103) COUPLED TO A PLURALITY OF MICROMOTORS (180) ARE CARRIED BY THE BODY. THE MICROMOTORS SELECTIVELY MOVE THE MIRRORS FROM A FIRST POSITION OUT OF THE PATH OF THE LASER BEAM TO A SECOND POSITION INTO THE PATH OF THE LASER BEAM TO ONE OF THE OUTLET PORTS. EACH OF THE MICROMOTORS HAS AT LEAST ONE ELECTROSTATICALLY-DRIVEN COMB DRIVE ASSEMBLY (208) THEREIN FOR MOVING THE RESPECTIVE MIRROR TO ONE OF THE FIRST AND SECOND POSITIONS. A CONTROLLER (111) IS ELECTRICALLY COUPLE TO THE MICROMOTORS FOR PROVIDING CONTROL SIGNAL TO THE MICROMOTORS.
MYPI99000100A 1998-01-13 1999-01-12 Optical microswitch having electrostatic microactuator and method for use thereof MY133235A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US7103898P 1998-01-13 1998-01-13
US9680698P 1998-08-17 1998-08-17

Publications (1)

Publication Number Publication Date
MY133235A true MY133235A (en) 2007-10-31

Family

ID=26751766

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI99000100A MY133235A (en) 1998-01-13 1999-01-12 Optical microswitch having electrostatic microactuator and method for use thereof

Country Status (9)

Country Link
EP (1) EP1055281A4 (en)
JP (1) JP2002510059A (en)
KR (1) KR20010034130A (en)
CN (1) CN1292945A (en)
AU (1) AU2223299A (en)
CA (1) CA2318060A1 (en)
MY (1) MY133235A (en)
TW (1) TW419602B (en)
WO (1) WO1999037013A1 (en)

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US6962170B1 (en) 1999-07-30 2005-11-08 The Procter & Gamble Company Microvalve for controlling fluid flow
WO2001009520A1 (en) * 1999-07-30 2001-02-08 The Board Of Trustees Of The University Of Illinois Microvalve for controlling fluid flow
US6887615B1 (en) 1999-07-30 2005-05-03 The Procter & Gamble Company Microvalve for controlling fluid flow
US6856632B1 (en) * 1999-09-20 2005-02-15 Iolon, Inc. Widely tunable laser
EP1089261B1 (en) * 1999-10-01 2006-05-17 STMicroelectronics S.r.l. A method of producing suspended elements for electrical connection between two portions of a micro-mechanism which can move relative to one another
US6424759B1 (en) 1999-10-12 2002-07-23 Primawave Photonics, Inc. Mechanically actuated MXN optical switch matrix
US6259835B1 (en) * 1999-10-12 2001-07-10 Primawave Photonics, Inc. Mechanically actuated optical switch
US6903486B2 (en) 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
AU4513701A (en) 1999-11-29 2001-06-18 Iolon, Inc. Balanced microdevice and rotary electrostatic microactuator for use therewith
AU2531901A (en) * 2000-01-06 2001-07-16 Polatis Limited Optical fibre switching assembly
US6901180B2 (en) 2001-01-24 2005-05-31 Adc Telecommunications, Inc. MEMS optical switch on a single chip and method
US6792173B2 (en) 2001-05-16 2004-09-14 International Business Machines Corporation Device and method for switching optical signals
JP2003057569A (en) * 2001-06-07 2003-02-26 Sumitomo Electric Ind Ltd Optical switch and optical switch array
US6717325B2 (en) * 2002-03-06 2004-04-06 Glimmerglass Networks, Inc. Method and apparatus for actuation of a two-axis MEMS device using three actuation elements
EP1398766A3 (en) * 2002-08-13 2005-08-17 Lg Electronics Inc. Micro-actuator, manufacturing method thereof, optical pickup head of optical recording/reproducing apparatus with micro-actuator and fabrication method thereof
KR100455122B1 (en) * 2002-08-13 2004-11-06 엘지전자 주식회사 Apparatus for focusing servo
US9621772B2 (en) 2006-11-09 2017-04-11 Digitaloptics Corporation Integrated lens barrel, actuator, and MEMS snubber systems and methods
US9465187B2 (en) 2010-11-15 2016-10-11 DigitalOptics Corporation MEMS Thermal despace compensation systems and methods
US8947797B2 (en) 2010-11-15 2015-02-03 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
US9397585B2 (en) 2010-11-15 2016-07-19 DigitalOptics Corporation MEMS MEMS shock cushion spring systems and methods
US8947671B2 (en) * 2013-02-22 2015-02-03 Honeywell International Inc. Method and system for detecting optical ring resonator resonance frequencies and free spectral range to reduce the number of lasers in a resonator fiber optic gyroscope
CN105209370B (en) * 2013-03-15 2018-01-19 数位光学Mems有限公司 Arcuate movement control in electrostatic actuator
US9641103B2 (en) * 2014-12-30 2017-05-02 Mems Drive, Inc. MEMS driver
US10908361B2 (en) * 2018-06-06 2021-02-02 Apple Inc. Capacitive position sensing for capacitive drive MEMS devices

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US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US6108163A (en) * 1994-10-12 2000-08-22 International Business Machines Corporation Sensitive sensor internally mounted shock for a disk drive
US5646928A (en) * 1995-06-22 1997-07-08 The Regents Of The University Of California Free-space integrated micro-pickup head for optical data storage and a micro-optical bench
KR100363247B1 (en) * 1995-10-28 2003-02-14 삼성전자 주식회사 Vibrating structure and method for controlling natural frequency of vibrating structure
JP3576677B2 (en) * 1996-01-19 2004-10-13 キヤノン株式会社 Electrostatic actuator, probe using the actuator, scanning probe microscope, processing device, recording / reproducing device
DE59706989D1 (en) * 1996-09-20 2002-05-16 Ascom Ag Bern METHOD FOR PRODUCING A LIGHT GUIDE SWITCH AND LIGHT GUIDE SWITCH

Also Published As

Publication number Publication date
EP1055281A1 (en) 2000-11-29
TW419602B (en) 2001-01-21
WO1999037013A1 (en) 1999-07-22
KR20010034130A (en) 2001-04-25
CA2318060A1 (en) 1999-07-22
WO1999037013A9 (en) 1999-10-07
EP1055281A4 (en) 2003-06-11
AU2223299A (en) 1999-08-02
JP2002510059A (en) 2002-04-02
CN1292945A (en) 2001-04-25

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