WO2017018136A1 - ガラスフィルムの製造方法、及びガラスフィルムを含む電子デバイスの製造方法 - Google Patents

ガラスフィルムの製造方法、及びガラスフィルムを含む電子デバイスの製造方法 Download PDF

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Publication number
WO2017018136A1
WO2017018136A1 PCT/JP2016/069853 JP2016069853W WO2017018136A1 WO 2017018136 A1 WO2017018136 A1 WO 2017018136A1 JP 2016069853 W JP2016069853 W JP 2016069853W WO 2017018136 A1 WO2017018136 A1 WO 2017018136A1
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WIPO (PCT)
Prior art keywords
glass film
support
fulcrum
peeling
glass
Prior art date
Application number
PCT/JP2016/069853
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English (en)
French (fr)
Japanese (ja)
Inventor
康夫 山崎
貴博 南
久敏 饗場
隆雄 岡
崇 藤田
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to CN201680042722.0A priority Critical patent/CN107848880B/zh
Priority to KR1020187001406A priority patent/KR102457961B1/ko
Publication of WO2017018136A1 publication Critical patent/WO2017018136A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
    • B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by features of form at particular places, e.g. in edge regions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/28—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar form; Layered products having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer comprising a deformed thin sheet, i.e. the layer having its entire thickness deformed out of the plane, e.g. corrugated, crumpled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
    • B32B2315/08—Glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment

Definitions

  • the present invention relates to a method for producing a glass film and a method for producing an electronic device including the glass film, and more particularly to a technique for peeling the glass film from a support.
  • flat panel displays such as liquid crystal displays, plasma displays, organic EL displays, and field emission displays have been widely used in place of CRT type displays that have been widely used from the viewpoint of space saving. And in these flat panel displays, further thinning is required.
  • the organic EL display and the organic EL lighting can be provided with a function of being able to be folded and wound using the fact that the thickness dimension is very small (thin).
  • the thickness dimension is very small (thin).
  • Patent Document 1 proposes a glass film having a thickness dimension of 200 ⁇ m or less, and this makes it possible to impart high flexibility to a glass substrate that can be used in a curved state.
  • a glass substrate used for an electronic device such as a flat panel display or a solar cell is subjected to various processing related to electronic device manufacturing such as secondary processing and cleaning.
  • the glass substrate used in these electronic devices is thinned, the glass is a brittle material, which may cause breakage even if there is a slight stress change. There is a problem that it becomes difficult.
  • a glass film having a thickness of 200 ⁇ m or less is rich in flexibility, there is a problem that positioning is difficult when performing various manufacturing-related processes (for example, deviation occurs during patterning).
  • Patent Document 2 a laminated body in which a glass film and a supporting glass that supports the glass film are laminated and fixed to each other has been proposed. If various manufacturing-related treatments are applied to this laminate, the support glass acts as a reinforcing material even when a glass film with poor strength and rigidity is used alone. Positioning can be easily performed as a laminated body. Moreover, it becomes possible to finally acquire only the glass film to which the required process was given by peeling support glass from a glass film after completion
  • some manufacturing-related processes involve heating, such as a transparent conductive film forming process or a sealing process.
  • a treatment with heating is applied to the laminate having the structure described above, the fixing force between the supporting glass and the glass film that are in direct contact or indirectly in contact with each other through a resin layer, an inorganic thin film layer, or the like increases.
  • the problem that it becomes difficult to peel a glass film from support glass arises.
  • Patent Document 3 discloses a supporting glass substrate and a resin layer from an electronic device with a support in which a resin layer having easy peelability fixed to the supporting glass substrate is in close contact with the glass substrate.
  • a method has been proposed in which a knife is inserted into the interface between the resin layer of the support and the glass substrate to peel the support from the electronic device including the glass substrate.
  • Patent Document 4 a supporting glass protrudes from a glass film and is laminated, and a thin portion is provided on an edge of the supporting glass, so that at least one of the edges of the glass film is provided.
  • a glass film laminate in which the part is separated from the supporting glass on the thin part has been proposed.
  • JP 2010-132531 A International Publication No. 2011/048979 JP 2013-147325 A JP 2012-131664 A
  • Patent Document 4 since a thin portion is provided at the end of the support glass and a part of the edge of the glass film is separated from the support glass on the thin portion, the glass film can be easily formed. It can be gripped and seems to be relatively easy to peel without damaging the glass film.
  • this method necessitates special processing on a part of the supporting glass in advance, which increases processing costs.
  • some manufacturing-related processes for electronic devices use a solvent such as a chemical solution. If there is a gap between the glass film and the support glass in the state of the laminate, the solvent enters the gap and is fixed. As a result, there is a problem that the glass film is broken when the glass film is peeled off from the supporting glass.
  • the first technical problem to be solved by the present invention is to peel the glass film from the support simply and at low cost regardless of the type of manufacturing-related treatment. To do.
  • the solution of the first technical problem is achieved by the glass film manufacturing method according to the present invention. That is, in this production method, a laminate is formed by laminating a glass film and a support supporting the glass film so that the support protrudes from the glass film, and forming a laminate including the glass film, In the manufacturing method of the glass film provided with the manufacturing related processing process which performs manufacturing related processing with respect to a laminated body, and the peeling process of peeling a glass film from a support body after a manufacturing related processing process, a peeling process is a support body.
