CA1217576A - Method of producing a semiconductor device - Google Patents

Method of producing a semiconductor device

Info

Publication number
CA1217576A
CA1217576A CA000443775A CA443775A CA1217576A CA 1217576 A CA1217576 A CA 1217576A CA 000443775 A CA000443775 A CA 000443775A CA 443775 A CA443775 A CA 443775A CA 1217576 A CA1217576 A CA 1217576A
Authority
CA
Canada
Prior art keywords
groove
film
oxide film
epitaxial layer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000443775A
Other languages
English (en)
French (fr)
Inventor
Hiroshi Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of CA1217576A publication Critical patent/CA1217576A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/763—Polycrystalline semiconductor regions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Element Separation (AREA)
  • Bipolar Transistors (AREA)
CA000443775A 1982-12-27 1983-12-20 Method of producing a semiconductor device Expired CA1217576A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP57228400A JPS59119848A (ja) 1982-12-27 1982-12-27 半導体装置の製造方法
JP57-228400 1982-12-27

Publications (1)

Publication Number Publication Date
CA1217576A true CA1217576A (en) 1987-02-03

Family

ID=16875868

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000443775A Expired CA1217576A (en) 1982-12-27 1983-12-20 Method of producing a semiconductor device

Country Status (7)

Country Link
US (1) US4611386A (enrdf_load_stackoverflow)
EP (1) EP0116789B1 (enrdf_load_stackoverflow)
JP (1) JPS59119848A (enrdf_load_stackoverflow)
KR (1) KR880001591B1 (enrdf_load_stackoverflow)
CA (1) CA1217576A (enrdf_load_stackoverflow)
DE (1) DE3373163D1 (enrdf_load_stackoverflow)
IE (1) IE54992B1 (enrdf_load_stackoverflow)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943545A (ja) * 1982-09-06 1984-03-10 Hitachi Ltd 半導体集積回路装置
JPS618945A (ja) * 1984-06-25 1986-01-16 Nec Corp 半導体集積回路装置
IT1200725B (it) * 1985-08-28 1989-01-27 Sgs Microelettronica Spa Struttura di isolamento in dispositivi mos e procedimento di preparazione della stessa
US4707456A (en) * 1985-09-18 1987-11-17 Advanced Micro Devices, Inc. Method of making a planar structure containing MOS and bipolar transistors
US4745081A (en) * 1985-10-31 1988-05-17 International Business Machines Corporation Method of trench filling
JPS62125663A (ja) * 1985-11-26 1987-06-06 Nec Corp 半導体記憶装置
US5104816A (en) * 1986-01-30 1992-04-14 Texas Instruments Incorporated Polysilicon self-aligned bipolar device including trench isolation and process of manufacturing same
US4799099A (en) * 1986-01-30 1989-01-17 Texas Instruments Incorporated Bipolar transistor in isolation well with angled corners
US5342792A (en) * 1986-03-07 1994-08-30 Canon Kabushiki Kaisha Method of manufacturing semiconductor memory element
JPS62277745A (ja) * 1986-05-27 1987-12-02 Toshiba Corp 半導体集積回路
JPS6430248A (en) * 1987-07-27 1989-02-01 Hitachi Ltd Formation of on-the-trench insulation film
US4835115A (en) * 1987-12-07 1989-05-30 Texas Instruments Incorporated Method for forming oxide-capped trench isolation
US5332920A (en) * 1988-02-08 1994-07-26 Kabushiki Kaisha Toshiba Dielectrically isolated high and low voltage substrate regions
US4866498A (en) * 1988-04-20 1989-09-12 The United States Department Of Energy Integrated circuit with dissipative layer for photogenerated carriers
JPH0656865B2 (ja) * 1988-10-13 1994-07-27 株式会社東芝 高耐圧素子用接着基板
US5106777A (en) * 1989-09-27 1992-04-21 Texas Instruments Incorporated Trench isolation process with reduced topography
US5306940A (en) * 1990-10-22 1994-04-26 Nec Corporation Semiconductor device including a locos type field oxide film and a U trench penetrating the locos film
JPH0574927A (ja) * 1991-09-13 1993-03-26 Nec Corp 半導体装置の製造方法
US5376230A (en) * 1991-11-15 1994-12-27 Sony Corporation Method of manufacturing a semiconductor device
EP0641022B1 (en) * 1993-08-31 2006-05-17 STMicroelectronics, Inc. Isolation structure and method for making same
JP4136145B2 (ja) * 1998-12-25 2008-08-20 富士通株式会社 半導体装置の製造方法
US20060091467A1 (en) * 2004-10-29 2006-05-04 Doyle Brian S Resonant tunneling device using metal oxide semiconductor processing

