CA2113019A1 - Methode integree de sciage partiel - Google Patents

Methode integree de sciage partiel

Info

Publication number
CA2113019A1
CA2113019A1 CA002113019A CA2113019A CA2113019A1 CA 2113019 A1 CA2113019 A1 CA 2113019A1 CA 002113019 A CA002113019 A CA 002113019A CA 2113019 A CA2113019 A CA 2113019A CA 2113019 A1 CA2113019 A1 CA 2113019A1
Authority
CA
Canada
Prior art keywords
wafer
streets
sawing process
integrated partial
partial sawing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002113019A
Other languages
English (en)
Other versions
CA2113019C (fr
Inventor
Michael A. Mignardi
Rafael Cesar Alfaro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Michael A. Mignardi
Rafael Cesar Alfaro
Texas Instruments Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Michael A. Mignardi, Rafael Cesar Alfaro, Texas Instruments Incorporated filed Critical Michael A. Mignardi
Publication of CA2113019A1 publication Critical patent/CA2113019A1/fr
Application granted granted Critical
Publication of CA2113019C publication Critical patent/CA2113019C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00865—Multistep processes for the separation of wafers into individual elements
    • B81C1/00896—Temporary protection during separation into individual elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
    • B28D5/0023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rectilinearly
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0041—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing the workpiece being brought into contact with a suitably shaped rigid body which remains stationary during breaking
    • B28D5/0047—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing the workpiece being brought into contact with a suitably shaped rigid body which remains stationary during breaking using fluid or gas pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H01L21/3043—Making grooves, e.g. cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/028—Dicing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y10T156/1062—Prior to assembly
    • Y10T156/1064—Partial cutting [e.g., grooving or incising]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/10—Methods
    • Y10T225/12—With preliminary weakening

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
  • Micromachines (AREA)
CA 2113019 1993-01-07 1994-01-07 Methode integree de sciage partiel Expired - Fee Related CA2113019C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/001,378 US5393706A (en) 1993-01-07 1993-01-07 Integrated partial sawing process
US001,378 1993-01-07

Publications (2)

Publication Number Publication Date
CA2113019A1 true CA2113019A1 (fr) 1994-07-08
CA2113019C CA2113019C (fr) 2005-03-29

Family

ID=21695744

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2113019 Expired - Fee Related CA2113019C (fr) 1993-01-07 1994-01-07 Methode integree de sciage partiel

Country Status (6)

Country Link
US (2) US5393706A (fr)
EP (1) EP0610657B1 (fr)
JP (1) JPH0745563A (fr)
CA (1) CA2113019C (fr)
DE (1) DE69430457T2 (fr)
TW (1) TW291570B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6117347A (en) * 1996-07-10 2000-09-12 Nec Corporation Method of separating wafers into individual die

