WO2023097754A1 - 显示面板及其制备方法 - Google Patents

显示面板及其制备方法 Download PDF

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Publication number
WO2023097754A1
WO2023097754A1 PCT/CN2021/137329 CN2021137329W WO2023097754A1 WO 2023097754 A1 WO2023097754 A1 WO 2023097754A1 CN 2021137329 W CN2021137329 W CN 2021137329W WO 2023097754 A1 WO2023097754 A1 WO 2023097754A1
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WIPO (PCT)
Prior art keywords
layer
light extraction
base substrate
insulating layer
away
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Ceased
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PCT/CN2021/137329
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English (en)
French (fr)
Inventor
易士娟
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Application filed by Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to US17/597,024 priority Critical patent/US12074146B2/en
Publication of WO2023097754A1 publication Critical patent/WO2023097754A1/zh
Anticipated expiration legal-status Critical
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/855Optical field-shaping means, e.g. lenses
    • H10H20/856Reflecting means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/021Manufacture or treatment of multiple TFTs
    • H10D86/0214Manufacture or treatment of multiple TFTs using temporary substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/411Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by materials, geometry or structure of the substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10H29/14Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
    • H10H29/142Two-dimensional arrangements, e.g. asymmetric LED layout

Definitions

  • the present application relates to the field of display technology, in particular to a display panel and a manufacturing method thereof.
  • the LED chip and the thin-film transistor array layer are not firmly bonded, a large amount of LED chips are transferred to the substrate, and the thin-film transistor array layer is prepared on the side of the LED chip away from the substrate, which is beneficial Improve the stability and yield of LED chips and reduce the difficulty of the process.
  • the LED chip adopts a self-encapsulation method, the LED chip emits light from various angles, resulting in low light emission efficiency in the direction of the normal viewing angle, which increases the power consumption of the display panel and reduces the service life of the device.
  • Embodiments of the present application provide a display panel and a manufacturing method thereof, so as to solve the technical problem of low light extraction efficiency of LED chips in the direction of the normal viewing angle in the existing display panel and the manufacturing method thereof.
  • the application provides a display panel, including:
  • the light extraction structure is arranged on one side of the base substrate, and the light extraction structure includes:
  • the first light extraction part is located on the base substrate, and the first light extraction part includes silicon oxide or silicon nitride or a multi-layer thin film structure;
  • the thin film transistor array layer is disposed on a side of the first metal layer away from the base substrate; wherein the thin film transistor array layer is electrically connected to the LED chip to drive the LED chip to emit light.
  • the LED chip includes a light emitting unit and a first electrode and a second electrode arranged on the side of the light emitting unit away from the base substrate; the first metal layer passes through the first electrode
  • the first via hole of the second light extraction part is electrically connected to the first electrode, and the first metal layer is electrically connected to the second electrode through the second via hole penetrating through the second light extraction part.
  • the thin film transistor array layer includes a binding connection layer and a driving function layer, the binding connection layer is located on the side of the light extraction structure away from the base substrate, and the driving function layer The layer is located on the side of the bonding connection layer away from the base substrate, and the driving function layer is electrically connected to the LED chip through the bonding connection layer.
  • the binding connection layer includes:
  • the second metal layer is located on the side of the first insulating layer away from the base substrate, and the second metal layer communicates with the first insulating layer through the third via hole and the fourth via hole penetrating through the first insulating layer.
  • a metal layer is electrically connected;
  • a second insulating layer covers the first insulating layer and the second metal layer, and the driving function layer is located on a side of the second insulating layer away from the base substrate.
  • the second metal layer includes an anode trace and a low-potential power signal line arranged at intervals, and the anode trace is electrically connected to the first electrode through the third via hole, so The low potential power signal line is electrically connected to the second electrode through the fourth via hole.
  • the driving function layer includes:
  • a third insulating layer located on a side of the second insulating layer away from the base substrate;
  • a first gate layer located on a side of the first gate insulating layer away from the base substrate;
  • a second gate layer located on a side of the first gate insulating layer away from the base substrate;
  • the first source-drain metal layer is located on the side of the interlayer dielectric layer away from the base substrate, the first source-drain metal layer includes a source, a drain, and signal wiring, and the signal wiring Electrically connected to the second metal layer through a fifth via hole penetrating through the interlayer dielectric layer, the second gate insulating layer, the first gate insulating layer and the third insulating layer, the the fifth via hole communicates with the fourth via hole; and
  • the first planar layer covers the interlayer dielectric layer and the first source-drain metal layer.
  • the driving function layer includes:
  • the second source-drain metal layer is located on the side of the first planar layer away from the base substrate, and the second source-drain metal layer is connected to the first planar layer through the sixth via hole penetrating through the first planar layer. one of the source or the drain is electrically connected; and
  • the second planar layer covers the first planar layer and the second source-drain metal layer.
  • the display panel further includes a fourth insulating layer, and the fourth insulating layer is located between the light extraction structure and the base substrate.
  • the size range of the first light extraction portion in the thickness direction of the display panel is 1 micron to 30 microns.
  • the size range of the second light extraction portion in the thickness direction of the display panel is 1 micrometer to 30 micrometers.
  • the application provides a display panel, including:
  • the light extraction structure is arranged on one side of the base substrate, and the light extraction structure includes:
  • the first light extraction part is located on the base substrate
  • a thin film transistor array layer disposed on a side of the first metal layer away from the base substrate;
  • the thin film transistor array layer is electrically connected to the LED chip to drive the LED chip to emit light.
  • the LED chip includes a light emitting unit and a first electrode and a second electrode arranged on the side of the light emitting unit away from the base substrate; the first metal layer passes through the first electrode
  • the first via hole of the second light extraction part is electrically connected to the first electrode, and the first metal layer is electrically connected to the second electrode through the second via hole penetrating through the second light extraction part.
  • the thin film transistor array layer includes a binding connection layer and a driving function layer, the binding connection layer is located on the side of the light extraction structure away from the base substrate, and the driving function layer The layer is located on the side of the bonding connection layer away from the base substrate, and the driving function layer is electrically connected to the LED chip through the bonding connection layer.
  • the binding connection layer includes:
  • the second metal layer is located on the side of the first insulating layer away from the base substrate, and the second metal layer communicates with the first insulating layer through the third via hole and the fourth via hole penetrating through the first insulating layer.
  • a metal layer is electrically connected;
  • a second insulating layer covers the first insulating layer and the second metal layer, and the driving function layer is located on a side of the second insulating layer away from the base substrate.
  • the driving function layer includes:
  • a third insulating layer located on a side of the second insulating layer away from the base substrate;
  • a first gate layer located on a side of the first gate insulating layer away from the base substrate;
  • a second gate layer located on a side of the first gate insulating layer away from the base substrate;
  • the first source-drain metal layer is located on the side of the interlayer dielectric layer away from the base substrate, the first source-drain metal layer includes a source, a drain, and signal wiring, and the signal wiring Electrically connected to the second metal layer through a fifth via hole penetrating through the interlayer dielectric layer, the second gate insulating layer, the first gate insulating layer and the third insulating layer, the the fifth via hole communicates with the fourth via hole; and
  • the first planar layer covers the interlayer dielectric layer and the first source-drain metal layer.
  • the driving function layer includes:
  • the second source-drain metal layer is located on the side of the first planar layer away from the base substrate, and the second source-drain metal layer is connected to the first planar layer through the sixth via hole penetrating through the first planar layer. one of the source or the drain is electrically connected; and
  • the second planar layer covers the first planar layer and the second source-drain metal layer.
  • the display panel further includes a fourth insulating layer, and the fourth insulating layer is located between the light extraction structure and the base substrate.
