WO2021049320A1 - 塗布器、塗布装置、及び、塗布方法 - Google Patents

塗布器、塗布装置、及び、塗布方法 Download PDF

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Publication number
WO2021049320A1
WO2021049320A1 PCT/JP2020/032555 JP2020032555W WO2021049320A1 WO 2021049320 A1 WO2021049320 A1 WO 2021049320A1 JP 2020032555 W JP2020032555 W JP 2020032555W WO 2021049320 A1 WO2021049320 A1 WO 2021049320A1
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WO
WIPO (PCT)
Prior art keywords
shim
coating
shim member
thickness
coating device
Prior art date
Application number
PCT/JP2020/032555
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English (en)
French (fr)
Japanese (ja)
Inventor
展雄 堀内
Original Assignee
東レエンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2020134670A external-priority patent/JP7194152B2/ja
Application filed by 東レエンジニアリング株式会社 filed Critical 東レエンジニアリング株式会社
Priority to KR1020227002692A priority Critical patent/KR20220056171A/ko
Priority to CN202080063588.9A priority patent/CN114423529B/zh
Publication of WO2021049320A1 publication Critical patent/WO2021049320A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B05C5/0262—Coating heads with slot-shaped outlet adjustable in width, i.e. having lips movable relative to each other in order to modify the slot width, e.g. to close it
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

Definitions

  • the present invention relates to a coating device having a shim member for adjusting the opening area of a slit nozzle, a coating device provided with this coating device, and a coating method.
  • a substrate such as glass coated with a coating liquid such as a resist liquid (referred to as a coating substrate) is used.
  • This coating substrate needs to have a coating film uniformly formed, and is formed by a coating device that uniformly applies a coating liquid.
  • a coating device includes a stage 100 on which the substrate W is placed and a coating unit 102 having a coating device 101 for discharging a coating liquid, and a slit nozzle of the coating device 101.
  • a coating film is formed on the substrate W by relatively moving the substrate W and the coating device 101 while discharging the coating liquid from 103.
  • the applicator 101 is formed by combining the half-shaped half-bases 104 that are each divided by the slit nozzle 103, and the shim member 105 is formed between the half-bases 104.
  • the slit width S is adjusted by changing the thickness of the shim member 105 (see FIG. 10B).
  • a shim member 105 is prepared in units of 0.1 mm, and the slit width S is appropriately adjusted by the viscosity of the coating liquid. As a result, it is possible to handle a wide variety of coating liquids with one coating device 101 without remodeling the coating device 101.
  • the coater 101 has a problem that it is difficult to grasp the thickness of the shim member 105 attached to the coater 101. That is, in a state where the shim member 105 is interposed in the applicator 101, it cannot be confirmed from the outside. Even if it is attempted to confirm through the slit nozzle 103, it is difficult to measure the dimensions of the shim member 105 through the slit nozzle 103 because the slit width S of the slit nozzle 103 is formed in an extremely small gap.
  • the center of the slit width S shifts according to the thickness of the shim member 105, so that the thickness of the shim member 105 provided in the applicator 101 is always grasped. Need to keep. Therefore, when the shim member 105 to be interposed in the applicator 101 is selected, it is necessary to record the selected shim member 105, but the work is troublesome, and it is forgotten to record or artificially. There is a risk of recording incorrect dimensions due to mistakes. If there is an error in grasping the dimensions of the shim member 105, the center position of the slit width S will shift, so that the coating start position will shift and the quality of the product will deteriorate. In order to avoid such a problem, there has been a request to confirm the thickness of the shim member 105 with the shim member 105 interposed in the applicator 101 immediately before the start of the coating process.
  • An object of the present invention is to provide a coating method.
  • the coating device of the present invention is a coating device having a slit nozzle formed in a slit shape in which a discharge port for discharging a coating liquid extends in one direction, and the coating device is the slit.
  • a shim that is formed by combining half-split-shaped half-caps that are divided by a nozzle, is formed with a constant thickness, and adjusts the slit width in the application direction of the discharge port by interposing between the half-caps. It is characterized by including a member and a shim detection unit for detecting the dimensions of the shim member interposed between the half caps.
