WO2021049146A1 - 蒸着源及び真空処理装置 - Google Patents
蒸着源及び真空処理装置 Download PDFInfo
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- WO2021049146A1 WO2021049146A1 PCT/JP2020/026591 JP2020026591W WO2021049146A1 WO 2021049146 A1 WO2021049146 A1 WO 2021049146A1 JP 2020026591 W JP2020026591 W JP 2020026591W WO 2021049146 A1 WO2021049146 A1 WO 2021049146A1
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- heating mechanism
- vapor deposition
- deposition source
- reflector
- top plate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Definitions
- the present invention relates to a vapor deposition source and a vacuum processing apparatus.
- the vacuum processing devices for example, there is a device for depositing an organic material on a large substrate for a display.
- the substrate and the vapor deposition source are opposed to each other, and the vapor deposition material is ejected from the vapor deposition source toward the substrate to deposit the vapor deposition material on the substrate.
- the vaporization source includes an evaporation container ( ⁇ ⁇ ) that houses the vaporized material, a top plate that closes the evaporation container, an ejection nozzle provided on the top plate, and a heating mechanism that heats the evaporation vessel, the top plate, and the ejection nozzle.
- ⁇ ⁇ evaporation container
- a heating mechanism that heats the evaporation vessel, the top plate, and the ejection nozzle.
- One of the measures to increase the production volume using the vacuum processing equipment as described above is to extend the continuous operation time.
- the thin-film deposition material adheres not only to the substrate but also to the portion around the ejection nozzle. Therefore, if the continuous operation time is long, the ejection nozzle may be covered with the vapor deposition material deposited on the peripheral portion, and the ejection nozzle may be blocked by the vapor deposition material.
- an object of the present invention is to suppress blockage of the ejection nozzle by the vapor deposition material and to provide a highly productive vapor deposition source and a vacuum processing apparatus.
- the vapor deposition source includes an evaporation container, a first heating mechanism, a second heating mechanism, a first reflector, and a second reflector.
- the evaporation container has a container body including a bottom portion and a side wall portion connected to the bottom portion, and a top plate facing the bottom portion and provided with a ejection nozzle.
- the vaporized material is housed in the space surrounded by.
- the first heating mechanism faces the side wall portion.
- the second heating mechanism faces the side portions of the top plate and the ejection nozzle, and is provided apart from the first heating mechanism in the direction from the bottom portion toward the top plate.
- the first reflector faces the first heating mechanism and is provided on the opposite side of the side wall portion.
- the second reflector is provided on the opposite side of the side portion so as to face the second heating mechanism, and is provided apart from the first reflector in the above direction.
- the vapor deposition source further includes a cooling mechanism that surrounds the side wall portion and the side portion, and the first reflector and the first heating mechanism are located between the cooling mechanism and the side wall portion.
- the 2 reflector and the second heating mechanism may be located between the cooling mechanism and the side portion.
- a heat shield is provided between the bottom and the top plate inside the evaporation container, and the vapor deposition material is housed in a space surrounded by the container body and the heat shield. Then, a part of the heat shield plate may be in contact with the side wall portion.
- the heat emissivity of the surface of the container body facing the space region where the first reflector and the second reflector are separated is higher than the heat emissivity of the surface of the container body other than the surface. May be high.
- the surface of the container body facing the space region may be a blasted surface.
- the blockage of the ejection nozzle by the thin-film deposition material is more reliably suppressed, and the productivity of vacuum treatment using the thin-film deposition source is improved. improves.
- the height h of the first heating mechanism from the bottom with respect to the depth d of the container body may be two-thirds or less of the depth d.
- the vacuum processing apparatus includes a vacuum vessel, the vapor deposition source, and a substrate holding mechanism in the vacuum vessel facing the vapor deposition source.
- a highly productive vapor deposition source and a vacuum processing apparatus are provided by suppressing blockage of the ejection nozzle due to the vapor deposition material.
- FIG. 1 is a schematic cross-sectional view of the vapor deposition source of the present embodiment.
