CA2043492A1 - Methode de purification du silicium et appareil connexe - Google Patents

Methode de purification du silicium et appareil connexe

Info

Publication number
CA2043492A1
CA2043492A1 CA2043492A CA2043492A CA2043492A1 CA 2043492 A1 CA2043492 A1 CA 2043492A1 CA 2043492 A CA2043492 A CA 2043492A CA 2043492 A CA2043492 A CA 2043492A CA 2043492 A1 CA2043492 A1 CA 2043492A1
Authority
CA
Canada
Prior art keywords
plasma
silicon
inert gas
container
silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2043492A
Other languages
English (en)
Other versions
CA2043492C (fr
Inventor
Noriyoshi Yuge
Hiroyuki Baba
Fukuo Aratani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Publication of CA2043492A1 publication Critical patent/CA2043492A1/fr
Application granted granted Critical
Publication of CA2043492C publication Critical patent/CA2043492C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Photovoltaic Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CA002043492A 1990-05-30 1991-05-29 Methode de purification du silicium et appareil connexe Expired - Lifetime CA2043492C (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP13826690 1990-05-30
JP13826890 1990-05-30
JP2-138268 1990-05-30
JP2-138266 1990-05-30
JP10434291A JP3205352B2 (ja) 1990-05-30 1991-05-09 シリコン精製方法及び装置
JP3-104342 1991-05-09

Publications (2)

Publication Number Publication Date
CA2043492A1 true CA2043492A1 (fr) 1991-12-01
CA2043492C CA2043492C (fr) 2000-05-23

Family

ID=27310203

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002043492A Expired - Lifetime CA2043492C (fr) 1990-05-30 1991-05-29 Methode de purification du silicium et appareil connexe

Country Status (6)

Country Link
US (1) US5182091A (fr)
EP (1) EP0459421B1 (fr)
JP (1) JP3205352B2 (fr)
CA (1) CA2043492C (fr)
DE (1) DE69124287T2 (fr)
NO (1) NO310347B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7682585B2 (en) 2006-04-25 2010-03-23 The Arizona Board Of Regents On Behalf Of The University Of Arizona Silicon refining process