  • a part of the glass film is peeled off, and a peeling starting part producing step for producing a peeling starting part that becomes a starting point when the glass film is peeled over the entire surface thereof, and the glass film from the support starting from the peeling starting part And a peeling start process for making the peeling progress, and the peeling starting part preparation process supports the support at the corner of the support protruding from the glass film.
  • a first fulcrum and a second fulcrum forming step for supporting the laminated body at a position away from the first fulcrum, and an external force acting member between the first fulcrum and the second fulcrum.
  • a concave deformation step for deforming a part of the laminate into a concave shape so that a concave portion is formed on the side of the support, and while the part of the laminate is deformed into a concave shape, the glass film and the support And an insertion step of peeling a part of the glass film by inserting an insertion member between the two.
  • the “manufacturing-related processing” referred to here includes not only processing for directly processing the glass film, but also other devices such as attachment of other members and cleaning of the glass film surface indirectly. It shall widely include processing to bring it close to the final product (shipment state).
  • the first fulcrum is provided at the corner portion of the support that protrudes from the glass film
  • the second fulcrum is provided at a position away from the first fulcrum
  • the point of action of external force is provided between both fulcrums.
  • the laminated body is placed on the placing table so that the supporting body is on the upper side and the glass film is on the lower side, and at least the corner portion of the supporting body is placed on the placing table.
  • the second fulcrum may be provided at the end of the placement surface by protruding from the placement surface.
  • the second fulcrum can be easily provided only by placing the laminate on the mounting table. Moreover, the form of a 2nd fulcrum can be adjusted only by changing the edge part shape of a mounting surface. Therefore, it becomes possible to control the concave deformation of a part of the above-described laminate relatively easily.
  • the glass film manufacturing method according to the present invention may be provided with a first fulcrum by an insertion member.
  • the first fulcrum can be easily provided as in the case where the second fulcrum is provided at the end of the mounting surface.
  • the insertion member itself functions as a first fulcrum forming member, so that the position of the first fulcrum also shifts in the peeling progress direction with the movement of the insertion member after the start of insertion. Therefore, it is possible to smoothly perform the operation of forming the separation starting point portion while keeping the insertion mode of the insertion member in a constant state.
  • using the insertion member also as the first fulcrum forming member leads to a reduction in the number of parts, which is preferable in terms of equipment cost.
  • the manufacturing method of the glass film which concerns on this invention uses an adsorption member as an external force provision member, adsorb
  • the manufacturing method of the glass film which concerns on this invention uses a press member as an external force provision member, and it presses between the 1st fulcrum and a 2nd fulcrum from the support body side to the glass film side with a press member. You may do.
  • the adsorbing member is moved in a direction away from the support, or between the first fulcrum and the second fulcrum by the pressing member.
  • an intermediate point between the second fulcrum and the action point of external force in a direction away from the support in the thickness direction of the glass film Therefore, it becomes possible to stably generate the concave deformation of the laminate.
  • the side of the support It is possible to avoid a situation in which the external force imparting member remains in the concave portion formed in Therefore, after the insertion of the insertion member is started, while the glass film is deformed in a concave shape, the situation where the insertion member and the external force applying member interfere with each other and the separation start point is formed is inserted.
  • the member can be inserted smoothly.
  • the reaction force in a direction to return to a flat state before the support body and the glass film are deformed into a concave shape ( Restoring force). Therefore, when the glass film side is adsorbed by the adsorbing member, the restoring force generated in the glass film is offset by the downward pulling force by the adsorbing member, and as a result, the above-described only on the support side is described above. A restoring force is applied.
  • the insertion of the insertion member between the glass film and the support is started after the laminate is supported flat on the mounting surface and a part of the laminate is deformed into a concave shape.
  • the insertion member can be slid in a direction parallel to the flatly supported portion of the laminated body, and the production operation of the separation starting point portion is smoothly performed. It becomes possible.
  • a wedge-shaped member is used as the insertion member, and an angle formed by the insertion direction of the wedge-shaped member and the blade edge direction of the wedge-shaped member is set to 20 ° or more and 45 ° or less.
  • the wedge-shaped member may be inserted between the glass film and the support, preferably set at 20 ° or more and 30 ° or less.
  • the wedge-shaped member When a wedge-shaped member is used as an insertion member as described above, the wedge-shaped member can be inserted without imposing an excessive load on the glass film and the support by defining the relationship between the blade edge shape of the wedge-shaped member and the insertion direction. Thus, it is possible to smoothly perform the production operation of the peeling start point portion.
  • the glass film manufacturing method according to the present invention may be such that the shortest distance from the first fulcrum to the second fulcrum is set to 30 mm or more and 200 mm or less, preferably 30 mm or more and 150 mm or less. May be set, and more preferably 50 mm or more and 100 mm or less.
  • the second fulcrum has the shortest distance from the first fulcrum.
  • the straight line distance between the two fulcrums and the first fulcrum is treated as “the shortest distance from the first fulcrum to the second fulcrum”.
  • the manufacturing method of the glass film which concerns on this invention set the maximum depth dimension of the recessed part produced in the side of a support body to 1 mm or more and 5 mm or less, while a part of laminated body is deform
  • the degree of concave deformation As described above, by setting the degree of concave deformation with respect to a part of the laminate, it is possible to effectively and stably start the peeling of the glass film by the insertion operation of the insertion member from the corner portion. That is, if the degree of concave deformation is too small (when the maximum depth dimension of the concave portion is small), peeling start force (restoring force) due to concave deformation cannot be sufficiently applied to the corner portion, and the insertion member can be smoothly This is because it is difficult to insert. Alternatively, if the degree of concave deformation is too large (the maximum depth dimension is large), the glass film may be damaged.