- FIG. 2 is a schematic top view of the vapor deposition source of the present embodiment.
- FIG. 1 shows a cross section taken along line A1-A1 of FIG. In FIG. 2, when the vapor deposition source 30A is viewed from above, the heat insulating plate 60 is omitted to show the evaporation container 31 included in the vapor deposition source 30A.
- the thin-film deposition source 30A shown in FIG. 1 is used as a film-forming source for the vacuum processing apparatus 1 (FIG. 3).
- the vapor deposition source 30A includes an evaporation container (crucible) 31, a lower heating mechanism (first heating mechanism) 331, an upper heating mechanism (second heating mechanism) 332, a lower reflector (first reflector) 341, and an upper reflector (upper reflector).
- a second reflector) 342 and a heat insulating plate 60 are provided.
- the lower heating mechanism 331 and the upper heating mechanism 332 are controlled by the control device 80 (FIG. 3).
- the evaporation container 31 extends in the uniaxial direction (X-axis direction in the figure) as the longitudinal direction. When the evaporation container 31 is viewed from above in the Z-axis direction, its outer shape is, for example, a rectangle.
- the evaporation container 31 has a container body 311 and a top plate 312.
- the container body 311 includes a bottom portion 31b and a side wall portion 31w connected to the bottom portion 31b.
- the top plate 312 faces the bottom 31b.
- the top plate 312 is placed on the side wall portion 31w.
- the top plate 312 may be fixed to the side wall portion 31w by fitting, or may be fixed to the side wall portion 31w by a fixing jig. Further, a sealing member may be arranged between the top plate 312 and the side wall portion 31w.
- the vapor deposition material 30 m is housed in the space 315 surrounded by the container body 311 and the top plate 312.
- the vapor-deposited material 30 m is, for example, an organic material, a metal, or the like.
- the top plate 312 is provided with a plurality of ejection nozzles 32.
- Each of the plurality of ejection nozzles 32 is arranged in a row in the longitudinal direction (X-axis direction) of the evaporation container 31 at a predetermined interval. Each of the plurality of ejection nozzles 32 communicates with the space 315 of the evaporation vessel 31.
- the vaporized material 30 m filled in the evaporation container 31 is ejected from the ejection port 320. For example, when the vapor-deposited material 30 m is heated by the lower heating mechanism 331, the steam of the vapor-deposited material 30 m gradually evaporates from the evaporation surface 30 s (interface between the space 315 and the vapor-deposited material 30 m) of the vapor-deposited material 30 m toward the ejection nozzle 32. ..
- the ejection port 320 of the ejection nozzle 32 faces the substrate 90 (FIG. 3).
- the ejection nozzles 32 arranged near both sides of the row are inclined so as to disobey the substrate 90 in order to make the film thickness distribution in the X-axis direction more uniform.
- the central axes 32c of the ejection nozzles 32 arranged on both sides and in the vicinity of both sides of the plurality of ejection nozzles 32 intersect the normal line of the top plate 312.
- the lower heating mechanism 331 faces the lower part of the side wall portion 31w. When the vapor deposition source 30A is viewed from the Z-axis direction, the lower heating mechanism 331 surrounds the container body 311.
- the lower heating mechanism 331 is an induction heating type or resistance heating type heating mechanism.
- the upper heating mechanism 332 faces the side portion 312w of the top plate 312 and the side portion 32w of the ejection nozzle 32 below the heat insulating plate 60.
- the upper heating mechanism 332 is not provided directly above the evaporation surface 30s of the vapor deposition material 30m.
- the upper heating mechanism 332 is an induction heating type or resistance heating type heating mechanism.
- the upper heating mechanism 332 When the direction from the bottom portion 31b to the top plate 312 is the Z-axis direction, the upper heating mechanism 332 is provided so as to be separated from the lower heating mechanism 331 in the Z-axis direction.
- the upper heating mechanism 332 surrounds the top plate 312 and the ejection nozzle 32.
- the lower end of the upper heating mechanism 332 is located, for example, on the lower surface of the top plate 312 (or the upper end of the container body 311).
