CN1292945A - Optical microswitch having electrostatic microactuator and method for use thereof - Google Patents

Abstract

A static minisize actuator (101) includes a substrate (213) and at least a pectination driving module having a first and second pectination driving parts (210a, 208a). Each pectination driving part is matched with a pectination driving finger (212, 211), a first driving part mounted on the substrate; a second driving part covering the substrate. Also included is a first and second separating beam elastic piece (214, 217), at least one driving part is mounted between the two elastic pieces. The first end of the elastic piece (243) is fixed on the substrate, while the second end is fixed on the second driving part. The second driving part can move between the first and second position.

Description

Qptic micro switch and using method thereof with electrostatic microactuator

Invention field

The present invention relates generally to optical switch, relate in particular to optics and open also with the removable mirror of polylith.

Background

Be used between optical fiber switches light or free space beam is switched to the switch of one or more optical fiber, especially, paid close attention to deeply always communication and digital data network.Various constructions of switch are all interesting, comprise 1 * 2, the structure of 1 * n and n * m, and wherein n is certain number of from 2 to about 64.Various principles all have been applied to the switch of prior art, comprise electro optic effect and electromechanical actuator, and it is at present existing commercially available to use the console switch of these technology.The switch of prior art is very expensive, and size is very big.

The dynamo-electric fiber switch of 1 * n of prior art, common or mobile input optical fibre are so that get in touch with required output optical fibre, or mobile monolithic mirror makes input be optically coupled to required output optical fibre, perhaps moves a refraction optical element up to the coupling that obtains expectation.Usually, to every fiber placing collimating lens, switch collimated light beam with electromechanical actuator.People such as Minowa are in U.S. Patent No. 4,322, have described the such switch of an example in 126, wherein make prismatic structure mobile between input and output.People such as Riza are in U.S. Patent No. 5,208, have described the method for another kind of prior art in 880, and promptly the monolithic mirror enters many output optical fibres through translation with collimated light beam deflection.Many methods all use monolithic rotation mirror to make optical fiber be coupled into many output optical fibres, and such as U.S. Patent No. 5,647,030 is described such.

The most methods of prior art is all used single electromechanical actuator (straight line or dihedral actuator) deflection input beam, because the electromechanically body of prior art is big and valency is expensive.Single electromechanical actuator has a kind of mechanism that accurately controls mirror position usually, so that light accurately is coupled into output optical fibre.This mirror precision positioning has also increased the size and the cost of prior art actuator, and is especially all the more so with the situation of simple method acquisition desired location resolution more than two and inconvenience for the output optical fibre number.

The optical switch of most prior art is designed for communication situation, and optical wavelength used herein is generally 1.5 or 1.3 microns (infrared).And the switch designs of many prior aries becomes and so-called multimode fiber coupling, especially is applied to infrared spectrum, and the center fiber core that this optical fiber is used for propagates light is quite big.Realize that the essential positioning accuracy of height optical coupling is 1/5 a magnitude of fiber optic hub core diameter.Great majority are applied to infrared multimode fiber, and about 50 microns of core diameter is so the positioning accuracy of coupling need only be used routine techniques and just can realize in about 10 microns.

In many optical systems, preferably use a kind of so-called monomode fiber, it can realize bigger optical bandwidth.The core diameter of this type optical fiber is applied to infrared be about 8 microns, be about 4 microns of ruddiness coupling.Like this, the positioning accuracy that this type systematic requires reduces to less than 1 micron, this multimode optical switching than prior art is little about 10 times.

Use for various sensings and driving, developed the micro-structural of utilizing the silicon integrated circuit treatment technology to make.In these and other application, to compare with the prior art scheme of routine, micro-structural all is dominant at cost, reliability and aspect of performance.From cost, reliability and the viewpoint being convenient to assemble, the integrated-type actuator, promptly the micro-structural of making actuator with mechanism structure simultaneously takes advantage.

It is micro-structural that various driving methods all have been applied to the integrated-type actuator, comprising static, electromagnetism, heat and hot gas (thermo pneumatic).Thermal technology can provide big power, but the response time is slower.Electromagnetic technique is comparatively complicated, because be difficult to provide the integrated coil of enough numbers of turn in planar structure, and the big electric current that produces required magnetic field necessity causes high power consumption.Static driven is very attractive to the small size scale, because power increases along with reducing of space between the element.The power of electrostatic element consumption reduces easily, and service speed only is limited by mechanism's response characteristic of this structure usually.

In the electrostatic actuator of prior art, actuating force generally only produces with the class in the two class drive electrodes: so-called pectination drives and refers to or parallel-plate, the power that plane-parallel capacitor produces be proportional to driving voltage square, be inversely proportional to gap between plate square.This feature limits effective moving range of this class actuator because when big gap, electrostatic force can not overcome the back stretch of actuator supporting, and in the gap less than about 2/3 o'clock of primary clearance.If electrostatic force overwhelms the straight line restoring force, actuator is just unstable.For the micro-structured component of reality, effective moving range of parallel-plate actuator is less than 10 microns.Such as the U.S. Patent No. 5 of authorizing people such as Tang, 025,346 described pectination drive actuator, a series of interdigitation electrodes have been characterized in, its electric capacity can be used to provide constant relatively power in approximating the moving range that pectination refers to length greatly, and this length can be made greater than 100 microns.Every refers to that the power that produces is less, so practical pectination drive actuator generally refers to micro-structural device is produced an amount of power with the 10-200 root.

The maximum that a difficult problem of the pectination drive unit of prior art is a device moves and is limited by so-called dynamo-electric medio-lateral instability.In the ideal case, the side force that every finger is added is balance accurately, yet, moving if refer to not be constrained for along accurate center, gap, electrode will produce side force.Though positive power almost keeps constant along with increasing deflection, side force increases rapidly along with side deflection.When the derivative of side force relative side displacement during greater than horizontal mechanical elasticity constant, unsteadiness just appears.If this derivative surpasses the lateral elasticity constant of motor bearing structure, pectination drives will bite (snap) disconnected side suddenly, make the drive electrode short circuit, interrupt the actuator forward and move.This phenomenon of prior-art devices can be indicated in the paper " big displacement pectination drive actuator " that Legtenberg, Groeneveld and Elwenspoek write (be stated from " J.Micromech.Microeng ", Vol.6 (1996), pp.320-329).Their design has about 40 microns maximum displacement.Designing technique in this paper has been described the maximum displacement of conventional pectination drive actuator, but does not describe the design of bigger deflection.

The polysilicon thin layer that early stage pectination drive actuator application is provided by so-called surperficial micro mechanism processing technology is made pectination and is referred to and movable horizontal driving element.This polysilicon is generally the 1-2 micron thickness.Because the lateral feature dimensions of this class device is equivalent to material thickness, so parts are extremely low to the yaw stiffness of plane extrinsic deflection.Along with the appearance of deep reaction ion(ic) etching (DRIE), allow in thickness is generally 100 microns monocrystalline silicon, to make similar structure.Klassen, Petersen, Noworolski, Logan, Maluf, Brown, Storment, Mccully and Kovacs are in paper " silicon fusion bonding and the ion(ic) etching of degree of depth melon: a kind of micro-structural new technology." (be stated from Proceedings of Transducers ' 95 (1995), described DRIE in pp.556-559).These thicker structures can provide bigger vertical electrode district, and the yaw stiffness of plane extrinsic deflection is much higher.Recently, some other manufacturing technology has been used for increasing thickness, and improves yaw stiffness outside the plane of pectination Drive Structure thus, is included in thicker surperficial micro mechanism processing polysilicon or the plated metal structure made in the mould that photoetching limits in these manufacturing technologies.These manufacturing technologies itself all are not used to improve the limited deflection of prior art pectination Drive Structure.

In a word, an object of the present invention is to provide a kind of Qptic micro switch that overcomes above-mentioned all shortcomings.

Another object of the present invention provides a kind of Qptic micro switch of above-mentioned feature, and it is used at least one electrostatic microactuator and wherein has at least one comb shape driven unit.

A further object of the present invention provides a kind of Qptic micro switch of above-mentioned feature, wherein the medio-lateral instability power of electrostatic microactuator pectination driven unit is reduced to minimum.

A further object of the present invention provides a kind of Qptic micro switch of above-mentioned feature, wherein is provided with the device of electrostatic microactuator being received or is coupled to external device (ED).

A further object of the present invention provides a kind of Qptic micro switch of above-mentioned feature, and wherein the resonance characteristic of pectination driven unit is used to obtain big deflection in the electrostatic microactuator.

A further object of the present invention provides a kind of Qptic micro switch of above-mentioned feature, and wherein a plurality of electrostatic microactuators are aimed at along at least one passageway (hall) of microswitch.

The present invention also has a purpose to provide a kind of Qptic micro switch of above-mentioned feature, and it has used the magneto-optic data-storage system.

Summary of the invention

The invention provides the optical switch of switch and the big deflection high speed micro-actuator of application.Optical switch can be applicable to various systems, such as magneto-optic data-storage system, communication system or data transmission system.Micro-actuator has improved suspension design, pectination driving element, dynamic electric drive controlling, forward position and has stopped moving and position probing etc.Micro-actuator can be applicable to the optical switch in various designs or various other occasion, for example, and transverse resonance device, force-balance accelerometer or microminiature anchor clamps.Yaw stiffness and/or bigger electrode district can be used to form the big power of generation and the micro-structural of displacement outside the high plane.

The accompanying drawing summary

All accompanying drawings all are a schematic diagram and a part that is incorporated into and constitutes this specification in many occasions, and these accompanying drawings are represented some embodiment of the present invention, cooperate to describe so that principle of the present invention to be described.

Fig. 1 illustrates the magneto-optic data and the searching system of adapted Qptic micro switch of the present invention.

Fig. 2 illustrates the laser-optical module of the magneto-optic Data Storage And Retrieval System of Fig. 1.

Fig. 3 illustrates a representative light path, and it comprises uses a lasing light emitter with the magneto-optic Data Storage And Retrieval System coupling of Fig. 1.

Fig. 4 a-4g illustrates the scanning optical head of magneto-optic Data Storage And Retrieval System among Fig. 1, is respectively perspective view, side sectional view, expansion cutaway view, end view, front view, bottom view and rearview.

Fig. 5 is the amplification view that is used for the electrostatic microactuator embodiment of Qptic micro switch of the present invention.

Fig. 6 is the plane graph of the electrostatic microactuator of Fig. 5, and mirror wherein is in retracted mode.

Fig. 7 is the plane graph of the electrostatic microactuator of Fig. 5, and mirror wherein is in the state of stretching out.

Fig. 8 is the plane graph that is applied to another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Fig. 9 is the cutaway view along Fig. 8 electrostatic microactuator of Fig. 8 cathetus 9-9 intercepting.

Figure 10 is the cutaway view along Fig. 8 electrostatic microactuator of Fig. 8 cathetus 10-10 intercepting.

Figure 11 is the plane graph that is used for another embodiment of electrostatic microactuator of pass, miniature optical of the present invention sky.

Figure 12 be Qptic micro switch of the present invention on the make or mode of operation before plane graph.

Figure 13 is the plane graph of the Qptic micro switch of Figure 12, and a mirror stretches out, and all the other mirrors are withdrawn fully.

Figure 14 is the plane graph of another embodiment of Qptic micro switch of the present invention.

Figure 15 is the plane graph of another embodiment of Qptic micro switch of the present invention.

Figure 16 is the plane graph of another embodiment of Qptic micro switch of the present invention.

Figure 17 is the plane graph of another embodiment of Qptic micro switch of the present invention.

Figure 18 is the plane graph of another embodiment of Qptic micro switch of the present invention.

Figure 19 is the plane graph of another embodiment of Qptic micro switch of the present invention.

Figure 20 is the plane graph of another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 21 has comprised some curve charts, and they make the reciprocal position of electrostatic microactuator of Figure 20 relevant with specific driving voltage.

Figure 22 is the plane graph that is used for another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 23 is the side direction yaw stiffness margin of safety of electrostatic microactuator of Figure 22 and the graph of relation of deflection.

Figure 24 is the plane graph that is used for another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 25 is the side direction yaw stiffness margin of safety of electrostatic microactuator of Figure 24 and the graph of relation of deflection.

Figure 26 is the chucking power of electrostatic microactuator of Figure 24 and the graph of relation of holding electrode spacing.

Figure 27 is the plane graph that is used for another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 28 is used for the plane graph of the another embodiment of electrostatic microactuator that the present invention does not connect the Qptic micro switch of mirror.

Figure 29 is the plane graph that Figure 28 is connected to the electrostatic microactuator of mirror.

Figure 30 is the plane graph that is used for another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 31 is the plane graph that is used for another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 32 is the plane graph that is used for another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 33 is the plane graph that is used for another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 34 is the plane graph that is used for another embodiment of electrostatic microactuator of Qptic micro switch of the present invention.

Figure 35 is the plane graph that is used for another embodiment of Qptic micro switch of the present invention.

Invention is described

Referring now to accompanying drawing, Fig. 1 is a plane graph, and some primary element of magneto-optic (MO) Data Storage And Retrieval System is shown.In this figure and Fig. 2 to 4, mark a small amount of specific details, be used for describing to be applicable to some primary elements of a certain function system of the present invention.The invention is not restricted to only be applied to a concrete MO data-storage system and following MO data-storage system, also can be applicable to communication or other system.

With reference to Fig. 1, system 95 comprises one group of air supported head 106 (its details is introduced below), and these probes are suitable for coiling 107 couplings with a plurality of (N) MO.In a preferred embodiment, N is 6, so 6 dishes 107 are set to a pile (not shown).Every dish 107 has the two sides, is provided with first and second relative plane surface 108.Each MO card 108 is provided with an air supported head 106, and 106 utilize suspension 130 and are positioned at the actuator arm 105 that MO coils 107 surfaces and are coupled to revolving actuator magnet and coil block 120.During operation, MO dish 107 is rotated to produce the aerodynamics lifting force between air supported head 106 and the dish that rotates by the spindle motor (not shown), makes each air supported head MO 106 keep unsteady (flying) state above the data record surface of every MO dish.Lifting force equates mutually on the contrary with the reverse elastic force that suspension 130 is carried arch.During inoperation, each unsteady MO head remains on store status still, leaves the surface of MO dish 107, is usually located near the anchor clamps (not shown) of card.Certainly, head can land on card in non-data storage area; Yet this method is not to be best mode.

System 95 also comprises laser-optical module 96, utilizes at least one input light propagation element or optical fiber 98 to be coupled to the optical switch or the microswitch 104 of assembly 96, and organizes single mode more and protect (PM) optical fiber 97 partially.In the exemplary embodiment, every group of single mode PM optical fiber or output light propagation element 97 by one group of actuator arm 105 and suspension 130 separately, are coupled to separately the one group MO 106 that floats.Correspondingly, two PM optical fiber 97 of at least 6 groups at one end couple light to optical switch 104 separately.Every group of such PM optical fiber 97 is coupled to two unsteady MO heads of one group at the other end.Should be appreciated that, exemplary PM fiber count only is shown in the accompanying drawing.Controller 111 utilizes lead 112 electrical couplings to optical switch 104, provides electric command signal to optical switch.Controller 111 can be any general type, and comprises: input is used to receive one or more control signals; A series of amplifiers and voltage generator are used for each following actuator and pectination driven unit; Optional mechanism is used to detect the position of pectination driven unit; And output, be used to send output signal.

Fig. 2 illustrates the laser-optical module 96 of magneto-optic Data Storage And Retrieval System among Fig. 1.As will illustrating referring now to Fig. 2 and 3, on every dish 107 surfaces, read and stored information, all require laser output to be sent to air supported head by optical fiber, make light output accurately imaging on card, and utilize the coil that is bearing near the air supported head 106 of card to produce magnetic field.Fig. 2 and 3 has concluded concisely provides light source and magnetic field so that the reason of access data on card selectively.In Fig. 2, the laser-optical module 96 that illustrates comprises a diode laser source 231 that works in the linear polarization of visible light or near ultraviolet frequency field, and the luminous energy of its emission is enough to utilize this group MO dish 107 to be read and write.In first embodiment, the laser diode source can be a RF modulation system lasing light emitter.In a second embodiment, linear polarization formula lasing light emitter 231 can be distributed feed-back formula (DFB) lasing light emitter.In an exemplary embodiment, linear polarization formula lasing light emitter 231 is chosen to work in the 635-685nm scope; Yet the lasing light emitter of other wavelength also can use.Laser-optical module 96 also comprises: beam splitter 232 and coupled lens 233 are sewed in collimating lens 234, low wavelength dispersion.Laser-optical module 96 guide line polarization outgoing laser beams 191 (shown in Figure 1) (from linear polarization formula lasing light emitter 231) directive optical switch 104.Laser-optical module 96 also comprises: 1/4 ripple plate 238, mirror 235, polarization beam apparatus 239 and one group of photodiode or detector 236.In first embodiment, the linearly polarized laser bundle 192 (shown in Figure 1) of MO dish 107 surfaces, 108 reflections is by optical switch 104 guiding coupled lens 233, and being sent to difference detector by sewing beam splitter 232, the latter comprises: 1/4 ripple plate 238, mirror 235 and polarization beam apparatus 239.In a second embodiment, optical isolator 298 is arranged between lasing light emitter 231 and the collimating lens 234.As well-known in the art, this class Differential Detection method has been measured in the laser light reflected bundle 192 luminous energy in two orthogonal polarization components, and differential signal is that the sensitivities that the polarizations rotation that is caused by the Kerr effect is gone up on one group of MO dish 107 surface are measured.In these two embodiment, after device 236 conversions, this differential signal is handled and is exported as signal 294 through differential amplifier 237 after testing.The present invention is not limited to above-mentioned optical element and light source setting, because in the art, other technology of guiding outgoing laser beam 191 and detection of reflected laser beam 192 is well-known.

Fig. 3 represents to comprise the representative light path of using the DFB lasing light emitter.In a preferred embodiment, the representative light path of Fig. 3 comprises: optical switch 104, one group of single mode PM optical fiber 97 and the one group MO 106 that floats.Optical switch 104 (following detailed description again) provides enough selectivity, and guiding outgoing laser beam 191 (with reference to lasing light emitter 231) enters each bar single mode PM optical fiber 97 near-end separately.Outgoing laser beam 191 guides from each far-end outgoing through single mode PM optical fiber 97 again, thereby by on MO the 106 record/accumulation layers 349 of penetrating below each piece MO coils each surface 108 of floating.

