BRPI0405288A - Módulo semicondutor de potência e processo para a sua fabricação - Google Patents

Módulo semicondutor de potência e processo para a sua fabricação

Info

Publication number
BRPI0405288A
BRPI0405288A BR0405288-9A BRPI0405288A BRPI0405288A BR PI0405288 A BRPI0405288 A BR PI0405288A BR PI0405288 A BRPI0405288 A BR PI0405288A BR PI0405288 A BRPI0405288 A BR PI0405288A
Authority
BR
Brazil
Prior art keywords
composite
semiconductor module
manufacturing
power
foil
Prior art date
Application number
BR0405288-9A
Other languages
English (en)
Inventor
Christian Goebl
Heinrich Heilbronner
Original Assignee
Semikron Elektronik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semikron Elektronik Gmbh filed Critical Semikron Elektronik Gmbh
Publication of BRPI0405288A publication Critical patent/BRPI0405288A/pt
Publication of BRPI0405288B1 publication Critical patent/BRPI0405288B1/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
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    • H01L23/00—Details of semiconductor or other solid state devices
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    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5387—Flexible insulating substrates
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    • H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L24/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L24/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
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    • H01L24/72—Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
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    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
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    • H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
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    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
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    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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    • H01L2924/19043—Component type being a resistor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Inverter Devices (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Die Bonding (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

"MóDULO SEMICONDUTOR DE POTêNCIA E PROCESSO PARA A SUA FABRICAçãO". A presente invenção refere-se a um módulo semicondutor de potência, bem como um processo para a sua fabricação. O módulo é constituído por um substrato (300) com vias condutoras (310) dispostas sobre ele, conforme o circuito, e por componentes semicondutores de potência (202, 204) dispostos sobre essas vias condutoras (310). Além disso, sobre as vias condutoras (310) estão dispostos elementos distanciadores (206), bem como um conjunto de lâminas (100) constituído por duas camadas de lâminas metálicas (110, 130) com uma camada de lâmina (120) eletricamente isolante dispostas entre elas. O conjunto de lâminas (100) apresenta botões de contato (140) e contatos diretos (122). No mínimo uma das camadas de lâminas metálicas (110, 130) está estruturada (112, 132) conforme o circuito e este conjunto de lâminas (100) está ligado de modo duradouro com os componentes semicondutores de potência (202, 204) e com os elementos distanciadores (206) por meio de soldagem por ultra-som.
BRPI0405288A 2003-11-29 2004-11-26 módulo semicondutor de potência e processo para a sua fabricação BRPI0405288B1 (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10355925A DE10355925B4 (de) 2003-11-29 2003-11-29 Leistungshalbleitermodul und Verfahren seiner Herstellung

Publications (2)

Publication Number Publication Date
BRPI0405288A true BRPI0405288A (pt) 2005-07-19
BRPI0405288B1 BRPI0405288B1 (pt) 2017-06-06

Family

ID=34530326

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0405288A BRPI0405288B1 (pt) 2003-11-29 2004-11-26 módulo semicondutor de potência e processo para a sua fabricação

Country Status (9)