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5445559A (en) * 1993-06-24 1995-08-29 Texas Instruments Incorporated Wafer-like processing after sawing DMDs
US5580831A (en) * 1993-07-28 1996-12-03 Fujitsu Limited Sawcut method of forming alignment marks on two faces of a substrate
JPH07111254A (ja) * 1993-10-12 1995-04-25 Sumitomo Electric Ind Ltd 半導体装置の製造方法
JP3156896B2 (ja) * 1994-01-28 2001-04-16 富士通株式会社 半導体装置の製造方法およびかかる製造方法により製造された半導体装置
US5516728A (en) * 1994-03-31 1996-05-14 At&T Corp. Process for fabircating an integrated circuit
US5654204A (en) * 1994-07-20 1997-08-05 Anderson; James C. Die sorter
US5521125A (en) * 1994-10-28 1996-05-28 Xerox Corporation Precision dicing of silicon chips from a wafer
US5597767A (en) * 1995-01-06 1997-01-28 Texas Instruments Incorporated Separation of wafer into die with wafer-level processing
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US5882988A (en) * 1995-08-16 1999-03-16 Philips Electronics North America Corporation Semiconductor chip-making without scribing
US5668062A (en) * 1995-08-23 1997-09-16 Texas Instruments Incorporated Method for processing semiconductor wafer with reduced particle contamination during saw
US6083811A (en) * 1996-02-07 2000-07-04 Northrop Grumman Corporation Method for producing thin dice from fragile materials
US5915370A (en) * 1996-03-13 1999-06-29 Micron Technology, Inc. Saw for segmenting a semiconductor wafer
US5872046A (en) * 1996-04-10 1999-02-16 Texas Instruments Incorporated Method of cleaning wafer after partial saw
US6225191B1 (en) * 1996-04-12 2001-05-01 Lucent Technologies Inc. Process for the manufacture of optical integrated circuits
US6686291B1 (en) 1996-05-24 2004-02-03 Texas Instruments Incorporated Undercut process with isotropic plasma etching at package level
US5832585A (en) * 1996-08-13 1998-11-10 National Semiconductor Corporation Method of separating micro-devices formed on a substrate
KR0178134B1 (ko) * 1996-10-01 1999-04-15 삼성전자주식회사 불연속 절연층 영역을 갖는 반도체 집적회로 소자 및 그 제조방법
US5803797A (en) * 1996-11-26 1998-09-08 Micron Technology, Inc. Method and apparatus to hold intergrated circuit chips onto a chuck and to simultaneously remove multiple intergrated circuit chips from a cutting chuck
US5809987A (en) 1996-11-26 1998-09-22 Micron Technology,Inc. Apparatus for reducing damage to wafer cutting blades during wafer dicing
US5923995A (en) * 1997-04-18 1999-07-13 National Semiconductor Corporation Methods and apparatuses for singulation of microelectromechanical systems
US5817569A (en) * 1997-05-08 1998-10-06 Texas Instruments Incorporated Method of reducing wafer particles after partial saw
EP1038315A4 (fr) * 1997-11-11 2001-07-11 Irvine Sensors Corp Procede d'amincissement de plaquettes en semi-conducteur a circuits et plaquettes ainsi produites
KR100273704B1 (ko) * 1997-12-20 2000-12-15 윤종용 반도체기판제조방법
JP3516592B2 (ja) * 1998-08-18 2004-04-05 沖電気工業株式会社 半導体装置およびその製造方法
DE19850873A1 (de) * 1998-11-05 2000-05-11 Philips Corp Intellectual Pty Verfahren zum Bearbeiten eines Erzeugnisses der Halbleitertechnik
US6339251B2 (en) 1998-11-10 2002-01-15 Samsung Electronics Co., Ltd Wafer grooves for reducing semiconductor wafer warping
DE19939318A1 (de) * 1999-08-19 2001-02-22 Bosch Gmbh Robert Verfahren zur Herstellung eines mikromechanischen Bauelements
US20050048688A1 (en) * 2000-12-07 2005-03-03 Patel Satyadev R. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US7307775B2 (en) * 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
DE60221973T2 (de) * 2001-03-09 2008-05-15 Datec Coating Corp., Mississauga Im sol-gel-verfahren hergestellte widerstands- und leitfähige beschichtung
US6580153B1 (en) 2001-03-14 2003-06-17 Amkor Technology, Inc. Structure for protecting a micromachine with a cavity in a UV tape
JP4042347B2 (ja) * 2001-05-18 2008-02-06 新科實業有限公司 磁気ヘッドスライダの浮上面形状加工方法及び磁気ヘッドスライダの製造方法
DE10140046B4 (de) * 2001-08-16 2006-12-07 Infineon Technologies Ag Verfahren zum Vereinzeln von Halbleiterchips
