WO2015111291A1 - 導電性皮膜形成浴 - Google Patents
導電性皮膜形成浴 Download PDFInfo
- Publication number
- WO2015111291A1 WO2015111291A1 PCT/JP2014/080527 JP2014080527W WO2015111291A1 WO 2015111291 A1 WO2015111291 A1 WO 2015111291A1 JP 2014080527 W JP2014080527 W JP 2014080527W WO 2015111291 A1 WO2015111291 A1 WO 2015111291A1
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- WIPO (PCT)
- Prior art keywords
- conductive film
- bath
- water
- plating
- forming bath
- Prior art date
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- 229920003023 plastic Polymers 0.000 claims abstract description 39
- 239000004033 plastic Substances 0.000 claims abstract description 39
- 229920003169 water-soluble polymer Polymers 0.000 claims abstract description 39
- 239000007864 aqueous solution Substances 0.000 claims abstract description 37
- 239000000463 material Substances 0.000 claims abstract description 32
- 238000009713 electroplating Methods 0.000 claims abstract description 27
- 239000008139 complexing agent Substances 0.000 claims abstract description 15
- 239000005749 Copper compound Substances 0.000 claims abstract description 11
- 150000001880 copper compounds Chemical class 0.000 claims abstract description 11
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims abstract description 10
- 239000010408 film Substances 0.000 claims description 184
- 238000000034 method Methods 0.000 claims description 46
- 150000001875 compounds Chemical class 0.000 claims description 27
- 239000003638 chemical reducing agent Substances 0.000 claims description 25
- 150000005846 sugar alcohols Polymers 0.000 claims description 23
- 125000001931 aliphatic group Chemical group 0.000 claims description 22
- 230000001603 reducing effect Effects 0.000 claims description 20
- 125000004432 carbon atom Chemical group C* 0.000 claims description 19
- 229920000642 polymer Polymers 0.000 claims description 18
- 150000001720 carbohydrates Chemical class 0.000 claims description 12
- 125000002947 alkylene group Chemical group 0.000 claims description 10
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 125000005702 oxyalkylene group Chemical group 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 230000003197 catalytic effect Effects 0.000 claims description 4
- 239000012789 electroconductive film Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 description 86
- -1 alkali metal salts Chemical class 0.000 description 47
- 239000000243 solution Substances 0.000 description 32
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 30
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 30
- 229910052802 copper Inorganic materials 0.000 description 30
- 239000010949 copper Substances 0.000 description 30
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 26
- 239000003054 catalyst Substances 0.000 description 24
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 20
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 16
- 239000001301 oxygen Substances 0.000 description 16
- 229910052760 oxygen Inorganic materials 0.000 description 16
- 229910052759 nickel Inorganic materials 0.000 description 13
- 229920005989 resin Polymers 0.000 description 13
- 239000011347 resin Substances 0.000 description 13
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 12
- 229910052804 chromium Inorganic materials 0.000 description 12
- 239000011651 chromium Substances 0.000 description 12
- 229910000365 copper sulfate Inorganic materials 0.000 description 12
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 12
- 238000005530 etching Methods 0.000 description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 12
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 11
- 150000003839 salts Chemical class 0.000 description 11
- 235000011121 sodium hydroxide Nutrition 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 9
- 230000002378 acidificating effect Effects 0.000 description 9
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 9
- 229910052763 palladium Inorganic materials 0.000 description 9
- 239000004417 polycarbonate Substances 0.000 description 9
- 229920000515 polycarbonate Polymers 0.000 description 9
- 229920002503 polyoxyethylene-polyoxypropylene Polymers 0.000 description 9
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 238000002156 mixing Methods 0.000 description 8
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 8
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 6
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 6
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 6
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 5
- 239000005751 Copper oxide Substances 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 5
- 239000000084 colloidal system Substances 0.000 description 5
- 229910000431 copper oxide Inorganic materials 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229920006351 engineering plastic Polymers 0.000 description 5
- 238000007654 immersion Methods 0.000 description 5
- 239000007800 oxidant agent Substances 0.000 description 5
- ARXKVVRQIIOZGF-UHFFFAOYSA-N 1,2,4-butanetriol Chemical compound OCCC(O)CO ARXKVVRQIIOZGF-UHFFFAOYSA-N 0.000 description 4
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 4
- 229910052783 alkali metal Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 125000003277 amino group Chemical group 0.000 description 4
- 150000003863 ammonium salts Chemical class 0.000 description 4
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 4
- 150000001735 carboxylic acids Chemical class 0.000 description 4
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 4
- JZCCFEFSEZPSOG-UHFFFAOYSA-L copper(II) sulfate pentahydrate Chemical compound O.O.O.O.O.[Cu+2].[O-]S([O-])(=O)=O JZCCFEFSEZPSOG-UHFFFAOYSA-L 0.000 description 4
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 4
- 235000011187 glycerol Nutrition 0.000 description 4
- 229960005150 glycerol Drugs 0.000 description 4
- HHLFWLYXYJOTON-UHFFFAOYSA-N glyoxylic acid Chemical compound OC(=O)C=O HHLFWLYXYJOTON-UHFFFAOYSA-N 0.000 description 4
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 4
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 4
- 229920005862 polyol Polymers 0.000 description 4
- 230000008961 swelling Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 238000004065 wastewater treatment Methods 0.000 description 4
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 3
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 3
- YIROYDNZEPTFOL-UHFFFAOYSA-N 5,5-Dimethylhydantoin Chemical compound CC1(C)NC(=O)NC1=O YIROYDNZEPTFOL-UHFFFAOYSA-N 0.000 description 3
- FBPFZTCFMRRESA-KVTDHHQDSA-N D-Mannitol Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-KVTDHHQDSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- 229930195725 Mannitol Natural products 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 3
- 239000012190 activator Substances 0.000 description 3
- 125000000129 anionic group Chemical group 0.000 description 3
- 230000005587 bubbling Effects 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 3
- 239000013527 degreasing agent Substances 0.000 description 3
- 238000005237 degreasing agent Methods 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 229940093476 ethylene glycol Drugs 0.000 description 3
- 235000019253 formic acid Nutrition 0.000 description 3
- 150000001469 hydantoins Chemical class 0.000 description 3
- 239000000594 mannitol Substances 0.000 description 3
- 235000010355 mannitol Nutrition 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920001451 polypropylene glycol Polymers 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 3
- 235000011150 stannous chloride Nutrition 0.000 description 3
- 239000001119 stannous chloride Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 125000000542 sulfonic acid group Chemical group 0.000 description 3
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 2
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- 239000003109 Disodium ethylene diamine tetraacetate Substances 0.000 description 2
- ZGTMUACCHSMWAC-UHFFFAOYSA-L EDTA disodium salt (anhydrous) Chemical compound [Na+].[Na+].OC(=O)CN(CC([O-])=O)CCN(CC(O)=O)CC([O-])=O ZGTMUACCHSMWAC-UHFFFAOYSA-L 0.000 description 2
- 239000004386 Erythritol Substances 0.000 description 2
- UNXHWFMMPAWVPI-UHFFFAOYSA-N Erythritol Natural products OCC(O)C(O)CO UNXHWFMMPAWVPI-UHFFFAOYSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- 241001147149 Lucina Species 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- RHYBFKMFHLPQPH-UHFFFAOYSA-N N-methylhydantoin Chemical compound CN1CC(=O)NC1=O RHYBFKMFHLPQPH-UHFFFAOYSA-N 0.000 description 2
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004697 Polyetherimide Substances 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- TVXBFESIOXBWNM-UHFFFAOYSA-N Xylitol Natural products OCCC(O)C(O)C(O)CCO TVXBFESIOXBWNM-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- POJWUDADGALRAB-UHFFFAOYSA-N allantoin Chemical compound NC(=O)NC1NC(=O)NC1=O POJWUDADGALRAB-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- 125000002843 carboxylic acid group Chemical group 0.000 description 2
