GB2333614B - Flow controller - Google Patents

Flow controller

Info

Publication number
GB2333614B
GB2333614B GB9901501A GB9901501A GB2333614B GB 2333614 B GB2333614 B GB 2333614B GB 9901501 A GB9901501 A GB 9901501A GB 9901501 A GB9901501 A GB 9901501A GB 2333614 B GB2333614 B GB 2333614B
Authority
GB
United Kingdom
Prior art keywords
flow controller
controller
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9901501A
Other versions
GB2333614A (en
GB9901501D0 (en
Inventor
Brian Goody
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Trade and Industry
Original Assignee
UK Secretary of State for Trade and Industry
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Trade and Industry filed Critical UK Secretary of State for Trade and Industry
Publication of GB9901501D0 publication Critical patent/GB9901501D0/en
Publication of GB2333614A publication Critical patent/GB2333614A/en
Application granted granted Critical
Publication of GB2333614B publication Critical patent/GB2333614B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
GB9901501A 1998-01-23 1999-01-22 Flow controller Expired - Fee Related GB2333614B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9801521.7A GB9801521D0 (en) 1998-01-23 1998-01-23 Flow controller

Publications (3)

Publication Number Publication Date
GB9901501D0 GB9901501D0 (en) 1999-03-17
GB2333614A GB2333614A (en) 1999-07-28
GB2333614B true GB2333614B (en) 2002-04-10

Family

ID=10825822

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB9801521.7A Ceased GB9801521D0 (en) 1998-01-23 1998-01-23 Flow controller
GB9901501A Expired - Fee Related GB2333614B (en) 1998-01-23 1999-01-22 Flow controller

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB9801521.7A Ceased GB9801521D0 (en) 1998-01-23 1998-01-23 Flow controller

Country Status (1)

Country Link
GB (2) GB9801521D0 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011132049A1 (en) 2010-04-19 2011-10-27 Lni Schmidlin Sa (Lni Schmidlin Ag) ( Lni Schmidlin Ltd) Method of and system for calibrating gas flow dilutors

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004363456A (en) * 2003-06-06 2004-12-24 Toshiba Corp Method and apparatus for manufacturing semiconductor device
DE102023107126A1 (en) 2023-03-21 2024-09-26 Ias Gmbh Method and device for calibrating a gas sensor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1579810A (en) * 1977-06-04 1980-11-26 Bodenseewerk Perkin Elmer Co Digital flow rate controller
US4313465A (en) * 1977-11-19 1982-02-02 Pierburg Luftfahrtgerate Union Gmbh Method and control device for dosing flow media
GB2115951A (en) * 1981-07-30 1983-09-14 Festo Maschf Stoll G A control valve unit for the cylinder of a fluid actuator
WO1986006515A1 (en) * 1985-04-30 1986-11-06 Teta Tervezo^" És Tanácsadó Mérnöki Kisszövetkezet Device for regulating the gas consumption
US4671097A (en) * 1984-06-15 1987-06-09 Oy Nokia Ab Calibration system for the calibration of mass flow controllers
EP0378311A2 (en) * 1989-01-07 1990-07-18 Burmans Limited Control valve

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1579810A (en) * 1977-06-04 1980-11-26 Bodenseewerk Perkin Elmer Co Digital flow rate controller
US4313465A (en) * 1977-11-19 1982-02-02 Pierburg Luftfahrtgerate Union Gmbh Method and control device for dosing flow media
GB2115951A (en) * 1981-07-30 1983-09-14 Festo Maschf Stoll G A control valve unit for the cylinder of a fluid actuator
US4671097A (en) * 1984-06-15 1987-06-09 Oy Nokia Ab Calibration system for the calibration of mass flow controllers
WO1986006515A1 (en) * 1985-04-30 1986-11-06 Teta Tervezo^" És Tanácsadó Mérnöki Kisszövetkezet Device for regulating the gas consumption
EP0378311A2 (en) * 1989-01-07 1990-07-18 Burmans Limited Control valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011132049A1 (en) 2010-04-19 2011-10-27 Lni Schmidlin Sa (Lni Schmidlin Ag) ( Lni Schmidlin Ltd) Method of and system for calibrating gas flow dilutors

Also Published As

Publication number Publication date
GB2333614A (en) 1999-07-28
GB9901501D0 (en) 1999-03-17
GB9801521D0 (en) 1998-03-25

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20150122