- the upper heating mechanism 332 is controlled by the control device 80 independently of the lower heating mechanism 331.
- the upper heating mechanism 332 preferentially heats the top plate 312 and the ejection nozzle 32
- the lower heating mechanism 331 preferentially heats the vapor-deposited material 30 m via the container body 311.
- the lower reflector 341 faces the lower heating mechanism 331.
- the lower reflector 341 is provided on the opposite side of the side wall portion 31w.
- the lower heating mechanism 331 is provided between the lower reflector 341 and the side wall portion 31w.
- the lower reflector 341 surrounds the container body 311.
- the lower reflector 341 is composed of at least a single plate material.
- the lower reflector 341 arranged in the lower heating mechanism 331 may have a support mechanism for supporting the lower heating mechanism 331. In this case, for example, the heater wire included in the lower heating mechanism 331 is fixedly supported by the lower reflector 341.
- the upper reflector 342 faces the upper heating mechanism 332.
- the upper reflector 342 is provided on the opposite side of the side portion 312w of the top plate 312.
- the upper reflector 342 is provided so as to be separated from the lower reflector 341 in the Z-axis direction.
- the upper heating mechanism 332 is provided between the upper reflector 342 and the top plate 312.
- the upper reflector 342 surrounds the top plate 312.
- the upper reflector 342 is composed of at least a single plate material.
- the upper reflector 342 aligned with the upper heating mechanism 332 may have a support mechanism for supporting the upper heating mechanism 332. In this case, for example, the heater wire included in the upper heating mechanism 332 is fixedly supported by the upper reflector 342.
- the height h of the lower heating mechanism 331 from the bottom 31b is set to two-thirds or less with respect to the depth d of the container body 311. Further, in the present embodiment, the region A of the container body 311 facing the space region A'where the lower heating mechanism 331 and the upper heating mechanism 332 are separated from each other is defined as the region A. Immediately after the start of vaporization, the height of the evaporation surface 30s of the vaporized material 30 m is located in the region A.
- FIG. 1 shows a state in which the evaporation of the vaporized material 30 m has progressed to some extent.
- the heat insulating plate 60 covers the upper heating mechanism 332. Each of the plurality of ejection nozzles 32 penetrates, for example, the heat insulating plate 60 so as not to be blocked by the heat insulating plate 60.
- the heat insulating plate 60 is composed of at least a single plate material.
- the container body 311 and the top plate 312, and the ejection nozzle 32 are made of metals such as titanium, molybdenum, tantalum, and stainless steel.
- the material of the lower reflector 341 and the upper reflector 342 is, for example, a metal such as stainless steel, copper, or aluminum.
- FIG. 3 is a schematic cross-sectional view showing the vacuum processing apparatus of this embodiment.
- the vacuum processing device 1 includes a vacuum container 10, a substrate support mechanism 20, a vapor deposition source 30A, a heat insulating plate 60, and a control device 80.
- the vacuum processing apparatus 1 is a vapor deposition apparatus that deposits a vapor deposition material 30 m on a substrate 90.
- the vacuum container 10 is a container that maintains a decompressed state.
- the gas inside the vacuum container 10 is exhausted by the exhaust mechanism 70.
- the planar shape of the vacuum vessel 10 when viewed from above in the direction from the substrate support mechanism 20 toward the vapor deposition source 30A (hereinafter, the Z-axis direction) is, for example, a rectangular shape.
- the vacuum container 10 houses the substrate support mechanism 20, the vapor deposition source 30A, the heat insulating plate 60, and the like.
- the vacuum vessel 10 may be provided with a gas supply mechanism capable of supplying gas. Further, the vacuum vessel 10 may be equipped with a pressure gauge for measuring the pressure inside the vacuum vessel 10. Further, the vacuum vessel 10 may be provided with a film thickness meter that indirectly measures the vapor deposition rate of the film formed on the substrate 90.
- the substrate support mechanism 20 is located above the vacuum vessel 10.