- 125000002091 cationic group Chemical group 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000536 complexating effect Effects 0.000 description 2
- 229910001431 copper ion Inorganic materials 0.000 description 2
- XDSGMUJLZDSCPA-UHFFFAOYSA-N diazanium;phenoxybenzene;sulfate Chemical class [NH4+].[NH4+].[O-]S([O-])(=O)=O.C=1C=CC=CC=1OC1=CC=CC=C1 XDSGMUJLZDSCPA-UHFFFAOYSA-N 0.000 description 2
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical class C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 2
- 235000019301 disodium ethylene diamine tetraacetate Nutrition 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- UNXHWFMMPAWVPI-ZXZARUISSA-N erythritol Chemical compound OC[C@H](O)[C@H](O)CO UNXHWFMMPAWVPI-ZXZARUISSA-N 0.000 description 2
- 235000019414 erythritol Nutrition 0.000 description 2
- 229940009714 erythritol Drugs 0.000 description 2
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- 235000019256 formaldehyde Nutrition 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- ROBFUDYVXSDBQM-UHFFFAOYSA-N hydroxymalonic acid Chemical compound OC(=O)C(O)C(O)=O ROBFUDYVXSDBQM-UHFFFAOYSA-N 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- HEBKCHPVOIAQTA-UHFFFAOYSA-N meso ribitol Natural products OCC(O)C(O)C(O)CO HEBKCHPVOIAQTA-UHFFFAOYSA-N 0.000 description 2
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 2
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 2
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 2
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920001601 polyetherimide Polymers 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 229920001955 polyphenylene ether Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 235000013772 propylene glycol Nutrition 0.000 description 2
- 229960004063 propylene glycol Drugs 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 125000001424 substituent group Chemical group 0.000 description 2
- 239000000811 xylitol Substances 0.000 description 2
- 235000010447 xylitol Nutrition 0.000 description 2
- HEBKCHPVOIAQTA-SCDXWVJYSA-N xylitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)CO HEBKCHPVOIAQTA-SCDXWVJYSA-N 0.000 description 2
- 229960002675 xylitol Drugs 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- 229940083957 1,2-butanediol Drugs 0.000 description 1
- RFTORHYUCZJHDO-UHFFFAOYSA-N 1,3-dimethylimidazolidine-2,4-dione Chemical compound CN1CC(=O)N(C)C1=O RFTORHYUCZJHDO-UHFFFAOYSA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- LTSWUFKUZPPYEG-UHFFFAOYSA-N 1-decoxydecane Chemical compound CCCCCCCCCCOCCCCCCCCCC LTSWUFKUZPPYEG-UHFFFAOYSA-N 0.000 description 1
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 description 1
- BDVBJEGCEAWTAM-UHFFFAOYSA-N 2-(2-hydroxyethoxy)ethanol;propane-1,3-diol Chemical compound OCCCO.OCCOCCO BDVBJEGCEAWTAM-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- POJWUDADGALRAB-PVQJCKRUSA-N Allantoin Natural products NC(=O)N[C@@H]1NC(=O)NC1=O POJWUDADGALRAB-PVQJCKRUSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- JJLJMEJHUUYSSY-UHFFFAOYSA-L Copper hydroxide Chemical compound [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 description 1
- 239000005750 Copper hydroxide Substances 0.000 description 1
- 239000009261 D 400 Substances 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- PHOQVHQSTUBQQK-SQOUGZDYSA-N D-glucono-1,5-lactone Chemical compound OC[C@H]1OC(=O)[C@H](O)[C@@H](O)[C@@H]1O PHOQVHQSTUBQQK-SQOUGZDYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 239000004420 Iupilon Substances 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 239000012448 Lithium borohydride Substances 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- ALQSHHUCVQOPAS-UHFFFAOYSA-N Pentane-1,5-diol Chemical compound OCCCCCO ALQSHHUCVQOPAS-UHFFFAOYSA-N 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- DWAQJAXMDSEUJJ-UHFFFAOYSA-M Sodium bisulfite Chemical compound [Na+].OS([O-])=O DWAQJAXMDSEUJJ-UHFFFAOYSA-M 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 229930006000 Sucrose Natural products 0.000 description 1
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 229960000458 allantoin Drugs 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O ammonium group Chemical group [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 235000010323 ascorbic acid Nutrition 0.000 description 1
- 229960005070 ascorbic acid Drugs 0.000 description 1
- 239000011668 ascorbic acid Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- BMRWNKZVCUKKSR-UHFFFAOYSA-N butane-1,2-diol Chemical compound CCC(O)CO BMRWNKZVCUKKSR-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229940116318 copper carbonate Drugs 0.000 description 1
- 229910001956 copper hydroxide Inorganic materials 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- GEZOTWYUIKXWOA-UHFFFAOYSA-L copper;carbonate Chemical compound [Cu+2].[O-]C([O-])=O GEZOTWYUIKXWOA-UHFFFAOYSA-L 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 150000008266 deoxy sugars Chemical class 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- HCWFRUHIOMLJCH-UHFFFAOYSA-L dichlorotin;hydrochloride Chemical compound Cl.Cl[Sn]Cl HCWFRUHIOMLJCH-UHFFFAOYSA-L 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 150000002016 disaccharides Chemical class 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000007323 disproportionation reaction Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 235000012209 glucono delta-lactone Nutrition 0.000 description 1
- 229960003681 gluconolactone Drugs 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 150000004676 glycans Chemical class 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 150000002337 glycosamines Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- WJRBRSLFGCUECM-UHFFFAOYSA-N hydantoin Chemical compound O=C1CNC(=O)N1 WJRBRSLFGCUECM-UHFFFAOYSA-N 0.000 description 1
- 229940091173 hydantoin Drugs 0.000 description 1
- 150000004677 hydrates Chemical class 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 150000002772 monosaccharides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000006864 oxidative decomposition reaction Methods 0.000 description 1
- 125000001820 oxy group Chemical group [*:1]O[*:2] 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 150000002941 palladium compounds Chemical class 0.000 description 1
- 229920002866 paraformaldehyde Polymers 0.000 description 1
- UWJJYHHHVWZFEP-UHFFFAOYSA-N pentane-1,1-diol Chemical compound CCCCC(O)O UWJJYHHHVWZFEP-UHFFFAOYSA-N 0.000 description 1
- WCVRQHFDJLLWFE-UHFFFAOYSA-N pentane-1,2-diol Chemical compound CCCC(O)CO WCVRQHFDJLLWFE-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- ABLZXFCXXLZCGV-UHFFFAOYSA-N phosphonic acid group Chemical group P(O)(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 1
- 125000005496 phosphonium group Chemical group 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920001282 polysaccharide Polymers 0.000 description 1
- 239000005017 polysaccharide Substances 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229940074439 potassium sodium tartrate Drugs 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 229910000033 sodium borohydride Inorganic materials 0.000 description 1
- 239000012279 sodium borohydride Substances 0.000 description 1
- 235000002639 sodium chloride Nutrition 0.000 description 1
- 235000010267 sodium hydrogen sulphite Nutrition 0.000 description 1
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000005720 sucrose Substances 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 150000003606 tin compounds Chemical class 0.000 description 1
- 229910001432 tin ion Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1635—Composition of the substrate
- C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
- C23C18/1641—Organic substrates, e.g. resin, plastic
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1653—Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/2086—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/54—Electroplating of non-metallic surfaces
- C25D5/56—Electroplating of non-metallic surfaces of plastics
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/285—Sensitising or activating with tin based compound or composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/04—Electroplating: Baths therefor from solutions of chromium
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/12—Electroplating: Baths therefor from solutions of nickel or cobalt
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
- C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
- C25D5/14—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium two or more layers being of nickel or chromium, e.g. duplex or triplex layers
Definitions
- the present invention relates to a conductive film forming bath, a method for forming a conductive film, and a method for electroplating a non-conductive plastic material.
