WO2015052998A1 - Stockeur et procédé permettant d'insérer et de sortir une unité d'étagère coulissante en provenance du stockeur - Google Patents

Stockeur et procédé permettant d'insérer et de sortir une unité d'étagère coulissante en provenance du stockeur Download PDF

Info

Publication number
WO2015052998A1
WO2015052998A1 PCT/JP2014/072030 JP2014072030W WO2015052998A1 WO 2015052998 A1 WO2015052998 A1 WO 2015052998A1 JP 2014072030 W JP2014072030 W JP 2014072030W WO 2015052998 A1 WO2015052998 A1 WO 2015052998A1
Authority
WO
WIPO (PCT)
Prior art keywords
stocker
shelf unit
shelf
drawer
drawer shelf
Prior art date
Application number
PCT/JP2014/072030
Other languages
English (en)
Japanese (ja)
Inventor
玄己 小合
Original Assignee
村田機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Priority to JP2015541470A priority Critical patent/JP6136082B2/ja
Publication of WO2015052998A1 publication Critical patent/WO2015052998A1/fr

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes

Definitions

  • This invention relates to a stocker and a method for taking out and taking out a drawer shelf unit from the stocker, and more particularly to making it possible to stably put in and out a drawer shelf unit on which a heavy object is placed.
  • Patent Document 1 JP39009273 proposes that a part of the shelf of the stocker is rotated to be a door that can be opened and closed. .
  • the door can be opened by providing a shelf on the door to store articles and rotating the door around the hinge.
  • Such doors are not suitable for storing heavy items.
  • An object of the present invention is to provide a stocker that can easily open an entrance / exit without deteriorating storage efficiency even when storing a heavy object, and a method for taking in and out a drawer shelf unit from the stocker. is there.
  • the present invention is a stocker provided with shelves each capable of storing a plurality of articles along the longitudinal direction and the vertical direction, A transport space which is arranged in parallel with the longitudinal direction of the shelf, and the transport device is movable; A drawer shelf unit that can be pulled out from the stocker in a direction perpendicular to the longitudinal direction and in the horizontal plane and returned to the stocker, and can be stored as a part of the shelf when stored in the stocker.
  • a positioning member for positioning the drawer shelf unit in the shelf, and The transport space and the shelf are enclosed from the outside in a casing shape to constitute a stocker body,
  • the drawer shelf unit is configured so that articles can be stored and a path to the stocker can be obtained by pulling out the drawer shelf unit from the stocker.
  • the present invention also provides A shelf capable of storing a plurality of articles along the longitudinal direction and the vertical direction, A transport space which is arranged in parallel with the longitudinal direction of the shelf and the transport device is movable; A drawer shelf unit that can be pulled out from the stocker and returned into the stocker in a direction perpendicular to the longitudinal direction and the horizontal plane, and becomes a part of the shelf when returned into the stocker, and can store articles.
  • a positioning member for positioning the drawer shelf unit in the shelf, And the conveyance space and the shelf are enclosed from the outside in the shape of a casing to constitute the stocker body.
  • the drawer shelf unit is taken in and out at right angles to the longitudinal direction which is the conveyance direction of the conveyance device, and the drawer shelf unit is positioned in the stocker. For this reason, since the drawer shelf unit can store heavy articles and is positioned with respect to the stocker, the articles can be transferred to and from the conveying device.
  • the description relating to the stocker also applies to the method of taking in and out the drawer shelf unit as it is.
  • the drawer shelf unit is self-supporting with wheels, in particular caster wheels.
  • wheels in particular caster wheels.
  • the drawer shelf unit can be easily moved, and the weight of the drawer shelf unit can be supported by the wheels in the stocker.
  • an engaging member for engaging the drawer shelf unit pulled out from the stocker with the stocker body. If it does in this way, the drawer shelf unit pulled out will not move carelessly.
  • the engaging member is a hinge.
  • the hinge is detachably inserted through the first hinge element provided on the stocker body side, the second hinge element provided on the drawer shelf unit side, and the first hinge element and the second hinge element.
  • the pin is inserted into the first hinge element and the second hinge element so that the drawer shelf unit can be rotated around the hinge and the movable range of the drawer shelf unit is limited. It is configured.
