JPS544064A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS544064A
JPS544064A JP6891077A JP6891077A JPS544064A JP S544064 A JPS544064 A JP S544064A JP 6891077 A JP6891077 A JP 6891077A JP 6891077 A JP6891077 A JP 6891077A JP S544064 A JPS544064 A JP S544064A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
heavy metal
elemnent
artifically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6891077A
Other languages
Japanese (ja)
Inventor
Manabu Matsuzawa
Yoshimitsu Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6891077A priority Critical patent/JPS544064A/en
Publication of JPS544064A publication Critical patent/JPS544064A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To prevent the lowering in the elemnent performance due to heavy metal and crystal defect, by providing the processing strain layer having the gettering operation of heavy metal the rejecting operation of crystal defects on the semiconductor main surface artifically.
COPYRIGHT: (C)1979,JPO&Japio
JP6891077A 1977-06-13 1977-06-13 Manufacture for semiconductor device Pending JPS544064A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6891077A JPS544064A (en) 1977-06-13 1977-06-13 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6891077A JPS544064A (en) 1977-06-13 1977-06-13 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS544064A true JPS544064A (en) 1979-01-12

Family

ID=13387272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6891077A Pending JPS544064A (en) 1977-06-13 1977-06-13 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS544064A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4954189A (en) * 1987-11-06 1990-09-04 Wacker-Chemitronic Gesellschaft Fur Elektronic-Grundstoffe Mbh Silicon wafers for producing oxide layers of high breakdown strength and process for the production thereof
JPH09188475A (en) * 1996-01-10 1997-07-22 Fujita Kimura Fishing line winding device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4954189A (en) * 1987-11-06 1990-09-04 Wacker-Chemitronic Gesellschaft Fur Elektronic-Grundstoffe Mbh Silicon wafers for producing oxide layers of high breakdown strength and process for the production thereof
JPH09188475A (en) * 1996-01-10 1997-07-22 Fujita Kimura Fishing line winding device
JP2909424B2 (en) * 1996-01-10 1999-06-23 冨士太 木村 Fishing line winding device

Similar Documents

Publication Publication Date Title
JPS544064A (en) Manufacture for semiconductor device
JPS5249991A (en) Sputtering method
JPS5263680A (en) Production of semiconductor device
JPS5441665A (en) Manufacture for semiconductor device
JPS531471A (en) Manufacture for semiconductor device
JPS542657A (en) Manufacture for semiconductor device
JPS5436182A (en) Manufacture for semiconductor device
JPS5228879A (en) Semiconductor device and method for its production
JPS5225582A (en) Production method of semiconductor device
JPS5237770A (en) Semiconductor device
JPS5335372A (en) Beveling method of wafers
JPS52112273A (en) Scribing method of semiconductor wafer
JPS53108373A (en) Manufacture for semiconductor device
JPS532072A (en) Manufacture of semiconductor
JPS52155050A (en) Production of semiconductor device
JPS5389365A (en) Production of semiconductor device
JPS5276872A (en) Cutting method of semiconductor wafer
JPS51140638A (en) Positioning method
JPS5367362A (en) Manufacture of semiconductor device
JPS5380157A (en) Manufacture of semiconductor device
JPS5355976A (en) Peripheral unit for semicnductor device
JPS5211764A (en) Method of manufacturing semiconductor device
JPS5370761A (en) Production of semiconductor device
JPS5384562A (en) Manufacture for semiconductor device
JPS5418271A (en) Manufacture of semiconductor device