  • the manufacturing method of the glass film which concerns on this invention may be what made the movement distance of the insertion member after starting insertion between a glass film and a support body 5 mm or more and 50 mm or less, Preferably, it may be 10 mm or more and 30 mm or less.
  • the insertion member is inserted without imposing an excessive load on the glass film and the support, and the separation starting portion is produced. Can be performed smoothly.
  • the support may be plate glass.
  • the laminated body may be formed by directly adhering the plate glass and the glass film.
  • a support having excellent surface accuracy can be manufactured at low cost.
  • the glass film can be fixed to the support body without misalignment, but the glass film support body according to the present invention can be securely and safely. It becomes possible to peel from the sheet glass as.
  • a laminate is formed by laminating a glass film and a support supporting the glass film so that the support protrudes from the glass film, and forming a laminate including the glass film, An attachment step of attaching an electronic device element to a glass film of a laminate to form an electronic device with a support, and a separation step of peeling the electronic device including the glass film from the support of the electronic device with a support after the attachment step;
  • a peeling step is a peeling starting part production in which a part of the glass film is peeled off from the support, and a peeling starting point part is formed as a starting point when peeling the glass film over the entire surface.
  • the part production step provides a first fulcrum that supports the support at the corner of the support that protrudes from the glass film, and a fulcrum that provides a second fulcrum that supports the electronic device at a position away from the first fulcrum.
  • a concave deformation step in which a portion of the laminate is deformed into a concave shape so that a concave portion is formed on the support side by providing an external force application point between the first fulcrum and the second fulcrum.
  • an insertion step of peeling a part of the glass film by inserting an insertion member between the glass film and the support while a part of the laminated body is deformed into a concave shape. Attached.
  • the first fulcrum is provided at the corner portion of the support protruding from the glass film, and the first Since a second fulcrum is provided at a position away from one fulcrum, and an action point of external force is provided between both fulcrums, a part of the laminate is deformed into a concave shape. Can be deformed with a larger curvature than in the past. Therefore, the shear force generated due to the difference in curvature between the support and the glass film can be increased, and in the subsequent insertion process, a part of the glass film can be easily peeled off from the support. Become.
  • FIG. 1 It is a flowchart which shows the procedure of the manufacturing method of the electronic device containing the glass film which concerns on 1st embodiment of this invention. It is a flowchart which shows the detail of the peeling process shown in FIG. It is a flowchart which shows the detail of the peeling starting part preparation process shown in FIG. It is sectional drawing of the laminated body containing a glass film. It is a top view of the laminated body shown in FIG. It is sectional drawing of the organic EL panel with a support body which attaches the organic EL element as an electronic device element to the laminated body shown in FIG. It is a top view of the peeling apparatus of the glass film which concerns on 1st embodiment of this invention.
  • FIG. 8 is a cross-sectional view of the main part AA of the peeling start point manufacturing apparatus shown in FIG. It is principal part sectional drawing for demonstrating an example of the production
  • FIG. 8 is a cross-sectional view of a main part for explaining an example of a production operation of a peeling start point portion using the peeling start point producing device shown in FIG. 7, and after the insertion operation of the insertion member is started, the insertion member is moved in a predetermined direction. It is a figure which shows the state moved to.
  • FIG. 8 is a cross-sectional view of a main part for explaining an example of a manufacturing operation of a peeling start point using the peeling start point manufacturing apparatus shown in FIG.
  • FIG. 17 Comprising: The state which lowered
  • FIG. 17 It is principal part sectional drawing for demonstrating an example of the production
  • the organic EL panel with the support is attached to the organic EL panel and the support by peeling the glass film and the support.
  • An example of the case of separation will be described below.
  • the manufacturing method of the electronic device which concerns on one Embodiment of this invention is electronic to a glass film with the laminated body formation process S1 which forms the laminated body containing a glass film, and the heating to a glass film.
  • the peeling step S3 peels off a part of the glass film from the support, and creates a peeling starting point part that is a starting point when peeling the glass film over the entire surface.
  • Step S31 and a peeling progress step S32 that advances the peeling of the electronic device from the support starting from the peeling starting point, and among these, the peeling starting point preparing step S31 is made of a glass film as shown in FIG.
  • the glass film 2 is formed of, for example, silicate glass, silica glass, or the like, preferably formed of borosilicate glass, and more preferably formed of alkali-free glass. If the glass film 2 contains an alkali component, cations may drop on the surface, and so-called soda blowing may occur. In that case, since the part which becomes structurally rough arises in the glass film 2, when this glass film 2 is used in the curved state (including the concave deformation), the part which becomes rough due to aging deterioration starts. There is a risk of causing damage. For the above reasons, when there is a possibility of using the glass film 2 in a non-flat state, it is preferable to form the glass film 2 with non-alkali glass.
  • the alkali-free glass here refers to glass that does not substantially contain an alkali component (alkali metal oxide), and specifically refers to glass having an alkali component of 3000 ppm or less.
  • glass of 1000 ppm or less is preferable, glass of 500 ppm or less is more preferable, and glass of 300 ppm or less is more preferable.
  • the thickness dimension of the glass film 2 is set to 300 ⁇ m or less, preferably 200 ⁇ m or less, more preferably 100 ⁇ m or less.