  • the drawer shelf unit can be rotated around the hinge to open a passage into the stocker, and by engaging the drawer shelf unit with the hinge, it is possible to limit the unintentional movement of the drawer shelf unit.
  • one of the shelf and the drawer shelf unit is provided with a guide roller, and the other is provided with a guide.
  • the guide roller and the guide come into contact with each other to position the drawer shelf unit along the longitudinal direction.
  • one of the shelf and the drawer shelf unit includes a fitting member, and the other includes a positioning pin. Then, when the drawer shelf unit is returned to the stocker, the positioning pin is fitted to the fitting member, and the drawer shelf unit is positioned along a direction perpendicular to the longitudinal direction in the horizontal plane. .
  • the conveying device in the stocker can accurately transfer articles to and from the drawer shelf unit.
  • the principal part top view of the stocker of an Example shows the state which pulled out the drawer shelf unit and was fixed to the stocker main body.
  • Side view of the hinge and its surroundings in the modified example The principal part top view which shows the state which connected the slide unit to the stocker to the stocker of 2nd Example.
  • the stocker 2 includes a drawer shelf unit 4, a conveyance space 6, and shelves 8 and 10, and the drawer shelf unit 4 can be pulled out from the stocker 2 and returned to the stocker 2.
  • the drawer shelf unit 4 is a part of the shelf 10 in the stocker 2, and the shelf 8 faces the shelf 10 with the conveyance space 6 interposed therebetween.
  • the shelf 8 may not be provided.
  • the conveyance space 6 is a space in which a conveyance device 50 described later travels and transfers and conveys articles between the shelves 8 and 10.
  • a fan filter unit 12 forms a down flow of clean air in the stocker 2. Further, the portion of the stocker 2 excluding the drawer shelf unit 4 is called a stocker body.
  • the configuration of the drawer shelf unit 4 will be described.
  • the shelves 8 and 10 and the drawer shelf unit 4 are each provided with a plurality of shelf supports 14 on which articles are placed.
  • the space for each shelf receiver 14 is called a frontage.
  • a handle 16 and, for example, a lockable caster wheel 18 are attached to the drawer shelf unit 4 and are movable on the floor 3 of the clean room.
  • four guide rollers 20 are provided below the lowermost shelf receiver 14, and the guide rollers 20 are guided by guides 22 provided on the shelf 10 side. Guide to a predetermined position.
  • a hinge element 24 is provided in the drawer shelf unit 4 and a hinge element 26 is provided on the stocker 2 side, and a pin 62 in FIG.
  • the drawer shelf unit 4 is rotatable about the hinge 36 of FIG.
  • the article is heavy, and if the drawer shelf unit 4 falls down during movement, it is difficult to support it manually. Therefore, the ceiling of the clean room and the drawer shelf unit 4 are connected by a flexible fall prevention member 28 such as a wire, a belt, or a rope to prevent the drawer shelf unit 4 from falling.
  • FIG. 2 shows a state in which the drawer shelf unit 4 is pulled out from the stocker 2, 40 is a column of the stocker 2, 42 is a column of the drawer shelf unit 4, with a small space between the columns 40, 40. It arrange
  • 2 is the left-right direction of the stocker 2
  • the vertical direction of FIG. 2 is the depth direction of the stocker 2
  • the pair of left and right guide rollers 20, 20 are guided by the guides 22, 22, and the drawer shelf in the shelf 10 is The position of the unit 4 in the left-right direction is restricted.
  • a pair of fitting members 30 and 30 are similarly fitted to a pair of positioning pins 32 and 32, and the position of the drawer shelf unit 4 in the depth direction is positioned.
  • the guide roller 20 and the fitting member 30 may be provided on the shelf 10 side, and the guide 22 and the positioning pin 32 may be provided on the drawer shelf unit 4 side. Assignment of these members to the shelf 10 and the drawer shelf unit 4 is arbitrary. It is. These members are arranged in a space below the lowermost shelf holder in the drawer shelf unit 4, for example.
  • the transport space 6 is a travel space of the transport device 50.
  • the transport device 50 includes a carriage 52 and travels by wheels 54.
  • An arm 58 moves up and down along a mast 56, and a transfer device 60 such as a SCARA arm is installed at the tip.
  • a transport device that does not include the mast 56 may be used, the transport space 6 may be divided into a plurality of levels along the height direction, and the transport device may be moved for each level.
  • Reference numeral 44 denotes an outer plate of the stocker 2
  • 46 denotes an outer plate of the drawer shelf unit 4. When the drawer shelf unit 4 is returned into the shelf 10, the outer plates 44 and 46 are combined with no gap.
