ZA200101686B - Alkali metal diffusion barrier layer. - Google Patents
Alkali metal diffusion barrier layer. Download PDFInfo
- Publication number
- ZA200101686B ZA200101686B ZA200101686A ZA200101686A ZA200101686B ZA 200101686 B ZA200101686 B ZA 200101686B ZA 200101686 A ZA200101686 A ZA 200101686A ZA 200101686 A ZA200101686 A ZA 200101686A ZA 200101686 B ZA200101686 B ZA 200101686B
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- South Africa
- Prior art keywords
- oxide
- angstroms
- medium
- article according
- layer
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- 230000004888 barrier function Effects 0.000 title claims abstract description 104
- 238000009792 diffusion process Methods 0.000 title description 11
- 229910052783 alkali metal Inorganic materials 0.000 title description 6
- 150000001340 alkali metals Chemical class 0.000 title description 6
- 239000011521 glass Substances 0.000 claims abstract description 83
- 239000000758 substrate Substances 0.000 claims abstract description 70
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 57
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 57
- 238000000576 coating method Methods 0.000 claims abstract description 49
- 239000011248 coating agent Substances 0.000 claims abstract description 42
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910001887 tin oxide Inorganic materials 0.000 claims abstract description 36
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 35
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000011701 zinc Substances 0.000 claims abstract description 32
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 30
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910001413 alkali metal ion Inorganic materials 0.000 claims abstract description 23
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 23
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 23
- 230000006866 deterioration Effects 0.000 claims abstract description 8
- 230000001699 photocatalysis Effects 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 11
- 229910003437 indium oxide Inorganic materials 0.000 claims description 9
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 8
- 239000010987 cubic zirconia Substances 0.000 claims description 6
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 239000011230 binding agent Substances 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000011244 liquid electrolyte Substances 0.000 claims 1
- 230000005012 migration Effects 0.000 abstract description 16
- 238000013508 migration Methods 0.000 abstract description 16
- 229910001415 sodium ion Inorganic materials 0.000 abstract description 15
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 13
- 239000003792 electrolyte Substances 0.000 abstract description 5
- 239000011344 liquid material Substances 0.000 abstract description 2
- 239000005300 metallic glass Substances 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 86
- 239000010408 film Substances 0.000 description 70
- 229960005196 titanium dioxide Drugs 0.000 description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 239000000463 material Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 11
- 229910052709 silver Inorganic materials 0.000 description 11
- 239000004332 silver Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 8
- 229910052708 sodium Inorganic materials 0.000 description 8
- 239000011734 sodium Substances 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 238000004876 x-ray fluorescence Methods 0.000 description 7
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 6
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 6
- 238000013459 approach Methods 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 230000005496 eutectics Effects 0.000 description 5
- 150000002500 ions Chemical group 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229910052726 zirconium Inorganic materials 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000005329 float glass Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000005342 ion exchange Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 3
- 239000004408 titanium dioxide Substances 0.000 description 3
- 235000010215 titanium dioxide Nutrition 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical class [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 235000013980 iron oxide Nutrition 0.000 description 2