  • the lower limit of the thickness dimension can be set without any particular restriction, but in consideration of the handleability after molding (when laminated with the support 1 or during peeling), it is set to 1 ⁇ m or more, preferably 5 ⁇ m or more. It is good to be done.
  • the support 1 is a plate-like glass in the present embodiment, and is formed of a known glass such as silicate glass, silica glass, borosilicate glass, alkali-free glass, and the like, similar to the glass film 2.
  • a known glass such as silicate glass, silica glass, borosilicate glass, alkali-free glass, and the like.
  • the type of glass is preferably selected so that the difference in coefficient of linear expansion between the support 1 and the glass film 2 between ⁇ 380 ° C. is within 5 ⁇ 10 ⁇ 7 / ° C. In this case, it is preferable to form the support body 1 and the glass film 2 with the same kind of glass.
  • the thickness dimension of the support 1 is not particularly limited as long as the handleability of the glass film 2 can be improved, and is set to the same level or more as the thickness dimension of the glass film 2.
  • the thickness dimension of the support 1 is set to 300 ⁇ m or more, preferably 400 ⁇ m or more.
  • the upper limit value of the thickness dimension can be set without any particular limitation, but it is preferable to keep the thickness dimension to a level that can withstand bending (concave deformation) of the support 1 described later. Specifically, it should be set to 1000 ⁇ m or less, preferably 700 ⁇ m or less. Alternatively, it may be set to 500 ⁇ m or less.
  • the support 1 and the glass film 2 are formed by a known forming method such as a down draw method, preferably by an overflow down draw method. It is also possible to mold by a float method, a slot down draw method, a roll out method, an up draw method or the like. In addition, it is also possible to set it to the thickness dimension of less than 100 micrometers by giving a secondary process as needed (stretching a glass primary molded object by a redraw).
  • the support 1 and the glass film 2 are fixed to each other so as to be peelable.
  • Arbitrary means can be adopted as the fixing means, and in this embodiment, the plate-like glass as the support 1 and the glass film 2 are directly brought into close contact with each other without interposing an adhesive or the like. Realized.
  • the surface roughness Ra of the surface 2a on the support 1 side of the glass film 2 (the lower surface in FIG. 4) and the surface 1a of the support 1 on the side of the glass film 2 (same in FIG. 4).
  • the surface roughness Ra of the upper surface is set to 2.0 nm or less.
  • the thickness is preferably 1.0 nm or less, and more preferably 0.2 nm or less.
  • the size of the surface roughness Ra of the surface 2b opposite to the support 1 of the glass film 2 is not particularly limited, but in the mounting step S2 to be described later, the surface to be subjected to electronic device related processing such as film formation Therefore, the surface roughness Ra is preferably 2.0 nm or less, more preferably 1.0 nm or less, and further preferably 0.2 nm or less.
  • the support 1 protrudes from the glass film 2 in a state where the glass film 2 and the support 1 are laminated (FIG. 4).
  • the amount of protrusion of the support 1 from the glass film 2 is set to, for example, 0.5 mm or more and 10 mm or less, preferably 3 mm or more and 5 mm or less.
  • the amount of protrusion of the support 1 about 10 mm at the maximum
  • the glass film 2 having a relatively large area can be efficiently supported on the entire surface.
  • both the support 1 and the glass film 2 are rectangular. Further, the support body 1 protrudes from the glass film 2 at the entire periphery of the laminate 3 formed by laminating the glass film 2 on the support body 1, whereby the support body is supported at the corner portion 4 of the support body 1. 1 is protruding from the glass film 2. In the present embodiment, the support body 1 protrudes from the glass film 2 at all four edges of the laminate 3. Of course, the support body 1 is made of glass at three or one edge. It is also possible to take a form protruding from the film 2. In this case, it is desirable that the end surface of the glass film 2 and the end surface of the support 1 coincide with each other on the non-projecting side edge.
  • the thickness dimension of the cover glass 6 is set to, for example, 300 ⁇ m or less, preferably 200 ⁇ m or less, and more preferably 100 ⁇ m or less.
  • the thickness dimension of the cover glass 6 it is possible to give the cover glass 6 appropriate flexibility.
  • the attachment aspect of the organic EL element 5 on the glass film 2 is arbitrary, for example, on the surface 2b on the opposite side to the support 1 of the glass film 2, by a known film formation method such as CVD or sputtering,
  • the organic EL element 5 may be formed by sequentially forming an anode layer, a hole transport layer, a light emitting layer, an electron transport layer, a cathode layer, and the like (detailed illustration is omitted).
  • the means for fixing the cover glass 6 to the glass film 2 is also arbitrary.
  • the cover glass 6 may be fixed to the glass film 2 using a known laser sealing technique.
  • the film forming process by the CVD method, sputtering, or the like corresponds to the manufacturing related process of the electronic device (organic EL panel 7) accompanied by heating. Therefore, the glass film 2 is heated by forming the organic EL element 5 on the surface 2b opposite to the support 1 of the glass film 2 as described above. Further, a new bond is formed between the glass film 2 and the support 1 due to this heating, and the glass film 2 and the support 1 are compared with each other when laminated (when the laminate 3 is formed). Fixing force increases.
  • the cover glass 6 and the glass film 2 are directly fixed.
  • the cover glass 6 is attached to the glass film 2 by appropriately using a known glass frit, spacer, or the like (not shown). It may be bonded and fixed. Or you may provide the support body 1 with respect to the cover glass 6 (illustration is abbreviate
  • FIG. 7 shows a plan view of the peeling apparatus 10 for performing the peeling.