  • FIG. 3 shows the hinge 36.
  • the hinge element 24 is attached to the support post 42, and the hinge element 26 is attached to the support post 40.
  • the hinge 36 is obtained.
  • a pair of upper and lower hinges 36 are provided.
  • the pin 62 is provided with a head 63 at the upper portion, and a protrusion 64 that can be protruded and urged in the lower portion and is urged in the protruding direction is provided to prevent the pin 62 from falling off the hinge 36.
  • the stocker 2 has the following actions.
  • the drawer shelf unit 4 includes a shelf holder 14 and can store articles as a part of the shelf 10.
  • the drawer shelf unit 4 can be pulled out using the caster wheels 18 and returned to the shelf 10.
  • the drawer shelf unit 4 can be rotated 90 ° as indicated by the white arrow in FIG.
  • the movable range of the drawer shelf unit 4 can be limited by the hinge 36.
  • the guide roller 20 and the guide 22 regulate the horizontal position of the drawer shelf unit 4, and the positioning pin 32 and the fitting member 30 set the depth direction position. Can be positioned. Thereby, the conveying device 50 can transfer the article to the drawer shelf unit 4.
  • the fall prevention member 28 it can prevent that the drawer shelf unit 4 falls while moving. If a member that locks the fitting between the positioning pin 32 and the fitting member 30 or a member that fixes the drawer shelf unit 4 to the shelf 10 is added, the drawer shelf unit 4 along the depth direction is added. The position can be fixed more reliably.
  • a hinge piece 65 is attached to the column 40 of the stocker 2, and a hinge piece 68 is attached to the column 42 of the drawer shelf unit 4.
  • the hinge piece 65 is provided with a fitting hole 66
  • the hinge piece 68 is provided with a hinge shaft 69
  • the hinge shaft 69 is fitted to the tip (most flange) of the fitting hole 66.
  • the fitting hole 66 is U-shaped, changes its direction at the tip, and includes guides 66a and 66b at the inlet.
  • a new drawer shelf unit 72 is provided with a plurality of shelf supports 14 along the height direction and the left-right direction, and 74 is a frame. As shown in FIG. 7, the drawer shelf unit 72 includes, for example, four jacks 78 using bolts and two positioning pins 92, for example, at a position below the lowest shelf holder. Then, the positioning pin 92 is fitted to the fitting member 93 provided on the shelf 10 side to perform positioning.
  • the positioning pin 92 may be provided on the shelf 10 side, and the fitting member 93 may be provided on the drawer shelf unit 72 side.
  • the member that can position the drawer shelf unit 72 is not limited to the fitting of the pins, and the drawer shelf unit 72 and the shelf 10 may be positioned. And should be provided.
  • four nut plates 76 are provided on the frame 74 or the like by changing the position in the left-right direction and the position in the height direction.
  • Numeral 80 is a slide carriage, which has a frame 82 and can be moved in a clean room by means of lockable caster wheels 90.
  • a pair of guides 84 in the depth direction of the stocker 70 are provided on the frame 82, and guide the pipe 88 of the slide unit 86 to slide the slide unit 86 in the depth direction of the stocker 70.
  • the drawer shelf unit 72 When pulling out the drawer shelf unit 72 from the stocker 70, the drawer shelf unit 72 is raised by the jack 78, the positioning pin 92 is removed from the fitting member 93, and the bolt is fastened to the nut plate 76 from the slide unit 86 side. It fixes to 86.
  • the pipe 88 is slid along the guide 84 from here in the state of the solid line in FIG. 6, the chain line state in FIG. 6 is reached, and the heavy drawer drawer unit 72 is positioned at the longitudinal center of the slide carriage 80.
  • the slide carriage 80 is stabilized.
  • a counterweight may be provided at the right end of the slide carriage 80 at the position shown in FIG. Then, when the slide carriage 80 is moved from the position shown in FIG.
  • a passage to the conveyance space 6 can be opened, and for example, articles can be taken out from the shelves 8 and 10. Further, even if the article cannot be taken out, an operator can freely enter and leave the transport space 6 to operate the jack 78, or a window that can be opened and closed is provided in a part of the outer plate 46 so that the jack 78 can be operated. .
  • the jack 78 may be provided not on the drawer shelf unit 72 but on the slide carriage 80 to raise and lower the frame 82.
  • the slide unit 86 is shifted to the left side of FIG. 6, the jack 78 is operated to lower the drawer shelf unit 72, and positioning.
  • the drawer shelf unit 72 is positioned by the pin 92 and the fitting member 93.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Handcart (AREA)