  • the shim detection unit for detecting the dimensions of the shim member since the shim detection unit for detecting the dimensions of the shim member is provided, the dimensions of the shim member provided in the applicator can be measured through the shim detection unit. Therefore, even when the shim member is interposed in the applicator, the type of the shim member intervening in the discharge port of the slit nozzle can be accurately grasped through the shim detection unit without disassembling the applicator.
  • the shim member is formed so that the coating width of the coating liquid discharged from the discharge port can be adjusted, and the depth dimension of the shim member detected by the shim detection unit corresponds to the coating width. It may have a formed configuration.
  • the coating width adjusted by the shim member can be accurately grasped even when the shim member is interposed in the applicator. Can be done.
  • the shim detection portion is formed by exposing an opening formed on the extension of the slit nozzle in the longitudinal direction and larger than the slit width and the shim member extended in the opening.
  • the shim member may be held in a state where a part of the exposed shim member is separated from the wall surface forming the opening.
  • the shim member in the opening is separated from the wall surface forming the opening, the distinction between the shim member and the wall surface becomes clear, and the dimensions of the shim member can be measured optically accurately. it can.
  • the inside of the opening may be formed in black.
  • a shim detection member having at least a thickness related to the thickness dimension of the shim member is provided separately from the shim member, and the shim detection member is detected in place of the shim member to detect the size of the shim detection member. It may be configured to detect the dimensions of the shim member.
  • the type of shim member can be accurately grasped without directly measuring the shim member.
  • the shim detection member has a thickness-related portion related to the thickness dimension of the shim member and an outer wall portion having a height position different from that of the thickness-related portion, and the thickness-related portion and the outer wall portion.
  • the structure may be formed in which the difference in height dimension from the above is made to correspond to the coating width.
  • the thickness dimension and coating width of the shim member can be grasped without directly measuring the shim member.
  • the coating apparatus and coating method of the present invention include any of the above coating devices and a stage on which the substrate is placed, and discharge the coating liquid from the slit nozzle of the coating device.
  • the shim measuring unit can accurately measure the dimensions of the shim member provided on the coating device through the shim detecting unit. Then, since the position information relative to the substrate such as the coating start position is corrected based on the measured dimensions, the position information is corrected according to the type of the shim member to maintain a high coating accuracy. Can be done.
  • the dimensions of the shim member can be accurately grasped even when the shim member is interposed in the coater.
  • FIG. 1 It is a perspective view which shows the coating apparatus of this invention. It is a figure which shows the vicinity of the leg part of a coating unit. It is a perspective view of the applicator seen from the substrate facing surface side. It is a figure which shows a coater and a shim member, (a) is a figure which shows a shim member, (b) is a figure which shows the coater in a state where a shim member is not intervening, (c) is a figure which shows a shim member intervening. It is a figure which shows the coater in the state which was done. It is a figure which shows the shim detection part in a coater.
  • FIG. 1 It is a figure which shows the coating device which has the shim detection member, (a) is the figure which shows the state which the thickness of a shim member is a predetermined thickness, (b) is the thickness of the shim member as compared with (a). It is a figure which shows the thin state. It is a figure which shows the shim detection member, (a) is the figure which shows the state which the height position of the thickness-related part is set to be flush with the flat reference plane, (b) is the height of the thickness-related part. It is a figure which shows the state which the position is set to the position which is higher than the flat reference plane by t.
  • FIG. 1 is a perspective view schematically showing a coating device according to an embodiment of the present invention
  • FIG. 2 is a view showing the vicinity of a leg portion of the coating unit
  • FIG. 3 is a side view of a main part of the coating unit. It is a schematic view seen from the side.
  • the coating apparatus forms a coating film of a liquid substance (hereinafter referred to as a coating liquid) such as a chemical solution or a resist solution on the substrate W, and forms a base 2 and a substrate.
  • a coating liquid a liquid substance
  • the direction in which the coating unit 30 moves is the X-axis direction
  • the direction orthogonal to this in the horizontal plane is the Y-axis direction
  • the direction orthogonal to both the X-axis and the Y-axis direction is Z.
  • the explanation will proceed as the axial direction.
  • the stage 21 is arranged in the central portion of the base 2.
  • the stage 21 is for mounting the carried-in substrate W.
  • the stage 21 is provided with a substrate holding means, and the substrate W is held by the substrate holding means.