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US5346724A (en) * 1991-04-12 1994-09-13 Nippon Oil Company, Ltd. Oil and fat composition for lubricating food processing machines and use thereof
NO180532C (no) * 1994-09-01 1997-05-07 Elkem Materials Fremgangsmåte for fjerning av forurensninger fra smeltet silisium
US5753567A (en) * 1995-08-28 1998-05-19 Memc Electronic Materials, Inc. Cleaning of metallic contaminants from the surface of polycrystalline silicon with a halogen gas or plasma
FR2746785B1 (fr) * 1996-04-02 1998-05-22 Pechiney Electrometallurgie Silicium metallurgique a structure controlee destine a la synthese des halogenosilanes
JP3325900B2 (ja) * 1996-10-14 2002-09-17 川崎製鉄株式会社 多結晶シリコンの製造方法及び装置、並びに太陽電池用シリコン基板の製造方法
NO980278L (no) * 1997-01-22 1998-07-23 Kawasaki Steel Co FremgangsmÕte og apparatur for fjerning av bor fra silisium av metallurgisk kvalitet
US5972107A (en) * 1997-08-28 1999-10-26 Crystal Systems, Inc. Method for purifying silicon
US6368403B1 (en) * 1997-08-28 2002-04-09 Crystal Systems, Inc. Method and apparatus for purifying silicon
FR2772741B1 (fr) * 1997-12-19 2000-03-10 Centre Nat Rech Scient Procede et installation d'affinage du silicium
WO2002016265A1 (fr) 2000-08-21 2002-02-28 Astropower, Inc. Procede et appareil permettant de purifier le silicium
WO2002053496A1 (fr) * 2000-12-28 2002-07-11 Sumitomo Mitsubishi Silicon Corporation Procede de moulage en continu de silicium
FR2827592B1 (fr) * 2001-07-23 2003-08-22 Invensil Silicium metallurgique de haute purete et procede d'elaboration
EP1687240A1 (fr) * 2003-12-04 2006-08-09 Dow Corning Corporation Obtention de silicium pour applications solaires par elimination d'impuretes du silicium metallurgique
JP4766837B2 (ja) 2004-03-03 2011-09-07 新日鉄マテリアルズ株式会社 シリコンからのホウ素除去方法
FR2871151B1 (fr) * 2004-06-07 2006-08-11 Centre Nat Rech Scient Cnrse Installation d'affinage de silicium
JP4665479B2 (ja) * 2004-09-27 2011-04-06 株式会社 アイアイエスマテリアル 電子ビームを用いたボロン含有シリコンの精錬方法及び装置
JP4632769B2 (ja) 2004-12-09 2011-02-16 シャープ株式会社 シリコンの精製方法
JP4966560B2 (ja) 2005-03-07 2012-07-04 新日鉄マテリアルズ株式会社 高純度シリコンの製造方法
JP5140835B2 (ja) * 2005-03-07 2013-02-13 新日鉄住金マテリアルズ株式会社 高純度シリコンの製造方法
JP4741860B2 (ja) * 2005-03-07 2011-08-10 新日鉄マテリアルズ株式会社 高純度のシリコンの製造方法
US7572334B2 (en) * 2006-01-03 2009-08-11 Applied Materials, Inc. Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application
JP5084144B2 (ja) * 2006-01-18 2012-11-28 新日鉄マテリアルズ株式会社 高純度シリコンの製造方法
JP5374673B2 (ja) * 2006-04-04 2013-12-25 シリコール マテリアルズ インク 珪素精製方法
FR2912397B1 (fr) * 2007-02-14 2009-05-08 Commissariat Energie Atomique Installation d'affinage de silicium.
JP2008241197A (ja) * 2007-03-28 2008-10-09 Fuji Electric Systems Co Ltd 通電加熱装置
JP5400782B2 (ja) 2007-10-03 2014-01-29 シリコア マテリアルズ インコーポレイテッド シリコン結晶を得るためのシリコン粉末の処理方法
FR2928641B1 (fr) * 2008-03-14 2010-03-26 Centre Nat Rech Scient Procede de purification de silicium pour applications photovoltaiques
ITMI20081085A1 (it) * 2008-06-16 2009-12-17 N E D Silicon S P A Metodo per la preparazione di silicio di grado metallurgico di elevata purezza.
KR101318427B1 (ko) 2008-08-15 2013-10-16 가부시키가이샤 아루박 실리콘의 정제 방법
JP5512941B2 (ja) * 2008-08-27 2014-06-04 株式会社アルバック シリコンの精製装置および精製方法
JP2011251853A (ja) * 2008-08-29 2011-12-15 Shin-Etsu Chemical Co Ltd 珪素の精製方法
IT1394029B1 (it) 2009-05-12 2012-05-25 Raysolar S R L Metodo per la purificazione di silicio ed apparato con cui realizzarlo
KR100966755B1 (ko) * 2009-05-25 2010-06-29 (주)원익머트리얼즈 금속실리콘의 정제방법 및 그 정제장치
