CA2248803A1 - Os rectifying schottky and ohmic junction and w/wc/tic ohmic contacts on sic - Google Patents

Os rectifying schottky and ohmic junction and w/wc/tic ohmic contacts on sic Download PDF

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Publication number
CA2248803A1
CA2248803A1 CA 2248803 CA2248803A CA2248803A1 CA 2248803 A1 CA2248803 A1 CA 2248803A1 CA 2248803 CA2248803 CA 2248803 CA 2248803 A CA2248803 A CA 2248803A CA 2248803 A1 CA2248803 A1 CA 2248803A1
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Canada
Prior art keywords
layer
substrate
semiconductor device
sic semiconductor
contact
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Abandoned
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CA 2248803
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English (en)
French (fr)
Inventor
James D. Parsons
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Caldus Semiconductor Inc
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Individual
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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
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    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13063—Metal-Semiconductor Field-Effect Transistor [MESFET]
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    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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    • H01L2924/1901—Structure
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  • Engineering & Computer Science (AREA)
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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thyristors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
CA 2248803 1996-03-07 1997-03-04 Os rectifying schottky and ohmic junction and w/wc/tic ohmic contacts on sic Abandoned CA2248803A1 (en)

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US6150246A (en) 2000-11-21
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US5929523A (en) 1999-07-27
JP2000507043A (ja) 2000-06-06
AU2069497A (en) 1997-09-22
EP0944917A1 (en) 1999-09-29
WO1997033308A1 (en) 1997-09-12
CN1216635A (zh) 1999-05-12

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