- the substrate support mechanism 20 faces the vapor deposition source 30A in the Z-axis direction.
- the substrate support mechanism 20 conveys the substrate 90 and the substrate holder 91 in the Y-axis direction while supporting the substrate holder 91 that holds the substrate 90. That is, the vapor deposition material 30 m is deposited on the substrate 90 while the substrate 90 is conveyed.
- the substrate 90 is, for example, a large rectangular glass substrate. Further, a mask member 92 may be provided between the substrate 90 and the vapor deposition source 30A. Further, a heating mechanism for adjusting the temperature of the substrate 90 may be provided on the side of the substrate 90 opposite to the mask member 92 (the back surface side of the substrate 90).
- the vapor deposition source 30A is located at the bottom of the vacuum vessel 10.
- the vapor deposition source 30A faces the substrate 90 in the Z-axis direction.
- the vapor deposition source 30A is fixed to, for example, a support (not shown).
- the vapor deposition source 30A extends in a direction (X-axis direction) orthogonal to the direction in which the substrate 90 is conveyed.
- the number of thin-film deposition sources 30A is not limited to one, and for example, a plurality of vapor deposition sources 30A may be arranged side by side in the Y-axis direction. In this case, each of the plurality of evaporation containers 31 is parallel to each other and is arranged in the Y-axis direction.
- Each of the plurality of evaporation containers 31 can be filled with 30 m of different types of vaporized material.
- a transport mechanism that changes the relative distance between the vapor deposition source 30A and the substrate 90 may be provided on the vapor deposition source 30A side.
- the relative distance between the vapor deposition source 30A and the substrate 90 can be changed by moving the vapor deposition source 30A and the transport mechanism that conveys the vapor deposition source 30A to the fixed substrate 90.
- FIG. 4 is a schematic cross-sectional view illustrating the operation of the vapor deposition source.
- the vaporized material 30 m housed in the evaporation container 31 is heated by the lower heating mechanism 331, the vaporized material 30 m evaporates, and the vapor pressure of the vaporized material 30 m increases.
- the vaporized material 30 m in the evaporation container 31 may be sublimated from a solid material, or may be once melted in a liquid and then evaporated through the liquid.
- the vapor-deposited material 30 m is mounded as a steam flow from each of the plurality of ejection nozzles 32.
- the heat flow received by the vapor-deposited material 30 m from the lower heating mechanism 331 is schematically indicated by an arrow h1.
- the top plate 312 and the ejection nozzle 32 are heated by the upper heating mechanism 332.
- the vapor deposition material 30 m is separated from each inner wall.
- the flow of heat received by the top plate 312 and the ejection nozzle 32 from the upper heating mechanism 332 is schematically indicated by an arrow h2.
- the vapor deposition material 30 m is less likely to be deposited on the inner walls of the top plate 312 and the ejection nozzle 32.
- the vaporized material 30 m vaporized from the evaporation surface 30s evaporates toward the substrate 90 via the space 315 and the ejection nozzle 32 without being captured in the evaporation container 31 and the ejection nozzle 32.
- a part of the heat received by the top plate 312 by the upper heating mechanism 332 is conducted toward the bottom 31b through the side wall portion 31w of the container body 311.
- a part of the heat flow is schematically indicated by an arrow h3.
- the heat indicated by the arrow h3 is the region A because the region A of the container body 311 is released from the heating mechanism (lower heating mechanism 331, upper heating mechanism 332) and the reflector (lower reflector 341, upper reflector 342). It is discharged into the vacuum container 10 through.
- the thin-film deposition material 30 m is not easily affected by the upper heating mechanism 332 and is preferentially heated by the lower heating mechanism 331.
- the vapor deposition material 30m is heated not only by the lower heating mechanism 331 but also by the upper heating mechanism 332. It ends up. As a result, the amount of evaporation of the vaporized material 30m that evaporates from the evaporation surface 30s becomes excessive, and the amount of the vaporized material 30m that separates from the inner walls of the top plate 312 and the ejection nozzle 32 is greater than the amount that the vapor deposition material 30m separates from the top plate 312 and the ejection nozzle 32. The amount of the vaporized material 30 m incident on each inner wall of the above increases. As a result, the vapor deposition material 30 m is deposited on the inner walls of the top plate 312 and the ejection nozzle 32, and for example, the vapor deposition material 30 m at the ejection nozzle 32 may be clogged.
