CA2115062C - Acid bath for the galvanic deposition of copper, and the use of such a bath - Google Patents

Acid bath for the galvanic deposition of copper, and the use of such a bath Download PDF

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Publication number
CA2115062C
CA2115062C CA002115062A CA2115062A CA2115062C CA 2115062 C CA2115062 C CA 2115062C CA 002115062 A CA002115062 A CA 002115062A CA 2115062 A CA2115062 A CA 2115062A CA 2115062 C CA2115062 C CA 2115062C
Authority
CA
Canada
Prior art keywords
aqueous acid
acid bath
bath according
liter
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002115062A
Other languages
English (en)
French (fr)
Other versions
CA2115062A1 (en
Inventor
Wolfgang Dahms
Horst Westphal
Michael Jonat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Atotech Deutschland GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland GmbH and Co KG filed Critical Atotech Deutschland GmbH and Co KG
Publication of CA2115062A1 publication Critical patent/CA2115062A1/en
Application granted granted Critical
Publication of CA2115062C publication Critical patent/CA2115062C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Chemically Coating (AREA)
CA002115062A 1991-08-07 1992-07-22 Acid bath for the galvanic deposition of copper, and the use of such a bath Expired - Fee Related CA2115062C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DEP4126502.5 1991-08-07
DE4126502A DE4126502C1 (US06826419-20041130-M00005.png) 1991-08-07 1991-08-07
PCT/DE1992/000605 WO1993003204A1 (de) 1991-08-07 1992-07-22 Saures bad zur galvanischen abscheidung von kupfer und dessen verwendung

Publications (2)

Publication Number Publication Date
CA2115062A1 CA2115062A1 (en) 1993-02-18
CA2115062C true CA2115062C (en) 2005-11-22

Family

ID=6438067

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002115062A Expired - Fee Related CA2115062C (en) 1991-08-07 1992-07-22 Acid bath for the galvanic deposition of copper, and the use of such a bath

Country Status (8)

Country Link
US (1) US5433840A (US06826419-20041130-M00005.png)
EP (1) EP0598763B1 (US06826419-20041130-M00005.png)
JP (1) JP3121346B2 (US06826419-20041130-M00005.png)
AT (1) ATE131546T1 (US06826419-20041130-M00005.png)
CA (1) CA2115062C (US06826419-20041130-M00005.png)
DE (2) DE4126502C1 (US06826419-20041130-M00005.png)
ES (1) ES2082486T3 (US06826419-20041130-M00005.png)
WO (1) WO1993003204A1 (US06826419-20041130-M00005.png)

