WO2018147137A1 - Film barrière aux gaz de dépôt d'aluminium en phase vapeur et film stratifié l'utilisant - Google Patents

Film barrière aux gaz de dépôt d'aluminium en phase vapeur et film stratifié l'utilisant Download PDF

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Publication number
WO2018147137A1
WO2018147137A1 PCT/JP2018/003152 JP2018003152W WO2018147137A1 WO 2018147137 A1 WO2018147137 A1 WO 2018147137A1 JP 2018003152 W JP2018003152 W JP 2018003152W WO 2018147137 A1 WO2018147137 A1 WO 2018147137A1
Authority
WO
WIPO (PCT)
Prior art keywords
film
gas barrier
aluminum
layer
vapor deposition
Prior art date
Application number
PCT/JP2018/003152
Other languages
English (en)
Japanese (ja)
Inventor
鈴木　孝司
貴宏 石井
俊樹 小林
Original Assignee
東レフィルム加工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東レフィルム加工株式会社 filed Critical 東レフィルム加工株式会社
Priority to JP2018567382A priority Critical patent/JP7156592B2/ja
Priority to KR1020197025266A priority patent/KR102484868B1/ko
Priority to CN201880015709.5A priority patent/CN110382233B/zh
Publication of WO2018147137A1 publication Critical patent/WO2018147137A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/14—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to metal, e.g. car bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2518/00—Other type of polymers
    • B05D2518/10—Silicon-containing polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/10—Coating on the layer surface on synthetic resin layer or on natural or synthetic rubber layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/20—Inorganic coating
    • B32B2255/205—Metallic coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/724—Permeability to gases, adsorption
    • B32B2307/7242—Non-permeable
    • B32B2307/7244—Oxygen barrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/724—Permeability to gases, adsorption
    • B32B2307/7242—Non-permeable
    • B32B2307/7246—Water vapor barrier

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Le but de la présente invention est de fournir un film barrière aux gaz de dépôt d'aluminium en phase vapeur qui est caractérisé en ce qu'il est produit en formant une couche de dépôt en phase vapeur sur au moins une surface de la surface de film de matériau de base, la composition de la couche de dépôt en phase vapeur changeant continuellement d'une couche métallique d'aluminium ayant une épaisseur de film supérieure ou égale à 25 nm à une couche d'oxyde d'aluminium ayant une épaisseur de film supérieure ou égale à 5 nm, et en stratifiant en outre cette dernière sur une couche de résine barrière aux gaz ayant une épaisseur de film de 0,1 à 4 µm ; la couche de résine barrière aux gaz étant constituée d'une composition barrière aux gaz obtenue par polycondensation d'une résine à base d'alcool de vinyle et d'un composé de silicium organique ayant un groupe alcoxy. L'invention concerne : un film barrière aux gaz de dépôt d'aluminium en phase vapeur qui présente d'excellentes propriétés de barrière à l'oxygène et à la vapeur d'eau, une solidité de stratification, une résistance à la flexion et une résistance à la traction ; un film stratifié l'utilisant.
PCT/JP2018/003152 2017-02-07 2018-01-31 Film barrière aux gaz de dépôt d'aluminium en phase vapeur et film stratifié l'utilisant WO2018147137A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018567382A JP7156592B2 (ja) 2017-02-07 2018-01-31 ガスバリア性アルミニウム蒸着フィルムおよびそれを用いた積層フィルム
KR1020197025266A KR102484868B1 (ko) 2017-02-07 2018-01-31 가스 배리어성 알루미늄 증착 필름 및 그것을 사용한 적층 필름
CN201880015709.5A CN110382233B (zh) 2017-02-07 2018-01-31 气体阻隔性铝蒸镀膜及使用其的层叠膜

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017020180 2017-02-07
JP2017-020180 2017-02-07

Publications (1)

Publication Number Publication Date
WO2018147137A1 true WO2018147137A1 (fr) 2018-08-16

Family

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Family Applications (1)

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PCT/JP2018/003152 WO2018147137A1 (fr) 2017-02-07 2018-01-31 Film barrière aux gaz de dépôt d'aluminium en phase vapeur et film stratifié l'utilisant

Country Status (4)

Country Link
JP (1) JP7156592B2 (fr)
KR (1) KR102484868B1 (fr)
CN (1) CN110382233B (fr)
WO (1) WO2018147137A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020049736A (ja) * 2018-09-26 2020-04-02 東レ株式会社 積層体およびそれを用いた封止部材
WO2020241621A1 (fr) * 2019-05-31 2020-12-03 東洋紡株式会社 Film barrière contre les gaz transparent et son procédé de production
JP2020198290A (ja) * 2019-05-31 2020-12-10 寧徳時代新能源科技股▲分▼有限公司Ｃｏｎｔｅｍｐｏｒａｒｙ Ａｍｐｅｒｅｘ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｉｍｉｔｅｄ リチウムイオン二次電池、セル及び負極シート
US20220298623A1 (en) * 2018-10-30 2022-09-22 Fres-Co System Usa, Inc. Methods of making films and laminates with high oxygen barrier
US11646424B2 (en) 2019-05-31 2023-05-09 Contemporary Amperex Technology Co., Limited Lithium-ion secondary battery

