WO2019181383A1 - 塗布器、及び塗布器のエア排出方法 - Google Patents

塗布器、及び塗布器のエア排出方法 Download PDF

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Publication number
WO2019181383A1
WO2019181383A1 PCT/JP2019/007277 JP2019007277W WO2019181383A1 WO 2019181383 A1 WO2019181383 A1 WO 2019181383A1 JP 2019007277 W JP2019007277 W JP 2019007277W WO 2019181383 A1 WO2019181383 A1 WO 2019181383A1
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WO
WIPO (PCT)
Prior art keywords
applicator
discharge
reservoir
air
coating liquid
Prior art date
Application number
PCT/JP2019/007277
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English (en)
French (fr)
Japanese (ja)
Inventor
義則 谷
竜太 坂下
暁雄 鈴木
Original Assignee
東レエンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東レエンジニアリング株式会社 filed Critical 東レエンジニアリング株式会社
Priority to KR1020207021359A priority Critical patent/KR102556010B1/ko
Publication of WO2019181383A1 publication Critical patent/WO2019181383A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

Definitions

  • the present invention relates to an applicator and an air discharge method of the applicator.
  • coated substrate For flat panel displays such as liquid crystal displays and plasma displays, those manufactured by applying a resist solution on a substrate made of glass or the like (referred to as “coated substrate”) are used.
  • the coating substrate is manufactured by a coating apparatus that applies a resist solution (hereinafter referred to as “coating liquid”), and the coating apparatus includes a stage on which the substrate is placed and a coating device that discharges the coating liquid.
  • the applicator has a laterally long reservoir in which the coating liquid is stored, an inflow path through which the coating liquid flows into the reservoir, a discharge port for discharging the coating liquid, a reservoir and a discharge port. And a slit channel for discharge to be connected.
  • An application operation is performed in which the substrate and the applicator are relatively moved while the application liquid supplied from the inflow part to the reservoir part is discharged from the discharge port through the slit channel. As a result, a coating film having a predetermined thickness is formed on the substrate.
  • air discharge processing air vent processing
  • air discharge processing air vent processing
  • the application operation is performed in a flow path in the applicator while air such as bubbles is mixed in the application liquid
  • the discharge amount of the application liquid tends to fluctuate due to the deformation of the air, which causes uneven coating thickness. It is because it becomes. Therefore, for example, before the coating operation, an air discharge process is performed to discharge the air present in the flow path in the applicator.
  • Such a coating apparatus is disclosed in Patent Document 1, for example.
  • the upper surface side of the reservoir has an inclined shape that gradually increases toward the center.
  • a discharge port is formed at a high position in the center of the reservoir, and air is discharged from the discharge port to the outside together with the coating liquid.
  • the inclined shape makes it easy to collect air to the discharge port.
  • an object of the present invention is to improve the air discharge performance in the applicator.
  • the applicator of the present invention includes a laterally long reservoir that stores the coating liquid, an inflow passage through which the coating liquid flows into the reservoir, a discharge port that discharges the coating liquid, the reservoir and the discharge port, And a slit-like air passage that is provided upward from the reservoir where the inflow passage opens to the entire width in the lateral direction; A discharge passage connected to the air passage passage and for discharging the coating solution to the outside.
  • the air present in the coating liquid in the reservoir can flow from the existing position to the upper air passage channel without moving laterally in the reservoir.
  • the air that has flowed upward through the air passage channel is conveyed to the discharge channel and discharged to the outside of the applicator.
  • the air since it is not necessary to move the air in the lateral direction in the reservoir, the air can be easily discharged to the outside of the applicator, and the applicator has high air discharge performance.
  • the present invention also includes a laterally long reservoir that stores the coating liquid, an inflow passage through which the coating liquid flows into the reservoir, a discharge port that discharges the coating liquid, the reservoir and the discharge port.
  • a method of discharging the internal air wherein the air in the reservoir portion where the inflow path is opened together with the coating liquid from the reservoir portion in the lateral direction
  • a slit-shaped air passage channel provided upward over the entire width is allowed to pass through, and then discharged to the outside through a discharge channel connected to the outside of the applicator.
  • the air even if the air present in the coating liquid in the reservoir does not move laterally in the reservoir, the air flows from the existing position to the upper air passage channel, and then passes through the discharge channel. Then, it is discharged out of the applicator.
  • the air since it is not necessary to move the air in the lateral direction in the reservoir, the air can be easily discharged to the outside of the applicator, and the air discharging performance is improved.
  • the air discharge performance in the applicator is enhanced.
  • FIG. 1 is a side view schematically showing an example of a coating apparatus including a coating device of the present invention.
  • FIG. 2 is a front view showing a configuration for discharging the applicator of the present invention and the air in the applicator together with the coating liquid.