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL191525C (nl) * 1977-02-02 1995-08-21 Shinkokai Zaidan Hojin Handot Halfgeleiderinrichting omvattende een stroomkanaalgebied van een eerste geleidingstype dat wordt omsloten door een van een stuurelektrode voorzien stuurgebied van het tweede geleidingstype.
US4104086A (en) * 1977-08-15 1978-08-01 International Business Machines Corporation Method for forming isolated regions of silicon utilizing reactive ion etching
JPS5544746A (en) * 1978-09-26 1980-03-29 Fujitsu Ltd Manufacture of integrated circuit
US4269636A (en) * 1978-12-29 1981-05-26 Harris Corporation Method of fabricating self-aligned bipolar transistor process and device utilizing etching and self-aligned masking
JPS6043024B2 (ja) * 1978-12-30 1985-09-26 富士通株式会社 半導体装置の製造方法
US4255207A (en) * 1979-04-09 1981-03-10 Harris Corporation Fabrication of isolated regions for use in self-aligning device process utilizing selective oxidation
DE3071380D1 (en) * 1979-05-31 1986-03-13 Fujitsu Ltd Method of producing a semiconductor device
US4376664A (en) * 1979-05-31 1983-03-15 Fujitsu Limited Method of producing a semiconductor device
JPS5654049A (en) * 1979-10-09 1981-05-13 Mitsubishi Electric Corp Semiconductor device
JPS5681974A (en) * 1979-12-07 1981-07-04 Toshiba Corp Manufacture of mos type semiconductor device
US4252582A (en) * 1980-01-25 1981-02-24 International Business Machines Corporation Self aligned method for making bipolar transistor having minimum base to emitter contact spacing
JPS56160050A (en) * 1980-05-14 1981-12-09 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS5712533A (en) * 1980-06-26 1982-01-22 Fujitsu Ltd Manufacture of semiconductor device
EP0048175B1 (en) * 1980-09-17 1986-04-23 Hitachi, Ltd. Semiconductor device and method of manufacturing the same
DE3265339D1 (en) * 1981-03-20 1985-09-19 Toshiba Kk Method for manufacturing semiconductor device
JPS57204133A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Manufacture of semiconductor integrated circuit
JPS5821340A (ja) * 1981-07-29 1983-02-08 Toshiba Corp 半導体素子
JPS5844735A (ja) * 1981-09-11 1983-03-15 Fujitsu Ltd 半導体装置の製造方法
JPS5856432A (ja) * 1981-09-30 1983-04-04 Fujitsu Ltd 半導体装置の製造法
NL8105559A (nl) * 1981-12-10 1983-07-01 Philips Nv Werkwijze voor het aanbrengen van een smalle groef in een substraatgebied, in het bijzonder een halfgeleidersubstraatgebied.
JPS58138049A (ja) * 1982-02-12 1983-08-16 Mitsubishi Electric Corp 半導体集積回路の製造方法

Also Published As

Publication number Publication date
JPS6240858B2 (enrdf_load_stackoverflow) 1987-08-31
IE833068L (en) 1984-06-27
KR880001591B1 (ko) 1988-08-24
US4611386A (en) 1986-09-16
EP0116789B1 (en) 1987-08-19
KR840007308A (ko) 1984-12-06
DE3373163D1 (en) 1987-09-24
IE54992B1 (en) 1990-04-11
JPS59119848A (ja) 1984-07-11
EP0116789A1 (en) 1984-08-29

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Legal Events

Date Code Title Description
MKEX Expiry
MKEX Expiry

Effective date: 20040203