  • the size range of the first light extraction portion in the thickness direction of the display panel is 1 micron to 30 microns.
  • the present application provides a method for preparing a display panel, comprising the following steps:
  • a thin film transistor array layer is formed on a side of the first metal layer away from the base substrate, and the thin film transistor array layer is electrically connected to the LED chip to drive the LED chip to emit light.
  • the preparation method before the step of forming the second light extraction part, the preparation method further includes:
  • the application sets the light extraction structure, and through the cooperation of the first light extraction part, the second light extraction part and the first metal layer of the light extraction structure, the light emitted by the LED chip passes through the first light extraction
  • the part and the second light extraction part irradiate the side wall of the first metal layer, total reflection occurs and the light is output to the direction of the human eye, thereby effectively improving the light extraction efficiency of the front viewing angle, which is conducive to reducing the power consumption of the display panel and prolonging the use time of the device .
  • FIG. 1 is a schematic cross-sectional structure diagram of a display panel provided by an embodiment of the present application
  • Fig. 2 is a schematic cross-sectional structure diagram of another display panel provided by an embodiment of the present application.
  • FIG. 3 is a flow chart of a method for manufacturing a display panel provided in an embodiment of the present application
  • 4A to 4I are schematic flow charts of a method for manufacturing a display panel provided in an embodiment of the present application.
  • Substrate substrate 2. Light extraction structure; 3. Thin film transistor array layer; 4. Fourth insulating layer;
  • Second gate insulating layer 326. Second gate layer; 327, interlayer dielectric layer; 328, first source-drain metal layer; 3281, source; 3282, drain; 3283, signal wiring; 3284, fifth via hole; 329, first flat layer; 3210 , the second source-drain metal layer; 3211, the second planar layer; 3212, the sixth via hole.
  • FIG. 1 is a schematic cross-sectional structure diagram of a display panel provided by an embodiment of the present application; an embodiment of the present application provides a display panel, which includes a base substrate 1, a light extraction structure 2, and a thin film transistor Array Layer 3.
  • the light extraction structure 2 includes a plurality of LED chips 20, a first light extraction portion 21, a second light extraction portion 22 and a first metal layer 23, the first light extraction portion 21 is located on the base substrate 1,
  • the LED chip 20 is located on the side of the first light extraction part 21 away from the base substrate 1, and the second light extraction part 22 covers the first light extraction part 21 and the LED chip 20 , the first metal layer 23 covers the peripheral sides of the first light extraction part 21 and the second light extraction part 22 .
  • the thin film transistor array layer 3 is located on the side of the first metal layer 23 away from the base substrate 1, and the thin film transistor array layer 3 is electrically connected to the LED chip 20 to drive the LED chip 20 to emit light. .
  • the first light extraction part 21, the second light extraction part 22 and the first metal layer 23 of the light extraction structure 2 so that the light emitted by the LED chip 20 is totally reflected when it passes through the first light extraction part 21 and the second light extraction part 22 and irradiates the side wall of the first metal layer 23, thereby avoiding
  • the thin film transistor array layer 3 is shielded and emitted to the direction of human eyes, effectively improving the light output efficiency of the front viewing angle, which is beneficial to reduce the power consumption of the display panel and prolong the use time of the device.
  • the first light extraction portion 21 may be a single layer or multiple layers, and the material of the first light extraction portion 21 may be an inorganic material or an organic material, for example, the inorganic material includes silicon oxide or Silicon nitride or multilayer thin film structures, the organic material includes polyimide.
  • the first light extraction part 21 is used to make the prepared light extraction structure 2 have sufficient thickness so that the light emitted by the LED chip 20 can be completely reflected to the front view direction.
  • the size range of the first light extraction portion 21 in the thickness direction of the display panel is between 1 micron and 30 microns.
  • the second light extraction part 22 has the effect of flattening the LED chip 20, it can also package the LED chip 20 without additional packaging process, which can effectively reduce the Cost of production.
  • the second light extraction portion 22 can also be a single layer or multilayer, and the material of the second light extraction portion 22 can be an inorganic material or an organic material, for example, the inorganic material includes silicon oxide Or silicon nitride or multilayer thin film structures, the organic material includes polyimide.
  • the size range of the second light extraction portion 22 in the thickness direction of the display panel is between 1 micron and 30 microns.
  • the base substrate 1 can be a rigid substrate, for example, the preparation material of the substrate 1 includes glass, quartz, ceramics and plastics, etc.; the substrate 1 can also be a flexible substrate
  • the substrate, for example, the preparation material of the base substrate 1 includes polymer resins such as polyimide and polyetherimide.
  • the LED chip 20 includes a light emitting unit 201 and a first electrode 202 and a second electrode 203 disposed on the side of the light emitting unit 201 away from the substrate 1; the first metal layer 23 passes through the The first via hole 221 of the second light extraction part 22 is electrically connected to the first electrode 202, and the first metal layer 23 is connected to the first electrode 202 through the second via hole 222 penetrating through the second light extraction part 22.
  • the two electrodes 203 are electrically connected.
  • the thin film transistor array layer 3 includes a bonding connection layer 31 and a driving function layer 32, the bonding connection layer 31 is located on the side of the light extraction structure away from the base substrate 1, and the driving function layer 32 The layer 32 is located on the side of the bonding connection layer 31 away from the base substrate 1 , and the driving function layer 32 is electrically connected to the LED chip 20 through the bonding connection layer 31 .
  • the LED chip 20 and the thin film transistor array layer 3 in this application are sequentially arranged on one side of the base substrate 1 , compared with the prior art on the base substrate 1
  • the thin film transistor array layer 3 and the LED chip 20 are sequentially arranged on one side of the substrate.
  • the LED chip 20 can be mass-transferred to the substrate.
  • the thin film transistor array layer 3 is directly prepared and formed on the side of the LED chip 20 away from the substrate 1.
  • the thin film transistor array layer 3 is directly formed on the LED chip 20, and the LED chip 20 does not need to be bonded to the thin film transistor array layer 3 through an anisotropic conductive adhesive bonding process or a metal bonding process during mass transfer. connection, so that the LED chip 20 can be firmly bonded to the thin film transistor array layer 3, which is beneficial to improve the stability and yield of the LED chip 20, and reduces the difficulty of the manufacturing process.
  • the bonding connection layer 31 includes a first insulating layer 311, a second metal layer 312 and a second insulating layer 313, and the first insulating layer 311 covers the base substrate 1 and the first metal layer.
  • layer 23 the second metal layer 312 is located on the side of the first insulating layer 311 away from the base substrate 1, and the second metal layer 312 passes through the third pass through the first insulating layer 311.
  • the hole 3111 and the fourth via hole 3112 are electrically connected to the first metal layer 23; the second insulating layer 313 covers the first insulating layer 311 and the second metal layer 312, and the driving function layer 32 is located on the side of the second insulating layer 313 away from the base substrate 1 .
  • the second metal layer 312 includes an anode trace and a low-potential power signal line arranged at intervals, the anode trace is electrically connected to the first electrode 202 through the third via hole 3111, and the low potential The potential power signal line is electrically connected to the second electrode 203 through the fourth via hole 3112 .