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US5849171A (en) * 1990-10-13 1998-12-15 Atotech Deutschland Gmbh Acid bath for copper plating and process with the use of this combination
JP3313277B2 (ja) * 1995-09-22 2002-08-12 古河サーキットフォイル株式会社 ファインパターン用電解銅箔とその製造方法
WO1998036042A1 (en) * 1997-02-14 1998-08-20 The Procter & Gamble Company Liquid hard-surface cleaning compositions based on specific dicapped polyalkylene glycols
US6460548B1 (en) * 1997-02-14 2002-10-08 The Procter & Gamble Company Liquid hard-surface cleaning compositions based on specific dicapped polyalkylene glycols
US5863410A (en) * 1997-06-23 1999-01-26 Circuit Foil Usa, Inc. Process for the manufacture of high quality very low profile copper foil and copper foil produced thereby
KR100694562B1 (ko) * 1998-08-11 2007-03-13 가부시키가이샤 에바라 세이사꾸쇼 기판 도금방법 및 장치
EP1118696A4 (en) * 1998-09-03 2007-10-17 Ebara Corp METHOD AND DEVICE FOR COATING SUBSTRATES
US6444110B2 (en) * 1999-05-17 2002-09-03 Shipley Company, L.L.C. Electrolytic copper plating method
JP2001073182A (ja) * 1999-07-15 2001-03-21 Boc Group Inc:The 改良された酸性銅電気メッキ用溶液
WO2001011932A1 (fr) * 1999-08-06 2001-02-15 Ibiden Co., Ltd. Solution de galvanoplastie, procede de fabrication d'une carte imprimee multicouche au moyen de ladite solution, et carte imprimee multicouche
LU90532B1 (en) * 2000-02-24 2001-08-27 Circuit Foil Luxembourg Trading Sarl Comosite copper foil and manufacturing method thereof
US6491806B1 (en) 2000-04-27 2002-12-10 Intel Corporation Electroplating bath composition
US6361673B1 (en) 2000-06-27 2002-03-26 Ga-Tek Inc. Electroforming cell
US6679983B2 (en) * 2000-10-13 2004-01-20 Shipley Company, L.L.C. Method of electrodepositing copper
DE10058896C1 (de) * 2000-10-19 2002-06-13 Atotech Deutschland Gmbh Elektrolytisches Kupferbad, dessen Verwendung und Verfahren zur Abscheidung einer matten Kupferschicht
JP3899313B2 (ja) * 2000-10-19 2007-03-28 アトーテヒ ドイッチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング 銅浴および無光沢銅被膜の電着方法
US6797146B2 (en) * 2000-11-02 2004-09-28 Shipley Company, L.L.C. Seed layer repair
US20020195351A1 (en) * 2001-04-12 2002-12-26 Chang Chun Plastics Co., Ltd. Copper electroplating composition for integrated circuit interconnection
JP2003105584A (ja) * 2001-07-26 2003-04-09 Electroplating Eng Of Japan Co 微細配線埋め込み用銅メッキ液及びそれを用いた銅メッキ方法
US6736954B2 (en) * 2001-10-02 2004-05-18 Shipley Company, L.L.C. Plating bath and method for depositing a metal layer on a substrate
US6652731B2 (en) * 2001-10-02 2003-11-25 Shipley Company, L.L.C. Plating bath and method for depositing a metal layer on a substrate
US6911068B2 (en) * 2001-10-02 2005-06-28 Shipley Company, L.L.C. Plating bath and method for depositing a metal layer on a substrate
EP1310582A1 (en) * 2001-11-07 2003-05-14 Shipley Company LLC Process for electrolytic copper plating
US6676823B1 (en) * 2002-03-18 2004-01-13 Taskem, Inc. High speed acid copper plating
DE10261852B3 (de) 2002-12-20 2004-06-03 Atotech Deutschland Gmbh Gemisch oligomerer Phenaziniumverbindungen und dessen Herstellungsverfahren, saures Bad zur elektrolytischen Abscheidung eines Kupferniederschlages, enthaltend die oligomeren Phenaziniumverbindungen, sowie Verfahren zum elektrolytischen Abscheiden eines Kupferniederschlages mit einem das Gemisch enthaltenden Bad
DE60336539D1 (de) † 2002-12-20 2011-05-12 Shipley Co Llc Methode zum Elektroplattieren mit Umkehrpulsstrom
US6851200B2 (en) * 2003-03-14 2005-02-08 Hopkins Manufacturing Corporation Reflecting lighted level
DE102004045451B4 (de) * 2004-09-20 2007-05-03 Atotech Deutschland Gmbh Galvanisches Verfahren zum Füllen von Durchgangslöchern mit Metallen, insbesondere von Leiterplatten mit Kupfer
TW200632147A (US06826419-20041130-M00005.png) 2004-11-12 2006-09-16
US20070158199A1 (en) * 2005-12-30 2007-07-12 Haight Scott M Method to modulate the surface roughness of a plated deposit and create fine-grained flat bumps
US20070178697A1 (en) * 2006-02-02 2007-08-02 Enthone Inc. Copper electrodeposition in microelectronics
KR101335480B1 (ko) 2006-03-30 2013-12-02 아토테크 도이칠란드 게엠베하 홀 및 캐비티를 금속으로 충전하기 위한 전기분해 방법
JP2007327127A (ja) * 2006-06-09 2007-12-20 Daiwa Fine Chemicals Co Ltd (Laboratory) 銀めっき方法
US7905994B2 (en) 2007-10-03 2011-03-15 Moses Lake Industries, Inc. Substrate holder and electroplating system
US8262894B2 (en) 2009-04-30 2012-09-11 Moses Lake Industries, Inc. High speed copper plating bath
JP5955785B2 (ja) * 2010-03-18 2016-07-20 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ レベリング剤を含有する金属電解めっき用組成物
US8735580B2 (en) 2010-09-24 2014-05-27 Andrew M. Krol Method of producing polymeric phenazonium compounds
US8691987B2 (en) 2010-09-24 2014-04-08 Andrew M. Krol Method of producing polymeric phenazonium compounds
CN103422079B (zh) * 2012-05-22 2016-04-13 比亚迪股份有限公司 一种化学镀铜液及其制备方法
EP2735627A1 (en) * 2012-11-26 2014-05-28 ATOTECH Deutschland GmbH Copper plating bath composition
EP3074552A1 (en) * 2013-11-25 2016-10-05 Enthone, Inc. Electrodeposition of copper
DE102014208733A1 (de) * 2014-05-09 2015-11-12 Dr. Hesse Gmbh & Cie Kg Verfahren zum elektrolytischen Abscheiden von Kupfer aus Wasser basierenden Elektrolyten
JP6733314B2 (ja) * 2015-09-29 2020-07-29 三菱マテリアル株式会社 高純度銅電解精錬用添加剤と高純度銅製造方法
CN113166962A (zh) * 2018-11-07 2021-07-23 科文特亚股份有限公司 缎面铜浴和沉积缎面铜层的方法
JP7374556B2 (ja) 2019-11-29 2023-11-07 ダイハツ工業株式会社 変速機

