ATE366952T1 - Positiv arbeitende lichtempfindliche polyimidvorstufen-zusammensetzung - Google Patents

Positiv arbeitende lichtempfindliche polyimidvorstufen-zusammensetzung

Info

Publication number
ATE366952T1
ATE366952T1 AT00931608T AT00931608T ATE366952T1 AT E366952 T1 ATE366952 T1 AT E366952T1 AT 00931608 T AT00931608 T AT 00931608T AT 00931608 T AT00931608 T AT 00931608T AT E366952 T1 ATE366952 T1 AT E366952T1
Authority
AT
Austria
Prior art keywords
range
group
general formula
integer
ester
Prior art date
Application number
AT00931608T
Other languages
English (en)
Inventor
Masao Tomikawa
Mitsuhito Suwa
Yoji Fujita
Original Assignee
Toray Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP15372299A external-priority patent/JP4221819B2/ja
Priority claimed from JP28246699A external-priority patent/JP4449119B2/ja
Application filed by Toray Industries filed Critical Toray Industries
Application granted granted Critical
Publication of ATE366952T1 publication Critical patent/ATE366952T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06—Polymers provided for in subclass C08G
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
AT00931608T 1999-06-01 2000-05-30 Positiv arbeitende lichtempfindliche polyimidvorstufen-zusammensetzung ATE366952T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15372299A JP4221819B2 (ja) 1999-06-01 1999-06-01 感光性樹脂前駆体組成物
JP17960599 1999-06-25
JP28246699A JP4449119B2 (ja) 1999-06-25 1999-10-04 ポジ型感光性樹脂前駆体組成物

Publications (1)

Publication Number Publication Date
ATE366952T1 true ATE366952T1 (de) 2007-08-15

Family

ID=27320522

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00931608T ATE366952T1 (de) 1999-06-01 2000-05-30 Positiv arbeitende lichtempfindliche polyimidvorstufen-zusammensetzung

Country Status (8)

Country Link
US (1) US6524764B1 (de)
EP (1) EP1132773B1 (de)
KR (1) KR100721477B1 (de)
CN (1) CN1275094C (de)
AT (1) ATE366952T1 (de)
DE (1) DE60035482T2 (de)
TW (1) TWI230182B (de)
WO (1) WO2000073852A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4665333B2 (ja) 2000-11-27 2011-04-06 東レ株式会社 ポジ型感光性樹脂前駆体組成物
KR20030043702A (ko) * 2001-11-26 2003-06-02 간사이 페인트 가부시키가이샤 폴리벤족사졸 전구체 및 그것을 이용하는 피복용 조성물
TW200408908A (en) * 2002-11-21 2004-06-01 Ind Tech Res Inst Positive-working photosensitive composition and method of patern formation using the same
JP4099114B2 (ja) * 2003-06-26 2008-06-11 Ａｚエレクトロニックマテリアルズ株式会社 感光性樹脂組成物
TWI360565B (en) * 2003-07-09 2012-03-21 Toray Industries Photosensitive resin precursor composition
TWI363249B (en) * 2003-10-15 2012-05-01 Fujifilm Electronic Materials Novel photosensitive resin compositions
TW200702913A (en) * 2005-06-03 2007-01-16 Fujifilm Electronic Materials Pretreatment compositions
CN101611350B (zh) * 2007-02-13 2012-08-08 东丽株式会社 正型感光性树脂组合物
EP2555053B1 (de) 2007-02-13 2017-10-18 Toray Industries, Inc. Positive lichtempfindliche harzzusammensetzung
US8598748B2 (en) * 2007-09-11 2013-12-03 Xtreme Ads Limited Roller spark gap
TWI490651B (zh) * 2013-03-26 2015-07-01 Chi Mei Corp 正型感光性樹脂組成物及其圖案形成方法
TWI483968B (zh) * 2013-09-17 2015-05-11 Daxin Materials Corp 聚合物、液晶配向劑、液晶配向膜以及液晶顯示元件
CN104678704A (zh) * 2014-06-30 2015-06-03 广东丹邦科技有限公司 一种水溶性正型感光聚酰亚胺及制作其图案化薄膜的方法
CN107079560B (zh) * 2014-09-26 2018-09-25 东丽株式会社 有机el显示装置
JP6801452B2 (ja) * 2015-03-24 2020-12-16 東レ株式会社 感光性樹脂組成物
US9477148B1 (en) 2015-05-26 2016-10-25 Industrial Technology Research Institute Polymer, method for preparing the same, and a photosensitive resin composition thereof
KR20200037018A (ko) * 2018-09-28 2020-04-08 삼성디스플레이 주식회사 감광성 수지 조성물 및 이를 포함하는 표시 장치
US10961624B2 (en) * 2019-04-02 2021-03-30 Gelest Technologies, Inc. Process for pulsed thin film deposition
CN114436910B (zh) * 2020-11-02 2024-01-26 北京鼎材科技有限公司 重氮萘醌磺酸酯化合物、树脂组合物

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JPS5763526A (en) * 1980-10-04 1982-04-17 Ricoh Co Ltd Photosensitive material
US4957846A (en) * 1988-12-27 1990-09-18 Olin Hunt Specialty Products Inc. Radiation sensitive compound and mixtures with trinuclear novolak oligomer with o-naphthoquinone diazide sulfonyl group
EP0431971B1 (de) * 1989-12-07 1995-07-19 Kabushiki Kaisha Toshiba Lichtempfindliche Zusammensetzung und harzumhüllte Halbleiteranordnung
JPH05297582A (ja) * 1992-04-23 1993-11-12 Fuji Photo Film Co Ltd ポジ型フオトレジスト組成物
KR0134753B1 (ko) * 1993-02-26 1998-04-18 사토 후미오 폴리아미드산 조성물
JPH07104467A (ja) * 1993-10-05 1995-04-21 Shin Etsu Chem Co Ltd ポジ型レジスト組成物及びパターン形成方法
JP3275505B2 (ja) * 1993-12-02 2002-04-15 日本ゼオン株式会社 ポジ型レジスト組成物
JP3224115B2 (ja) * 1994-03-17 2001-10-29 富士写真フイルム株式会社 ポジ型フオトレジスト組成物
JP3460212B2 (ja) * 1994-08-12 2003-10-27 Ｊｓｒ株式会社 感放射線性樹脂組成物
US5866724A (en) 1995-10-18 1999-02-02 Sumitomo Chemical Company, Limited Positive resist composition and photosensitizers
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JP3440832B2 (ja) * 1997-07-14 2003-08-25 東レ株式会社 感光性ポリイミド前駆体組成物
JPH11106651A (ja) * 1997-10-01 1999-04-20 Toray Ind Inc 感光性耐熱性樹脂前駆体組成物
JP2000075478A (ja) * 1998-08-31 2000-03-14 Toray Ind Inc ポジ型感光性樹脂前駆体組成物
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JP2000143980A (ja) * 1998-11-05 2000-05-26 Toray Ind Inc ポジ型感光性樹脂前駆体組成物

Also Published As

Publication number Publication date
CN1310809A (zh) 2001-08-29
KR100721477B1 (ko) 2007-05-23
EP1132773A4 (de) 2002-09-18
EP1132773A1 (de) 2001-09-12
EP1132773B1 (de) 2007-07-11
TWI230182B (en) 2005-04-01
DE60035482D1 (de) 2007-08-23
US6524764B1 (en) 2003-02-25
CN1275094C (zh) 2006-09-13
WO2000073852A1 (fr) 2000-12-07
KR20010053617A (ko) 2001-06-25
DE60035482T2 (de) 2008-04-17

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