  • the applicator 10 is shown as a cross section. The applicator 10 is used for applying a coating solution to a substrate not shown.
  • the coating device 5 includes a pump (first pump) 51 for supplying the coating liquid to the coating device 10 through a pipe 52 in addition to the coating device 10.
  • the pipe 52 is provided with an opening / closing valve 53.
  • the coating apparatus 5 further includes a stage that holds the substrate, and a moving mechanism that relatively moves the stage and the applicator 10 along the substrate. By performing an operation of moving the applicator 10 and the substrate relatively while discharging the coating liquid from the applicator 10 (this is referred to as “coating operation”), a coating film having a predetermined thickness is formed on the substrate. Formed.
  • the applicator 10 will be described.
  • the applicator 10 has a long shape in the lateral direction (horizontal direction) (see FIG. 2).
  • the horizontal direction is a direction orthogonal to the paper surface, and in the case of FIG. 2, the horizontal direction is the left-right direction.
  • the horizontal direction orthogonal to the horizontal direction is defined as the depth direction.
  • a flow path 17 through which the coating liquid supplied by the pump 51 flows for the coating operation is formed.
  • a laterally long reservoir 11 As the flow path 17, a laterally long reservoir 11, an inflow path 13 for allowing the coating liquid to flow into the reservoir 11, and a discharge slit flow path 12 are provided in the applicator 10.
  • the coating liquid is in a full state in the applicator 10.
  • the inflow path 13 is a flow path constituted by a hole penetrating the rear wall 14 (see FIG. 1) of the applicator 10.
  • the pipe 52 is connected to one end side of the inflow path 13, and the other end of the inflow path 13 opens at the reservoir 11.
  • One inflow path 13 is provided at the center in the horizontal direction.
  • the reservoir portion 11 is a region that is long in the lateral direction (see FIG. 2), and the cross-section of the flow channel extends from the inflow passage 13 in the lateral direction and the vertical direction.
  • the coating liquid supplied through the inflow passage 13 is widened and stored in the storage section 11 in the lateral direction.
  • the reservoir 11 is an area that is also enlarged in the depth direction (see FIG. 1).
  • the slit channel 12 is a slit-like channel that is formed long in the horizontal direction and thin in the depth direction.
  • the slit channel 12 extends in the vertical direction so that the direction from the top to the bottom in the applicator 10 is the flow direction of the coating liquid.
  • the slit channel 12 has a shape in which the channel is reduced in the depth direction as compared to the reservoir 11 (see FIG. 1).
  • One side (upper side) of the slit channel 12 opens at the reservoir 11, and the other side (lower side) opens at the front end surface (lower end surface) 15 of the applicator 10.
  • the slit channel 12 and the reservoir portion 11 are connected with the full width in the lateral direction. That is, the slit channel 12 and the reservoir 11 have the same dimensions in the lateral direction.
  • An opening in the distal end surface 15 of the slit channel 12 becomes a discharge port 16 through which the coating liquid is discharged during the coating operation.
  • the applicator 10 includes a laterally long reservoir 11 in which the coating liquid is stored, an inflow path 13 through which the coating liquid flows into the reservoir 11, a discharge port 16 for discharging the coating liquid, and the reservoir 11. And a discharge slit flow path 12 connecting the discharge port 16. While the coating liquid supplied to the reservoir 11 through the inflow path 13 by the pump 51 is discharged from the discharge port 16 through the slit flow path 12, a coating operation for moving the substrate (not shown) and the applicator 10 relatively is performed. Is called. As a result, a coating film having a predetermined thickness is formed on the substrate.
  • the flow path 17 functions as a coating flow path used for applying the coating liquid to the substrate.
  • the applicator 10 is further provided with an air vent channel 18 for discharging air Q such as bubbles contained in the coating liquid present in the channel (application channel) 17.
  • the applicator 10 includes an air passage channel 19 and a discharge channel 20 as the air vent channel 18.
  • the air passage channel 19 is a slit-like channel that is long in the lateral direction and thin in the depth direction.
  • the air passage channel 19 extends in the vertical direction so that the direction from the bottom to the top in the applicator 10 is the flow direction of the coating liquid.
  • the air passage channel 19 has a shape in which the channel is reduced in the depth direction as compared with the reservoir 11 (see FIG. 1).
  • One side (lower side) of the air passage channel 19 is opened in the reservoir 11, and the other side (upper side) is opened in the discharge channel 20.
  • the air passage 19 and the reservoir 11 are connected with the full width in the lateral direction. That is, the air passage channel 19 and the reservoir 11 have the same dimensions in the lateral direction.
  • the coating liquid stored in the reservoir 11 can flow from the reservoir 11 through the air passage channel 19. Furthermore, the coating liquid can flow through the air passage channel 19 and into the discharge channel 20.
  • movement may be wider about the depth direction than the air passage channel 19, in this embodiment, it passes air rather than the slit channel 12.
  • the flow path 19 is wider in the depth direction.
  • the discharge channel 20 is provided on the air passage channel 19 over the entire width of the air passage channel 19 in the applicator 10.