- a method of forming a decorative electroplated film on a non-conductive plastic molded article after degreasing and etching, neutralization and pre-dip are performed as necessary, and then a palladium compound and a tin compound are contained.
- a method of performing electroconductive film formation (electroless copper plating) and electroplating sequentially after applying a catalyst for electroless copper plating using a colloidal solution, performing activation treatment (accelerator treatment) if necessary Is widely practiced.
- an alkaline aqueous solution has been conventionally used as an electroless copper plating bath used for forming a conductive film.
- an alkaline electroless copper plating bath is used to form a conductive film, hydrolysis of the non-conductive plastic to be treated is easily promoted, and an electroplated film is formed on the formed conductive film.
- the present invention has been made in view of the above-described current state of the prior art, and its main purpose is to form a conductive film made of an alkaline aqueous solution that can be used when an electroplated film is formed on a non-conductive plastic material. It is a forming bath, and it is to provide a novel conductive film forming bath capable of forming an electroplated film having a good appearance without deteriorating adhesion to a nonconductive plastic material.
- an aqueous solution obtained by adding a water-soluble polymer having a polyoxyalkylene structure to an alkaline aqueous solution containing a copper compound and a complexing agent is used as a conductive film forming bath, and an electroplated film is formed on the conductive film formed from this bath. It has been found that an electroplated film having a good appearance can be formed without causing a decrease in adhesion to a non-conductive plastic material, and the present invention has been completed here.
- the present invention has been completed as a result of further research based on such knowledge.
- the present invention provides the following conductive film forming bath, a method for forming a conductive film, and a method for electroplating a non-conductive plastic material.
- a conductive film forming bath comprising an aqueous solution containing a copper compound, a complexing agent, an alkali metal hydroxide, and a water-soluble polymer having a polyoxyalkylene structure.
- the conductive film forming bath according to Item 2 wherein the reducing agent is at least one component selected from the group consisting of a carboxyl group-containing reducing compound and a saccharide having a reducing property of 6 or more carbon atoms.
- Item 4. Item 4.
- the water-soluble polymer having a polyoxyalkylene structure is a repeating unit having an oxyalkylene group represented by the general formula (1): — (O—Ak) — (wherein Ak represents an alkylene group) as a structural unit.
- Item 6. Item 6. The conductive film forming bath according to any one of Items 1 to 5, wherein the water-soluble polymer having a polyoxyalkylene structure is a polymer having a number average molecular weight of 300 or more.
- Item 7. Item 7. A conductive film is formed on a non-conductive plastic material, wherein the conductive film forming bath according to any one of Items 1 to 6 is contacted with a non-conductive plastic material to which a catalytic substance is added. Method.
- Item 8. A method for electroplating a non-conductive plastic material, comprising a step of electroplating after forming a conductive film using a conductive film forming bath by the method according to Item 7.
- the conductive film forming bath of the present invention comprises an aqueous solution containing a copper compound, a complexing agent, an alkali metal hydroxide, and a water-soluble polymer having a polyoxyalkylene structure.
- the copper compound may be a water-soluble copper compound, and examples thereof include copper sulfate, copper chloride, copper carbonate, copper hydroxide, and hydrates thereof.
- a copper compound can be used individually by 1 type or in mixture of 2 or more types as appropriate.
- the content of the copper compound is preferably about 0.1 to 5 g / l, more preferably about 0.8 to 1.2 g / l as the amount of copper metal.
- a known complexing agent effective for copper ions can be used.
- examples of such a complexing agent include hydantoins and organic carboxylic acids.
- hydantoins include hydantoin, 1-methylhydantoin, 1,3-dimethylhydantoin, 5,5-dimethylhydantoin, and allantoin.
- organic carboxylic acids ethylenediaminetetraacetic acid, glycolic acid, lactic acid, hydroacrylic acid, oxybutyric acid, tartronic acid, malic acid, citric acid, tartaric acid, succinic acid, and salts thereof can be used.
- salts water-soluble salts such as alkali metal salts, alkaline earth metal salts, and ammonium salts can be used.
- potassium sodium tartrate (Rochelle salt) is particularly preferably used.
- Complexing agents can be used singly or in appropriate combination of two or more.
- the compounding amount of the complexing agent is preferably about 2 to 50 g / l, more preferably about 10 to 40 g / l.
- the amount of the complexing agent is too small, the complexing power is insufficient and the copper dissolving power is insufficient, which is not preferable.
- alkali metal hydroxide sodium hydroxide, potassium hydroxide, lithium hydroxide, and the like are suitable from the viewpoint of easy availability and cost.
- Alkali metal hydroxides can be used singly or in appropriate combination of two or more.
- the blending amount of the alkali metal hydroxide is preferably about 10 to 80 g / l, more preferably about 30 to 70 g / l.
- the blending amount of the alkali metal hydroxide is too small, the formation of the conductive film is insufficient, and the electroplating in the next step is not preferable because the deposition property of the plating in the low current density region is deteriorated.
- Water-soluble polymer having a polyoxyalkylene structure can be used without particular limitation as long as it is a polymer having a polyoxyalkylene structure portion as a main chain and a hydrophilic group. it can.
- the polyoxyalkylene structure is a repeating unit having an oxyalkylene group represented by the general formula (1): — (O—Ak) — (wherein Ak represents an alkylene group) as a structural unit. Means structure.
- the repeating number of the oxyalkylene structure represented by the said General formula (1) Although it may be the range used as the number average molecular weight mentioned later, Usually, it has 4 or more repeating numbers. It is preferable.
- the alkylene group represented by Ak is preferably an alkylene group having 1 to 20 carbon atoms, and more preferably an alkylene group having 2 to 4 carbon atoms.
- the alkylene group may be linear or branched.
- examples of the alkylene group include a methylene group, an ethylene group, a propylene group, and a butylene group.
- examples of the alkylene group include a methylene group, an ethylene group, a propylene group, and a butylene group.
- an ethylene group and a propylene group are preferable from the viewpoint of a good water-soluble polymer.
- the alkylene groups represented by Ak may be all the same in each structural unit, Alternatively, two or more different alkylene groups may be used.
- the polyoxyalkylene structure contains two or more types of oxyalkylene groups, there is no particular limitation on the bonding form of different types of oxyalkylene groups, and any of the block, random, and alternating bonding forms may be used. Also good.
- the repeating unit represented by the general formula (1): — (O—Ak) — is, for example, an oxy group represented by the general formula (3): — (O—CH (CH 3 ) CH 2 ) —.
- — (O—CH (CH 3 ) CH 2 ) — When it is a propylene group, it will have an optical isomer, but the stereoregularity may be any of isotactic, syndiotactic and atactic.
- the hydrophilic group contained in the water-soluble polymer having a polyoxyalkylene structure is not particularly limited as long as sufficient water-solubility can be imparted, and may be any anionic, cationic or nonionic hydrophilic group.
- hydrophilic groups include anionic groups such as carboxyl groups, sulfonic acid groups, sulfate ester groups, phosphonic acid groups, and phosphoric acid groups, and salts thereof; nonionic groups such as hydroxyl groups and amino groups; Cationic groups such as ammonium group and phosphonium group are exemplified.
- examples of the anionic group salt include alkali metal salts, alkaline earth metal salts, ammonium salts, and organic ammonium salts.
- the number of hydrophilic groups is not particularly limited as long as sufficient water solubility can be imparted to the water-soluble polymer having a polyoxyalkylene structure.
- the bonding position of the hydrophilic group is not particularly limited, and the bonding can be performed at any position such as a terminal or a side chain of the water-soluble polymer.
