AR021594A1 - SENSOR DE CAPTACIoN CAPACITIVO PARA UN DISPOSITIVO DE MEDICIoN DE FLUJO MÁSICO - Google Patents

SENSOR DE CAPTACIoN CAPACITIVO PARA UN DISPOSITIVO DE MEDICIoN DE FLUJO MÁSICO

Info

Publication number
AR021594A1
AR021594A1 ARP990106261A ARP990106261A AR021594A1 AR 021594 A1 AR021594 A1 AR 021594A1 AR P990106261 A ARP990106261 A AR P990106261A AR P990106261 A ARP990106261 A AR P990106261A AR 021594 A1 AR021594 A1 AR 021594A1
Authority
AR
Argentina
Prior art keywords
flow sensor
sensor tube
flow
conductive plate
relation
Prior art date
Application number
ARP990106261A
Other languages
English (en)
Original Assignee
Emerson Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/326,949 external-priority patent/US6513392B1/en
Priority claimed from US09/430,881 external-priority patent/US6526839B1/en
Application filed by Emerson Electric Co filed Critical Emerson Electric Co
Publication of AR021594A1 publication Critical patent/AR021594A1/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8404—Coriolis or gyroscopic mass flowmeters details of flowmeter manufacturing methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8422—Coriolis or gyroscopic mass flowmeters constructional details exciters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8436—Coriolis or gyroscopic mass flowmeters constructional details signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/8472—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Signal Processing (AREA)
  • Measuring Volume Flow (AREA)

Abstract

Un sensor de flujo másico de efecto Coriolis comprende un tubo sensor de flujo, un mecanismo de accionamiento situado en relacion al tubo sensor de flujode manera de hacer vibrar el tubo sensor de flujo, y sensores de captacion situados en relacionc on el tubo sensor de flujo, de forma tal de medir la torsionen el tubo sensor de flujo a consecuencia de la fuerza de Coriolis. Se revela un sensor de captacion capacitivo que comprende al menos una placa conductora aun primer potencial de tensiony adaptado para situarse adyacente al tubo sensor de flujo que se conecta a un segundo potencial de tension. La placa conductorase dispone en relacion con el tubo sensor de flujo, de forma tal de definir un huelgo entre ellas. La capacitancia entrela placa conductora y el tubo sensorde flujo varía a consecuencia del movimiento relativo de la placa conductora y el tubo sensor de flujo cuando vibra el tubo sensor de flujo. Pueden utilizarsemecanismos electromagnéticos, electrostáticos,acusticos y/ o piezoeléctricos para hacer vibrar el tubo sensor de flujo. El controlador de flujo másico deefecto Coriolis además puede incluir un dispositivo integrado de control de caudal adaptado para recibir el flujo desde el tubo sensor deflujo y proveer el control de caudal.
ARP990106261A 1998-12-08 1999-12-09 SENSOR DE CAPTACIoN CAPACITIVO PARA UN DISPOSITIVO DE MEDICIoN DE FLUJO MÁSICO AR021594A1 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11150498P 1998-12-08 1998-12-08
US09/326,949 US6513392B1 (en) 1998-12-08 1999-06-07 Coriolis mass flow controller
US09/430,881 US6526839B1 (en) 1998-12-08 1999-11-01 Coriolis mass flow controller and capacitive pick off sensor

Publications (1)

Publication Number Publication Date
AR021594A1 true AR021594A1 (es) 2002-07-31

Family

ID=46149828

Family Applications (3)

Application Number Title Priority Date Filing Date
ARP990106261A AR021594A1 (es) 1998-12-08 1999-12-09 SENSOR DE CAPTACIoN CAPACITIVO PARA UN DISPOSITIVO DE MEDICIoN DE FLUJO MÁSICO
ARP060102498A AR054774A2 (es) 1998-12-08 2006-06-13 Sensor de flujo masicico de efecto cariolis
ARP060102499A AR054775A2 (es) 1998-12-08 2006-06-13 Dispositivo y metodo para determinar el flujo masico

Family Applications After (2)

Application Number Title Priority Date Filing Date
ARP060102498A AR054774A2 (es) 1998-12-08 2006-06-13 Sensor de flujo masicico de efecto cariolis
ARP060102499A AR054775A2 (es) 1998-12-08 2006-06-13 Dispositivo y metodo para determinar el flujo masico

Country Status (14)

Country Link
EP (4) EP1137914B1 (es)
JP (3) JP4165732B2 (es)
KR (6) KR100883622B1 (es)
CN (1) CN100443861C (es)
AR (3) AR021594A1 (es)
AU (1) AU771345B2 (es)
BR (1) BR9915802B1 (es)
CA (4) CA2683770C (es)
HK (5) HK1044985B (es)
ID (1) ID29450A (es)
MX (1) MXPA01005768A (es)
MY (1) MY128330A (es)
PL (1) PL198415B1 (es)
WO (1) WO2000034748A2 (es)