Outgoing laser beam 191 is provided by arbitrary suitable lasing light emitter, is preferably provided by the linear polarization formula lasing light emitter 231 that belongs to distributed Feedback (DFB) lasing light emitter.During write information, outgoing laser beam 191 is passed to MO dish 107 selectively by optical switch 104, thereby is heated to Curie point near record/accumulation layer 349 by the relevant point 340 that will select, reduces the coercive force of record/accumulation layer 349.Preferably, the light intensity of outgoing laser beam 191 is remained unchanged, simultaneously the time spent become vertical off setting magnetic field limit perpendicular to MO dish 107 " on " or D score domain pattern.This technology is referred to as magnetic field modulation (MFM).Then, along with the cooling of the relevant point of selecting 340, information is encoded in the record/accumulation layer 349 of each piece rotating disk 107.

During sense information, outgoing laser beam 191 (low when strength ratio is write) sends to MO dish 107 selectively, thereby at arbitrary given relevant point 340, according to this point magnetic domain polarity of 340, the Kerr effect (according to the reflection from the outgoing laser beam 191 of record/accumulation layer 349) has clockwise laser light reflected bundle 192 or the polarizations of 363 rotations counterclockwise.

Above-mentioned light path is two-way in itself.Correspondingly, laser light reflected bundle 192 receives and enters the far-end of single mode PM optical fiber 97 by the MO 106 that floats.Laser light reflected bundle 192 then sends to laser-optical module 96 by optical switch selectively along 97 propagation of single mode PM optical fiber and in its near-end emission, is converted to signal 294 again.

Fig. 4 a-4g represents the scanning magneto optical head of magneto-optic storage, is perspective view, side sectional view, expansion cutaway view, end view, front view, bottom view and rearview.In Fig. 4 a, MO 106 uses above the record/accumulation layer 349 of one group of MO dish 107 of floating.The MO 106 that floats comprises: slide body 444, air-supported surperficial 447,1/4 ripple plate (not shown), reflection substrate 400, object lens 446, magnetic coil 460 and yoke 462." small-sized " that can comprise the industrial quarters standard of slide body 444, " miniature ", " millimicro type " or " type slightly " slide block, but also or use the slide body 444 (determining by the above-mentioned size restrictions with all elements of MO 106 couplings of floating) of other size.Correspondingly, in this preferred embodiment, slide body 444 comprises that the corresponding plane of small-sized slide block height (889 μ m) millimicro type slide block (1600 * 2032 μ m) covers (footprint) zone.

Single mode PM optical fiber 97 otch 443 vertically is coupled to slide body 444, and object lens 446 are coupled to slide body 444 along vertical angular incisions 411.In preferred embodiment, though axial cut-outs 443 is positioned at the slide body periphery, vertical incision 411 is positioned at the turning of slide body 444, but axial cut-outs 443 and vertical incision 411 also can be positioned at other position on the MO 106 that floats, for example between periphery and central shaft, or be provided with along central shaft itself.If optical fiber 97 and object lens 446 can influence the mass centre of magneto optical head 106 not along the central shaft location, influence its scanning dynamics thus.Correspondingly, the tie point of float MO 106 and suspension adjusts possibly, so that the off-center of compensation magneto optical head 106 mass centres changes.Preferably, otch 443 and 411 can be designed to raceway groove, V-shaped groove or arbitrary device that other is fit to, and makes monomode fiber 97 and object lens 446 with the MO 106 that the float aligning that is coupled.In this preferred embodiment, laser beam 191 and 192 crosses light path (entering and leave the record/accumulation layer 349 of MO dish 107), and this light path comprises: single mode PM optical fiber 97, reflection substrate 400,1/4 ripple plate 493 and object lens 446.In this embodiment, single mode PM optical fiber 97 and object lens 446 are positioned at its otch separately, make outgoing laser beam 191 (see figure 3) in relevant 340 realize focusing on as focal spot 448.Adhesive such as single mode PM optical fiber 97 and object lens 446 later available ultraviolet-curing resins in position.

For the present invention, especially to pay close attention to Fig. 4 c and 4b.These two object lens that illustrate 446 are used for luminous point is focused in the size 448 on the card 349.Luminous point focuses on by yoke 462 and low flat magnetic coil 460, and yoke and coil are included in 461 li of supporting structures and are installed in the MO head bottom or near object lens 446 surfaces of floating, the aerodynamics that does not influence the MO 106 that the floats quality of floating.

Optical switch of the present invention or microswitch utilize micro-actuator translation optical mirror.Each micro-actuator in this microswitch or other application comprises a pair of relative pectination actuator that power is provided for actuator at least.Be used for microswitch 104 1 classes Qptic micro switch the horizontal pectination drive actuator of a kind of simple type as shown in Figure 5, it is the top plan view of actuator 101.The reciprocating apparatus 109 of actuator 101 comprises and interconnects together the first and second movable electrode assemblies 208,209 that move.Actuator 10l also comprises first and second fens fixation kits of opening 210.230, the assembly vertically extending is to the longitudinal centre line of actuator 101 and be positioned at the central authorities of this center line.First mobile component 208 comprises first, second and the 3rd pectination actuator 208a, 208b, 208c, and each actuator extends perpendicular to the moving direction of assembly 208,209.Second mobile component 209 comprises first, second and the 3rd pectination actuator 209a, 209b, 209c, and each actuator extends perpendicular to the moving direction of assembly 208,209.Actuator 101 all utilizes such as suitable method silicon chip manufacturings such as DRIE with mobile component 208,209 and fixation kit 210,230 thereof, and wherein the fusion monocrystalline silicon thin layer that is bonded to the substrate 213 in a certain zone forms mobile component 208,209 and fixation kit 210,230 through etching.Monocrystalline silicon layer and substrate 213 are by thick silicon dioxide layer electrical isolation, thereby movable electrode assembly 208,209 and fixed electrode assembly 210,230 electrical isolation.Other manufacturing technology is included in to be made high aspect ratio to metal structure on the dielectric substrate of local sacrifice layer top and electroplates.This technology can be referring to the U.S. Patent No. 5,450,751 of Putty and Eddy, and title is " a vibratory gyroscope micro-structural ".The structure that obtains comprises the fixed connection point of narrow and high relatively suspension spring structure, substrate and to the ability that is electrically connected of structure.In addition, for example, can make required structure mixing deposit on the local sacrifice layer of silicon dioxide, forming the relative thick polysilicon layer of pattern with etching.The paper that people such as B.Wenk write " with the capacitive accelerometer based on the surface micromachined of thick polysilicon of force feedback operation " (is stated from SPIE Proceedings, Vol.2642, title " device of micromachined and element ", Octiber, 1995, pp.84-94.) the such technology of an example has been described.

The rigidity framework that movable electrode assembly 208,209 usefulness are elongated or do connecting rod 216 interconnection of longitudinal extension along moving direction.The first movable electrode assembly 208 is connected to an end of connecting rod 216 on longitudinally-spaced position, the second movable electrode assembly 209 is connected to connecting rod 216 (or another) end relatively on longitudinally-spaced position.Extension 218 and holder part or carriage 219 are included in the jockey of actuator 101, and mirror 103 is connected to reciprocating member 109 securely, are connected to movable electrode assembly 208,209 thus.Angle of moving direction inclination of carriage 219 and mirror 130 and reciprocating member 109 and movable electrode assembly 208,209.

Among pectination actuator 208a, 208b, 208c, 209a, 209b, the 209c each all has the bar or the beam 221 that are connected to connecting rod 216 1 ends, and strides across actuator from vertical the stretching out of bar.The length range of every bar 221 is the 200-2000 micron, preferably is the 700-1200 micron, more preferably is near 800 microns, and it defines the length of each pectination actuator.A plurality of or a succession of isometric pectination parts or refer to that 211 are parallel to moving direction and extend are connected to every bar 221.Refer to that 211 length along every pectination drive rod 221 are evenly spaced apart, the length range of every finger is the 5-200 micron, preferably is the 60-130 micron, more preferably is near 90 microns.Referring to that 211 spacing distance scope is the 3-25 micron, preferably is the 6-15 micron, more preferably is near 10 microns.The pectination of pectination actuator 208a, 208b, 208c refers to 211 to mirror 103 extensions of being coupled to actuator, and the pectination of pectination actuator 109a, 209b, 209c refers to that 211 leave the mirror extension simultaneously.

The first fixed electrode assembly 210 comprises first, second and the 3rd pectination actuator 210a, 210b, 210c, the second fixed electrode assembly 230 comprises first, second and the 3rd pectination actuator 230a, 230b, 230c, and each pectination driven unit extends perpendicular to the moving direction of movable electrode assembly 208,209.Each pectination actuator 210a, 210b, 210c, 230a, 230b, 230c have the bar or the beam 222 that are contained on the substrate 213, and extend through actuator 101.The length of every bar 222 is similar to the length of bar 221, and it defines the length of each pectination actuator.Size and dimension drives with pectination and refers to a plurality of or a succession of pectination parts that 211 cardinal principles are identical or refer to 212, is fixed to pectination drive rod 222 with the length spaced positions along bar 222.The pectination of pectination actuator 210a, 210b, 210c refers to that 212 leave mirror 103 extensions, refer to that with the pectination driving of pectination actuator 208a, 208b, 208c 211 is relative, and the pectination of pectination actuator 230a, 230b, 230c refers to 212 to the mirror extension, drives with the pectination of pectination actuator 209a, 209b, 209c to refer to that 211 is relative.

Pectination drives and refers to that 211 are crisscross arranged in finger 212.101 every groups of relative pectination actuators of actuator form the pectination drive unit or the assembly of a static driven.The pectination actuator 208a of the pectination driven unit that each is such, 208b, 208c, 209a, 209b, 209c, each pectination actuator 210a, 210b, 210c, 230a, 230b, 230c with respect to primary importance are removable, about shown in pectination actuator 208a, 210a, 208b, 210b and 208c, the 210c, wherein each root pectination drives and refers to be spaced from each other in Fig. 6; The second place illustrates with respect to pectination actuator 208a, 210a, 208b, 210b, 208c, 210c, 209a, 230a, 209b, 230b and 209c, 230c in Fig. 5, wherein pectination drives and refers to that 211,212 is not interdigitated, just is in the static engagement state when still adding voltage potential betwixt; For the 3rd position, as among Fig. 7 about shown in pectination actuator 208a, 210a, 208b and 208c, the 210c, wherein each root pectination drives and refers to all be interdigitated mutually and be in the static engagement state.When relative pectination actuator is in the second place, pectination drive refer to 211,212, free end finish basically along the extension of straight line perpendicular to reciprocating member 109 moving directions.Selection refers to the spacing between 211,212, guarantees to allow the lateral stability in whole range of deflection under the driving voltage in the maximum of actuator 101.

Fixation kit 210,230 is received substrate 213 separately regularly, and be used to drive first or retracted position and second or extended position between the first and second movable electrode assemblies 208,209.Primary importance is shown in Fig. 6, and wherein the first pectination actuator 208,210 is in spaced apart position, and the second pectination actuator 209,230 is in the interdigitated position; The second place is shown in Fig. 7, and wherein the first pectination actuator 208,210 is in the interdigitated position, and the second pectination actuator 209,230 is in spaced apart position.

Reciprocating member 109 and movable electrode assembly 208,209 are suspended on substrate 213 tops by one group of spring or folding cantilever beam 214,217 that is arranged at electrode assemblie 208,209 each end.Spring 214 is spaced apart at actuator 101 1 ends and the first pectination actuator 208a, and spring 217 is spaced apart at the actuator 101 relative other end and the second pectination actuator 209c.Every group of spring 214,217 all comprises the first and second isolated elastic parts 224,225, when they are in the released position and engage at one end by folded part 245, just extends (see figure 5) perpendicular to moving direction.Elastic part or beam 224,225 extend and are parallel to the pectination drive rod along the total length of pectination drive rod 221,222 basically with spaced apart relation.Elastic part 224,225 has equal cross section separately, and is rectangular basically.One termination of non-yielding prop or elongated pole is incorporated into the folded part 245 of each spring 214,217.First end 243 of each spring 214,217 joins substrate 213 to, and second end 244 of spring 214,217 joins pectination drive rod 221 end separately of pectination actuator 208a, the relative connector rod 216 of 209b to.

The suspended portion of actuator 101 is used the high aspect ratio art designs, and comprise movable electrode assembly 208,209, reciprocating member 109, spring 214,217 and non-yielding prop 131, the altitude range that records outside substrate 213 planes is the 20-300 micron, preferably being the 60-150 micron, more preferably is near 80 microns.

Electrical connection arrangement is included in the actuator 101, allows controller 111 electrical couplings to movable electrode assembly 208,209 and fixed electrode assembly 210,230.Particularly, be provided with the electrical connection arrangement of electric joint fastener 240,241,242 forms.Electricity joint fastener 242 utilizes the thread guide devices electrical couplings of lead-in wire or lines 271 forms to the first and second movable electrode assemblies 208,209.The thread guide devices electrical couplings of electricity joint fastener 240,241 by lead-in wire or lines 272,273 forms separately is to the first fixed electrode assembly 210 and the second fixed electrode assembly 230.

In the present invention, spring preferably presents laterally/the high ratio of forward elastic constant.In the prior art, this is (seeing United States Patent (USP) 5,025, the Fig. 1 in 346) that utilization is arranged on that 4 relative springs on four angles of symmetrical movable electrode part or folding cantilevers realize.Yet, in the prior art design,, weakened the horizontal yaw stiffness of spring greatly along with the deflection of movable electrode part.

It is considered herein that bilateral symmetric property and 4 springs of not needing the design of prior art actuator.On the contrary, the present invention includes only 2 springs or folding cantilevers 214,217, and they are coupled to substrate 213 at first end 243, are coupled to movable electrode assembly 208,209 at second end 244.The suspension stiffness supporting 131 that the spring utilization is extended betwixt is connected on its folded part 245.Said structure is designed to the high aspect ratio technology manufacturing with DRIE one class, makes them be designed to height or the profile (profile) higher than prior art.Elastic part 224,225 sizable height and square-section make spring 214,217 present yaw stiffness outside the higher compared to prior art plane, i.e. substrate 213 out-of-plane yaw stiffnesses.Yaw stiffness can stop movable electrode assembly 208,209 undesirable bending outside fixed electrode, plane outside this plane, although the movable electrode assembly only is fastened to substrate 213 in the end 243 of spring 214,217.

Actuator 101 has restriction and back and forth moves forward and backward and allow controller 111 to monitor the position of reciprocating members 109, monitors that particularly reciprocating member is in the device that its complete retracted position shown in Figure 6 still is a complete extended position shown in Figure 7.Mechanical stop piece 261 is formed on the substrate securely, be arranged on first or forward limiter 262 and extension 218 on second or inverse limiter 263 between.The forward of reciprocating member 109 moves and is subjected to the restriction that scotch 261 engages with forward limiter 262, and its reverse moving is subjected to the restriction that scotch engages with inverse limiter 253.Scotch 261 utilizes the lead or the lines 274 that form on the substrate 213 to be connected electrically to the same electric joint fastener 264 that forms on substrate 213.Electricity joint fastener 264 allows scotch 261 electrical couplings to controller 111.Scotch 261 engages with a limiter 262 or 263, just closed electric joint fastener 264 and 242 s' circuit.

In a kind of method of operation actuator 101 of the present invention, controller 111 is by each the electric joint fastener 240 or 241 in one group of actuator 101, the pectination that will add to fixed electrode assembly 219 or 230 with respect to the voltage of the current potential that adds to electric joint fastener 242 selectively refers to 212, so that deflection movable electrode assembly 208,209 statically, thus the extension 218 of deflection between retracted position shown in Figure 6 and extended position shown in Figure 7 and the mirror 103 of the actuator 101 that is associated.Approaching constant at the electrostatic attraction that engages between the pectination actuator by interdigital structure.

By disconnecting the constant voltage on the fixed electrode assembly 230, make mirror 103 relative forward limiters 262 towards the extended position swing, can in actuator 101, realize extension state.Afterwards constant voltage is added to another fixed electrode assembly 210, makes mirror 103 remain on extended position 293.Then, remove the constant voltage on the fixed electrode assembly 210, again fixed electrode assembly 230 is added fixed voltage, mirror 103 is with regard to regracting.

In each half trip of reciprocating member 109, reciprocating member at first is withdrawn into its released position from its inflection point by spring 214,217, see Fig. 5, engaged another inflection point of moving it to by the collaborative static between electrode assemblie 208,210 or 209,230 afterwards.

Laterally the performance of pectination actuator 101 depends on some factors, comprising: the forward of spring 214,217 and side direction yaw stiffness and pectination drive and refer to 211,212 relative size.Between displacement that the permission operating voltage and the size of actuator 101 produced with mirror 102 and switch speed, exist compromise on the performance.Realizing the conventional method of big deflection with low operating voltage, be that interelectrode spacing is reduced to minimum producing maximum positive force, and the spring of the low forward yaw stiffness of utilization produces big positive-displacement.The polysilicon actuator that this method is usually used in approaching, the outer low yaw stiffness of its midplane has stoped uses big operating voltage.Yet when using thicker relatively structure, this class design is not the best.When interelectrode spacing reduced, though each positive force that refers to has increased, cross force increased sooner.When the high speed actuator of a kind of big deflection of design or big power, preferable method for designing is to determine earlier to cause the instable electrode spacing of minimum lateral when being chosen in maximum voltage then by the maximum voltage that this structure can be supported.Then, limit the maximum displacement and the speed of actuator by the quality of spring yaw stiffness and moving meter.

The invention solves above-mentioned all problems, simultaneously actuator occupation space on the size of actuator and the Qptic micro switch 104 is reduced to minimum.In the prior art, pectination refers to not be constrained to parallel the moving that is enough to prevent relative to microswitch 104 central shafts, promptly move perpendicular to the parallel of the moving direction of actuator 101, thus the enough big side force that between referring to, produces make the movable electrode assembly suddenly towards side bump rather than continuation to stretching out or retracted position moves.When with respect to the side force of lateral displacement at derivative during greater than the horizontal mechanical elasticity constant of spring, this unsteadiness has just produced.