  • a plurality of suction holes are formed on the surface of the stage 21, and by generating a suction force in the suction holes, the substrate W can be attracted to and held on the surface of the stage 21. There is.
  • the stage 21 is provided with a board raising / lowering mechanism for raising / lowering the board W.
  • a board raising / lowering mechanism for raising / lowering the board W.
  • a plurality of pin holes are formed on the surface of the stage 21 in addition to the suction holes, and lift pins (not shown) capable of raising and lowering in the Z-axis direction are embedded in the pin holes. .. That is, when the substrate W is carried in with the lift pin protruding from the surface of the stage 21, the substrate W can be brought into contact with the tip portion of the lift pin to hold the substrate W. Then, by lowering the lift pin from that state and accommodating it in the pin hole, the substrate W can be placed on the surface of the stage 21.
  • the coating unit 30 discharges the coating liquid onto the substrate W.
  • a coating film having a uniform thickness can be formed on the substrate W by discharging the coating liquid from the coating device 5 described later. That is, a predetermined amount of the coating liquid is discharged to the substrate W to form a state in which the substrate W and the slit nozzle 51 of the coating device 5 are connected by the coating liquid, and then the coating device 5 is run at a constant speed.
  • a coating film having a constant film thickness can be formed on the substrate W.
  • the coating unit 30 has a leg portion 31 and a beam portion 39 for supporting the coating device 5, and these are attached to the base 2 so as to have a portal shape. ing. That is, the beam portions 39 are attached to both leg portions 31 so as to straddle the stage 21 in the Y-axis direction.
  • the leg portion 31 is attached so as to be movable in the X-axis direction, and the beam portion 39 can scan on the stage 21 by moving the leg portion 31.
  • rails 22 extending in the X-axis direction are installed at both ends of the base 2 in the Y-axis direction, and the legs 31 are slidably attached to the rails 22.
  • a linear motor 33 is attached to the leg portion 31, and by driving and controlling the linear motor 33, the beam portion 39 moves in the X-axis direction with the applicator 5 facing the stage 21, which is arbitrary. It is possible to stop at the position of.
  • the beam portion 39 supports the coating device 5 so that the distance between the slit of the coating device 5 and the substrate becomes constant in the longitudinal direction by suppressing the bending deformation of the coating device 5.
  • the longitudinal end portions of the beam portion 39 are attached to both leg portions 31 arranged at both ends in the Y-axis direction, so that the applicator 5 has the same height in the longitudinal direction in the attached state. Is located in. That is, they are arranged so that the distance between the coater 5 supported by the beam portion 39 and the stage 21 is the same in the longitudinal direction.
  • the beam portion 39 is attached to the leg portion 31 so as to be able to move up and down.
  • the leg portion 31 is provided with a rail 37 extending in the Z-axis direction and a slider 35 that slides along the rail 37, and these sliders 35 and the beam portion 39 are connected to each other. ..
  • a ball screw mechanism driven by a servomotor is attached to the slider 35, and by driving and controlling the servomotor, the slider 35 can move in the Z-axis direction and can be stopped at an arbitrary position. It has become. That is, the applicator 5 is supported so as to be detachable from the substrate W held by the stage 21.
  • the coating device 5 discharges the coating liquid to form a coating film on the substrate W.
  • the coater 5 is a columnar member having a shape extending in one direction, and is provided in a state in which the longitudinal direction is along the Y-axis direction.
  • the coating device 5 is formed with a slit nozzle 51 formed in a slit shape extending in the longitudinal direction on the substrate facing surface 52 facing the substrate W, and the coating liquid supplied to the coating device 5 is supplied from the slit nozzle 51. It is designed to be uniformly discharged over the longitudinal direction. That is, it is uniformly discharged over the entire coating width (width in the Y-axis direction) determined by the slit nozzle 51.
  • the applicator 5 is formed by combining the half-shaped half-base 50 divided by the slit nozzle 51.
  • the slit nozzle 51 is formed by combining these half caps 50, and the slit width S (the dimension in the X-axis direction of the slit nozzle 51) is determined, so that the coating liquid corresponding to the opening area of the slit nozzle 51 is discharged. It is supposed to be done.
  • the applicator 5 is formed so that the shim member 6 can be attached.