- the specific number of hydrophilic groups and bonding positions are particularly limited as long as the water-soluble polymer to which the hydrophilic groups are bonded can be dissolved in the conductive film-forming bath of the present invention within the concentration range described below. There is no.
- the water-soluble polymer having the polyoxyalkylene structure may have a substituent or other atoms in addition to the hydrophilic group.
- a substituent or atom is not particularly limited as long as it does not prevent the polymer from being water-soluble, and examples thereof include hydrogen, an alkyl group, an alkenyl group, an aryl group, and a halogen group.
- Polyalkylene glycol compounds polyoxyethylene octyl ether, polyoxyethylene decyl ether, polyoxyethylene lauryl ether, polyoxypropylene butyl ether, polyoxyethylene tridecyl ether, polyoxyethylene myristyl ether, polyoxyethylene polyoxypropylene octyl ether , Polyoxyethylene polyoxypropylene butyl ether, polyoxyethylene poly
- a polyoxyalkylene alkyl ether compound such as xoxypropylene decyl ether, polyoxyethylene polyoxypropylene lauryl ether, polyoxyethylene polyoxypropylene tridecyl ether, polyoxyethylene polyoxypropylene myristyl ether, polyoxyethylene styrenated phenyl ether;
- Jeffamine Compounds having one amino group such as M-600 and M-2070 (both are registered trademarks) and having a polyoxyalkylene structure
- Jeffamine D-400 average molecular weight 430
- polyethylene glycol particularly polyethylene glycol, polypropylene glycol, polyoxyethylene polyoxypropylene glycol, polyoxyethylene lauryl ether, polyoxypropylene butyl ether, polyoxyethylene polyoxypropylene butyl ether, polyoxyethylene polyoxypropylene monoamine, polyoxyethylene poly Oxypropylenediamine, polyoxyethylene oleyl cetyl ether ammonium sulfate, polyoxyethylene lauryl ether ammonium sulfate, polyoxyethylene styrenated phenyl ether ammonium sulfate, polyoxyethylene sulfosuccinate lauryl disodium, polyoxyethylene lauryl ether sodium acetate, polyoxyethylene alkyl ether Phosphate S Le, polyoxyethylene styrenated phenyl ether and the like are preferable.
- the water-soluble polymer having a polyoxyalkylene structure can be used singly or in appropriate combination of two or more.
- the water-soluble polymer having a polyoxyalkylene structure may have a number average molecular weight of 300 or more, preferably in the range of 500 to 50000, more preferably in the range of 600 to 20000, and particularly preferably in the range of 1000 to 20000.
- the number average molecular weight is too small, the effect of improving the adhesion of the plating film to the nonconductive material is not sufficiently exhibited, which is not preferable.
- the amount of the water-soluble polymer having a polyoxyalkylene structure is preferably about 0.00001 g to 100 g / l, more preferably about 0.001 to 50 g / l, and particularly preferably about 0.01 to 10 g / l. If the amount is too small, the effect of improving the adhesion of the plating film to the non-conductive material is not sufficiently exhibited, which is not preferable. On the other hand, if the blending amount of the water-soluble polymer having a polyoxyalkylene structure is too large, it is economically disadvantageous and not preferable from the viewpoint of wastewater treatment.
- the aqueous solution containing the copper compound, complexing agent, alkali metal hydroxide, and water-soluble polymer having a polyoxyalkylene structure is further reduced as necessary.
- An agent may be added.
- reducing agent it is possible to use reducing agents that can reduce copper ions, and conventionally used in various electroless plating solutions. Specific examples include formaldehyde, paraformaldehyde, dimethylamine borane, glyoxylic acid, borohydride salts, saccharides having a reducibility of 6 or more carbon atoms, carboxyl group-containing reducing compounds, and the like.
- a reducing agent can be used individually by 1 type or in mixture of 2 or more types as appropriate.
- examples of the borohydride salt include sodium borohydride, potassium borohydride, lithium borohydride and the like.
- Examples of the carboxyl group-containing reducing compound include reducing carboxylic acids, reducing dicarboxylic acids, and salts thereof.
- As the carboxylic acid having reducibility formic acid, glyoxylic acid, salts thereof and the like can be used, for example.
- dicarboxylic acid which has reducibility oxalic acid, maleic acid, these salts, etc. can be used.
- these salts include alkali metal salts, salts having a group: —NH 4 (ammonium salts), and the like.
- Examples of the alkali metal include lithium, sodium, and potassium.
- the saccharides having a carbon number of 6 or more are not particularly limited as long as the saccharides have 6 or more carbon atoms and have a reducing property, and examples include known saccharides such as monosaccharides such as glucose, Examples thereof include disaccharides such as sucrose, polysaccharides such as cellulose, sugar alcohols such as sorbitol and mannitol, sugar acids such as ascorbic acid, and lactones such as gluconolactone. In addition, amino sugar, deoxy sugar and the like can be used. More preferably, the number of carbons in a saccharide having a reducing ability of 6 or more carbon atoms is about 6 to 12.
- the total amount of the reducing agent is preferably about 0.1 to 100 g / l, more preferably about 0.5 to 50 g / l.
- carboxyl group-containing reducing compounds and saccharides having a reducing ability of 6 or more carbon atoms are reducing agents with relatively low reducing power.
- hydantoins and organic carboxylic acids having a relatively weak complexing power can be obtained without reducing the stability of the conductive film-forming bath. It can be used as a complexing agent. As a result, wastewater treatment becomes easy while maintaining sufficient precipitation.
- Aliphatic polyalcohol An aliphatic polyalcohol can be further blended in the conductive film-forming bath of the present invention, if necessary.
- aliphatic polyalcohol a linear or branched aliphatic polyalcohol having 2 to 5 carbon atoms and having 2 or more hydroxy groups can be used.
- the carbon chain in the aliphatic polyalcohol may contain an oxygen atom.
- the number of hydroxy groups contained in the aliphatic polyalcohol may be 2 or more, preferably 2 to 4, more preferably 2 or 3, and particularly preferably 2.
- aliphatic polyalcohol examples include ethylene glycol, 1,2-propanediol, 1,2-butanediol, 1,2-pentanediol, glycerin, erythritol, xylitol, 1,2,4-butanetriol, diethylene glycol 1,3-propanediol, 1,4-butanediol, 1,5-pentanediol, 2,2-dimethyl-1,3-propanediol and the like.
- the aliphatic polyalcohol compound can be used singly or in appropriate combination of two or more.
- the blending amount of the aliphatic polyalcohol compound is preferably about 1 to 500 g / l, more preferably about 1 to 200 g / l.
- an aliphatic polyalcohol having 2 or less carbon atoms between two hydroxy groups is preferable to use as the aliphatic polyalcohol.
- ethylene glycol, 1,2-propanediol, glycerin, erythritol or xylitol is more preferably used, and ethylene glycol is particularly preferably used.
- the blending amount is about 1 to 50 g / l, and a film having excellent conductivity can be formed.
- the blending amount of the aliphatic polyalcohol compound should be about 50 g / l or more within the above blending amount range. Is preferred.
- Examples of the aliphatic polyalcohol having 3 or more carbon atoms between two hydroxy groups include 1,2,4-butanetriol, diethylene glycol, 1,3-propanediol, 1,4-butanediol, 1,5- Examples include pentanediol and 2,2-dimethyl-1,3-propanediol.
- a conductive film can be formed on a non-conductive plastic material by bringing the non-conductive plastic material provided with a catalytic substance into contact with the conductive film forming bath of the present invention. it can.
- Non-conductive plastic material The non-conductive plastic material is not particularly limited, and for example, various large plastic materials widely used in recent years in the automobile industry and the like can be used as objects to be processed.
- plastic parts such as various parts for automobiles such as front grills and emblems, exterior parts for electronics, various decorative plating parts such as knobs, and parts for corrosion resistance or functional plating.