The comparable pectination drive rod of elastic part or beam-like element 224,225 221,222 is longer or shorter.Particularly, the length range of elastic part 224,225 is the 200-2000 micron, preferably is the 800-1200 micron, and width range is the 3.5-5.5 micron, preferably is the 3.75-4.25 micron.The length of elastic part 224,225 shown in Figure 5 equals the length of the pectination drive rod 221,222 of actuator 101 at least.The length of actuator 101 is near 800 microns, and width is near 2500 microns, highly near 80 microns.

Beam shown in Fig. 5 or spring 214,217 are in not deflection or released position, and wherein each beam-like element or beam 224,225 are with the direction straight-line extension perpendicular to reciprocating member 109 operations.When each piece mirror 103 was in retracted position, beam 224,225 can both move to first inflection point shown in Figure 6 along a moving direction of electrode assemblie 209.When each piece mirror 103 was in extended position, beam 214,217 also can move to second inflection point shown in Figure 7 to move opposite direction with electrode assemblie 209.When beam 214,217 was in its separately first and second inflection points, they just are in non-rectilinear was bent position.Specifically, when each spring 214,217 when straight line or released position move on to deflection or bending position, move in opposite direction the opposite end of every beam 224,225, each such direction is parallel to the moving direction of reciprocating member 109.It is (shown in Figure 5 when spring is in its not deflection or released position, the withdrawal that illustrates respectively at Fig. 2 and 3 and the centre of extended position), the maximum side direction yaw stiffness that beam or spring 214,217 just occur is promptly perpendicular to the yaw stiffness in the direction of reciprocating member 109 moving directions.As can be seen, when not deflection as shown in Figure 5, spring 214,217 just is in linear state.

The reciprocating member of being made up of truss 216 109 has also improved the whole rigidity and the deflection of 101 pairs of lateral loads of actuator, has reduced the gross mass of reciprocating member 109.The intrinsic yaw stiffness of the present invention does not require that the bi-directional symmetrical of using with prior art designs actuator 101, can make the width of actuator 101 nearly reduce half.After width reduces, can more closely be contained in 104 li of microswitches to actuator 101 in groups mutually, thereby in given laser beam 191 length, allowing there is more actuator in the microswitch.

Another examples of actuators of the present invention comprises the feature that is used to improve actuator performance shown in Figure 8.In the actuator 101 and 180 of Fig. 8, same label is represented same element.Actuator 180 comprises that shown in the Figure 4 and 5 first and second sacrifice bar 246 and 247, and they are arranged on the next door of each spring or beam part 224,225 with respect to spring 214, to guarantee the square-section of uniform etching and required beam part.The height of every sacrifice bar provides a narrow groove 248 near the height of adjacent beam part along beam every limit partly.The spacing (being the width of every groove 248) that beam part and each are sacrificed between the bar is equivalent to etch features minimum in the device.In actuator 180, the spacing between beam part and every the sacrifice bar is near 8 microns.By the etching (retrograde) of restriction side 226,227, sacrifice bar 246,247 and help forming parallel planar side 226,227.Particularly, the width of groove 248 forbids that the ion except the ion that moves with the direction that is parallel to groove enters this groove and participates in etching side 226,227.

In the exemplary methods of operationthe of actuator 180, originally first and second movable electrode assembly 208,209 of actuator 101 is static, is positioned at the centre of stretching out with retracted position, as shown in Figure 8.In extended position, against at least one, and as shown in Figure 8, three first fixed stop pieces 293 are received substrate 213 against forward limiter 262, the first and second movable electrode assemblies 208,209 in extension 218.Each pectination actuator 208a, 208b and 209c are provided with a scotch 293.Scotch 261 engages to the forward limiter 261 that is connected to extension 218.In retracted position, against at least one, and as shown in Figure 8, three second fixed stop pieces 292 are connected to substrate 213 against inverse limiter 263, the one second movable electrode assemblies 208,209 in extension 218.Each pectination actuator 209a, 209b, 209c are provided with a scotch 292.Scotch 261 is connected to the inverse limiter 263 of extension 218.The repeatability that scotch 292,293 helps mirror 103 to locate in Qptic micro switch 104.

Actuator 101 and 108 can be used certain technology manufacturing, this technology is similar to people such as Klassen, Petersen, Noworolski, Logan, Maluf, Brown, Storment, McCully and Kovacs at Proceedings of Transducers ' 95 (1995), the technology of describing among the pp.556-559, wherein the shallow chamber in bottom silicon chip or the substrate 213 can form spring 214,217 suspension or movable, pectination actuator 208,209 etc.As shown in Figure 9, have in the zone of moving structure, in bottom silicon chip or substrate 213, etch the shallow grooves 170 of the degree of depth 5-50 micron (preferably being 10 microns) in hope.Second is that top silicon chip 173 utilizes silicon dioxide layer 171 fusions to be bonded to substrate 213, and the thickness of described silicon dioxide layer 171 is the 0.1-2.0 micron, more preferably is 1.0 microns.Then can be top silicon chip 173 grinding and polishings to required thickness.On the top surface 176 of top silicon chip, form metal level 174, be used for electric joint fastener 240,241,242,246, visualizer, or the like.Use deep reaction ion etching technology etching top silicon chip 173 at last, obtain the high-aspect-ratio structure that needs.Last DRIE silicon is etched in the place that silicon dioxide layer 171 occurs and ends, and continues to etch into the substrate 213 that does not have layer 171.This technology forms the movable monocrystal silicon structure that is suspended on substrate 213 tops such as spring 214,217, movable electrode assembly 208,209, non-yielding prop 131 and connector truss 216 etc., and air gap 172 and substrate electrical isolation by having shallow chamber 170 thickness.Then receive substrate 213 regularly such as additional structures such as thread guide devices 286,287 and scotchs 292,292, but by silicon dioxide layer 171 and substrate electrical isolation, and by air gap 175 and parts electrical isolation on every side.

In such as some application of switching a class, verify that independently the position of mirror 103 is very important.When the mirror in the actuator 180 103 was in extended position, the forward limiter 262 of movable electrode part 208 was in scotch 261 joints and electrically contacts.Scotch 261 utilizes lead-in wire 274 electrical couplings to electric joint fastener 264, and the latter can electrical couplings arrive controller 111.Similarly, when mirror 103 sons remained on retracted position, inverse limiter 263 was in scotch 261 and engages and electrically contact, like this by lead-in wire 274 electrical couplings to electric joint fastener 264.Therefore, controller 111 can detect the position of movable electrode assembly 208, reciprocating member 109 and mirror 103 with electrical way, and is for confirmation and/or monitor the state of microswitch 104.Limiter 262,263 and scotch 261,292,293 are included in the mobile retaining device of actuator 180.

Be used to monitor other device of reciprocating member 109 and movable electrode assembly 208,209 positions, all can be arranged in the actuator of the present invention, for example, utilization is included in conventional algorithm in the controller and measures the pectination of movable pectination actuator and drive and refer to that 211 pectinations of closing static pectination actuator 210a, 210b, 210c, 230a, 230b, 230c with collaborative mutual connection drive the electric capacity that refers between 212, and controller 111 just can be determined the position of movable pectination actuator 208a, 208b, 208c and 209a, 209b, 209c.For example, controller 111 can send to actuator with the signal of separating from the drive signal of giving the pectination actuator, be used to measure this electric capacity.This method need not be done the physics contact between such as above-mentioned electrodes such as mobile retaining device.Perhaps, forming actuator with during in elastic part, forming piezoresistor, can be along first and second opposing vertical side doped silicon material of one or more elastic parts or suspension 224,225.Can be with the conventional algorithm that is arranged on 111 li of controllers, measure the resistance variations (corresponding to the STRESS VARIATION of suspension 224,225) of this piezoresistor during spring 214,217 deflections, to determine reciprocating member 108 and the position of mirror 103 with respect to substrate 213 and fixed electrode assembly 210,230.

Another actuator embodiment of the present invention is shown in Figure 11, and actuator 601 is substantially similar to actuator 101, represents same element with same label.With the same in the actuator 101, actuator 601 comprises first and second movable electrode assembly 208,209 that is bonded together and links and the fixed electrode assembly 210,230 of first and second separation.Electrode assemblie 208,209,210,230 extends and is positioned at the central authorities of this center line perpendicular to the longitudinal centre line of actuator.Actuator 601 is that with the difference of actuator 101 first mobile component 208 includes only the first pectination actuator 208a, and it extends perpendicular to the moving direction of assembly 208,209.Second mobile component 209 includes only the first pectination actuator 209a, and it extends perpendicular to the moving direction of assembly 208,209.Because actuator includes only single pectination actuator 208a, 209a, and actuator 101 comprises pectination actuator 208a, 208b, 208c, 209a, 209b, 209c, so the power that actuator 101 provides 3 times of actuator 601 nearly.For realizing required deflection, must consider reducing of this power during the suspension of design actuator 601.As will be described below, use list pectination actuator 208,209 has been shortened the total length of actuator 601, thereby make compacter Qptic micro switch.

Figure 12 illustrates the top plan view of first embodiment of the optical switch of making by the present invention 104.Switch 104 comprises an assembly or an equipment of making the plane basically of microchip 100 forms, and it comprises illustrated at least one or 12 horizontal pectination drive actuator 180, is loaded into thickness near 500 microns silicon chip or substrate 213.The actuator of each static driven or motor 180 have the reciprocating apparatus or the reciprocating member 109 that are coupled to mirror 103, and mirror 103 vertically is provided with respect to substrate or body 213.The laser beam 191 that is transmitted by input optical fibre 98 is conducted through the input of switch 104 or enters the mouth 150, before the path along the vertical central axis 113 of switch 104 continues to propagate, by collimating lens 102.Can have about 100 to 200 microns diameter with the typical laser beam 191,192 of optical switch 104 couplings.As shown in figure 12,150 sheaths of removing input optical fibre 98 in the input port, cladded fiber 98 stretches into microchip 100 along the inlet slot 156 that forms therein afterwards.Collimating lens 102 places optical fiber 98 terminal next doors.In the preferred embodiment of Figure 12, lens 102 are a kind of common microminiature graded index collimating lenses.Perhaps, lens 102 can be common minimode lens or common sphere lens, and these all within the scope of the invention.The end of optical fiber 98 is positioned at switch 104, thereby is on the focus of collimating lens 102.Lens 102 before light beam 191 enters the main channel of microchip 100 or passageway 157 earlier to its collimation.Should be appreciated that, can optical switch 104 with lens 102 be set not at passageway inlet.In addition, the input laser beam 191 of collimation can be imported input port 150 by free space, promptly needn't use inlet optical fiber 98, this also within the scope of the invention.

In Figure 12, actuator that illustrates or micromotor 180 are produced on the static or original position, stretch out with retracted position in the middle of.Actuator 180 is divided into first group of 6 actuator 180a and second group of 6 actuator 180b, first group of actuator 180a and vertical central axis 113, the second group actuator 180bs of being parallel to microchip 100 spaced apart along the first isolated dotted line are spaced apart and be parallel to the central shaft 113 of microchip 100 along the second isolated dotted line.The relative both sides of actuator 180a and 180b centering axle 113, therefore mutually relatively.The mirror 103 of actuator 180 is with respect to axle 113 inclination miter angles, usually in the face of input port 150.Mirror 103 lead beams 191 of the first actuator 180a are by the angles of 90 degree, and light beam 191 is extended and towards the right side of equipment along the first direction perpendicular to central shaft.Mirror 103 lead beams 191 of the second actuator 180b are by the angles of 90 degree, make light beam 191 along extending perpendicular to the second direction of central shaft the left side towards equipment.Like this, the mirror 103 of the first actuator 180a is along the direction lead beam 191 relative with the mirror of the second actuator 180b.

First group of 6 delivery outlet aiming at the mirror 103 of the first actuator 180a or export 151 right sides that are arranged on microchip 100, second group of 6 delivery outlet 151 aiming at the mirror 103 of the second actuator 180b are arranged on the left side of microchip 100.Outlet slot 161 extends inward into passageway 157 from each port one 51, each bar output optical fibre 97 deliver near mirror 103 certain a bit.The sheath (not shown) of every optical fiber 97 originates in outlet 151.Should be appreciated that the mirror that differing tilt angles is arranged with respect to the optical switch axis can be set.Lens 102 are located between the entering surface of mirror 103 and each bar output optical fibre 97, are used for light beam 191 is aggregated into optical fiber 97.Though among the figure optical switch 104 is expressed as being coupled to single mode PM optical fiber 97, switch 104 can be with arbitrary suitable optical fiber coupling, and this also within the scope of the invention.

A pair of lens 102 axis 113 serials along the longitudinal are arranged on the central or middle of passageway 157.First or go up lens 102 be provided with near low 4 millimeters approximately on lens 102 the specific output optical fiber 97, be used for again focussed laser beam 191.Be positioned at second or following lens 102 of 157 centres, passageway, separate from the twice focus of the light beam 191 of lens 102 top outgoing, the laser beam 191 that the longitudinal axis in 157 Lower Halves of passageway 113 is propagated collimates again.

As shown in figure 13, during operation, specific mirror 103a reaches a certain position in light beam 191 light paths fully by separately actuator 180b under controller 111 guiding, and remaining mirror 103b is under controller 111 instructs, fully the outer a certain position of retraction light beam 191 light paths.Light beam 191 is from this specific mirror 103a reflection of stretching out, then by mirror 103a lead selectively separately delivery outlet 151 and with the output optical fibre 97 of its coupling.Can lead from the light beam 191 of delivery outlet 151 outgoing by free space, or by second optical fiber and/or lens 97 guiding destinations.Light beam 192 also can be from arbitrary delivery outlet 151 guiding input ports 150.In last example, can see that every mirror 103 can be the width of light beam 191 in the distance of displacement between whole withdrawals and the whole extended positions at least.Be about the 100-200 micron with the diameter range of the typical laser beam 191 of optical switch 104 couplings, require actuator 180 to realize that mirrors 103 reach this straight-line displacement at least.As previously mentioned, the actuator of prior art generally can only be done 40 microns displacements under suitable switch speed.

Because the light beam 191 that the present invention is coupled between input ports 150 and the specific delivery outlet 151 with mirror 103, therefore the quality of the mirror that uses is very important.For absorption, scattering with defocus the light loss that causes and reduce to minimum, mirror 103 surfaces must have reflectivity, smooth and smooth, for the application of minority key, can in position form mirror 103 vertical wall of etched surfaces during the device manufacturing.Mirror 103 can be made separately of silicon chip as thin as a wafer, on extension 218, aim at then with carriage 219, and cement with any suitable bonding 688, as Figure 10 with respect to shown in the actuator 601, adhesive has NorlandNEA 123M, this is a kind of adhesive of burst of ultraviolel, is sold by the Norland Products company that is positioned at New Jersey New Brunswick.Mirror 103 can be made of thin silicon sheet 691, and its layer 692 usefulness thin bond-lines 693 of being made up of any suitable reflective metal such as gold are fixed to silicon chip 691, and thin bond-line 693 usefulness chromium or any other suitable material are made.Other suitable reflective material of making layer 692 comprises aluminium and silver, and the suitable material of another kind of making adhesive layer 693 comprises titanium.The thickness range of silicon chip 691 is the 20-300 micron, and preferably near 80 microns, the thickness range in reflector is the 0.05-0.30 micron, preferably near 0.15 micron.The thickness of adhesive layer is near 0.005 micron.Metal level is at room temperature to reduce to minimum mode deposit with its residue internal stress.Silicon thickness is big with the ratio of metal thickness, also the coating and the different mirror bendings that cause of thermal expansion rates of silicon can be reduced to minimum.The mirror that obtains has high reflectance and the low surface roughness of polished silicon and the characteristics of high flat degree of gold or other reflective metal.

Other layer or coating are deposited on the reflector 692 alternatively, to increase the reflectivity of mirror 103.In mirror shown in Figure 10 103, a plurality of media are arranged on the top, reflector to 696,696 layers every pair comprise the high index layer 697 that is deposited on than on the low-index layer 698.Be applied to occasion such as the Qptic micro switch of microswitch 180 at mirror 103, the thickness of layer 698 all is equivalent to 1/4 wavelength of laser beam 191,192.Layer 697 suitable material comprise cerium oxide and titanium oxide, and the material that layer 698 uses comprises magnesium fluoride and silicon dioxide.

Optical switch of the present invention with other micro-actuator layout can be provided, be used for guiding again selectively being transfused to the laser beam 191 that optical fiber 98 imports this switch.The Qptic micro switch 830 usefulness microchips 831 that Figure 14 schematically shows form, and the above-mentioned any suitable method of describing with respect to switch 104 of microchip 831 usefulness is made.Represent identity element in microswitch 104 and 830 with same label.Optical switch 830 comprises that one is coupled to inlet 832 and a plurality of exit portal that enters optical fiber 98 or exports 833, and its middle outlet 833 is spaced apart and be coupled to each output optical fibre 97 along a side of switch 830.Along the centre gangway or the passageway 837 of switch 830, longitudinal center's axis 836 is parallel to inlet 832 and extends perpendicular to outlet 833.First group of 8 actuator or micro-actuator 180a are longitudinally-spaced along first dotted line, and the central axis 836 of described first dotted line and optical switch 830 extends in parallel and be spaced apart.Second group of 4 actuator or micro-actuator 180b are longitudinally-spaced along second dotted line, and second dotted line and axis 836 extend in parallel and be spaced apart.Longitudinal axis 836 extends between first group of actuator 180a and second group of actuator 180b.Like this, actuator or micro-actuator 180a are relative with 180b.

Actuator 180a comprises the mirror 103a that is contained on the carriage 219a, and actuator 180b comprises the mirror 103b that is contained on the carriage 219b, and mirror 103a, 103b are similar to above-mentioned mirror 103 substantially.Mirror 103a, 103b are generally in the face of input port 832.Lens 102 place between every mirror and the groove 838, and groove 838 is delivered to each outlet 833 with optical fiber 97.Mirror 103a, 103b pass through 90 angles of spending with respect to longitudinal axis 836 inclinations 45 degree again with the laser beam of penetrating thereon 191.In each actuator 180a, form carriage 219a, thereby dress mirror 103a thereon is with the positive direction deflection laser bundle 191 with respect to actuator 180a.In each actuator 180b, form carriage 219b, thereby dress mirror 103b thereon is with the direction deflection laser bundle 191 towards actuator 180b.Like this, mirror 103a, 103b be with a plurality of parallel direction deflection laser bundles 191, thereby be folk prescription to, laser beam always from a side outgoing of optical switch 830.