JP2003078063A (ja) * 2001-09-05 2003-03-14 Sharp Corp 半導体装置の製造方法
DE10163506A1 (de) * 2001-12-21 2003-07-10 Infineon Technologies Ag Verfahren und Vorrichtung zur Herstellung eines Bauelements mit einer beweglichen Struktur
US20050233770A1 (en) * 2002-02-06 2005-10-20 Ramsey Craig C Wireless substrate-like sensor
US20050224902A1 (en) * 2002-02-06 2005-10-13 Ramsey Craig C Wireless substrate-like sensor
US20050224899A1 (en) * 2002-02-06 2005-10-13 Ramsey Craig C Wireless substrate-like sensor
US7289230B2 (en) * 2002-02-06 2007-10-30 Cyberoptics Semiconductors, Inc. Wireless substrate-like sensor
US7405860B2 (en) * 2002-11-26 2008-07-29 Texas Instruments Incorporated Spatial light modulators with light blocking/absorbing areas
US6993818B2 (en) * 2003-03-17 2006-02-07 Memx, Inc. Multi-fixture assembly of cutting tools
US20040186493A1 (en) * 2003-03-17 2004-09-23 Mcwhorter Paul Jackson Microkeratome cutting head assembly with single bevel cutting blade
US20040181950A1 (en) 2003-03-17 2004-09-23 Rodgers Murray Steven Alignment of microkeratome blade to blade handle
US20040232535A1 (en) * 2003-05-22 2004-11-25 Terry Tarn Microelectromechanical device packages with integral heaters
JP4398686B2 (ja) * 2003-09-11 2010-01-13 株式会社ディスコ ウエーハの加工方法
JP4590174B2 (ja) * 2003-09-11 2010-12-01 株式会社ディスコ ウエーハの加工方法
US20050093134A1 (en) 2003-10-30 2005-05-05 Terry Tarn Device packages with low stress assembly process
JP4342992B2 (ja) * 2004-03-17 2009-10-14 株式会社ディスコ レーザー加工装置のチャックテーブル
FR2869455B1 (fr) * 2004-04-27 2006-07-14 Soitec Silicon On Insulator Procede de fabrication de puces et support associe
US7408250B2 (en) * 2005-04-05 2008-08-05 Texas Instruments Incorporated Micromirror array device with compliant adhesive
US7508063B2 (en) * 2005-04-05 2009-03-24 Texas Instruments Incorporated Low cost hermetically sealed package
US7893697B2 (en) * 2006-02-21 2011-02-22 Cyberoptics Semiconductor, Inc. Capacitive distance sensing in semiconductor processing tools
JP2009527764A (ja) * 2006-02-21 2009-07-30 サイバーオプティクス セミコンダクタ インコーポレイテッド 半導体加工ツールにおける静電容量距離検出
US8067258B2 (en) * 2006-06-05 2011-11-29 Applied Microstructures, Inc. Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures
US8823933B2 (en) 2006-09-29 2014-09-02 Cyberoptics Corporation Substrate-like particle sensor
US8900695B2 (en) * 2007-02-23 2014-12-02 Applied Microstructures, Inc. Durable conformal wear-resistant carbon-doped metal oxide-comprising coating
US20080248263A1 (en) * 2007-04-02 2008-10-09 Applied Microstructures, Inc. Method of creating super-hydrophobic and-or super-hydrophilic surfaces on substrates, and articles created thereby
US8236379B2 (en) * 2007-04-02 2012-08-07 Applied Microstructures, Inc. Articles with super-hydrophobic and-or super-hydrophilic surfaces and method of formation
TW200849444A (en) * 2007-04-05 2008-12-16 Cyberoptics Semiconductor Inc Semiconductor processing system with integrated showerhead distance measuring device
US20090015268A1 (en) * 2007-07-13 2009-01-15 Gardner Delrae H Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment
US7662669B2 (en) * 2007-07-24 2010-02-16 Northrop Grumman Space & Mission Systems Corp. Method of exposing circuit lateral interconnect contacts by wafer saw
US7696062B2 (en) 2007-07-25 2010-04-13 Northrop Grumman Systems Corporation Method of batch integration of low dielectric substrates with MMICs
US20090061597A1 (en) * 2007-08-30 2009-03-05 Kavlico Corporation Singulator method and apparatus
TWM330516U (en) 2007-10-03 2008-04-11 yuan-rong Zhang Mouse with cable orientations adjustment
US8343795B2 (en) * 2009-09-12 2013-01-01 Yuhao Luo Method to break and assemble solar cells
TWI450325B (zh) * 2012-03-22 2014-08-21 Alpha & Omega Semiconductor 一種支援從晶圓背面實施切割的晶片封裝方法
CN103645078B (zh) * 2013-12-05 2016-01-20 广东工业大学 一种单晶半导体基片的截面快速制作及亚表面微裂纹检测方法
JP6765949B2 (ja) * 2016-12-12 2020-10-07 株式会社ディスコ ウェーハの加工方法
CN114030094B (zh) * 2021-11-18 2022-12-09 江苏纳沛斯半导体有限公司 一种可防止产生崩边的半导体晶圆制备的硅片划片系统