Country Link
US (1) US7042074B2 (pt)
EP (1) EP1548829B1 (pt)
JP (1) JP4898112B2 (pt)
KR (1) KR101005132B1 (pt)
AT (1) ATE527692T1 (pt)
BR (1) BRPI0405288B1 (pt)
DE (1) DE10355925B4 (pt)
DK (1) DK1548829T3 (pt)
ES (1) ES2371641T3 (pt)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004059389B4 (de) * 2004-12-09 2012-02-23 Infineon Technologies Ag Halbleiterbauelement mit Ausgleichsmetallisierung
CN100392885C (zh) * 2005-08-18 2008-06-04 璨圆光电股份有限公司 发光二极管结构
US7518236B2 (en) * 2005-10-26 2009-04-14 General Electric Company Power circuit package and fabrication method
DE102005053398B4 (de) * 2005-11-09 2008-12-24 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul
DE102006013078B4 (de) * 2006-03-22 2008-01-03 Semikron Elektronik Gmbh & Co. Kg Kompaktes Leistungshalbleitermodul mit Verbindungseinrichtung
DE102006015198A1 (de) * 2006-04-01 2007-10-11 Semikron Elektronik Gmbh & Co. Kg Verbindungseinrichtung für elektronische Bauelemente
DE102006027482B3 (de) * 2006-06-14 2007-08-16 Semikron Elektronik Gmbh & Co. Kg Gehauste Halbleiterschaltungsanordnung mit Kontakteinrichtung
US7524775B2 (en) 2006-07-13 2009-04-28 Infineon Technologies Ag Method for producing a dielectric layer for an electronic component
FR2905379B1 (fr) * 2006-09-04 2008-11-07 Bertin Technologies Soc Par Ac Dispositif de collecte et de separation de particules et de microorganismes presents dans l'air ambiant
DE102007006706B4 (de) 2007-02-10 2011-05-26 Semikron Elektronik Gmbh & Co. Kg Schaltungsanordnung mit Verbindungseinrichtung sowie Herstellungsverfahren hierzu
JP5261982B2 (ja) * 2007-05-18 2013-08-14 富士電機株式会社 半導体装置及び半導体装置の製造方法
DE102007041124B4 (de) * 2007-08-30 2009-06-04 Infineon Technologies Ag Thyristor mit verbessertem Einschaltverhalten, Thyristoranordnung mit einem Thyristor, Verfahren zur Herstellung eines Thyristors und einer Thyristoranordnung
DE102007044620A1 (de) 2007-09-19 2009-04-16 Semikron Elektronik Gmbh & Co. Kg Anordnung mit einer Verbindungseinrichtung und mindestens einem Halbleiterbauelement
US7838978B2 (en) 2007-09-19 2010-11-23 Infineon Technologies Ag Semiconductor device
JP4582161B2 (ja) * 2008-03-04 2010-11-17 株式会社豊田自動織機 電力変換装置
DE102008014113B4 (de) * 2008-03-13 2014-04-03 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul in Druckkontaktausführung
DE102008017454B4 (de) 2008-04-05 2010-02-04 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul mit hermetisch dichter Schaltungsanordnung und Herstellungsverfahren hierzu
DE102008034468B4 (de) 2008-07-24 2013-03-14 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul
DE102008034467B4 (de) 2008-07-24 2014-04-03 Semikron Elektronik Gmbh & Co. Kg Anordnung mit einem Leistungshalbleitermodul und mit einer Verbindungseinrichtung
DE102008057833B4 (de) * 2008-11-19 2011-12-22 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul mit Steuerfunktionalität und integriertem Übertrager
DE102009000888B4 (de) 2009-02-16 2011-03-24 Semikron Elektronik Gmbh & Co. Kg Halbleiteranordnung
DE102009017733B4 (de) 2009-04-11 2011-12-08 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul mit einer Verbindungseinrichtung und mit als Kontaktfeder ausgebildeten internen Anschlusselementen
DE102009024369B4 (de) * 2009-06-09 2011-12-29 Semikron Elektronik Gmbh & Co. Kg Leistungselektronisches System
DE102009024370B4 (de) * 2009-06-09 2014-04-30 Semikron Elektronik Gmbh & Co. Kg Stromrichteranordnung mit Kühleinrichtung und Herstellungsverfahren hierzu
DE102009024371B4 (de) 2009-06-09 2013-09-19 Semikron Elektronik Gmbh & Co. Kg Verfahren zur Herstellung einer Stromrichteranordnung mit Kühleinrichtung und Stromrichteranordnung
DE102009024385B4 (de) 2009-06-09 2011-03-17 Semikron Elektronik Gmbh & Co. Kg Verfahren zur Herstellung eines Leistungshalbleitermoduls und Leistungshalbleitermodul mit einer Verbindungseinrichtung
US8237252B2 (en) 2009-07-22 2012-08-07 Stats Chippac, Ltd. Semiconductor device and method of embedding thermally conductive layer in interconnect structure for heat dissipation
CN102576705B (zh) * 2009-09-28 2015-10-21 Abb技术有限公司 电路装置及其制造方法
DE102009050178B3 (de) 2009-10-21 2011-05-26 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul mit einem eine dreidimensionale Oberflächenkontur aufweisenden Substrat sowie Herstellungsverfahren hierzu
DE102009046403B4 (de) * 2009-11-04 2015-05-28 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul in Druckkontakttechnik