Micro-actuator 180a along first dotted line of microchip 831 with four groups of back ofs the body-back to setting.Like this, the extension 218a of every couple of adjacent actuator 180a, carriage 219a and mirror 103a adjoin the side setting along this actuator 180a.This layout of actuator 180a in microchip 831 makes the center of the more close microswitch 830 of mirror 103a of two distal-most end, thereby the road of shortening laser beam 191,192 in microswitch is long.As a result, input collimating lens 102 can be more to microswitch 830 positioned internal.The back of the body of actuator 180a-back of the body layout also allows two center lens 102 to be arranged on the front of two the most central actuator 180a, and the road of further having shortened laser beam 191,192 is long.

Input laser beam 191 from enter the mouth 832 longitudinally central shaft 836 propagate, engage up to its mirror 103a, 103b with controller 111 selections.The mirror of the first actuator 180a and reciprocating member 109 can from first or retracted position (wherein mirror 103 deflects away from the light path of laser beam 191) move to second or extended position (wherein the reflecting surface of mirror places the light path of laser beam), thereby the outlet 833 of guided laser bundle by separately.The mirror 103 of the second actuator 180b and reciprocating member 109 can from first or retracted position (wherein mirror 103b deflects away from the light path of laser beam 191) move to second or extended position (wherein the reflecting surface of mirror places the light path of laser beam 191).

The extension 218 of each actuator 180b and carriage 219 so constitute, and promptly when mirror 103b was in its withdrawal or leaves the light path position, they just left laser beam 191.Leave the light path of laser beam 191 for mirror 103b and carriage 210 are so withdrawn, actuator 180b requires bigger the moving or deflection than actuator 180a, because mirror 103b and carriage 219b aim at respect to the laser beam 191 that enters.For example, 180a compares with actuator, and the actuator 180b among Figure 13 requires 50 microns of additional deflections.Therefore, the pectination in the pectination driven unit of actuator drives and refers to 211,212, and is longer than corresponding elements among the actuator 180a.Size increases requirement has bigger driving voltage to actuator 180b.The direction of laser beam 191 is outside along a plurality of parallel directions from optical switch 830, then be folk prescription to, reduced wherein to be equipped with the complexity of the optical data memory system 95 of switch 830.

Another kind of optical switch to outside guiding is shown in Figure 15 from optical switch one side along folk prescription with input laser beam 191 selectively.The Qptic micro switch 851 here is similar with 830 to Qptic micro switch 104, represents same element in Qptic micro switch 104,830 and 851 with same label.Elongated optical switch 851 usefulness microchips 852 form, and at the one end inlet 853 are arranged, and in the one side 12 isolated outlets 754 are arranged.Along the passage or the passageway 857 of optical switch, the longitudinal axis is parallel to inlet 853 and extends perpendicular to outlet 854.Two groups of lens of switch 851 place in the passageway 857 102, along with laser beam 191 is upwards propagated by passageway 857, light beam 191 are focused on and collimate.Two groups of lens are divided into three sections to 102 with the passageway, every section long 4 millimeters approximately.

Along extending in parallel and isolated dotted line, 12 actuators 180 are arranged in the longitudinally-spaced position with the longitudinal axis 856.The mirror 103 of each actuator 180 is with respect to the longitudinal axis 856 45 degree that tilt, with guided laser bundle 191 again by the angles of 90 degree.The mirror 103 of each actuator 180 is contained on the carriage 219, passes through near each outlet 854 of actuator 180 back of the body ends like this, and laser beam 191 is guided towards actuator 180 backward.Inlet optical fiber 98 is coupled to inlet 853, and outlet optical fiber 97 is coupled to each outlet 854.Lens 102 place between each mirror and the groove 858, and groove 858 is delivered to each outlet 854 with optical fiber 97.Every mirror 103 utilize actuator 180 separately reciprocating member 109 can first or retracted position (wherein mirror 103 deflects away from the light path of laser beam 191) and second or extended position (wherein mirror 103 is in the light path of laser beam 191) between move.Should be appreciated that optical switch 830 can be equipped with actuator 180, to the guiding of the front of actuator, this comprises within the scope of the invention with laser beam 191.Utilize aspect the surface area of substrate 213 at it, the design of optical switch 851 is effective.

Figure 16 illustrates the embodiment of another optical switch of the present invention, wherein 191 one-sided outgoing from optical switch of outgoing laser beam.The optical switch 901 usefulness microchips 902 here form, and the input optical fibre 98 on microchip 902 1 sides is coupled in its single input port 903.The groove 906 that is provided with in the microchip 902 is used to carry the input optical fibre 98 from inlet 903.As inlet 903,12 outlets 904 of being coupled to PM optical fiber 97 are spaced apart in the same side of microchip 902.

First and second directed mirror 907,908 substantially similar with above-mentioned mirror 103 is included in optical switch 901 devices, is used for respectively along the downward extension passage or the passageway 911 of microchip 902 or extends upward passage or passageway 912 guided laser bundle 191 alternately.Extend along spaced apart and each the bar longitudinal axis 913,914 that extends to microchip 902 sides that is parallel to each other in passageway 911,912.Mirror 907,908 is with respect to axle 913,914 inclinations 45 degree, usually separately towards inlet 903.Transverse axis 916 903 extends through microchip 902 perpendicular to axle 913,914 from entering the mouth.

The first directed mirror 907 is connected to actuator 601, in optical switch 901 can from first or retracted position (wherein mirror 907 is in upwards position, deflect away from the light path of the laser beam 191 that extends along transverse axis 916) and second or extended position (wherein mirror 907 is in to upper/lower positions, in the light path of laser beam 191) move up and down, make laser-beam deflection by an angle of 90 degrees degree like this, light beam 191 is extended along first light path, and first light path is along first longitudinal axis, 913 extensions of switch downwards.

The second directed mirror 908 places first mirror, 907 back, and uses the carriage 917 that etches from microchip 902 to install to microchip 902 securely.When first mirror 907 was in its retracted position, input laser beam 191 engaged with mirror 908.Second mirror, 908 lead beams 191 make light beam advance along second light path and microchip 902 second longitudinal axis upwards by an angle of 90 degrees degree.

A plurality of first actuator 180a are longitudinally-spaced along first dotted line, and first dotted line is parallel to first longitudinal axis 913 and extends, and is provided with at least one second actuator on second dotted line that is parallel to the longitudinal axis 913 extensions equally, is illustrated as single 180b.4 actuator 180a are relative with the second actuator 180b basically, and the longitudinal axis 913 extends between actuator 180a and 180b.The first actuator 180a comprises four actuators 841,842,843 and 844, and they are by longitudinally-spaced along first dotted line to the order of bottom from the top in following passageway 837.Actuator 841,842 is arranged side by side along first dotted line, thereby extend along the adjacent side of actuator 841,842 in parallel to each other its extension 218.Actuator 843,844 is arranged side by side along first dotted line equally, and its extension 218 is extended along the adjacent side of actuator 843,844 in parallel to each other.

A plurality of the 3rd actuator 180c are longitudinally-spaced along the 3rd dotted line, and the 3rd dotted line is parallel to second longitudinal axis 914 and extends, and on the 4th dotted line that is parallel to 914 extensions of second longitudinal axis equally at least one the 4th actuator is set, and is illustrated as single actuator 180b.In a word, first and second actuator or micro-actuator 180a and 180b are arranged on a side of transverse axis 916, thereby on half microchip 902, and third and fourth actuator or micro-actuator 180c and 190d are arranged on the opposite side of transverse axis 916, so on second half microchip 902.Specifically, the actuator layout of the last longitudinal axis 914 is exactly the mirror image of the actuator layout of the following longitudinal axis 913.Like this, four actuator 180c are relative with the 4th actuator 108d basically, and the longitudinal axis 914 extends between actuator 180c and 180d.Four actuator 841-844 of the 3rd actuator 180c are by the order from 912 bottoms, last passageway to the top, and are longitudinally-spaced along the 3rd dotted line.

The mirror 103 of actuator 180a-180d can first or the retracted position that depart from laser beam 191 light paths (because laser beam 191 guide again by the first directed mirror 907 and deflects into the 3rd and the 4th actuator 180c, 180d, or guided to deflect into first and second actuator 180a, 180b) by the second directed mirror 908 and second or extended position (wherein the reflecting surface of mirror 103 places laser beam 191 light paths) between mobile.Every this mirror 103 is faced directed mirror 907,908 usually, and separately with respect to its first longitudinal axis 913 or second longitudinal axis, 914 inclination miter angle degree, passes through the about an angle of 90 degrees of axle relatively by reflection guided laser bundle 191.Particularly, every mirror a certain angle that tilts, selectively the guided laser bundle along single direction by each outlet 904 on Qptic micro switch 901 1 sides.Collimating lens 102 receives the laser beam of deflection, then it is injected an output optical fibre 97.Groove 927 is arranged in the microchip 902, is used for optical fiber 97 delivered to respectively exporting 904.

As mentioned above, with the same method of the micro-actuator 180a of Qptic micro switch 830, along separately passageway 911,912 micro-actuator 180a and 180c be arranged on two groups of back ofs the body-back in.Actuator 180a, the 180c this layout in microchip 902 allows the mirror 103 of actuator 844 is positioned at more close directed mirror 907,908 separately in the passageway up and down, it is long to have shortened the road of laser beam 191,192 in microswitch 901, has improved the coupling efficiency of switch 901 thus.The back of the body of actuator 180a, 180c-back of the body layout also allows actuator 601 to be positioned at the front of actuator 841, and it is long further to have shortened the road of laser beam 191,192 in switch.

The carriage 932 that utilization is come out from microchip 902 etchings of following 911 lower ends, passageway installs to microchip 901 securely with mirror 931.Mirror 931 places below the mirror 103 of first and second actuator 180a, 180b and the front of minimum actuator 180a.Mirror 931 is with respect to the longitudinal axis 913 inclination miter angles.When the mirror 103 of first and second actuator 180a, 180b all is in retracted position, laser beam 191 is passed through an angle of 90 degrees by Zhuang brocade 931 deflections, thereby spreads into the output optical fibre 97 that extends through delivery outlet 904 by collimating lens 102 along the direction of leaving the first actuator 180a.The carriage at top, passageway on the 3rd actuator 180c front installs to microchip 902 securely to similar mirror 943.The method of operation of mirror 943 is the same with mirror 931 basically, and when the mirror 03 of first and second actuator 180c, 180d all was in retracted position, its effect was the delivery outlet 904 of laser beam 191 deflections by separately.Mirror 103,931,943 is along a plurality of parallel direction deflection laser bundles, thereby be folk prescription to, thereby laser beam 191 is always from a side outgoing of Qptic micro switch 901, utilize hard-wired mirror 931,943 to replace other micro-actuator and the movable mirror of following, the road that has further dwindled the length in passageway 911,912 and laser beam 191,192 is long.As can be seen, optical switch 901 can be used to selectively with one of 12 output optical fibres 97 of laser beam 191 guiding.

The advantage of Qptic micro switch 901 is to have shortened laser beam 191 or the 192 maximum distances that must propagate by optical switch.Directed mirror 907,908 deflection laser bundles 191 are by one of passageway 911,912.Every the passageway all is shorter than the passageway 157 of switch 104, the passageway 837 of switch 830 and the passageway 857 of switch 851 on length.The road length of Suo Duaning has improved the coupling efficiency of switch 901 like this.Should be appreciated that other optical switch embodiment of the present invention can further be provided with the branch of actuator, be used for the range of laser beam 191,192 is reduced to minimum.

The Qptic micro switch that is similar to above-mentioned arbitrary switch can be provided with the optical module that is integrated into the optical switch microchip that is similar to above-mentioned laser-optical module 96.Qptic micro switch 1051 shown in Figure 17 is formed by microchip 1052, and the latter is with above-mentioned any suitable device manufacturing at switch 104.Qptic micro switch 1051 is similar to above-mentioned switch 104 and 830, represents the same element of switch 104,830 and 1051 with same label.Qptic micro switch 1051 comprises an inlet 1053 and a plurality of along the isolated exit portal in switch 1051 both sides or export 1054.Each output optical fibre 97 is coupled in outlet 1054, and its part is shown in Figure 17.Every output optical fibre 97 extends to the path or the groove 1056 of setting in the microchip 1052 by outlet 1054 separately.Vertical central axis 1,061 1,053 1062 extends along central corridor or passageway from entering the mouth, and longitudinal extension is made by the center of microchip 1052 in passageway 1062.

First group of actuator or micro-actuator 180a are longitudinally-spaced along first dotted line, and first dotted line and central shaft 1061 extend in parallel and be spaced apart.Second group of actuator or micro-actuator 180 are longitudinally-spaced along second dotted line (extend in parallel with axle 1061 and spaced apart).Vertical central axis 1061 extends between the first actuator 180a and the second actuator 180b, and like this, the first actuator 180a is relative with the second actuator 180b with respect to the longitudinal axis 1061.Though single or any a plurality of actuator 180 can be set, in switch 1051, be provided with five first actuator 180a and six second actuator 180b.

A plurality of first actuator 180a and a plurality of second actuator 180b comprise a packaged mirror 103 on carriage 219.Mirror 103 is with respect to the vertical axis tilt miter angle, thereby usually in the face of inlet 1053, guided laser bundle 191 passes through an angle of 90 degrees with respect to axle 1061.Laser beam 191 through guiding reflects from every mirror 103 along a path that extends forward from actuator 180, from outlet 1054 outgoing separately.Mirror 103 is driven by the reciprocating member 109 of separately actuator 180, can first or withdrawal (wherein mirror deflects away from the light path of laser beam 191) and second or extended position (wherein mirror places laser beam from 1053 light paths that begin to extend that enter the mouth) between mobile.The carriage 1068 at 1062 tops, mirror 1067 usefulness passageways installs to microchip 1102 securely.As first and second actuator 180a, when 180b all is in retracted position, mirror 1067 makes the delivery outlet 1054 of laser beam 191 deflections by separately.Mirror 1067 need not an actuator in the optical switch 1051, thereby has reduced the complexity of the collimated light path that switch 1051 and laser beam propagate by switch 1051.

The laser micro-optical device that comprises laser micro-optical (micro-optics) assembly 1071 is contained on microchip 1052 substrate of bottom portion 213 of inlet 1053 fronts.As laser-optical module 96, micro-optical assembly 1071 comprises collimating optics lens 1072 that are substantially similar to collimation optics 234, is used to receive the laser beam from linearly polarized laser source 231, also comprises the condenser lens (not shown).Assembly 1071 also comprises the beam splitter 1073 that a low wavelength dispersion is sewed, and is substantially similar to above-mentioned beam splitter 232.Assembly 1071 has the 1/4 ripple plate 1083 that is substantially similar to above-mentioned 1/4 ripple plate 238, optional half-wave plate 1084, polarization beam apparatus 1086 and photoelectric detector 1087.Photoelectric detector converts the light signal that receives to the signal of telecommunication.Each element of micro-optical assembly 1071 can install to substrate 213 with suitable method.For example, recess or container can be set in substrate 213, such as the container 1088 of collimating optics lens 1072, be used to admit each element of assembly 1071, all elements can be anchored in separately the recess with the method for any appropriate such as adhesive and/or spring 1089.Be provided with many grooves 1091 in the microchip 1052, help laser beam and propagate by micro-optical assembly 1071.

As confirming in the prior art, the difference detecting method of ripple plate 1083,1084, polarization beam apparatus 1086 and detector 1087 is used for measuring two orthogonal polarization components of reflection lasering beam 192 with respect to input beam 191, the measuring of the sensitivity of the differential signal polarization rotation that then to be the Kerr effect cause on the surface 108 separately at MO dish 107.This differential signal can be handled and export as the signal of telecommunication with differential amplifier 237.

Configuration micro-optical assembly 1071 has been simplified the aligning of assembly 1071 with respect to other optical element of lens 102, mirror 103 and switch 1051 on microchip 1052.Be used to aim at the recess of micro-optical assembly 1071 all elements or other device of substrate 213 on substrate, available accurate method is with the ORIE etching.

The micro-optical components that is similar to assembly 1071 can be arranged on other switch, and this is included in the scope of the present invention.For example, this assembly can be arranged on the microchip 902 of Qptic micro switch shown in Figure 16 9011.Figure 18 is a kind of Qptic micro switch 1096 that forms with microchip 1097, and is identical with Qptic micro switch 901 basically.The identity element of representing Qptic micro switch 901 and 1096 among Figure 18 with same label.Micro-optical assembly 1071 is contained on the microchip 1097 between the second and the 4th actuator 180b, the 180d, is positioned at the front of the directed micro-actuator 601 of receiving the first directed mirror 907.

Qptic micro switch 1096 has advantageously provided from the output optical fibre 97 of microchip 1097 homonymy outgoing, and comprises the micro-optical assembly 1071 on the microchip 1097.Two passageways of Qptic micro switch 1096 are designed and mirror 103 closely are contained in every passageway, the switch 1096 that provides coupling efficiency to improve.

Figure 19 is the Qptic micro switch that the another kind that is similar to assembly 1071 has the micro-optical assembly.The Qptic micro switch 1101 usefulness microchips 1102 here form, and this microchip is used such as above-mentioned any appropriate method manufacturing at Qptic micro switch 104, and is similar to many aspects of 1096 to the Qptic micro switch 901 here.Comprise first and second the directed mirror 1106,1107 that is similar to above-mentioned mirror 103 substantially in the device of Qptic micro switch 1101 or the assembly, be used for guided laser bundle 191 alternately and extend downwards along the passage of microchip 1102 or passageway 1111 or extend upward along passage or passageway 1112.Extend along isolated each root longitudinal axis 1113,1114 in passageway 1111,1112, and be parallel to each other and extend to the both sides of microchip 1102.Mirror 1106,1107 with respect to separately the axle 1113,1114 inclination miter angles.Transverse axis 1116 extends through the center of microchip 1102 perpendicular to axle 1113,1114.The first directed mirror 1106 is received actuator 601, and its operation is identical with the first directed mirror 907 in the actuator 901 basically.When the first directed mirror 1106 was in its retracted position, input laser beam 191 engaged with the second directed mirror 1107, was similar to the second directed mirror 908 of actuator 901 substantially.Second directed mirror 107 usefulness install to microchip 1102 securely by the carriage 1117 that microchip 1102 etches, to operate with the same mode of the second directed mirror 908, guided laser bundle 191 is by an angle of 90 degrees, thereby light beam is advanced along second longitudinal axis 1114 of alternate path and microchip 1102.

