WO2018105249A9 - 弾性波装置、高周波フロントエンド回路及び通信装置 - Google Patents

弾性波装置、高周波フロントエンド回路及び通信装置 Download PDF

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Publication number
WO2018105249A9
WO2018105249A9 PCT/JP2017/037941 JP2017037941W WO2018105249A9 WO 2018105249 A9 WO2018105249 A9 WO 2018105249A9 JP 2017037941 W JP2017037941 W JP 2017037941W WO 2018105249 A9 WO2018105249 A9 WO 2018105249A9
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WO
WIPO (PCT)
Prior art keywords
piezoelectric substrate
electrode layer
acoustic wave
silicon oxide
wave device
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PCT/JP2017/037941
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English (en)
French (fr)
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WO2018105249A1 (ja
Inventor
高橋　秀明
広和 阪口
康晴 中井
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株式会社村田製作所
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Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to CN201780073197.3A priority Critical patent/CN110024287B/zh
Priority to KR1020197014047A priority patent/KR102311837B1/ko
Priority to JP2018554853A priority patent/JP6922931B2/ja
Publication of WO2018105249A1 publication Critical patent/WO2018105249A1/ja
Priority to US16/429,098 priority patent/US11595024B2/en
Publication of WO2018105249A9 publication Critical patent/WO2018105249A9/ja

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02614—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02944—Means for compensation or elimination of undesirable effects of ohmic loss
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves
    • H03H9/725—Duplexers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects

Abstract

低損失であり、周波数温度特性に優れており、高次モードによるスプリアスが生じ難く、かつＩＭＤの劣化を抑制することができる、弾性波装置を提供する。　圧電基板２と、圧電基板２上に設けられたＩＤＴ電極３と、圧電基板２上において、ＩＤＴ電極３を覆うように設けられている、酸化ケイ素膜６と、を備え、ＩＤＴ電極３が、第１の電極層と、第１の電極層上に積層された第２の電極層とを有し、第１の電極層が、第２の電極層を構成している金属及び酸化ケイ素膜６を構成している酸化ケイ素よりも密度の高い金属若しくは合金により構成されており、圧電基板２が、ＬｉＮｂＯ３により構成されており、圧電基板２のオイラー角（０°±５°，θ，０°±１０°）において、θが８°以上、３２°以下の範囲内にあり、酸化ケイ素膜６が、水素原子、水酸基またはシラノール基を含有している、弾性波装置１。
PCT/JP2017/037941 2016-12-05 2017-10-20 弾性波装置、高周波フロントエンド回路及び通信装置 WO2018105249A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201780073197.3A CN110024287B (zh) 2016-12-05 2017-10-20 弹性波装置、高频前端电路以及通信装置
KR1020197014047A KR102311837B1 (ko) 2016-12-05 2017-10-20 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
JP2018554853A JP6922931B2 (ja) 2016-12-05 2017-10-20 弾性表面波装置、高周波フロントエンド回路及び通信装置
US16/429,098 US11595024B2 (en) 2016-12-05 2019-06-03 Elastic wave device, high-frequency front end circuit, and communication apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016235936 2016-12-05
JP2016-235936 2016-12-05

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US16/429,098 Continuation US11595024B2 (en) 2016-12-05 2019-06-03 Elastic wave device, high-frequency front end circuit, and communication apparatus

Publications (2)

Publication Number Publication Date
WO2018105249A1 WO2018105249A1 (ja) 2018-06-14
WO2018105249A9 true WO2018105249A9 (ja) 2019-11-28

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Country Link
US (1) US11595024B2 (ja)
JP (1) JP6922931B2 (ja)
KR (1) KR102311837B1 (ja)
CN (1) CN110024287B (ja)
WO (1) WO2018105249A1 (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11545960B2 (en) 2018-11-16 2023-01-03 Skyworks Solutions, Inc. Multi-mode surface acoustic wave filter with slanted acoustic reflectors
JP2020096220A (ja) 2018-12-10 2020-06-18 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
JP6977703B2 (ja) 2018-12-10 2021-12-08 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
CN113346867B (zh) * 2021-05-27 2024-04-12 北京超材信息科技有限公司 声表面波装置

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Also Published As

Publication number Publication date
US11595024B2 (en) 2023-02-28
WO2018105249A1 (ja) 2018-06-14
JP6922931B2 (ja) 2021-08-18
US20190288668A1 (en) 2019-09-19
CN110024287B (zh) 2023-09-26
CN110024287A (zh) 2019-07-16
JPWO2018105249A1 (ja) 2019-07-11
KR102311837B1 (ko) 2021-10-13
KR20190066053A (ko) 2019-06-12

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