  • the discharge passage 20 and the air passage passage 19 are connected with the full width in the lateral direction of the air passage passage 19.
  • the discharge channel 20 is a linear channel that is longer in the lateral direction than the air passage channel 19, and the discharge channel 20 includes side walls 21 and 21 on both lateral sides of the applicator 10 (see FIG. 2). ) In the horizontal direction. Both ends in the horizontal direction of the discharge channel 20 become connection ports 24 and 25 to which the pipes 22 and 23 are connected.
  • the cross section of the discharge channel 20 is enlarged from the air passage channel 19. That is, the discharge channel 20 has a shape in which the channel is enlarged in the depth direction as compared with the air passage channel 19.
  • the first pipe 22 is connected to the first connection port 24 on one side (right side) in the horizontal direction, and the second connection port 25 on the other side (left side) in the horizontal direction is connected to the second connection port 25.
  • a pipe 23 is connected.
  • a first opening / closing valve 26 is provided in the first pipe 22.
  • a second opening / closing valve 27 is provided in the second pipe 23.
  • the first pipe 22 has a branch portion 28, and a third pipe 29 is connected to the branch portion 28.
  • An open / close valve 30 and a second pump 31 are connected to the third pipe 29.
  • the applicator 10 has the slit-shaped air passage channel 19 and the discharge channel 20 as the air vent channel 18.
  • the air passage channel 19 is provided upward from the reservoir 11 over the entire lateral width of the reservoir 11.
  • the discharge channel 20 is connected to the air passage channel 19 and serves as a channel for discharging the coating liquid together with the air Q to the outside of the applicator 10.
  • the air passage channel 19 of the present embodiment is provided so as to extend upward along the virtual vertical plane from the reservoir portion 11, but does not have to be strictly provided along the vertical direction. On the other hand, it may be provided extending along an inclined direction with an angle of 45 ° or less, for example. Further, the discharge flow path 20 of the present embodiment (see FIG. 1) has a shape in which the flow path is enlarged in the depth direction compared to the air passage flow path 19, but as shown in FIG. 20 and the air passage channel 19 may have the same dimension in the depth direction.
  • the applicator 10 further includes a closing member 33 that closes the discharge port 16.
  • the closing port 33 closes the discharge port 16 and disables the discharge of the coating liquid from the discharge port 16. For this reason, the closing member 33 can be moved closer to or away from the distal end surface 15 of the applicator 10 by an actuator not shown.
  • An air discharge method for the applicator 10 having the above-described configuration will be described.
  • the coating liquid is supplied to the applicator 10 through the pipe 52 by the first pump 51.
  • the discharge port 16 is closed by the closing member 33.
  • the first and second on-off valves 26 and 27 are in an open state.
  • the third opening / closing valve 30 is in a closed state, and the operation of the second pump 31 is stopped.
  • the coating liquid When the coating liquid is supplied to the applicator 10 through the pipe 52, the coating liquid is supplied to the reservoir 11 through the inflow path 13 as described above. In the reservoir 11, the coating liquid is widened in the lateral direction, and the additionally supplied coating liquid is also widened in the reservoir 11. Thus, since the coating liquid is in a state of being expanded and stored in the lateral direction (full state) in the reservoir portion 11, when the coating liquid is further supplied from the inflow path 13, the lateral direction of the reservoir portion 11 is increased.
  • the air Q present in the coating liquid at each position flows through the air passage 19 together with the coating liquid. This flow of air Q is indicated by an arrow Y in FIG.
  • the coating liquid containing the air Q that has flowed through the air passage channel 19 flows to the discharge channel 20 and can flow to one side and the other side (both left and right sides) in the horizontal direction. Since the first and second on-off valves 26 and 27 are in the open state, the coating liquid containing the air Q that has flowed through the discharge flow path 20 flows through the first pipe 22 and the second pipe 23. The coating liquid that has passed through the first pipe 22 and the second pipe 23 is discharged and stored in a drain receiving tank 32 provided outside the applicator 10.
  • the first and second on-off valves 26 and 27 are opened (and the discharge port 16 is closed by the closing member 33), and a predetermined time has elapsed since the application liquid was supplied to the applicator 10.
  • the on-off valve 53 is closed (see FIG. 5), and as shown in FIG. 6, the second on-off valve 26 is closed and the third on-off valve 30 is opened to operate the second pump 31.
  • the coating liquid is supplied to the applicator 10 by the second pump 31.
  • the coating liquid supplied by the pump 31 is the same as the coating liquid used for performing coating by discharging from the applicator 10 to a substrate outside the figure (the coating liquid discharged by the first pump 51 in FIG. 1). It is.
  • the method of discharging the air Q in the applicator 10 of the present embodiment is a slit shape in which the air Q in the reservoir portion 11 is provided upward along the entire lateral width from the reservoir portion 11 together with the coating liquid.
  • the air passage channel 19 is allowed to pass through and then discharged to the outside through the discharge channel 20 connected to the outside of the applicator 10. According to this method, even if the air Q present in the coating solution of the reservoir 11 does not move laterally in the reservoir 11, as shown in FIG. It flows to the channel 19 and then is discharged to the outside of the applicator 10 through the discharge channel 20.