- plastic parts such as various parts for automobiles such as front grills and emblems, exterior parts for electronics, various decorative plating parts such as knobs, and parts for corrosion resistance or functional plating.
- plastic parts such as various parts for automobiles such as front grills and emblems, exterior parts for electronics, various decorative plating parts such as knobs, and parts for corrosion resistance or functional plating.
- decorative plating parts such as knobs
- parts for corrosion resistance or functional plating examples include molded products.
- the material of the plastic material is not particularly limited, and various conventionally known plastic materials can be processed.
- PC polycarbonate
- ABS acrylonitrile-butadiene-styrene
- Nylon PA polyamide
- PA polyacetal
- General-purpose engineering plastics such as POM), polycarbonate (PC), modified polyphenylene ether (PPE), polybutylene terephthalate (PBT), polyphenylene sulfide (PPS), polyethersulfone (PES), polyetherimide having a heat resistance temperature exceeding 200 ° C (PEI), polyetheretherketone (PEEK), polyimide (PI), super engineering plastics such as liquid crystal polymer (LCP), polymer allotments such as PC / ABS It can be processed and the like.
- POM polycarbonate
- PPE modified polyphenylene ether
- PBT polybutylene terephthalate
- PPS polyphenylene sulfide
- PES polyethersulfone
- PEI polyetherimide having a heat resistance temperature exceeding 200 ° C
- PEEK polyetheretherketone
- PI polyimide
- super engineering plastics such as liquid crystal polymer (LCP), polymer allotments such as PC / ABS It can be
- the conductive film forming bath of the present invention When the conductive film forming bath of the present invention is used, it can be effectively used to form an electroplated film having excellent adhesion to the plastic material, and has excellent performance as an electroplating base. A film can be formed.
- the conductive film-forming bath of the present invention provides adhesion. A conductive film having excellent performance capable of forming a film with excellent electroplating can be obtained.
- Pretreatment process In the method for forming a conductive film of the present invention, first, as a pretreatment, in order to remove organic substances such as fingerprints, fats and oils, dusts and the like due to electrostatic action, etc. Clean the surface.
- a known degreasing agent may be used as the treatment liquid.
- a degreasing treatment or the like may be performed according to a conventional method using an alkali type degreasing agent or the like.
- This step selectively dissolves the resin surface to produce an anchor effect, and this treatment can improve the adhesion and appearance of the conductive film.
- Etching may be performed according to a conventional method.
- a mixed solution of chromic acid and sulfuric acid may be used, and the object to be processed may be immersed in an appropriately heated solution.
- the polybutadiene as a constituent component is eluted by oxidization of chromic acid by etching, and an anchor portion having a pore diameter of about 1 to 2 ⁇ m is formed on the resin surface.
- Oxidative decomposition gives a polar group such as a carbonyl group, which facilitates adsorption of a catalyst such as a tin-palladium mixed colloid solution in a subsequent step.
- the pre-etching treatment is to swell the skin layer or crystal orientation layer on the resin surface with an organic solvent, and can usually be performed using a highly polar solvent such as dimethyl sulfoxide. By performing this treatment, the etching effect can be improved.
- an appropriate etching method may be selected according to a conventional method for a resin filled with an inorganic substance, glass fiber, or the like.
- cleaning is performed to remove an etching solution such as chromic acid remaining on the resin surface.
- chromic acid remaining on the resin surface can be easily removed by performing a cleaning treatment using a dilute hydrochloric acid solution or a solution containing a reducing agent such as sodium bisulfite.
- Catalyst application step Next, a catalyst is applied to the treated product obtained in the pretreatment step.
- the type of catalyst is not particularly limited, and various known catalysts known as ordinary electroless plating solution catalysts can be used.
- a known noble metal catalyst-providing composition containing silver, palladium, gold, ruthenium, copper, nickel, platinum or the like as a catalyst component may be used.
- catalyst application compositions and catalyst application methods are not particularly limited, and may be appropriately selected from known compositions and known catalyst application methods.
- a palladium catalyst when a palladium catalyst is applied, the object to be treated is immersed in a sensitizer solution (tin (II) chloride hydrochloric acid solution) and then immersed in an activator solution (palladium chloride in hydrochloric acid solution) (sensitizer).
- -Activator method A method of improving catalytic activity by immersing in an accelerator solution composed of an acidic solution such as sulfuric acid after soaking in a tin-palladium mixed colloidal solution to dissolve excess tin ions. (Catalyst-Accelerator method) can be applied as appropriate. Further, the catalyst can be applied only by the step of immersing in the tin-palladium mixed colloidal solution.
- the conductive film forming bath of the present invention it is preferable to use a tin-palladium mixed colloid from the viewpoint that a plating film is likely to deposit uniformly on a resin molded product.
- the use of a tin-palladium mixed colloid increases the amount of tin colloid remaining on the surface of the resin molded product, and the conductive film formed by displacement deposition. Can be easily formed.
- tin-palladium mixed colloidal solution a commonly used acidic mixed colloidal solution containing palladium chloride and stannous chloride can be used.
- a mixed colloidal solution containing about 0.05 to 0.6 g / l of palladium chloride, about 1 to 50 g / l of stannous chloride, and about 100 to 400 ml / l of 35% hydrochloric acid can be used.
- the conditions for immersion in the tin-palladium mixed colloidal solution are not particularly limited. Usually, the temperature of the mixed colloidal solution is about 10 to 80 ° C., preferably about 20 to 40 ° C. What is necessary is just to immerse.
- immersion time what is necessary is just to set required immersion time suitably according to the kind etc. of the conductive film formation bath of this invention.
- the immersion time is in the range of about 2 to 10 minutes.
- the conductive film can be formed by bringing the non-conductive plastic material provided with the catalyst substance into contact with the conductive film forming bath of the present invention.
- Examples of a method for forming a conductive film by bringing a non-conductive plastic material provided with a catalyst into contact with the conductive film forming bath of the present invention include, for example, a non-conductive plastic provided with a catalyst in a conductive film forming bath. A method of immersing the material can be mentioned. If this method is used, a conductive film can be efficiently formed.
- the conductive film forming bath of the present invention is preferably about pH 10 to 14, more preferably about pH 11.5 to 13.5. If the pH is too low, the smooth progress of the reduction reaction is hindered, and the reducing agent may be decomposed, etc., so that the depositing property of the conductive film is lowered and the conductive film forming bath may be decomposed. Absent. On the other hand, if the pH is too high, the stability of the conductive film forming bath tends to decrease, which is not preferable.
- the temperature of the bath for forming the conductive film varies depending on the specific composition of the conductive film forming bath, etc., but is usually preferably about 30 ° C. or higher, and preferably about 40 to 80 ° C. More preferably, the temperature is about 50 to 70 ° C.
- the liquid temperature of the conductive film forming bath is too low, the film deposition reaction becomes slow, and the film is not easily deposited or poor appearance tends to occur.
- the liquid temperature of the conductive film forming bath is raised, the surface resistance value after the formation of the conductive film is further reduced, and an excellent plating appearance is obtained.
- the liquid temperature of the conductive film forming bath is too high, evaporation of the conductive film forming bath becomes intense and it becomes difficult to maintain the plating solution composition within a predetermined range. Is not preferable because it is likely to occur.
- the time for contacting the conductive film forming bath is not particularly limited, and may be a time that allows the conductive film to be completely covered. It can set suitably according to the surface state of a conductive film. If the contact time is too short, the conductive film is insufficient to supply onto the surface of the object to be processed, and the conductive film cannot be formed completely.
- the immersion time is preferably about 1 to 10 minutes, particularly 3 More preferably, about 5 minutes.
- a conductive film mainly composed of copper oxide is formed. In this case, when the formed film is brought into contact with an acidic aqueous solution, a disproportionation reaction occurs in the copper oxide, and a dense film containing metallic copper is formed.