DE102010012457B4 (de) 2010-03-24 2015-07-30 Semikron Elektronik Gmbh & Co. Kg Schaltungsanordnung mit einer elektrischen Komponente und einer Verbundfolie
DE102010039824B4 (de) 2010-08-26 2018-03-29 Semikron Elektronik Gmbh & Co. Kg Leistungsbaugruppe mit einer flexiblen Verbindungseinrichtung
DE102012202765B3 (de) 2012-02-23 2013-04-18 Semikron Elektronik Gmbh & Co. Kg Halbleitermodul
DE102012210261B4 (de) 2012-06-19 2019-03-28 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul und Verfahren zum Betrieb eines Leistungshalbleitermoduls
DE102012211952B4 (de) * 2012-07-09 2019-04-25 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul mit mindestens einem stressreduzierenden Anpasselement
DE102012213555B4 (de) 2012-08-01 2021-04-22 Semikron Elektronik Gmbh & Co. Kg Verfahren zur Herstellung eines Leistungshalbleitermoduls
DE102012218868B3 (de) 2012-10-17 2013-11-07 Semikron Elektronik Gmbh & Co. Kg Leistungshalbleitermodul
WO2014090686A1 (de) * 2012-12-10 2014-06-19 Abb Technology Ag Leistungshalbleitermodul und kontaktierungsanordnung
US8872328B2 (en) * 2012-12-19 2014-10-28 General Electric Company Integrated power module package
US9337073B2 (en) * 2013-03-12 2016-05-10 Taiwan Semiconductor Manufacturing Company, Ltd. 3D shielding case and methods for forming the same
DE102013102828B4 (de) 2013-03-20 2018-04-12 Semikron Elektronik Gmbh & Co. Kg Leistungsbaugruppe mit einer als Folienverbund ausgebildeten Verbindungseinrichtung
US9190389B2 (en) * 2013-07-26 2015-11-17 Infineon Technologies Ag Chip package with passives
DE102013215592A1 (de) * 2013-08-07 2015-02-12 Siemens Aktiengesellschaft Leistungselektronische Schaltung mit planarer elektrischer Kontaktierung
US9837380B2 (en) 2014-01-28 2017-12-05 Infineon Technologies Austria Ag Semiconductor device having multiple contact clips
JP6274019B2 (ja) * 2014-06-03 2018-02-07 三菱電機株式会社 半導体装置及びその製造方法
US9431311B1 (en) 2015-02-19 2016-08-30 Semiconductor Components Industries, Llc Semiconductor package with elastic coupler and related methods
SG10201504271YA (en) * 2015-05-29 2016-12-29 Delta Electronics Int’L Singapore Pte Ltd Power module
EP3273473B1 (de) 2016-07-22 2020-09-09 SEMIKRON Elektronik GmbH & Co. KG Leistungselektronische schalteinrichtung, anordnung hiermit und verfahren zur herstellung der schalteinrichtung
DE102017211479A1 (de) 2017-07-05 2019-01-10 Robert Bosch Gmbh Kontaktsystem mit einem ultraschallverschweißten Schaltungsträger
DE102018114409A1 (de) 2018-06-15 2019-12-19 Semikron Elektronik Gmbh & Co. Kg Verfahren zur Herstellung einer Schalteinrichtung und Schalteinrichtung
DE102019202720B4 (de) * 2019-02-28 2021-04-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dünnes Chip-Folienpackage für Halbleiter-Chips mit indirekter Kontaktierung und Verfahren zum Herstellen Desselben
DE102019202716B4 (de) 2019-02-28 2020-12-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Flex-folien-package mit coplanarer topologie für hochfrequenzsignale und verfahren zum herstellen eines derartigen flex-folien-packages
DE102019202718B4 (de) 2019-02-28 2020-12-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dünnes Dual-Folienpackage und Verfahren zum Herstellen desselben
DE102019202721B4 (de) 2019-02-28 2021-03-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. 3d-flexfolien-package
DE102019202715A1 (de) 2019-02-28 2020-09-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Folienbasiertes package mit distanzausgleich
DE102019126265B4 (de) * 2019-09-30 2023-12-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung umfassend ein erstes Trägersubstrat und ein zweites Trägersubstrat, Kraftfahrzeug und Verfahren zur Herstellung einer Vorrichtung
DE102020125813A1 (de) 2020-10-02 2022-04-07 Infineon Technologies Ag Verfahren zum herstellen eines chipgehäuses und chipgehäuse
DE102021211519B4 (de) 2021-10-13 2023-11-02 Vitesco Technologies Germany Gmbh Elektronische Baugruppe
US12034033B2 (en) 2022-01-25 2024-07-09 Ge Aviation Systems Llc Semiconductor device package and method of forming
DE102022212323A1 (de) 2022-11-18 2024-05-23 Vitesco Technologies Germany Gmbh Leistungselektronikmodul, Verfahren zum Herstellen eines Leistungselektronikmoduls
DE102022213628A1 (de) 2022-12-14 2024-06-20 Robert Bosch Gesellschaft mit beschränkter Haftung Leistungsmodul
DE102022213629A1 (de) 2022-12-14 2024-06-20 Robert Bosch Gesellschaft mit beschränkter Haftung Leistungsmodul