  • the driving function layer 32 includes a third insulating layer 321, a semiconductor layer 322, a first gate insulating layer 323, a first gate layer 324, a second gate insulating layer 325, a second gate layer 326, The interlayer dielectric layer 327, the first source-drain metal layer 328 and the first planar layer 329; the third insulating layer 321 is located on the side of the second insulating layer 313 away from the substrate 1; the semiconductor The layer 322 is located on the side of the third insulating layer 321 away from the base substrate 1; the first gate insulating layer covers the third insulating layer 321 and the semiconductor layer 322; the first The gate layer 324 is located on the side of the first gate insulating layer 323 away from the base substrate 1; the second gate insulating layer 325 covers the first gate layer 324 and the first gate on the electrode insulating layer 323; the second gate layer 326 is located on the side of the first gate insulating layer 323 away from the base substrate 1; the
  • the material of the third insulating layer 321 may be an inorganic material, which is used to prevent external water vapor from invading the driving function layer 32 and prevent the driving function layer 32 from being invaded by water vapor; the semiconductor layer 322 is located in the The third insulating layer 321 is away from the side of the base substrate 1, and the material of the semiconductor layer 322 includes indium gallium zinc oxide (IGZO), indium gallium titanium oxide (IZTO) and indium gallium zinc titanium oxide (IGZTO). ) at least one of.
  • IGZO indium gallium zinc oxide
  • IZTO indium gallium titanium oxide
  • IGZTO indium gallium zinc titanium oxide
  • the semiconductor layer 322 includes a channel region and a source region and a drain region located on both sides of the channel region, and the source electrode 3281 passes through the interlayer dielectric layer 327, the second gate The source contact hole of the first gate insulating layer 323 of the pole insulating layer 325 is electrically connected to the source region, and the drain 3282 passes through the interlayer dielectric layer 327, the second gate insulating The drain contact hole of the first gate insulating layer 323 of layer 325 is electrically connected to the drain region.
  • the signal wiring 3283 includes functional signal lines such as data lines, scanning lines, driving voltage lines, and voltage transmission lines, which are respectively used to transmit data signals, scanning signals, driving voltage signals, and voltage transmission signals; for example, when the When the signal wire 3283 is a data wire, it is used to transfer the data signal to the LED chip 20 through the second metal layer 312 .
  • the structure of a single thin film transistor in the driving function layer 32 is not limited to the double-gate structure provided in the embodiment of the present application, and those skilled in the art can also choose other structural forms, such as a single-gate structure, etc. No further details will be given here.
  • FIG. 2 is a schematic cross-sectional structure diagram of another display panel provided by the embodiment of the present application; in order to reduce the voltage drop, the driving function layer 32 can also adopt a double-layer source-drain metal layer design, Specifically, the driving function layer 32 further includes a second source-drain metal layer 3210 and a second planar layer 3211, the second source-drain metal layer 3210 is located on the first planar layer 329 away from the base substrate 1, the second source-drain metal layer 3210 is electrically connected to the drain 3282 through a via hole penetrating through the first planar layer 329, and the second planar layer 3211 covers the first planar layer layer 329 and the second source-drain metal layer 3210, the second source-drain metal layer 3210 is connected to the source 3281 or the drain via the sixth via hole 3212 penetrating through the first planar layer 329 One of the poles 3282 is electrically connected.
  • the driving function layer 32 further includes a second source-drain metal layer 3210 and a second plan
  • a fourth insulating layer 4 is also provided between the base substrate 1 and the light extraction structure 2 to prevent the light-emitting unit 201 from invading the LED chip 20 caused by external water vapor. invalidated.
  • the refractive index of the fourth insulating layer 4 is smaller than the refractive index of the first light extraction part 21, so that part of the light emitted by the LED chip 20 passes between the first light extraction part 21 and the first light extraction part 21. Total reflection occurs at the boundaries of the four insulating layers 4 , which is beneficial to further improving the light extraction efficiency of the LED chip 20 .
  • Fig. 3 is a flow chart of a method for preparing a display panel provided in the embodiment of the present application
  • Fig. 4A ⁇ Fig. 4I is a method for preparing a display panel provided in the embodiment of the present application Schematic diagram of the process structure.
  • the embodiment of the present application provides a method for manufacturing a display panel, including the following steps:
  • a base substrate 1 is provided, and a fourth insulating layer 4 is deposited and formed on one side of the base substrate 1 .
  • the first light extraction part 21 can be formed on one side of the base substrate 1 through a yellow light process; the first light extraction part 21 can be single-layer or multi-layer, the material of the first light extraction part 21 can be an inorganic material or an organic material, for example, the inorganic material includes silicon oxide or silicon nitride or a multi-layer film structure, the The organic material includes polyimide; in the embodiment of the present application, the thickness of the first light extracting portion 21 ranges from 1 micron to 30 microns.
  • the LED chip 20 includes a light emitting unit 201 and a first electrode 202 and a second electrode disposed on the side of the light emitting unit 201 away from the base substrate 1. 203.
  • the first electrode 202 is a P electrode
  • the second electrode 203 is an N electrode.
  • the preparation method further includes: S301: Detecting a plurality of the LED chips 20 and judging whether there is a faulty LED chip, and if so, detecting the faulty LED chip LED chips are repaired.
  • the present application detects the LED chip 20 before preparing the thin film transistor array layer 3, compared with the prior art, it is possible to avoid transferring a large amount of the LED chip 20 to the thin film transistor
  • the LED chip 20 is detected after being placed on the array layer 3. If a faulty LED chip is detected, it cannot be repaired, and the entire display panel will be scrapped, which can greatly save production costs.
  • the second light extraction portion 22 may be formed through a yellow light process, and then formed through the second light extraction portion through a yellow light process. 22, the first via hole 221 and the second via hole 222, the first via hole 221 exposes the surface of the first electrode 202 away from the base substrate 1, and the second via hole 222 exposes The second electrode 203 is away from one side surface of the base substrate 1 .
  • the second light extraction part 22 may be a single layer or multiple layers, and the material of the first light extraction part 21 may be an inorganic material or an organic material.
  • the first metal layer 23 may be formed through a yellow light process.
  • step S50 forming the thin film transistor array layer 3 on the side of the first metal layer 23 away from the base substrate 1 includes the following steps:
  • S501 Form the bonding connection layer 31 on the side of the first metal layer 23 away from the base substrate 1;
  • S502 Form a driving function layer 32 on a side of the bonding connection layer 31 away from the base substrate 1 , and the driving function layer 32 is electrically connected to the LED chip 20 through the bonding connection layer 31 .
  • a first insulating layer 311 is formed on the side of the first metal layer 23 away from the base substrate 1, and the first insulating layer 311 covers the On the base substrate 1 and the first metal layer 23, a third via hole 3111 and a fourth via hole 3112 penetrating through the first insulating layer 311 are formed through a yellow light process;
  • the optical process forms a second metal layer 312 on the side of the first insulating layer 311 away from the base substrate 1, and the second metal layer 312 passes through the third via hole 3111 and the fourth via hole 3112 and electrically connected to the first metal layer 23 ; then, forming a second insulating layer 313 overlying the first insulating layer 311 and the second metal layer 312 .
  • step S502 includes the following steps:
  • S5021 Form a third insulating layer 321 on a side of the second insulating layer 313 away from the base substrate 1;
  • S5022 Form a semiconductor layer 322 on a side of the third insulating layer 321 away from the base substrate 1;
  • S5023 forming a first gate insulating layer 323 covering the third insulating layer 321 and the semiconductor layer 322;
  • S5024 Form a first gate layer 324 on a side of the first gate insulating layer 323 away from the base substrate 1;
  • S5025 Form a second gate insulating layer 325 covering the first gate layer 324 and the first gate insulating layer 323;
  • S5026 Form a second gate layer 326 on a side of the first gate insulating layer 323 away from the base substrate 1;
  • S5027 Form an interlayer dielectric layer 327 covering the second gate layer 326 and the second gate insulating layer 325;
  • S5028 Form a first source-drain metal layer 328 on the side of the interlayer dielectric layer 327 away from the base substrate 1, the first source-drain metal layer 328 includes a source 3281, a drain 3282 and a signal
  • the wiring 3283, the signal wiring 3283 passes through the fifth interlayer dielectric layer 327, the second gate insulating layer 325, the first gate insulating layer 323 and the third insulating layer 321.
