ATE505813T1 - Herstellung von luftspalten um eine verbindungsleitung herum - Google Patents

Herstellung von luftspalten um eine verbindungsleitung herum

Info

Publication number
ATE505813T1
ATE505813T1 AT04447219T AT04447219T ATE505813T1 AT E505813 T1 ATE505813 T1 AT E505813T1 AT 04447219 T AT04447219 T AT 04447219T AT 04447219 T AT04447219 T AT 04447219T AT E505813 T1 ATE505813 T1 AT E505813T1
Authority
AT
Austria
Prior art keywords
gapes
around
connection pipe
creating air
airgaps
Prior art date
Application number
AT04447219T
Other languages
German (de)
English (en)
Inventor
Gerald Beyer
De Mussy Jean-Paul Gueneau
Karen Maex
Victor Sutcliffe
Original Assignee
Imec
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec filed Critical Imec
Application granted granted Critical
Publication of ATE505813T1 publication Critical patent/ATE505813T1/de

Links

Classifications

    • H10W20/096—
    • H10W10/021—
    • H10W10/20—
    • H10W20/072—
    • H10W20/081—
    • H10W20/46—
    • H10P14/6334—
    • H10P14/6336—
    • H10P14/6342—
    • H10P14/665—
    • H10P14/6905—
    • H10P14/6922—
    • H10P50/283—
    • H10W20/071—
    • H10W20/0765—
    • H10W20/095—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Drying Of Semiconductors (AREA)
  • Window Of Vehicle (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
AT04447219T 2003-09-30 2004-09-30 Herstellung von luftspalten um eine verbindungsleitung herum ATE505813T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US50761303P 2003-09-30 2003-09-30

Publications (1)

Publication Number Publication Date
ATE505813T1 true ATE505813T1 (de) 2011-04-15

Family

ID=34312477

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04447219T ATE505813T1 (de) 2003-09-30 2004-09-30 Herstellung von luftspalten um eine verbindungsleitung herum

Country Status (5)

Country Link
US (2) US7078352B2 (enExample)
EP (1) EP1521302B1 (enExample)
JP (1) JP4864307B2 (enExample)
AT (1) ATE505813T1 (enExample)
DE (1) DE602004032198D1 (enExample)

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Also Published As

Publication number Publication date
EP1521302B1 (en) 2011-04-13
US20050074961A1 (en) 2005-04-07
EP1521302A1 (en) 2005-04-06
US7078352B2 (en) 2006-07-18
JP2005123607A (ja) 2005-05-12
JP4864307B2 (ja) 2012-02-01
DE602004032198D1 (de) 2011-05-26
US7319274B2 (en) 2008-01-15
US20060177990A1 (en) 2006-08-10

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