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783695A (en) * 1986-09-26 1988-11-08 General Electric Company Multichip integrated circuit packaging configuration and method
JPS63126240A (ja) 1986-11-14 1988-05-30 Sharp Corp 電子部品の実装方法
DE4130637A1 (de) * 1990-10-11 1992-04-16 Abb Patent Gmbh Verfahren zur herstellung eines verbindungselements fuer eine verwendung in leistungshalbleitermodulen
US5091769A (en) * 1991-03-27 1992-02-25 Eichelberger Charles W Configuration for testing and burn-in of integrated circuit chips
US5291066A (en) * 1991-11-14 1994-03-01 General Electric Company Moisture-proof electrical circuit high density interconnect module and method for making same
US6274391B1 (en) * 1992-10-26 2001-08-14 Texas Instruments Incorporated HDI land grid array packaged device having electrical and optical interconnects
US5422514A (en) * 1993-05-11 1995-06-06 Micromodule Systems, Inc. Packaging and interconnect system for integrated circuits
JP3453803B2 (ja) * 1993-06-15 2003-10-06 株式会社日立製作所 電子回路基板の配線修正方法およびその装置
TW256013B (en) * 1994-03-18 1995-09-01 Hitachi Seisakusyo Kk Installation board
US5561085A (en) * 1994-12-19 1996-10-01 Martin Marietta Corporation Structure for protecting air bridges on semiconductor chips from damage
JP3593234B2 (ja) * 1996-04-23 2004-11-24 日立電線株式会社 半導体装置用両面配線テープキャリアの製造方法
DE19617055C1 (de) * 1996-04-29 1997-06-26 Semikron Elektronik Gmbh Halbleiterleistungsmodul hoher Packungsdichte in Mehrschichtbauweise
US5841193A (en) * 1996-05-20 1998-11-24 Epic Technologies, Inc. Single chip modules, repairable multichip modules, and methods of fabrication thereof
JPH1050758A (ja) * 1996-08-01 1998-02-20 Hitachi Ltd 超音波接合方法及び接合構造
DE59713027D1 (de) * 1996-09-30 2010-03-25 Infineon Technologies Ag Mikroelektronisches bauteil in sandwich-bauweise
JPH10270591A (ja) * 1997-03-21 1998-10-09 Nec Corp 半導体装置用パッケージおよびその製造方法
US6060772A (en) * 1997-06-30 2000-05-09 Kabushiki Kaisha Toshiba Power semiconductor module with a plurality of semiconductor chips
US5886401A (en) * 1997-09-02 1999-03-23 General Electric Company Structure and fabrication method for interconnecting light emitting diodes with metallization extending through vias in a polymer film overlying the light emitting diodes
JPH11330283A (ja) * 1998-05-15 1999-11-30 Toshiba Corp 半導体モジュール及び大型半導体モジュール
WO2001024260A1 (en) 1999-09-24 2001-04-05 Virginia Tech Intellectual Properties, Inc. Low cost 3d flip-chip packaging technology for integrated power electronics modules
US6154366A (en) * 1999-11-23 2000-11-28 Intel Corporation Structures and processes for fabricating moisture resistant chip-on-flex packages
US6396148B1 (en) * 2000-02-10 2002-05-28 Epic Technologies, Inc. Electroless metal connection structures and methods
DE10037819A1 (de) * 2000-08-03 2002-02-14 Bosch Gmbh Robert Verfahren zur Herstellung von Schaltungsträgern
US6709898B1 (en) * 2000-10-04 2004-03-23 Intel Corporation Die-in-heat spreader microelectronic package
JP2002203942A (ja) * 2000-12-28 2002-07-19 Fuji Electric Co Ltd パワー半導体モジュール
JP2002246515A (ja) * 2001-02-20 2002-08-30 Mitsubishi Electric Corp 半導体装置
DE10121970B4 (de) * 2001-05-05 2004-05-27 Semikron Elektronik Gmbh Leistungshalbleitermodul in Druckkontaktierung
AU2002340750A1 (en) * 2001-09-28 2003-04-14 Siemens Aktiengesellschaft Method for contacting electrical contact surfaces of a substrate and device consisting of a substrate having electrical contact surfaces
TW544882B (en) * 2001-12-31 2003-08-01 Megic Corp Chip package structure and process thereof
US6964881B2 (en) * 2002-08-27 2005-11-15 Micron Technology, Inc. Multi-chip wafer level system packages and methods of forming same
DE10258565B3 (de) * 2002-12-14 2004-08-12 Semikron Elektronik Gmbh Schaltungsanordnung für Halbleiterbauelemente und Verfahren zur Herstellung

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US7042074B2 (en) 2006-05-09
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US20050127503A1 (en) 2005-06-16
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