  • the via hole 3284 is electrically connected to the second metal layer 312, and the fifth via hole 3284 communicates with the fourth via hole 3112; and
  • S5029 Form a first planar layer 329 overlying the interlayer dielectric layer 327 and the first source-drain metal layer 328 .
  • a source contact hole, a drain contact hole and a fifth via hole 3284 can be formed through a yellow light process, and the source electrode 3281 passes through the source contact hole It is electrically connected to the source region of the semiconductor layer 322, the drain 3282 is electrically connected to the drain region of the semiconductor layer 322 through the drain contact hole, and the fifth via hole 3284 runs through the interlayer The dielectric layer 327 , the second gate insulating layer 325 , the first gate insulating layer 323 and the third insulating layer 321 .
  • the interlayer dielectric layer 327 and the first source-drain metal layer 328 are formed.
  • step S5029 it also includes: forming a second source-drain metal layer 3210 on the side of the first flat layer 329 away from the base substrate 1, the second The source-drain metal layer 3210 is electrically connected to the drain 3282 through the via hole penetrating through the first planar layer 329; The second flat layer 3211 .
  • the embodiment of the present application sets the light extraction structure, and through the cooperation of the first light extraction part, the second light extraction part and the first metal layer of the light extraction structure, the light emitted by the LED chip passes through the first light extraction part Total reflection occurs when the second light extraction part irradiates the side wall of the first metal layer, thereby effectively improving the light extraction efficiency at the front viewing angle, reducing the power consumption of the display panel, and prolonging the service life of the device.

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Abstract

一种显示面板及其制备方法,显示面板包括衬底基板(1)、光取出结构(2)和薄膜晶体管阵列层(3),光取出结构(2)包括多个LED芯片(20)、第一光取出部(21)、第二光取出部(22)和第一金属层(23),第二光取出部(22)覆于第一光取出部(21)和LED芯片(20)上,使得光线经过第一光取出部(21)和第二光取出部(22)照射至第一金属层(23)的侧壁时发生全反射,提升了正视角的出光效率。

Description

显示面板及其制备方法 技术领域
本申请涉及显示技术领域,尤其涉及一种显示面板及其制备方法。
背景技术
为了克服LED芯片与薄膜晶体管阵列层粘接不牢固的缺陷,采用将LED芯片巨量转移至衬底基板上,在LED芯片远离衬底基板的一侧制备形成薄膜晶体管阵列层的方式,有利于提升LED芯片的稳定性和良率,降低了制程难度。然而,采用此种方式,由于LED芯片采用自封装方式,所述LED芯片沿各个角度出光,导致在正视角方向的出光效率低下,从而导致显示面板功耗增加,降低了设备使用时间。
技术问题
本申请实施例提供一种显示面板及其制备方法,以解决现有的显示面板及其制备方法,LED芯片在正视角方向的出光效率低下的技术问题。
技术解决方案
为解决上述问题,本申请提供的技术方案如下:
本申请提供一种显示面板,包括:
衬底基板;
光取出结构,设置于所述衬底基板的一侧,所述光取出结构包括:
第一光取出部,位于所述衬底基板上,所述第一光取出部包括硅的氧化物或硅的氮化物或多层薄膜结构;
多个LED芯片,位于所述第一光取出部远离所述衬底基板的一侧;
第二光取出部,覆于所述第一光取出部和所述LED芯片上;以及
第一金属层,覆于所述第一光取出部和所述第二光取出部的周侧;以及
薄膜晶体管阵列层,设置于所述第一金属层远离所述衬底基板的一侧;其中,所述薄膜晶体管阵列层与所述LED芯片电连接,以驱动所述LED芯片发光。
根据本申请提供的显示面板,所述LED芯片包括发光单元和设置于所述发光单元远离所述衬底基板一侧的第一电极及第二电极;所述第一金属层通过贯穿所述第二光取出部的第一过孔与所述第一电极电连接,所述第一金属层通过贯穿所述第二光取出部的第二过孔与所述第二电极电连接。
根据本申请提供的显示面板,所述薄膜晶体管阵列层包括绑定连接层和驱动功能层,所述绑定连接层位于所述光取出结构远离所述衬底基板的一侧,所述驱动功能层位于所述绑定连接层远离所述衬底基板的一侧,所述驱动功能层通过所述绑定连接层与所述LED芯片电连接。
根据本申请提供的显示面板,所述绑定连接层包括:
第一绝缘层,覆于所述衬底基板和所述第一金属层上;
第二金属层,位于所述第一绝缘层远离所述衬底基板的一侧,所述第二金属层通过贯穿所述第一绝缘层的第三过孔及第四过孔与所述第一金属层电连接;以及
第二绝缘层,覆于所述第一绝缘层和所述第二金属层上,所述驱动功能层位于所述第二绝缘层远离所述衬底基板的一侧。
根据本申请提供的显示面板,所述第二金属层包括间隔设置的阳极走线和低电位电源信号线,所述阳极走线通过所述第三过孔与所述第一电极电连接,所述低电位电源信号线通过所述第四过孔与所述第二电极电连接。