  • the applicator 10 includes a slit-like air passage 19 and a discharge passage 20 connected to the air passage 19 to discharge the coating liquid to the outside.
  • the air passage channel 19 is provided upward from the reservoir 11 where the inflow channel 13 is opened over the entire width in the lateral direction. According to this applicator 10, even if air Q is present in the coating solution at both lateral ends of the reservoir 11, even if the air Q does not move laterally in the reservoir 11, It is possible to flow from the existing position (position on both ends in the lateral direction) to the upper air passage channel 19.
  • the air Q that has flowed upward through the air passage channel 19 is conveyed to the discharge channel 20 and is discharged to the outside of the applicator 10.
  • the air Q does not have to be moved in the lateral direction in the reservoir 11. Easy to discharge to the outside, air Q discharging performance is high.
  • the air passage channel 19 being slit-shaped (see FIG. 3) and having a shape in which the channel is reduced in the depth direction as compared with the reservoir 11 will be described.
  • the air passage channel 19 is supplied to the reservoir 11 from the inflow passage 13 (see FIG. 4) provided at one place in the center in the lateral direction.
  • the applied coating liquid flows through the air passage channel 19 before it is sufficiently widened in the lateral direction in the reservoir 11. That is, it is difficult for the coating liquid to flow in the regions on both ends in the lateral direction of the reservoir 11 and the regions on both ends in the lateral direction of the air passage channel 19 (the flow of the coating solution is slow).
  • the air Q mixed in the coating liquid present in the regions on both lateral sides of the reservoir 11 is difficult to be discharged.
  • the coating liquid supplied to the reservoir 11 from the inflow path 13 provided at one place in the center in the lateral direction is caused by the slit of the air passage channel 19 as in the present embodiment.
  • the reservoir 11 is sufficiently widened in the lateral direction, and can subsequently flow through the air passage 19 with a certain flow velocity. Therefore, it is easy to flow the air Q together with the coating liquid through the air passage channel 19 from the regions on both ends in the lateral direction of the reservoir portion 11 and discharge the air Q to the outside of the applicator 10.
  • the discharge channel 20 is provided on the air passage channel 19 over the entire width in the lateral direction of the air passage channel 19. Is provided penetrating the side wall 21 of the applicator 10 in the lateral direction. For this reason, the air Q that has passed through the air passage channel 19 flows to the discharge channel 20 as it is, and the air Q can flow along with the coating liquid in the lateral direction along the discharge channel 20. Furthermore, since the discharge channel 20 is provided penetrating the side wall 21 of the applicator 10 in the lateral direction, the air Q in the discharge channel 20 can be discharged to the outside in the same lateral direction. Yes, air discharge efficiency is good. Since the flow path in the discharge flow path 20 is linear, the flow path resistance is small and the air Q is hardly caught.
  • the applicator 10 of the present embodiment has a closing member 33 that closes the discharge port 16.
  • the air discharge process air vent process
  • the discharge port 16 is closed by the closing member 33.
  • the blocking member 33 is particularly effective when the discharge slit channel 12 is relatively wide in the depth direction (for example, more than the air passage channel 19).
  • the flow passage section is enlarged from the air passage channel 19 in the discharge channel 20. For this reason, it is possible to prevent the air Q once entering the discharge channel 20 (see FIG. 6) from returning to the air passage channel 19. Moreover, since the flow path cross section of the discharge flow path 20 is widened, the flow resistance in the discharge flow path 20 is reduced, and the discharge efficiency of the air Q is increased.
  • the coating liquid is positively flowed to the discharge channel 20 by the second pump 31 (see FIG. 6), and the coating liquid containing the air Q is forcibly discharged to the outside.
  • the applicator 10 has a connection port 24, and a second pump 31 for discharging the coating liquid in the discharge channel 20 to the outside is connected to the connection port 24 by a pipe (second pipe 22. And a third pipe 29). With this configuration, a positive flow of the coating liquid can be generated by the second pump 31 in the discharge channel 20. As a result, the air Q can be efficiently discharged from the discharge channel 20.
  • the discharge performance of the air Q in the applicator 10 is enhanced. Therefore, the air Q mixed in the coating solution in the applicator 10 can be efficiently discharged by a discharge operation of a small amount of the coating solution, and the utilization efficiency of the coating solution can be improved.
  • the embodiments disclosed herein are illustrative and non-restrictive in every respect. The scope of rights of the present invention is not limited to the above-described embodiments, but includes all modifications within the scope equivalent to the configurations described in the scope of claims.
  • the cross-sectional shape of the discharge flow path 20 is circular in the cross section orthogonal to the lateral direction of the applicator 10 has been described. It may be oval. Further, the cross-sectional shape of the reservoir 11 or the like may be other than the shape shown in FIG.