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA633957A (en) * 1962-01-02 Unipak Cartons Ltd. Container carton and cellular structure therefor
NL291575A (US06826419-20041130-M00005.png) * 1962-04-16
DE1293749B (de) * 1965-04-24 1969-04-30 Hoechst Ag Verfahren zur Aufarbeitung der bei der Herstellung von Sorbinsaeure durch thermische Polyesterspaltung entstandenen waessrigen Polyglykoldialkylaetherloesung
DE2028803C3 (de) * 1970-06-06 1980-08-14 Schering Ag, 1000 Berlin Und 4619 Bergkamen Polymere Phenazoniumverbindungen
US3804729A (en) * 1972-06-19 1974-04-16 M & T Chemicals Inc Electrolyte and process for electro-depositing copper
DE2746938A1 (de) * 1977-10-17 1979-04-19 Schering Ag Saures galvanisches kupferbad
FR2510145B1 (fr) * 1981-07-24 1986-02-07 Rhone Poulenc Spec Chim Additif pour bain de cuivrage electrolytique acide, son procede de preparation et son application au cuivrage des circuits imprimes
AU554236B2 (en) * 1983-06-10 1986-08-14 Omi International Corp. Electrolyte composition and process for electrodepositing copper
DE3722778A1 (de) * 1987-07-09 1989-03-09 Raschig Ag Polyalkylenglykol-naphthyl-3-sulfopropyl- diether und deren salze, verfahren zur herstellung dieser verbindungen und ihre verwendung als netzmittel in der galvanotechnik
US5328589A (en) * 1992-12-23 1994-07-12 Enthone-Omi, Inc. Functional fluid additives for acid copper electroplating baths

Also Published As

Publication number Publication date
EP0598763A1 (de) 1994-06-01
DE4126502C1 (US06826419-20041130-M00005.png) 1993-02-11
DE59204703D1 (de) 1996-01-25
EP0598763B1 (de) 1995-12-13
ES2082486T3 (es) 1996-03-16
JP3121346B2 (ja) 2000-12-25
ATE131546T1 (de) 1995-12-15
CA2115062A1 (en) 1993-02-18
WO1993003204A1 (de) 1993-02-18
JPH07505187A (ja) 1995-06-08
US5433840A (en) 1995-07-18

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