- VBMVTYDPPZVILR-UHFFFAOYSA-N iron(2+);oxygen(2-) Chemical class [O-2].[Fe+2] VBMVTYDPPZVILR-UHFFFAOYSA-N 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- VVRQVWSVLMGPRN-UHFFFAOYSA-N oxotungsten Chemical class [W]=O VVRQVWSVLMGPRN-UHFFFAOYSA-N 0.000 description 2
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical class [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 2
- 235000020004 porter Nutrition 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 238000000197 pyrolysis Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910001930 tungsten oxide Inorganic materials 0.000 description 2
- 229920006384 Airco Polymers 0.000 description 1
- 101500021165 Aplysia californica Myomodulin-A Proteins 0.000 description 1
- 241001669573 Galeorhinus galeus Species 0.000 description 1
- RSPISYXLHRIGJD-UHFFFAOYSA-N OOOO Chemical compound OOOO RSPISYXLHRIGJD-UHFFFAOYSA-N 0.000 description 1
- 238000006124 Pilkington process Methods 0.000 description 1
- 208000003670 Pure Red-Cell Aplasia Diseases 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 241001422033 Thestylus Species 0.000 description 1
- 241000949477 Toona ciliata Species 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003139 biocide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- OTCVAHKKMMUFAY-UHFFFAOYSA-N oxosilver Chemical class [Ag]=O OTCVAHKKMMUFAY-UHFFFAOYSA-N 0.000 description 1
- 238000006213 oxygenation reaction Methods 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- ZLMJMSJWJFRBEC-BJUDXGSMSA-N potassium-38 Chemical compound [38K] ZLMJMSJWJFRBEC-BJUDXGSMSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2453—Coating containing SnO2
-
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3607—Coatings of the type glass/inorganic compound/metal
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3655—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing at least one conducting layer
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- C—CHEMISTRY; METALLURGY
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3668—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties
- C03C17/3671—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties specially adapted for use as electrodes
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
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- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/212—TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
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- C03C2217/22—ZrO2
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/23—Mixtures
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/43—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase
- C03C2217/44—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the composition of the continuous phase
- C03C2217/445—Organic continuous phases
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/43—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase
- C03C2217/46—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the dispersed phase
- C03C2217/47—Coatings comprising at least one inhomogeneous layer consisting of a dispersed phase in a continuous phase characterized by the dispersed phase consisting of a specific material
- C03C2217/475—Inorganic materials
- C03C2217/477—Titanium oxide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/71—Photocatalytic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24008—Structurally defined web or sheet [e.g., overall dimension, etc.] including fastener for attaching to external surface
- Y10T428/24017—Hook or barb
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Laminated Bodies (AREA)
- Thermally Insulated Containers For Foods (AREA)
- Glass Compositions (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Table Devices Or Equipment (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/156,730 US6352755B1 (en) | 1994-10-04 | 1998-09-17 | Alkali metal diffusion barrier layer |
Publications (1)
Publication Number | Publication Date |
---|---|
ZA200101686B true ZA200101686B (en) | 2002-05-28 |
Family
ID=22560838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ZA200101686A ZA200101686B (en) | 1998-09-17 | 2001-02-28 | Alkali metal diffusion barrier layer. |
Country Status (16)
Country | Link |
---|---|
US (1) | US6352755B1 (fr) |
EP (1) | EP1115670B1 (fr) |
JP (1) | JP4784849B2 (fr) |
KR (1) | KR20010079850A (fr) |
AT (1) | ATE220650T1 (fr) |
AU (1) | AU737886B2 (fr) |
BR (1) | BR9913956A (fr) |
CA (1) | CA2343943A1 (fr) |
CZ (1) | CZ302154B6 (fr) |
DE (1) | DE69902184T2 (fr) |
