HK1134338A1 - Coriolis mass flow controller - Google Patents

Coriolis mass flow controller

Info

Publication number
HK1134338A1
HK1134338A1 HK09111687.6A HK09111687A HK1134338A1 HK 1134338 A1 HK1134338 A1 HK 1134338A1 HK 09111687 A HK09111687 A HK 09111687A HK 1134338 A1 HK1134338 A1 HK 1134338A1
Authority
HK
Hong Kong
Prior art keywords
mass flow
flow controller
coriolis mass
coriolis
controller
Prior art date
Application number
HK09111687.6A
Other languages
English (en)
Inventor
Michael J Barger
Joseph C Dille
Jeffrey L Whiteley
Timothy W Scott
Original Assignee
Emerson Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/326,949 external-priority patent/US6513392B1/en
Priority claimed from US09/430,881 external-priority patent/US6526839B1/en
Application filed by Emerson Electric Co filed Critical Emerson Electric Co
Publication of HK1134338A1 publication Critical patent/HK1134338A1/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8404—Coriolis or gyroscopic mass flowmeters details of flowmeter manufacturing methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8422—Coriolis or gyroscopic mass flowmeters constructional details exciters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427—Coriolis or gyroscopic mass flowmeters constructional details detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8436—Coriolis or gyroscopic mass flowmeters constructional details signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/8472—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Signal Processing (AREA)
  • Measuring Volume Flow (AREA)
HK09111687.6A 1998-12-08 2009-12-11 Coriolis mass flow controller HK1134338A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11150498P 1998-12-08 1998-12-08
US09/326,949 US6513392B1 (en) 1998-12-08 1999-06-07 Coriolis mass flow controller
US09/430,881 US6526839B1 (en) 1998-12-08 1999-11-01 Coriolis mass flow controller and capacitive pick off sensor

Publications (1)

Publication Number Publication Date
HK1134338A1 true HK1134338A1 (en) 2010-04-23

Family

ID=46149828

Family Applications (5)

Application Number Title Priority Date Filing Date
HK02104383.5A HK1044985B (zh) 1998-12-08 2002-06-12 電容拾取傳感器
HK08111254.0A HK1116862A1 (en) 1998-12-08 2002-06-12 Coriolis mass flow controller
HK06107350.3A HK1087174A1 (en) 1998-12-08 2002-06-12 Coriolis mass flow controller
HK09111687.6A HK1134338A1 (en) 1998-12-08 2009-12-11 Coriolis mass flow controller
HK09111686.7A HK1134347A1 (en) 1998-12-08 2009-12-11 Coriolis mass flow controller

Family Applications Before (3)

Application Number Title Priority Date Filing Date
HK02104383.5A HK1044985B (zh) 1998-12-08 2002-06-12 電容拾取傳感器
HK08111254.0A HK1116862A1 (en) 1998-12-08 2002-06-12 Coriolis mass flow controller
HK06107350.3A HK1087174A1 (en) 1998-12-08 2002-06-12 Coriolis mass flow controller

Family Applications After (1)

Application Number Title Priority Date Filing Date
HK09111686.7A HK1134347A1 (en) 1998-12-08 2009-12-11 Coriolis mass flow controller

Country Status (14)