- the functions of the upper and lower heating mechanisms are separated, the lower heating mechanism 331 preferentially heats the vapor-deposited material 30 m, and the upper heating mechanism 332 preferentially heats the top plate 312 and the ejection nozzle 32. In other words, there is a temperature difference between the portion heated by the lower heating mechanism 331 and the portion heated by the upper heating mechanism 332.
- the frequency at which the vapor-deposited material 30m separates from the inner walls of the top plate 312 and the ejection nozzle 32 is always higher than the frequency at which the vapor-deposited material 30m is incident on the inner walls of the top plate 312 and the ejection nozzle 32.
- the vapor deposition material 30 m at the ejection nozzle 32 is less likely to be clogged.
- the upper heating mechanism 332 does not face the top plate 312 in the Z-axis direction.
- the upper heating mechanism 332 does not interfere with the work of removing the top plate 312 from the container body 311 and the top plate 312 can be easily removed from the container body 311.
- the lower heating mechanism 331 is also provided along the Z-axis direction, the lower heating mechanism 331 and the upper heating mechanism 332 do not interfere with the work even when the entire evaporation container 31 is pulled upward.
- the upper heating mechanism 332 is provided along the Z-axis direction, the amount of heat received by the substrate 90 from the upper heating mechanism 332 is low, and the temperature rise of the substrate 90 by the upper heating mechanism 332 is suppressed.
- FIG. 5 is a schematic cross-sectional view according to the first modification of the present embodiment.
- the vapor deposition source 30B further includes a cooling mechanism 40.
- the cooling mechanism 40 surrounds the evaporation container 31.
- the cooling mechanism 40 surrounds the side wall portion 31w of the container body 311 and the side portion 312w of the top plate 312.
- the cooling mechanism 40 is composed of a plate member in which a water channel is embedded inside or a plate member in which a water channel is fixed on the surface.
- the lower reflector 341 and the lower heating mechanism 331 are located between the cooling mechanism 40 and the side wall portion 31w.
- the upper reflector 342 and the upper heating mechanism 332 are located between the cooling mechanism 40 and the side portion 312w.
- the region A faces the cooling mechanism 40.
- the heat indicated by the arrow h3 (FIG. 4) is easily absorbed by the cooling mechanism 40, and the heat indicated by the arrow h3 is more efficiently released to the outside of the side wall portion 31w through the region A.
- the top plate 312 and the ejection nozzle 32 are heated more efficiently by the upper heating mechanism 332, and the vapor-deposited material 30 m is heated more efficiently by the lower heating mechanism 331.
- FIG. 6 is a schematic cross-sectional view according to the second modification of the present embodiment.
- a heat shield plate 50 is provided inside the evaporation container 31.
- the heat shield plate 50 is provided between the bottom portion 31b and the top plate 312.
- the thin-film deposition material 30 m is housed in a space 315 surrounded by the container body 311 and the heat shield plate 50.
- a part of the heat shield plate 50 is in contact with the side wall portion 31w.
- the side wall portion 31w is provided with a locking portion 313 for locking the heat shield plate 50.
- the heat shield plate 50 has a flat plate portion 501 and a pair of bent portions 502 connected to the flat plate portion 501.
- the bent portion 502 intersects the flat plate portion 501 and is, for example, substantially orthogonal to the flat plate portion 501.
- the bent portion 502 faces the A region of the side wall portion 31w and is in contact with the A region of the side wall portion 31w.
- the flat plate portion 501 is provided with a plurality of hole portions 510 arranged side by side in the Y-axis direction.
- the holes 510 are not limited to the Y-axis direction, and may be arranged side by side in the X-axis direction.