- an aqueous solution containing sulfuric acid is particularly preferable.
- an aqueous solution having a sulfuric acid concentration of about 20 to 120 g / l can be used.
- a dense film containing metallic copper is formed by contact with an acidic aqueous solution, but in subsequent steps, contact with an acidic plating solution containing sulfuric acid such as a copper sulfate plating solution.
- an acidic plating solution containing sulfuric acid such as a copper sulfate plating solution.
- the step of immersing in an acidic aqueous solution can be omitted.
- the dense film containing metallic copper improves the conductivity and acid resistance of the film, and forms an electroplated film with excellent adhesion and uniform appearance without damaging the conductive film in the electroplating process. can do.
- a conductive film forming bath containing a reducing agent comprising at least one component selected from the group consisting of a carboxyl group-containing reducing compound and a saccharide having 6 or more carbon atoms, and an aliphatic polyalcohol is used.
- a reducing agent comprising at least one component selected from the group consisting of a carboxyl group-containing reducing compound and a saccharide having 6 or more carbon atoms, and an aliphatic polyalcohol is used.
- the means for increasing the dissolved oxygen is not particularly limited, and any method, for example, a method of supplying an oxygen-containing gas by bubbling into a conductive film forming bath, or a method of adding an oxidizing agent Etc. can be applied.
- the state in which dissolved oxygen is increased means that the oxygen-containing gas is supplied by bubbling into the conductive film forming bath, and the state after increasing dissolved oxygen, or by adding an oxidizing agent, In addition to the state after increasing the amount of oxygen, the state of increasing dissolved oxygen while continuously bubbling and supplying an oxygen-containing gas into the conductive film forming bath, or while continuously adding an oxidizing agent The state where dissolved oxygen is increased is also included.
- oxygen or air can be used as the oxygen-containing gas.
- Oxygen or air may contain a gas other than oxygen, such as nitrogen or a rare gas.
- the oxidizing agent is not particularly limited, and a known compound that can increase dissolved oxygen can be used.
- dissolved oxygen in the conductive film forming bath can be increased by adding sodium persulfate, aqueous hydrogen peroxide, or the like.
- the addition amount of the oxidizing agent is preferably about 0.1 to 5 g / l with respect to the conductive film forming bath.
- a film having excellent conductivity is formed on the surface of the non-conductive plastic material.
- the conductive film to be formed has good adhesion to the non-conductive plastic material that is the object to be plated, and the electroplating process is subsequently performed to form a good electroplated film with excellent adhesion. Can do.
- the non-conductive plastic is a plastic that is easily hydrolyzed by an alkaline aqueous solution such as a polycarbonate (PC) resin, a polyester resin, or a PC / ABS polymer alloy
- the conductive film forming bath of the present invention is used. By using it, it becomes possible to form a conductive film having excellent adhesion.
- the conductive film to be formed is mainly composed of metallic copper, but at least one component selected from the group consisting of a carboxyl group-containing reducing compound and a saccharide exhibiting reducing properties having 6 or more carbon atoms is used as a reducing agent.
- a conductive film forming bath to which an aliphatic polyalcohol is added is used, a conductive film mainly composed of copper oxide is formed.
- the formed film is brought into contact with an acidic aqueous solution or an acidic electroplating solution to form a dense film containing metallic copper.
- This film is a uniform film without bridge precipitation, has good conductivity, and is excellent in acid resistance. By performing an electroplating process on this, an electroplated film having an excellent appearance as well as good adhesion can be formed.
- Electroplating process After forming the conductive film by the above process, the object to be processed on which the conductive film is formed is subjected to an electroplating process according to a conventional method.
- the type of electroplating bath is not particularly limited, and any conventionally known electroplating bath can be used. Moreover, the conditions for the plating treatment may be in accordance with a conventional method.
- the copper plating for example, a known copper sulfate plating bath can be used.
- a plating bath in which a known brightener is added to an aqueous solution containing about 100 to 250 g / l of copper sulfate, about 20 to 120 g / l of sulfuric acid, and about 20 to 70 ppm of chlorine ions can be used.
- the conditions for copper sulfate plating may be the same as usual.
- the liquid temperature is about room temperature
- the current density is about 3 A / dm 2
- plating may be performed up to a predetermined film thickness.
- the conductive film obtained by the conductive film forming bath of the present invention has high acid resistance, the film can be formed even when immersed in a strongly acidic plating solution such as a copper sulfate plating solution in this electroplating step. It is possible to form a decorative plating film having a uniform and excellent appearance without being attacked.
- nickel plating a well-known nickel plating bath can be used, for example, a normal watt bath can be used. That is, an aqueous solution containing about 200 to 350 g / l of nickel sulfate, about 30 to 80 g / l of nickel chloride, and about 20 to 60 g / l of boric acid with a commercially available brightener for nickel plating baths can be used.
- the plating conditions may be the same as usual. For example, electrolysis may be performed at a liquid temperature of about 55 to 60 ° C. and a current density of about 3 A / dm 2 to plate to a predetermined film thickness.
- chromium plating a well-known chromium plating bath can be used, and a normal sergeant bath can be used. That is, an aqueous solution containing about 200 to 300 g / l of chromic anhydride and about 2 to 5 g / l of sulfuric acid can be used.
- the plating conditions are a liquid temperature of about 45 ° C. and a current density of about 20 A / dm 2 , and plating may be performed up to a predetermined film thickness under these conditions.
- the conductive film-forming bath of the present invention By forming the conductive film using the conductive film forming bath of the present invention, a uniform conductive film can be formed on the non-conductive plastic material.
- the formed conductive film has good conductivity and good adhesion to non-conductive plastic material, and by forming an electroplating film on the film, the adhesion is good, An electroplated film having an excellent appearance can be formed.
- the conductive film-forming bath of the present invention is useful in that it can form a uniform and excellent adhesive film even for plastic molded products containing polycarbonate, polyester, etc. that are easily hydrolyzed by an alkaline aqueous solution. It is highly probable.
- Example 1 As the object to be processed, a flat plate made of PC / ABS polymer alloy (Mitsubishi Engineering Plastics Co., Ltd .: Iupilon PL-2010) having a size of 100 mm ⁇ 40 mm ⁇ 3 mm and a surface area of about 1 dm 2 was used.
- PC / ABS polymer alloy Mitsubishi Engineering Plastics Co., Ltd .: Iupilon PL-2010
- a jig for plating two contact parts with the object to be processed, a contact distance of 11 cm, a contact portion made of a stainless steel rod having a diameter of 2 mm, and other than the contact, a jig baked and coated with a vinyl chloride sol was used.
- An electroplated film was formed by sequentially performing the following steps (1) to (9).
- the object to be plated set on the jig is immersed in an alkaline degreasing agent solution (Okuno Pharmaceutical Co., Ltd .: A-screen A-220, 50 g / l aqueous solution) at 50 ° C. for 5 minutes. And washed with water.
- an alkaline degreasing agent solution (Okuno Pharmaceutical Co., Ltd .: A-screen A-220, 50 g / l aqueous solution) at 50 ° C. for 5 minutes. And washed with water.
- CRP conditioner 551M 15 ml / l which is a resin surface conditioner, was immersed in an aqueous solution adjusted to pH 7 with sodium hydroxide at room temperature for 60 seconds.
- a conductive film forming bath an aqueous solution containing copper sulfate pentahydrate 4 g / l, Rochelle salt 20 g / l, and sodium hydroxide 60 g / l is used as a basic bath (hereinafter referred to as “basic bath A”).
- An aqueous solution (invention baths 1 to 28) to which a water-soluble polymer having a polyoxyalkylene structure described in Tables 1 to 4 below was added was used, and an object to be treated was added to the conductive film forming bath at 60 ° C. for 30 minutes. It was immersed for a minute to form a conductive film.