  • the slit width S and the coating width dimension of the slit nozzle 51 can be adjusted.
  • the shim member 6 is formed in a flat plate shape, and is accurately formed so that the entire shim member 6 has a constant thickness.
  • the slit width S can be adjusted by sandwiching and attaching the shim member 6 between the half caps 50. That is, in the example of FIG. 4, the slit width S can be increased by the thickness of the shim member 6 by interposing the shim member 6 with respect to the state where the shim member 6 is not present (FIG. 4B). (Fig. 4 (c)).
  • the shim member 6 has a notch 61 formed in the central portion in the longitudinal direction. Since the notch 61 is usually formed in the coating width of the slit nozzle 51, when it is interposed between the half caps 50, the width dimension of the notch 61 matches the coating width of the applicator 5, and the shim. Even when the member 6 is interposed, the coating liquid can be discharged without changing the coating width of the slit nozzle 51.
  • the shim member 6 can adjust the coating width by adjusting not only the slit width S but also the width of the notch 61. That is, in FIG. 7A, the width dimension of the notch portion 61 is the coating width ⁇ of the normal coating device 5, and in FIG. 7B, the width dimension of the notch portion 61 is applied to the coating device 5. It is formed in a dimension ⁇ ( ⁇ ⁇ ) smaller than the width. By adjusting the width dimension of the notch portion 61 in this way, the coating width can be adjusted while adjusting the slit width S of the slit nozzle 51.
  • end notches 62 different from the notches 61 for adjusting the coating width are formed at both ends of the shim member 6.
  • the end notch 62 is provided in a different shape according to the coating width to be adjusted.
  • the depth direction (Z-axis direction) dimension of the end notch 62 is set according to the coating width, and the smaller the width dimension (coating width) of the notch 61, the smaller the end notch 62. It is formed so that the dimension ⁇ in the depth direction of is large.
  • the applicator 5 is provided with a shim detection unit 7 for detecting the dimensions of the intervening shim member 6 (see FIGS. 3 and 5).
  • the shim detection unit 7 is provided on the substrate facing surface 52 on the extension of the slit nozzle 51 in the longitudinal direction, and has an opening 71 formed wider than the dimension of the slit width S and the opening. It is formed by exposing the shim member 6 to 71.
  • the center of the circular opening 71 is arranged on the extension of the slit nozzle 51 in the longitudinal direction, and the slit nozzle 51 is half formed in the opening 71.
  • a shim member 6 interposed between the bases 50 is fixed so as to cross the opening 71. That is, by fixing the shim member 6 by being sandwiched by the wall surface 72 of the half mouthpiece 50 forming the opening 71, a part of the shim member 6 does not touch the wall surface 72 in a posture of crossing the center of the opening 71. It is fixed. That is, the shim member 6 is fixed so that a portion away from the wall surface 72 of the half mouthpiece 50 is formed in the opening 71, and the portion away from the wall surface 72 measures the size of the shim member 6 as described later. Used to do.
  • the coating width is not adjusted because the forming position of the end notch 62 is formed so as to correspond to the forming position of the opening 71.
  • the shim member 6 (FIG. 7A) is fixed so that the shim member 6 in the opening 71 is flush with the wall surface 72 (board facing surface 52) of the opening 71.
  • the shim member 6 in the opening 71 is fixed so as to be located at a position away from the substrate facing surface 52 in the depth direction.
  • the stage 21 is provided with a shim measuring unit 8 for detecting the dimensions of the shim member 6 in the shim detecting unit 7 (see FIGS. 1 and 2).
  • the shim measurement unit 8 uses a laser sensor 81 that irradiates the laser beam B (see FIG. 6) and receives the reflected light.
  • the shim measurement unit 8 has a Y on the side surface of the stage 21. Two locations are provided at positions separated in the axial direction. These laser sensors 81 are connected to a control device, and measure the height position of an object to be irradiated with the laser beam B by measuring the time during which the laser beam B is irradiated and the reflected light is received. be able to.
  • the laser sensors 81 are arranged at the formation positions of the shim detection portions 7 of the coater 5 in the Y-axis direction, and are arranged so that the laser beam B is emitted upward. Therefore, when the coating unit 30 moves in the X-axis direction and the coating device 5 passes through the shim measuring unit 8, the shim detecting unit 7 passes over the laser sensor 81, and the shim member 6 exposed in the shim detecting unit 7. It is possible to measure the dimensions of. In the present embodiment, since the opening 71 is formed to be wider (larger diameter) than the slit width S, it is possible to use an inexpensive large-diameter laser light diameter of the laser sensor 81.