根据本申请提供的显示面板,所述驱动功能层包括:
第三绝缘层,位于所述第二绝缘层远离所述衬底基板的一侧;
半导体层,位于所述第三绝缘层远离所述衬底基板的一侧;
第一栅极绝缘层,覆于所述第三绝缘层和所述半导体层上;
第一栅极层,位于所述第一栅极绝缘层远离所述衬底基板的一侧;
第二栅极绝缘层,覆于所述第一栅极层和所述第一栅极绝缘层上;
第二栅极层,位于所述第一栅极绝缘层远离所述衬底基板的一侧;
层间介质层,覆于所述第二栅极层和所述第二栅极绝缘层上;
第一源漏极金属层,位于所述层间介质层远离所述衬底基板的一侧,所述第一源漏极金属层包括源极、漏极和信号走线,所述信号走线通过贯穿所述层间介质层、所述第二栅极绝缘层、所述第一栅极绝缘层和所述第三绝缘层的第五过孔与所述第二金属层电连接,所述第五过孔和所述第四过孔相连通;以及
第一平坦层,覆于所述层间介质层和所述第一源漏极金属层上。
根据本申请提供的显示面板,所述驱动功能层包括:
第二源漏极金属层,位于所述第一平坦层远离所述衬底基板的一侧,所述第二源漏极金属层通过贯穿所述第一平坦层的第六过孔与所述源极或所述漏极中的一者电连接;以及
第二平坦层,覆于所述第一平坦层和所述第二源漏极金属层上。
根据本申请提供的显示面板,所述显示面板还包括第四绝缘层,所述第四绝缘层位于所述光取出结构和所述衬底基板之间。
根据本申请提供的显示面板,所述第一光取出部在所述显示面板的厚度方向上的尺寸范围为1微米~30微米。
根据本申请提供的显示面板,所述第二光取出部在所述显示面板的厚度方向上的尺寸范围为1微米~30微米。
本申请提供一种显示面板,包括:
衬底基板;
光取出结构,设置于所述衬底基板的一侧,所述光取出结构包括:
第一光取出部,位于所述衬底基板上;
多个LED芯片,位于所述第一光取出部远离所述衬底基板的一侧;
第二光取出部,覆于所述第一光取出部和所述LED芯片上;以及
第一金属层,覆于所述第一光取出部和所述第二光取出部的周侧;以及
薄膜晶体管阵列层,设置于所述第一金属层远离所述衬底基板的一侧;
其中,所述薄膜晶体管阵列层与所述LED芯片电连接,以驱动所述LED芯片发光。
根据本申请提供的显示面板,所述LED芯片包括发光单元和设置于所述发光单元远离所述衬底基板一侧的第一电极及第二电极;所述第一金属层通过贯穿所述第二光取出部的第一过孔与所述第一电极电连接,所述第一金属层通过贯穿所述第二光取出部的第二过孔与所述第二电极电连接。
根据本申请提供的显示面板,所述薄膜晶体管阵列层包括绑定连接层和驱动功能层,所述绑定连接层位于所述光取出结构远离所述衬底基板的一侧,所述驱动功能层位于所述绑定连接层远离所述衬底基板的一侧,所述驱动功能层通过所述绑定连接层与所述LED芯片电连接。
根据本申请提供的显示面板,所述绑定连接层包括:
第一绝缘层,覆于所述衬底基板和所述第一金属层上;
第二金属层,位于所述第一绝缘层远离所述衬底基板的一侧,所述第二金属层通过贯穿所述第一绝缘层的第三过孔及第四过孔与所述第一金属层电连接;以及
第二绝缘层,覆于所述第一绝缘层和所述第二金属层上,所述驱动功能层位于所述第二绝缘层远离所述衬底基板的一侧。
根据本申请提供的显示面板,所述驱动功能层包括:
第三绝缘层,位于所述第二绝缘层远离所述衬底基板的一侧;
半导体层,位于所述第三绝缘层远离所述衬底基板的一侧;
第一栅极绝缘层,覆于所述第三绝缘层和所述半导体层上;
第一栅极层,位于所述第一栅极绝缘层远离所述衬底基板的一侧;
第二栅极绝缘层,覆于所述第一栅极层和所述第一栅极绝缘层上;
第二栅极层,位于所述第一栅极绝缘层远离所述衬底基板的一侧;
层间介质层,覆于所述第二栅极层和所述第二栅极绝缘层上;
第一源漏极金属层,位于所述层间介质层远离所述衬底基板的一侧,所述第一源漏极金属层包括源极、漏极和信号走线,所述信号走线通过贯穿所述层间介质层、所述第二栅极绝缘层、所述第一栅极绝缘层和所述第三绝缘层的第五过孔与所述第二金属层电连接,所述第五过孔和所述第四过孔相连通;以及
第一平坦层,覆于所述层间介质层和所述第一源漏极金属层上。
根据本申请提供的显示面板,所述驱动功能层包括:
第二源漏极金属层,位于所述第一平坦层远离所述衬底基板的一侧,所述第二源漏极金属层通过贯穿所述第一平坦层的第六过孔与所述源极或所述漏极中的一者电连接;以及
第二平坦层,覆于所述第一平坦层和所述第二源漏极金属层上。
根据本申请提供的显示面板,所述显示面板还包括第四绝缘层,所述第四绝缘层位于所述光取出结构和所述衬底基板之间。
根据本申请提供的显示面板,所述第一光取出部在所述显示面板的厚度方向上的尺寸范围为1微米~30微米。
本申请提供一种显示面板的制备方法,包括以下步骤:
提供一衬底基板;
在所述衬底基板的一侧形成第一光取出部;
将多个LED芯片巨量转移至所述第一光取出部远离所述衬底基板的一侧;
形成覆于所述第一光取出部和所述LED芯片上的第二光取出部;以及
形成覆于所述第一光取出部和所述第二光取出部的周侧的第一金属层;以及
在所述第一金属层远离所述衬底基板的一侧形成薄膜晶体管阵列层,所述薄膜晶体管阵列层与所述LED芯片电连接,以驱动所述LED芯片发光。
根据本申请提供的制备方法,在形成所述第二光取出部的步骤之前,所述制备方法还包括:
对多个所述LED芯片进行检测并判断是否存在故障LED芯片,若是,则对所述故障LED芯片进行修复。
有益效果
本申请的有益效果为:本申请通过设置光取出结构,通过光取出结构的第一光取出部、第二光取出部和第一金属层的配合,使得LED芯片发出的光线经过第一光取出部和第二光取出部照射至第一金属层的侧壁时发生全反射并出射至人眼方向,从而能够有效提升正视角的出光效率,有利于降低显示面板功耗,延长设备的使用时间。
附图说明
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。
图1是本申请实施例提供的一种显示面板的截面结构示意图;
图2是本申请实施例提供的另一种显示面板的截面结构示意图;
图3是本申请实施例提供的一种显示面板的制备方法的流程图;
图4A~图4I是本申请实施例提供的一种显示面板的制备方法的流程结构示意图。
附图标记说明:
1、衬底基板;2、光取出结构;3、薄膜晶体管阵列层;4、第四绝缘层;
20、LED芯片;201、发光单元;202、第一电极;203、第二电极;21、第一光取出部;22、第二光取出部;221、第一过孔;222、第二过孔;23、第一金属层;
31、绑定连接层;311、第一绝缘层;3111、第三过孔;3112、第四过孔;312、第二金属层;313、第二绝缘层;
32、驱动功能层;321、第三绝缘层;322、半导体层;323、第一栅极绝缘层;324、第一栅极层;325、第二栅极绝缘层;326、第二栅极层;327、层间介质层;328、第一源漏极金属层;3281、源极;3282、漏极;3283、信号走线;3284、第五过孔;329、第一平坦层;3210、第二源漏极金属层;3211、第二平坦层;3212、第六过孔。
本发明的实施方式
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。此外,应当理解的是,此处所描述的具体实施方式仅用于说明和解释本申请,并不用于限制本申请。在本申请中,在未作相反说明的情况下,使用的方位词如“上”和“下”通常是指装置实际使用或工作状态下的上和下,具体为附图中的图面方向;而“内”和“外”则是针对装置的轮廓而言的。
请参阅图1,图1是本申请实施例提供的一种显示面板的截面结构示意图;本申请实施例提供一种显示面板,所述显示面板包括衬底基板1、光取出结构2和薄膜晶体管阵列层3。