DK (1) | DK1115670T3 (fr) |
ES (1) | ES2182566T3 (fr) |
NZ (1) | NZ510080A (fr) |
PT (1) | PT1115670E (fr) |
WO (1) | WO2000015571A1 (fr) |
ZA (1) | ZA200101686B (fr) |
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FR2791147B1 (fr) * | 1999-03-19 | 2002-08-30 | Saint Gobain Vitrage | Dispositif electrochimique du type dispositif electrocommandable a proprietes optiques et/ou energetiques variables |
US6677063B2 (en) * | 2000-08-31 | 2004-01-13 | Ppg Industries Ohio, Inc. | Methods of obtaining photoactive coatings and/or anatase crystalline phase of titanium oxides and articles made thereby |
US7323249B2 (en) * | 2000-08-31 | 2008-01-29 | Ppg Industries Ohio, Inc. | Methods of obtaining photoactive coatings and/or anatase crystalline phase of titanium oxides and articles made thereby |
EP1466665B1 (fr) * | 2001-12-21 | 2012-10-10 | Nippon Sheet Glass Co., Ltd. | Element avec fonction photocatalytique et procede de fabrication de celui-ci |
US7147924B2 (en) * | 2003-04-03 | 2006-12-12 | Guardian Industries Corp. | Coated article with dual-layer protective overcoat of nitride and zirconium or chromium oxide |
US6908679B2 (en) * | 2003-04-25 | 2005-06-21 | Guardian Industries Corp. | Heat treatable coated article with niobium zirconium inclusive IR reflecting layer and method of making same |
US6890659B2 (en) * | 2003-04-25 | 2005-05-10 | Guardian Industries Corp. | Heat treatable coated article with niobium zirconium inclusive IR reflecting layer and method of making same |
US20070031681A1 (en) * | 2003-06-20 | 2007-02-08 | Nippon Sheet Glass Co., Ltd. | Member having photocatalytic activity and multilayered glass |
US7081301B2 (en) * | 2003-10-14 | 2006-07-25 | Guardian Industries Corp. | Coated article with and oxide of silicon zirconium or zirconium yttrium oxide in overcoat, and/or niobium nitrude in ir reflecting layer |
US7294404B2 (en) * | 2003-12-22 | 2007-11-13 | Cardinal Cg Company | Graded photocatalytic coatings |
DE602005003234T2 (de) * | 2004-07-12 | 2008-08-28 | Cardinal Cg Co., Eden Prairie | Wartungsarme beschichtungen |
DE602005024993D1 (de) * | 2004-10-04 | 2011-01-05 | Cardinal Cg Co | Dünnfilmbeschichtung und technologie zum zeitweiligen schutz, isolierverglasungseinheiten und dazugehörige verfahren |
US7923114B2 (en) * | 2004-12-03 | 2011-04-12 | Cardinal Cg Company | Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films |
US8092660B2 (en) * | 2004-12-03 | 2012-01-10 | Cardinal Cg Company | Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films |
JP5121002B2 (ja) * | 2004-12-06 | 2013-01-16 | 日本板硝子株式会社 | 光触媒機能および熱線反射機能を有するガラス部材、ならびに、それを用いた複層ガラス |
WO2007121215A1 (fr) * | 2006-04-11 | 2007-10-25 | Cardinal Cg Company | Revêtements photocatalytiques dotés de propriétés améliorées permettant un entretien minime |
WO2007124291A2 (fr) | 2006-04-19 | 2007-11-01 | Cardinal Cg Company | Revêtements fonctionnels opposés aux facteurs de réflexion de surface comparables |
US20080011599A1 (en) | 2006-07-12 | 2008-01-17 | Brabender Dennis M | Sputtering apparatus including novel target mounting and/or control |
US7951473B2 (en) | 2006-11-09 | 2011-05-31 | Agc Flat Glass North America, Inc. | Optical coating with improved durability |
DE102007019994A1 (de) * | 2007-04-27 | 2008-10-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Transparente Barrierefolie und Verfahren zum Herstellen derselben |
EP2261186B1 (fr) | 2007-09-14 | 2017-11-22 | Cardinal CG Company | Technologie de revêtement à faible entretien |
KR101616540B1 (ko) * | 2007-12-12 | 2016-04-28 | 뉴포트 코포레이션 | 성능이 향상된 광 코팅된 반도체 디바이스 및 관련 제조 방법 |
US20090260678A1 (en) * | 2008-04-16 | 2009-10-22 | Agc Flat Glass Europe S.A. | Glass substrate bearing an electrode |
KR101393907B1 (ko) * | 2009-03-27 | 2014-05-12 | 피피지 인더스트리즈 오하이오 인코포레이티드 | 보호 코팅을 가지는 태양 반사 거울 및 그 제조 방법 |
US8467124B2 (en) | 2010-02-19 | 2013-06-18 | Ppg Industries Ohio, Inc. | Solar reflecting mirror and method of making same |
US9723723B2 (en) * | 2009-03-31 | 2017-08-01 | View, Inc. | Temperable electrochromic devices |
JP5700485B2 (ja) * | 2010-12-27 | 2015-04-15 | 芝浦メカトロニクス株式会社 | 光触媒体の製造方法および光触媒体の製造装置 |
EP2724194B1 (fr) * | 2011-06-21 | 2019-01-09 | View, Inc. | Dispositifs électrochromiques aptes à être trempés |
TWI716511B (zh) | 2015-12-19 | 2021-01-21 | 美商應用材料股份有限公司 | 用於鎢原子層沉積製程作為成核層之正形非晶矽 |
US10480066B2 (en) | 2015-12-19 | 2019-11-19 | Applied Materials, Inc. | Metal deposition methods |
US10192775B2 (en) | 2016-03-17 | 2019-01-29 | Applied Materials, Inc. | Methods for gapfill in high aspect ratio structures |
