DE60336539D1 - Methode zum Elektroplattieren mit Umkehrpulsstrom - Google Patents

Methode zum Elektroplattieren mit Umkehrpulsstrom

Info

Publication number
DE60336539D1
DE60336539D1 DE60336539T DE60336539T DE60336539D1 DE 60336539 D1 DE60336539 D1 DE 60336539D1 DE 60336539 T DE60336539 T DE 60336539T DE 60336539 T DE60336539 T DE 60336539T DE 60336539 D1 DE60336539 D1 DE 60336539D1
Authority
DE
Germany
Prior art keywords
electroplating
pulse current
reversed pulse
reversed
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60336539T
Other languages
English (en)
Inventor
Leon R Barstad
Thomas Buckley
Raymond Cruz
Trevor Goodrick
Gary Hamm
Mark J Kapeckas
Katie Price
Erik Reddington
Wade Sonnenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm and Haas Electronic Materials LLC
Original Assignee
Shipley Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32990583&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60336539(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Shipley Co LLC filed Critical Shipley Co LLC
Application granted granted Critical
Publication of DE60336539D1 publication Critical patent/DE60336539D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/38—Electroplating: Baths therefor from solutions of copper

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
DE60336539T 2002-12-20 2003-12-18 Methode zum Elektroplattieren mit Umkehrpulsstrom Expired - Lifetime DE60336539D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US43597602P 2002-12-20 2002-12-20

Publications (1)

Publication Number Publication Date
DE60336539D1 true DE60336539D1 (de) 2011-05-12

Family

ID=32990583

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60336539T Expired - Lifetime DE60336539D1 (de) 2002-12-20 2003-12-18 Methode zum Elektroplattieren mit Umkehrpulsstrom

Country Status (7)

Country Link
US (2) US20050016858A1 (de)
EP (1) EP1475463B2 (de)
JP (1) JP4342294B2 (de)
KR (1) KR101085005B1 (de)
CN (1) CN1540040B (de)
DE (1) DE60336539D1 (de)
TW (1) TWI296014B (de)

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CN103668370A (zh) * 2013-12-19 2014-03-26 潮州市连思科技发展有限公司 一种光盘脉冲电镀方法
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TWI664057B (zh) 2015-06-29 2019-07-01 美商聖高拜磨料有限公司 研磨物品及形成方法
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CN106782980B (zh) * 2017-02-08 2018-11-13 包头天和磁材技术有限责任公司 永磁材料的制造方法
JP7087760B2 (ja) * 2018-07-18 2022-06-21 住友金属鉱山株式会社 銅張積層板
US20210172082A1 (en) * 2019-12-10 2021-06-10 Rohm And Haas Electronic Materials Llc Acidic aqueous binary silver-bismuth alloy electroplating compositions and methods

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Also Published As

Publication number Publication date
TWI296014B (en) 2008-04-21
EP1475463A2 (de) 2004-11-10
JP2004204351A (ja) 2004-07-22
TW200424330A (en) 2004-11-16
CN1540040B (zh) 2012-04-04
EP1475463A3 (de) 2006-04-12
JP4342294B2 (ja) 2009-10-14
CN1540040A (zh) 2004-10-27
EP1475463B1 (de) 2011-03-30
US20060081475A1 (en) 2006-04-20
KR20040055684A (ko) 2004-06-26
EP1475463B2 (de) 2017-03-01
KR101085005B1 (ko) 2011-11-21
US20050016858A1 (en) 2005-01-27

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