所述光取出结构2包括多个LED芯片20、第一光取出部21、第二光取出部22和第一金属层23,所述第一光取出部21位于所述衬底基板1上,所述LED芯片20位于所述第一光取出部21远离所述衬底基板1的一侧,所述第二光取出部22覆于所述第一光取出部21和所述LED芯片20上,所述第一金属层23覆于所述第一光取出部21和所述第二光取出部22的周侧。所述薄膜晶体管阵列层3位于所述第一金属层23远离所述衬底基板1的一侧,所述薄膜晶体管阵列层3与所述LED芯片20电连接,以驱动所述LED芯片20发光。
可以理解的是,本申请通过设置所述光取出结构2,并通过所述光取出结构2的所述第一光取出部21、所述第二光取出部22和所述第一金属层23的配合,使得所述LED芯片20发出的光线经过所述第一光取出部21和所述第二光取出部22照射至所述第一金属层23的侧壁时发生全反射,从而避开位于所述薄膜晶体管阵列层3的遮挡,并出射至人眼方向,有效提升正视角的出光效率,有利于降低显示面板功耗,延长设备的使用时间。
可选地,所述第一光取出部21可以为单层或多层,所述第一光取出部21的材料可以为无机材料或有机材料,例如,所述无机材料包括硅的氧化物或硅的氮化物或多层薄膜结构,所述有机材料包括聚酰亚胺。
具体地,所述第一光取出部21用于使制备而成的所述光取出结构2具有足够的厚度,以使所述LED芯片20发出的光能够被全部反射至正视方向,在本申请实施例中,所述第一光取出部21在所述显示面板的厚度方向上的尺寸范围为1微米~30微米之间。
可以理解的是,所述第二光取出部22在起到平坦化所述LED芯片20的效果的同时,能够对所述LED芯片20起到封装作用,无需进行额外的封装制程,能够有效降低生产成本。
可选地,所述第二光取出部22也可以为单层或多层,所述第二光取出部22的材料可以为无机材料或有机材料,例如,所述无机材料包括硅的氧化物或硅的氮化物或多层薄膜结构,所述有机材料包括聚酰亚胺。
具体地,所述第二光取出部22在所述显示面板的厚度方向上的尺寸范围为1微米~30微米之间。
可选地,所述衬底基板1可以为刚性衬底基板,例如,所述衬底基板1的制备材料包括玻璃、石英、陶瓷和塑料等;所述衬底基板1也可以为柔性衬底基板,例如,所述衬底基板1的制备材料包括聚酰亚胺、聚醚酰亚胺等聚合物树脂。
具体地,所述LED芯片20包括发光单元201和设置于所述发光单元201远离所述衬底基板1一侧的第一电极202及第二电极203;所述第一金属层23通过贯穿所述第二光取出部22的第一过孔221与所述第一电极202电连接,所述第一金属层23通过贯穿所述第二光取出部22的第二过孔222与所述第二电极203电连接。
具体地,所述薄膜晶体管阵列层3包括绑定连接层31和驱动功能层32,所述绑定连接层31位于所述光取出结构远离所述衬底基板1的一侧,所述驱动功能层32位于所述绑定连接层31远离所述衬底基板1的一侧,所述驱动功能层32通过所述绑定连接层31与所述LED芯片20电连接。
需要说明的是,本申请中的所述LED芯片20和所述薄膜晶体管阵列层3依次设置在所述衬底基板1的一侧,相较于现有技术中的在所述衬底基板1的一侧依次设置有所述薄膜晶体管阵列层3和所述LED芯片20,本申请在制备形成所述薄膜晶体管阵列层3之前,可先将所述LED芯片20巨量转移至所述衬底基板1的一侧,完成巨量转移之后,再在所述LED芯片20远离所述衬底基板1的一侧直接制备形成所述薄膜晶体管阵列层3,相较于现有技术,由于所述薄膜晶体管阵列层3直接形成于所述LED芯片20上,所述LED芯片20在巨量转移时无需通过各向异性导电胶绑定制程或金属绑定制程与所述薄膜晶体管阵列层3绑定连接,从而能够使得所述LED芯片20与所述薄膜晶体管阵列层3粘接牢固,有利于提升所述LED芯片20的稳定性和良率,降低了制程难度。
具体地,所述绑定连接层31包括第一绝缘层311、第二金属层312和第二绝缘层313,所述第一绝缘层311覆于所述衬底基板1和所述第一金属层23上,所述第二金属层312位于所述第一绝缘层311远离所述衬底基板1的一侧,所述第二金属层312通过贯穿所述第一绝缘层311的第三过孔3111及第四过孔3112与所述第一金属层23电连接;所述第二绝缘层313覆于所述第一绝缘层311和所述第二金属层312上,所述驱动功能层32位于所述第二绝缘层313远离所述衬底基板1的一侧。
具体地,所述第二金属层312包括间隔设置的阳极走线和低电位电源信号线,所述阳极走线通过所述第三过孔3111与所述第一电极202电连接,所述低电位电源信号线通过所述第四过孔3112与所述第二电极203电连接。
具体地,所述驱动功能层32包括第三绝缘层321、半导体层322、第一栅极绝缘层323、第一栅极层324、第二栅极绝缘层325、第二栅极层326、层间介质层327、第一源漏极金属层328和第一平坦层329;所述第三绝缘层321位于所述第二绝缘层313远离所述衬底基板1的一侧;所述半导体层322位于所述第三绝缘层321远离所述衬底基板1的一侧;所述第一栅极绝缘层覆于所述第三绝缘层321和所述半导体层322上;所述第一栅极层324位于所述第一栅极绝缘层323远离所述衬底基板1的一侧;所述第二栅极绝缘层325覆于所述第一栅极层324和所述第一栅极绝缘层323上;所述第二栅极层326位于所述第一栅极绝缘层323远离所述衬底基板1的一侧;所述层间介质层327覆于所述第二栅极层326和所述第二栅极绝缘层325上;所述第一源漏极金属层328位于所述层间介质层327远离所述衬底基板1的一侧,所述第一源漏极金属层328包括源极3281、漏极3282和信号走线3283,所述信号走线3283通过贯穿所述层间介质层327、所述第二栅极绝缘层325、所述第一栅极绝缘层323和所述第三绝缘层321的第五过孔3284与所述第二金属层312电连接,所述第五过孔3284和所述第四过孔3112相连通;所述第一平坦层329覆于所述层间介质层327和所述第一源漏极金属层328上。可选地,所述第三绝缘层321的材料可选用无机材料,用于阻挡外界水汽入侵所述驱动功能层32,避免所述驱动功能层32受到水汽侵扰;所述半导体层322位于所述第三绝缘层321远离所述衬底基板1的一侧,所述半导体层322的材料包括铟镓锌氧化物(IGZO)、铟镓钛氧化物(IZTO)和铟镓锌钛氧化物(IGZTO)中的至少一种。
具体地,所述半导体层322包括沟道区和位于所述沟道区两侧的源极区和漏极区,所述源极3281通过贯穿所述层间介质层327、所述第二栅极绝缘层325的所述第一栅极绝缘层323的源极接触孔与所述源极区电连接,所述漏极3282通过贯穿所述层间介质层327、所述第二栅极绝缘层325的所述第一栅极绝缘层323的漏极接触孔与所述漏极区电连接。
具体地,所述信号走线3283包括数据线、扫描线、驱动电压线和电压传输线等功能信号线,分别用于传递数据信号、扫描信号、驱动电压信号和电压传输信号;例如,当所述信号走线3283为数据线时,用于将数据信号通过所述第二金属层312传递至所述LED芯片20。
需要说明的是,所述驱动功能层32中的单个所述薄膜晶体管的结构不限于本申请实施例提供的双栅结构,本领域技术人员还可选用其他的结构形式,如单栅结构等,在此不再进行赘述。
进一步地,请参阅图2,图2是本申请实施例提供的另一种显示面板的截面结构示意图;为了降低电压降,所述驱动功能层32还可采用双层源漏极金属层设计,具体地,所述驱动功能层32还包括第二源漏极金属层3210和第二平坦层3211,所述第二源漏极金属层3210位于所述第一平坦层329远离所述衬底基板1的一侧,所述第二源漏极金属层3210通过贯穿所述第一平坦层329的过孔与所述漏极3282电连接,所述第二平坦层3211覆于所述第一平坦层329和所述第二源漏极金属层3210上,所述第二源漏极金属层3210通过贯穿所述第一平坦层329的第六过孔3212与所述源极3281或所述漏极3282中的一者电连接。