WO2011001919A1 (fr) 2009-07-03 2011-01-06 三菱化学株式会社 Procédé de production de silicium, silicium et panneau pour une cellule solaire
US8562932B2 (en) 2009-08-21 2013-10-22 Silicor Materials Inc. Method of purifying silicon utilizing cascading process
FR2950046B1 (fr) * 2009-09-15 2011-11-25 Apollon Solar Dispositif a basse pression de fusion et purification de silicium et procede de fusion/purification/solidification
TWI393805B (zh) * 2009-11-16 2013-04-21 Masahiro Hoshino Purification method of metallurgical silicon
CN101708850B (zh) * 2009-11-19 2011-09-14 大连理工大学 连续熔炼去除多晶硅中磷和硼的方法及装置
TWI397617B (zh) * 2010-02-12 2013-06-01 Masahiro Hoshino Metal silicon purification device
TWI403461B (zh) 2010-07-21 2013-08-01 Masahiro Hoshino Method and apparatus for improving yield and yield of metallurgical silicon
CN102834935B (zh) * 2010-08-16 2015-06-03 星野政宏 用于太阳能电池的冶金硅的提纯设备和方法
CN102742034B (zh) * 2010-08-16 2015-10-14 星野政宏 冶金硅的提纯方法
CN101948113B (zh) * 2010-09-19 2014-01-01 江西盛丰新能源科技有限公司 一种物理除磷制备多晶硅的方法及设备
KR102641266B1 (ko) 2015-10-09 2024-02-26 밀워키 실리콘, 엘엘씨 실리콘 정제를 위한 장치 및 시스템
CN105671474B (zh) * 2016-03-18 2018-11-30 李光武 制造半导体基片的方法和装置
RU2693172C1 (ru) * 2018-10-09 2019-07-01 Федеральное государственное бюджетное образовательное учреждение высшего образования "Рязанский государственный радиотехнический университет" ФГБОУ ВО "РГРТУ" Способ очистки металлургического кремния от примесей
CN109161963A (zh) * 2018-10-29 2019-01-08 大连颐和顺新材料科技有限公司 一种高效回收金刚线切割硅粉制备太阳能级多晶硅的方法
RU2707053C1 (ru) * 2018-12-25 2019-11-21 Федеральное государственное бюджетное образовательное учреждение высшего образования "Рязанский государственный радиотехнический университет" Способ очистки металлургического кремния от углерода
CN115872408B (zh) * 2022-10-19 2023-08-11 北京理工大学 一种基于热等离子体射流的石英砂纯化方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2623413C2 (de) * 1976-05-25 1985-01-10 Siemens AG, 1000 Berlin und 8000 München Verfahren zum Herstellen von für Halbleiterbauelemente verwendbarem Silicium
FR2438499A1 (fr) * 1978-10-13 1980-05-09 Anvar Procede de purification et d'elaboration de cristaux par fusion de zone utilisant un jet de plasma et installation correspondante
JPS6031761B2 (ja) * 1979-12-28 1985-07-24 富士写真フイルム株式会社 非晶質シリコン微粉末の製造方法
DE3016807A1 (de) * 1980-05-02 1981-11-05 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung von silizium
CA1147698A (fr) * 1980-10-15 1983-06-07 Maher I. Boulos Epuration du silicium de qualite metallurgique
JPS57149815A (en) * 1981-03-05 1982-09-16 Shin Etsu Chem Co Ltd Manufacture of granular silicon
JPH075288B2 (ja) * 1985-07-31 1995-01-25 フォトワット・インタナショナル・ソシエテ・アノニム 分割されたけい素をプラズマの下で精製する方法
US4680096A (en) * 1985-12-26 1987-07-14 Dow Corning Corporation Plasma smelting process for silicon
JPS62292613A (ja) * 1986-06-10 1987-12-19 Kawasaki Steel Corp 高純度けい素の精製方法
DE3760173D1 (en) * 1987-01-08 1989-06-29 Rhone Poulenc Chimie Process for the plasma purification of divided silicon

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7682585B2 (en) 2006-04-25 2010-03-23 The Arizona Board Of Regents On Behalf Of The University Of Arizona Silicon refining process

Also Published As

Publication number Publication date
CA2043492C (fr) 2000-05-23
JP3205352B2 (ja) 2001-09-04
EP0459421B1 (fr) 1997-01-22
NO912074D0 (no) 1991-05-29
JPH04228414A (ja) 1992-08-18
US5182091A (en) 1993-01-26
DE69124287T2 (de) 1997-05-07
EP0459421A1 (fr) 1991-12-04
NO310347B1 (no) 2001-06-25
DE69124287D1 (de) 1997-03-06
NO912074L (no) 1991-12-02

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