- Nickel plating treatment Next, the object to be treated was washed with water, immersed in Top Sun 50 g / l (Okuno Pharmaceutical Co., Ltd.) as an activator for 1 minute at 25 ° C., and sufficiently washed with water. Thereafter, an aqueous solution containing 280 g / l of nickel sulfate, 50 g / l of nickel chloride and 40 g / l of boric acid as an electronickel plating solution, and 20 ml / l of improved Acuna B-1 and 1 ml of improved Acuna B-2 as brighteners. Electrolytic nickel plating was performed at a liquid temperature of 55 ° C. and a current density of 3 A / dm 2 for 20 minutes using a plating solution to which / l (both manufactured by Okuno Pharmaceutical Co., Ltd.) was added while gently stirring air.
- Chromium plating treatment After washing with water, an aqueous solution containing 250 g / l of chromic anhydride and 1 g / l of sulfuric acid is used as the chromium plating solution. Chromium plating was performed at 40 ° C. and a current density of 12 A / dm 2 for 3 minutes without stirring.
- each sample was allowed to stand at ⁇ 30 ° C. for 60 minutes, at room temperature for 30 minutes, at 70 ° C. for 60 minutes, and at room temperature for 30 minutes, and this was repeated 3 cycles. Thereafter, the swollen state of the plating film was visually observed, and the adhesion between the plating films was evaluated according to the following criteria.
- Example 2 (addition of reducing agent) Using the same workpieces and jigs as in Example 1, processing was performed in the same manner as in Example 1 up to the catalyst application step.
- an aqueous solution containing copper sulfate pentahydrate 4.8 g / l, disodium ethylenediaminetetraacetate 30 g / l, sodium hydroxide 30 g / l, and formaldehyde 2 g / l (Hereinafter referred to as “basic bath B”), an aqueous solution obtained by adding a water-soluble polymer having a polyoxyalkylene structure described in Tables 5 to 7 was used as a conductive film-forming bath (invention baths 29 to 56).
- a conductive film was formed under the same conditions as in Example 1. Thereafter, it was washed with water and subjected to electrolytic copper plating, nickel plating and chromium plating under the same conditions as in Example 1.
- the types of polymers in the table are the same as those in Tables 1 to 3.
- the basic bath B (comparative bath 6) to which no water-soluble polymer was added and the baths (comparative baths 7 to 10) in which the water-soluble compounds described in Table 6 below were added to the basic bath B were conducted.
- a conductive film forming bath a conductive film was formed under the same conditions as in Example 1, then washed with water, and subjected to electrolytic copper plating, nickel plating and chromium plating under the same conditions as in Example 1.
- Example 3 (reducing agent added) Using the same object and jig as in Example 1, the same treatment as in Example 1 was performed up to the catalyst application step.
- the basic bath C to which no water-soluble polymer was added (comparative bath 11) and the baths in which the water-soluble compounds described in Table 9 below were added to the basic bath C (comparative baths 12 to 15) were electrically conductive.
- a conductive film forming bath a conductive film was formed under the same conditions as in Example 1, then washed with water, and subjected to electrolytic copper plating, nickel plating and chromium plating under the same conditions as in Example 1.
- the water-soluble polymer having a polyoxyalkylene structure was added to the basic bath C containing copper sulfate, 5,5-dimethylhydantoin, Rochelle salt, sodium hydroxide, and mannitol.
- the added conductive film forming bath invention baths 57 to 84, it was possible to form a plating film having good adhesion.
- Example 4 (Example in which a reducing agent and an aliphatic polyalcohol are added) Using the same object and jig as in Example 1, the same treatment as in Example 1 was performed up to the catalyst application step.
- an aqueous solution containing copper sulfate pentahydrate 4 g / l, Rochelle salt 20 g / l, sodium hydroxide 65 g / l, formic acid 10 g / l and glycerin 50 g / l (
- a conductive film was formed under the same conditions as in 1.
- the types of polymers in the table are the same as those in Tables 1 to 3.
- a basic bath D to which no water-soluble polymer was added (comparative bath 16) and a bath in which the water-soluble compounds described in Table 12 below were added to the basic bath D (comparative baths 17 to 20) were electrically conductive.
- a conductive film forming bath a conductive film was formed under the same conditions as in Example 1, then washed with water, and subjected to electrolytic copper plating, nickel plating and chromium plating under the same conditions as in Example 1.
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Abstract
Description
項1.
銅化合物、錯化剤、アルカリ金属水酸化物、及びポリオキシアルキレン構造を有する水溶性ポリマーを含有する水溶液からなる導電性皮膜形成浴。
項2.
さらに、還元剤を含有する項1に記載の導電性皮膜形成浴。
項3.
前記還元剤が、カルボキシル基含有還元性化合物及び炭素数6以上の還元性を示す糖類からなる群から選ばれた少なくとも一種の成分である、項2に記載の導電性皮膜形成浴。
項4.
さらに、炭素数2~5の脂肪族ポリアルコール化合物を含有する項1~3のいずれか一項に記載の導電性皮膜形成浴。
項5.
前記ポリオキシアルキレン構造を有する水溶性ポリマーが、一般式(1):-(O-Ak)-(式中、Akはアルキレン基を示す。)で表されるオキシアルキレン基を構造単位とする繰り返し構造を主鎖として有し、かつ親水性基を有するポリマーである、項1~4のいずれか一項に記載の導電性皮膜形成浴。
項6.
前記ポリオキシアルキレン構造を有する水溶性ポリマーが、数平均分子量300以上のポリマーである、項1~5のいずれか一項に記載の導電性皮膜形成浴。
項7.
項1~6のいずれか一項に記載の導電性皮膜形成浴に、触媒物質を付与した非導電性プラスチック材料を接触させることを特徴とする、非導電性プラスチック材料に導電性皮膜を形成する方法。
項8.