Country Link
EP (4) EP2088403A3 (xx)
JP (3) JP4165732B2 (xx)
KR (6) KR100883622B1 (xx)
CN (1) CN100443861C (xx)
AR (3) AR021594A1 (xx)
AU (1) AU771345B2 (xx)
BR (1) BR9915802B1 (xx)
CA (4) CA2684135C (xx)
HK (5) HK1044985B (xx)
ID (1) ID29450A (xx)
MX (1) MXPA01005768A (xx)
MY (1) MY128330A (xx)
PL (1) PL198415B1 (xx)
WO (1) WO2000034748A2 (xx)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6526839B1 (en) * 1998-12-08 2003-03-04 Emerson Electric Co. Coriolis mass flow controller and capacitive pick off sensor
US6513392B1 (en) 1998-12-08 2003-02-04 Emerson Electric Co. Coriolis mass flow controller
US6748813B1 (en) 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
TW466136B (en) * 2000-01-28 2001-12-01 F L Smidth & Amp Co As Method and apparatus for grinding of particulate material
CA2354957C (en) * 2000-08-18 2011-10-04 Micro Motion, Inc. Coriolis mass flow controller
JP2002350207A (ja) * 2001-05-29 2002-12-04 Kazumasa Onishi コリオリ流量計
US20030098069A1 (en) 2001-11-26 2003-05-29 Sund Wesley E. High purity fluid delivery system
KR20080039498A (ko) 2005-08-18 2008-05-07 마이크로 모우션, 인코포레이티드 유량계의 다상 유동 물질에 대한 센서 신호를 처리하기위한 방법 및 계측 전자장치
EP2682721B1 (en) * 2005-10-06 2021-03-17 Micro Motion Inc. Magnet assembly
DK1949047T3 (en) * 2005-10-18 2015-04-20 Micro Motion Inc Electronic device for measurement and the methods for determining a difference in phase between a first sensor signal and a second sensor signal of a flow meter
KR101042337B1 (ko) * 2008-09-30 2011-06-17 주식회사 엘지생활건강 화장품 용기
US7930115B2 (en) 2008-10-15 2011-04-19 Honeywell International Inc. Low-power flow meter and related method
EP2478339B1 (en) * 2009-09-14 2017-05-24 Micro Motion, Inc. Corrosion-resistant coating for a vibratory flowmeter and method for forming the coating
EP2888562A1 (en) * 2012-08-21 2015-07-01 Micro Motion, Inc. Coriolis flowmeter and method with improved meter zero
DE102013113689B4 (de) 2013-12-09 2018-02-01 Endress + Hauser Flowtec Ag Dichte-Meßgerät
DE102013114731A1 (de) 2013-12-20 2015-06-25 Endress+Hauser Flowtec Ag Spule
WO2015090776A1 (de) 2013-12-20 2015-06-25 Endress+Hauser Flowtec Ag Spule
JP2018091810A (ja) * 2016-12-07 2018-06-14 アイシン精機株式会社 静電センサ
CN106768115B (zh) * 2017-01-23 2023-04-18 成都安迪生精测科技有限公司 一种高真空质量流量计
DE102017121157A1 (de) 2017-08-09 2019-02-14 Endress+Hauser Flowtec Ag Spule sowie Meßwandler mit einer solchen Spule
DE102017131199A1 (de) 2017-12-22 2019-06-27 Endress + Hauser Flowtec Ag Coriolis-Massendurchfluß-Meßgerät
DE102018133117A1 (de) 2018-12-20 2020-06-25 Endress+Hauser Flowtec Ag Coriolis-Massendurchfluß-Meßgerät
US20220099543A1 (en) 2018-12-20 2022-03-31 Endress+Hauser Flowtec Ag Coriolis mass flow meter
EP3899447B1 (de) 2018-12-20 2023-09-20 Endress + Hauser Flowtec AG Coriolis-massendurchfluss-messgerät
EP3899448B1 (de) 2018-12-21 2024-03-27 Endress + Hauser Flowtec AG Coriolis-massendurchfluss-messer mit magnetfelddetektor
JP2020140711A (ja) * 2019-02-26 2020-09-03 株式会社フジキン マスフローコントローラ、流体制御装置、半導体製造装置および半導体製造方法
JP7429703B2 (ja) 2019-09-12 2024-02-08 株式会社堀場エステック コリオリ流量計、流量測定方法、及び、コリオリ流量計用プログラム
DE102019133610A1 (de) 2019-12-09 2021-06-10 Endress + Hauser Flowtec Ag Vibronisches Meßsystem zum Messen eines Massestroms eines fluiden Meßstoff
DE102020127382A1 (de) 2020-10-16 2022-04-21 Endress+Hauser Flowtec Ag Verfahren zum Überprüfen eines vibronischen Meßsystems
DE102020134707A1 (de) * 2020-12-22 2022-06-23 Endress+Hauser Flowtec Ag Coriolis-Massedurchflussmessgerät und Verfahren zum Bestimmen von Einflussgrößen auf dessen totalen Nullpunktfehler, Verfahren zum Ermitteln des totalen Nullpunktfehlers und Betriebsverfahren dafür
DE102022112523A1 (de) 2022-05-18 2023-11-23 Endress+Hauser Flowtec Ag Vibronisches Meßsystem
DE102022116111A1 (de) 2022-06-28 2023-12-28 Endress+Hauser Flowtec Ag Vibronisches Meßsystem