A plurality of first actuator 601a are along the down longitudinal axis 1,113 one side settings, and a plurality of second actuator 601b are along the couple positioned opposite of axle 1113, thereby extend between first and second actuator 601a, 601b through the laser beam 191 of first directed mirror 1106 deflections.Like this, first and second actuator 601a, 601b are relative with respect to the longitudinal axis 1113.Particularly, the first actuator 601a comprises a plurality of along axle 1113 longitudinally-spaced actuators.As shown in the figure, the first actuator 601a comprises that each actuator comprises first and second actuator 1123a and the 1123b that is arranged side by side along dotted line (extending perpendicular to the longitudinal axis 1113) to 1123 along first and second longitudinally-spaced group actuator 1123 of the longitudinal axis 1113.Place the second actuator 1123b back with respect to axle 1113, the first actuator 1123a.Like this, extend to the actuator 1123b on actuator 1123a next door the extension 218 of the second actuator 1123b, thus terminate near the middle stop that equals first actuator, 1123 extensions 218 certain a bit.

The mirror 103 of the first and second actuator 1123a, 1123b along axle 1113 on longitudinally-spaced position, be arranged to mutually near.Utilize this actuator, the mirror 103 of the first and second actuator 1123a, 1123b all can move to mirror 103 from first or the retracted position that deflects away from laser beam 191 light paths and be in second or extended position laser beam 191 light paths.Carriage 219 is with respect to axle 1113 inclinations 45 degree, thereby guided laser bundle 191 passes through an angle of 90 degrees.The laser beam of deflection extends to actuator, thereby collimated lens 102 receive, and it are injected an output optical fibre 97 again.Passage 1126 is arranged in the microchip 1102, is used to admit output optical fibre 97.Passage 1126 extends to the delivery outlet 1127 that places on microchip 1102 sides.Second actuator of the first actuator 601a to 1,123 first actuators that place the first actuator 601a to below 1123.

The second actuator 601b comprises single actuator to 1123, it be arranged on the last actuator of the first actuator 601a to 1123 relevant collimating lenses 102 and and the following actuator of the first actuator 601a between the 1123 relevant collimating lenses.Pair of alignment lens 102 are provided with relatively with the mirror 103 of the second actuator 601b, and each laser beam 191 is injected separately output optical fibre 97.These optical fiber 97 are from extending to the delivery outlet separately 1127 that is arranged on microchip 1102 opposite sides corresponding to the delivery outlet 1127 of the first actuator 601a path 1126 by separately.Utilization installs to microchip 1102 to mirror 1131 securely from the carriage 1132 that microchip 1102 etches.Mirror 1131 is arranged on down the end in passageway 1111, be positioned at below first and second actuator 601a, 601 the mirror 103 and the following actuator of the first actuator 601a to 1123 fronts.Mirror 1131 is with respect to the longitudinal axis 1113 inclination miter angles.When the mirror 103 of first and second actuator 601,601b all is in retracted position, laser beam 191 by an angle of 90 degrees, by collimating lens 102 is entered the output optical fibre 97 that through delivery outlet 1127 extend along the direction of leaving the first actuator 601a by mirror 1131 deflections.

A plurality of the 3rd actuator 601c above a side of the last longitudinal axis 1114 is arranged on the first actuator 601a, a plurality of the 4th actuator 601d in the couple positioned opposite of the last longitudinal axis 1114 above the second actuator 601b.The the 3rd and the 4th actuator 601c, 601d comprise that respectively a single actuator with first and second micro-actuator 1123a, 1123b or micro-actuator are to 1123.Laser beam 191 through second directed mirror 1107 deflections extends between the 3rd and the 4th actuator 601c, 601d, and like this, the 3rd is relative mutually with respect to the last longitudinal axis 1114 with the 4th actuator 601c, 601d.In the 3rd actuator 601c front, the carriage 1144 that mirror 1143 is used 1112 tops, passageway installs to microchip 1102 securely.The same with mirror 1131 substantially during mirror 1143 work, when the mirror 103 of first and second actuator 601c, 601d all is in retracted position, be used for separately delivery outlet 1127 is passed through in laser beam 191 deflections.As can be seen, optical switch 1101 can be used for selectively laser beam 191 being imported one of 12 output optical fibres 97.

Micro-optical assembly 1071 is contained on the microchip 1102, is between the first and the 3rd actuator 601a, the 601c and the front that is connected to the actuator 601 of the first directed mirror 1106.It is favourable being equipped with the micro-optical assembly on Qptic micro switch 1101, and reason is with above-mentioned described identical at optical switch 1051.Should be appreciated that can not be equipped with micro-optical assembly 1071 such as the Qptic micro switch of Qptic micro switch 1101, this is included in the scope of the present invention.

The actuator of Qptic micro switch 1101 to 1123 allow each up and down the mirror 103 in the passageway 1111,1112 be arranged to longitudinally abut against together along axle 1113,1114 separately, thereby shortened the collimated light path of laser beam 191,192.Mirror 1131 and 1143 is contained in the end in passageway 1111,1112 separately securely, has eliminated two electrostatic microactuators in the optical switch 1101.Therefore, mirror 1131,1143 has also shortened the collimated light path of the laser beam of propagating by switch 1101.

Should be appreciated that except above-mentioned electrostatic microactuator 101,180,601, far-ranging electrostatic microactuator also can be with the optical switch coupling here.For example, another electrostatic microactuator embodiment of the present invention can be with of the present invention any Qptic micro switch coupling of Figure 20.Illustrated actuator 301 is substantially similar to actuator 180.208 of the first movable electrode assemblies in the actuator 301 are equipped with first and second pectination actuator 208a, 208b, and 209 of the second movable electrode assemblies are equipped with first and second pectination actuator 209a, 209b.210 of the first fixed electrode assemblies in the actuator 301 are equipped with first and second pectination actuator 210a, 210b, and 230 of the second fixed electrode assemblies are equipped with first and second pectination actuator 230a, 230b.Actuator 301 also comprises two groups of elongated electric capacity holding electrodes or anchor clamps 420 electric capacity holding electrode or the anchor clamps 421 relative with a group, the former is coupled to the fixedly vertical flat surface of the pectination drive rod 222 of pectination actuator 210a, 230b, and the latter receives the vertical flat surface of the pectination drive rod 221 of movable pectination actuator 208b, 209a.At the electrode at the pectination actuator 210a back side or the electrode or the anchor clamps 421 at the anchor clamps 420 and the pectination actuator 209b back side, can certain spaced positions (when the pectination of pectination actuator 208a, 208b drive refer to 211 and the pectination of pectination actuator 210a, 210b drive refer to that 212 occur during for interdigital the relation) and the close mutually position of described anchor clamps 420,421 (when the pectination of pectination actuator 208a, 208b drive 211 and the pectination of pectination actuator 210a, 210b drive refer to 212 appearance when being spaced from each other) between mobile.Similarly, at the electrode at the pectination actuator 230b back side or anchor clamps 420 with at the electrode or the anchor clamps 421 at the pectination actuator 209a back side, can spaced positions (when the pectination of pectination actuator 209a, 209b drive refer to 211 and the pectination of pectination actuator 230a, 230b drive refer to that 212 occur when being in interdigital the relation) and the position that is close to mutually of described anchor clamps 420,421 (when the pectination of pectination actuator 209a, 209b drive refer to 211 and the pectination of pectination actuator 230a, 230b drive refer to 212 appearance when being spaced from each other) between mobile.This when being close to mutually when being in, preferably spaced apart about 5 microns of anchor clamps 420,421.

The mobile retaining device of actuator 301 and mirror monitoring arrangement do not comprise scotch 261 and limiter 262 and 263.But actuator 301 has been equipped with and has engaged the back forward direction scotch 293 that moves forward with restriction reciprocating member 109 to scotch 292 and joint carriage 219 that carriage 219 moves backward with restriction reciprocating member 109.The back to scotch 292 by lead-in wire or lines 302 electrical couplings to electric joint fastener 298, forward direction scotch 293 by lead-in wire or lines 303 electrical couplings to electric joint fastener 299.But electricity joint fastener 298 and 299 electrical couplings are in the reciprocating member 109 of its withdrawal and extended position to controller 111 with supervision.For each end of the second pectination actuator 208b and the first pectination actuator 209a, all be provided with additional back to scotch 292 and forward direction scotch 293.

In the method for operation of actuator 301, at actuator during starts, 111 pairs first and second fixed electrode assemblies of controller 210,230 alternately apply pulse voltage, make the first and second movable electrode assemblies, 208,209 resonance, realize the vibration displacement of reciprocating member 109 maximums.During the half trip of electrode assemblie 208, the conventional equipment that controller 111 comprises applies this pulse voltage current potential between relative pectination actuator, wherein this relative pectination actuator moves forward mutually, impel the pectination of these relative pectination actuators to drive to refer to 211,212 enter its 3rd or complete interdigital position.Under preferable resonance degree, burning voltage is added in the anchor clamps 420 fixed on the first pectination actuator 210a by electric joint fastener 240 and is added between the anchor clamps 421 on the movable second pectination actuator 208b by electric joint fastener 242, electrode assemblie 208,209 is moved on to its retracted position, and mirror 103 is remained on this retracted position.

When mirror 103 remains on extended position, at first remove the voltage between pectination actuator 210a and the 208b, under the effect of the forward direction elastic force of spring 214, first and second movable electrode assembly 208,209 is just swung to its second place (wherein mirror 103 is in extended position).Then, the pectination that potential pulse can be added to first and second pectination actuator 210a, 210b drives and refers to 212, the pectination of separately first and second pectination actuator 208a, 208b assembly driven refer to that 211 draw mutually forward, thereby make the anchor clamps 421 of movable electrode assembly 208,209 shift to the anchor clamps 420 of fixed electrode assembly 210,230.Then, burning voltage is added in the anchor clamps 420 on the fixing pectination actuator 230b by electric joint fastener 241 and is added between the relative anchor clamps 421 on the movable pectination actuator 209a, make movable electrode assembly 208,209 and mirror 103 remain on extended position near scotch 293 by electric joint fastener 242. Mechanical stop piece 292 and 293 preferably defines and stretches out and retracted position, and prevents the anchor clamps 420 on the anchor clamps 421 touching fixed electrode assemblies 210,230 on the movable electrode assembly 208,209.

At electrostatic microactuator the another kind of method of starting and operating actuator of the present invention is described now.Controller 111 provides below Figure 21 the input driving voltage shown in two figure, makes reciprocating member 109 moving like that shown in the last figure of Figure 21.Initial, controller 111 all is added to first and second by electric joint fastener 240 with five 45 volts pulse and returns pectination actuator 230a, 230b, makes actuator or micromotor 101 Oscillation Amplitudes bring up to 100 microns.In this set up procedure, electric joint fastener 241 and 242 keeps zero constant volt.After in the end 45 such deep-sited pulses are dashed, 45 volts are added to first and second pectination actuator 210a, 210b immediately, thereby anchor clamps or the electrostatic force between the holding electrode 421 on the anchor clamps on the first pectination part 210a or the holding electrode 420 and the second pectination actuator 208b make reciprocating member 109 remain on its retracted position, leave about 100 microns of its static position shown in Figure 20.Full reduced return at reciprocating member 109 is put, and anchor clamps 420,421 are separated by about 5 microns, thereby the voltage that applies remains on this retracted position with reciprocating member 109.45 volts in case be added to the first fixed electrode assembly 210, and the pectination of movable electrode assembly 208 drives and refers to that 211 drive with the pectination of fixed electrode assembly 210 and to refer to that 212 just are separated by about 100 microns.So do not add attraction betwixt.

In Figure 21, can find out, remove 45 volts about 11 milliseconds that are added to fixed electrode assembly 210.Along with reciprocating member 109 begins to be partial to its extended position, 45 volts of short pulses are added to fixed electrode assembly 210.At this moment, holding electrode 420,421 at interval enough far away, do not have electrostatic force therebetween, but the pulse voltage that is added to assembly 210 impels the pectination of electrode assemblie 208 to drive to refer to 211 to shift to electrode assemblie 210 relative pectinations and drive and refer to 212.Pulse voltage has compensated the energy loss that is subjected to during the half trip, thereby makes reciprocating member 109 its full extended positions of deflection.Be added to the second fixed electrode assembly 230 to 45 volts current potentials this moment, thereby provide electrostatic force between the relative anchor clamps 421 of the anchor clamps 420 of second pectination actuator 230b back side setting and the setting of the second pectination actuator 209b back side.This power remains on its extended position with reciprocating member 109.After about 12 milliseconds, reciprocating member unclamps its extended position, 45 deep-sited pulses is dashed be added to the second fixed electrode assembly 230 afterwards, actuates the second relative movable electrode assembly 209, make reciprocating member 109 move on to its retracted position, keep reciprocating member by 45 volts that are added to the first fixed electrode assembly 210 at this.Should be appreciated that during starting vibration, pulse voltage can be added in first electrode assemblie 210 of various layouts and/or the second fixed electrode assembly 230 one or both continuously, to realize resonance in reciprocating member 109.Be also to be understood that controller 111 can provide square wave actuator voltage in addition to be used for operate actuator to actuator of the present invention.

As mentioned above, actuator 301 is used the DRIE art designs, allow various structures higher, thereby its vertical surface is bigger than the homogeneous structure of prior art.Therefore, anchor clamps 420,421 comprise the fixed electrode assembly 210,230 and the movable electrode assembly 208,209 of bigger vertical surface area, for any given distance between the anchor clamps, the attraction that forms between relative anchor clamps 430,421 is bigger than prior art like this.

Refer to that 211,212 interior joint remains on its full-scale deflection position with movable electrode assembly 208,209 if utilize pectination to drive, then in order to keep movable electrode assembly 208,209 in its full-scale deflection position and the voltage that must apply fixed electrode assembly 210,230 is littler 4 times than the voltage that must be added to the fixed electrode assembly approximately.Perhaps, for same chucking power is provided, can drives the pectination of smaller amounts and refer to or tooth 211,212 applies full voltage.

In actuator 301, electrode or holding electrode 420 and 421 all comprise a plurality of little finger-like extensions 422, and they are spaced apart and extend perpendicular to the pectination drive rod along the pectination drive rod.The length range of extension 422 is 3 to 35 microns, preferably is 5 to 15 microns, is more preferably about 13 microns.Be close to mutually when electrode 420,421 and increase when applying the surface area of attraction between finger electrode 420,421, extension or tooth 218 are interdigital at least in part.Anchor clamps 420,421 can not have extension 422, but flat, perhaps have other structure, and these all are included in the scope of the present invention.

If movable electrode assembly 208b unclamps from the anchor clamps 420,421 of retracted position quilt pectination actuator 210a, 208b separately, movable electrode assembly 208,209 just swings back and forth near resting position, when the Q of actuator 101 value was 14, per half period of its amplitude reduced 10%.Correspondingly, when electrode assemblie 208,209 when the initial withdrawal distance of static position is 100 microns, unless utilize the movable electrode assembly 209 and the static mutual effect of fixed electrode assembly 230 system is made additional merit, otherwise relative holding electrode 421,420 must show enough attractions betwixt, to catch movable electrode assembly 208,209 at it under the situation of 90 microns of extended position peak excursions.

In another electrostatic microactuator embodiment shown in Figure 22, actuator 501 is formed by silicon chip, and its spring 214,217 is designed to non-directional, because when being in static not deflection state, be " bending " state.Actuator 501 is substantially similar to actuator 101,180,301, and same label is represented the same element of actuator 101,180,301,501.When reciprocating member 109 was in its static state in the middle of its withdrawal and extended position, the elastic part 224,225 of each spring 214,217 was crooked mutually in the actuator 501.In this example, because reciprocating member 109 moves on to its retracted position from its origin-location, and the pectination of second movable electrode assembly 209 and the second fixed electrode assembly 230 to refer to that 211,212 static engage the back overlapping, spring 217 is the stretching position that is in line from the origin-location of its prebuckling just.Similarly, because reciprocating member moves on to its extended position from its origin-location, and first or the pectination of the moving electrode assembly 208 and the first fixed electrode assembly 210 refer to 211,212 to engage the back overlapping, thereby spring 214 from the origin-location of its prebuckling the stretching position that is in line.In each case, referring to 211 direction perpendicular to each pectination driving, the side direction yaw stiffness of the elastic part 224,225 of each spring has improved, so elastic part has become straight line along this direction.Like this, the side direction yaw stiffness of each spring and this spring refer to that to this pectination driving the increase of the 211 side direction restoring forces that apply is that pectination drives the function that refers to lap between 211,212.Like this, spring 214,217 impels the pectination driving of work pectination driven unit to refer to that 211 enter the settling position that adjacent pectination driving refers to centre between 212, so the pectination driving refers to that 211,212 become interdigitated.Though spring 214,217 is stretching along a direction deflection time, reverse when mobile when reciprocating member 109, elastic part 224,225 becomes more curved from its static position mutually.

Size with form second group of folding cantilevers or the spring 561,562 be similar to spring 214,217 substantially and be arranged at actuator 501.Each spring 561,562 is coupled to substrate 213 at its first end 563, is coupled to movable electrode assembly 208,209 at its second end 564.Every group of spring 561,562 comprises first and second spaced apart parallel elastic part 566,567 that is folded part 568 connections.Spring 561,562 is connected the suspension stiffness supporting 567 that non-yielding prop 131 is extended and be parallel in its one at its folded part 568.Supporting 131,569 rigidity interconnection as shown in Figure 22.When spring 561,562 was in the released position, the moving direction that is substantially perpendicular to electrode assemblie 208,209 extended.Specifically, when reciprocating member 109 was in its inactive state in the middle of its withdrawal and extended position, elastic part 566,567 mutual bendings were left, as shown in figure 22.When the pectination of the first movable electrode assembly 208 and the first fixed electrode assembly 210 referred to that 211,212 overlapping increase and reciprocating member 109 move on to its extended position, spring 562 was designed to stretching to linear position.Similarly, when the pectination of the second movable electrode assembly 209 and the second fixed electrode assembly 230 referred to that 211,212 overlapping increase and reciprocating member 109 move on to its retracted position, spring 561 was designed to stretching to linear position.Though spring 561,562 is stretching along a direction deflection time, reverse when mobile when reciprocating member 109, elastic part 566,567 is crooked and farther from its resting position mutually.The operation of spring 561,562 is identical with the mode of operation of above-mentioned spring 214,217.