項7に記載の方法で導電性皮膜形成浴を用いて導電性皮膜を形成した後、電気めっきを行う工程を含む、非電導性プラスチック材料への電気めっき方法。
銅化合物
銅化合物としては、水溶性の銅化合物であればよく、例えば、硫酸銅、塩化銅、炭酸銅、水酸化銅、これらの水和物等を使用できる。銅化合物は、一種単独で又は二種以上を適宜混合して用いることができる。
錯化剤としては、銅イオンに対して有効な公知の錯化剤を使用することができる。この様な錯化剤としては、ヒダントイン類、有機カルボン酸類等を挙げることができる。
アルカリ金属水酸化物としては、入手の容易性、コスト等の点から、水酸化ナトリウム、水酸化カリウム、水酸化リチウム等が適当である。
ポリオキシアルキレン構造を有する水溶性ポリマーとしては、ポリオキシアルキレン構造部分を主鎖として有し、かつ親水性基を有するポリマーであれば、特に制限なく用いることができる。本願明細書では、ポリオキシアルキレン構造とは、一般式(1):-(O-Ak)-(式中、Akはアルキレン基を示す。)で表されるオキシアルキレン基を構造単位とする繰り返し構造を意味する。尚、上記一般式(1)で表されるオキシアルキレン構造の繰り返し数については、特に限定はなく、後述する数平均分子量となる範囲であればよいが、通常は、4以上の繰り返し数を有することが好ましい。
本発明の導電性皮膜形成浴では、上記の銅化合物、錯化剤、アルカリ金属水酸化物、及びポリオキシアルキレン構造を有する水溶性ポリマーを含む水溶液に、更に、必要に応じて、還元剤を添加してもよい。
本発明の導電性皮膜形成浴には、更に、必要に応じて、脂肪族ポリアルコールを配合することができる。
本発明の導電性皮膜形成浴に、触媒物質を付与した非導電性プラスチック材料を接触させることによって、非導電性プラスチック材料に導電性皮膜を形成することができる。
非導電性プラスチック材料としては、特に限定はなく、例えば、自動車業界等において近年広く採用されている各種の大型のプラスチック材料を処理対象物とすることができる。
本発明の導体性皮膜を形成する方法では、まず、前処理として、常法に従って、指紋、油脂等の有機物、静電気作用による塵等の付着物等を除去するために、被処理物の表面を清浄化する。処理液としては、公知の脱脂剤を用いればよく、例えば、アルカリタイプの脱脂剤等を使用して、常法に従って脱脂処理等を行えばよい。
次いで、前処理工程によって得られた処理物に対して、触媒を付与する。
次いで、本発明の導電性皮膜形成浴に、触媒物質を付与した非導電性プラスチック材料を接触させることによって導電性皮膜を形成することができる。
上記した導電性皮膜形成工程によって、非導電性プラスチック材料の表面に導電性に優れた皮膜が形成される。形成される導電性皮膜は、被めっき物である非導電性プラスチック材料との密着性が良好であり、引き続き電気めっき処理を行うことによって、密着性に優れた良好な電気めっき皮膜を形成することができる。特に、非導電性プラスチックがポリカーボネート(PC)樹脂、ポリエステル樹脂、PC/ABSポリマーアロイ等のアルカリ水溶液によって加水分解が生じ易いプラスチックスである場合であっても、本発明の導電性皮膜形成浴を用いることによって密着性に優れた導電性皮膜を形成することが可能となる。
上記工程によって導体性皮膜を形成した後、導電性皮膜が形成された被処理物を、常法に従って電気めっき処理に供する。
被処理物として、100mm×40mm×3mm、表面積約1dm2のPC/ABSポリマーアロイ製(三菱エンジニアリングプラスチックス(株)製:ユーピロンPL-2010)の平板を用いた。
まず、治具にセットした被めっき物を、アルカリ系脱脂剤溶液(奥野製薬工業(株)製:エースクリーンA-220、50g/l水溶液)中に50℃で5分間浸漬し、水洗した。
次いで、無水クロム酸400g/l及び硫酸400g/lを含有する水溶液からなるエッチング溶液中に67℃で10分間浸漬して、樹脂表面を粗化した。
その後、被処理物を水洗し、樹脂の表面調整剤であるCRPコンディショナー551M 15ml/lを水酸化ナトリウムでpHを7に調整した水溶液に室温で60秒間浸漬した。
次に、プリディップ処理として、35%塩酸250ml/lを含有する水溶液に被処理物を室温で1分間浸漬した。
塩化パラジウム 83.3mg/l(Pdとして50mg/l)、塩化第一錫 8.6g/l(Snとして4.5g/l)、及び35%塩酸250ml/lを含有するpH1以下のコロイド溶液中に、被処理物を35℃で6分間浸漬して、被処理物に均一に触媒を付着させた。
その後、水洗を充分に行い、導電性皮膜を形成した。導電性皮膜形成浴としては、硫酸銅5水和物4g/l、ロッシェル塩20g/l、及び水酸化ナトリウム60g/lを含有する水溶液を基本浴(以下、「基本浴A」という。)として、これに下記表1~4に記載したポリオキシアルキレン構造を有する水溶性ポリマーを添加した水溶液(本発明浴1~28)を用い、被処理物を該導電性皮膜形成浴に60℃で30分間浸漬して、導電性皮膜を形成した。
その後、充分水洗し、治具を変えることなく次工程の電気銅めっきに移行した。電気銅めっき浴としては、硫酸銅・5H2O 50g/l、硫酸 50g/l及び塩素イオン50mg/lを含有する水溶液に、光沢剤としてトップルチナ2000MU 5ml/l(奥野製薬工業(株)製)、及びトップルチナ2000A 0.5ml/l(奥野製薬工業(株)製)を添加しためっき浴を用い、含リン銅板を陽極とし、被めっき品を陰極として、緩やかなエアー攪拌を行いながら、液温25℃、電流密度3A/dm2で5分間電気銅めっきを行った。
次に、被処理物を水洗し、活性化剤としてトップサン50g/l(奥野製薬工業(株)製)に25℃で1分間浸漬し、充分に水洗した。その後、電気ニッケルめっき液として、硫酸ニッケル280g/l、塩化ニッケル50g/l、及びホウ酸40g/lを含有する水溶液に、光沢剤として改良アクナB-1 20ml/l、改良アクナB-2 1ml/l(共に奥野製薬工業(株)製)を添加しためっき液を用い、緩やかなエアー撹拌を行いながら、液温55℃、電流密度3A/dm2で20分間電気ニッケルめっきを行った。
次に、水洗後、クロムめっき液として、無水クロム酸250g/l及び硫酸1g/lを含有する水溶液を用い、鉛板を陽極とし、被処理物を陰極として、液温40℃、電流密度12A/dm2で無撹拌で3分間クロムめっきを行った。
上記した方法でめっき皮膜を形成した各試料について、形成されためっき皮膜の密着性を下記の方法で評価した。結果を表1~4に併記する。
○:めっき皮膜の0~10%の面積で膨れ有り
△:めっき皮膜の10~80%の面積で膨れ有り
×:めっき皮膜の80~100%で膨れ有り
実施例1と同様の被処理物と治具を用い、触媒付与工程まで実施例1と同様にして処理を行なった。
実施例1と同様の被処理物と治具を用い、触媒付与工程まで実施例1と同様にして処理を行った。
実施例1と同様の被処理物と治具を用い、触媒付与工程まで実施例1と同様にして処理を行った。
Claims (8)
- 銅化合物、錯化剤、アルカリ金属水酸化物、及びポリオキシアルキレン構造を有する水溶性ポリマーを含有する水溶液からなる導電性皮膜形成浴。
- さらに、還元剤を含有する請求項1に記載の導電性皮膜形成浴。
- 前記還元剤が、カルボキシル基含有還元性化合物及び炭素数6以上の還元性を示す糖類からなる群から選ばれた少なくとも一種の成分である、請求項2に記載の導電性皮膜形成浴。
- さらに、炭素数2~5の脂肪族ポリアルコール化合物を含有する請求項1~3のいずれか一項に記載の導電性皮膜形成浴。
- 前記ポリオキシアルキレン構造を有する水溶性ポリマーが、一般式(1):-(O-Ak)-(式中、Akはアルキレン基を示す。)で表されるオキシアルキレン基を構造単位とする繰り返し構造を主鎖として有し、かつ親水性基を有するポリマーである、請求項1~4のいずれか一項に記載の導電性皮膜形成浴。
- 前記ポリオキシアルキレン構造を有する水溶性ポリマーが、数平均分子量300以上のポリマーである、請求項1~5のいずれか一項に記載の導電性皮膜形成浴。
- 請求項1~6のいずれか一項に記載の導電性皮膜形成浴に、触媒物質を付与した非導電性プラスチック材料を接触させることを特徴とする、非導電性プラスチック材料に導電性皮膜を形成する方法。
- 請求項7に記載の方法で導電性皮膜形成浴を用いて導電性皮膜を形成した後、電気めっきを行う工程を含む、非電導性プラスチック材料への電気めっき方法。
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KR101799347B1 (ko) | 2017-11-20 |
EP3070185B1 (en) | 2024-05-29 |
US20160273118A1 (en) | 2016-09-22 |
CN105765104A (zh) | 2016-07-13 |
EP3070185A4 (en) | 2017-06-28 |
US9951433B2 (en) | 2018-04-24 |
EP3070185A8 (en) | 2016-11-30 |
JP6024044B2 (ja) | 2016-11-09 |
KR20160113096A (ko) | 2016-09-28 |
JPWO2015111291A1 (ja) | 2017-03-23 |
EP3070185A1 (en) | 2016-09-21 |
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