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Materials For Medical Uses (AREA)
PCT/JP2019/007277 2018-03-22 2019-02-26 塗布器、及び塗布器のエア排出方法 WO2019181383A1 (ja)

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KR1020207021359A KR102556010B1 (ko) 2018-03-22 2019-02-26 도포기, 및 도포기의 에어 배출 방법

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JP2018053881A JP6967477B2 (ja) 2018-03-22 2018-03-22 塗布器、及び塗布器のエア排出方法
JP2018-053881 2018-03-22

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CN112289964B (zh) * 2020-10-30 2022-09-27 合肥维信诺科技有限公司 显示基板的制备方法和显示面板的制备方法
CN113649226B (zh) * 2021-09-07 2022-11-01 深圳市曼恩斯特科技股份有限公司 一种涂布模头的起涂调试方法及涂布模头
CN113649225B (zh) * 2021-09-07 2022-10-04 深圳市曼恩斯特科技股份有限公司 一种涂布模头及涂布设备

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JP2005144376A (ja) * 2003-11-18 2005-06-09 Dainippon Screen Mfg Co Ltd 基板処理装置、スリットノズル、被充填体における液体充填度判定構造および気体混入度判定構造
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JP2009022837A (ja) * 2007-07-17 2009-02-05 Hitachi Ltd ダイコータおよびダイコータのエア抜き方法
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JP2011147863A (ja) * 2010-01-20 2011-08-04 Dic Corp 塗工用ダイ及び塗工方法
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JP4433760B2 (ja) 2003-10-24 2010-03-17 ソニー株式会社 液体吐出装置
JP4715144B2 (ja) 2004-09-22 2011-07-06 凸版印刷株式会社 スリットノズルの塗布システム
JP5029486B2 (ja) * 2008-05-13 2012-09-19 東京エレクトロン株式会社 塗布装置、塗布方法及び記憶媒体

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JP2007504001A (ja) * 2003-05-16 2007-03-01 スリーエム イノベイティブ プロパティズ カンパニー 塗布ダイおよび使用方法
JP2005144376A (ja) * 2003-11-18 2005-06-09 Dainippon Screen Mfg Co Ltd 基板処理装置、スリットノズル、被充填体における液体充填度判定構造および気体混入度判定構造
JP2009022837A (ja) * 2007-07-17 2009-02-05 Hitachi Ltd ダイコータおよびダイコータのエア抜き方法
JP2010253328A (ja) * 2009-04-21 2010-11-11 Panasonic Corp 塗布装置
JP2011147863A (ja) * 2010-01-20 2011-08-04 Dic Corp 塗工用ダイ及び塗工方法
JP2012120980A (ja) * 2010-12-08 2012-06-28 Nitto Denko Corp 塗布物の製造方法及び製造装置
JP2016073950A (ja) * 2014-10-08 2016-05-12 株式会社ヒラノテクシード ダイとダイの空気抜き方法

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JP6967477B2 (ja) 2021-11-17
JP2019166422A (ja) 2019-10-03
TW201940244A (zh) 2019-10-16
KR20200134210A (ko) 2020-12-01
KR102556010B1 (ko) 2023-07-18

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