  • the peeling apparatus 10 includes a peeling starting part manufacturing apparatus 11 and a peeling progressing apparatus 12.
  • the peeling starting part manufacturing apparatus 11 includes a mounting table 13 on which the organic EL panel 8 with a support can be mounted, A concave deformation imparting portion 14 for imparting a concave deformation to a part of the laminate 3 to be concavely deformed (in this embodiment, the protrusion region 3a) and an insertion mechanism 15 are provided.
  • illustration of the organic EL element 5 and the cover glass 6 included in the organic EL panel 8 with a support is omitted.
  • the mounting table 13 is configured by a surface plate, for example, and enables the organic EL panel 8 with a support including the stacked body 3 to be supported by the flat mounting surface 16.
  • the laminate 3 is arranged so that the mounting surface 16 and the surface of the glass film 2 are in contact with each other, that is, as shown in FIG. 8, the support 1 is on the upper side and the glass film 2 is on the lower side. Is placed on the placement surface 16 so that the organic EL panel 8 with a support including the stacked body 3 can be supported. Therefore, although not shown, when the organic EL element 5 and the cover glass 6 are attached on the glass film 2 as in this embodiment, the mounting surface 16 is replaced with the organic EL element 5 and the cover glass 6.
  • the mounting surface 16 may have a shape capable of supporting only the peripheral portion of one or both of the glass film 2 (cover glass 6 in the present embodiment) and the support 1.
  • an adsorption hole is provided in the mounting surface 16 of the mounting table 13 and the glass film 2 (including the organic EL panel 7) is adsorbed to the mounting surface 16 for a peeling progress step S32 by the peeling progress device 12 described later. It is also possible to configure.
  • the concave deformation imparting portion 14 is a first fulcrum P1 that supports the support body 1 on the mounting surface 16 and the corner portion 4 of the support body 1 protruding from the mounting surface 16 of the stacked body 3.
  • the first fulcrum forming member 17 is provided with an external force applying member 18 that applies an external force to the protruding region 3a of the laminate 3.
  • the mounting surface 16 has a shape in accordance with the laminated body 3 (organic EL panel 8 with a support) to be supported as a whole, that is, a rectangular shape and a shape in which one corner is omitted. Eggplant.
  • the organic EL panel 8 with a support is placed on the placement surface 16
  • all the areas except for one corner portion 4 of the organic EL panel 8 with a support are supported by the placement surface 16.
  • a part of the region including the corner portion 4 protrudes (see the lower left in FIG. 7).
  • the end portion 16a of the mounting surface 16 on the side where the corner portion 4 protrudes is provided with the second fulcrum P2 that supports the organic EL panel 8 with the support at a position away from the first fulcrum P1. It becomes the second fulcrum forming member.
  • the first fulcrum forming member 17 can support the corner portion 4 of the laminated body 3 constituting the organic EL panel 8 with a support.
  • an insertion member (wedge-shaped member 19) described later is the first.
  • the fulcrum forming member 17 is used.
  • the laminated body 3 is comprised in the state which the support body 1 protruded from the glass film 2 (refer FIG. 5)
  • the 1st fulcrum formation member 17 protrudes from the glass film 2 in the corner part 4.
  • FIG. The surface 1a of the support 1 on the glass film 2 side can be supported.
  • the first fulcrum forming member 17 is provided with a first fulcrum P1 that supports the support 1 at the corner portion 4 of the support 1.
  • the external force imparting member 18 is arranged between the first fulcrum P1 formed by the first fulcrum forming member 17 and the second fulcrum P2 formed by the end 16a of the mounting surface 16 as the second fulcrum forming member.
  • the external force applying member 18 includes an adsorbing member 20 that can adsorb to the surface 2b of the glass film 2 opposite to the support 1 (actually, the surface of the cover glass 6 not shown), and an adsorbing member. 20 is composed of an elevating member 21 capable of moving up and down along the normal direction of the mounting surface 16, that is, along the thickness direction a of the stacked body 3 mounted on the mounting surface 16.
  • the insertion mechanism 15 includes a wedge-shaped member 19 serving as an insertion member, and a stacked body in which the wedge-shaped member 19 is placed on the placement surface 16 in a direction parallel to the placement surface 16 of the placement table 13. And a slide member 22 that is slidable in a direction along the three planes.
  • the wedge-shaped member 19 slides in a direction (in other words, a direction along the diagonal line of the glass film 2) passing through the top of the corner portion 4 of the support 1 and the virtual center line of the external force applying member 18. (See FIG. 7).
  • an angle (hereinafter also referred to as a wedge angle) ⁇ formed by the cutting edge direction c of the wedge-shaped member 19 and the insertion direction b of the wedge-shaped member 19 by the slide member 22 is 20 ° or more and 45 ° or less.
  • the posture of the wedge-shaped member 19 and the sliding direction of the slide member 22 are set so as to be preferably 20 ° or more and 30 ° or less.
  • a wedge-shaped member 19 is disposed at a position where the blade edge 19 a abuts between the support 1 and the glass film 2 at the top of the corner portion 4, whereby the blade edge 19 a and the support 1 of the wedge-shaped member 19 are arranged.
  • the first fulcrum P1 and a large number of contact points between the end portion 16a of the mounting surface 16 and the glass film 2 (the cover glass 6 not shown in the present embodiment) (that is, contact lines in the present embodiment).