- the vaporized material 30 m evaporated from the evaporation surface 30s passes through the hole 510 and proceeds to the ejection nozzle 32.
- the heat shield plate 50 Due to the arrangement of the heat shield plate 50, even if the residual heat stored in the top plate 312 is radiated from the top plate 312 toward the vapor deposition material 30 m, this radiant heat is blocked by the heat shield plate 50. Since the bent portion 502 of the heat shield plate 50 is in contact with the A region of the side wall portion 31w, the radiant heat is less likely to accumulate in the heat shield plate 50, and the radiant heat is less likely to accumulate through the bent portion 502 and the side wall portion 31w. It is discharged to the outside of the side wall portion 31w.
- the heat indicated by the arrow h3 (FIG. 4) is released to the outside of the side wall portion 31w through the region A, and the residual heat stored in the top plate 312 is blocked by the heat shield plate 50. Then, this residual heat is released to the outside of the side wall portion 31w via the bent portion 502 and the side wall portion 31w.
- the top plate 312 and the ejection nozzle 32 are heated more efficiently by the upper heating mechanism 332, and the vapor-deposited material 30 m is heated more efficiently by the lower heating mechanism 331.
- FIG. 7 is a schematic cross-sectional view according to the third modification of the present embodiment.
- the heat emissivity of the surface 314 of the container body 311 in the region A is relatively higher than the heat emissivity of the surface of the container body 311 other than the surface 314.
- the surface 314 has a surface roughness coarser than the surface roughness other than the surface 314, and is, for example, a blasted surface selectively treated with ceramic bead blasting.
- the heat emissivity of the surface 314 is 0.3 or more, while the heat emissivity of the surfaces other than the surface 314 is set to 0.2 or less.
- the heat indicated by the arrow h3 (FIG. 4) is more efficiently released to the outside of the side wall portion 31w through the surface 311. Therefore, the top plate 312 and the ejection nozzle 32 are further generated by the upper heating mechanism 332. It is heated efficiently, and the vapor-deposited material 30 m is heated more efficiently by the lower heating mechanism 331.
- FIG. 8 is a schematic cross-sectional view according to the modified example 4 of the present embodiment.
- a plurality of fins 35 are provided on the container body 311 in the region A.
- the heat indicated by the arrow h3 (FIG. 4) is more efficiently released to the outside of the side wall portion 31w through the plurality of fins 35, so that the top plate 312 and the ejection nozzle 32 are provided with the upper heating mechanism 332.
- the vapor-deposited material 30 m is heated more efficiently by the lower heating mechanism 331.