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US6526839B1 (en) 1998-12-08 2003-03-04 Emerson Electric Co. Coriolis mass flow controller and capacitive pick off sensor
US6513392B1 (en) 1998-12-08 2003-02-04 Emerson Electric Co. Coriolis mass flow controller
US6748813B1 (en) 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
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DE102013113689B4 (de) 2013-12-09 2018-02-01 Endress + Hauser Flowtec Ag Dichte-Meßgerät
WO2015090776A1 (de) 2013-12-20 2015-06-25 Endress+Hauser Flowtec Ag Spule
DE102013114731A1 (de) 2013-12-20 2015-06-25 Endress+Hauser Flowtec Ag Spule
JP2018091810A (ja) * 2016-12-07 2018-06-14 アイシン精機株式会社 静電センサ
CN106768115B (zh) * 2017-01-23 2023-04-18 成都安迪生精测科技有限公司 一种高真空质量流量计
DE102017121157A1 (de) 2017-08-09 2019-02-14 Endress+Hauser Flowtec Ag Spule sowie Meßwandler mit einer solchen Spule
DE102017131199A1 (de) 2017-12-22 2019-06-27 Endress + Hauser Flowtec Ag Coriolis-Massendurchfluß-Meßgerät
DE102018133117A1 (de) 2018-12-20 2020-06-25 Endress+Hauser Flowtec Ag Coriolis-Massendurchfluß-Meßgerät
CN113242960B (zh) 2018-12-20 2024-05-14 恩德斯+豪斯流量技术股份有限公司 科里奥利质量流量计
US20220099543A1 (en) 2018-12-20 2022-03-31 Endress+Hauser Flowtec Ag Coriolis mass flow meter
WO2020126286A1 (de) 2018-12-21 2020-06-25 Endress+Hauser Flowtec Ag CORIOLIS-MASSENDURCHFLUß-MEßGERÄT MIT MAGNETFELDDETEKTOR
JP2020140711A (ja) * 2019-02-26 2020-09-03 株式会社フジキン マスフローコントローラ、流体制御装置、半導体製造装置および半導体製造方法
WO2021049105A1 (ja) * 2019-09-12 2021-03-18 株式会社堀場エステック コリオリ流量計、流量測定方法、及び、コリオリ流量計用プログラム
DE102019133610A1 (de) 2019-12-09 2021-06-10 Endress + Hauser Flowtec Ag Vibronisches Meßsystem zum Messen eines Massestroms eines fluiden Meßstoff
DE102020127382A1 (de) 2020-10-16 2022-04-21 Endress+Hauser Flowtec Ag Verfahren zum Überprüfen eines vibronischen Meßsystems
DE102020134707A1 (de) * 2020-12-22 2022-06-23 Endress+Hauser Flowtec Ag Coriolis-Massedurchflussmessgerät und Verfahren zum Bestimmen von Einflussgrößen auf dessen totalen Nullpunktfehler, Verfahren zum Ermitteln des totalen Nullpunktfehlers und Betriebsverfahren dafür
DE102022112523A1 (de) 2022-05-18 2023-11-23 Endress+Hauser Flowtec Ag Vibronisches Meßsystem
DE102022116111A1 (de) 2022-06-28 2023-12-28 Endress+Hauser Flowtec Ag Vibronisches Meßsystem

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Also Published As

Publication number Publication date
AR054774A2 (es) 2007-07-18
HK1044985A1 (en) 2002-11-08
KR20070114849A (ko) 2007-12-04
WO2000034748A3 (en) 2000-11-16
JP4165732B2 (ja) 2008-10-15
ID29450A (id) 2001-08-30
AR054775A2 (es) 2007-07-18
EP1137914A2 (en) 2001-10-04
PL198415B1 (pl) 2008-06-30
HK1087174A1 (en) 2006-10-06
JP2002531859A (ja) 2002-09-24
WO2000034748A2 (en) 2000-06-15
CA2354697A1 (en) 2000-06-15
HK1116862A1 (en) 2009-01-02
EP2071297A3 (en) 2009-12-09
KR100883622B1 (ko) 2009-02-13
EP1137914B1 (en) 2017-04-26
AU2477200A (en) 2000-06-26
BR9915802B1 (pt) 2011-12-13
WO2000034748A9 (en) 2001-05-25
JP2008256710A (ja) 2008-10-23
CA2354697C (en) 2010-07-13
EP2088403A3 (en) 2018-01-31
EP2131161A1 (en) 2009-12-09
MXPA01005768A (es) 2004-01-29
CA2683770A1 (en) 2000-06-15
KR20070067737A (ko) 2007-06-28
HK1134338A1 (en) 2010-04-23
KR100846692B1 (ko) 2008-07-16
CA2684010C (en) 2012-10-23
HK1044985B (zh) 2009-08-07
CN100443861C (zh) 2008-12-17
KR100678430B1 (ko) 2007-02-05
JP4680282B2 (ja) 2011-05-11
KR20020000757A (ko) 2002-01-05
CA2683770C (en) 2013-08-13
CA2684135A1 (en) 2000-06-15
KR20060116260A (ko) 2006-11-14
CA2684135C (en) 2013-05-21
KR20080014142A (ko) 2008-02-13
EP2071297A2 (en) 2009-06-17
KR20080015503A (ko) 2008-02-19
CN1329714A (zh) 2002-01-02
MY128330A (en) 2007-01-31
AU771345B2 (en) 2004-03-18
JP2008268227A (ja) 2008-11-06
BR9915802A (pt) 2001-08-21
HK1134347A1 (en) 2010-04-23
KR100880286B1 (ko) 2009-01-28
KR100880285B1 (ko) 2009-01-28
EP2088403A2 (en) 2009-08-12
CA2684010A1 (en) 2000-06-15

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