  • the organic EL panel 8 with a support including the laminate 3 is in a supported state (fulcrum forming step S311).
  • the organic EL panel 8 with a support body is supported flat as a whole except the influence on the deformation
  • the shortest distance (FIG. 7) to the fulcrum P2) is set to, for example, 30 mm or more and 200 mm or less, preferably 30 mm or more and 150 mm or less, more preferably 50 mm or more and 100 mm or less.
  • the linear distance from one fulcrum P1) to the second fulcrum P2 (FIG. 7) located at the center in the longitudinal direction of the end 16a among the plurality of second fulcrums P2 provided on the end 16a of the mounting surface 16 is The shortest distance is set to 30 mm or more and 200 mm or less.
  • the adsorption member 20 is raised along the direction of the arrow a by the elevating member 21. Then, the adsorption member 20 is brought into contact with the surface 2b of the glass film 2 located on the lower side of the laminate 3 (the surface of the cover glass 6 not shown in the present embodiment) (FIG. 9). From this state, the adsorbing member 20 is adsorbed to the surface 2b of the glass film 2 by suction or the like. At the stage where the glass film 2 is adsorbed, the organic EL panel 8 with a support including the laminate 3 is still supported in a flat state.
  • the adsorbing member 20 is lowered along the direction of the arrow a by the elevating member 21, and the organic EL panel 8 with the support from the mounting surface 16.
  • a downward pulling force F is applied to the protruding area.
  • the point of action of the tensile force F is provided between the first fulcrum P1 formed by the first fulcrum forming member 17 (the wedge-shaped member 19 in this embodiment) and the second fulcrum P2 formed by the end 16a of the mounting surface 16. .
  • the protruding region 3a which becomes a part of the laminated body 3 is deformed into a concave shape so that the concave portion 3c is formed on the support 1 side (concave deformation step S312).
  • a concave portion 3c that has a circular shape when viewed in plan from the support 1 side.
  • the protrusion area 3a is deformed into a concave shape so that the
  • the maximum depth d of the concave portion 3c generated on the support 1 side is set to 1 mm or more and 5 mm or less, preferably 2 mm or more. And 4 mm or less.
  • the maximum concave deformation amount of the protrusion region 3a (the deformation amount in the thickness direction a at the position of the surface 1b of the support 1 that is most deformed from the state before the concave deformation to the glass film 2 side) is For example, it is adjusted by the support position by the mounting surface 16 and the first fulcrum forming member 17, the shape and area of the protrusion region 3a, and the descending amount H1 along the direction of the arrow a from the suction position of the suction member 20. Is done.
  • the maximum depth dimension d is substantially equal to the descending amount H1 of the external force applying member 18 (adsorption member 20). That is, the descending amount H1 of the adsorption member 20 is set to 1 mm or more and 5 mm or less, preferably 2 mm or more and 4 mm or less.
  • reaction force (restoring force f1, f2) is generated in the support 1 and the glass film 2 in a direction to return to the state before being deformed into a concave shape (the state indicated by the two-dot chain line in FIG. 12). . Therefore, when the glass film 2 side is adsorbed by the adsorbing member 20, the restoring force f2 generated in the glass film 2 is offset by the downward pulling force F by the adsorbing member 20, and substantially the support.
  • the restoring force f1 described above acts only on the 1 side. Therefore, this also increases the separation region of the glass film 2 from the support 1, and for example, as shown in FIG.
  • a peeling progress device 12 having a plurality of suction pads 23 and a drive unit 24 that can drive each suction pad 23 independently in the vertical direction a is used. Then, the peeling of the glass film 2 is advanced. Specifically, as shown in FIG. 7, each suction pad 23 is moved downward by the drive unit 24 from the state in which the plurality of suction pads 23 are arranged on the upper side of the support 1, and is supported by each suction pad 23. The upper surface 1b of the body 1 is adsorbed (FIG. 14). After that, as shown in FIG.
  • the suction pad 23 is lifted in order from the peeling starting point 9 side, whereby the peeling of the glass film 2 from the support 1 proceeds along the diagonal line.
  • the glass film 2 is peeled from the support body 1 over the whole surface, and the organic EL panel 8 with a support body is isolate
  • the support 1 that protrudes from the glass film 2 is used.
  • a first fulcrum P1 is provided at the corner portion 4
  • a second fulcrum P2 is provided at a position away from the first fulcrum P1
  • a point of action of external force (tensile force F) is provided between both fulcrums P1 and P2.
  • the protrusion region 3a is deformed into a concave shape. According to this, the protrusion area
  • the shear force generated due to the difference in curvature between the support 1 and the glass film 2 can be increased, and a part of the glass film 2 is easily peeled from the support 1 in the subsequent insertion step S313. It becomes possible to make it. Further, by deforming a part of the laminated body 3 into a concave shape so that the concave portion 3c is formed on the support 1 side, it is easier to form a thicker wall than the glass film 2 when the laminated body 3 is deformed into a concave shape (thickness dimension). A large bending stress (compressive stress) acts on the support 1 side.
  • the organic EL panel 8 with a support body is the organic EL panel 7 containing the glass film 2, and The support 1 can be safely separated.
  • the wedge-shaped member 19 is provided with the first fulcrum P1
  • the wedge-shaped member 19 is the first fulcrum of the protrusion region 3a at the start of the concave deformation of the protrusion region 3a (FIG. 10).