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2070435A5 (xx) * 1969-12-04 1971-09-10 Lignes Telegraph Telephon
JPS58206926A (ja) * 1982-04-30 1983-12-02 Yokogawa Hokushin Electric Corp 質量流量計
JPH0650090B2 (ja) * 1983-05-17 1994-06-29 日産自動車株式会社 分配型燃料噴射ポンプの燃料遮断弁
US4747312A (en) 1986-02-21 1988-05-31 Fischer & Porter Co. Double-loop Coriolis type mass flowmeter
JPS63231603A (ja) * 1987-03-20 1988-09-27 Tokico Ltd 流量制御装置
US5069074A (en) * 1987-07-22 1991-12-03 Exac Corporation Apparatus and method for measuring the mass flow rate of material flowing through at least one vibrating conduit
GB8809715D0 (en) * 1988-04-25 1988-06-02 Pa Consulting Services Fluid mass flow & density sensor
DE3923409A1 (de) * 1989-07-14 1991-01-24 Danfoss As Nach dem coriolis-prinzip arbeitendes massendurchfluss-messgeraet
JPH0429578A (ja) * 1990-05-24 1992-01-31 Canon Inc 振動波モータの駆動回路
DE4027936A1 (de) * 1990-09-04 1992-03-05 Rota Yokogawa Gmbh & Co Kg Massedosierautomat
DE9012610U1 (de) * 1990-09-04 1990-11-08 Zaschel, Jörg, Dr., 7410 Reutlingen Massedosierautomat
DE4032661A1 (de) * 1990-10-15 1992-04-16 Basf Ag Verfahren zur regelung des massenstromes fluider medien
WO1992014123A1 (en) * 1991-02-05 1992-08-20 Donald Reed Cage Improved coriolis mass flow rate meter
JPH053754U (ja) * 1991-06-28 1993-01-22 エヌオーケー株式会社 電磁弁
JP2951456B2 (ja) * 1991-12-04 1999-09-20 義朗 富川 コリオリ質量流量計
JPH05306786A (ja) * 1992-05-06 1993-11-19 Mitsubishi Heavy Ind Ltd 電磁弁
JPH0650784A (ja) * 1992-07-28 1994-02-25 Fuji Electric Co Ltd 質量流量計
FR2698962B1 (fr) * 1992-12-07 1995-02-10 Commissariat Energie Atomique Procédé et dispositif de mesure sans contact de la tension et de la vitesse de défilement d'un fil.
DE9306625U1 (de) * 1993-05-03 1993-07-15 Feige GmbH, Abfülltechnik, 2060 Bad Oldesloe Füllvorrichtung für flexible Behälter
DE4327052C3 (de) * 1993-08-12 1998-10-22 Krohne Ag Massendurchflußmeßgerät
JPH07198392A (ja) * 1993-12-28 1995-08-01 Canon Inc 圧電素子および圧電素子の分極処理方法並びに振動ジャイロ
GB9404416D0 (en) * 1994-03-08 1994-04-20 Turner Intellect Property Ltd Device for finding concealed studs
JP3219122B2 (ja) * 1994-07-11 2001-10-15 横河電機株式会社 コリオリ質量流量計
US5691693A (en) * 1995-09-28 1997-11-25 Advanced Safety Concepts, Inc. Impaired transportation vehicle operator system
IL112218A0 (en) * 1995-01-02 1995-03-30 Netzer Yishay A method and apparatus for measuring linear displacements
JPH08327368A (ja) * 1995-05-30 1996-12-13 Murata Mfg Co Ltd 圧電振動子
JP3555632B2 (ja) * 1995-08-30 2004-08-18 横河電機株式会社 コリオリ質量流量計
DE19605923C2 (de) * 1996-02-17 2001-09-13 Danfoss As Durchflußmesser
DE19621365C2 (de) * 1996-05-29 1999-12-02 Krohne Ag Basel Massendurchflußmeßgerät

Also Published As

Publication number Publication date
AU2477200A (en) 2000-06-26
BR9915802B1 (pt) 2011-12-13
CA2354697C (en) 2010-07-13
CA2683770A1 (en) 2000-06-15
PL198415B1 (pl) 2008-06-30
WO2000034748A9 (en) 2001-05-25
EP2071297A2 (en) 2009-06-17
EP2131161A1 (en) 2009-12-09
KR20070067737A (ko) 2007-06-28
KR20060116260A (ko) 2006-11-14
KR20080014142A (ko) 2008-02-13
AR054774A2 (es) 2007-07-18
HK1044985A1 (en) 2002-11-08
CA2683770C (en) 2013-08-13
CA2684135A1 (en) 2000-06-15
KR20070114849A (ko) 2007-12-04
KR20020000757A (ko) 2002-01-05
WO2000034748A2 (en) 2000-06-15
MXPA01005768A (es) 2004-01-29
HK1116862A1 (en) 2009-01-02
EP2071297A3 (en) 2009-12-09
KR100678430B1 (ko) 2007-02-05
JP2002531859A (ja) 2002-09-24
EP1137914B1 (en) 2017-04-26
HK1044985B (zh) 2009-08-07
EP2088403A2 (en) 2009-08-12
KR100880285B1 (ko) 2009-01-28
EP2088403A3 (en) 2018-01-31
KR100880286B1 (ko) 2009-01-28
JP4680282B2 (ja) 2011-05-11
BR9915802A (pt) 2001-08-21
CA2684010A1 (en) 2000-06-15
HK1087174A1 (en) 2006-10-06
KR100846692B1 (ko) 2008-07-16
HK1134347A1 (en) 2010-04-23
ID29450A (id) 2001-08-30
KR100883622B1 (ko) 2009-02-13
CN100443861C (zh) 2008-12-17
CN1329714A (zh) 2002-01-02
AR021594A1 (es) 2002-07-31
CA2354697A1 (en) 2000-06-15
JP2008256710A (ja) 2008-10-23
WO2000034748A3 (en) 2000-11-16
CA2684010C (en) 2012-10-23
JP4165732B2 (ja) 2008-10-15
EP1137914A2 (en) 2001-10-04
MY128330A (en) 2007-01-31
CA2684135C (en) 2013-05-21
KR20080015503A (ko) 2008-02-19
AU771345B2 (en) 2004-03-18
JP2008268227A (ja) 2008-11-06
AR054775A2 (es) 2007-07-18

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