- the term "opposing" in the present specification includes not only the case where a certain member directly faces another member but also the case where a certain member faces another member via a third member. In the latter case, at least a portion of the third member is located between one member and another.
- Vacuum processing device 10 ... Vacuum container 20 ... Substrate support mechanism 30A, 30B, 30C, 30D, 30E ... Evaporation source 30m ... Evaporation material 30s ... Evaporation surface 31 ... Evaporation container 31b ... Bottom 31w ... Side wall 32 ... Ejection nozzle 32c ... Central axis 32w ... Side 35 ... Fins 40 ... Cooling mechanism 50 ... Heat shield plate 60 ... Insulation plate 70 ... Exhaust mechanism 80 ... Control device 90 ... Board 91 ... Board holder 92 ... Mask member 311 ... Container body 312 ... Top plate 312w ... Side 313 ... Locking part 314 ... Surface 315 ... Space 320 ... Spout 331 ... Lower heating mechanism 332 ... Upper heating mechanism 341 ... Lower reflector 342 ... Upper reflector 501 ... Flat plate part 502 ... Bent part 510 ... Hole
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Abstract
Description
上記蒸発容器は、底部と上記底部に連設された側壁部とを含む容器本体と、上記底部に対向し、噴出ノズルが設けられた天板とを有し、上記容器本体と上記天板とによって囲まれた空間に蒸着材料が収容される。
上記第1加熱機構は、上記側壁部に対向する。
上記第2加熱機構は、上記天板及び上記噴出ノズルのそれぞれの側部に対向し、上記第1加熱機構とは上記底部から上記天板に向かう方向に離間して設けられる。
上記第1リフレクタは、上記第1加熱機構と対向し、上記側壁部の反対側に設けられる。
上記第2リフレクタは、上記第2加熱機構と対向し、上記側部の反対側に設けられ、上記第1リフレクタとは上記方向に離間して設けられる。
10…真空容器
20…基板支持機構
30A、30B、30C、30D、30E…蒸着源
30m…蒸着材料
30s…蒸発面
31…蒸発容器
31b…底部
31w…側壁部
32…噴出ノズル
32c…中心軸
32w…側部
35…フィン
40…冷却機構
50…遮熱板
60…断熱板
70…排気機構
80…制御装置
90…基板
91…基板ホルダ
92…マスク部材
311…容器本体
312…天板
312w…側部
313…係止部
314…表面
315…空間
320…噴出口
331…下部加熱機構
332…上部加熱機構
341…下部リフレクタ
342…上部リフレクタ
501…平板部
502…折曲部
510…孔部
Claims (7)
- 底部と前記底部に連設された側壁部とを含む容器本体と、前記底部に対向し、噴出ノズルが設けられた天板とを有し、前記容器本体と前記天板とによって囲まれた空間に蒸着材料が収容される蒸発容器と、
前記側壁部に対向する第1加熱機構と、
前記天板及び前記噴出ノズルのそれぞれの側部に対向し、前記第1加熱機構とは前記底部から前記天板に向かう方向に離間して設けられた第2加熱機構と、
前記第1加熱機構と対向し、前記側壁部の反対側に設けられた第1リフレクタと、
前記第2加熱機構と対向し、前記側部の反対側に設けられ、前記第1リフレクタとは前記方向に離間して設けられた第2リフレクタと
を具備する蒸着源。 - 請求項1に記載の蒸着源であって、
前記側壁部及び前記側部を囲む冷却機構をさらに具備し、
前記第1リフレクタ及び前記第1加熱機構が前記冷却機構と前記側壁部との間に位置し、
前記第2リフレクタ及び前記第2加熱機構が前記冷却機構と前記側部との間に位置する
蒸着源。 - 請求項1または2に記載の蒸着源であって、
前記蒸発容器の内部において、前記底部と前記天板との間に遮熱板を設け、
前記容器本体と前記遮熱板とによって囲まれた空間に前記蒸着材料が収容され、
前記遮熱板の一部が前記側壁部に接している
蒸着源。 - 請求項1~3のいずれか1つに記載の蒸着源であって、
前記第1リフレクタと前記第2リフレクタとが離間した空間領域に対向する前記容器本体の表面の熱輻射率は、前記表面以外の前記容器本体の表面の熱輻射率よりも高い
蒸着源。 - 請求項4に記載の蒸着源であって、
前記空間領域に対向する前記容器本体の前記表面は、ブラスト処理面である
蒸着源。 - 請求項1~5のいずれか1つに記載の蒸着源であって、
前記容器本体の深さdに対する、前記底部からの前記第1加熱機構の高さhは、前記深さdの3分の2以下である
蒸着源。 - 真空容器と、
底部と前記底部に連設された側壁部とを含む容器本体と、前記底部に対向し、噴出ノズルが設けられた天板とを有し、前記容器本体と前記天板とによって囲まれた空間に蒸着材料が収容される蒸発容器と、前記側壁部に対向する第1加熱機構と、前記天板の側部に対向し、前記第1加熱機構とは前記底部から前記天板に向かう方向に離間して設けられた第2加熱機構と、前記第1加熱機構と対向し、前記側壁部の反対側に設けられた第1リフレクタと、前記第2加熱機構と対向し、前記側部の反対側に設けられ、前記第1リフレクタとは前記方向に離間して設けられた第2リフレクタとを有する蒸着源と、
前記真空容器内において、前記蒸着源に対向する基板保持機構と
を具備する真空処理装置。
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