  • FIG. 6 is a view showing a cross section of the shim detection unit 7, in which the shim member 6 sandwiched between the half caps 50 is irradiated with the laser beam B, and the applicator 5 and the laser beam B (laser sensor) are irradiated.
  • (81 position) indicates a relatively moved state (for convenience of explanation, the shim detection unit 7 and the laser beam B are described upside down).
  • the laser beam B from the laser sensor 81 (the leftmost laser beam B in FIG. 6) is irradiated to the bottom surface of the opening 71, and the reflected light is received.
  • the opening 71 is formed to be larger than the slit width S, and the laser beam B can irradiate the wall surface 72 forming the opening 71 and the bottom surface of the opening 71 without irradiating the shim member 6. It is formed to the extent.
  • the bottom surface and the side wall surface 72 of the opening 71 are colored black to reduce erroneous detection due to diffused reflection of the laser beam B from the laser sensor 81.
  • the applicator 5 and the laser sensor 81 move relatively as they are, the laser light B is irradiated to the shim member 6, and when the reflected light is received, the time for receiving the reflected light is shortened. The shim member 6 is detected. Then, when the coating device 5 and the laser sensor 81 move relatively as they are and the laser beam B irradiates the bottom surface of the opening 71, the time for receiving the reflected light becomes longer, so that the shim member 6 is detected. Is finished.
  • the thickness dimension of the shim member 6 provided in the applicator 5 is measured. be able to. Thereby, the slit width S can be calculated.
  • the measurement of the laser sensor 81 described above shows not only the thickness dimension of the shim member 6 but also the end.
  • the depth dimension ( ⁇ ) of the portion notch 62 is measured at the same time.
  • the type of the shim member 6 is specified from the measured depth dimension, and the coating width ( ⁇ ) is grasped. In this way, the type of shim member 6 provided on the applicator 5 can be detected from the shim detection unit 7 without disassembling the applicator 5, and the coating width and the slit width S can be grasped.
  • the coating device has a control device that comprehensively controls drive devices such as a linear motor and a servo motor, and these drive devices are driven and controlled through the control device.
  • the control device can calculate the thickness dimension d of the shim member 6 and the depth dimension of the end notch 62 from the time change of the laser beam B measured by the shim measuring unit 8 as described above. Then, in the present embodiment, the true thickness dimension d of the shim member 6 can be obtained with respect to the thickness dimension d of the shim member 6.
  • FIG. 8 is a diagram showing a state in which the thickness of the shim member 6 is measured
  • FIG. 8A is a diagram showing a positional relationship between the shim member 6 and the laser beam B
  • FIG. 8B is a diagram showing the received laser beam. It is a figure which shows the thickness dimension d of the shim member 6 measured by B. That is, as shown in FIG.
  • the dimension of the intervening shim member 6 (dimension d in FIG. 8) is measured as a dimension larger than the actual dimension d (dimension d'). .. This is because when the laser beam B approaches the shim member 6 from the bottom surface of the opening 71, the center of the laser beam B irradiates the bottom surface of the opening 71, but the light that irradiates the shim member 6. This is because the shim measuring unit 8 reacts to the reflected light, so that it is recognized as a thickness dimension d'larger than the actual thickness dimension d of the shim member 6.
  • the error of the thickness dimension d' is constant depending on the speed at which the laser beam B moves at the time of measurement and the diameter of the laser beam, and the bottom surface and the side wall surface 72 of the opening 71 are colored black.
  • the variation of is suppressed as much as possible. Therefore, in the control device, the dimension d corresponding to the measured dimension d'is stored in advance, and the actually measured dimension d'is corrected as the dimension d.
  • the thickness dimension d of the shim member 6 interposed in the applicator 5 can be accurately grasped.