In this four spring embodiment, a flexural spring of actuator 501 each end is preferably straight to 214 or 561 and 217 or 562, and another flexural spring is to should being crooked in movable electrode assembly 208,209 each deflection limit.In order to keep same forward yaw stiffness as two flexural spring actuators 101, the length of actuator 501 medi-springs 214,217,561,562 has increased by 26%.

Figure 23 is a curve chart, the combination lateral stability of the four springs design of expression such as actuator 5,014 four springs 214,217,561,562 designs one class and the correlation of spring deflection.The lateral stability of Figure 23 indication is exactly the ratio of the electrostatic force of combination side direction yaw stiffness and combination side.In the curve of Figure 23, the lateral stability value is unstable less than 1, is stable greater than 1." straight beam " line among Figure 23 refers to the beam of above-mentioned actuator 101 medi-springs 214,217 1 classes." pre-bending " line among Figure 23 refers to the beam of actuator 501 medi-springs 214,217,561,562 1 classes.It is straight that spring 214,217,561,562 is designed to make the position of lateral stability maximum in all positions.Preferably the value of lateral stability is at least 10 at any time.In actuator 501, the initial bending of each spring 214,217,561,562 is 43 microns, be that the movable end of each elastic part 224,225,566,567 is left elastic part and is in perpendicular to 43 microns of the positions of the linear position of moving direction, minimum lateral stability is risen to 10, shown in curve group 4 among Figure 23.For from its origin-location in the middle of withdrawal and extended position or the released position with the distance of 100 microns of mirror 103 deflections, actuator 501 needs 154 volts of voltages.As can be seen from Figure 23, when mirror 103 moved about 90 microns from its origin-location, the lateral stability that spring 214,217,561,562 provides was about 100, and elastic part 243,244,566,567 is straight at this mirror position.

Actuator 501 can be to be similar to the method for operation in operation of above-mentioned actuator 101,180,301.Along with the lateral deflection of pectination actuator 208,209, the stable side force that spring 214,217,561,562 provides increases to such an extent that refer to that than the driving of interdigitation pectination the static side force that produces between 211,212 is faster.In the example of Figure 23, stable side force along with lateral deflection increase fast 10 times at least than static side force.

In a kind of preferable method of operation of actuator or motor 501, as shown in figure 22, when driving, pectination refers to that 211,212 are in its second place (part electrical engagement, more preferably be electrical engagement) time, pulse voltage is added to the pectination driven unit of operation during arbitrary specific half trip, promptly its pectination drives and refers to that 211,212 enter interdigital pectination driven unit during this half trip.Because for given voltage, medio-lateral instability power direct proportion between the pectination driving refers to is in their engagement amount, so when drive in pectination refer to 211,212 second with the 3rd position between first bonding part during (preferably engage fully before the pectination driving refers in the 3rd position, more preferably driving and refer in 211,212 from 0 to 25% time intervals that engage in pectination) when applying voltage, it is minimum that medio-lateral instability power can reduce to.

Forward or stretch out moving limiting device or limiter 571 and oppositely or withdrawal moving limiting device or limiter 572 be arranged on the extension 218 of movable electrode assembly 208,209, when electrode assemblie 208,209 is in it and stretches out with retracted position, be used to engage fixed stop piece 573.Scotch 573 electrical couplings are to electric joint fastener 264 and controller 111, thereby this controller can monitor actuator 501 so that switch 104 positions.Should be appreciated that actuator 501 can be equipped with the anchor clamps 420,421 of actuator 301 type that discloses and/or at actuator 101,180,301 described other devices, these all are included in the scope of the present invention.

Figure 24 illustrates another actuator of the present invention embodiment.In this preferred embodiment, the actuator 602 of configuration has single fixed electrode assembly 210, is used to attract single movable electrode assembly 208.Actuator 602 is similar to above-mentioned actuator 101 and 501, represents the identity element of actuator 101,501,602 with same label.Movable electrode assembly 208 includes only the first pectination actuator 208a, and fixed electrode assembly 210 includes only the first pectination actuator 210a.Only be provided with the spring 214,562 at actuator 501 shown in Figure 22.Spring 214,562.With suspension stiffness supporting 606 interconnection that are substantially similar to above-mentioned supporting 131 and 569.The single fixed electrode design of actuator 602 only presents medio-lateral instability in the extended position of mirror 103, only move with this direction and pectination drives and refers to that 211,212 become and just produce when interdigital at electrode assemblie 208 because the pectination of fixed electrode 210 and movable electrode 208 drives the bending side force that refers between 211,212.As a result, need the only stretching prebuckling spring 214,562 of ability when movable electrode assembly 208 is in extended position.Holding electrode 420 is arranged on the pectination drive rod 222 of pectination actuator 210a, and relative anchor clamps 421 stretch out perpendicular to the moving direction of electrode assemblie 208, and is rigidly connected to pectination actuator 208a by truss portion 216.The movable piece of actuator 602 or reciprocating member 607 comprise the first pectination actuator 208a, holding electrode 421, truss 216, extension 218 and carriage 219.

In example actuator 602 embodiment of Figure 24,46 microns of spring 214,562 prebucklings.Preferably 18 microns of the spacings of comb teeth.Preferably 800 microns long, 80 microns high of the plane surfaces of anchor clamps 420,421.When holding electrode 421 propped up reverse scotch 292 and oppositely scotch 680 engages with scotch 682, anchor clamps were opened 5 microns in 420,421 minutes.Though the anchor clamps the 420, the 421st among Figure 24 are flat, should be appreciated that they also can comprise extension shown in Figure 30 422.

Opposite with the actuator 301 of Figure 20, the actuator 602 of Figure 24 has been used asymmetrical design, and the displacement of stretching out wherein is slightly larger than the withdrawal displacement.For example, the outreach of the actuator 602 of Figure 24 is 112 microns, and the withdrawal distance is 100 microns.Originally voltage is put on fixed electrode 210, drive under 212,211 the electrostatic attraction effect of referring to, movable electrode part 208 is deflected into extended position keep motionless in pectination.Between transfer period, if wish mirror 103 withdrawals are deflected away from the light path of laser beam 191, just remove the quiescent voltage on the fixed electrode assembly 210, movable electrode assembly 208 and reciprocating member 607 just are partial to retracted position, and are remained there by the electrostatic force between the anchor clamps 420,421.Reciprocating member 607 from its extended position anti-partially during, spring 214,562 provides the initial mechanical withdrawal force to it.In exemplary actuator 602 embodiment of Figure 24, movable electrode assembly 209 remains on the extended position of 112 microns of resting positions, unclamps then, and then assembly 209 will be partially crossed 100 microns of its origin-locations towards retracted position, is captured by anchor clamps 420.

The curve representation of Figure 25, the lateral stability of actuator 602 is functions of deflection, the curve representation of Figure 26, the clamping force of holding electrode 420,421 is functions of separation distance between the holding electrode in the actuator 602.Shown in these curve charts, be that actuator 602 is to 112 microns of post deflections under 20 the condition in 196 volts and minimal security limit.For example, with suitable Q value 14, even without the pulling of anchor clamps 420,421, movable electrode part 208 will be displaced to reverse scotch 680 always.Like this, actuator 602 bigger forward outreach permission reciprocating members 607 oppositely are displaced to full reduced return with mirror 103 and put, need not be with additional merit input actuator.In retracted position, 214,562 pairs of movable electrode parts 208 of suspension or spring add one 97 μ N pulling force, shown in the solid horizontal line that is designated as " the folder power of requirement " among Figure 26.Shown in the dotted line that is designated as " parallel-plate anchor clamps " among Figure 26, when the grip separation distance was 15 microns, this power can overcome with anchor clamps 420,421.As can be seen from Figure 26, when the distance of anchor clamps maintenance from scotch 680 and 292 was 5 microns, the actual confining force of anchor clamps 420,421 was 900 μ N.Scotch 680 and 292 is used to prevent contacting of 420,421 of holding electrodes.

Above-mentioned preferred embodiment uses one-sided fixed electrode design to move from the origin-location or the centre position of movable electrode assembly 208+/-100 microns distances.In addition, reduce the area and the quality of this preferred embodiment, can reduce cost and switch speed.As to be discussed below, shorten the length of actuator 602, can be arranged side by side two actuators.

In switch application, verify that independently the position of mirror 103 is very important.In electrostatic microactuator 602, supplemantary electrode can be allocated the mechanical stop piece into.When the mirror in the actuator 602 103 was in extended position, the forward limiter 681 of movable electrode part 208 was in engagement state and electrically contacts with scotch 682.To electric joint fastener 687, the latter can electrical couplings arrive controller 111 to scotch 682 through 686 electrical couplings that go between.Similarly, when mirror 103 remained on retracted position, inverse limiter 680 was in joint and electrically contacts with retainer.Like this, controller 111 can detect the position of movable electrode assembly 208 and mirror 103 with electrical way, confirms actuator 602 and any switch or is furnished with the state of other device of one or more actuators 602.Limiter 680,681 and retainer 682 are included in the mobile retaining device of actuator 602.

The actuator 602 of Figure 24 can be expanded and comprise one group of above collaborative interior pectination actuator 208a, 210a of engaging.For example, the asymmetric actuator 603 that is substantially similar to actuator 602 is shown in Figure 27, and same label is represented the identity element of actuator 602 and 603.The movable electrode assembly 208 of actuator 603 has been equipped with four longitudinally-spaced comb shape actuator 208a.The fixed electrode assembly 210 of actuator 603 has been equipped with four longitudinally-spaced pectination actuator 210a.Actuator 603 is furnished with four groups of crew-served holding electrodes 420,421.Along with the increase of electrode assemblie 208,210 quantity, the width of every group of electrode assemblie 208,210 has reduced, thereby for the essential arbitrary given power of flexible mirror 103, the width of actuator 603 also can reduce.Like this, laser beam 191,192 must keep the distance of optical alignment to shorten because of propagating along the center of the Qptic micro switch that discloses type here.

Actuator 602 shown in a kind of actuator shown in Figure 28-29 or electrostatic microactuator 701 image patterns 24 is the same, and some element of its actuator 501 is shown in Figure 22, but single fixed electrode assembly and single movable electrode assembly are only arranged.Represent same element in the actuator 701,501,602 with same label.The movable electrode assembly 209 of actuator 701 only comprises pectination actuator 209a, and fixed electrode assembly 230 includes only pectination actuator 230.The cantilever spring 561,217 of actuator 501 is arranged in the actuator 701, and spring 561,217 is by suspension stiffness supporting 711 interconnection that are substantially similar to above-mentioned supporting 606.As actuator 602, actuator 701 only presents medio-lateral instability on an extreme position of movable electrode assembly 209.Particularly, only when mobile component 209 moves on to its retracted position (wherein pectination drive refer to that 211,212 become interdigitated) just drives in the pectination of movable electrode assembly 209 and refers to that 211 produce side force between referring to 212 with the pectination driving of fixed electrode assembly 230.When movable electrode assembly 209 is in its retracted position, each elastic part 566,567 of spring 561,217 and 224,225 just stretching to the linear position that laterally has maximum yaw stiffness at actuator 701.Holding electrode 420 is arranged on the pectination drive rod 222 of fixing pectination actuator 230a.Relative anchor clamps 421 stretch out perpendicular to moving direction, and at one end are rigidly connected to pectination actuator 209a by bracket part 218.Second or the free end 567 of elastic part 564 is fixed to the other end of anchor clamps 421.The movable piece of actuator 701 or reciprocating member 712 comprise the first pectination actuator 209a, holding electrode 421, truss 216, extension 218 and carriage 219.

The working method of actuator 701 is substantially similar to actuator 602, difference is, when mirror after the forward resilient force of spring 561,217 moves down into extended position, utilize collaborative interior pectination actuator 209a, the 230a of engaging that mirror 103 is moved on to retracted position, and utilize relative anchor clamps 420,421 that movable electrode assembly 209 and mirror 103 are remained on extended position.The withdrawal distance that the asymmetrical design of actuator 701 provides is greater than the forward outreach.Therefore, reciprocating member 712 can swing to extended position from its retracted position, is enough to make anchor clamps 420,421 to engage and need not the merit that input adds to system.

Shown in Figure 28-29,, can realize mirror 103 critically is contained on the carriage 219 by container 776 and rectangular recess or socket 777DRIE are etched into 219 li on carriage and spigot 778 is added to mirror 103.In a single day mirror spigot 778 inserts socket 777, just can be with such as any suitable adhering methods such as viscose glues 688 mirror 103 being bonded on the appropriate location of container 776.Carriage comprises an etched elastic part 779 alternatively, makes mirror 103 keep aiming at before bonding.The mirror assembly that does not contain elastic part 779 is shown in Figure 22, and the mirror assembly of mixing elastic part 779 is shown in Figure 29.

Another kind of device also can be fixed in carriage 219 to mirror 103.For example, the actuator 801 that forms with silicon chip that is similar to actuator 701 is shown in Figure 30, and the layout of its electrode assemblie is similar to actuator 603.The identity element of representing actuator 701 and 801 with same label.The movable electrode assembly 209 of actuator 801 has four longitudinally-spaced pectination actuator 209a, and fixed electrode assembly 230 has four longitudinally-spaced pectination actuator 230a.Actuator 801 is furnished with four groups of crew-served holding electrodes 420,421.The carriage 219 of actuator 801 forms by the DRIE etching, and the container 802 that provides has upright shoulder 803 at its each end.Mirror 103 remains in the container 802 by any suitable adhesive bonding methods such as viscose glues 688.Holding device that is equipped with or keeper are taked the form of the thumb shape post 804 that hangs, and it forms through the DRIE etching with the silicon chip of actuator 801, are used between joint aging time mirror 103 alignings and remain in the container 802.Post 804 is connected to a silicon chip part 805 securely, and is connected to substrate 213 by neck 806.The withdrawal distance of asymmetric actuator 801 is greater than the forward outreach of actuator.

In the manipulating of actuator 801, the restoring force of reciprocating member 712 resistance springs 561,217 is withdrawn backward, and mirror 103 is placed on the carriage 219.Afterwards when reciprocating member 712 unclamps, mirror 103 just stretches out forward, engages with the free end of post 804 up to the reflecting surface of mirror.The answer of spring 5611,217 applies the power of about 50 μ N to mirror 103, applies and setting up period at viscose glue, and this power is enough to mirror be aimed at perpendicular to the surface of substrate 213 and mirror is remained on the appropriate location.After like this mirror 103 being connected to carriage 219, make neck 806 fractures that width reduces on the post 804, remove post 804.

In another actuator of the present invention or electrostatic microactuator embodiment, actuator 951 is furnished with actuating device or actuator 952, is used for that mirror mechanically is locked in it and stretches out entirely and full reduced time two positions (seeing Figure 31).Actuator 951 is substantially similar to actuator 602, represents the identity element of actuator 951 and 602 with same label.Locking mechanism or auxiliary motor 952 are substantially similar to the main motor of actuator 951, and it comprises the first comb shape actuator 208a and the first pectination actuator 210a.Auxiliary or breech lock motor 950 forms with any suitable manner such as DRIE on silicon chip or substrate 213, and it comprises reciprocating member 956, can first or retracted position and second or extended position between move with direction perpendicular to reciprocating member 607 moving directions.Reciprocating member 956 comprises the movable electrode assembly 957 that forms with a plurality of pectination actuators 958, and actuator 958 is longitudinally-spaced along the length of elongate frame portion 961.The moving direction that frame section 961 is parallel to breech lock motor 052 extends.Each pectination actuator 958 has one to be fixed to the pectination drive rod 962 of frame section 061 at the one end, and extends perpendicular to frame section.A plurality of pectinations drive and refer to 963 side extensions from pectination drive rod 962, and are longitudinally-spaced on bar 962.

The pectination driven unit of actuator 951 also comprise one with the fixed electrode assemblies 966 that engage in movable electrode assembly 957 is collaborative.Fixed electrode assembly 966 comprises a plurality of pectination actuators 967 that are contained on the substrate 213.Each pectination actuator 967 is spaced apart between a pair of adjacent pectination actuator 962, and its forms with being set to the pectination drive rod parallel with pectination drive rod 962 968.A plurality of pectinations drive and refer to that 969 form one with pectination drive rod 968, and to pectination drive refer to 963 extend with engage in it is collaborative.Movable and fixed electrode assembly 957,966 is connected electrically to the electric joint fastener (not shown) that is similar to above-mentioned electric joint fastener 240-242, allows breech lock motor 952 be connected electrically to controller 111.

Reciprocating member 956 utilizes elastic component or the spring 976 that places reciprocating member 956 1 ends and places the elastic component of reciprocating member opposite end or spring 977 to be suspended on substrate 213 tops.Spring 976 is identical with 562 cardinal principles with spring 214 respectively with 977.The identity element of representing spring 976,977 and 214,562 with same label.The non-yielding prop 978 that is substantially similar to non-yielding prop 606 is suspended in substrate 213 tops, extends between the folded end of spring 976 and 977.

It is identical with above-mentioned pectination driven unit with the method for operation of 967 pectination shape driven unit to engage pectination actuator 958 in collaborative, but pectination actuator 958,967 can first or static position (wherein pectination drives and refers to that 963,969 drive in pectination that to refer to that 963,969 end is on the position in the straight line that extends perpendicular to reciprocating member 956 moving directions spaced apart) and pectination driving refer between 963, the 969 interdigital second places mobile.Reciprocating member 956 is pulled back by the electrostatic force between the pectination actuator 958,967, and is pushed away forward by the mechanical force of spring 967,977.Breech lock motor 952 is normally closed closing on its primary importance shown in Figure 31 usually.

Reciprocating member 956 has the extension 981 of a band pin 982, can stretch out and retracted position between move.Pin 982 generally is in its extended position.The carriage 219 of actuator 951 is furnished with first and second isolated scotch 984 and 983, forms a recess betwixt, admits pin 982 when reciprocating member 607 is in its released position.

In manipulating, when hope moves on to its retracted position with mirror 103, just start breech lock motor 952, thereby withdrawing reciprocating member 956 backward, the electrostatic force between pectination actuator 958,967 spurs pin 982.Because mirror 103 has been withdrawn, second scotch 984 can be walked around pin 982 now.Then to 952 de-energisations of breech lock motor, thereby spring 976,977 impels reciprocating member 956 to enter its normally closed position (wherein selling 982 bottoms that engage second scotch 984), thereby hinders carriage 219 and mirror 103 extends.With same method, can will sell 982 withdrawals by breech lock motor 952, allow mirror 103 stretch out.In case 952 de-energisations of breech lock motor, pin 982 engages the first scotch top with regard to extension, and mirror 103 is locked in its extended position.Reciprocating member 956 is in case withdrawal, and each spring 976 and 977 just moves on to linear position from its static buckling position, so just movable pectination driving is referred to that 963 provide a lateral stability power because they and fixedly the pectination driving refer to that 969 is together interdigital.

