AU7114600A - Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization - Google Patents

Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization

Info

Publication number
AU7114600A
AU7114600A AU71146/00A AU7114600A AU7114600A AU 7114600 A AU7114600 A AU 7114600A AU 71146/00 A AU71146/00 A AU 71146/00A AU 7114600 A AU7114600 A AU 7114600A AU 7114600 A AU7114600 A AU 7114600A
Authority
AU
Australia
Prior art keywords
conditioning
planarizing
planarizing medium
chemical
media used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU71146/00A
Other languages
English (en)
Inventor
Scott E. Moore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micron Technology Inc
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Publication of AU7114600A publication Critical patent/AU7114600A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/18—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the presence of dressing tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Lubricants (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Paper (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU71146/00A 1999-08-31 2000-08-31 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization Abandoned AU7114600A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09387063 1999-08-31
US09/387,063 US6306008B1 (en) 1999-08-31 1999-08-31 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization
PCT/US2000/024345 WO2001015865A1 (en) 1999-08-31 2000-08-31 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization

Publications (1)

Publication Number Publication Date
AU7114600A true AU7114600A (en) 2001-03-26

Family

ID=23528304

Family Applications (1)

Application Number Title Priority Date Filing Date
AU71146/00A Abandoned AU7114600A (en) 1999-08-31 2000-08-31 Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization

Country Status (8)

Country Link
US (9) US6306008B1 (enExample)
EP (1) EP1222056B1 (enExample)
JP (1) JP4596228B2 (enExample)
KR (1) KR100708227B1 (enExample)
AT (1) ATE380628T1 (enExample)
AU (1) AU7114600A (enExample)
DE (2) DE60037438D1 (enExample)
WO (1) WO2001015865A1 (enExample)

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US6572440B2 (en) 2003-06-03
DE10084938B4 (de) 2010-07-29
US20060003673A1 (en) 2006-01-05
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US6755718B2 (en) 2004-06-29
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US20010006872A1 (en) 2001-07-05
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US20010006874A1 (en) 2001-07-05
EP1222056A1 (en) 2002-07-17
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US20010006873A1 (en) 2001-07-05
US6773332B2 (en) 2004-08-10
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US6969297B2 (en) 2005-11-29

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