JPS5389365A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5389365A
JPS5389365A JP360677A JP360677A JPS5389365A JP S5389365 A JPS5389365 A JP S5389365A JP 360677 A JP360677 A JP 360677A JP 360677 A JP360677 A JP 360677A JP S5389365 A JPS5389365 A JP S5389365A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
fluorine
substrate
lifetime
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP360677A
Other languages
Japanese (ja)
Inventor
Haruo Okano
Yasuhiro Horiike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP360677A priority Critical patent/JPS5389365A/en
Publication of JPS5389365A publication Critical patent/JPS5389365A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To improve the lifetime of minority carriers by plasma-etching the surface opposite from the surface of a semiconductor substrate to be formed with semiconductor devices with gas containing fluorine or fluorine to provide a lattice defect layer and gettering heavy metals contained in the substrate there.
COPYRIGHT: (C)1978,JPO&Japio
JP360677A 1977-01-18 1977-01-18 Production of semiconductor device Pending JPS5389365A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP360677A JPS5389365A (en) 1977-01-18 1977-01-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP360677A JPS5389365A (en) 1977-01-18 1977-01-18 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5389365A true JPS5389365A (en) 1978-08-05

Family

ID=11562139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP360677A Pending JPS5389365A (en) 1977-01-18 1977-01-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5389365A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103348A (en) * 1982-12-06 1984-06-14 Toyota Central Res & Dev Lab Inc Manufacture of semiconductor device
JPH1064918A (en) * 1996-08-19 1998-03-06 Shin Etsu Handotai Co Ltd Method for manufacturing silicon mirror-finish wafer and working device for silicon wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103348A (en) * 1982-12-06 1984-06-14 Toyota Central Res & Dev Lab Inc Manufacture of semiconductor device
JPH1064918A (en) * 1996-08-19 1998-03-06 Shin Etsu Handotai Co Ltd Method for manufacturing silicon mirror-finish wafer and working device for silicon wafer

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