Breech lock motor 952 allows mirrors 103 to be locked in it to stretch out entirely or full reduced return is put, need not be to actuator 951 making alive, and this helps actuator 951 is applied to communication or network system.In illustrated embodiment, when mixing 200 volts of input signals, breech lock motor 952 has 4 microns deflections, and has the 8KHz resonance frequency.Although actuator 951 does not have the electrostatic clamp electrode of above-mentioned arbitrary type, should be appreciated that actuator 951 can be equipped with this class holding electrode, this is also included within the scope of the invention.

In another embodiment, the actuator of outfit has first group of electrostatic clamp electrode and second group of electrostatic clamp electrode that mirror is remained on its full extended position that mirror is remained on its retracted position.Actuator 1001 shown in Figure 32 is substantially similar to above-mentioned actuator 701, represents the identity element of actuator 701 and 1001 with same label.The pectination driven unit of actuator 1001 comprises movable pectination actuator 209a and fixing pectination actuator 230a.Movable pectination actuator 109a comprises that pectination drive rod 221 and a plurality of the driving along the longitudinally-spaced elongated pectination of bar 221 length refer to 1002.Every pectination drives and refers to that 1002 have a proximal part 1002a and who is fixed to pectination drive rod 221 to leave far-end or free end portion that bar 221 is provided with.

Every pectination drives and refers to that 1002 proximal part 1002a is wideer than the remainder that the pectination driving refers to, thereby the pectination driving refers to dwindle away from proximal part 1002a.Specifically, it is that pectination drives the 100%-300% that refers to balanced width that every pectination drives the width range that refers to 1002 close end 1002a, preferably is 130%-190%, more preferably is about 165%.The length range of the proximal part 1002a of broadening is that pectination drives the 1%-30% that refers to length, preferably is 5%-15%, more preferably is 8%.

Fixedly the size and shape of pectination actuator 230a is substantially similar to pectination actuator 209a, and is substantially similar to pectination by many and drives and to refer to that 1002 pectination actuator refers to that 1004 form.Particularly, every pectination drives and refers to that 1004 have broadening proximal part 1004a and narrow down far-end or a free end portion 1004b that free end portion 1002b the same the same with proximal part 1002a.

The back side that first holding electrode 420 is arranged on pectination drive rod 222 refers to that with the pectination driving 1004 is relative.Second holding electrode 421 connects into perpendicular to truss part 216, is parallel to pectination drive rod 222 and extends.Every electrode 420 and 421 is furnished with along its longitudinally-spaced finger-like extension 422.

Pectination actuator 209a, 230a can move between primary importance, the second place and the 3rd position.In primary importance, pectination drives and refers to that 1002,1004 is spaced apart, and holding electrode 420,421 is close to mutually; In the second place shown in Figure 32, pectination drives and refers to 1002,1004 just in the static mutual effect, and its free end is along the straight line setting that refers to perpendicular to the pectination driving extend; In the 3rd position, pectination drives and to refer to that 1002,1004 are interdigital state, thereby one group of pectination drives the distal portion that refers to and drives the broadening that refers to or the proximal part of expansion near another group pectination.Specifically, as pectination actuator 209a, when 230a is in the 3rd position, pectination drives the free end that refers to and just extends between the enlarged proximal end parts that the driving of group pectination refers to relatively.

In manipulating, the set up procedure of actuator 1002 as mentioned above.Usually, controller 111 is added in pectination actuator 109a, 230a two ends with the pulse voltage current potential, makes reciprocating member 712 with its resonance frequency vibration.Be preferably in when the pectination actuator is in its second place and add pulse signal, make pectination drive the medio-lateral instability minimum that refers between 1002,1004.During reverse half trip, electrostatic comb actuator 209a, 230a make reciprocating member 712 from its shown in Figure 32 unclamping or the centre position withdrawal.During the forward half trip, the restoring force of spring 217,561 makes reciprocating member 712 stretch out from its retracted position.In a single day reciprocating member moves to the extended position of its back, released position shown in Figure 32, and spring 217,561 also helps the reciprocating member withdrawal.

In a single day reciprocating member 712 vibrates its minimum amplitude, and first and second group electrostatic clamp electrode of available actuator 1001 remains on reciprocating member its full reduced time or full extended position.When reciprocating member is in its full reduced return and puts, can drive in complete interdigital pectination and refer to that 1002,1004 two ends add a voltage potential, the free end portion 1004b that enlarged proximal end parts 1002a, the 1004a that the pectination driving is referred to refers to respect to relative pectination driving, the effect that 1002b plays holding electrode.When reciprocating member 712 is in its full extended position, can add a voltage potential at pectination actuator 209a, 230a two ends, between anchor clamps 420,421, provide electrostatic attraction, reciprocating member 712 and mirror 103 are remained on its full extended position.Holding electrode to actuator 1001 when being preferably in one of reciprocating member 712 close its extreme positions and being preferably in its extreme position 5% applies voltage potential.Correspondingly, thus for to its full reduced time be 200 microns reciprocating member 712 with complete 100 microns total stroke length of extended position deflection, last 5 microns of stroke voltage potential is added between the relative holding electrode.

Actuator embodiment of the present invention can be provided, and the pectination that wherein has at least a pectination actuator to have length variations drives and refers to.Actuator 1021 among Figure 33 is examples.Actuator 1021 is substantially similar to actuator 602 and 1001, represents the identity element of actuator 602,1001 and 1021 with same label.The pectination actuator 209a of movable electrode assembly 209 has many and drives along the longitudinally-spaced elongated pectination of the length of pectination drive rod 221 and to refer to 1021 in the actuator 1021.Refer to that 1022 are substantially similar to above-mentioned finger 212, but the length that is meant changes.Particularly, refer to that 1022 length passes pectination drive rod 221 and be linear and increase.The longest pectination drive refer to 1022 basically with the pectination actuator 238 that is relatively fixed in every driving refer to that 211 length is identical.The shortest pectination drive refer to 1022 length range be the longest pectination drive refer to 1022 length 0% to being slightly less than 100%, be 5%-50% preferably, be more preferably about 10%.

Reciprocating member 712 can move to the second and the 3rd position from primary importance.In primary importance, pectination actuator 209a and 230a are spaced apart, and anchor clamps 420 and 421 are not in collaborative static and engage; In the second place shown in Figure 33, pectination drives and to refer to that 211 drive with the longest pectination and to refer to that 1022 refer to the straight line setting of extending along driving perpendicular to pectination; In the 3rd position, pectination drives and refers to that 211 and 1022 are in complete collaborative interdigitated.

In manipulating, the pectination driving refers to that the electrostatic attraction that 1022 length that change provide refers to that from the longest pectination driving the point that 1022 beginnings and pectination actuator refer to that 211 collaborative static engage refers to that to the shortest pectination driving 1022 beginnings and pectination driving refer to the point that 211 collaborative static engage, and the approximate linearity that is increases.The result, after relative pectination drives electrostatic attraction between referring to and increases to relative forward elastic force greater than spring 217,561, the further deflection of reciprocating member 712 further increases electrostatic attraction, puts thereby promptly mirror 103 is moved on to its full reduced return.Pectination drives and refers to that 1022 allow bigger electrostatic attraction, the spring 217,561 of big forward elastic force can be set, thereby improve the withdrawal frequency of actuator 1021.

Though pectination drives and to refer to that 1022 length is depicted as and be linear from the end to end of pectination actuator 209a and increase, and should be appreciated that, pectination can be set drive the pectination actuator that refers to other variation structure of size.In addition, should be appreciated that the pectination relative with pectination actuator 230a drives and refer to that 211 also can be equipped with different length, this is also included within the scope of the invention.

Actuator of the present invention can be equipped with bigger structure so that bigger power to be provided.This respect provides a kind of electrostatic microactuator 1201 that is substantially similar to actuator 501, and its central rigidity drive rod 1202 is substantially similar to connector truss 216 (seeing Figure 34).Drive rod 1202 moves above substrate 213 along the vertical central axis 1203 of actuator 1201.The identity element of representing actuator 501 and 1201 with same label.In actuator 1201, four the pectination driven units 208,210 that comprise be used for drive rod 1202 from its origin-location or resting position (Figure 34) be withdrawn into retracted position, four different pectination driven units 209,230 that comprise are used for drive rod 1202 is reached extended position from its resting position.In Figure 34, actuator 1201 upwards moves on to its extended position to moving down into its retracted position.

Pectination driven unit 208,210 is arranged on the relative side of drive rod 1202 and pectination driven unit 209,230.Four comb shape actuator 208a of the first movable electrode assembly 208,208b, 208c, 208d and movable drive rod 1202 form one, and vertically extend with drive rod, four pectination actuator 209a of the second movable electrode assembly 209,209b, 209c, 209d and this drive rod form one, and vertically extend along opposite direction and the drive rod of pectination actuator 208a, 208b, 208c, 208d.Four pectination actuator 210a, 210b, 210c, 210d of the first fixed electrode assembly 210 are contained on the substrate 213, with each pectination actuator 208a, 208b, 208c, 208d co-joint, four pectination actuator 230a, 230b, 230c, 230d of second electrode assemblie 230 are contained on the substrate 213, with each pectination actuator 209a, 209b, 209c, 209d co-joint.

Actuator 1201 usefulness silicon chips form, and are furnished with first and second spring 214,217, and they are designed to non-linear thereby are not " bending " shape under the deflection state being in static state.Each spring 214,217 is coupled to substrate 213 at its first end 243, is coupled to reciprocating member 109 at its second end 224.When reciprocating member 109 was in its inactive state in the centre of its withdrawal and extended position, the elastic part 224,225 of each spring 214,217 was crooked mutually in the actuator 1201.In this example, along with reciprocating member 109 moves on to its extended position from its origin-location, and the pectination of the second movable electrode assembly 209 and the second fixed electrode assembly 230 drives and refers to that 211,212 static engage overlaid afterwards, spring 217 from its prebuckling the origin-location stretching to linear position.Similarly, along with reciprocating member 109 moves on to its retracted position from its origin-location, and the first movable electrode assembly 208 refers to that with the pectination of the first fixed electrode assembly 210 211,212 engage the back overlaid, and spring 214 is stretching to linear position from the origin-location of its prebuckling.Under each situation, the side direction yaw stiffness of each spring part 224,225 is referring to that perpendicular to each pectination driving 211 direction has strengthened, and elastic part just becomes straight line in this direction like this.In this way, the side direction yaw stiffness of each spring and spring drive pectination and refer to that the 211 side direction restoring forces that apply refer to the lap between 211,212 along with pectination drives and increase.Therefore, spring 214,217 impels the pectination of the pectination driven unit of operation to drive to refer to 211 to enter adjacent pectination and drive the middle stable position that refers between 212, thereby pectination drives and refers to that 211,212 become interdigitated.Though spring 214,217 is straightened during along a direction deflection, reverse when mobile when reciprocating member 109, elastic part 224,225 just becomes more crooked mutually from its resting position.

The second group of folding cantilevers or the spring 561,562 that are arranged in the actuator 1201 are being similar to spring 214,217 basically aspect size and the composition.Each spring 561,562 is coupled to substrate 213 at its first end 563, is coupled to reciprocating member 109 at its second end 564.Every group of spring 561,562 comprises first and second spaced apart parallel elastic part 566,567 that connects with folded part 568.When spring 561,562 was in the released position, the moving direction that is substantially perpendicular to electrode assemblie 208,209 extended.Specifically, as shown in figure 34, when reciprocating member 109 was in the inactive state that it is withdrawn and extended position is middle, elastic part 566,567 mutual bendings were left.Along with the pectination of the first movable electrode assembly 208 and the first fixed electrode assembly 210 refers to 211,212 overlapping increases, and reciprocating member 109 moves on to its retracted position, and spring 562 is designed to stretching to linear position.Similarly, along with the pectination of the second movable electrode assembly 209 and the second fixed electrode assembly 230 refers to 211,212 overlapping increases, and reciprocating member 109 moves on to its extended position, spring 561 is designed to stretching to linear position, but reverse when mobile when reciprocating member 109, elastic part 566,567 becomes more crooked mutually and leaves from its resting position.The method of operation of spring 561,562 is identical with above-mentioned spring 214,217.

Spring 217,561 is arranged on the opposite end of drive rod 1,202 one side pectination driven units 209,230, and spring 214,562 is arranged on the opposite end of drive rod 1202 opposite side pectination driven units 208,210.The first end 243,563 of spring 214,217,561,562 is fixed to substrate 213 near vertical central axis 1203.Spring 217,561 usefulness suspension stiffness supporting 1210 is connected its each folded part 245,568, and supporting 1210 is substantially similar to the non-yielding prop 131 that extends betwixt and be parallel to drive rod 1202.Spring 214,562 usefulness suspension stiffness supporting 1212 is connected its each folded part 245,568, and supporting 1212 is substantially similar to the non-yielding prop 131 that extends betwixt and be parallel to drive rod 1202.In four spring embodiment of actuator 1201, a flexural spring of actuator 501 each end is preferably straight to 214 or 561 and 217 or 562, and another crooked spring is to bending at movable electrode assembly 208,209 and reciprocating member 109 each end deflection electrode place.As mentioned above, spring 214,217,561,562 and reciprocating member 109 all have yaw stiffness outside the high plane.

Actuator 1201 can be operated with above-mentioned actuator 501 same methods.Forward or upper end or drive rod 1202 are used for suitable target is applied power or promotion.Along with the lateral deflection of pectination actuator 208,209, spring 214,217,561,562, the stable side force that provides drive than interdigital pectination and refer to that the static side force that produces between 211,212 increases sooner.In Figure 34 example, with the stable side force of lateral deflection increase than static side force fast at least 10 times.The pectination driven unit that is arranged on drive rod 1202 both sides has increased the power of actuator 1201, need not to increase the length of actuator and the length of drive rod 1202.

Oppositely or withdrawal moving limiting device or limiter 1216 be arranged on the rear end of drive rod 1202, when reciprocating member 109 is in its retracted position, be used for engaging the fixed stop piece 1216 that is contained on the substrate 213.Should be appreciated that actuator 1201 can be equipped with or not be equipped with at the actuator of this paper above-mentioned anchor clamps 420,421 and/or other device, this is included in the scope of the present invention.

Figure 35 illustrates another Qptic micro switch embodiment that uses micro-actuator of the present invention.Illustrated Qptic micro switch 1301 usefulness microchips 1302 form, and the single input port 1303 of microchip is coupled to that at least one input light carries element or optical fiber 98 on the microchip 1302.Be coupled to along three of microchip 1,302 one side settings outlets 1304 and protect partially such as single mode that (PM) optical fiber 97 waits each suitable optical element.Figure 35 only shows optical fiber 97,98 parts.Microchip 1302 is furnished with 1303 raceway groove or the grooves of opening 1307 that are used to admit input optical fibre 98 in the input port, and microchip 1301 is exporting the raceway groove or the groove 1308 that are used to admit each output optical fibre 97 that 1304 sides are opened.The longitudinal axis 1311 is parallel to inlet 1303 along the passage of optical switch 1301 or passageway 1312 and extends perpendicular to outlet 1304.

Two actuators 1001 are arranged to longitudinally-spaced position along dotted line, and the dotted line and the longitudinal axis 1311 extend in parallel and be spaced from.The mirror 103 of first and second actuator 1001 passes through 90 ° of angles all with respect to the longitudinal axis 1311 inclination miter angles to reboot such as the suitable input laser beams such as linearly polarized laser bundle 191 that provided by inlet optical fiber 98.The mirror 103 of each actuator 1001 is contained on the carriage 219, and the laser beam of guiding actuator 1001 relative with actuator 1001 respectively exports 1304 by being set to respect to the longitudinal axis 1311 forward.By the reciprocating member 712 of each actuator 1001, every mirror 103 can deflect away from first or retracted position of laser beam 191 light paths and mirror 103 at mirror 103 and be between second or the extended position in laser beam 191 light paths and move.Fixed stop piece 292,293 restriction reciprocating members 712 move to determine the withdrawal and the extended position of mirror 103.Should be appreciated that optical switch 830 can be equipped with actuator 1001, be used for guided laser bundle 191 and move back that this is included in the scope of the present invention to this actuator.

Be substantially similar to the mirror 1316 of mirror 103, install to microchip 1302 securely with the carriage 1317 at first and second 1312 tops, passageway, actuator 1001 mirrors, 103 back.The method of operation of mirror 1316 is the same with mirror 103 basically, when the mirror 103 of first and second actuator 1001 all is in retracted position, is used to make laser beam 191 deflections by the 3rd delivery outlet 1304.Be arranged on the inboard of input port 1303 such as suitable lens such as conventional microminiature graded index collimating lenses 102, lens 102 are arranged between the inlet of every mirror 103,1316 and each groove 1303.With the above-mentioned same quadrat method that actuator is adopted, form Qptic micro switch 1301 and actuator 1001 thereof with silicon chip with substrate 213.

Though Qptic micro switch is described as two electrostatic microactuators 1001 of application, but should be appreciated that, can provide to be similar to Qptic micro switch 1301 or arbitrary other switch as herein described and to have and be less than two or more than the switch of the electrostatic microactuator of two types described herein, this is also included within the scope of the invention.

From foregoing description as can be seen, already provided optical switch or Qptic micro switch have been used at least one and have wherein been had the electrostatic microactuator of at least one pectination driven unit.In a simple embodiment (not shown), its Qptic micro switch is furnished with single electrostatic microactuator.Medio-lateral instability power in the pectination driven unit is reduced to minimum, and the resonance characteristic of pectination driven unit is used for realizing big deflection.In some embodiment, a plurality of electrostatic microactuators are aimed at along at least one microswitch passageway.This optical switch can be applicable to the magneto-optic data-storage system.