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL284964A (fr) * 1961-11-10 1900-01-01
DE1932371B2 (de) * 1969-06-26 1972-11-30 Deutsche Itt Industries Gmbh, 7800 Freiburg Verfahren zum herstellen von halbleiterplaettchen
US3706129A (en) * 1970-07-27 1972-12-19 Gen Electric Integrated semiconductor rectifiers and processes for their fabrication
DE2730130C2 (de) * 1976-09-14 1987-11-12 Mitsubishi Denki K.K., Tokyo Verfahren zum Herstellen von Halbleiterbauelementen
JPS5412563A (en) * 1977-06-29 1979-01-30 Toshiba Corp Fabricating method of semiconductor crystals
JPS5437468A (en) * 1977-08-29 1979-03-19 Toshiba Corp Breaking device for semiconductor wafer
JPS54131872A (en) * 1978-04-04 1979-10-13 Toshiba Corp Forming method for dielectric layer of semiconductor device
JPS5678137A (en) * 1979-11-29 1981-06-26 Nec Home Electronics Ltd Manufacture of semiconductor device
US4296542A (en) * 1980-07-11 1981-10-27 Presco, Inc. Control of small parts in a manufacturing operation
JPS5752143A (en) * 1980-09-16 1982-03-27 Toshiba Corp Mounting method and device for semiconductor pellet
JPS59186345A (ja) * 1983-04-06 1984-10-23 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
US5196378A (en) * 1987-12-17 1993-03-23 Texas Instruments Incorporated Method of fabricating an integrated circuit having active regions near a die edge
US4904610A (en) * 1988-01-27 1990-02-27 General Instrument Corporation Wafer level process for fabricating passivated semiconductor devices
JPH0353546A (ja) * 1989-07-21 1991-03-07 Mitsubishi Electric Corp 半導体装置の製造方法およびその製造装置
US4997792A (en) * 1989-11-21 1991-03-05 Eastman Kodak Company Method for separation of diode array chips during fabrication thereof
JPH03236258A (ja) * 1990-02-13 1991-10-22 Fujitsu Ltd 半導体装置の製造方法
JP2859412B2 (ja) * 1990-10-01 1999-02-17 富士通株式会社 半導体装置の製造方法
US5272114A (en) * 1990-12-10 1993-12-21 Amoco Corporation Method for cleaving a semiconductor crystal body
US5130276A (en) * 1991-05-16 1992-07-14 Motorola Inc. Method of fabricating surface micromachined structures
JPH0574932A (ja) * 1991-09-17 1993-03-26 Fujitsu Ltd 半導体ウエハのダイシング方法
US5318855A (en) * 1992-08-25 1994-06-07 International Business Machines Corporation Electronic assembly with flexible film cover for providing electrical and environmental protection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6117347A (en) * 1996-07-10 2000-09-12 Nec Corporation Method of separating wafers into individual die

Also Published As

Publication number Publication date
DE69430457T2 (de) 2002-10-31
CA2113019C (fr) 2005-03-29
JPH0745563A (ja) 1995-02-14
DE69430457D1 (de) 2002-05-29
US5527744A (en) 1996-06-18
EP0610657A3 (fr) 1997-02-05
US5393706A (en) 1995-02-28
TW291570B (fr) 1996-11-21
EP0610657A2 (fr) 1994-08-17
EP0610657B1 (fr) 2002-04-24

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