  • the wedge-shaped member 19 While functioning as the forming member 17, the wedge-shaped member 19 is already in contact with the glass film 2 and the support 1 in a state of being deformed into a concave shape (FIG. 10). Therefore, the wedge-shaped member 19 can be inserted between the glass film 2 and the support 1 simply by moving (sliding) the wedge-shaped member 19 in the insertion direction b as it is, and the peeling starting portion 9 is produced easily and reliably. It becomes possible to do.
  • the wedge-shaped member 19 itself functions as the first fulcrum forming member 17, the support position of the protrusion region 3 a by the wedge-shaped member 19, that is, the first fulcrum P 1 is also peeled off with the insertion operation of the wedge-shaped member 19. In the traveling direction, that is, the center side in the direction along the plane of the laminate 3. Therefore, it is possible to smoothly perform the manufacturing operation of the separation starting point portion 9 while maintaining the insertion state of the wedge-shaped member 19 in a constant state.
  • the protrusion area 3a of the laminate 3 is adsorbed by the adsorption member 20 from the glass film 2 side, the protrusion area 3a is pulled downward to be deformed into a concave shape, thereby It is possible to avoid a situation in which the external force imparting member 18 remains in the concave portion 3c generated on the side. Therefore, after the insertion of the wedge-shaped member 19 is started, the situation in which the wedge-shaped member 19 and the external force applying member 18 interfere with each other while the glass film 2 is kept in a concave shape is avoided. Can be moved smoothly and reliably, that is, until the separation starting point 9 is formed, the wedge-shaped member 19 can be smoothly inserted.
  • region 3a is deform
  • Restoring forces f1 and f2 in the direction of returning to the state act. Therefore, when the glass film 2 side is adsorbed by the adsorbing member 20, the restoring force f2 generated in the glass film 2 is offset by the downward pulling force F by the adsorbing member 20, and substantially the support.
  • the restoring force f1 described above acts only on the 1 side. Therefore, the insertion operation of the wedge-shaped member 19 can be performed more smoothly, and the peeling starting point portion 9 can be manufactured safely and easily.
  • FIG. 17 shows a cross-sectional view of the main part of the peeling starting point manufacturing device 25 according to the second embodiment of the present invention (cross-sectional view of the same portion as the cross-sectional view of the main part AA of the peeling device 10 shown in FIG. 7).
  • This peeling starting point preparation device 25 is configured by arranging the adsorbing member 20 and the elevating member 21 above the laminated body 3, that is, on the support 1 side. Since other configurations are the same as those of the first embodiment, detailed description thereof is omitted.
  • peeling start point preparing step S31 An example of the manufacturing operation (peeling start point preparing step S31) of the peeling start point 9 using the peeling start point preparing device 25 having the above-described configuration is as shown in FIGS.
  • the organic EL panel 8 with the support is placed on the placement surface 16 of the placement table 13, and the placement surface of the laminate 3 that forms a part of the organic EL panel 8 with the support.
  • a wedge-shaped member 19 is disposed at a position that supports the corner portion 4 protruding from 16.
  • the organic EL panel with support 8 including the laminate 3 is supported by the placement surface 16 and the wedge-shaped member 19.
  • the wedge-shaped member 19 is disposed at a position where the blade edge 19 a abuts between the support 1 and the glass film 2 at the top of the corner portion 4, whereby the blade edge 19 a of the wedge-shaped member 19 and the corner portion 4 are arranged.
  • the contact point between the end 16a of the mounting surface 16 and the corner part 4 are the first fulcrum P1 and the second fulcrum P2, respectively, and the organic EL panel 8 with the support is in a supported state. Yes. Moreover, in the state which supported the organic electroluminescent panel 8 with a support body as mentioned above, the organic electroluminescent panel 8 with a support body is supported flat as a whole except the influence of the deformation
  • the adsorbing member 20 is lowered from the position shown in FIG. 16 along the direction of the arrow a by the elevating member 21, and the adsorbing member 20 is positioned above the laminated body 3 as shown in FIG. It is made to contact
  • the movement of the wedge-shaped member 19 in the direction of the arrow b is started by driving the slide member 22 from the state in which the protruding region 3a is deformed into the concave shape, and the cutting edge of the wedge-shaped member 19 is moved to the corner portion 4. It is made to contact
  • the insertion of the wedge-shaped member 19 between the support 1 and the glass film 2 is started, and the peeling region from the end 2a1 of the glass film 2 is expanded to some extent.
  • the peeling starting point 9 as shown in FIG. 13 is manufactured (peeling starting point manufacturing step S31).
  • the side of the support body 1 or the glass film 2 side is gripped by a suction pad or the like not shown, and one is pulled in a direction away from the other.
  • the glass film 2 is peeled from the entire surface of the support 1 by spraying a fluid such as water toward the peeling starting point 9.
  • the organic EL panel 8 with a support body is isolate
  • the protrusion region 3a can be stably deformed into a concave shape without imposing an excessive load on the glass film 2 or the support 1. Accordingly, the protrusion region 3a can be deformed with a larger curvature than in the prior art, and it is relatively easy between the support 1 and the glass film 2 with the shearing force due to the difference in curvature as described above. It is possible to produce the peeling start point 9.
  • a pressing member having an arbitrary shape and configuration may be used as long as the support 1 and the glass film 2 are not damaged such as a rod-shaped member having a spherical tip.
  • the support position of the organic EL panel 8 with a support at the corner 4 (the contact between the blade edge 19a of the wedge-shaped member 19 and the support 1) is used.