Though described the present invention with reference to the specific embodiment of pectination driving micro-actuator with the specific embodiment of the Qptic micro switch of using pectination driving micro-actuator, scope of the invention broadness must be enough to comprise the various embodiment that above-mentioned disclosure is made amendment, changed and substitutes.The characteristics of some embodiment can combine with the characteristics of other embodiment, and this is included in the scope of the present invention.In addition, above-mentioned holding electrode, anti-ly depart from the spring element relevant and can individually or join together to be applied to a more than actuator with other.The microswitch that this paper discloses can use the actuator of not being with the pectination driven unit.In addition, any microswitch of disclosing of this paper all can with various other micro-actuator couplings.Above-mentioned all the elements all can be applicable to magneto-optic Data Storage And Retrieval System or various other system that comprises communication system and network system.

Claims (46)

1. Qptic micro switch that uses with the laser beam that extends along a paths comprises: body, and it has one and is applicable to input port and a plurality of output port that receives described laser beam; At least one mirror that carries by body and at least one micromotor; Jockey, be used at least one mirror is coupled at least one micromotor, at least one micromotor moves the second place of the primary importance of at least one mirror outside laser beam path in the laser beam path thus, so that laser beam is caused one of output port, at least one micromotor has at least one static linear-motion actuator, is used for moving one of at least one mirror to the first and second position; And controller, it is coupled at least one micromotor on electric, be used for providing control signal to micromotor.

2. Qptic micro switch as claimed in claim 1, it is characterized in that, it is combined that it and a plurality of magneto optical disks surface, a plurality of air supported head and a plurality of output light carry element, each air supported head can move in the surface of a magneto optical disk, and output light carries one of element and is coupled to each air supported head.

3. Qptic micro switch as claimed in claim 2 is characterized in that, a plurality of magneto optical disks surface comprises the lamination of magneto optical disk, and each magneto optical disk has at least one magneto optical disk surface.

4. Qptic micro switch as claimed in claim 2, it is characterized in that, laser beam is reflected by one of magneto optical disk surface, the reflection lasering beam that has the polarization rotation with generation, described Qptic micro switch also comprises a miniature optical assembly that is carried by body, is used to measure the polarization rotation of described reflection lasering beam.

5. Qptic micro switch as claimed in claim 1, it is characterized in that, a plurality of mirrors and a plurality of micromotor comprise first group of a plurality of mirror and corresponding micromotor and second group of a plurality of mirror and corresponding micromotor, the path of laser beam can be extended between first group of a plurality of micromotor and second group of a plurality of micromotor, thus first group of a plurality of micromotor with respect to the path surface of laser beam to second group of a plurality of micromotor.

6. Qptic micro switch as claimed in claim 5, it is characterized in that, first group of a plurality of mirror and corresponding micromotor are provided with point-blank along first imaginary line, and second group of a plurality of mirror and corresponding micromotor are provided with point-blank along second imaginary line, and second imaginary line is parallel to the path of first imaginary line and laser beam and extends.

7. Qptic micro switch as claimed in claim 5, it is characterized in that, first group of a plurality of micromotor comprises at least two micromotors that are arranged side by side along first imaginary line, first imaginary line extends perpendicular to the path of laser beam, and second group of a plurality of micromotor comprises at least two micromotors that are arranged side by side along second imaginary line, and second imaginary line extends perpendicular to the path of laser beam.

8. Qptic micro switch as claimed in claim 5 is characterized in that, each speculum of first group and second group a plurality of mirrors all tends to along single direction guided laser bundle.

9. Qptic micro switch as claimed in claim 5, it is characterized in that, a plurality of mirrors and a plurality of micromotor comprise: the 3rd group of a plurality of mirrors and corresponding micromotor and the 4th group of a plurality of mirrors and corresponding micromotor, the path of laser beam can be extended between the 3rd group of a plurality of micromotors and the 4th group of micromotor, thus the 3rd group of a plurality of micromotor with respect to the path surface of laser beam to the 4th group of a plurality of micromotors; And the device that comprises an additional mirror and corresponding additional mini motor, be used for guided laser bundle selectively along in first path of extending between first group of a plurality of micromotor and the second group of a plurality of micromotor and second path of between the 3rd group of a plurality of micromotors and the 4th group of a plurality of micromotor, extending.

10. Qptic micro switch as claimed in claim 9 is characterized in that, first group and second group of a plurality of mirror and the 3rd group and the 4th group of a plurality of mirrors all tend to along single direction guided laser bundle.

11. Qptic micro switch as claimed in claim 1, it is characterized in that, a plurality of mirrors and a plurality of micromotor comprise at least one first mirror and corresponding first micromotor and at least one second mirror and corresponding second micromotor, the path of laser beam can be extended between at least one first micromotor and at least one second micromotor, thereby at least one first micromotor with respect to the path surface of laser beam at least one second micromotor, and a plurality of mirrors and a plurality of micromotor also comprise at least one the 3rd mirror and corresponding the 3rd micromotor and at least one the 4th mirror and corresponding the 4th micromotor, the path of laser beam can be extended between at least one the 3rd micromotor and at least one the 4th micromotor, thereby at least one the 3rd micromotor with respect to the path surface of laser beam at least one the 4th micromotor, and the device that comprises an additional mirror and corresponding additional mini motor, be used for selectively the guided laser bundle along in first path of extending between at least one first micromotor and at least one second micromotor and second path of between at least one the 3rd micromotor and at least one the 4th micromotor, extending.

12. Qptic micro switch as claimed in claim 1 is characterized in that, a plurality of micromotors comprise at least two micromotors that are arranged side by side along an imaginary line that extends perpendicular to the path of laser beam.

13. Qptic micro switch as claimed in claim 6 is characterized in that, at least 12 mirrors and corresponding micromotor are set, and is used for selectively along a plurality of parallel direction guided laser bundles.

14. Qptic micro switch as claimed in claim 1 is characterized in that, each mirror comprises silicon layer and is attached to the reflecting material layer of described silicon layer that described thus silicon layer provides low roughness and highly smooth surface.

15. Qptic micro switch as claimed in claim 14 is characterized in that, each mirror comprises that also at least one pair of covers the dielectric layer of reflecting material layer, and at least one pair of dielectric layer comprises the ground floor of dielectric materials and the second layer of high dielectric material.

16. Qptic micro switch as claimed in claim 1, it is characterized in that, at least one micromotor comprises the mobile retaining device that the corresponding mirror that is used to be limited in second place place moves, and improves the repeatability of described Qptic micro switch work with mobile retaining device.

17. Qptic micro switch as claimed in claim 16 is characterized in that, also comprises thread guide devices, is used on electric mobile retaining device being connected to controller, like this, mobile retaining device allows controller to monitor when mirror is in the second place.

18. a Qptic micro switch that uses with the laser beam that extends along a paths comprises: the body with a plurality of delivery outlets; The a plurality of mirrors that carry by body; Be coupled to the device of each described mirror, be used for electrostatic means outside laser beam path primary importance and the second place in the laser beam path between drive mirror, so that laser beam is caused one of delivery outlet selectively; And controller, it is coupled to the device that is used for it is provided control signal on electric.

19. Qptic micro switch as claimed in claim 18, it is characterized in that, it is combined that a plurality of output light that it is used for receiving selectively laser beam with each equipped at outlet port that is arranged on body carry element, a plurality of air supported head and a plurality of optical disc surface, and air supported head can move above optical disc surface separately.

20. an electrostatic microactuator is characterized in that it comprises: substrate; At least one pectination driven unit, its first and second pectination actuator all are furnished with the pectination driving and refer to that the first pectination actuator is contained on the substrate; First and second isolated beam shape elastic component, at least one pectination driven unit is arranged between first and second beam shape elastic component, the second pectination actuator covers substrate, the first end of each first and second beam shape elastic component is fixed to substrate, the second end is fixed to the second pectination actuator, the second pectination actuator is suspended on the substrate top, and the second pectination actuator can drive in the pectination of first and second pectination actuator and refer to that not interdigital fully primary importance and the driving of described pectination refer to move between the interdigital basically second place.

21. electrostatic microactuator as claimed in claim 20, it is characterized in that, first and second beam shape elastic component all has yaw stiffness on the direction vertical with the second pectination actuator moving direction, each first and second beam shape elastic component can move between first and second position, in primary importance, when the second pectination actuator is in primary importance, beam shape elastic component is a non-linear structure, in the second place, when the second pectination actuator is in the second place, beam shape elastic component is the linear structure that extends perpendicular to moving direction, thereby when the second pectination actuator was in the second place, it is maximum that the yaw stiffness of first and second beam shape elastic component on the direction vertical with moving direction becomes.

22. electrostatic microactuator as claimed in claim 20 is characterized in that, the second pectination actuator only is fixed to substrate with first and second beam shape elastic component.

23. electrostatic microactuator as claimed in claim 20, it is characterized in that, the second pectination actuator is under the effect of first and second beam shape elastic component power, can move on to primary importance from the second place, micro-actuator does not have additional pectination driven unit, first and second pectination actuator of described pectination driven unit has pectination driving separately to refer to, the second pectination actuator of wherein said additional pectination driven unit is movable to a certain position, wherein, the pectination of the pectination driven unit of at first naming refers to that when spaced apart, the pectination of described additional pectination driven unit drives fourchette and refers to when driving.

24. electrostatic microactuator as claimed in claim 20, it is characterized in that, also comprise first and second electrostatic clamp electrode of extending perpendicular to the second pectination actuator moving direction, first and second holding electrode can move between first and second position, in primary importance, when the second pectination actuator is in the second place, holding electrode is spaced apart, in the second place, when the second pectination actuator is in primary importance, holding electrode is close to, and therefore when voltage potential was added in the holding electrode that places the second place that is close to mutually, holding electrode helped the second pectination actuator is remained on primary importance.

25. electrostatic microactuator as claimed in claim 20, it is characterized in that, also comprise additional pectination driven unit, it is arranged between the first and second beam shape spring parts, and have the first and second pectination actuators, each first and second pectination actuator of additional pectination driven unit are provided with the pectination driving and refer to, the first pectination actuator of additional pectination driven unit is installed on the substrate, the second pectination actuator of additional pectination driven unit is stacked on the substrate, and be suspended on the substrate top by the first and second beam shape spring parts, the second pectination actuator of pectination driven unit can move between the primary importance and the second place, in primary importance, the pectination of the first and second pectination actuators of additional pectination driven unit drives and refers to be spaced apart from each other, in the second place, the pectination driving of the first and second pectination actuators of additional pectination driven unit refers to interlaced with each other, when the second pectination actuator of pectination driven unit of at first name during in primary importance, the second pectination actuator of additional pectination driven unit is in the second place.

26. electrostatic microactuator as claimed in claim 25, it is characterized in that, also comprise the first and second electrostatic clamp electrode groups, they extend along the direction vertical with the second pectination actuator moving direction, each first and second holding electrode group has first and second holding electrodes that can move between the primary importance and the second place, in primary importance, holding electrode is spaced apart from each other, and in the second place, holding electrode is close mutually, when the second pectination actuator of pectination driven unit of at first name during in primary importance, the first holding electrode group is close mutually, and when the second pectination actuator of additional pectination driven unit during in primary importance, the second holding electrode group is close mutually, when being between the mutually close described holding electrode of the second place voltage potential, every group of holding electrode is convenient to keep the second pectination actuator in their primary importance thus.

27. electrostatic microactuator as claimed in claim 20 is characterized in that, also comprises micromotor, it is normally closed, is used for second actuator is locked in its first and second position.

28. electrostatic microactuator as claimed in claim 20, it is characterized in that, the pectination of each first and second pectination actuator drives and refers to have proximal part and distal portions, each proximal part and distal portions all have width, and the width of each distal portions is less than the width of relevant proximal part.

29. electrostatic microactuator as claimed in claim 20 is characterized in that, the pectination of at least one first and second pectination actuator drives and refers to have different length.

30. electrostatic microactuator as claimed in claim 20 is characterized in that, also comprises the mobile mobile retaining device that is restricted to the second place with the second pectination actuator, thereby mobile retaining device helps the repeatability of mini drive operation.

31. electrostatic microactuator as claimed in claim 30, it is characterized in that, also comprise controller and thread guide devices, be used to be electrically connected mobile retaining device to controller, mobile thus retaining device allows controller to monitor when the second pectination actuator is in the second place.

32. electrostatic microactuator as claimed in claim 20, it is characterized in that, the pectination of the second pectination actuator drives and refers to and can move in the half way from primary importance to the second place, in primary importance, the pectination driving of the first and second pectination actuators refers to spaced apart, in the second place, described pectination drives the finger bifurcated finger, and the pectination of the second pectination actuator refers to and can move in the half way of primary importance to the three positions, in the 3rd position, described pectination driving refers to interdigital fully, controller comprises and ought refer to the 3rd position with the pectination driving that impels the second pectination actuator only at the device that is used for providing voltage potential during the part of half way between the first and second pectination actuators.

33. electrostatic microactuator as claimed in claim 34, it is characterized in that controller comprises the device that was used for providing voltage potential when described pectination driving finger branch joint before described pectination actuator engages fully between the first and second pectination actuators.

34. the micro-actuator of laying foundations as claimed in claim 32, it is characterized in that, also comprise mirror and be used for mirror is coupled at least one pectination driven unit jockey, jockey comprises jagged holder part within it, mirror has the spigot that is used for being arranged in recess that is provided with thereon, so that the aligning of mirror on the holder part.

35. electrostatic microactuator as claimed in claim 20, it is characterized in that, also comprise mirror and be used for mirror is coupled at least one pectination driven unit jockey, jockey comprises the holder part that is provided with the container that holds mirror, be used for that mirror is fixed on the bonder in the container and be removably mounted on keeper on the substrate, and being used for fixedly is being being held in container mirror.

36. method that is used to operate the pectination driven unit, the pectination assembly has the first and second pectination actuators, and the pectination driving that the first and second pectination actuators have separately refers to, wherein, the second pectination actuator can move between the primary importance and the second place with respect to the first pectination actuator, in primary importance, the pectination of the first and second pectination actuators drives to refer to it is isolated, in the second place, the pectination of the first and second pectination actuators drives to refer to it is interdigital, it is characterized in that, comprise the steps: the second pectination actuator that when resonance, vibrates, so that the second pectination actuator is moved to the second place, and during fixing, mirror is remained in the container.

37. method as claimed in claim 36 is characterized in that, keeps step to comprise with electrostatic force the second pectination actuator is remained in the second place.

38. method as claimed in claim 37 is characterized in that, keeps step to comprise with mechanical force the second pectination actuator is remained in the second place.

39. method as claimed in claim 38 is characterized in that, also comprises from the second place discharging the second pectination actuator, moves to the step of primary importance to allow the second pectination actuator.

40. an electrostatic microactuator is characterized in that it comprises: substrate; At least one pectination driven unit, its first and second pectination actuator all are furnished with the pectination driving and refer to that the first pectination actuator is contained on the substrate, and the second pectination actuator covers substrate; And at least one beam shape elastic component, it has the first end that is fixed to substrate and is fixed to the second end of the second pectination actuator, the second pectination actuator can move along the direction between the primary importance and the second place, in primary importance, the pectination driving of the first and second pectination actuators refers in fact not exclusively interdigital, and in the second place, the pectination driving of the first and second pectination actuators refers to interdigital in fact fully, at least one beam shape elastic component has yaw stiffness along the direction vertical with the moving direction of the second pectination actuator, and can between the primary importance and the second place, move, in primary importance, at least one beam shape elastic component is in the non-linear structure state, and when the second pectination actuator occurs during in primary importance, and in the second place, at least one beam shape elastic component is in the linear structure state that extends along perpendicular to moving direction, and when the second pectination actuator occurs during in the second place, thus when the second pectination actuator when its primary importance moves to its second place, improved the yaw stiffness of at least one beam shape elastic component along the direction vertical with moving direction.

41. electrostatic microactuator as claimed in claim 40, it is characterized in that, the second pectination actuator can move along the direction between the primary importance and the second place, in primary importance, the pectination of the first and second pectination actuators drives to refer to it is isolated, in the second place, the driving of the pectination of the first and second pectination actuators refers to interdigital in fact fully.

42. electrostatic microactuator as claimed in claim 41, it is characterized in that, also has additional beam shape elastic component, it has the first end that is fixed to substrate and is fixed to the second end of the second pectination actuator, additional beam shape elastic component has along the yaw stiffness of the direction vertical with the second pectination actuator moving direction, and can between the primary importance and the second place, move, in primary importance, additional beam shape elastic component is in the non-linear structure state, and when the second pectination actuator occurs during in primary importance, and in the second place, additional beam shape elastic component is in the linear structure state that extends along perpendicular to moving direction, and occurs during in the second place when the second pectination actuator.

43. electrostatic microactuator as claimed in claim 41, it is characterized in that, also comprise first and second electrostatic clamp electrode of extending perpendicular to the second pectination actuator moving direction, first and second holding electrodes can move between the primary importance and the second place, in primary importance, holding electrode is spaced apart, and when the second pectination actuator occurs during in the second place, in second the unknown, holding electrode is close mutually, and when the second pectination actuator occurs during in primary importance, when applying voltage potential between the holding electrode close mutually in the second place, holding electrode is convenient to make the second pectination actuator to remain on primary importance thus.

44. an electrostatic microactuator is characterized in that it comprises: substrate; At least one pectination driven unit, its first and second pectination actuator all is furnished with the pectination driving and refers to, the first pectination actuator is contained on the substrate, and the second pectination actuator covers substrate, and can extend along the direction between the primary importance and the second place, in primary importance, the driving of the comb shape of the first and second comb shape actuators refers in fact not exclusively interdigital, and in the second place, the driving of the pectination of the first and second pectination actuators refers to interdigital in fact fully; And have the first end that is fixed to substrate and be fixed to the elastic device of the second end of the second pectination actuator, be used to provide yaw stiffness along the direction vertical with the moving direction of the second pectination actuator, when the second pectination actuator when its primary importance moves to its second place, this yaw stiffness increases.

45. electrostatic microactuator as claimed in claim 44 is characterized in that comprising the device that leaves the first and second pectination actuators, is used for electrostatic means the second pectination actuator being fixed on primary importance.

46. electrostatic microactuator as claimed in claim 45, it is characterized in that comprising principle, be used for the device that the second pectination actuator is fixed on primary importance being comprised first and second holding electrodes with electrostatic means, they can move between the primary importance and the second place, and in primary importance, holding electrode is spaced apart, and when the second pectination actuator occurs during in the second place, in the second place, holding electrode is close mutually, and occurs during in primary importance when the second pectination actuator.

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