WO2018093985A1 (fr) | 2016-11-17 | 2018-05-24 | Cardinal Cg Company | Technologie de revêtement à dissipation statique |
US11133178B2 (en) | 2019-09-20 | 2021-09-28 | Applied Materials, Inc. | Seamless gapfill with dielectric ALD films |
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JPS5819615B2 (ja) | 1976-06-29 | 1983-04-19 | 富士通株式会社 | ガラス基板の表面処理方法 |
JPS54150418A (en) * | 1978-05-19 | 1979-11-26 | Hitachi Ltd | Production of liquid crystal display element |
JPS589123A (ja) | 1981-07-09 | 1983-01-19 | Seiko Epson Corp | 液晶パネルの電極構造 |
JPS589124A (ja) | 1981-07-09 | 1983-01-19 | Seiko Epson Corp | 液晶パネルの電極構造 |
JPS5826052A (ja) | 1981-08-06 | 1983-02-16 | Asahi Glass Co Ltd | アルカリ拡散防止酸化ケイ素膜付ガラス体 |
DE3316548C2 (de) | 1983-03-25 | 1985-01-17 | Flachglas AG, 8510 Fürth | Verfahren zur Beschichtung eines transparenten Substrates |
GB8420534D0 (en) | 1984-08-13 | 1984-09-19 | Pilkington Brothers Plc | Coated products |
US5165972A (en) * | 1984-08-13 | 1992-11-24 | Pilkington Plc | Coated glass |
DE3544840A1 (de) | 1985-11-05 | 1987-05-07 | Flachglas Ag | Verfahren zum herstellen einer vorgespannten und/oder gebogenen glasscheibe mit reduzierter transmission |
US4857094A (en) | 1986-04-09 | 1989-08-15 | Flachglas Aktiengesellschaft | Method for the manufacture of a toughened and/or bent pane with solar control coating containing platinum or the like |
AU631777B2 (en) | 1987-08-18 | 1992-12-10 | Boc Technologies Limited | Metal oxide films having barrier properties |
US5112693A (en) | 1988-10-03 | 1992-05-12 | Ppg Industries, Inc. | Low reflectance, highly saturated colored coating for monolithic glazing |
EP0436741B1 (fr) | 1989-08-01 | 1996-06-26 | Asahi Glass Company Ltd. | Méthode de pulvérisation à courant continu et cible pour obtenir un film à base de dioxide de silicium |
US5133594A (en) | 1990-07-19 | 1992-07-28 | Tufts University | Transparent ion-blocking layer for electrochromic windows |
JPH0818849B2 (ja) | 1991-08-29 | 1996-02-28 | 日本板硝子株式会社 | 熱線遮蔽ガラス |
EP0725679B1 (fr) | 1993-10-26 | 2004-09-01 | E. HELLER & COMPANY | Compositions contenant un photocatalyseur et un liant |
US5830252A (en) * | 1994-10-04 | 1998-11-03 | Ppg Industries, Inc. | Alkali metal diffusion barrier layer |
CA2157948C (fr) | 1994-10-04 | 2000-01-11 | James J. Finley | Couche barriere empechant la diffusion des metaux alcalins |
EP0870530B1 (fr) * | 1996-08-05 | 2005-01-19 | Nippon Sheet Glass Co., Ltd. | Photocatalyseur et procede de preparation associe |
-
1998
- 1998-09-17 US US09/156,730 patent/US6352755B1/en not_active Expired - Lifetime
-
1999
- 1999-09-09 CZ CZ20010896A patent/CZ302154B6/cs not_active IP Right Cessation
- 1999-09-09 WO PCT/US1999/020665 patent/WO2000015571A1/fr not_active Application Discontinuation
- 1999-09-09 AT AT99946822T patent/ATE220650T1/de not_active IP Right Cessation
- 1999-09-09 NZ NZ510080A patent/NZ510080A/en not_active IP Right Cessation
- 1999-09-09 DK DK99946822T patent/DK1115670T3/da active
- 1999-09-09 DE DE69902184T patent/DE69902184T2/de not_active Expired - Lifetime
- 1999-09-09 KR KR1020017003456A patent/KR20010079850A/ko not_active Application Discontinuation
- 1999-09-09 PT PT99946822T patent/PT1115670E/pt unknown
- 1999-09-09 CA CA002343943A patent/CA2343943A1/fr not_active Abandoned
- 1999-09-09 EP EP99946822A patent/EP1115670B1/fr not_active Expired - Lifetime
- 1999-09-09 ES ES99946822T patent/ES2182566T3/es not_active Expired - Lifetime
- 1999-09-09 BR BR9913956-1A patent/BR9913956A/pt unknown
- 1999-09-09 AU AU59145/99A patent/AU737886B2/en not_active Ceased
- 1999-09-09 JP JP2000570116A patent/JP4784849B2/ja not_active Expired - Fee Related
-
2001
- 2001-02-28 ZA ZA200101686A patent/ZA200101686B/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR20010079850A (ko) | 2001-08-22 |
WO2000015571A1 (fr) | 2000-03-23 |
DE69902184T2 (de) | 2003-03-13 |
BR9913956A (pt) | 2001-07-03 |
JP4784849B2 (ja) | 2011-10-05 |
CA2343943A1 (fr) | 2000-03-23 |
CZ2001896A3 (cs) | 2001-09-12 |
DK1115670T3 (da) | 2002-10-28 |
EP1115670B1 (fr) | 2002-07-17 |
AU737886B2 (en) | 2001-09-06 |
ES2182566T3 (es) | 2003-03-01 |
CZ302154B6 (cs) | 2010-11-18 |
EP1115670A1 (fr) | 2001-07-18 |
ATE220650T1 (de) | 2002-08-15 |
DE69902184D1 (de) | 2002-08-22 |
JP2002524383A (ja) | 2002-08-06 |
NZ510080A (en) | 2003-10-31 |
AU5914599A (en) | 2000-04-03 |
PT1115670E (pt) | 2002-10-31 |
US6352755B1 (en) | 2002-03-05 |
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