JPS544064A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS544064A JPS544064A JP6891077A JP6891077A JPS544064A JP S544064 A JPS544064 A JP S544064A JP 6891077 A JP6891077 A JP 6891077A JP 6891077 A JP6891077 A JP 6891077A JP S544064 A JPS544064 A JP S544064A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- heavy metal
- elemnent
- artifically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To prevent the lowering in the elemnent performance due to heavy metal and crystal defect, by providing the processing strain layer having the gettering operation of heavy metal the rejecting operation of crystal defects on the semiconductor main surface artifically.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6891077A JPS544064A (en) | 1977-06-13 | 1977-06-13 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6891077A JPS544064A (en) | 1977-06-13 | 1977-06-13 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS544064A true JPS544064A (en) | 1979-01-12 |
Family
ID=13387272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6891077A Pending JPS544064A (en) | 1977-06-13 | 1977-06-13 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS544064A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4954189A (en) * | 1987-11-06 | 1990-09-04 | Wacker-Chemitronic Gesellschaft Fur Elektronic-Grundstoffe Mbh | Silicon wafers for producing oxide layers of high breakdown strength and process for the production thereof |
JPH09188475A (en) * | 1996-01-10 | 1997-07-22 | Fujita Kimura | Fishing line winding device |
-
1977
- 1977-06-13 JP JP6891077A patent/JPS544064A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4954189A (en) * | 1987-11-06 | 1990-09-04 | Wacker-Chemitronic Gesellschaft Fur Elektronic-Grundstoffe Mbh | Silicon wafers for producing oxide layers of high breakdown strength and process for the production thereof |
JPH09188475A (en) * | 1996-01-10 | 1997-07-22 | Fujita Kimura | Fishing line winding device |
JP2909424B2 (en) * | 1996-01-10 | 1999-06-23 | 冨士太 木村 | Fishing line winding device |
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