  • the center position of the slit width S is calculated from the measured thickness dimension of the shim member 6, and the deviation of the center position of the slit width S is corrected. That is, when the slit width S when the shim member 6 is not interposed is the dimension s, the slit width S when the shim member 6 is interposed is s + d, and the center position of the slit width S is (s + d) / 2. It becomes. As a result, the coating start position when the shim member 6 is interposed is corrected, and the coating operation can be started accurately from the coating start position regardless of which shim member 6 is interposed. It has become like.
  • the coating device 5 since the shim detection unit 7 for detecting the dimensions of the shim member 6 is provided, it is provided in the coating device 5 through the shim detection unit 7. The dimensions of the shim member 6 can be measured. Therefore, even when the shim member 6 is interposed in the applicator 5, the type of the shim member 6 intervening in the discharge port of the slit nozzle 51 is accurately grasped through the shim detection unit 7 without disassembling the applicator 5. can do.
  • the shim measuring unit 8 can accurately measure the dimensions of the shim member 6 provided on the applicator 5 through the shim detecting unit 7, and based on the measured dimensions, the shim member 6 and the substrate such as the coating start position can be measured. Since the relative position information is corrected, the position information is corrected according to the type of the shim member 6, and a high degree of coating accuracy can be maintained.
  • the shim detection unit 7 is arranged on the extension of the slit nozzle 51, but it may be formed on the side surface or the upper surface of the applicator 5. Since the laser sensor 81 can be arranged on the stage by being arranged on the extension of the slit nozzle 51 as in the above embodiment, the shim detection unit 7 is formed on the side surface or the upper surface of the coating device 5. It can be configured to be advantageous in terms of space as compared with the case where it is used. Further, since the shim detection unit 7 is arranged on the extension of the slit nozzle 51, the shim detection unit 7 is irradiated with laser light regardless of whether or not the coating liquid is filled in the coating device 5.
  • the dimensions of the shim member 6 can be measured. That is, when the coating liquid filled in the coating device 5 is a sensitive material, if the coating liquid is filled in the coating device 5, an expensive laser beam having a small light diameter is used through the slit nozzle 51. Although the size of the shim member 6 cannot be measured, since the shim detection unit 7 is arranged on the extension of the slit nozzle 51 as in the above embodiment, the laser beam irradiates the coating liquid in the coating device 5. Will not be done. Therefore, the size of the shim member 6 can be measured regardless of the filling state of the coating liquid in the coating device 5.
  • the laser sensors 81 are provided at two locations, but one may be provided, or three or more laser sensors 81 may be provided.
  • a plurality of laser sensors 81 it is possible to confirm and grasp the deviation when the coating device 5 is mounted, and it is possible to contribute to the mounting accuracy of the coating device 5.
  • the size of the shim member 6 may be directly measured by the contact type displacement sensor, and the size of the shim member 6 may be measured directly from the image using an optical camera. The size of the shim member 6 may be measured.
  • the shim detection unit 7 provides the coating device 5 with an opening 71 and directly measures the thickness of the shim member 6 from the opening 71 has been described, but instead of the shim member 6. It may be the one that detects the thing that becomes, and detects the dimension of the shim member by the dimensional information. Specifically, as shown in FIGS. 11 and 12, a shim detection member 9 is provided on the half-base 50, and by detecting the dimensions of the shim detection member 9, the thickness dimension and coating width of the shim member 6 are detected. May be detected.
  • the shim detection member 9 is attached to the half-base 50 so as to be detachable.
  • the shim detection member 9 has a thickness-related portion 91 and an outer wall portion 92, and the thickness-related portion 91 is integrally formed while being sandwiched between the outer wall portions 92.
  • the shim detection member 9 is fixed in a state in which the outer wall portion 92, the thickness-related portion 91, and the outer wall portion 92 are arranged in this order in the coating direction (left-right direction in FIG. 11). It is provided.
  • the thickness dimension of the shim member 6 can be obtained by the thickness-related portion 91, and the coating width dimension can be obtained from the difference in height dimension between the thickness-related portion 91 and the outer wall portion 92. ing.
  • the thickness-related portion 91 is formed into a plate-shaped member corresponding to the dimensions of the shim member 6, and in the present embodiment, the thickness dimension m of the thickness-related portion 91 is formed to be the same as the thickness dimension of the shim member 6. Has been done.
  • the thickness direction is fixed so as to coincide with the arrangement direction of the outer wall portion 92 and the thickness-related portion 91.