在本申请实施例中,所述衬底基板1和所述光取出结构2之间还设置有第四绝缘层4,用于防止外界水汽入侵所述LED芯片20而引起的所述发光单元201失效。
进一步地,所述第四绝缘层4的折射率小于所述第一光取出部21的折射率,以使得所述LED芯片20发出的部分光线在所述第一光取出部21和所述第四绝缘层4的边界处发生全反射,有利于进一步提升所述LED芯片20的出光效率。
请参阅图3和图4A~图4I,图3是本申请实施例提供的一种显示面板的制备方法的流程图;图4A~图4I是本申请实施例提供的一种显示面板的制备方法的流程结构示意图。
本申请实施例提供一种显示面板的制备方法,包括以下步骤:
S10:提供一衬底基板1;
S20:在所述衬底基板1的一侧形成第一光取出部21;
S30:将多个LED芯片20巨量转移至所述第一光取出部21远离所述衬底基板1的一侧;
S40:形成覆于所述第一光取出部21和所述LED芯片20上的第二光取出部22;以及
S50:形成覆于所述第一光取出部21和所述第二光取出部22的周侧的第一金属层23;以及
S60:在所述第一金属层23远离所述衬底基板1的一侧形成薄膜晶体管阵列层3,所述薄膜晶体管阵列层3与所述LED芯片20电连接,以驱动所述LED芯片20发光。
具体地,请参阅图4A,在所述步骤S10中,提供一所述衬底基板1,在所述衬底基板1的一侧沉积形成第四绝缘层4。
具体地,请参阅图4B,在所述步骤S20中,可通过一道黄光制程在所述衬底基板1的一侧形成所述第一光取出部21;所述第一光取出部21可以为单层或多层,所述第一光取出部21的材料可以为无机材料或有机材料,例如,所述无机材料包括硅的氧化物或硅的氮化物或是多层薄膜结构,所述有机材料包括聚酰亚胺;在本申请实施例中,所述第一光取出部21的厚度范围为1微米~30微米之间。
具体地,请参阅图4C,在所述步骤S30中,所述LED芯片20包括发光单元201和设置于所述发光单元201远离所述衬底基板1一侧的第一电极202及第二电极203,在本申请实施例中,所述第一电极202为P电极,所述第二电极203为N电极。
进一步地,在形成所述第二光取出部22步骤之后,所述制备方法还包括:S301:对多个所述LED芯片20进行检测并判断是否存在故障LED芯片,若是,则对所述故障LED芯片进行修复。
可以理解的是,本申请在制备所述薄膜晶体管阵列层3之前就对所述LED芯片20进行检测,相较于现有技术,可以避免将所述LED芯片20巨量转移至所述薄膜晶体管阵列层3上之后对所述LED芯片20进行检测,若检测存在故障LED芯片,由于不可修复,则会导致整个所述显示面板报废的情况发生,可大大节省生产成本。
具体地,请参阅图4D,在所述步骤S40中,首先,可通过一道黄光制程形成所述第二光取出部22,之后,再通过一道黄光制程形成贯穿所述第二光取出部22的第一过孔221和第二过孔222,所述第一过孔221裸露出所述第一电极202远离所述衬底基板1的一侧表面,所述第二过孔222裸露出所述第二电极203远离所述衬底基板1的一侧表面。
可选地,所述第二光取出部22可以为单层或多层,所述第一光取出部21的材料可以为无机材料或有机材料。
具体地,请参阅图4E,在所述步骤S50中,可通过一道黄光制程形成所述第一金属层23。
具体地,在所述步骤S50中,在所述第一金属层23远离所述衬底基板1的一侧形成所述薄膜晶体管阵列层3,包括以下步骤:
S501:在所述第一金属层23远离所述衬底基板1的一侧形成所述绑定连接层31;以及
S502:在所述绑定连接层31远离所述衬底基板1的一侧形成驱动功能层32,所述驱动功能层32通过所述绑定连接层31与所述LED芯片20电连接。
具体地,请参阅图4F,所述步骤S501中,首先,在所述第一金属层23远离所述衬底基板1的一侧形成第一绝缘层311,所述第一绝缘层311覆于所述衬底基板1和所述第一金属层23上,并通过一道黄光制程形成贯穿所述第一绝缘层311的第三过孔3111及第四过孔3112;接着,可通过一道黄光制程在所述第一绝缘层311远离所述衬底基板1的一侧形成第二金属层312,所述第二金属层312通过所述第三过孔3111及所述第四过孔3112与所述第一金属层23电连接;之后,形成覆于所述第一绝缘层311和所述第二金属层312上的第二绝缘层313。
具体地,所述步骤S502包括以下步骤:
S5021:在所述第二绝缘层313远离所述衬底基板1的一侧形成第三绝缘层321;
S5022:在所述第三绝缘层321远离所述衬底基板1的一侧形成半导体层322;
S5023:形成覆于所述第三绝缘层321和所述半导体层322上的第一栅极绝缘层323;
S5024:在位于所述第一栅极绝缘层323远离所述衬底基板1的一侧形成第一栅极层324;
S5025:形成覆于所述第一栅极层324和所述第一栅极绝缘层323上的第二栅极绝缘层325;
S5026:在所述第一栅极绝缘层323远离所述衬底基板1的一侧形成第二栅极层326;
S5027:形成覆于所述第二栅极层326和所述第二栅极绝缘层325上的层间介质层327;
S5028:在所述层间介质层327远离所述衬底基板1的一侧形成第一源漏极金属层328,所述第一源漏极金属层328包括源极3281、漏极3282和信号走线3283,所述信号走线3283通过贯穿所述层间介质层327、所述第二栅极绝缘层325、所述第一栅极绝缘层323和所述第三绝缘层321的第五过孔3284与所述第二金属层312电连接,所述第五过孔3284和所述第四过孔3112相连通;以及
S5029:形成覆于所述层间介质层327和所述第一源漏极金属层328上的第一平坦层329。
具体地,请参阅图4G,在所述步骤S5027之后,可通过一道黄光制程形成源极接触孔、漏极接触孔和第五过孔3284,所述源极3281通过所述源极接触孔与所述半导体层322的源极区电连接,所述漏极3282通过所述漏极接触孔与所述半导体层322的漏极区电连接,所述第五过孔3284贯穿所述层间介质层327、所述第二栅极绝缘层325、所述第一栅极绝缘层323和所述第三绝缘层321。
请参阅图4H,在所述步骤S5027和所述步骤S5028中,形成所述层间介质层327和所述第一源漏极金属层328。
进一步地,请参阅图4I,在所述步骤S5029后,还包括:在所述第一平坦层329远离所述衬底基板1的一侧形成第二源漏极金属层3210,所述第二源漏极金属层3210通过贯穿所述第一平坦层329的过孔与所述漏极3282电连接;形成覆于所述第一平坦层329和所述第二源漏极金属层3210上的第二平坦层3211。
有益效果为:本申请实施例通过设置光取出结构,通过光取出结构的第一光取出部、第二光取出部和第一金属层的配合,使得LED芯片发出的光线经过第一光取出部和第二光取出部照射至第一金属层的侧壁时发生全反射,从而能够有效提升正视角的出光效率,有利于降低显示面板功耗,延长设备的使用时间。
综上所述,虽然本申请已以优选实施例揭露如上,但上述优选实施例并非用以限制本申请,本领域的普通技术人员,在不脱离本申请的精神和范围内,均可作各种更动与润饰,因此本申请的保护范围以权利要求界定的范围为准。

Claims (20)

  1. 一种显示面板,包括:
    衬底基板;
    光取出结构,设置于所述衬底基板的一侧,所述光取出结构包括:
    第一光取出部,位于所述衬底基板上,所述第一光取出部包括硅的氧化物或硅的氮化物或多层薄膜结构;
    多个LED芯片,位于所述第一光取出部远离所述衬底基板的一侧;
    第二光取出部,覆于所述第一光取出部和所述LED芯片上;以及