Abstract

L'invention concerne un stockeur qui peut comporter un port d'accès au stockeur et qui peut stocker des articles lourds, sans réduire l'efficacité de stockage. Un stockeur comporte : une étagère qui est en mesure de stocker une pluralité d'articles dans chacune de la direction longitudinale et de la direction verticale ; un espace de transport qui est disposé de manière parallèle par rapport à la direction longitudinale de l'étagère et dans lequel un dispositif de transport peut se déplacer ; une unité d'étagère coulissante qui peut être sortie du stockeur dans une direction perpendiculaire à la direction longitudinale dans la face horizontale et être renvoyée dans le stockeur et qui est une étagère, en mesure de stocker des articles, quand elle est renvoyée dans le stockeur ; et un élément de positionnement pour positionner l'unité d'étagère coulissante sur l'étagère. L'espace de transport et l'étagère sont renfermés à l'extérieur en une forme de boîte et constituent un corps de stockeur, et un passage jusque dans le stockeur est mis en œuvre par l'unité d'étagère coulissante en mesure de stocker des articles et l'unité d'étagère coulissante sortie du stockeur.
PCT/JP2014/072030 2013-10-07 2014-08-22 Stockeur et procédé permettant d'insérer et de sortir une unité d'étagère coulissante en provenance du stockeur WO2015052998A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015541470A JP6136082B2 (ja) 2013-10-07 2014-08-22 ストッカとストッカからの引出棚ユニットの出し入れ方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-209968 2013-10-07
JP2013209968 2013-10-07

Publications (1)

Publication Number Publication Date
WO2015052998A1 true WO2015052998A1 (fr) 2015-04-16

Family

ID=52812818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/072030 WO2015052998A1 (fr) 2013-10-07 2014-08-22 Stockeur et procédé permettant d'insérer et de sortir une unité d'étagère coulissante en provenance du stockeur

Country Status (3)

Country Link
JP (1) JP6136082B2 (fr)
TW (1) TW201515963A (fr)
WO (1) WO2015052998A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113124616A (zh) * 2019-12-30 2021-07-16 青岛海高设计制造有限公司 冷冻冷藏设备以及收纳设备

