TW358984B - Method of removal of polymer from chips - Google Patents

Method of removal of polymer from chips

Info

Publication number
TW358984B
TW358984B TW086111505A TW86111505A TW358984B TW 358984 B TW358984 B TW 358984B TW 086111505 A TW086111505 A TW 086111505A TW 86111505 A TW86111505 A TW 86111505A TW 358984 B TW358984 B TW 358984B
Authority
TW
Taiwan
Prior art keywords
removal
polymer
chips
protective layer
dry etching
Prior art date
Application number
TW086111505A
Other languages
Chinese (zh)
Inventor
Shing-Lung Li
Chia-Shiung Tsai
Shou-Wen Guo
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW086111505A priority Critical patent/TW358984B/en
Application granted granted Critical
Publication of TW358984B publication Critical patent/TW358984B/en

Links

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  • Drying Of Semiconductors (AREA)

Abstract

A method of removal of polymer from chips, by first forming a protective layer on a chip, having the protective layer a plurality of polymer impurities, with the following steps: dry etching, with agent including nitrogen fluoride; and removal by dry etching, for removal of the polymer impurities.
TW086111505A 1997-08-12 1997-08-12 Method of removal of polymer from chips TW358984B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086111505A TW358984B (en) 1997-08-12 1997-08-12 Method of removal of polymer from chips

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086111505A TW358984B (en) 1997-08-12 1997-08-12 Method of removal of polymer from chips

Publications (1)

Publication Number Publication Date
TW358984B true TW358984B (en) 1999-05-21

Family

ID=57940564

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086111505A TW358984B (en) 1997-08-12 1997-08-12 Method of removal of polymer from chips

Country Status (1)

Country Link
TW (1) TW358984B (en)

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