    第一金属层,覆于所述第一光取出部和所述第二光取出部的周侧;以及
    薄膜晶体管阵列层,设置于所述第一金属层远离所述衬底基板的一侧;其中,所述薄膜晶体管阵列层与所述LED芯片电连接,以驱动所述LED芯片发光。
  2. 根据权利要求1所述的显示面板,其中,所述LED芯片包括发光单元和设置于所述发光单元远离所述衬底基板一侧的第一电极及第二电极;所述第一金属层通过贯穿所述第二光取出部的第一过孔与所述第一电极电连接,所述第一金属层通过贯穿所述第二光取出部的第二过孔与所述第二电极电连接。
  3. 根据权利要求2所述的显示面板,其中,所述薄膜晶体管阵列层包括绑定连接层和驱动功能层,所述绑定连接层位于所述光取出结构远离所述衬底基板的一侧,所述驱动功能层位于所述绑定连接层远离所述衬底基板的一侧,所述驱动功能层通过所述绑定连接层与所述LED芯片电连接。
  4. 根据权利要求3所述的显示面板,其中,所述绑定连接层包括:
    第一绝缘层,覆于所述衬底基板和所述第一金属层上;
    第二金属层,位于所述第一绝缘层远离所述衬底基板的一侧,所述第二金属层通过贯穿所述第一绝缘层的第三过孔及第四过孔与所述第一金属层电连接;以及
    第二绝缘层,覆于所述第一绝缘层和所述第二金属层上,所述驱动功能层位于所述第二绝缘层远离所述衬底基板的一侧。
  5. 根据权利要求4所述的显示面板,其中,所述第二金属层包括间隔设置的阳极走线和低电位电源信号线,所述阳极走线通过所述第三过孔与所述第一电极电连接,所述低电位电源信号线通过所述第四过孔与所述第二电极电连接。
  6. 根据权利要求4所述的显示面板,其中,所述驱动功能层包括:
    第三绝缘层,位于所述第二绝缘层远离所述衬底基板的一侧;
    半导体层,位于所述第三绝缘层远离所述衬底基板的一侧;
    第一栅极绝缘层,覆于所述第三绝缘层和所述半导体层上;
    第一栅极层,位于所述第一栅极绝缘层远离所述衬底基板的一侧;
    第二栅极绝缘层,覆于所述第一栅极层和所述第一栅极绝缘层上;
    第二栅极层,位于所述第一栅极绝缘层远离所述衬底基板的一侧;
    层间介质层,覆于所述第二栅极层和所述第二栅极绝缘层上;
    第一源漏极金属层,位于所述层间介质层远离所述衬底基板的一侧,所述第一源漏极金属层包括源极、漏极和信号走线,所述信号走线通过贯穿所述层间介质层、所述第二栅极绝缘层、所述第一栅极绝缘层和所述第三绝缘层的第五过孔与所述第二金属层电连接,所述第五过孔和所述第四过孔相连通;以及
    第一平坦层,覆于所述层间介质层和所述第一源漏极金属层上。
  7. 根据权利要求6所述的显示面板,其中,所述驱动功能层包括:
    第二源漏极金属层,位于所述第一平坦层远离所述衬底基板的一侧,所述第二源漏极金属层通过贯穿所述第一平坦层的第六过孔与所述源极或所述漏极中的一者电连接;以及
    第二平坦层,覆于所述第一平坦层和所述第二源漏极金属层上。
  8. 根据权利要求1所述的显示面板,其中,所述显示面板还包括第四绝缘层,所述第四绝缘层位于所述光取出结构和所述衬底基板之间。
  9. 根据权利要求1所述的显示面板,其中,所述第一光取出部在所述显示面板的厚度方向上的尺寸范围为1微米~30微米。
  10. 根据权利要求1所述的显示面板,其中,所述第二光取出部在所述显示面板的厚度方向上的尺寸范围为1微米~30微米。
  11. 一种显示面板,包括:
    衬底基板;
    光取出结构,设置于所述衬底基板的一侧,所述光取出结构包括:
    第一光取出部,位于所述衬底基板上;
    多个LED芯片,位于所述第一光取出部远离所述衬底基板的一侧;
    第二光取出部,覆于所述第一光取出部和所述LED芯片上;以及
    第一金属层,覆于所述第一光取出部和所述第二光取出部的周侧;以及
    薄膜晶体管阵列层,设置于所述第一金属层远离所述衬底基板的一侧;其中,所述薄膜晶体管阵列层与所述LED芯片电连接,以驱动所述LED芯片发光。
  12. 根据权利要求11所述的显示面板,其中,所述LED芯片包括发光单元和设置于所述发光单元远离所述衬底基板一侧的第一电极及第二电极;所述第一金属层通过贯穿所述第二光取出部的第一过孔与所述第一电极电连接,所述第一金属层通过贯穿所述第二光取出部的第二过孔与所述第二电极电连接。
  13. 根据权利要求12所述的显示面板,其中,所述薄膜晶体管阵列层包括绑定连接层和驱动功能层,所述绑定连接层位于所述光取出结构远离所述衬底基板的一侧,所述驱动功能层位于所述绑定连接层远离所述衬底基板的一侧,所述驱动功能层通过所述绑定连接层与所述LED芯片电连接。
  14. 根据权利要求13所述的显示面板,其中,所述绑定连接层包括:
    第一绝缘层,覆于所述衬底基板和所述第一金属层上;
    第二金属层,位于所述第一绝缘层远离所述衬底基板的一侧,所述第二金属层通过贯穿所述第一绝缘层的第三过孔及第四过孔与所述第一金属层电连接;以及
    第二绝缘层,覆于所述第一绝缘层和所述第二金属层上,所述驱动功能层位于所述第二绝缘层远离所述衬底基板的一侧。
  15. 根据权利要求14所述的显示面板,其中,所述驱动功能层包括:
    第三绝缘层,位于所述第二绝缘层远离所述衬底基板的一侧;
    半导体层,位于所述第三绝缘层远离所述衬底基板的一侧;
    第一栅极绝缘层,覆于所述第三绝缘层和所述半导体层上;
    第一栅极层,位于所述第一栅极绝缘层远离所述衬底基板的一侧;
    第二栅极绝缘层,覆于所述第一栅极层和所述第一栅极绝缘层上;
    第二栅极层,位于所述第一栅极绝缘层远离所述衬底基板的一侧;
    层间介质层,覆于所述第二栅极层和所述第二栅极绝缘层上;
    第一源漏极金属层,位于所述层间介质层远离所述衬底基板的一侧,所述第一源漏极金属层包括源极、漏极和信号走线,所述信号走线通过贯穿所述层间介质层、所述第二栅极绝缘层、所述第一栅极绝缘层和所述第三绝缘层的第五过孔与所述第二金属层电连接,所述第五过孔和所述第四过孔相连通;以及
    第一平坦层,覆于所述层间介质层和所述第一源漏极金属层上。
  16. 根据权利要求15所述的显示面板,其中,所述驱动功能层包括:
    第二源漏极金属层,位于所述第一平坦层远离所述衬底基板的一侧,所述第二源漏极金属层通过贯穿所述第一平坦层的第六过孔与所述源极或所述漏极中的一者电连接;以及
    第二平坦层,覆于所述第一平坦层和所述第二源漏极金属层上。
  17. 根据权利要求11所述的显示面板,其中,所述显示面板还包括第四绝缘层,所述第四绝缘层位于所述光取出结构和所述衬底基板之间。
  18. 根据权利要求11所述的显示面板,其中,所述第一光取出部在所述显示面板的厚度方向上的尺寸范围为1微米~30微米。
  19. 一种显示面板的制备方法,包括以下步骤:
    提供一衬底基板;
    在所述衬底基板的一侧形成第一光取出部;
    将多个LED芯片巨量转移至所述第一光取出部远离所述衬底基板的一侧;
    形成覆于所述第一光取出部和所述LED芯片上的第二光取出部;以及
    形成覆于所述第一光取出部和所述第二光取出部的周侧的第一金属层;以及
    在所述第一金属层远离所述衬底基板的一侧形成薄膜晶体管阵列层,所述薄膜晶体管阵列层与所述LED芯片电连接,以驱动所述LED芯片发光。
  20. 根据权利要求19所述的制备方法,其中,在形成所述第二光取出部的步骤之前,所述制备方法还包括:
    对多个所述LED芯片进行检测并判断是否存在故障LED芯片,若是,则对所述故障LED芯片进行修复。
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