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102305248B1 (ko) * 2020-02-12 2021-09-24 도레이첨단소재 주식회사 가스 배리어 알루미늄 증착필름 및 그의 제조방법

Citations (6)

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JPH11300875A (ja) * 1998-04-23 1999-11-02 Toppan Printing Co Ltd 高バリアポリマー複合フィルムおよび包装体
JP2000006305A (ja) * 1998-04-24 2000-01-11 Toppan Printing Co Ltd 紫外線カット性を有する透明性ガスバリア複合フィルム材料およびそれを用いた包装体
JP2003326636A (ja) * 2002-05-16 2003-11-19 Toppan Printing Co Ltd 強密着性ガスバリア透明積層体
JP2004323616A (ja) * 2003-04-23 2004-11-18 Toray Ind Inc ポリエステルフィルム
JP2015030113A (ja) * 2013-07-31 2015-02-16 大日本印刷株式会社 包装材料
KR20160092526A (ko) * 2014-12-30 2016-08-05 도레이첨단소재 주식회사 투명 배리어 필름

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EP1410901B1 (fr) * 2001-07-24 2013-04-10 Toppan Printing Co., Ltd. Film de depot
JP2005132004A (ja) 2003-10-31 2005-05-26 Toppan Printing Co Ltd 断熱パネル用バリア性外装材料及び断熱パネル
JP2007290222A (ja) 2006-04-25 2007-11-08 Toppan Printing Co Ltd 真空断熱材用外装材料および断熱材外装体
JP2010131756A (ja) 2008-12-02 2010-06-17 Toray Advanced Film Co Ltd ガスバリア性フィルム
JP2012210744A (ja) 2011-03-31 2012-11-01 Unitika Ltd 積層体およびその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11300875A (ja) * 1998-04-23 1999-11-02 Toppan Printing Co Ltd 高バリアポリマー複合フィルムおよび包装体
JP2000006305A (ja) * 1998-04-24 2000-01-11 Toppan Printing Co Ltd 紫外線カット性を有する透明性ガスバリア複合フィルム材料およびそれを用いた包装体
JP2003326636A (ja) * 2002-05-16 2003-11-19 Toppan Printing Co Ltd 強密着性ガスバリア透明積層体
JP2004323616A (ja) * 2003-04-23 2004-11-18 Toray Ind Inc ポリエステルフィルム
JP2015030113A (ja) * 2013-07-31 2015-02-16 大日本印刷株式会社 包装材料
KR20160092526A (ko) * 2014-12-30 2016-08-05 도레이첨단소재 주식회사 투명 배리어 필름

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020049736A (ja) * 2018-09-26 2020-04-02 東レ株式会社 積層体およびそれを用いた封止部材
JP7273475B2 (ja) 2018-09-26 2023-05-15 東レフィルム加工株式会社 積層体およびそれを用いた封止部材
US20220298623A1 (en) * 2018-10-30 2022-09-22 Fres-Co System Usa, Inc. Methods of making films and laminates with high oxygen barrier
WO2020241621A1 (fr) * 2019-05-31 2020-12-03 東洋紡株式会社 Film barrière contre les gaz transparent et son procédé de production
JP2020198290A (ja) * 2019-05-31 2020-12-10 寧徳時代新能源科技股▲分▼有限公司Ｃｏｎｔｅｍｐｏｒａｒｙ Ａｍｐｅｒｅｘ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｉｍｉｔｅｄ リチウムイオン二次電池、セル及び負極シート
CN113874543A (zh) * 2019-05-31 2021-12-31 东洋纺株式会社 透明阻气薄膜和其制造方法
US11611081B2 (en) 2019-05-31 2023-03-21 Contemporary Amperex Technology Co., Limited Lithium ion secondary battery, battery core, negative electrode plate, and apparatus
US11646424B2 (en) 2019-05-31 2023-05-09 Contemporary Amperex Technology Co., Limited Lithium-ion secondary battery
JP7271390B2 (ja) 2019-05-31 2023-05-11 寧徳時代新能源科技股▲分▼有限公司 リチウムイオン二次電池、セル及び負極シート
JP7472905B2 (ja) 2019-05-31 2024-04-23 東洋紡株式会社 透明ガスガリアフィルム及びその製造方法

Also Published As

Publication number Publication date
JPWO2018147137A1 (ja) 2019-11-21
CN110382233A (zh) 2019-10-25
KR20190116340A (ko) 2019-10-14
KR102484868B1 (ko) 2023-01-06
CN110382233B (zh) 2021-12-07
JP7156592B2 (ja) 2022-10-19

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