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61222867A (ja) * 1985-03-29 1986-10-03 昭和飛行機工業株式会社 航空機搭載用カ−トの拘束装置
JPH01109504U (fr) * 1988-01-18 1989-07-25
JPH0717607A (ja) * 1993-06-23 1995-01-20 Daifuku Co Ltd 台車集配装置
JPH08198407A (ja) * 1995-01-27 1996-08-06 Kumahira Safe Co Inc ファイルフォルダの自動入出庫装置
JPH0955009A (ja) * 1995-08-15 1997-02-25 Sony Corp カートリッジのオートチェンジャー
JPH11255321A (ja) * 1998-03-11 1999-09-21 Shinko Electric Co Ltd 手押し台車
JP3900923B2 (ja) * 2001-12-21 2007-04-04 アシスト シンコー株式会社 ストッカ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61222867A (ja) * 1985-03-29 1986-10-03 昭和飛行機工業株式会社 航空機搭載用カ−トの拘束装置
JPH01109504U (fr) * 1988-01-18 1989-07-25
JPH0717607A (ja) * 1993-06-23 1995-01-20 Daifuku Co Ltd 台車集配装置
JPH08198407A (ja) * 1995-01-27 1996-08-06 Kumahira Safe Co Inc ファイルフォルダの自動入出庫装置
JPH0955009A (ja) * 1995-08-15 1997-02-25 Sony Corp カートリッジのオートチェンジャー
JPH11255321A (ja) * 1998-03-11 1999-09-21 Shinko Electric Co Ltd 手押し台車
JP3900923B2 (ja) * 2001-12-21 2007-04-04 アシスト シンコー株式会社 ストッカ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113124616A (zh) * 2019-12-30 2021-07-16 青岛海高设计制造有限公司 冷冻冷藏设备以及收纳设备
CN113124616B (zh) * 2019-12-30 2023-08-08 青岛海高设计制造有限公司 冷冻冷藏设备以及收纳设备

Also Published As

Publication number Publication date
JP6136082B2 (ja) 2017-05-31
JPWO2015052998A1 (ja) 2017-03-09
TW201515963A (zh) 2015-05-01

Similar Documents

Publication Publication Date Title
JP6314713B2 (ja) 階間搬送設備
US9457480B2 (en) Transport device
TW546234B (en) Load storage equipment
TWI564229B (zh) 物品搬送設備
KR101328037B1 (ko) 클린룸용 자동창고와 자동창고에서의 물품 보관방법
TW201637967A (zh) 自動倉庫
US9919869B2 (en) Automated warehouse and operating method for the same
TW201806836A (zh) 滾子平台裝置、系統及其運送設備架之方法
TWI622473B (zh) 傳輸物品的機器人
JP5854136B2 (ja) 蓋開閉装置
JP2011184157A (ja) 昇降搬送装置
TW201730067A (zh) 保管裝置及搬送系統
WO2015052998A1 (fr) Stockeur et procédé permettant d'insérer et de sortir une unité d'étagère coulissante en provenance du stockeur
JP5622003B2 (ja) ストッカー
US20150357211A1 (en) Transport device
JP2010241510A (ja) 自動倉庫システム及びその容器移載方法
JP4929535B2 (ja) 高層収納棚
WO2016189975A1 (fr) Étagère à étages multiples et système de véhicule à déplacement aérien utilisant cette dernière
JP5332930B2 (ja) 自動倉庫
TW202144254A (zh) 移載設備以及容器的移載方法
JP2011241070A (ja) 自動倉庫装置
KR101421435B1 (ko) 기판보관용 챔버
JP2020512964A (ja) 垂直搬送装置を備える保管システム
JP2007224719A (ja) 自動貸金庫設備
JP2010265084A (ja) 工事用昇降装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14852130

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2015541470

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14852130

Country of ref document: EP

Kind code of ref document: A1