  • the outer wall portion 92 sets a reference height position while sandwiching the thickness-related portion 91.
  • the outer wall portion 92 has a flat reference surface 921 and an inclined surface 922, and the reference height position is set by the flat reference surface 921. That is, the shim detection member 9 can position the thickness-related portion 91 between the two inclined surfaces 922 by sandwiching the thickness-related portion 91 in a state where the inclined surfaces 922 of the outer wall portion 92 face each other. The thickness-related portion 91 can be held away from the outer wall portion 92.
  • the difference between the thickness dimension m of the thickness-related portion 91 and the height dimension between the thickness-related portion 91 and the outer wall portion 92 can be measured by the laser sensor 81 of the shim measuring unit 8 described above. That is, when the applicator 5 and the shim measuring unit 8 move relatively in the coating direction, the laser beam is applied to the flat reference surface 921 of the outer wall portion 92, and the height position of the flat reference surface 921 is detected. After that, the inclined surface 922 is irradiated, but the reflected light is suppressed by coloring the inclined surface 922 black in the same manner as the configuration of the opening 71 described above.
  • the thickness-related portion 91 is detected, and the height position thereof is detected.
  • the difference in height dimension between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is calculated.
  • the height dimension of the thickness-related portion 91 (vertical direction in FIGS. 11 and 12) is formed in relation to the coating width.
  • the coating width formed in is the same as the coating width ⁇ of the coating device 5, the thickness-related portion 91 is formed flush with the flat reference surface 921 as shown in FIG. 12A, and the coating width is formed.
  • the thickness-related portion 91 is formed at a position higher than the flat reference surface 921 by t.
  • the difference in height between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is calculated, so that the coating width of the shim member 6 currently used between the half caps 50 can be determined.
  • the thickness dimension m of the thickness-related portion 91 is obtained by calculating the detection time or the detection position of the thickness-related portion 91, as in the above-described embodiment. In this way, the thickness dimension m of the thickness-related portion 91 is formed corresponding to the thickness dimension of the shim member 6, and the difference in height dimension between the flat reference surface 921 (outer wall portion 92) and the thickness-related portion 91 is applied. If the height dimension of the thickness-related portion 91 is set so as to correspond to the width, the applicator 5 can be measured without directly measuring the dimension of the shim member 6 by measuring the dimension of the shim detection member 9. It is possible to accurately grasp the type of the shim member 6 interposed in the discharge port of the slit nozzle 51 with the shim member 6 interposed therebetween.
  • the shim detection member 9 of the present embodiment is provided at a position offset from the shim member 6. If the center position of the shim member 6 (the position that serves as a reference for coating) is to be calculated from the position where the shim detection member 9 is detected, a deviation occurs due to the difference in the thickness dimension m of the shim detection member 9 (FIG. FIG. P) in 11. In this case, it is necessary to correct the center position of the shim member 6 according to the thickness dimension m of the shim detection member 9.
  • the shim detection member 9 As described above, by using the shim detection member 9 separately from the shim member 6 as in the present embodiment, it is troublesome to attach the shim detection member 9 corresponding to the shim member 6, but the same as the above-described embodiment. It is possible to grasp the type of the shim member 6.
  • the shim detecting member 9 has a thickness-related portion 91 and an outer wall portion 92 has been described.
  • the shim detecting member 9 may be formed only by the thickness-related portion 91.
  • the thickness-related portion 91 of the shim detection member 9 has the same dimensions as the thickness dimension of the shim member 6 has been described, but any dimension related to the thickness dimension of the shim member 6 may be used. Any dimension may be sufficient as long as the thickness dimension m of the thickness-related portion 91 and the thickness dimension of the shim member 6 have a correlation.
  • the shim detection member 9 is formed downward on the side surface of the half-base 50 in the X-axis direction, but as shown by the broken line in FIG. 11, it may be formed upward. , It may be formed downward on the substrate facing surface 52, and is not particularly limited as long as the dimensions of the shim detection member 9 can be measured.

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PCT/JP2020/032555 2019-09-10 2020-08-28 塗布器、塗布装置、及び、塗布方法 WO2021049320A1 (ja)

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CN202080063588.9A CN114423529B (zh) 2019-09-10 2020-08-28 涂布器、涂布装置和涂布方法

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