  • the action point of the tensile force F or the pressing force G is provided at an intermediate position between the contact position
  • the end portion 16a of the mounting surface 16 is illustrated, of course, the action point may be provided at other positions. .
  • the point of action of the pressing force G may be provided closer to the corner portion 4 than the end portion 16a.
  • the protrusion area 3a may be deformed into a concave shape.
  • illustration is omitted, by pressing the corner portion of the support body 1 slightly downward from the direction of the arrow b in the protrusion area 3a, the recess portion 3c is formed on the support body 1 side.
  • the protruding area 3a may be deformed into a concave shape.
  • FIG. 21 shows a plan view of the separation starting portion manufacturing apparatus 26 according to one example (third embodiment).
  • This peeling start part preparation apparatus 26 is an extended support part that extends along the edge of the laminate 3 (organic EL panel 8 with support) to be supported from both ends of the end part 16a of the mounting surface 16 shown in FIG. 27 is provided integrally with the mounting surface 16.
  • the organic EL panel 8 with the support is supported by the mounting surface 16, the wedge-shaped member 19 as the first fulcrum forming member 17, and the extended support portion 27, and the mounting surface 16 and the wedge-shaped member are supported.
  • the protrusion area 3a between the member 19 and the extended support portion 27 can be deformed into a concave shape. Therefore, it becomes possible to more stably carry out the above-described series of peeling start point 9 manufacturing operations.
  • first fulcrum forming member 17 in the above-described embodiment, the case where the first fulcrum forming member 17 is disposed as the wedge-shaped member 19 on the corner portion 4 of the support body 1 is illustrated, but of course other configurations are adopted. It is also possible. For example, although illustration is omitted, the first fulcrum forming member 17 is provided separately from the wedge-shaped member 19 within a range in which the first fulcrum forming member 17 does not hinder the pushing operation of the wedge-shaped member 19, and other than the top of the corner portion 4. It is also possible to take a form in which the region is supported and the wedge-shaped member 19 is brought into contact with the top of the corner portion 4.
  • the formation mode of the second fulcrum P2 in the above-described embodiment, the case where the plurality of second fulcrum points P2 are continuously provided at the end portion 16a of the placement surface 16 is illustrated, but of course, other modes are adopted. It is also possible.
  • the organic EL panel 8 with a support is supported by a support member (such as a roller) other than the mounting surface, and the corner portion 4 of the support 1 is supported by the first fulcrum forming member 17, It is also possible to provide a second fulcrum forming member separately from the supporting member other than the placement surface at a position away from the one fulcrum P1.
  • the second fulcrum P2 at an arbitrary position of the organic EL panel 8 with a support with an arbitrary member.
  • the number of the second fulcrum P2 is also arbitrary, and it is possible to provide one or a plurality of second fulcrum P2.
  • the wedge-shaped member 19 was slid in the direction along the plane direction of the laminated body 3 of the flat state by the slide member 22, of course, other than this was illustrated. It is also possible to take an insertion mode. For example, a configuration may be adopted in which the moving direction of the wedge-shaped member 19 is changed according to the deformation mode of the protrusion area 3a after the peeling start point portion 9 is formed (the deformation mode when the peeling progresses).
  • the peeling apparatus 10 is limited to this example. I can't.
  • the separation starting part producing device 11 and the peeling advancing device 12 are manufactured completely separately, and the organic EL panel 8 with the support once produced the separation starting point part 9 is placed on the adsorption surface of the peeling advancing device 12, You may make it implement peeling progress process S32.
  • the plate-like glass was employ
  • glass glass was carried out by means other than this.
  • the present invention can be applied to a laminate 3 in which 2 and the support 1 are fixed.
  • the support 1 is composed of a layer made of a non-glass material such as an acrylic adhesive layer, a silicone thin film layer, an inorganic thin film layer (ITO, oxide, metal, carbon) and a sheet glass, and the non-glass material layer and the glass film
  • the present invention can also be applied to a laminate (not shown) in which 2 are closely attached.
  • FIG. 22 shows a cross-sectional view of a liquid crystal panel 28 with a support according to one example.
  • the panel 28 is formed by fixing a pair of supports 1 and 1 on both sides of a liquid crystal panel 29 as a final product.
  • the panel 28 is formed as follows. That is, first, a pair of laminates 3 and 3 formed by laminating the support 1 and the glass film 2 are formed (laminate formation step S1).
  • a spacer 30 is formed on the surface 2b of the glass film 2 of one laminated body 3 to form a space for enclosing a liquid crystal (not shown), and the glass of the other laminated body 3 is formed on the spacer 30.
  • the film 2 is fixed (attachment step S2).
  • the support 1 is peeled one by one by the above-described peeling method (peeling step S3), and one liquid crystal panel 28 with the support is supported by two sheets.
  • the bodies 1 and 1 are separated into one liquid crystal panel 29. Therefore, even when the liquid crystal panel 29 is manufactured, the present invention is applied so that the liquid crystal panel 28 with the support can be safely and easily attached to the support 1 and the liquid crystal panel 29 without damaging the glass film 2. It is possible to separate them.
  • the support 1 can be safely and easily damaged without damaging the glass film 2. It becomes possible to peel the glass film 2 from.

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PCT/JP2016/069853 2015-07-24 2016-07-05 ガラスフィルムの製造方法、及びガラスフィルムを含む電子デバイスの製造方法 WO2017018136A1 (ja)

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